Waveguide device for photonic applications

Abstract

The invention relates to a waveguide device (1) for photonic applications. The waveguide device (1) comprises a plurality of light-guiding regions (6, 7), at least one first light-guiding region (6) being made of a first electro-optical light-guiding material and at least one second light-guiding region (7) being made of a different second electro-optical light-guiding material. The first light-guiding region (6) and the second light-guiding region (7) are arranged such that light guided in the first light-guiding region (6) can pass from there into the second light-guiding region (7).

Description

[0001] Fiber optic device for photonic applications

[0002] The present invention relates to a light guide device for photonic applications.

[0003] For example, light can offer more favorable properties than electricity for some technical applications, such as low-loss and high-speed data transmission. There are various materials that can be used for optical fibers. However, these often also have disadvantageous properties, for example, with regard to physical and optical properties, processing or processability, availability or procurement, and / or other aspects. Accordingly, there is still a need for improvements in this field.

[0004] The object of the present invention is to enable particularly effective and efficient photonic applications.

[0005] The problem is solved by the subject matter of the independent claims. Further possible embodiments of the invention are specified in the subclaims, the description, and the drawings. Features, advantages, and possible embodiments presented in the description for one of the subject matter of the independent claims are to be regarded at least analogously as features, advantages, and possible embodiments of the respective subject matter of the other independent claims, as well as any possible combination of the subject matter of the independent claims, optionally in conjunction with one or more of the subclaims.

[0006] The optical fiber device according to the invention can be used for photonic applications. The optical fiber device can therefore be used in particular for integrated optics. For example, the optical fiber device can be designed as a photonic integrated circuit (PIC) or as part of such a PIC. The optical fiber device has a plurality of light-guiding regions, wherein at least one first light-guiding region is formed from a first electro-optical light-guiding material and at least one second light-guiding region is formed from a different, second electro-optical light-guiding material, i.e., one that differs from the first light-guiding material.The first light-guiding area and the second light-guiding area are arranged such that light guided in the first light-guiding area can pass from the first light-guiding area into the second light-guiding area, i.e., can be coupled into or transferred therein, at least or only in certain areas, i.e., at least or only at a predetermined location. Likewise, light can pass in the opposite direction from the second light-guiding area into the first light-guiding area.

[0007] The optical fiber device according to the invention can therefore comprise light-guiding regions made of different materials with different electro-optical properties. By combining at least two different electro-optical materials for guiding the light, the advantages of the respective materials for different applications can be connected, i.e. combined, in the one optical fiber device according to the invention. This makes it possible to produce an optical fiber device with properties or behavior that would not be possible, or not without additional effort, using only a single electro-optical material for guiding the light. The present invention can therefore, for example, enable simplified and more precise modulation, optionally in combination with an overall increase in efficiency or reduced losses and / or reduced space requirements orhigher integration density and / or the like. Thus, the present invention can be used to implement correspondingly complex and / or precise photonic applications in a particularly compact manner.

[0008] Depending on the application or desired function, the light-guiding areas can be shaped or structured differently and / or arranged relative to one another. For example, the light-guiding areas can be partially or partially surrounded by other materials or components of the optical fiber device, which in particular do not conduct light, i.e., can be at least substantially non-transparent. Alternatively or additionally, an additional material, in particular an intermediate layer of silicon dioxide, can also be arranged between the light-guiding areas.

[0009] In one possible embodiment of the present invention, the light guide device also comprises a substrate, a cover material, and at least two electrodes arranged on different, in particular opposite, sides of the light guide device or the light-guiding regions. The substrate can be made of silicon, for example a silicon wafer or the like. The cover material at least partially surrounds the light-guiding regions or can be arranged between the light-guiding regions. At least a portion of the cover material is arranged between the light-guiding regions and the substrate. The cover material has a lower refractive index than the at least one light-guiding material arranged thereon or thereto. For example, the cover material can be or comprise silicon dioxide (SiCh).The cover material can thus prevent or limit the penetration or leakage of light guided in the light-guiding regions into the substrate. For this purpose, the substrate can, for example, be covered at least substantially over its entire surface with an intermediate layer made of the cover material. One or more of the light-guiding regions can then be arranged on this intermediate layer. Likewise, the cover material can laterally cover or mask the light-guiding regions, for example on an upper side facing away from or opposite the substrate and / or between this upper side and the substrate or the underside of the light-guiding regions facing the substrate. This can then prevent or limit the escape of light guided in the light-guiding regions. The light-guiding regions can also be protected from damage by the cover material.The cover material can also serve as a base or carrier for further components or materials, such as electrodes or the like arranged on the top side of the light-guiding regions, i.e., on the side facing away from the substrate. The structure of the light guide device proposed here can be realized or implemented, for example, using conventional methods of the semiconductor industry or semiconductor manufacturing technology, and is thus particularly simple, practical, reliable, and cost-effective. This allows for particularly precise shaping, structuring, and arrangement of the aforementioned components, in particular the light-guiding regions, to be achieved. The light guide device according to the invention can thus be used effectively and efficiently to implement photonic applications or functions.

[0010] In one possible development of the present invention, the electrodes of the light guide device comprise at least one surface electrode arranged on the underside of the substrate facing away from the light guide regions. This surface electrode can therefore extend at least substantially over the entire surface of the substrate or the surface or extent of the light guide regions. Alternatively, a layer of electrically conductive material between the substrate and the intermediate layer consisting of the cover material can also be designed as a surface electrode. The electrodes further comprise a plurality of individual electrodes arranged opposite this surface electrode above or to the side of the light guide regions. These individual electrodes are each arranged only at the position of one of the light guide regions. The individual electrodes can therefore each extend only over a part, in particular a small part, of the surface of the light guide device.For this purpose, the individual electrodes can, for example, be at least substantially circular or rectangular in shape, or extend in a strip-like manner along the intended primary light-guiding direction of the respective light-guiding region. For example, the individual electrodes can be arranged on the cover material mentioned elsewhere, which can then also be located at least between these upper-side individual electrodes and the light-guiding regions. The individual electrodes can, for example, be arranged in pairs, i.e., as pairs with different potentials, above a light-guiding region, in particular if the light guide device has a plurality of light-guiding regions arranged next to one another in the plane of the substrate or the surface electrode. This plane can, for example, be spanned by the main extension directions of the substrate or the surface electrode.If the surface electrode and the individual electrode(s) are arranged opposite one another, the plane can be perpendicular to a vertical direction or stacking direction of the light guide device leading from the surface electrode to the side of the individual electrode(s). In other words, this means that a voltage is applied between one or more upper-side individual electrodes and the surface electrode. If the light guide device has a plurality of light guide regions arranged next to one another in this plane, at least one individual electrode or at least a pair of individual electrodes can be assigned to each of these adjacent light guide regions, each of which is or are arranged in the vertical direction directly above the respective light guide region. Alternatively, as already mentioned, the individual electrodes can also be arranged directly next to or above the respective light guide region.be arranged to the side of a light guide area.

[0011] The electrodes can be used to generate an electric field that can fully or partially penetrate the light-guiding areas. Since the light-guiding areas are made of electro-optical materials, such an electric field, or its switching on and off or variation, can change the optical properties of the light-guiding areas or the light-guiding materials and / or the properties of the light guided therein. Thus, the light guided in the light-guiding areas can be modulated by appropriate electrical control or voltage application to the electrodes. This can be useful for a wide variety of photonic applications and tasks.

[0012] In a further possible embodiment of the present invention, in a surface area in which the first light-guiding area and the second light-guiding area overlap when viewed in at least one direction, a material for inhibiting the passage of light is arranged in some areas or in part between the light-guiding areas, while in another area, in particular the remaining area or part of this surface area, the light-guiding areas or the corresponding light-guiding materials are directly adjacent to one another, i.e. they bear against one another. The material for inhibiting the passage of light can in particular have a lower refractive index than the light-guiding materials of the two light-guiding areas. This material can, for example, be the cover material mentioned elsewhere. By means of the embodiment of the present invention proposed here, the passage orThe coupling of light from one of the light-guiding areas into the other light-guiding area can be limited, at least essentially, to the areas where these light-guiding areas directly adjoin one another, without requiring the implementation of a correspondingly complex structure or shape and arrangement of the light-guiding areas. This enables or implements a particularly precise, targeted specification of the optical or photonic behavior of the optical fiber device in a particularly simple and robust manner.For example, this can ensure that when the two light-guiding regions are arranged parallel or one above the other, light can be guided in one of the light-guiding regions over at least a predetermined distance - and in the process, for example, modulated or delayed in terms of wavelength, phase, or polarity - without it undesirably passing into the adjacent light-guiding region along the corresponding distance. At the same time, however, at the end of or after this distance, the light can then pass into the adjacent light-guiding region in a corresponding area free of the inhibiting material. In practice, however, it can also happen that thin layers of an inhibiting material are still present in a transition region between two adjacent light-guiding regions. It has been shown that light can still pass through thin layers of the inhibiting material.In a further possible embodiment of the present invention, the first light-guiding material has a smaller loss V during light guidance or light conduction, i.e. for the light guided or transported in the first light-guiding material, than the second light-guiding material. In particular, a material with V < 0.5 dB / cm, preferably V < 0.1 dB / cm, can be used as the first light-guiding material. In this case, a material can be selected as the first light-guiding material that has or causes lower attenuation during light conduction. In particular, a first light-guiding material can be selected for the first light-guiding region that can be structured on the largest possible areas, for example a wafer with a diameter of at least 200 mm or at least 300 mm, using the established processes of the semiconductor industry or semiconductor technology.For example, SiN, i.e. silicon nitride, or SiC, i.e. silicon carbide, or LiNbCh, i.e. lithium niobate, or AhCh, i.e. aluminum oxide, or TiCh, i.e. titanium dioxide or the like, can be used as the first light-guiding material. The first light-guiding material or the at least one first light-guiding region formed therefrom can be arranged closer to the underside of the light-guiding device, i.e. for example to the substrate mentioned elsewhere, than the second light-guiding region, in particular in the vertical direction or stacking direction of the light guide device mentioned elsewhere. The embodiment of the present invention proposed here thus makes it possible to realize a particularly large-area light-guiding basic structure of the light guide device in a particularly simple, effective and efficient manner using the at least one first light-guiding region.

[0013] In a further possible embodiment of the present invention, the second light-guiding material has a larger nonlinear refractive index n2 than the first light-guiding material. In other words, a material can be selected as the second light-guiding material, i.e., for forming or constructing the second light-guiding region, which has a particularly large second-order susceptibility. and has the largest possible nonlinear refractive index n2. Preferably, a material with

[0014] >3 pm / V or n2 >2.5x10exp(-19). The second light-guiding material can therefore have a particularly high electro-optical modulation capability, since the nonlinear refractive index n2 describes the dependence of the refractive index on the local electric field strength. Such a material can be, for example, Si, SiC, SiN, AlN, GaP, AlGaAs, LiNbOa, BaTiOa or an electro-optical polymer composite or the like. The embodiment of the present invention proposed here enables particularly effective and efficient modulation of the light guided there in the second light-guiding region. This allows corresponding photonic functions of the light guide device to be implemented particularly effectively, efficiently, and compactly, i.e. with a smaller size or low installation space requirement of the light guide device.

[0015] In a further possible embodiment of the present invention, the light guide device has a plurality of layers or plies arranged or stacked one above the other in the vertical direction or stacking direction. Different light guide regions are arranged in different layers or plies. A primary light guide or light transport direction of the light guide regions runs in a respective main extension plane of the respective layer that is perpendicular to the vertical direction or stacking direction. The different layers or plies or their main extension planes can therefore be arranged parallel to one another and one above the other in the vertical direction or stacking direction that is perpendicular to them. The light guide regions can be arranged at different heights or height levels, viewed or measured along the vertical direction.The proposed embodiment of the present invention allows the optical fiber device to be manufactured particularly simply and efficiently using or with only minor modification of established production processes. At the same time, the proposed arrangement of the light-guiding regions, i.e., their three-dimensional structure or distribution, allows for particularly compact and / or particularly complex photonic functions or applications to be realized. For example, different light-guiding regions can be arranged at different levels or heights, i.e., in different layers, and can intersect when viewed from above or in projection onto one of the layers, without actually influencing each other.

[0016] In a further possible embodiment of the present invention, in a transition region in which light can pass from the first light-guiding region into the second light-guiding region - or vice versa - at least one of the two light-guiding regions overlapping or abutting one another there has a shape that tapers towards the other light-guiding region. In other words, the corresponding light-guiding region can become narrower towards the other light-guiding region or, for example, taper to a point or cone, or the like. Such a tapered shape of the light-guiding region or regions can enable light guidance to be enhanced, i.e., to a greater extent outside a core of the respective light-guiding region. This, in turn, can then enable more effective coupling of this light into the other light-guiding region.This enables a correspondingly effective and efficient implementation of photonic functions or applications.

[0017] Alternatively, or in addition to a changing shape of the light-guiding areas in the transition region, the arrangement of electrodes and voltage application to the electrodes described above can be used to specifically adjust light transmission between two light-guiding areas. In particular, it may be desired that only light with a specific wavelength passes from, for example, a second light-guiding area to a first light-guiding area (or vice versa), while the remaining light remains in a second light-guiding area. In this way, targeted coupling into or out of a light-guiding area can be adjusted depending on the voltage application.

[0018] In a further possible embodiment of the present invention, the first light-guiding region comprises a plurality of sub-regions or sections that are spaced apart from one another. These sub-regions or sections are connected to one another by the second light-guiding region, such that light can pass from a first sub-region or sections of the first light-guiding region into the second light-guiding region and from there into the second sub-region or the second section of the first light-guiding region. In other words, the first light-guiding region can have an interruption, i.e. can be divided into two or more parts with a plurality of sub-regions or sections that are spaced apart from one another, in particular in the intended primary light-guiding direction. This interruption can then be bridged, for example, by the second light-guiding region. Likewise, this interruption can be bridged by the second light-guiding region orthe second light-guiding material or by the cover material mentioned elsewhere. The plurality of sub-regions or sub-pieces of the first light-guiding region can here in particular be arranged in the same layer or at the same height. For example, the plurality of sub-regions or sub-pieces of the first light-guiding region or the intended primary light-guiding directions in these sub-regions or sub-pieces can be arranged in alignment with one another. This can enable a particularly simple implementation of the embodiment of the present invention proposed here, but is not fundamentally necessary. The embodiment of the present invention proposed here can, for example, enable a particularly efficient orLow-loss guidance of the light over a relatively long distance in the sub-areas or sections of the first light-guiding area and, for example, particularly effective or extensive and / or efficient modulation or the like of the light in the second light-guiding area can be enabled. Thus, the different advantages or strengths of the various light-guiding materials can be combined and utilized particularly effectively and efficiently.

[0019] In a further possible embodiment of the present invention, the optical fiber device has at least one modulation device for modulating light. This modulation device is formed by the second light-guiding region, i.e. in particular from the second light-guiding material, or is arranged on the second light-guiding region, i.e., for example, directly adjacent to it, so that light can then pass from the first light-guiding region into the modulation device and / or from the modulation device into the second light-guiding region. The modulation device can, in particular, be a resonator or comprise a resonator. Such a resonator can, for example, be ring-shaped, stadium-shaped, or disk-shaped, i.e., as a ring resonator, racetrack resonator, disk resonator, or as a photonic crystal cavity (Photonic Crystal Cavity, PhC).Such a modulation device can be useful for implementing various photonic functions or applications, such as in communications engineering applications such as frequency comb generation, or applications in the field of quantum sensing or quantum computing with squeezed light states. Electrodes for applying a voltage are generally arranged in the region between the modulation device and the second light-guiding material, so that light transfer between the modulation device and the second light-guiding material can be adjusted. As already described, it may be desirable for only light of a specific wavelength to be coupled from the modulation device into the second light-guiding material. This can be achieved by applying a specific voltage to the electrodes.

[0020] Further features of the invention can be derived from the following description of the figures and from the drawings. The features and combinations of features mentioned above in the description, as well as the features and combinations of features shown below in the description of the figures and / or in the figures alone, can be used not only in the respective combinations specified, but also in other combinations or on their own, without departing from the scope of the invention.

[0021] The drawing shows:

[0022] Fig. 1 is a schematic cross-sectional view of a light guide device with several different light guide materials; and

[0023] Fig. 2 is a partial schematic perspective view of a corresponding light guide device with an integrated light modulation device.

[0024] Identical or functionally equivalent elements are provided with the same reference numerals in the figures.

[0025] Fig. 1 shows a schematic cross-sectional view of a first variant of a light guide device 1 for photonic applications. The light guide device 1 here has a layered structure or a layered assembly with several different layers. These layers are arranged or stacked one above the other in a stacking direction or vertical direction H indicated by an arrow.

[0026] A surface electrode 2 is arranged as the first layer on an underside of the light guide device 1. During operation, this can serve, for example, as a ground or earth electrode. In the vertical direction H above the surface electrode 2, the next layer is a substrate 3. The substrate 3 can, for example, be a silicon layer or a silicon wafer or the like. Above the substrate 3, the next layer is an intermediate layer 4, which in turn is partially adjoined by a cover layer 5. The intermediate layer 4 and the cover layer 5 can, for example, have been applied one after the other, i.e., in different manufacturing steps, but can, for example, consist entirely or partially of the same material, for example silicon dioxide. As already described above, in an alternative arrangement not shown here, the surface electrode 2 can also be arranged between the substrate 3 and the intermediate layer 4.Here, an interrupted layer made of a first light-guiding material is also applied to the intermediate layer 4, thereby forming a plurality of first light-guiding regions 6. These first light-guiding regions 6 can, for example, be formed from a first light-guiding material with electro-optical properties, such as SiC or SiN. To form the first light-guiding regions 6, a continuous layer made of the first light-guiding material can, for example, be applied to the intermediate layer 4 during the manufacture of the light guide device 1. This layer can then be partially removed, for example by etching, so that only the first light-guiding regions 6 remain. In this way, one or more first light guides or waveguides in the form of the first light-guiding regions 6 can be formed from the first light-guiding material.

[0027] A second light-guiding material, which also has electro-optical properties, is applied to these first light-guiding regions 6 as the next layer. A plurality of second light-guiding regions 7 are formed by this second light-guiding material. The first light-guiding material used to form the first light-guiding regions 6 and the second light-guiding material used to form the second light-guiding regions 7 are different, so that the first light-guiding regions 6, on the one hand, and the second light-guiding regions 7, on the other hand, have different electro-optical properties, i.e., properties for guiding and / or influencing light. For example, the second light-guiding regions 7 can be formed from LiNbOa or the like.

[0028] The cover layer 5, i.e. a corresponding cover material, which in particular can have a smaller refractive index compared to the first light-guiding material and the second light-guiding material, can be applied, for example, after the production of the first light-guiding regions 6 and the second light-guiding regions 6 in order to at least partially surround or envelop the light-guiding regions 6, 7.

[0029] Alternatively or additionally, a further intermediate layer (not shown here) can be applied between the two light-guiding regions 6, 7, which can in particular consist of the same material as the intermediate layer 4 and the cover layer 5.

[0030] The layer structure proposed here, comprising the substrate 3, the various light-guiding materials for the light-guiding regions 6, 7, and at least one intermediate layer or cover material for the intermediate layer 4 and the cover layer 5, makes it possible to ensure that light within the light-guiding device 1 is guided only in the light-guiding regions 6, 7. The arrangement of the light-guiding regions 6, 7 adjacent to one another at least in certain regions allows light to switch back and forth between these light-guiding regions 6, 7, for example, passing from one of the first light-guiding regions 6 into the second light-guiding region 7 arranged thereon and / or vice versa.

[0031] Because in particular the second light-guiding regions 7 are also covered upwards, i.e. on the upper side facing away from the substrate 3 and the surface electrode 2, by the cover layer 5, it can be prevented that correspondingly guided light escapes into the environment there.

[0032] On the upper side of the cover layer 5, individual electrodes 8 are arranged in the immediate or greatest possible proximity to the light-guiding regions 6, 7. These individual electrodes 8 can therefore be understood as a contacting layer above the cover layer 5. In the example shown here, individual electrodes 8 with different potentials are spatially and thus, in particular, also functionally assigned to the individual arrangements or groupings of light-guiding regions. Alternatively, individual electrodes with only one potential can also be functionally assigned to the groupings of light-guiding regions. By applying a respective voltage to the individual electrodes 8, in combination with the surface electrode 2, an electric field can be generated that at least partially penetrates the light-guiding regions 6, 7 and thus specifically modulates, i.e. influences, the light guided in the light-guiding regions 6, 7.For this purpose, the surface electrode 2 and the individual electrodes 8 can be made of a single metal. For example, the individual electrodes 8, in particular, can be made of gold or a gold alloy or the like. Depending on requirements, other materials can also be used, such as copper or silver or an alloy or the like.

[0033] In the manner shown here, as well as through other arrangements or configurations of the light-guiding regions 6, 7 and / or further light-guiding regions or light-guiding materials, for example, various photonic integrated circuits (PICs) can be realized. Although only two light-guiding layers at different height levels, i.e. at different locations along the vertical direction H, are shown here by way of example, in other examples or embodiments, three or more light-guiding layers can also be used, i.e., can be present or integrated in the light guide device 1. In this case, for example, one or more further first light-guiding regions 6 and / or second light-guiding regions 7 can be arranged at different height levels or in different layers than shown here. Likewise, one or more further light-guiding regions made of one or more other light-guiding materials can be provided.Likewise, the various light-guiding materials or areas cannot be adjacent to another light-guiding material or area in certain sections. Overall, this allows the different properties and advantages of the multitude of available light-guiding materials to be utilized in each section.

[0034] As a further example, Fig. 2 shows a partial schematic perspective view of the or a light guide device 1 in a second variant or with different or additional details. Here, too, the layer structure with the underside surface electrode 2, the overlying substrate 3, the intermediate layer 4, the cover layer 5 and light-guiding regions embedded therein is basically provided. The first light-guiding region 6 is divided here into a first partial region 6a and a second partial region 6b spaced therefrom. There is therefore an interruption 9 between the first partial region 6a and the second partial region 6b. This interruption 9 can, for example, be filled by the material of the cover layer 5.

[0035] Here, too, a second light-guiding region 7 is arranged on the first light-guiding region 6. This light-guiding region 7 extends from the first partial region 6a to beyond the second partial region 6b and bridges the interruption 9. The second light-guiding region 7 overlaps with both the first partial region 6a and the second partial region 6b in a respective overlap or coupling region 10. In these coupling regions 10, light can alternate, i.e., cross, between the light-guiding regions 6, 7. In the arrangement shown here, for example, light can be coupled into the first partial region 6a and guided therein to its coupling region 10. There, the light can cross into the second light-guiding region 7 and then be guided within it to the second partial region 6b.In the coupling region 10 thereof, the light can then pass from the second light-guiding region 7 into the second sub-region 6b and be guided further there. In addition, the light guide device 1 comprises a modulation device 11, which is also made of a light-conducting or light-guiding, in particular electro-optical, material. For example, the modulation device 11 can be made of the same second light-guiding material as the second light-guiding region 7, which is indicated here by a corresponding marking of the modulation device 11 and second light-guiding region 7. However, the modulation device 11 could equally well be made of a different light-guiding material, for example. The modulation device 11 can be directly adjacent to the second light-guiding region or can be optically, i.e. light-guidingly, coupled to it. In particular, the second light-guiding region 7 orThe part connecting the subregions 6a, 6b and the modulation device 11 are arranged in the same layer, i.e., at the same height level in the vertical direction H. The modulation device 11 is designed here as a resonator, for example, an annular one. The light coupled from the first subregion 6a into the second light-guiding region 7 in the corresponding coupling region 10 can thus first pass through the modulation device 11 and then—for example, in a correspondingly modulated, i.e., modified or influenced, form—be coupled into the second subregion 6b via the other coupling region 10.

[0036] Other arrangements or configurations are also possible. For example, instead of the interruption 9, the first light-guiding region 6 could be designed to be continuous. In this case, a material for inhibiting the passage of light between the two light-guiding regions 6, 7, i.e., for example, a part or section of the cover layer 5, could be arranged in the region occupied here by the interruption 9 between the first light-guiding region 6 and the second light-guiding region 7. This would then allow a portion of the light to be guided continuously in the first light-guiding region 6, while another portion of the light could be coupled into the second light-guiding region 7 and, if necessary, modulated in the modulation device 11.

[0037] The embodiment of the light guide device 1 shown here can also have one or more electrodes opposite the surface electrode 2, for example the individual electrodes 8, which, however, are not explicitly shown here for the sake of clarity. Alternatively, as already noted, the surface electrode can also be arranged between the substrate 3 and the intermediate layer 4, although this is not shown here. By appropriately electrically controlling the electrodes, for example, the passage of light from the first light-guiding region 6 into the second light-guiding region 7 and / or vice versa can be controlled. Using the arrangements and principles described here, light can therefore be guided as required or switched between different light-guiding regions and materials in order to implement photonic functions or applications.Depending on the light-guiding materials used and the applied voltages or electric fields, various properties of the guided light, such as its wavelength, can be influenced or controlled. This can be useful, for example, for applications in the field of photonic quantum computing.

[0038] LIST OF REFERENCE SYMBOLS

[0039] 1 fiber optic device

[0040] 2 Surface electrode 3 Substrate

[0041] 4 Intermediate layer

[0042] 5 Top layer

[0043] 6 first light guide area

[0044] 6a first section 6b second section

[0045] 7 second light guide area

[0046] 8 single electrodes

[0047] 9 Interruption

[0048] 10 Coupling area 11 Modulation device

[0049] H Vertical direction

Claims

PATENT CLAIMS 1. Optical fiber device (1) for photonic applications, comprising a plurality of light guide areas (6, 7), wherein - at least one first light-guiding region (6) is formed from a first electro-optical light-guiding material, - at least one second light-guiding region (7) is formed from another second electro-optical light-guiding material, and - the first light guide area (6) and the second light guide area (7) are arranged such that light guided in the first light guide area (6) can pass from there into the second light guide area (7).

2. Optical fiber device (1) according to claim 1, characterized in that the optical fiber device (1) has a substrate (3), in particular made of silicon, a cover material (4, 5), in particular silicon dioxide, which at least partially surrounds the light-guiding regions (6, 7) and is arranged at least between these and the substrate (3) and has a smaller refractive index than the at least one light-guiding material (6, 7) arranged thereon, and at least two electrodes (2, 8) arranged on different sides of the optical fiber device (1).

3. Optical fiber device (1) according to claim 2, characterized in that the electrodes (2, 8) comprise a surface electrode (2) arranged on the underside of the substrate (3) facing away from the light-guiding regions (6, 7) and at least one individual electrode (8) arranged opposite this above or to the side of the light-guiding regions (6, 7) in each case only at the position of one of the light-guiding regions (6, 7).

4. Optical fiber device (1) according to one of the preceding claims, characterized in that in a surface area in which the first light-guiding area (6) and the second light-guiding area (7) overlap in at least one direction (H), a material (5), in particular with a Light-guiding materials with a smaller refractive index are arranged to inhibit the passage of light between the light-guiding regions (6, 7) and the light-guiding regions (6, 7) partially lie directly against one another or the material (5) in a surface area in which the first light-guiding region (6) and the second light-guiding region (7) overlap when viewed in at least one direction (H), is reduced in its extent in direction (H) compared to the remaining surface area.

5. Optical fiber device (1) according to one of the preceding claims, characterized in that the first light-guiding material has a smaller loss V in the light guidance than the second light-guiding material, in particular V < 0.5 dB / cm, preferably V < 0.1 dB / cm.

6. Optical fiber device (1) according to one of the preceding claims, characterized in that the second light-guiding material has a larger non-linear refractive index n2 than the first light-guiding material, in particular n > 2.5x10' 19 , and / or has a greater second-order susceptibility than the first light-guiding material, in particular > 3 pm / V.

7. Optical fiber device (1) according to one of the preceding claims, characterized in that the optical fiber device (1) has a plurality of layers arranged one above the other in a vertical direction (H), wherein different ones of the light-guiding regions (6, 7) are arranged in different layers and a primary light-guiding direction of the light-guiding regions (6, 7) runs in a respective main extension plane of the respective layer which is perpendicular to the vertical direction (H).

8. Light guiding device according to one of the preceding claims, characterized in that in a transition area (10), in which light can pass from the first light guiding area (6) into the second light guiding area (7), at least one of the two Light guide areas (6, 7) have a shape that tapers towards the other light guide area (7, 6).

9. Light guiding device according to one of the preceding claims, characterized in that in a transition region (10), in which light can pass from the first light guiding region (6) into the second light guiding region (7), electrodes for applying a voltage for applying a voltage to the transition region (10) are arranged.

10. Optical fiber device (1) according to one of the preceding claims, characterized in that the first light guide region (6) comprises a plurality of spaced-apart partial regions (6a, 6b) which are connected to one another by the second light guide region (7), so that light can pass from a first partial region (6a) of the first light guide region (6) into the second light guide region (7) and from there into the second partial region (6b) of the first light guide region (6). 11 . Optical fiber device (1) according to one of the preceding claims, characterized in that the optical fiber device (1) has a modulation device (11) for modulating light, in particular a resonator, which is formed by the second light guide region (7) or arranged on the second light guide region (7) so that light can pass between the second light guide region (7) and the modulation device (11).

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