Transmission device and cleaning equipment

Abstract

This utility model belongs to the field of silicon wafer processing technology, and particularly relates to a transmission device and cleaning equipment. The transmission device includes: a pair of spaced-apart support plates and a plurality of transmission rollers, the transmission rollers being arranged parallel between the two support plates and rotatably connected to the support plates; a drive mechanism configured to drive each transmission roller to rotate synchronously; transmission roller gears are sleeved on some adjacent transmission rollers, and a bearing gear mechanism is arranged between two adjacent transmission roller gears, the bearing gear mechanism being arranged on the corresponding support plates, the two adjacent transmission roller gears meshing with the bearing gear mechanism between them, and one transmission roller being connected to the drive mechanism, while the other transmission roller rotates through the bearing gear mechanism, thereby reducing the number of transmission rollers meshing with the drive mechanism and reducing friction.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer processing technology, and in particular relates to a transmission device and a cleaning equipment. Background Technology

[0002] In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. Currently, the most common cleaning equipment is tank-type equipment and chain equipment. Chain equipment typically uses drive rollers to transport silicon wafers. Each drive roller is located above the chemical solution tank, and the rotation of the drive rollers carries the liquid to clean the silicon wafers. However, related technologies such as CN219267624U disclose a transmission system and etching cleaning equipment, which uses a main drive shaft that meshes with each drive roller through gears to drive the drive rollers. During high-speed rotation, the gears on the main drive shaft and the gears on the drive rollers generate friction, causing wear and dust shedding. This dust can enter the chemical solution tank, contaminating the chemical solution and causing economic losses.

[0003] Therefore, due to the friction between the gears caused by the meshing of each transmission roller with the main transmission shaft, resulting in wear and dust that can enter the liquid tank and contaminate the liquid, a transmission device and cleaning equipment need to be designed.

[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0005] This disclosure provides at least one transmission device and a cleaning device.

[0006] In a first aspect, embodiments of this disclosure provide a transmission device, including:

[0007] A pair of spaced-apart support plates, and

[0008] A plurality of drive rollers are arranged in parallel between two support plates and are rotatably connected to the support plates;

[0009] A drive mechanism configured to drive each transmission roller to rotate synchronously;

[0010] A transmission roller gear is fitted on two adjacent transmission rollers, and a bearing gear mechanism is provided between the two adjacent transmission roller gears. The bearing gear mechanism is set on the corresponding support plate. The two adjacent transmission roller gears mesh with the bearing gear mechanism between them. One of the transmission rollers is connected to the drive mechanism, and the other transmission roller rotates through the bearing gear mechanism.

[0011] In one optional embodiment, the bearing gear mechanism includes:

[0012] A fixed shaft is fixedly mounted on the support plate;

[0013] A bearing, which is sleeved on the fixed shaft;

[0014] A gear is fitted outside the bearing and meshes with transmission roller gears on both sides.

[0015] In one optional embodiment, a rolling bearing is fitted at one end of the transmission roller to rotatably connect it to the support plate via the rolling bearing.

[0016] In two adjacent transmission rollers fitted with transmission roller gears, one transmission roller has a first helical gear fitted at the other end, the other transmission roller does not have a first helical gear fitted at the other end, and the other transmission rollers each have a first helical gear fitted at one end.

[0017] In one optional implementation, the drive mechanism includes:

[0018] A drive shaft is fitted with a second helical gear corresponding to the first helical gear, and the second helical gear meshes with the corresponding first helical gear.

[0019] The drive shaft is connected to the drive motor so that the drive motor can drive the drive shaft to rotate.

[0020] In one optional implementation, the drive mechanism further includes:

[0021] A number of fixed members are provided, through which the drive shaft passes, and a rolling bearing is provided between the drive shaft and the fixed members to enable a rotatable connection between the drive shaft and the fixed members.

[0022] Secondly, embodiments of this disclosure also provide a cleaning device, comprising:

[0023] The housing, and the transmission device disposed within the housing;

[0024] The transmission device is adapted to use the aforementioned transmission device, and the transmission device is adapted to transport silicon wafers.

[0025] In one optional embodiment, a water film device and a cleaning tank are provided inside the housing;

[0026] The water film device is configured to form a water film on the front side of a silicon wafer transported by a transmission device;

[0027] The cleaning tank is configured to etch the back side of the silicon wafer on which the water film is formed.

[0028] In one optional embodiment, the housing is provided with a feed port and a discharge port;

[0029] The silicon wafers enter the housing through the loading port and are transported by a transmission device. The etched silicon wafers are then discharged from the housing through the unloading port.

[0030] In one alternative embodiment, the housing is provided with a plurality of ventilation devices configured to exhaust gas from inside the housing to the outside of the housing.

[0031] In one optional embodiment, the transmission device includes:

[0032] A pair of spaced-apart support plates, and

[0033] A plurality of drive rollers are arranged in parallel between two support plates and are rotatably connected to the support plates;

[0034] A drive mechanism configured to drive each transmission roller to rotate synchronously in order to support and transport the silicon wafer;

[0035] A transmission roller gear is fitted on two adjacent transmission rollers, and a bearing gear mechanism is provided between the two adjacent transmission roller gears. The bearing gear mechanism is set on the corresponding support plate. The two adjacent transmission roller gears mesh with the bearing gear mechanism between them. One of the transmission rollers is connected to the drive mechanism, and the other transmission roller rotates through the bearing gear mechanism.

[0036] The beneficial effects of this utility model are as follows: This transmission device includes: a pair of spaced-apart support plates and a plurality of transmission rollers, wherein the transmission rollers are arranged parallel between the two support plates and are rotatably connected to the support plates; a drive mechanism configured to drive each transmission roller to rotate synchronously; transmission roller gears are sleeved on two adjacent transmission rollers, and a bearing gear mechanism is provided between two adjacent transmission roller gears, wherein the bearing gear mechanism is set on the corresponding support plate, the two adjacent transmission roller gears mesh with the bearing gear mechanism between them, and one transmission roller is connected to the drive mechanism, while the other transmission roller rotates through the bearing gear mechanism, thereby reducing the number of transmission rollers meshing with the drive mechanism and reducing friction.

[0037] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0038] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0039] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of a transmission device provided in an embodiment of the present disclosure;

[0041] Figure 2 This is a schematic diagram of the structure of a transmission roller provided in an embodiment of the present disclosure;

[0042] Figure 3 An exploded view of a bearing gear mechanism provided in an embodiment of this disclosure;

[0043] Figure 4 This is a schematic diagram of the structure of a cleaning device provided in an embodiment of this disclosure.

[0044] In the picture:

[0045] 1. Cleaning equipment;

[0046] 2. Water film device;

[0047] 3. Housing, 31. Feed port, 32. Discharge port;

[0048] 4. Transmission device, 41. Support plate, 42. Transmission roller, 421. Transmission roller gear, 422. Rolling bearing, 423. First helical gear, 43. Bearing gear mechanism, 431. Fixed shaft, 432. Bearing, 433. Gear, 44. Transmission shaft, 441. Second helical gear, 442. Fixing component;

[0049] 5 cleaning tanks;

[0050] 6 silicon wafers;

[0051] 7. Ventilation device. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0053] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0054] In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. Currently, the most common cleaning equipment is tank-type equipment and chain equipment. Chain equipment typically uses drive rollers to transport silicon wafers. Each drive roller is located above the chemical solution tank, and the rotation of the drive rollers carries the liquid to clean the silicon wafers. In related technologies, a main drive shaft is used to mesh with each drive roller through gears to drive the drive rollers. During high-speed rotation, the gears on the main drive shaft and the gears on the drive rollers generate friction, causing wear and dust shedding. This dust can enter the chemical solution tank, contaminating the chemical solution and causing economic losses.

[0055] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.

[0056] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0057] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0058] like Figure 1As shown, at least one disclosed embodiment provides a transmission device 4, including: a pair of spaced-apart support plates 41 and a plurality of transmission rollers 42, the transmission rollers 42 being arranged parallel between the two support plates 41 and rotatably connected to the support plates 41; a drive mechanism configured to drive each transmission roller 42 to rotate synchronously; transmission roller gears 421 are sleeved on two partially adjacent transmission rollers 42, and a bearing gear mechanism 43 is provided between two adjacent transmission roller gears 421, the bearing gear mechanism 43 being disposed on the corresponding support plate 41, the two adjacent transmission roller gears 421 meshing with the bearing gear mechanism 43 between them, and one of the transmission rollers 42 being connected to the drive mechanism, while the other transmission roller 42 rotating through the bearing gear mechanism 43, thereby reducing the number of transmission rollers 42 meshing with the drive mechanism and reducing friction.

[0059] In this embodiment, by setting the bearing gear mechanism 43, only one of the two adjacent transmission rollers 42 needs to mesh with the drive mechanism, while the other transmission roller 42 rotates synchronously through the bearing gear mechanism 43, thereby reducing the number of transmission rollers 42 meshing with the drive mechanism and thus reducing friction.

[0060] like Figure 3 As shown, in an optional embodiment, the bearing gear mechanism 43 includes: a fixed shaft 431, which is fixedly mounted on the support plate 41; a bearing 432, which is sleeved on the fixed shaft 431; and a gear 433, which is sleeved outside the bearing 432, and the gear 433 meshes with the transmission roller gears 421 on both sides; the gear 433 in the bearing gear mechanism 43 can rotate under the action of the bearing 432, converting the friction of the gear 433 meshing into the rotation of the bearing 432, thereby reducing wear and dust shedding.

[0061] like Figure 2 As shown, in one optional embodiment, one end of the transmission roller 42 is fitted with a rolling bearing 422 to be rotatably connected to the support plate 41 through the rolling bearing 422; among two adjacent transmission rollers 42 fitted with transmission roller gear 421, the other end of one transmission roller 42 is fitted with a first helical gear 423, the other end of the other transmission roller 42 is not fitted with a first helical gear 423, and the other ends of each of the other transmission rollers 42 are fitted with a first helical gear 423.

[0062] In this embodiment, the first helical gear 423 is disposed at one end of the transmission roller 42 near the drive mechanism, and the bearing gear mechanism 43 is disposed on the support plate 41 near the drive mechanism.

[0063] In this embodiment, the transmission roller 42 equipped with the first helical gear 423 meshes with the corresponding second helical gear 441 in the drive mechanism so that these transmission rollers 42 rotate synchronously when the transmission shaft 44 rotates. The transmission roller 42 without the first helical gear 423 meshes with the gear 433 in the bearing gear mechanism 43 through the transmission roller gear 421 to achieve synchronous rotation with other transmission rollers 42.

[0064] In this embodiment, the transmission roller 42 is connected to one of the support plates 41 by rolling bearings 422. These rolling bearings 422 are embedded in the support plate 41, which ensures that the transmission roller 42 rotates while further reducing wear and powder shedding.

[0065] In one optional embodiment, the drive mechanism includes: a drive shaft 44 on which a second helical gear 441 corresponding to the first helical gear 423 is sleeved, the second helical gear 441 meshing with the corresponding first helical gear 423; the drive shaft 44 is connected to a drive motor to drive the drive shaft 44 to rotate.

[0066] In this embodiment, the second helical gears 441 on the transmission shaft 44 are rotated synchronously by a drive motor.

[0067] In one optional embodiment, the drive mechanism further includes: a plurality of fixing members 442, through which the drive shaft 44 passes, and a rolling bearing 422 is provided between the drive shaft 44 and the fixing members 442 to enable a rotatable connection between the drive shaft 44 and the fixing members 442.

[0068] In this embodiment, a rolling bearing 422 is sleeved on the drive shaft 44. The rolling bearing 422 is connected to the fixing member 442, so that the drive shaft 44 and the fixing member 442 can rotate. This facilitates the support of the drive shaft 44 and does not hinder the rotation of the drive shaft 44, thereby reducing the wear between the drive shaft 44 and the fixing member 442.

[0069] like Figure 4 As shown, at least one other disclosed embodiment also provides a cleaning device 1, including: a housing 3, and a transmission device 4 disposed within the housing 3; the transmission device 4 is adapted to employ the aforementioned transmission device 4, and the transmission device 4 is adapted to transport silicon wafers 6.

[0070] In one optional embodiment, the housing 3 is provided with a water film device 2 and a cleaning tank 5; the water film device 2 is configured to form a water film on the front side of the silicon wafer 6 transported by the transmission device 4; the cleaning tank 5 is configured to etch on the back side of the silicon wafer 6 where the water film is formed.

[0071] In this embodiment, the water film device 2 can spray pure water and form a water film on the front side of the silicon wafer 6 to protect the front side of the silicon wafer 6, that is, the side facing upward when the silicon wafer 6 is placed on the transmission roller 42.

[0072] In this embodiment, the cleaning tank 5 contains a cleaning solution, and the transmission roller 42 is partially immersed in the cleaning solution in the cleaning tank 5. The transmission roller 42 is provided with a grooved tooth structure. When the transmission roller 42 rotates, the cleaning solution will adhere to the roller body, thereby cleaning the back side of the silicon wafer 6.

[0073] In one optional embodiment, the housing 3 is provided with a loading port 31 and a unloading port 32; the silicon wafer 6 enters the housing 3 through the loading port 31 and is transported by the transmission device 4, and the etched silicon wafer 6 is transported out of the housing 3 through the unloading port 32.

[0074] In one alternative embodiment, a plurality of exhaust devices 7 are provided inside the housing 3, and the exhaust devices 7 are configured to discharge the gas inside the housing 3 to the outside of the housing 3.

[0075] In this embodiment, the cleaning solution will release acidic or alkaline gases during the cleaning process, and the exhaust device 7 can expel these gases from the housing 3.

[0076] In one optional embodiment, the transmission device 4 includes: a pair of spaced-apart support plates 41 and a plurality of transmission rollers 42, the transmission rollers 42 being arranged parallel between the two support plates 41 and rotatably connected to the support plates 41; a drive mechanism configured to drive each transmission roller 42 to rotate synchronously to support and transport the silicon wafer 6; transmission roller gears 421 are sleeved on two partially adjacent transmission rollers 42, and a bearing gear mechanism 43 is provided between two adjacent transmission roller gears 421, the bearing gear mechanism 43 being disposed on the corresponding support plate 41, the two adjacent transmission roller gears 421 meshing with the bearing gear mechanism 43 between them, and one of the transmission rollers 42 being connected to the drive mechanism, while the other transmission roller 42 rotating through the bearing gear mechanism 43.

[0077] In summary, the transmission device 4 includes: a pair of spaced-apart support plates 41 and a plurality of transmission rollers 42, wherein the transmission rollers 42 are arranged parallel between the two support plates 41 and are rotatably connected to the support plates 41; a drive mechanism configured to drive each transmission roller 42 to rotate synchronously; transmission roller gears 421 are sleeved on two adjacent transmission rollers 42, and a bearing gear mechanism 43 is provided between two adjacent transmission roller gears 421, wherein the bearing gear mechanism 43 is provided on the corresponding support plate 41, the two adjacent transmission roller gears 421 mesh with the bearing gear mechanism 43 between them, and one of the transmission rollers 42 is connected to the drive mechanism, while the other transmission roller 42 rotates through the bearing gear mechanism 43, thereby reducing the number of transmission rollers 42 meshing with the drive mechanism and reducing friction.

[0078] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0079] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0080] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0081] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A transmission device, characterized in that, include: A pair of spaced-apart support plates (41), and A plurality of drive rollers (42) are arranged in parallel between two support plates (41), and the drive rollers (42) are rotatably connected to the support plates (41); A drive mechanism configured to drive each transmission roller (42) to rotate synchronously; A transmission roller gear (421) is fitted on two adjacent transmission rollers (42), and a bearing gear mechanism (43) is provided between the two adjacent transmission roller gears (421). The bearing gear mechanism (43) is set on the corresponding support plate (41). The two adjacent transmission roller gears (421) mesh with the bearing gear mechanism (43) between them. One of the transmission rollers (42) is connected to the drive mechanism, and the other transmission roller (42) rotates through the bearing gear mechanism (43).

2. The transmission device as described in claim 1, characterized in that: The bearing gear mechanism (43) includes: A fixed shaft (431) is fixedly mounted on the support plate (41); The bearing (432) is sleeved on the fixed shaft (431); Gear (433) is sleeved outside the bearing (432) and meshes with the drive roller gears (421) on both sides.

3. The transmission device as described in claim 1, characterized in that: One end of the transmission roller (42) is fitted with a rolling bearing (422) so as to be rotatably connected to the support plate (41) through the rolling bearing (422); Among two adjacent transmission rollers (42) fitted with transmission roller gear (421), one transmission roller (42) has a first helical gear (423) fitted at the other end, the other transmission roller (42) does not have a first helical gear (423) fitted at the other end, and the other transmission rollers (42) all have a first helical gear (423) fitted at the other end.

4. The transmission device as described in claim 3, characterized in that: The drive mechanism includes: A drive shaft (44) is fitted with a second helical gear (441) corresponding to the first helical gear (423), and the second helical gear (441) meshes with the corresponding first helical gear (423); The drive shaft (44) is connected to the drive motor so as to drive the drive shaft (44) to rotate through the drive motor.

5. The transmission device as described in claim 4, characterized in that: The drive mechanism also includes: A number of fixing members (442) are provided, through which the drive shaft (44) passes, and a rolling bearing (422) is provided between the drive shaft (44) and the fixing member (442) to enable the drive shaft (44) and the fixing member (442) to be rotatably connected.

6. A cleaning device, characterized in that, include: Housing (3), and transmission device (4) disposed within the housing (3); The transmission device (4) is adapted to use the transmission device (4) as described in any one of claims 1-5, and the transmission device (4) is adapted to transport silicon wafers (6).

7. The cleaning equipment as described in claim 6, characterized in that: The housing (3) is provided with a water film device (2) and a cleaning tank (5); The water film device (2) is configured to form a water film on the front side of the silicon wafer (6) transported by the transmission device (4); The cleaning tank (5) is configured to etch on the back side of the silicon wafer (6) on which the water film is formed.

8. The cleaning equipment as described in claim 6, characterized in that: The housing (3) is provided with a feed port (31) and a discharge port (32). The silicon wafer (6) enters the housing (3) through the loading port (31) and is transported by the transmission device (4). The etched silicon wafer (6) is then discharged from the housing (3) through the unloading port (32).

9. The cleaning equipment as described in claim 6, characterized in that: The housing (3) is provided with a plurality of exhaust devices (7), which are configured to exhaust the gas inside the housing (3) to the outside of the housing (3).

10. The cleaning equipment as described in claim 6, characterized in that: The transmission device (4) includes: A pair of spaced-apart support plates (41), and A plurality of drive rollers (42) are arranged in parallel between two support plates (41), and the drive rollers (42) are rotatably connected to the support plates (41); A drive mechanism configured to drive each transmission roller (42) to rotate synchronously to support and transport the silicon wafer (6). A transmission roller gear (421) is fitted on two adjacent transmission rollers (42), and a bearing gear mechanism (43) is provided between the two adjacent transmission roller gears (421). The bearing gear mechanism (43) is set on the corresponding support plate (41). The two adjacent transmission roller gears (421) mesh with the bearing gear mechanism (43) between them. One of the transmission rollers (42) is connected to the drive mechanism, and the other transmission roller (42) rotates through the bearing gear mechanism (43).

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