An adjustable continuous aperture assembly

Abstract

The utility model discloses a kind of adjustable continuous diaphragm components, it is related to photoetching machine diaphragm technical field, the adjustable continuous diaphragm component, including optical lens, the outside of optical lens is provided with outer shroud, the lower end of outer shroud is provided with upper fixed plate, the lower end of upper fixed plate is provided with continuously adjustable diaphragm, the lower end of continuously adjustable diaphragm is provided with diaphragm installation compression ring, one side of diaphragm installation compression ring is provided with lever middle section, the lower end of lever middle section is provided with lever fixed block, one end of lever middle section is provided with external lever, lever middle section is fixed between lever fixed block and upper fixed plate, and small gap is retained simultaneously to ensure that lever middle section can rotate left and right, the present scheme solves the problem that existing full-automatic approach type photoetching machine is basically fixed optical parameter after factory shipment, it is difficult to change optical parameter, so as to inconveniently adapt to the different process route of customer.

Description

Technical Field

[0001] This utility model relates to the field of lithography machine aperture technology, specifically an adjustable continuous aperture assembly. Background Technology

[0002] The aperture in a lithography machine is a key component for controlling the intensity and distribution of light. It primarily controls the size and shape of the light spot by limiting the propagation and scattering of light. Apertures include circular and square apertures, which limit the propagation and scattering of light, thereby controlling the formation and distribution of the light spot.

[0003] For example, Chinese authorized patent CN114488700B (A Variable Aperture and Lithography Machine) includes an X-axis component and a Y-axis component. The X-axis component includes: an X-axis slide rail; two X-axis sliders spaced apart along the X-axis on the X-axis slide rail; an X-axis blade disposed on the X-axis sliders; and an X-axis drive device connected to the X-axis sliders. The Y-axis component includes: a Y-axis slide rail; two Y-axis sliders spaced apart along the Y-axis on the Y-axis slide rail; a Y-axis blade disposed on the Y-axis sliders; and a Y-axis drive device connected to the Y-axis sliders. The X-axis blades on the two X-axis sliders and the Y-axis blades on the two Y-axis sliders together form a slit window for exposure. This invention also discloses a lithography machine including the aforementioned variable aperture. This invention has a compact structure and can increase the blade's travel distance, improving blade operation stability.

[0004] However, existing fully automated proximity lithography machines have basically fixed optical parameters after leaving the factory, making it difficult to change the optical parameters and thus inconvenient to adapt to different customer process routes. Therefore, they do not meet the existing needs. To address this, we have proposed an adjustable continuous aperture assembly. Utility Model Content

[0005] The purpose of this invention is to provide an adjustable continuous aperture assembly to solve the problem mentioned in the background art that the existing fully automatic proximity lithography machines have basically fixed optical parameters after leaving the factory, making it difficult to change the optical parameters and thus inconvenient to adapt to different customer process routes.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an adjustable continuous aperture assembly, comprising: an optical lens, an outer protective cover disposed on the outside of the optical lens, an upper fixing plate disposed at the lower end of the outer protective cover, a continuously adjustable aperture disposed at the lower end of the upper fixing plate, an aperture mounting ring disposed at the lower end of the continuously adjustable aperture, a lever middle section disposed on one side of the aperture mounting ring, a lever fixing block disposed at the lower end of the lever middle section, and an external lever disposed at one end of the lever middle section.

[0007] Preferably, the middle section of the lever is fixed between the lever fixing block and the upper fixing plate, while maintaining a very small gap to ensure that the middle section of the lever can rotate left and right, and the lever fixing block is made of copper.

[0008] Preferably, the upper surface of the middle section of the lever is provided with an embedded groove, and a ball screw is embedded inside the embedded groove. The lower surface of the upper fixing plate is provided with ball holes, and there are multiple ball holes. The top of the ball screw is inserted into the ball hole.

[0009] Preferably, a fixing bolt is provided at the edge of the aperture mounting ring, and the aperture mounting ring is fixed to the upper fixing plate by the fixing bolt. A through groove is provided at the center of the upper fixing plate, and the through groove penetrates the upper fixing plate.

[0010] Preferably, the upper fixed plate is provided with an installation pipe at the upper end near the middle section of the lever, and multiple installation pipes are provided. The bottom end of the installation pipe is fixed with a sensor. A sensor indicator light is provided on one side of the installation pipe, and the input end of the sensor indicator light is electrically connected to the output end of the sensor through a wire, and the wire is inserted into the installation pipe.

[0011] Preferably, mechanical limiting components are provided on both sides of the middle section of the lever, and the mechanical limiting components are threadedly connected to the upper fixing plate.

[0012] Preferably, a lower fixing plate is provided below the aperture mounting ring, and a support leg is provided on the upper surface of the corner of the lower fixing plate, and the support leg is connected to the upper fixing plate and the lower fixing plate by external bolts.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] (1) This utility model sets a lever middle section below the upper fixed plate. When the lever middle section rotates, the top of the ball screw is inserted into the ball hole at different positions to lock the key angle. At the same time, the sensor detects that the key angle has been reached, and the sensor indicator light connected to the corresponding electrical signal lights up to indicate that the key angle has been reached. The lever middle section drives the internal blades of the continuously adjustable aperture to rotate and close, forming a continuously variable light-passing aperture of different diameters, thereby changing the size of the aperture of the light-emitting port of the optical lens, achieving the purpose of changing the optical parameters of the entire optical system, realizing continuous adjustment, higher adjustment accuracy, indicating the key angle, and the key angle has a locking function, making repeated positioning more accurate. This solves the problem that the existing fully automatic proximity lithography machines are basically fixed optical parameters after leaving the factory, making it difficult to change the optical parameters and thus inconvenient to adapt to different customer process routes.

[0015] (2) By setting mechanical limiting parts on both sides of the middle section of the lever, and connecting the mechanical limiting parts to the upper fixed plate, mechanical limiting parts with maximum and minimum adjustment ranges are realized on both sides of the middle section of the lever, thereby ensuring that the angle adjustment range is within the required parameters. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the overall bottom view of the present invention;

[0018] Figure 3 This is a schematic diagram of the middle section structure of the lever of this utility model;

[0019] Figure 4 This is a bottom view of the connection between the upper fixing plate and the wave screw of this utility model.

[0020] In the diagram: 1. Optical lens; 2. Continuously adjustable aperture; 3. Aperture mounting ring; 4. Sensor indicator light; 5. Mechanical limit component; 6. Ball screw; 7. Middle section of lever; 8. External lever; 9. Lever fixing block; 10. Upper fixing plate; 11. Lower fixing plate; 12. Outer protective cover; 13. Mounting pipe; 14. Fixing bolt; 15. Support leg; 16. Embedded groove; 17. Ball hole; 18. Through groove. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figure 1-4This utility model provides an embodiment of an adjustable continuous aperture assembly, comprising: an optical lens 1, an outer protective cover 12 disposed on the outside of the optical lens 1, an upper fixing plate 10 disposed at the lower end of the outer protective cover 12, a continuously adjustable aperture 2 disposed at the lower end of the upper fixing plate 10, an aperture mounting ring 3 disposed at the lower end of the continuously adjustable aperture 2, a fixing bolt 14 disposed at the edge of the aperture mounting ring 3, and the aperture mounting ring 3 being fixed to the upper fixing plate 10 by the fixing bolt 14, and a lower fixing plate disposed below the aperture mounting ring 3. 11. Support legs 15 are provided on the upper surface of the corner of the lower fixed plate 11. The support legs 15 are connected to the upper fixed plate 10 and the lower fixed plate 11 by external bolts. A through groove 18 is provided at the center of the upper fixed plate 10 and passes through the upper fixed plate 10. The aperture mounting ring 3 is fixed to the upper fixed plate 10 by fixing bolts 14. The support legs 15 are connected between the upper fixed plate 10 and the lower fixed plate 11. The optical lens 1 is installed inside the outer cover 12 and corresponds to the continuously adjustable aperture 2 through the through groove 18.

[0023] A lever section 7 is provided on one side of the aperture mounting ring 3. A lever fixing block 9 is provided at the lower end of the lever section 7, and an external lever 8 is provided at one end of the lever section 7. The lever section 7 is fixed between the lever fixing block 9 and the upper fixing plate 10, while maintaining a very small gap to ensure that the lever section 7 can rotate left and right. The lever fixing block 9 is made of copper material, such as... Figure 1 , Figure 3 and Figure 4 As shown, the upper surface of the middle section 7 of the lever has an embedded groove 16, and a ball screw 6 is embedded inside the embedded groove 16. The lower surface of the upper fixing plate 10 has ball holes 17, and there are multiple ball holes 17. The top of the ball screw 6 is inserted into the ball hole 17. The upper end of the upper fixing plate 10 near the middle section 7 of the lever has a mounting pipe 13, and there are multiple mounting pipes 13. The bottom end of the mounting pipe 13 is fixed with a sensor, such as... Figure 1 and Figure 2 As shown, a sensor indicator light 4 is provided on one side of the installation pipe 13, and the input end of the sensor indicator light 4 is electrically connected to the output end of the sensor through a wire, and the wire is inserted into the installation pipe 13. Mechanical limiting parts 5 are provided on both sides of the middle section 7 of the lever, and the mechanical limiting parts 5 are threadedly connected to the upper fixing plate 10;

[0024] An external lever 8 is connected to the middle section 7 of the lever, which is then fixed between the lever fixing block 9 and the upper fixing plate 10, while maintaining a very small gap to ensure that the middle section 7 of the lever can rotate left and right. During rotation, the top of the ball screw 6 is engaged in the ball hole 17 at different positions to lock the key angle. At the same time, the sensor detects that the key angle has been reached and transmits an electrical signal through the PLC controller. The sensor indicator 4 connected to the corresponding electrical signal lights up to indicate that the key angle has been reached. The middle section 7 of the lever drives the internal blades of the continuously adjustable aperture 2 to rotate and close, forming a continuously variable light transmission aperture of different diameters, thereby changing the size of the aperture of the light outlet of the optical lens 1 and achieving the purpose of changing the optical parameters of the entire optical system. The middle section 7 of the lever has mechanical limiters 5 on both sides for the maximum and minimum adjustment range, thereby ensuring that the angle adjustment range is within the required parameters. The adjustment is convenient and can be done by simply turning the lever. At the same time, the key angle indicator is visible, and the key angle is locked by the ball screw 6, allowing for continuous adjustment and more precise repeatability.

[0025] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An adjustable continuous aperture assembly, comprising an optical lens (1), characterized in that: The optical lens (1) is provided with an outer protective cover (12). The lower end of the outer protective cover (12) is provided with an upper fixing plate (10). The lower end of the upper fixing plate (10) is provided with a continuously adjustable aperture (2). The lower end of the continuously adjustable aperture (2) is provided with an aperture mounting ring (3). The middle section of the lever (7) is provided on one side of the aperture mounting ring (3). The lower end of the middle section of the lever (7) is provided with a lever fixing block (9). One end of the middle section of the lever (7) is provided with an external lever (8).

2. The adjustable continuous aperture assembly according to claim 1, characterized in that: The middle section (7) of the lever is fixed between the lever fixing block (9) and the upper fixing plate (10), while maintaining a very small gap to ensure that the middle section (7) of the lever can rotate left and right, and the lever fixing block (9) is made of copper.

3. The adjustable continuous aperture assembly according to claim 1, characterized in that: The upper surface of the middle section (7) of the lever is provided with an embedded groove (16), and a ball screw (6) is embedded inside the embedded groove (16). The lower surface of the upper fixing plate (10) is provided with a ball hole (17), and there are multiple ball holes (17). The top of the ball screw (6) is inserted into the ball hole (17).

4. An adjustable continuous aperture assembly according to claim 1, characterized in that: A fixing bolt (14) is provided at the edge of the aperture mounting ring (3), and the aperture mounting ring (3) is fixed to the upper fixing plate (10) by the fixing bolt (14). A through groove (18) is provided at the center of the upper fixing plate (10), and the through groove (18) penetrates the upper fixing plate (10).

5. An adjustable continuous aperture assembly according to claim 1, characterized in that: The upper fixed plate (10) is provided with an installation pipe (13) at the upper end near the middle section (7) of the lever. Multiple installation pipes (13) are provided, and a sensor is fixed at the bottom end of the installation pipe (13). A sensor indicator light (4) is provided on one side of the installation pipe (13), and the input end of the sensor indicator light (4) is electrically connected to the output end of the sensor through a wire, and the wire is inserted into the installation pipe (13).

6. An adjustable continuous aperture assembly according to claim 5, characterized in that: Mechanical limiting components (5) are provided on both sides of the middle section (7) of the lever, and the mechanical limiting components (5) are threadedly connected to the upper fixing plate (10).

7. An adjustable continuous aperture assembly according to claim 1, characterized in that: A lower fixing plate (11) is provided below the aperture mounting ring (3). Support legs (15) are provided on the upper surface of the corner of the lower fixing plate (11), and the support legs (15) are connected to the upper fixing plate (10) and the lower fixing plate (11) by external bolts.

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