A material taking device, a mechanical arm and a chip production system

Abstract

The utility model discloses a kind of material taking device and mechanical arm and chip production system, the material taking device is used for chip taking, comprising: substrate;Clamping assembly is connected with the substrate, including the clamping jaw of tooth engagement setting, for chip clamping and fixing;Suction component is connected with the substrate, and intercommunication air path component, for chip adsorption and fixing.The material taking device and mechanical arm provided in the application, by having the clamping assembly and suction component of tooth engagement clamping jaw, chip is clamped and adsorbed and fixed, the combination of both, it can be applicable to different size chip fixed use, ensure that chip does not fall off in the process of transportation or assembly.Reduce the time of manual operation, improve the degree of automation of chip production, to improve the efficiency of overall production line.

Description

Technical Field

[0001] This utility model relates to the field of chip processing technology, and in particular to a material handling device, a robotic arm, and a chip production system. Background Technology

[0002] In the fields of semiconductor manufacturing and microelectronic packaging, the precise handling and transport of chips are key to ensuring product quality and production efficiency. During the semiconductor packaging process, a certain amount of air bubbles will exist, so debubbling equipment is needed to remove them.

[0003] The existing equipment has the following drawbacks: When placing chips into the vacuum degassing machine, the existing equipment usually requires manual handling to clamp the chips onto the processing station inside the degassing machine. Due to the different sizes of the chips, it is difficult for manual handling to accurately fix the chips when installing smaller chips, which makes it inconvenient to install the chips in the set position of the vacuum degassing machine and reduces the degassing efficiency of the chips. Utility Model Content

[0004] The technical problem to be solved by this utility model embodiment is to provide a material handling device, a robotic arm and a chip production system, which can pick up and fix chips by clamping and / or sucking.

[0005] To solve the above-mentioned technical problems, this utility model provides a chip picking device, which includes: a substrate; a clamping assembly connected to the substrate, including teeth-equipped grippers for clamping and fixing the chip; and a suction assembly connected to the substrate and connected to an air passage assembly for adsorbing and fixing the chip.

[0006] In one feasible implementation, the clamping assembly further includes a mounting plate, a motor, and a transmission component, wherein the mounting plate is connected to the base plate, the motor is disposed on the mounting plate, and the transmission component is connected to the output end of the motor, and is also connected to the mounting plate and the gripper, for driving the gripper to open and close under the drive of the motor.

[0007] In one feasible implementation, the transmission component includes a rotating shaft disposed at the power output end of the motor, a main gear disposed at the lower end of the rotating shaft, a driven gear rotatably disposed at the lower end of the mounting plate and symmetrically arranged, a rotating rod disposed on the side of the driven gear away from the main gear, a push plate rotatably disposed on the rotating rod and connected to the gripper, the push plate being connected to the mounting plate through a stabilizing rod, two driven gears meshing, and the main gear meshing with one driven gear.

[0008] In one feasible implementation, the suction assembly includes a connecting tube, an air inlet, and a suction cup, wherein the connecting tube is connected to the substrate and has a passage that communicates with the air inlet and the suction cup, and the air inlet is connected to an air passage assembly.

[0009] In one feasible implementation, the inner side of the gripper is provided with serrations and / or the inner side of the gripper is provided with an anti-slip pad.

[0010] Accordingly, the present invention also provides a robotic arm, including any of the material handling devices described above, and further including a robotic arm and a mounting base, wherein the mounting base is connected to the robotic arm and the material handling device.

[0011] In one feasible implementation, the substrate includes a connecting block disposed on the mounting base and a first mounting block and a second mounting block respectively connected to the connecting block, the clamping assembly being disposed on the first mounting block and the suction assembly being disposed on the second mounting block.

[0012] In one feasible implementation, the mounting base is movably connected to the base plate of the material handling device.

[0013] In one feasible implementation, the mounting base is provided with a fixed shaft, the connecting block is sleeved on the fixed shaft, the connecting block is fixedly connected to the mounting base by an adjusting bolt, the connecting block is provided with a fixing groove for fixing the adjusting bolt, and the mounting base is provided with a first fixing hole and a second fixing hole for installing the adjusting bolt.

[0014] Accordingly, this utility model also provides a chip manufacturing system, including any of the above-described material handling devices or robotic arms.

[0015] Implementing this utility model has the following beneficial effects:

[0016] The robotic arm provided in this application embodiment connects and mounts a picking device and a robotic arm via a mounting base. The picking device grips and holds chips using a clamping assembly with meshing jaws and a suction assembly. This combination allows for the securing of chips of different sizes, ensuring that chips do not fall off during transportation or assembly. This reduces manual operation time, increases the automation level of chip production, and thus improves the overall efficiency of the production line. By combining the clamping and suction assemblies, the robotic arm can better adapt to chips of various shapes and sizes, increasing the flexibility and applicability of the equipment. The meshing jaws and the suction function of the air-connected assembly provide more precise operational control, facilitating high-precision chip processing tasks. The modular design makes it easier to maintain or replace individual components, reducing long-term operating costs.

[0017] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0018] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application, and do not constitute an undue limitation of this application.

[0019] Figure 1 This is a three-dimensional structural diagram of a robotic arm provided in some embodiments of this application;

[0020] Figure 2 This is a three-dimensional structural diagram of the robotic arm provided in some embodiments of this application from another angle;

[0021] Figure 3 yes Figure 1 A partial 3D schematic diagram of the robotic arm shown;

[0022] Figure 4 This is a three-dimensional structural schematic diagram of the material handling device provided in some embodiments of this application;

[0023] Figure 5 yes Figure 3 A magnified view of part A in the image.

[0024] The reference numerals in the figure:

[0025] 1-Robotic arm; 11-Mounting base; 111-Fixed shaft; 1101-First fixing hole; 1102-Second fixing hole;

[0026] 2-Substrate; 21-Connecting block; 2101-Fixing groove; 22-First mounting block; 23-Second mounting block;

[0027] 3-Clamping assembly; 31-Mounting plate; 32-Motor; 33-Rotating shaft; 34-Main gear; 35-Driven gear; 36-Rotating rod; 37-Push plate; 38-Stabilizing rod; 39-Gripper;

[0028] 4-Suction assembly; 41-Connecting pipe; 42-Air inlet; 43-Suction cup;

[0029] 5-Adjusting bolt. Detailed Implementation

[0030] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0031] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0032] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0033] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0034] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0035] Please refer to Figures 1 to 5This application provides a robotic arm for chip manufacturing. The robotic arm includes a robotic arm 1, a mounting base 11, and a picking device. The mounting base 11 is connected to the robotic arm 1 and the picking device. The picking device is used to pick up chips. The picking device includes a substrate 2, a clamping assembly 3, and a suction assembly 4. The clamping assembly 3 is connected to the substrate 2 and includes toothed grippers 39 for clamping and fixing the chips. The suction assembly 4 is connected to the substrate 2 and communicates with an air passage assembly for adsorbing and fixing the chips.

[0036] The robotic arm provided in this embodiment connects the picking device and the robotic arm 1 via a mounting base 11. The picking device uses a clamping component 3 with teeth 39 and a suction component 4 to clamp and hold the chip. This combination allows for the fixing of chips of different sizes, ensuring that the chip does not fall off during transportation or assembly. For example, when degassing is required during chip manufacturing, the robotic arm can pick up the chip and transport it to a vacuum degassing machine for vacuum degassing. When the chip size is small, the robotic arm provided in this embodiment can use only the clamping component 3 to clamp and hold the chip, or only the suction component to hold and hold the chip, or it can use both the clamping component 3 and the suction component 4 to hold and hold the chip. This allows for precise clamping and suction of the chip, preventing it from slipping. This reduces manual operation time, increases the automation level of chip production, and thus improves the overall efficiency of the production line. The precise picking and placing mechanism reduces chip damage caused by improper operation, ensuring product quality and reducing the defect rate. By combining the gripping assembly 3 and the suction assembly 4, this robotic arm can better adapt to chips of various shapes and sizes, increasing the flexibility and applicability of the equipment. The meshing grippers 39 and the suction function of the connecting air passage assembly provide more precise operational control, facilitating high-precision chip processing tasks. The modular design makes it easier to maintain or replace individual components, reducing long-term operating costs.

[0037] In one feasible implementation, the mounting base 11 is movably connected to the substrate 2 of the picking device. This allows for flexible adjustment of the positional relationship between the picking device and the chip or other devices in the chip manufacturing system.

[0038] In one feasible implementation, the substrate 2 includes a connecting block 21 disposed on the mounting base 11, a first mounting block 22 disposed on the side of the connecting block 21 away from the mounting base 11, and a second mounting block 23 disposed at the lower end of the first mounting block 22. The clamping assembly 3 is disposed on the first mounting block 22, and the suction assembly 4 is disposed on the second mounting block 23. This design allows the first mounting block 22 and the second mounting block 23 to respectively mount the clamping assembly 3 and the suction assembly 4, and they are connected to the mounting base 11 via the connecting block 21. This allows the connecting block 21 to be adjusted in position on the mounting base 11, thereby ensuring that the clamping assembly 3 and the suction assembly 4 can be precisely aligned and clamp the chip, which is crucial for handling chips of different sizes, shapes, and positions.

[0039] In one feasible implementation, the mounting base 11 is provided with a fixed shaft 111, the connecting block 21 is sleeved on the fixed shaft 111, the connecting block 21 is fixedly connected to the mounting base 11 by an adjusting bolt 5, the connecting block 21 is provided with a fixing groove 2101 for fixing the adjusting bolt 5, and the mounting base 11 is provided with a first fixing hole 1101 and a second fixing hole 1102 for installing the adjusting bolt 5. The connecting block 21 is sleeved on the fixed shaft 111 of the mounting base 11, achieving initial positioning between the two. By adjusting the bolt 5 through the fixing groove 2101 on the connecting block 21 and screwing it into the first fixing hole 1101 or the second fixing hole 1102 on the mounting base 11, a firm connection between the connecting block 21 and the mounting base 11 is achieved, ensuring that the connecting block 21 and its clamping device will not shake or fall off during operation. When the adjusting bolt 5 passes through the fixing groove 2101 and the second fixing hole 1102, the clamping component 3 is used to fix larger chips. When the adjusting bolt 5 passes through the fixing groove 2101 and the first fixing hole 1101, the suction component is used to fix smaller chips.

[0040] In one feasible implementation, the first mounting block and the second mounting block can also be connected to the mounting base via other existing structures, which will not be elaborated here.

[0041] In one feasible implementation, the clamping assembly 3 further includes a mounting plate 31, a motor, and a transmission component. The mounting plate 31 is connected to the substrate 2. The motor is mounted on the mounting plate 31. The transmission component is connected to the output end of the motor, and also to the mounting plate 31 and the meshing jaws 39, used to drive the jaws 39 to open and close under the drive of the motor. This design, with the motor serving as the power source of the clamping assembly 3 and connected to the jaws 39 via the transmission component, achieves automated control of the jaws 39, enabling them to quickly and accurately perform the clamping and releasing actions on the chip. The jaws 39 in the clamping assembly 3 are symmetrically arranged about the mounting plate 31, a design that ensures the clamping force is evenly distributed on both sides of the chip, effectively preventing chip displacement, damage, or detachment caused by uneven clamping force.

[0042] In one feasible implementation, the transmission component includes a rotating shaft 33 disposed at the power output end of the motor 32, a main gear 34 disposed at the lower end of the rotating shaft 33, a driven gear 35 rotatably disposed at the lower end of the mounting plate 31 and symmetrically arranged, a rotating rod 36 disposed on the side of the driven gear 35 away from the main gear 34, a push plate 37 rotatably disposed on the rotating rod 36 and connected to the gripper 39, the push plate 37 being connected to the mounting plate 31 through a stabilizing rod 38, two driven gears 35 being meshed and connected, and the main gear 34 being meshed and connected to one driven gear 35. In this design, the motor 32 drives the rotating shaft 33 to rotate, causing the main gear 34 to mesh with a driven gear 35. This, in turn, causes the two driven gears 35 to drive the rotating rod 36 to move closer to each other, which in turn causes the gripper 39 to clamp and fix the chip. Through the meshing connection between the main gear 34 and the driven gear 35, as well as the transmission between the rotating rod 36 and the push plate 37, the power of the motor 32 is accurately transmitted to the gripper 39. This ensures that the gripper 39 can move according to the predetermined trajectory and force when clamping the chip, thus improving the clamping accuracy and stability.

[0043] In one feasible implementation, the suction assembly 4 includes a connecting tube 41, an air inlet 42, and a suction cup 43. The connecting tube 41 is connected to the substrate 2 and has a passageway communicating with the air inlet 42 and the suction cup 43. The air inlet 42 is connected to an air passage assembly. This design allows the suction assembly 4 to use the suction cup 43 as a clamping component, adsorbing the chip using negative pressure provided by an external air pump. The suction cup 43 precisely fixes the chip, making it suitable for smaller chips or chips requiring high surface quality. The soft, high-temperature resistant material of the suction cup 43 ensures a tight fit with the chip surface, guaranteeing a stable clamping effect. Simultaneously, the flexible contact of the suction cup 43 reduces stress concentration, protecting the integrity of the chip.

[0044] In one feasible implementation, the suction cup 43 of the suction component 4 is further provided with a curved tube assembly to extend the suction range of the suction cup 43 in picking up the chip. This allows the suction component 4 to pick up the chip simultaneously with the gripping component 3.

[0045] In one feasible implementation, the inner side of the gripper 39 is provided with serrations. The serrated structure can increase the friction with the contact surface of the object, thereby providing stronger gripping ability without increasing the pressure on the gripper 39, and improving the reliability and stability of chip gripping.

[0046] In one feasible implementation, an anti-slip pad is provided on the inner side of the gripper 39. The anti-slip pad increases the friction between the gripper 39 and the object being gripped (such as a chip), ensuring that the chip does not slip due to a smooth surface during handling. This is crucial for the handling of precision electronic components, as any mistake can lead to costly losses. Anti-slip pads made of appropriate materials can reduce physical damage to the product when gripping and releasing chips, preventing scratches or crushing, which is essential for maintaining chip quality. By reducing the possibility of slippage, the robot can place the chip more accurately in the predetermined position, improving positioning accuracy throughout the production process. Some anti-slip pad designs allow for a certain degree of elastic deformation, enabling them to better conform to chips of different shapes and sizes, increasing the application flexibility of the equipment.

[0047] In one feasible implementation, the inner side of the gripper 39 is provided with serrations and an anti-slip pad. This structure has the advantages of the aforementioned gripper 39, which will not be elaborated here.

[0048] Accordingly, this application also provides the aforementioned material handling device separately. The material handling device provided in this application has all the advantages of the aforementioned material handling device, which will not be repeated here.

[0049] Accordingly, this application also provides a chip manufacturing system. The chip manufacturing system includes any of the aforementioned pick-up devices or robotic arms. The chip manufacturing system provided in this application, by using the aforementioned pick-up devices or robotic arms, possesses all the advantages of the aforementioned pick-up devices or robotic arms.

[0050] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0051] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A robot arm, characterized in that, Includes a material handling device, the material handling device comprising: substrate, A clamping assembly, connected to the substrate, includes teeth-equipped grippers for clamping and fixing the chip. An adsorption component is connected to the substrate and connected to the gas path component for adsorbing and fixing the chip; It also includes a robotic arm and a mounting base, the mounting base being connected to the robotic arm and the material handling device; The substrate includes a connecting block disposed on the mounting base and a first mounting block and a second mounting block respectively connected to the connecting block. The clamping component is disposed on the first mounting block and the suction component is disposed on the second mounting block.

2. The robot of claim 1, wherein, The clamping assembly also includes a mounting plate, a motor, and transmission components. The mounting plate is connected to the base plate. The motor is mounted on the mounting plate. The transmission component is connected to the output end of the motor, and is also connected to the mounting plate and the gripper, and is used to drive the gripper to open and close under the drive of the motor.

3. The robot of claim 2, wherein, The transmission component includes a rotating shaft located at the power output end of the motor, a main gear located at the lower end of the rotating shaft, a driven gear rotatably located at the lower end of the mounting plate and symmetrically arranged, a rotating rod located on the side of the driven gear away from the main gear, a push plate rotatably located on the rotating rod and connected to the gripper, the push plate being connected to the mounting plate via a stabilizing rod, two driven gears meshing, and the main gear meshing with one driven gear.

4. The robot of claim 1, wherein, The suction assembly includes a connecting tube, an air inlet, and a suction cup. The connecting tube is connected to the substrate and has a passage that communicates with the air inlet and the suction cup. The air inlet is connected to an air passage assembly.

5. The robotic arm according to claim 1, characterized in that, The inner side of the gripper is provided with serrations and / or the inner side of the gripper is provided with an anti-slip pad.

6. The robot of claim 1, wherein, The mounting base is movably connected to the base plate of the material handling device.

7. The robot of claim 6, wherein, The mounting base is provided with a fixed shaft, the connecting block is sleeved on the fixed shaft, the connecting block is fixedly connected to the mounting base by an adjusting bolt, the connecting block is provided with a fixing groove for fixing the adjusting bolt, and the mounting base is provided with a first fixing hole and a second fixing hole for installing the adjusting bolt.

8. A chip production system characterized by comprising: Including the robotic arm as described in any one of claims 1-7.

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