MEMS MIRROR DEVICE, LIDAR DEVICE, AND VEHICLE WITH A LIDAR DEVICE
Patent Information
- Application Number
- DE602022021795
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2022-01-11
- Publication Date
- 2025-09-24
- Estimated Expiration
- 2042-01-11
AI Technical Summary
Existing MEMS scanning mirrors face challenges in achieving a large scan angle, high stiffness, and robustness against vibrations and shocks while maintaining low mechanical stress and compact size, leading to trade-offs in design parameters.
A MEMS-mirror device with a mirror body rotationally suspended by torsion beams, where the beams are geometrically parallel and centered around the rotation axis, allowing for a compact design with reduced tensile stress and non-linearity, and coupled with out-of-plane support beams for enhanced stability and control.
The solution enables a larger scan angle, reduced mechanical stress, and improved resistance to vibrations, facilitating precise control and a smaller die size without compromising resonance frequency or stiffness.