Surface emitters and methods for producing surface emitters

Abstract

A surface emitter (100) and a method (200, 400, 600) for producing surface emitters (100) are disclosed, wherein a method for producing surface emitters comprises: providing a substrate structure, comprising: a substrate with a plurality of depressions and a plurality of ribs, each rib being arranged between two immediately adjacent depressions of the plurality of depressions, and a plurality of epitaxial layers, each epitaxial layer being arranged over a rib of the plurality of ribs and extending laterally beyond the rib such that each of the two immediately adjacent depressions forms a respective gap between the epitaxial layer and the substrate;Forming a plurality of surface emitter structural elements by forming at least one surface emitter structural element over a top surface of each epitaxial layer facing away from the substrate; and forming a mirror structure at least over the plurality of surface emitter structural elements and over exposed sections of a bottom surface of each epitaxial layer facing the substrate.