Magnetic detection device

Abstract

This application relates to the field of magnetic variable measurement technology and discloses a magnetic detection device, comprising: a magneto-optical effect detection component, including a light source and a detector, wherein the detection light emitted by the light source is polarized light at least at a preset position incident on the object under test, and the detector detects the magneto-optical effect at the preset position based on the received detection light; a magnetic field generating device, including a magnetic field generating coil and a pulse power supply device for providing current to the magnetic field generating coil, wherein the magnetic field generating coil is configured to form a magnetic field environment at least at the preset position; and a stage for moving the object under test. In addition to achieving detection of high-speed changes and large magnetic field strength, the stage allows for the movement of the object under test, enabling the position of the object under test and / or the preset position to be adjusted according to detection requirements. This avoids the detection position deviating from the magnetic field or optical path due to the fixed position of the object under test, thus affecting the detection effect and enhancing the accuracy and stability of magnetic detection.

Description

Technical Field

[0001] This application relates to the field of magnetic variable measurement technology, for example, to a magnetic detection device. Background Technology

[0002] Currently, the magneto-optical effect refers to the change in polarization state of polarized light due to the influence of the magnetization state of the medium it passes through. Therefore, the magnetism of a test object can be obtained by detecting the polarized light passing through it. Based on this, magneto-optical Kerr detection equipment measures the polarization state of the reflected light from the test object to measure the magnetism of its surface; magneto-optical Faraday detection equipment measures the polarization state of the transmitted light from the test object to measure the magnetism of its surface.

[0003] In some cases, it is necessary to place the object under test in a magnetic field environment so that its magnetism changes under the influence of the magnetic field. Magneto-optical detection equipment, such as magneto-optical Kerr detection equipment or magneto-optical Faraday detection equipment, is used to detect these changes in magnetism, thereby analyzing the magnetic properties of the object. In existing technologies, an electromagnet is typically used to generate the magnetic field, and the object is placed in a controlled magnetic field environment by bringing the electromagnet's poles close to it. However, because the pole material in the electromagnet easily generates induced currents during operation, partially offsetting the excitation effect, the speed at which the electromagnet generates the magnetic field is usually slow, which cannot meet the testing requirements in rapidly changing magnetic field environments. In some cases, the speed of magnetic field change can be increased by removing the poles or the magnetic core; however, this method significantly reduces the magnetic field strength of the generated environment, which cannot meet the testing requirements in large magnetic field environments.

[0004] Therefore, existing magnetic field generation schemes cannot simultaneously satisfy the requirements of rapidly changing and high magnetic field strength.

[0005] The information disclosed in the background section is only intended to enhance the understanding of the background of this application, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0006] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0007] This disclosure provides a magnetic detection device, which enables the detection of the magnetic properties of an object under test in a rapidly changing magnetic field environment with high magnetic field strength.

[0008] In some embodiments, the magnetic detection device includes: a magneto-optical effect detection component, including a light source and a detector, wherein the detection light emitted by the light source is polarized light at least at a preset position incident on the object under test, and the detector detects the magneto-optical effect at the preset position based on the received detection light; a magnetic field generating device, including a magnetic field generating coil and a pulse power supply device for supplying current to the magnetic field generating coil, wherein the magnetic field generating coil is configured to form a magnetic field environment at least at the preset position; and a stage for moving the object under test.

[0009] Optionally, the stage includes: a conveying structure for moving the object to be measured in a first direction; wherein the first direction is perpendicular to the surface of the object at a preset position.

[0010] Optionally, the conveying structure includes: a conveying rod on which the object to be tested is fixed; and a driving device connected to the conveying rod for driving the conveying rod to move along a first direction, so that the sample rod carries the object to be tested into the inner ring of the magnetic field generating coil.

[0011] Optionally, the stage includes a rotating structure for rotating the object being measured.

[0012] Optionally, the rotating structure causes the object to be measured to rotate within the plane of the preset position; and / or, the rotating structure causes the object to rotate out of the plane of the preset position.

[0013] Optionally, the stage includes an adsorption structure for adsorbing the analyte to fix it in place.

[0014] Optionally, the adsorption structure is a vacuum adsorption structure, which adsorbs the surface of the analyte by negative pressure.

[0015] Optionally, the magneto-optical effect detection component includes: a first magneto-optical effect detection component for detecting a preset position on a first side of the object under test; and a second magneto-optical effect detection component for detecting a preset position on a second side of the object under test.

[0016] Optionally, the pulse power supply device includes: a capacitor pulse power supply device; and / or an inductive pulse power supply device; and / or a mechanical energy pulse power supply device.

[0017] Optionally, the preset position is located within a set distance range of the intersection of the axis of the magnetic field generating coil and the surface of the object being measured.

[0018] Optionally, the magnetic field generating coil is a poleless and coreless hollow coil with its axis perpendicular to the surface of the object being measured, and the detection light passes through the inner ring of the magnetic field generating coil and is incident to a preset position.

[0019] The magnetic detection device provided in this disclosure can achieve the following technical effects: By combining a pulse power supply device with a magnetic field generating coil, the speed of change of the generated magnetic field is increased by the magnetic field generating coil, and a large instantaneous current is provided to the magnetic field generating coil by the pulse power supply device to further increase the speed of change of the magnetic field, achieving a high-speed changing magnetic field. This also significantly increases the instantaneous intensity of the magnetic field generated by the magnetic field generating coil, enabling magnetic detection with high-speed changes and strong magnetic fields. Furthermore, the stage can move the object under test, allowing its position and / or preset position to be adjusted according to detection requirements. This ensures that the preset position of the object is accurately within the preset magnetic field range generated by the magnetic field generating device, while guaranteeing that the detection light from the magneto-optical effect detection component can be accurately incident on this preset position, and that the detection light reflected by the object can be effectively received by the detector. This avoids the detection effect being affected by the detection position deviating from the magnetic field or optical path due to the fixed position of the object, thus enhancing the accuracy and stability of magnetic detection.

[0020] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0021] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are shown as similar elements. The drawings are not to be scaled. And wherein: Figure 1 This is a schematic diagram of the structure of a magnetic detection device provided in an embodiment of this disclosure; Figure 2 This is a schematic diagram of another magnetic detection device provided in an embodiment of this disclosure; Figure 3 This is a schematic diagram of another magnetic detection device provided in an embodiment of this disclosure.

[0022] Figure label: 10: Magneto-optical effect detection component; 111: First magneto-optical effect detection component; 112: Second magneto-optical effect detection component; 12: Magnetic field generating coil; 13: Adsorption structure; 14: Inner ring; 15: Transmission rod; 16: Drive rod; 17: First motor; 18: Test object; 19: Pulse power supply device; 20: Support structure. Detailed Implementation

[0023] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0024] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0025] In this disclosure, the terms "upper," "lower," "inner," "middle," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for better description of the embodiments of this disclosure and their implementations, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to require them to be constructed and operated in a specific orientation. Furthermore, some of the aforementioned terms may be used to indicate other meanings besides orientation or positional relationship; for example, the term "upper" may in some cases indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in the embodiments of this disclosure according to the specific circumstances.

[0026] Furthermore, the terms "set up," "connect," and "fix" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this disclosure according to the specific circumstances.

[0027] Unless otherwise stated, the term "multiple" means two or more.

[0028] In this embodiment of the disclosure, the character " / " indicates that the objects before and after it are in an "or" relationship. For example, A / B means: A or B.

[0029] The term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0030] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0031] Combination Figure 1-3 As shown, this disclosure provides a magnetic detection device, including a magneto-optical effect detection component 10, a magnetic field generating device, and a stage. The magneto-optical effect detection component 10 includes a light source and a detector. The detection light emitted by the light source is polarized at least at a preset position incident on the object under test 18. The detector detects the magneto-optical effect at the preset position based on the received detection light. The magnetic field generating device includes a magnetic field generating coil 12 and a pulse power supply device 19 that provides pulse current to the magnetic field generating coil 12. The magnetic field generating coil 12 is configured to create a magnetic field environment at least at the preset position. The stage is used to move the object under test 18.

[0032] In the embodiments of this disclosure, polarizers or polarizers can be inserted into the path of the light emitted from the light source, or polarized light can be obtained by reflection or refraction. Alternatively, birefringent crystals or lenses can be inserted into the path of the light emitted from the light source, or dichroic mirrors can be inserted into the path of the light emitted from the light source, etc., to obtain polarized light. Those skilled in the art can choose the specific method for obtaining polarized light according to actual needs, and will not be elaborated further here.

[0033] In this embodiment, the detection light is polarized light, which mainly means that the detection light can be considered as linearly polarized light to obtain better magneto-optical effect detection results. For the detection light, it is necessary to make it polarized light when it is incident on the target object 18. The location within the optical path where the polarization requirement is met is not limited here; for example, polarized light can be formed within the light source or during its propagation. More specifically, the corresponding lens or optical device that gives the detection light polarized light characteristics only needs to be placed in the optical path before the detection light is incident on the target object 18 at the preset position.

[0034] In this embodiment, a detector is configured to receive at least the detection light reflected and / or transmitted from the object under test 18. The detector detects the magneto-optical effect at a preset position based on the received detection light. The magneto-optical effect includes the Kerr effect and the Faraday effect. The detector can output corresponding data or signals according to the needs and actual configuration differences. The detector is at least capable of detecting the polarization state or polarization direction of the detection light. As a common form, the detector may include an analyzer and a photodetector. The analyzer converts the polarization direction of the detection light into light intensity information, and then the photodetector analyzes the light intensity information to analyze the magneto-optical effect at the preset position. Alternatively, a combination of a Wollaston prism and two photodetectors can be used. The Wollaston prism splits the detection light reflected and / or transmitted from the object under test 18 into two orthogonally polarized beams, which enter the two photodetectors respectively. The magneto-optical effect at the preset position is analyzed by jointly analyzing the signals from the two photodetectors.

[0035] In this embodiment, the light source includes a light-emitting device and a polarizer. The light emitted by the light-emitting device has a corresponding polarization state after passing through the polarizer, and can be used as detection light incident on a preset position of the object under test 18. For the light-emitting device, a laser light source, a light-emitting diode light source, or other devices capable of generating light can be selected. The detector may include an analyzer and a photodetector. The detection light reflected and / or projected by the object under test 18 enters the photodetector after passing through the analyzer. Based on the signal from the photodetector, especially the light intensity signal, the corresponding magneto-optical effect is analyzed.

[0036] In this embodiment of the disclosure, the detector may include a Wollaston prism, a first photodetector, and a second photodetector. The detection light reflected and / or projected by the object under test 18 passes through the Wollaston prism and then enters the first photodetector and the second photodetector, respectively. Calculations are performed between the first photodetector and the second photodetector, for example, the signals of the first photodetector and the second photodetector are subtracted to analyze the corresponding magneto-optical effect.

[0037] In this embodiment, to further improve the rate of change of the magnetic field generated by the magnetic field generating coil 12, the pulse power supply device 19 can be either a single pulse or a multi-pulse device; the specific output waveform is not limited here. The pulse power supply device 19 can be selected as needed, for example, it can be a capacitor pulse power supply device 19, an inductor pulse power supply device 19, or a mechanical energy pulse power supply device 19. As a preferred implementation, a capacitor pulse power supply device 19 can be used.

[0038] In this embodiment, the detection light can be incident at a preset position along a direction perpendicular to the object under test 18 to detect at least the poloidal magneto-optical effect at the preset position. In this case, a beam splitter can typically be provided in the optical path. The detection light emitted from the light source is incident at the preset position via the beam splitter, and the detection light reflected and / or projected by the object under test 18 is incident on a detector via the beam splitter. As a feasible approach, the detector can at least detect the magnetism in the perpendicular direction of the object under test 18.

[0039] In this embodiment, the detection light can also be incident at a predetermined position at an angle. Specifically, the detection light can pass through the inner ring 14 of the magnetic field generating coil 12, and the direction of the detection light can form an angle with the vertical direction of the surface of the object under test 18. As a feasible approach, the in-plane and vertical magnetic properties of the object under test 18 can be detected by adjusting the angle at which the detection light is incident on the object under test 18. Generally, a smaller incident angle can be used to mainly analyze the vertical magnetic properties at the predetermined position of the object under test 18, while a larger incident angle can be used to mainly analyze the vertical and in-plane magnetic properties at the predetermined position of the object under test 18.

[0040] In this embodiment, the magnetic field generating device includes a magnetic field generating coil 12 and a pulse power supply device 19 that provides current to the magnetic field generating coil 12. The magnetic field generating coil 12 is configured to form a magnetic field environment at least at a preset position. The pulse power supply device 19 provides current to the magnetic field generating coil 12 to generate the magnetic field environment. Through the aforementioned configuration, the magnetic field generated by the poleless or magnetic core magnetic field generating coil 12 avoids the influence of hysteresis and remanence of the pole or magnetic core on the rate of magnetic field change, greatly increasing the rate of magnetic field change and ensuring that the preset position of the test object 18 is located within the magnetic field environment of the magnetic field generating coil 12, thus meeting the testing requirements under high-speed changing magnetic field conditions. The pulse power supply device 19 provides current to the magnetic field generating coil 12, providing at least a large instantaneous current to further enhance the magnetic field strength generated by the magnetic field generating coil 12. Using this solution, a high-speed changing large magnetic field can be obtained, meeting the detection requirements of high-speed, high-magnetic-field conditions.

[0041] In this embodiment, for the measured position (i.e., the preset position) of the object 18, the relative position between the preset position and the magnetic field generating coil 12 can be set to determine the magnetic field at the preset position of the object 18 and ensure that the magnetic field at the preset position meets the detection requirements. Specifically, the preset position is set within the inner ring 14 of the magnetic field generating coil 12. The magnetic field generating coil 12 can be annular, containing a hollow inner ring 14. Since the preset position is located within the inner ring 14, any corresponding preset position can be selected within the inner ring 14 as the detection position. As a preferred implementation, the preset position can be located near the intersection of the axis of the magnetic field generating coil 12 and the surface of the object 18, making the magnetic field at the preset position easier to control and calculate. Furthermore, since the preset position is located within the inner ring 14 of the magnetic field generating coil 12, the magnetic field uniformity within the inner ring 14 is relatively good, ensuring that the magnetic field environment at the preset position meets the detection requirements and facilitating adjustment of the magnetic field at the preset position, greatly simplifying the control of the magnetic field and the use of the detection equipment. In addition, the inner ring 14 of the magnetic field generating coil 12 can be used for the optical path of the detection light, which can simplify the optical path structure of the device and reduce the cost of the device.

[0042] In this embodiment of the disclosure, the cross-section of the magnetic field generating coil 12 is circular, square, or any other arbitrary shape.

[0043] In this embodiment, the stage is configured to support the object 18 to be measured. Specifically, the stage can provide an area on which the object 18 to be measured is placed, or it can further provide a fixing effect on the object 18. Regarding the specific form of the stage, in addition to having a platform form for supporting the object 18, it can also be a fixing structure, a displacement structure, etc., for gripping or fixing the object 18, and the specific form can be selected according to needs. In some cases, it is also necessary to enable the object 18 to move to adjust the position to be measured as needed. Accordingly, in some cases, the stage can drive the object 18 to move. More specifically, the stage can at least drive the object 18 to move in a plane parallel to and / or perpendicular to the surface of the object 18.

[0044] The magnetic detection device provided in this embodiment combines a pulse power supply device 19 with a magnetic field generating coil 12. The magnetic field generating coil 12 increases the rate of change of the generated magnetic field, and the pulse power supply device 19 provides a large instantaneous current to the magnetic field generating coil 12, further increasing the rate of change and achieving a high-speed changing magnetic field. This significantly increases the instantaneous intensity of the magnetic field generated by the magnetic field generating coil 12, enabling high-speed, high-magnetic-field-strength magnetic detection. Furthermore, the stage allows for the movement of the test object 18, enabling adjustments to its position and / or preset position according to detection requirements. This ensures that the preset position of the test object 18 is accurately within the preset magnetic field range generated by the magnetic field generating device, while simultaneously ensuring that the detection light from the magneto-optical effect detection component 10 is precisely incident on this preset position, and that the detection light reflected by the test object 18 is effectively received by the detector. This avoids deviations in the detection position from the magnetic field or optical path due to a fixed position of the test object 18, thus enhancing the accuracy and stability of magnetic detection.

[0045] Optionally, the stage includes a conveying structure. The conveying structure is used to move the object 18 to be measured in a first direction; wherein the first direction is perpendicular to the surface where the object 18 is located at a preset position.

[0046] In this embodiment of the present disclosure, the axis of the magnetic field generating coil 12 is perpendicular to the surface of the object under test 18, so as to form a magnetic field that is substantially perpendicular to the surface of the object under test 18 in at least a portion of the surface of the object under test 18. In this case, a relatively uniform magnetic field can be formed on the surface of the object under test 18.

[0047] In this way, the object under test 18 is moved in a direction perpendicular to the surface of the preset position of the object under test 18 by the conveying structure. The position of the object under test 18 can be adjusted according to the detection requirements to ensure that the preset position is accurately within the preset magnetic field range generated by the magnetic field generator. At the same time, it ensures that the polarized light emitted by the light source of the magneto-optical effect detection component 10 can be accurately incident on the preset position and the detector can effectively receive the reflected light. This avoids the detection position deviating from the magnetic field or optical path due to the fixed position of the object under test 18, which would affect the detection effect. Ultimately, this enhances the accuracy and stability of magnetic detection.

[0048] Optionally, the conveying structure includes a conveying rod 15 and a driving device. The object to be tested 18 is fixed on the conveying rod 15. The driving device is connected to the conveying rod 15 and is used to drive the conveying rod 15 to move along a first direction, so that the sample rod carries the object to be tested 18 into the inner ring 14 of the magnetic field generating coil 12.

[0049] In this embodiment of the disclosure, according to testing requirements, the conveying structure can also drive the object under test 18 to move in a first direction and / or other directions, the other directions including at least a second direction and / or a third direction. The second direction is parallel to the surface where the preset position of the object under test 18 is located, and the third direction is neither parallel nor perpendicular to the surface where the preset position of the object under test 18 is located. Specifically, multiple driving devices can be provided to drive the conveying rod 15 to move in different directions, or the displacement mechanisms in multiple directions can be integrated into one driving device.

[0050] In this embodiment of the disclosure, the driving device includes a power output mechanism that is mechanically connected to the transmission rod 15 and is used to generate and transmit mechanical force to drive the transmission rod 15 to displacement. The specific form of the power output mechanism includes at least one of a stepper motor, a servo motor, or a linear motor to provide controllable displacement speed and positioning accuracy.

[0051] In this way, the driving device drives the transmission rod 15 to move along a first direction perpendicular to the surface of the object 18, so that the object 18 is precisely inserted into the inner ring 14 of the magnetic field generating coil 12, thereby ensuring that the preset position of the object 18 is within the strong magnetic field region formed by the inner ring 14 of the coil. Combined with the preset magnetic field generated by the magnetic field generating device and the optical path alignment of the magneto-optical effect detection component 10 at the preset position, the above-mentioned mechanical transmission method realizes the precise control of the position of the object 18, avoiding the detection position from deviating from the magnetic field action area or the incident point of the optical path due to positioning deviation.

[0052] Optionally, the stage includes a rotating structure. The rotating structure is used to rotate the object 18 being measured.

[0053] In this embodiment, the rotating structure includes a drive motor and a drive rod 16 connected to a first motor 17. The first motor 17 drives the drive rod 16 to rotate. When the transmission end of the drive rod 16 is connected to the conveying rod 15, the drive rod 16 can drive the conveying rod 15 to rotate. At least one support structure 20 can be provided between the transmission end of the drive rod 16 and the first motor 17. The rotating structure can also be integrated into the conveying structure. Specifically, the object to be measured 18 is fixed on the movable part of the conveying rod 15. The rotating structure includes a second motor connected to the movable part of the conveying rod 15, which drives the movable part of the conveying rod 15 to rotate, thereby driving the object to be measured 18 fixed on the movable part to rotate, so as to control the angular position of the object to be measured 18.

[0054] In this way, the rotating structure drives the object under test 18 to rotate, so that the preset position of the object under test 18 can be adjusted in space according to the detection requirements. This ensures that the area to be tested of the object under test 18 always maintains the best relative position with the preset magnetic field direction generated by the magnetic field generating coil 12, while ensuring that the optical path of the magneto-optical effect detection component 10 accurately covers the preset position.

[0055] Optionally, the rotating structure causes the object under test 18 to rotate within the plane of the preset position; and / or, the rotating structure causes the object under test 18 to rotate out of the plane of the preset position.

[0056] In this embodiment, the rotation structure causing the test object 18 to rotate within the plane of the preset position means that the test object 18 rotates around a rotation axis perpendicular to the plane of the preset position, and the preset position remains within this plane during rotation. The rotation axis of the test object 18 rotating within the plane of the preset position can be the axis of the magnetic field generating coil 12 or other axes parallel to the axis of the magnetic field generating coil 12. Through in-plane rotation, different circumferential areas on the surface of the test object 18 can be sequentially positioned as preset positions, satisfying the requirements of multi-position detection, while avoiding the stability of the magnetic field or optical path caused by the rotation deviating from the original plane.

[0057] In this embodiment, the rotation structure causing the test object 18 to rotate out of the plane of the preset position means that the test object 18 rotates around a rotation axis that is not perpendicular to the plane of the preset position, causing the orientation of the preset position to change and deviate from the original plane. If the test object 18 rotates around an axis of any direction, the preset position shifts from the initial plane to a new position in three-dimensional space. Through out-of-plane rotation, the detection light can illuminate the preset position at different incident angles, thereby adapting to the analysis requirements of vertical or in-plane magnetic fields and ensuring that the test area of ​​the test object 18 is always in the optimal detection posture.

[0058] In this way, by setting a rotating structure to rotate the object under test 18 within the plane of the preset position, such as rotating the object under test 18 around an axis perpendicular to the plane, different circumferential positions on the surface of the object under test 18 are sequentially used as preset positions to be measured, thereby meeting the detection requirements of multiple preset positions on the surface of the same object under test 18. By rotating the object under test 18 out of the plane of the preset position, the angle between the surface of the object under test 18 and the plane of the preset position before rotation can be changed, enabling the detection light to be incident on the surface of the object under test 18 at different tilt angles, thereby adapting to the magneto-optical effect analysis requirements under different detection angles. The above two rotation methods provide multi-dimensional attitude adjustment capabilities, ensuring that any target position on the object under test 18 can be accurately adjusted to the preset position, and that it is always within the effective range of the magnetic field generating device and precisely matched with the optical path of the magneto-optical effect detection component 10, avoiding detection blind spots or data deviations caused by position or angle limitations.

[0059] Optionally, the stage includes an adsorption structure 13. The adsorption structure 13 is used to adsorb the analyte 18 to fix the analyte 18.

[0060] In this embodiment, the adsorption structure 13 is a device for fixing the test object 18. This device connects and fixes the test object 18 to the stage through adsorption force. The adsorption structure 13 can utilize physical or chemical forces. For example, the adsorption structure 13 may include a vacuum adsorption system that adsorbs the surface of the test object 18 through negative pressure; or, the adsorption structure 13 may include an electrostatic adsorption device that adsorbs the surface of the test object 18 through electrostatic force. Through the above adsorption design, the adsorption structure 13 can ensure that the test object 18 maintains a stable position during the detection process, avoiding displacement caused by external interference or gravity.

[0061] In this embodiment, the adsorption structure 13 continuously applies adsorption force before, during, and after detection to maintain the relative position of the test object 18 and the stage; or, the adsorption structure 13 provides dynamic fixation when the stage moves or rotates the test object 18 to prevent the test object 18 from detaching or shifting. Through the above functions, the adsorption structure 13 ensures that the preset position is always within the effective range of the magnetic field generating device and the optical path coverage area of ​​the magneto-optical effect detection component 10.

[0062] In this way, the adsorption structure 13 continuously adsorbs and fixes the test object 18 throughout the entire detection cycle, including before position adjustment, during the adjustment process, and during the detection stage, ensuring that the test object 18 and the conveying rod 15 or rotating structure always maintain a stable connection. The above-mentioned fixing mechanism effectively overcomes the risk of displacement caused by vibration or gravity, and keeps the preset position stable within the preset magnetic field area formed by the inner ring 14 of the magnetic field generating coil 12.

[0063] Optionally, the adsorption structure 13 is a vacuum adsorption structure 13, which adsorbs the surface of the analyte 18 by negative pressure.

[0064] In this embodiment, the vacuum adsorption structure 13 is a device that utilizes the principle of negative pressure to achieve adsorption and fixation. This device includes a negative pressure generating unit and an adsorption interface unit. The negative pressure generating unit creates a pressure environment lower than the ambient air pressure, and the adsorption interface unit transfers the negative pressure to the area in contact with the object 18. For example, the negative pressure generating unit may include a combination of a vacuum pump and a vacuum pipeline, where the vacuum pump draws air from the pipeline to create negative pressure; alternatively, the negative pressure generating unit may include a Venturi effect generator, utilizing compressed gas flowing through a variable cross-section pipe to generate negative pressure. The adsorption interface unit may include a flexible sealing contact surface to ensure that the negative pressure effectively acts on the surface of the object 18.

[0065] In this embodiment, the vacuum adsorption structure 13 establishes a sealed space in the contact area between the adsorption interface unit and the surface of the test object 18. The negative pressure generating unit continuously reduces the air pressure within this sealed space, causing the ambient atmospheric pressure to press the test object 18 towards the adsorption interface unit. Alternatively, the vacuum adsorption structure 13 provides a porous adsorption layer in the adsorption interface unit, and the negative pressure acts on the surface of the test object 18 through the pores to achieve distributed adsorption and fixation. The adsorption interface unit includes, but is not limited to, an array of elastic suction cups or an adsorption plate with a sealing ring. The elastic suction cup array adapts to the curved surface of the test object 18 through multiple independent suction cups, and the adsorption plate with a sealing ring forms a closed adsorption area through the annular sealing ring.

[0066] In this way, by setting the adsorption structure 13 as a vacuum adsorption structure, the surface of the test object 18 is adsorbed using negative pressure. This fixing method does not require mechanical clamping and the adsorption force is evenly distributed, effectively avoiding damage to the surface of the test object 18 or obstruction of the detection area. Combined with the continuous action of the adsorption structure 13, it ensures that the test object 18 remains stably connected to the stage during the adjustment of the conveyor structure or the rotation of the rotating structure, significantly reducing the risk of displacement caused by vibration or gravity, and ensuring that the preset position is stably within the preset magnetic field area of ​​the inner ring 14 of the magnetic field generating coil 12 throughout the entire detection cycle.

[0067] Optionally, the magneto-optical effect detection component 10 includes a first magneto-optical effect detection component 111 and a second magneto-optical effect detection component 112. The first magneto-optical effect detection component 111 is used to detect a preset position on a first side of the object under test 18. The second magneto-optical effect detection component 112 is used to detect a preset position on a second side of the object under test 18.

[0068] In this embodiment, both sides of the object under test 18 require magnetic detection. Accordingly, a light source and a detector can be used as magneto-optical effect detection components 10, and at least one magneto-optical effect detection component 10 can be provided on each of the two sides of the object under test 18 where detection is required, to achieve double-sided detection of the object under test 18. Specifically, a first light source and a first detector, serving as a first magneto-optical effect detection component 111, can be located on the left side of the object under test 18; a second light source and a second detector, serving as a second magneto-optical effect detection component 112, can be located on the right side of the object under test 18. The two magneto-optical effect detection components 10 can detect the magnetism on both sides of the object under test 18 respectively. When detecting the magnetism on both sides of the object under test 18, in some cases, a single magnetic field generating coil 12 is sufficient to ensure that the magnetic field environment at the preset positions on both sides of the object under test 18 meets the detection requirements; in other cases, a single magnetic field generating coil 12 is insufficient to ensure that the magnetic field environment at the preset positions on both sides of the object under test meets the detection requirements. At least one magnetic field generating coil 12 can be provided on each side of the object under test 18 as needed. Of course, as needed, a required number of magnetic field generating coils 12 can be set on both sides of the object under test 18. Specifically, the first magnetic field generating coil is set on the left side of the object under test 18, and the second magnetic field generating coil is set on the right side of the object under test 18. The first and second magnetic field generating coils can be set continuously in the axial direction, or they can be set at a predetermined distance. The object under test 18 can be inserted into the inner ring 14 of the first and / or second magnetic field generating coils under the drive of the conveying structure.

[0069] In this embodiment, to further ensure that the magnetic field environment at the preset positions on both sides of the object under test 18 is the same, two magnetic field generating coils 12 can be symmetrically arranged on both sides of the object under test 18. In some cases, the performance or structure of the first magnetic field generating coil and the second magnetic field generating coil are the same; alternatively, the performance or structure of the first magnetic field generating coil and the second magnetic field generating coil can be different. The positional relationship between the first magnetic field generating coil and the second magnetic field generating coil and the object under test 18 is configured according to the detection requirements to configure the magnetic field environment of the object under test 18.

[0070] In this embodiment of the present disclosure, when a first magnetic field generating coil and a second magnetic field generating coil are provided, in some cases, it is necessary for the first magnetic field generating coil and the second magnetic field generating coil to generate magnetic fields approximately simultaneously. Accordingly, the first magnetic field generating coil and the second magnetic field generating coil provided on both sides of the object under test 18 can be connected to the same pulse power supply device 19, or the first magnetic field generating coil and the second magnetic field generating coil provided on both sides of the object under test 18 can be connected to different first pulse power supply devices 19 and second pulse power supply devices 19 respectively, and the first pulse power supply devices 19 and the second pulse power supply devices 19 can be controlled synchronously so that the currents of the first magnetic field generating coil and the second magnetic field generating coil are approximately synchronized.

[0071] Thus, some testing requirements necessitate simultaneous monitoring of magnetic changes on both sides of the test object 18. For instance, when the test object 18 is a double-sided magnetic material, the magnetic properties of each side need to be analyzed independently. By setting up a first magneto-optical effect detection component 111 and a second magneto-optical effect detection component 112, which are respectively used to detect the preset positions of the first and second sides of the test object 18, it is possible to achieve simultaneous double-sided detection without moving the test object 18. This avoids time delays and positioning errors caused by repeatedly adjusting the stage position or switching the detection surface, thereby improving testing efficiency and ensuring the comprehensiveness and consistency of the data.

[0072] Optionally, the preset position is located within a set distance range of the intersection of the axis of the magnetic field generating coil 12 and the surface of the object under test 18.

[0073] In this embodiment, the set distance range refers to a predefined spatial region centered on the intersection of the axis of the magnetic field generating coil 12 and the surface of the object under test 18. This region ensures that the magnetic field environment at the preset position meets the detection requirements, such as magnetic field uniformity or intensity stability. The set distance range includes boundaries defined based on geometric dimensions or physical characteristics. For example, the set distance range can be an annular region with a radial distance not exceeding a first length, or a cylindrical region with an axial distance not exceeding a second length; or, the set distance range can be a region within contour lines where the rate of change of magnetic field intensity is less than a first proportion, or an ellipsoidal region with uniform magnetic field lines. By defining the preset position through the set distance range, the positioning of the preset position can adapt to different sizes of the object under test 18, and ensure that the preset magnetic field generated by the magnetic field generating device effectively covers the preset position, avoiding data deviation caused by deviation of the detection position.

[0074] In this way, by setting the magneto-optical effect detection component 10 to include a first magneto-optical effect detection component 111 and a second magneto-optical effect detection component 112, which act independently at different preset positions on the first and second sides of the test object 18, the ability to simultaneously detect the two surface regions of the test object 18 is achieved. This dual-component architecture expands the detection coverage, allowing the magnetic features of both sides of the test object 18 to be captured simultaneously. Combined with the stage's ability to adjust the position of the test object 18, the dual detection components can be precisely aligned with their respective preset positions, ensuring that both detection points are within the effective range of the magnetic field generator and that the optical path is independently optimized, thereby improving the comprehensiveness and efficiency of the magnetic detection data.

[0075] Optionally, the magnetic field generating coil 12 is a poleless and coreless hollow coil with its axis perpendicular to the surface of the object being measured 18, and the detection light passes through the inner ring 14 of the magnetic field generating coil 12 and is incident to a preset position.

[0076] In this way, by setting the magnetic field generating coil 12 as a poleless, coreless hollow coil with its axis perpendicular to the surface of the object under test 18, the interference of induced current in the magnetic core material is eliminated. This allows the magnetic field generating coil 12 to quickly respond to the pulse current from the pulse power supply device 19, thereby forming a high-intensity magnetic field that changes rapidly at a preset position. Simultaneously, the design of the detection light directly passing through the inner ring 14 of the coil and incident at the preset position avoids the physical obstruction of the optical path by the traditional magnetic pole head, ensuring that the polarized light of the magneto-optical effect detection component 10 accurately covers the preset area. The synergistic effect of these two elements optimizes the dynamic performance and intensity of the magnetic field while ensuring the integrity of the optical path transmission, ultimately improving the accuracy and reliability of magnetic detection.

[0077] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A magnetic detection device, characterized in that, include: The magneto-optical effect detection component includes a light source and a detector. The detection light emitted by the light source is polarized light at least at a preset position incident on the test object. The detector detects the magneto-optical effect at the preset position based on the received detection light. A magnetic field generating device includes a magnetic field generating coil and a pulse power supply device for supplying current to the magnetic field generating coil. The magnetic field generating coil is configured to form a magnetic field environment at least at a preset position. The stage is used to move the object being measured.

2. The apparatus according to claim 1, characterized in that, The stage includes: A conveying structure is used to move the object being measured in a first direction; The first direction is perpendicular to the surface of the preset position of the object being measured.

3. The apparatus according to claim 2, characterized in that, The transmission structure includes: The object to be measured is fixed on the conveyor rod. A driving device, connected to a transmission rod, is used to drive the transmission rod to move along a first direction, so that the sample rod carries the test object into the inner ring of the magnetic field generating coil.

4. The apparatus according to claim 1, characterized in that, The stage includes: A rotating structure is used to rotate the object being measured.

5. The apparatus according to claim 4, characterized in that, The rotating structure causes the object being measured to rotate within the plane of a preset position; and / or, The rotating structure causes the object being measured to rotate out of the plane where the preset position is located.

6. The apparatus according to claim 1, characterized in that, The stage includes: Adsorption structures are used to adsorb analytes to immobilize them.

7. The apparatus according to claim 6, characterized in that, The adsorption structure is a vacuum adsorption structure, which adsorbs the surface of the analyte by negative pressure.

8. The apparatus according to any one of claims 1 to 7, characterized in that, The magneto-optical effect detection component includes: The first magneto-optical effect detection component is used to detect a preset position on the first side of the object under test; The second magneto-optical effect detection component is used to detect a preset position on the second side of the object being tested.

9. The apparatus according to any one of claims 1 to 7, characterized in that, A pulse power supply device, comprising: Capacitor pulse power supply device; and / or, Inductive pulse power supply device; and / or, Mechanical energy pulse power supply device.

10. The apparatus according to any one of claims 1 to 7, characterized in that, The magnetic field generating coil is a poleless and coreless hollow coil with its axis perpendicular to the surface of the object being measured. The detection light passes through the inner ring of the magnetic field generating coil and is incident at a preset position.

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