A CVD coating apparatus

Abstract

This utility model discloses a CVD coating equipment, including a main body composed of a front cover, a rear cover, and a barrel. The front and rear covers are rotatably connected to the barrel. The equipment also includes a gas path system, a power system, and a coating system and a heating system disposed within the barrel. The coating system includes a coating rack fixed within the barrel and at least two sets of coating units sliding on the coating rack. Each coating unit can hold several sets of materials to be coated. Each coating unit includes a tray and several sets of cylindrical columns fixed on the tray, with the material fitted onto the cylindrical columns. This utility model features a coating rack inside the barrel, with rollers at the bottom of the tray slidably connected to the coating rack, allowing for manual inward or outward movement. Several sets of pipes are placed on the tray, and a thermocouple is installed on the inner wall of the barrel. Temperature changes inside the barrel can be controlled by adjusting the current externally, adapting to the coating characteristics of different materials.

Description

Technical Field

[0001] This utility model belongs to the field of CVD production technology, and in particular relates to a CVD coating equipment used on valves and pipelines. Background Technology

[0002] CVD, short for Chemical Vapor Deposition, is a chemical reaction process. It involves heating one or more gases (called precursors) to decompose them, producing reaction products that are then deposited on a semiconductor surface to form the desired thin film. CVD technology can be divided into two types: thermal CVD and plasma-enhanced CVD (PECVD). Thermal CVD, the earliest developed CVD technology, decomposes the precursors through heating, producing reaction products that are then deposited on the surface. PECVD, on the other hand, creates a plasma within the reaction chamber, making the precursors easier to decompose and increasing the reaction rate.

[0003] CVD coating is frequently used in the production of valves and pipelines to improve the material properties of the pipeline surface. However, currently, small coating equipment cannot be placed into large-sized pipelines, and large coating equipment requires hoisting equipment for both removal and placement, which is very troublesome. Moreover, general coating equipment does not have a temperature control system, so the temperature cannot be adjusted during the coating process, and it is impossible to make targeted adjustments for special materials. Summary of the Invention

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A CVD coating equipment includes an equipment body consisting of a front cover, a rear cover, and a barrel, wherein the front cover and the rear cover are rotatably connected to the barrel, and also includes an air circuit system, a power system, and a coating system and a heating system disposed in the barrel.

[0006] The coating system includes a coating frame fixed inside the barrel and at least two sets of coating units that slide on the coating frame. Each coating unit can hold several sets of materials to be coated.

[0007] The coating unit includes a tray and several sets of cylindrical columns fixed on the tray. The material is fitted onto the cylindrical columns. The bottom of the tray is provided with a sliding structure, and the tray is slidably connected to the coating frame through the sliding structure.

[0008] The heating system is a thermocouple, which is installed on the inner wall of the barrel. Multiple sets of thermocouples form a heating grid placed on the inner side wall of the barrel.

[0009] Furthermore, the sliding structure is a roller, and the coating frame is provided with a guide rail that matches the roller. The tray slides outward / inward on the coating frame via the roller.

[0010] Furthermore, the heating grid formed by the heating system is placed on both sides of the coating unit.

[0011] Furthermore, the front hatch cover includes a hatch and a locking disc rotatably connected to the barrel body, and also includes at least one set of driving elements for driving the locking disc to rotate. When the driving elements drive the locking disc to rotate, the hatch can be locked / unlocked.

[0012] Furthermore, the lock disc is provided with a number of lock blocks at intervals, each lock block has an inclined surface, and the hatch has a lock groove that matches the lock block. When the lock disc rotates, the lock block enters the lock groove and locks itself.

[0013] Furthermore, the driving element is a cylinder.

[0014] Furthermore, the hatch is also equipped with an observation window.

[0015] The beneficial effects of this utility model are:

[0016] 1. This utility model sets a coating rack inside the barrel, and two sets of trays are set on the coating rack. The bottom of the trays is slidably connected to the coating rack by rollers, and can be manually pushed inward or outward. Several sets of pipes are placed on the trays. The inner wall of the barrel is equipped with a thermocouple. The temperature change inside the barrel can be controlled by adjusting the current from the outside. It can be adapted to the coating characteristics of different materials.

[0017] 2. The front cover of this utility model is divided into a hatch and a lock disc. The lock disc is provided with several locking blocks at intervals. The locking blocks are provided with inclined surfaces, and the hatch side is provided with a lock groove that matches the locking blocks. In use, the lock disc is rotated by a drive element to quickly lock or release the hatch, completing the automatic opening and closing, which is convenient to use. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the coating system structure of this utility model;

[0022] Figure 4 This is a side view of the coating system of this utility model;

[0023] Figure 5 This is a schematic diagram of the coating unit of this utility model;

[0024] Figure 6 This is a schematic diagram of the heating system structure of this utility model;

[0025] Figure 7 This is a schematic diagram of the front compartment cover structure of this utility model;

[0026] Figure 8 yes Figure 7 A magnified view of part A;

[0027] Explanation of reference numerals in the attached figures:

[0028] 1. Equipment body; 2. Front cover; 21. Door; 211. Lock groove; 212. Lock groove; 22. Lock disc; 221. Lock block; 222. Inclined surface; 23. Drive element; 3. Rear cover; 4. Barrel; 5. Air system; 6. Power system; 7. Coating system; 71. Coating frame; 72. Coating unit; 721. Pallet; 722. Cylindrical column; 723. Sliding structure; 73. Material; 8. Heating system. Detailed Implementation

[0029] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention. Specific Implementation

[0030] like Figures 1 to 8 A CVD coating apparatus is shown, comprising an apparatus body 1 consisting of a front cover 2, a rear cover 3, and a barrel 4. The front cover 2 and the rear cover 3 are rotatably connected to the barrel 4. The apparatus also includes a pneumatic system 5, a power system 6, a coating system 7, and a heating system 8 disposed within the barrel 4. Specifically, the front cover 2 includes a door 21 and a locking disc 22 rotatably connected to the barrel 4, and at least one set of driving elements 23 for rotating the locking disc 22. When the driving elements 23 drive the locking disc 22 to rotate, the door 21 can be locked / unlocked. The locking disc 22 has several locking blocks 221 spaced apart, each with a bevel 222. The door 21 has locking grooves 211 that match the locking blocks 221. When the locking disc 22 rotates, the locking blocks 221 enter the locking grooves 211 and lock. Preferably, the driving element 23 is a cylinder. Of course, for ease of observation, the hatch 21 is also equipped with an observation window 212. Figure 1 As shown.

[0031] The coating system 7 includes a coating rack 71 fixed inside the barrel 4 and at least two sets of coating units 72 that slide on the coating rack 71. The coating unit 72 can hold several sets of materials 73 to be coated. Specifically, the coating unit 72 includes a tray 721 and several sets of cylindrical columns 722 fixed on the tray 721. The materials 73 are fitted onto the cylindrical columns 722. The bottom of the tray 721 is provided with a sliding structure 723. The tray 721 is slidably connected to the coating rack 71 through the sliding structure 723. Considering ease of manufacturing and heat resistance, the sliding structure 723 is specifically a roller. The coating rack 71 is provided with a guide rail that matches the roller. The tray 721 slides outward / inward on the coating rack 71 through the roller.

[0032] The heating system 8 is a thermocouple, which is installed on the inner wall of the barrel 4. Multiple sets of thermocouples form a heating mesh placed on the inner side wall of the barrel 4. Specifically, the heating mesh formed by the heating system 8 is placed on both sides of the coating unit 72.

[0033] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A CVD coating equipment, comprising an equipment body (1) consisting of a front cover (2), a rear cover (3), and a barrel (4), wherein the front cover (2) and the rear cover (3) are rotatably connected to the barrel (4), characterized in that: It also includes an air system (5) and a power system (6), as well as a coating system (7) and a heating system (8) disposed in the barrel (4); The coating system (7) includes a coating rack (71) fixed inside the barrel (4) and at least two sets of coating units (72) that slide on the coating rack (71). The coating unit (72) can hold several sets of materials (73) to be coated. The coating unit (72) includes a tray (721) and several sets of cylindrical columns (722) fixed on the tray (721). The material (73) is sleeved on the cylindrical columns (722). The bottom of the tray (721) is provided with a sliding structure (723). The tray (721) is slidably connected to the coating frame (71) through the sliding structure (723). The heating system (8) is a thermocouple, which is installed on the inner wall of the barrel (4). Multiple sets of thermocouples form a heating grid placed on the inner side wall of the barrel (4).

2. The CVD coating equipment according to claim 1, characterized in that: The sliding structure (723) is a roller, and the coating frame (71) is provided with a guide rail that matches the roller. The tray (721) slides outward / inward on the coating frame (71) via the roller.

3. The CVD coating equipment according to claim 1, characterized in that: The heating grid formed by the heating system (8) is placed on both sides of the coating unit (72).

4. The CVD coating equipment according to claim 1, characterized in that: The front hatch cover (2) includes a hatch (21) and a lock disc (22) rotatably connected to the barrel body (4), and also includes at least one set of drive elements (23) for driving the lock disc (22) to rotate. When the drive elements (23) drive the lock disc (22) to rotate, the hatch (21) can be locked / unlocked.

5. The CVD coating equipment according to claim 4, characterized in that: The lock disc (22) is provided with a number of lock blocks (221) spaced apart. The lock blocks (221) are provided with inclined surfaces (222). The hatch (21) is provided with lock grooves (211) that match the lock blocks (221). When the lock disc (22) rotates, the lock blocks (221) enter the lock grooves (211) and lock.

6. The CVD coating equipment according to claim 4, characterized in that: The driving element (23) is a cylinder.

7. The CVD coating equipment according to claim 4, characterized in that: The hatch (21) is also equipped with an observation window (212).

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