Bidirectional bipolar junction transistor devices from bonded wide and thick wafers
Patent Information
- Application Number
- EP2023825569
- Authority / Receiving Office
- EP · EP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2022-12-08
- Filing Date
- 2023-11-17
- Publication Date
- 2025-10-15
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
Bidirectional bipolar junction transistors (BJTs) experience a significant collector-emitter voltage drop during current flow, leading to power loss, which is challenging to reduce in large volume production using thin semiconductor wafers due to increased risk of breakage and thickness constraints.
The method involves fabricating thin bidirectional BJT devices by bonding two thick semiconductor wafers together after grinding them into thin wafers, with different conductivity-type dopants activated using diffusion and laser anneal processes to form base and emitter/collector regions on both sides, allowing for closer positioning of collector-emitters and reducing the overall thickness.
This approach decreases the collector-emitter voltage drop by approximately 30% while enabling high-volume production on larger wafers, reducing the risk of breakage and maintaining high-quality drift regions with lower costs.