Vertical continuous vacuum coating automatic sheet feeding mechanism

CN224692205UActive Publication Date: 2026-08-28ANHUI PINGYUAN NEW MATERIALS CO LTD
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Patent Information

Application Number
CN202522139347.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-10
Publication Date
2026-08-28
Estimated Expiration
2035-10-10

AI Technical Summary

Technical Problem

这种方式不仅生产效率低下,难以匹配现代化高速生产线的节奏,而且人工劳动强度大,长期操作易因疲劳导致失误,存在基板磕碰损坏的风险,同时日益增长的劳动力成本也进一步压缩了企业的利润空间

Benefits of technology

采用本实用新型提供的技术方案,与现有技术相比,具有如下有益效果:将待镀膜基板整齐堆叠于由四块挡板构成的放料仓内,启动往复驱动机构,带动推料板沿基座长度方向往复运动,推料板从出料间隙一侧进入仓内,将最底部基板从相对侧间隙水平推出,使其脱离基座并进入后续镀膜工位,重复此过程,即可实现基板的连续、自动化上料。该方案成本低于传统机械手,效率和稳定性高于人工配合皮带输送方式,且放料仓的宽度、长度及出料间隙高度可独立、精确调节,能够实现对不同规格尺寸基板的广泛兼容与自动化上料。

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Abstract

The utility model mainly relates to the technical field of automatic sheet feeding, and particularly relates to a vertical continuous vacuum coating automatic sheet feeding mechanism, which comprises a base, the top of the base is provided with two width side baffles arranged symmetrically along the width direction and two length end baffles arranged symmetrically along the length direction, and four baffles jointly enclose a material discharge bin for stacking and placing substrates; the bottom edge of the length end baffle and the top surface of the base are reserved with a discharge gap with a height equal to the thickness of a single layer of substrate; a pushing plate is arranged on the base, the pushing plate is connected to a reciprocating driving mechanism and can reciprocate linearly along the length direction of the base under the driving of the reciprocating driving mechanism, enters the material discharge bin from one side of the discharge gap and passes out from the other side. The substrates to be coated are neatly stacked in the material discharge bin, and the reciprocating driving mechanism is started, so that the pushing plate enters the bin from one side of the discharge gap, the bottommost substrate is horizontally pushed out from the opposite side gap, and the substrate is separated from the base and enters the subsequent coating station.
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Description

Technical Field

[0001] This utility model mainly relates to the field of automated film loading technology, specifically to a vertical continuous vacuum coating automated film loading mechanism. Background Technology

[0002] In a vertical continuous vacuum coating production line, glass, silicon wafers, and other materials need to be continuously and automatically fed into the vacuum chamber for coating processing. During this process, an efficient and reliable loading mechanism is crucial to ensuring smooth production flow and high production efficiency.

[0003] Currently, traditional wafer loading methods primarily employ multi-joint robots or specialized robotic arms to pick up substrates one by one from the stockpile using negative pressure suction cups or grippers, and then transfer them to a conveyor belt or the next workstation. While this method achieves automation, the equipment structure is complex, the robotic arms and their control systems are expensive, and the initial investment and maintenance costs are high, making it particularly uneconomical for small and medium-sized manufacturing enterprises. Some companies also rely entirely on operators to manually remove substrates one by one from the stockpile and place them on the conveyor belt. This method is not only inefficient and unable to keep up with the pace of modern high-speed production lines, but also involves high manual labor intensity, and long-term operation can easily lead to errors due to fatigue, posing a risk of substrate damage from impacts. At the same time, the ever-increasing labor costs further compress the profit margins of enterprises. Utility Model Content

[0004] 1. The technical problem to be solved by the utility model: This invention provides a vertical continuous vacuum coating automated loading mechanism to solve the technical problems existing in the background art.

[0005] 2. Technical Solution: To achieve the above objectives, the technical solution provided by this utility model is as follows: a vertical continuous vacuum coating automated loading mechanism, including a base, the top of which is provided with two width side baffles symmetrically arranged along the width direction and two length end baffles symmetrically arranged along the length direction, the four baffles together forming a feeding bin for stacking substrates. A discharge gap with a height equal to the thickness of a single-layer substrate is reserved between the bottom edge of the length end baffle and the top surface of the base. The base is provided with a pusher plate, which is connected to a reciprocating drive mechanism and can reciprocate linearly along the length of the base under its drive. The pusher plate enters the discharge bin from one side of the discharge gap and exits from the other side.

[0006] Furthermore, the bottom of each of the two width side baffles is fixed with a first slider. The first slider is slidably engaged with a first groove extending along the width direction that is correspondingly opened on the top of the base, and is respectively connected to the width adjusting screw with opposite threads. The width adjusting screw is rotatably installed between the two first grooves, and one end of it extends to the outside of the base and is equipped with a width adjusting handwheel.

[0007] Furthermore, the top of the length end baffle is provided with a vertical groove of a predetermined depth, and one side of the baffle is provided with a first adjustment hole that communicates with the vertical groove. The vertical groove is slidably engaged with a vertical guide rod, and the vertical guide rod is provided with a plurality of second adjustment holes arranged at equal intervals along the vertical direction. The first adjustment hole can be aligned with any of the second adjustment holes and locked in place by a positioning screw.

[0008] Furthermore, a movable plate is fixed to the top of each of the two vertical guide rods. Each movable plate has a guide hole and a threaded hole extending along the length of the base through both sides. The two guide holes are slidably engaged with a horizontal guide rod, and the two threaded holes are engaged with a length adjusting screw with opposite threads. The horizontal guide rod is fixed to a first bracket on the top of the base, and the length adjusting screw is rotatably mounted on a second bracket on the top of the base, with a length adjusting handwheel fitted at one end.

[0009] Furthermore, the reciprocating drive mechanism includes a second slider fixed to the bottom of the pusher plate. The second slider is slidably engaged with a second groove opened along the length direction on the top of the base. The second slider extends downward to the bottom of the base and is connected to one end of a connecting rod by a hinge. The other end of the connecting rod is eccentrically hinged to a turntable. The output shaft of the drive motor is fixedly connected to the center of the turntable. The drive motor is mounted on an assembly plate fixed to the bottom of the base.

[0010] 3. Beneficial effects: Compared with existing technologies, the technical solution provided by this utility model has the following advantages: The substrates to be coated are neatly stacked in a feeding bin composed of four baffles. The reciprocating drive mechanism is activated, causing the pusher plate to reciprocate along the length of the base. The pusher plate enters the bin from one side of the discharge gap, pushing the bottom substrate horizontally out from the opposite side gap, allowing it to detach from the base and enter the subsequent coating station. Repeating this process achieves continuous and automated substrate feeding. This solution is less expensive than traditional robotic arms, more efficient and stable than manual conveyor belt methods, and the width, length, and discharge gap height of the feeding bin can be independently and precisely adjusted, enabling wide compatibility and automated feeding of substrates of different sizes. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the connection structure of the two width side baffles of this utility model; Figure 3 This is a schematic diagram of the connection structure of the two length end baffles of this utility model; Figure 4 This is an exploded view of the vertical guide rod and vertical slide groove of this utility model; Figure 5 This is a schematic diagram of the reciprocating drive mechanism of this utility model.

[0012] Figure label: 1. Base; 101. First slide groove; 102. Second slide groove; 2. Width side baffle; 201. First slider; 3. Length end baffle; 301. Vertical slide groove; 302. First adjustment hole; 4. Push plate; 5. Reciprocating drive mechanism; 501. Second slider; 502. Connecting rod; 503. Turntable; 504. Drive motor; 505. Assembly plate; 6. Width adjustment screw; 7. Width adjustment handwheel; 8. Vertical guide rod; 801. Second adjustment hole; 9. Positioning screw; 10. Movable plate; 1001. Guide hole; 1002. Threaded hole; 11. Horizontal guide rod; 12. Length adjustment screw; 13. First bracket; 14. Second bracket; 15. Length adjustment handwheel. Detailed Implementation

[0013] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, which show several embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the utility model will be more thorough and complete.

[0014] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "page", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0015] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0016] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," and "equipped with" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. Example

[0017] See attached document Figure 1-5 A vertical continuous vacuum coating automated loading mechanism includes a base 1. The top of the base 1 is provided with two width side baffles 2 symmetrically arranged along the width direction and two length end baffles 3 symmetrically arranged along the length direction. The four baffles together form a loading bin for stacking substrates. A discharge gap with a height equal to the thickness of a single-layer substrate is reserved between the bottom edge of the length end baffle 3 and the top surface of the base 1. A pusher plate 4 is provided on the base 1. The pusher plate 4 is connected to a reciprocating drive mechanism 5 and can reciprocate linearly along the length of the base 1 under its drive. It enters the discharge bin from one side of the discharge gap and exits from the other side.

[0018] In this embodiment, the substrates to be coated are neatly stacked in a feeding bin composed of four baffles. The reciprocating drive mechanism 5 is started, which drives the pusher plate 4 to reciprocate along the length of the base 1. The pusher plate 4 enters the bin from one side of the discharge gap, pushing the bottom substrate horizontally out from the gap on the opposite side, so that it is separated from the base 1 and enters the subsequent coating station. The reciprocating motion can realize the continuous and automated feeding of the substrates. Compared with the traditional robotic arm solution, it has a lower cost, and compared with the manual belt conveyor method, it has higher efficiency and stability.

[0019] The bottom of the two width side baffles 2 are respectively fixed with first sliders 201. The first sliders 201 are slidably engaged with the first slide grooves 101 that are opened on the top of the base 1 and extend along its width direction. They are respectively connected to the width adjusting screws 6 with threads of opposite directions. The width adjusting screws 6 are rotatably installed between the two first slide grooves 101, and one end of them extends to the outside of the base 1 and is equipped with a width adjusting handwheel 7. The top of the length end baffle 3 is provided with a vertical groove 301 of a predetermined depth, and a first adjustment hole 302 connected to the vertical groove 301 is provided on one side. The vertical groove 301 is slidably engaged with a vertical guide rod 8. The vertical guide rod 8 is provided with a plurality of second adjustment holes 801 arranged at equal intervals along the vertical direction. The first adjustment hole 302 can be aligned with any of the second adjustment holes 801 and locked and fixed by the positioning screw 9. Two vertical guide rods 8 are each fixed to a movable plate 10 at their top ends. Each movable plate 10 has a guide hole 1001 and a threaded hole 1002 extending along the length of the base 1 through both sides. The two guide holes 1001 are slidably engaged with a horizontal guide rod 11, and the two threaded holes 1002 are engaged with a length adjusting screw 12 with opposite threads. The horizontal guide rod 11 is fixed to the first bracket 13 set on the top of the base 1, and the length adjusting screw 12 is rotatably mounted on the second bracket 14 set on the top of the base 1, and one end of the screw is equipped with a length adjusting handwheel 15.

[0020] In this embodiment, rotating the width adjustment handwheel 7 drives the width adjustment screw 6 to rotate, causing the two first sliders 201 to slide synchronously towards or away from each other in the corresponding first slide groove 101, thereby precisely adjusting the distance between the two width side baffles 2. Pull the length end baffle 3 upward so that it moves up and down along the vertical guide rod 8 through the vertical slide 301. When the first adjustment hole 302 is aligned with the second adjustment hole 801 of the target height, screw in the positioning screw 9 to lock it in place, thereby realizing the adjustment of the discharge gap height. Rotating the length adjustment handwheel 15 drives the length adjustment screw 12 to rotate. By using the reverse thread engagement between the screw and the threaded hole 1002 on the two movable plates 10, the two movable plates 10 can be driven to move synchronously towards or away from each other along the horizontal guide rod 11 with the guide hole 1001, thereby adjusting the distance between the two length end baffles 3. In summary, this technology enables wide compatibility and automated feeding of substrates of different specifications and sizes by independently and precisely adjusting the width, length, and discharge gap height of the feeding bin.

[0021] The reciprocating drive mechanism 5 includes a second slider 501 fixed to the bottom of the pusher plate 4. The second slider 501 is slidably engaged with a second slide groove 102 opened along the length direction on the top of the base 1. The second slider 501 extends downward to the bottom of the base 1 and is connected to one end of a connecting rod 502 by a hinge. The other end of the connecting rod 502 is eccentrically hinged to a turntable 503. The output shaft of the drive motor 504 is fixedly connected to the center of the turntable 503. The drive motor 504 is mounted on an assembly plate 505 fixed at the bottom of the base 1.

[0022] In this embodiment, after the drive motor 504 is started, it drives the turntable 503 to rotate at a constant speed. Through the transmission of the connecting rod 502, the rotational motion of the turntable 503 is converted into the precise linear reciprocating motion of the second slider 501 in the second slide groove 102, thereby driving the pusher plate 4 to periodically push and return along the length direction of the base 1, realizing continuous and automated feeding of the substrate.

[0023] The above-described embodiments are merely illustrative of certain implementations of this utility model, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

[0024] It should be noted that the above content falls within the scope of the inventor's technical knowledge. Due to the vast and complex nature of the technical content in this field, the above content of this application does not necessarily constitute prior art.

Claims

1. A vertical continuous vacuum coating automated loading mechanism, characterized in that: Includes a base (1), the top of which is provided with two width side baffles (2) arranged symmetrically along the width direction and two length end baffles (3) arranged symmetrically along the length direction. The four baffles together form a material storage bin for stacking and placing substrates. The bottom edge of the length end baffle (3) and the top surface of the base (1) are reserved with a discharge gap of equal height to the thickness of the single-layer substrate. The base (1) is provided with a pusher plate (4), which is connected to a reciprocating drive mechanism (5) and can reciprocate linearly along the length of the base (1) under its drive, enter the discharge bin from one side of the discharge gap and exit from the other side.

2. The vertical continuous vacuum coating automated loading mechanism according to claim 1, characterized in that: The bottom of the two width side baffles (2) are respectively fixed with a first slider (201). The first slider (201) is slidably engaged with the first slide groove (101) that is opened on the top of the base (1) and extends along its width direction. It is also connected to the width adjusting screw (6) with threads of opposite direction. The width adjusting screw (6) is rotatably installed between the two first slide grooves (101), and one end of it extends to the outside of the base (1) and is equipped with a width adjusting handwheel (7).

3. The vertical continuous vacuum coating automated loading mechanism according to claim 1, characterized in that: The top of the length end baffle (3) is provided with a vertical groove (301) of a predetermined depth, and a first adjustment hole (302) connected to the vertical groove (301) is provided on one side. The vertical groove (301) is slidably engaged with a vertical guide rod (8). The vertical guide rod (8) is provided with a plurality of second adjustment holes (801) arranged at equal intervals along the vertical direction. The first adjustment hole (302) can be aligned with any of the second adjustment holes (801) and locked and fixed by a positioning screw (9).

4. The vertical continuous vacuum coating automated loading mechanism according to claim 3, characterized in that: The top ends of the two vertical guide rods (8) are respectively fixed with a movable plate (10). Each movable plate (10) has a guide hole (1001) and a threaded hole (1002) extending along the length of the base (1) through both sides. The two guide holes (1001) are slidably engaged with a horizontal guide rod (11), and the two threaded holes (1002) are engaged with a length adjusting screw (12) with opposite threads. The horizontal guide rod (11) is fixed on the first bracket (13) provided on the top of the base (1), and the length adjusting screw (12) is rotatably installed on the second bracket (14) provided on the top of the base (1), and one end of it is equipped with a length adjusting handwheel (15).

5. The vertical continuous vacuum coating automated loading mechanism according to claim 1, characterized in that: The reciprocating drive mechanism (5) includes a second slider (501) fixed to the bottom of the pusher plate (4). The second slider (501) is slidably engaged with a second groove (102) opened along the length direction on the top of the base (1). The second slider (501) extends downward to the bottom of the base (1) and is connected to one end of a connecting rod (502) by a hinge. The other end of the connecting rod (502) is eccentrically hinged to a turntable (503). The output shaft of the drive motor (504) is fixedly connected to the center of the turntable (503). The drive motor (504) is mounted on an assembly plate (505) fixed at the bottom of the base (1).