Imaging element unit, blur correction device, and imaging apparatus

Abstract

To provide an imaging element unit including an imaging element, a blur correction device for correcting a blur by moving a movable part, and an imaging apparatus including the imaging element unit.SOLUTION: The imaging element unit according to one aspect of the present invention includes the imaging element, an optical member arranged on the imaging surface side of the imaging element, and a vibration application device arranged on a first surface of the optical member. A second surface facing the first surface of the optical member has a first area including an area overlapped with the vibration application device when seeing through in an optical axis direction of the imaging element and a second area which is out of the first area and surface characteristics are different between the first area and the second area. In the imaging element unit according to the aspect, the vibration application device is preferably fixed to the first surface by utilizing the difference in the surface characteristics.SELECTED DRAWING: Figure 14

Description

[Technical field]

[0001] The present invention relates to an image sensor unit, a blur correction device including an image sensor unit, and an imaging device. [Background technology]

[0002] With regard to techniques for correcting blur in an imaging device, for example, Patent Documents 1 and 2 disclose image stabilization mechanisms that include a fixed portion, a movable portion, a yoke, a coil, and the like. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2007-135198 A [Patent Document 2] JP 2013-187832 A Summary of the Invention

[0004] One embodiment of the technique of the present disclosure provides an image sensor unit including an image sensor, a blur correction device that corrects blur by moving a movable part, and an imaging device including the image sensor unit. [Means for solving the problem]

[0005] The imaging element unit according to a first aspect of the present invention is an imaging element unit comprising an imaging element, an optical element arranged on the imaging surface side of the imaging element, and a vibration imparting device arranged on a first surface of the optical element, wherein a second surface opposite the first surface of the optical element has a first region including an area that overlaps with the vibration imparting device when viewed through the optical axis direction of the imaging element, and a second region which is an area other than the first region, and the first region and the second region have different surface characteristics.

[0006] The imaging element unit according to the second aspect of the present invention is the first aspect, in which the vibration imparting device is fixed to the first surface by utilizing a difference in surface characteristics.

[0007] In the imaging element unit of the third aspect, in the first or second aspect, the vibration imparting device is fixed to the first surface by irradiating ultraviolet light through the first area onto an ultraviolet-curing adhesive applied between the first surface and the vibration imparting device.

[0008] The image pickup element unit according to a fourth aspect is the image pickup element unit according to any one of the first to third aspects, wherein the surface characteristic is a cut rate of ultraviolet rays.

[0009] The image sensor unit according to the fifth aspect is the image sensor unit of the fourth aspect, wherein the cut rate in the first region is lower than the cut rate in the second region.

[0010] The image pickup element unit according to a sixth aspect is any one of the first to fifth aspects, in which the optical member is a glass member that blocks infrared light.

[0011] The image pickup element unit according to a seventh aspect is any one of the first to fifth aspects, in which dust adhering to the optical member is removed by vibrating the optical member with a vibration imparting device.

[0012] The imaging element unit according to an eighth aspect is the imaging element unit according to any one of the first to seventh aspects, wherein the vibration imparting device is a piezoelectric element.

[0013] An image sensor unit according to a ninth aspect is any one of the first to eighth aspects, wherein the first surface is a surface of the optical member on the image sensor side.

[0014] A blur correction device according to a tenth aspect of the present invention includes a fixed part having a magnet member and a yoke member, an image sensor unit according to any one of the first to ninth aspects, and a movable part having a coil member, and corrects image blur by moving the movable part within a plane intersecting the optical axis of the image sensor.

[0015] A motion compensation device according to an eleventh aspect is the tenth aspect, wherein the yoke member is composed of a first yoke in which a magnet member is provided, and a second yoke that is disposed apart from the first yoke.

[0016] A twelfth aspect of the invention relates to the image stabilizer of the eleventh aspect, wherein at least a portion of the gap between the side surfaces of the first yoke and the second yoke is sealed by a first dustproof member.

[0017] A thirteenth aspect of the image stabilizer is the eleventh or twelfth aspect, wherein at least a part of a gap between the second yoke and the movable part in the direction of the optical axis of the imaging element is blocked by a second dustproof member.

[0018] A blur correction device according to a fourteenth aspect is any one of the tenth to thirteenth aspects, wherein the movable section includes a degreased section on an opposite side to the imaging element with respect to the coil member.

[0019] A blur correction device according to a fifteenth aspect is any one of the tenth to fourteenth aspects, wherein the movable portion includes a dust collecting member between the coil member and the imaging element.

[0020] An imaging device according to a sixteenth aspect of the present invention includes the image stabilizer according to any one of the tenth to fifteenth aspects, and an optical system that forms an optical image of a subject on an imaging element.

[0021] The imaging device of the 17th aspect is the 16th aspect, in which no other optical components are interposed in the direction of the optical axis between the optical element and the rearmost lens, which is the lens among the lenses constituting the optical system that is located closest to the imaging surface of the imaging element.

[0022] An imaging device according to an eighteenth aspect is an imaging device in the sixteenth or seventeenth aspect, which is an integrated lens type imaging device.

[0023] The imaging device of the 19th aspect is any one of the 16th to 18th aspects, in which the image stabilization device is in contact with the lens frame that holds the lens via a cushioning member, and the lens frame is provided with a dust absorption member in a position between the coil member and the imaging element. [Brief description of the drawings]

[0024] [Figure 1] FIG. 1 is a diagram showing a schematic configuration of an imaging device according to the first embodiment. [Diagram 2] FIG. 2 is a block diagram showing the internal configuration of the imaging device according to the first embodiment. [Diagram 3] FIG. 3 is a front perspective view showing the configuration of the image stabilization device. [Figure 4] FIG. 4 is a perspective view showing the drive yoke as viewed from the photographer's side (−Z side). [Diagram 5] FIG. 5 is a perspective view showing the drive yoke as viewed from the subject side (+Z side). [Figure 6] FIG. 6 is a perspective view showing the counter yoke as viewed from the subject side (+Z side). [Figure 7] FIG. 7 is a front view showing the holding frame of the movable portion. [Figure 8] FIG. 8 is a diagram showing how the ball is received by the first ball receiving surface. [Figure 9] FIG. 9 is a diagram showing the state of biasing by the biasing member. [Figure 10] FIG. 10 is a schematic diagram showing the positional relationship between the rearmost lens and the optical members. [Figure 11] FIG. 11 is a diagram showing how the image pickup element unit is controlled. [Figure 12] FIG. 12 is a diagram showing the configuration of an image sensor unit in a lens-interchangeable camera. [Figure 13] FIG. 13 is a diagram showing the configuration of the image sensor unit according to the first embodiment. [Figure 14] FIG. 14 is a diagram showing the ranges in which various coatings are provided in an optical member. [Figure 15] FIG. 15 is a diagram showing the arrangement of optical members and piezoelectric elements in the image sensor unit. [Figure 16] FIG. 16 is a diagram showing the arrangement of an image pickup device unit and a yoke in the image stabilization device. [Figure 17]FIG. 17 is a diagram showing the arrangement of the dust attracting member and the dust preventing member in the image stabilization device. [Figure 18] FIG. 18 is another diagram showing the arrangement of the dust attracting member and the dust preventing member in the image stabilization device. [Figure 19] FIG. 19 is a diagram showing the arrangement of dustproof members in the image stabilization device. [Figure 20] FIG. 20 is a diagram showing a modified example of the image stabilization device (without dust protection). [Figure 21] FIG. 21 is a diagram showing a modified example of the image stabilization device (with dust countermeasures). [Figure 22] FIG. 22 is a diagram showing a schematic configuration of an imaging device according to the second embodiment. [Figure 23] FIG. 23 is a block diagram showing the internal configuration of an imaging device according to the second embodiment. [Figure 24] FIG. 24 is a diagram showing how the image pickup element unit is controlled. [Diagram 25] FIG. 25 is a schematic diagram showing an image sensor unit according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] Hereinafter, preferred embodiments of an image sensor unit, a motion compensation device, and an image pickup device according to the present invention will be described with reference to the accompanying drawings. In the following drawings, in order to make the description easier to understand, some components may be omitted and / or the colors, line types, etc. of the components may be changed.

[0026] [First embodiment] [Configuration of imaging device] First, an imaging apparatus incorporating an image sensor unit and a shake correction device will be described. Fig. 1 is a diagram showing a schematic configuration of an imaging apparatus according to a first embodiment.

[0027] The imaging device 10 (imaging device) is a camera with an integrated lens, and a lens device 12 (optical system) is attached to an imaging device body 2. The lens device 12 includes an aperture 8 (optical system), a lens group 12A (optical system), and a lens group 12B (optical system), and has an optical axis L (optical axis). The lens device 12 forms an optical image of a subject 1 (subject) on an imaging element (imaging element 17; see FIGS. 10, 12, etc.) included in an imaging element unit 16 (imaging element unit). The imaging device body 2 includes an eyepiece 4, and a photographer can view the subject 1 by placing his or her eye on the eyepiece 4.

[0028] The imaging element 17 (imaging element unit 16) is held by a holding frame 112 (see FIG. 7, etc.) of the movable part 110, and the imaging element 17 (imaging element) has an imaging surface 17A (imaging surface, light receiving surface; see FIG. 11, etc.) arranged along a plane (XY plane) formed by two directions (X direction and Y direction) perpendicular to the optical axis L (Z direction). The optical axis L is an axis passing through the center of the imaging element 17, and the imaging element 17 and the lens device 12 are arranged so that the optical axis L of the imaging element 17 coincides with the optical axis of the lens device 12. As will be described in detail later, the control unit 40 controls the drive unit 58 of the vibration correction device 100 to realize the vibration correction function. As will be described in detail later, the control unit 40 vibrates the optical member (optical member 18; see FIG. 11, etc.) with a vibration imparting device (piezoelectric element 19: see FIG. 11, etc.), thereby making it possible to remove dust attached to the optical member.

[0029] 2 is a block diagram showing one embodiment of the internal configuration of the imaging device 10. This imaging device 10 records captured images on a memory card 54, and the operation of the entire device is centrally controlled by a control unit 40 including a processor such as a CPU (Central Processing Unit).

[0030] The imaging device 10 is provided with an operation unit 38 including a shutter button, a power / mode switch, a mode dial, a cross button, etc. Signals (commands) from this operation unit 38 are input to a control unit 40, and the control unit 40 controls each circuit of the imaging device 10 based on the input signals, and performs drive control of the imaging element 17, lens drive control, aperture drive control, imaging operation control, image processing control, image data recording / playback control, display control of the image monitor 30, etc.

[0031] The light beam passing through the lens device 12 is focused on an image sensor 17 (image sensor) which is a CMOS (Complementary Metal-Oxide Semiconductor) type color image sensor. Note that the image sensor 17 is not limited to the CMOS type, and may be another type of image sensor such as a CCD (Charge Coupled Device) type or an organic image sensor.

[0032] The image sensor 17 has a large number of light receiving elements (e.g. photodiodes) arranged two-dimensionally, and the subject image formed on the light receiving surface of each light receiving element is converted (photoelectrically converted) into a signal voltage (or charge) in an amount corresponding to the amount of incident light, and then converted into a digital signal via an A / D (Analog / Digital) converter in the image sensor 17 and output.

[0033] An image signal (image data) read out from the imaging element 17 when capturing a moving image or a still image is temporarily stored in a memory 48 (for example, a Synchronous Dynamic Random Access Memory (SDRAM)) via an image input controller 22.

[0034] Furthermore, a flash memory 47 stores a camera control program and various parameters and tables used for image processing and the like.

[0035] The sensor 66 is a camera shake sensor that detects the attitude information and attitude change information of the imaging device 10. The sensor 66 is composed of, for example, a gyro sensor. The sensor 66 is composed of, for example, two gyro sensors for detecting the amount of camera shake in the vertical direction (+Y, -Y directions) and the horizontal direction (+X, -X directions), and the detected amount of camera shake (angular velocity) is input to the control unit 40. The control unit 40 controls the drive unit 58 to perform shake correction by moving the image sensor 17 so as to cancel the movement of the subject image according to the camera shake. A gyro sensor for detecting the amount of camera shake in a rotational direction (for example, around the Z axis) may be provided in the sensor 66, and shake correction may be performed to cancel the camera shake in this rotational direction.

[0036] The driving unit 58 (driving mechanism) is controlled by the control unit 40. The driving unit 58 is configured with a voice coil motor (VCM) (to be described later) and the like.

[0037] The image processing unit 24 reads unprocessed image data acquired via the image input controller 22 when capturing a moving image or a still image and temporarily stored in the memory 48. The image processing unit 24 performs offset processing, pixel interpolation processing (interpolation processing for phase difference detection pixels, defective pixels, etc.), white balance correction, gain control processing including sensitivity correction, gamma correction processing, synchronization processing (also called "demosaic processing"), luminance and color difference signal generation processing, contour enhancement processing, color correction, etc. Image data processed by the image processing unit 24 and processed as a live view image is input to a VRAM (Video RAM, RAM: Random access memory) 50.

[0038] The image data read out from the VRAM 50 is encoded by the video encoder 28 and output to an image monitor 30 provided on the rear surface of the camera. As a result, a live view image showing the subject image is displayed on the image monitor 30.

[0039] The image data (luminance data (Y) and color difference data (Cb), (Cr)) processed by the image processing unit 24 as a still image or a moving image for recording is stored in the memory 48 again.

[0040] When recording a still image or a moving image, the compression / decompression processing unit 26 performs compression processing on the luminance data (Y) and color difference data (Cb), (Cr) that have been processed by the image processing unit 24 and stored in the memory 48. The compressed image data is recorded on a memory card 54 via a media controller 52.

[0041] In addition, in the playback mode, the compression / decompression processing unit 26 performs decompression processing on compressed image data obtained from the memory card 54 via the media controller 52. The media controller 52 records and reads compressed image data onto the memory card 54.

[0042] In the above embodiment, the hardware structure of the processing unit such as the control unit 40 that executes various processes is various processors as shown below. The various processors include a CPU (Central Processing Unit), which is a general-purpose processor that executes software (programs) and functions as various processing units, a programmable logic device (PLD), which is a processor whose circuit configuration can be changed after manufacture such as an FPGA (Field Programmable Gate Array), and a dedicated electric circuit, which is a processor having a circuit configuration designed exclusively for executing specific processes such as an ASIC (Application Specific Integrated Circuit).

[0043] One processing unit may be configured with one of these various processors, or may be configured with two or more processors of the same or different types (for example, multiple FPGAs, or a combination of a CPU and an FPGA). Also, multiple processing units may be configured with one processor. As an example of configuring multiple processing units with one processor, first, as represented by a computer such as a client or server, there is a form in which one processor is configured with a combination of one or more CPUs and software, and this processor functions as multiple processing units. Second, as represented by a system on chip (SoC), there is a form in which a processor is used that realizes the functions of the entire system including multiple processing units with one IC (Integrated Circuit) chip. In this way, the various processing units are configured using one or more of the above various processors as a hardware structure.

[0044] Furthermore, the hardware structure of these various processors is, more specifically, an electric circuit that combines circuit elements such as semiconductor elements.

[0045] [Structure of image stabilization device] Next, we will explain the configuration of image stabilization device 100. In the following explanation, the "front" refers to the surface seen from the +Z side (subject side), and the "rear" refers to the surface seen from the -Z side (photographer side).

[0046] As shown in Fig. 3, the image stabilization device 100 is mainly composed of a movable section 110 (movable section) that holds the image sensor unit 16 (image sensor unit), and a fixed section 130 (fixed section) that is fixed to the image sensor body 2. The fixed section 130 includes a drive yoke 150 (yoke member, first yoke) and a counter yoke 170 (yoke member, second yoke). The drive yoke 150 and the counter yoke 170 are disposed apart from each other and connected by a shaft (not shown). The movable section 110 is biased toward the drive yoke 150 side (+Z side, subject side) by magnetic springs 162, 164, 166 (biasing members; see Fig. 9), which will be described later.

[0047] [Fixed part structure] 4 is a diagram showing the drive yoke 150 (yoke member, first yoke) as viewed from the imaging surface side (-Z side). Drive yoke 150 has an open -X side, on which a flexible printed circuit (FPC) and the like are disposed (see FIG. 3).

[0048] Further, magnet members are arranged on the drive yoke 150. Specifically, as shown in FIG. 4, magnets 136A, 136B (magnet members) are arranged on the (+X, +Y) side, magnets 138A, 138B (magnet members) are arranged on the (+X, -Y) side, and magnets 140A, 140B (magnet members) are arranged on the -X side of these magnets. These magnets and a coil (coil member; see FIGS. 7 and 11) provided in the movable part 110 constitute a voice coil motor (VCM: Voice Coil Motor). For example, the magnets 136A, 138A, and 140A can be arranged with their N poles on the upper side (-Z side) of FIG. 4, and conversely, the magnets 136B, 138B, and 140B can be arranged with their S poles on the upper side, but the magnetic poles of the magnets may be arranged in the opposite direction.

[0049] [First ball receiving surface] The drive yoke 150 is provided with three first ball receiving surfaces 152 (first ball receiving surfaces). The first ball receiving surface 152 is a partial region of the drive yoke 150 (first yoke) and is a protruding portion toward the movable portion. The first ball receiving surface 152 can be formed integrally with the drive yoke 150, for example, by pressing a member constituting the drive yoke 150. The press processing is, for example, half punch processing (a processing that does not completely penetrate a member and protrudes about half the height of the member; it is also called half punching, half penetration, stamping, dowel processing, etc.), but the height of the protruding portion is not limited to half the thickness of the member. In addition, the first ball receiving surface 152 is preferably a surface formed by machining the protruding portion formed by the half punch. Note that here, machining refers to processing a material into a desired shape using a machine, and there are multiple types such as cutting and pressing. For example, processing to increase flatness can be performed by polishing. As described above, since the first ball receiving surface 152 is a partial area of ​​the drive yoke 150, it is not necessary to machine the entire drive yoke 150, and the cost of the image stabilization device 100 can be reduced.

[0050] The ball 134 (ball) comes into contact with the first ball receiving surface 152 formed in this manner, and the ball 134 rolls relative to the first ball receiving surface 152. That is, the movable part 110 that holds the image sensor 17 (image sensor unit 16) is supported movably within a plane that intersects with the optical axis L, and image blur can be corrected by the movement of this movable part 110. Note that the "plane that intersects with the optical axis L" is preferably a plane perpendicular to the optical axis L.

[0051] 5 is a perspective view showing drive yoke 150 as viewed from the +Z side (subject side). As shown in the figure, when the portion of first ball receiving surface 152 is viewed from the +Z side, it can be seen that recess 152A (recess) is formed. Note that image stabilizer 100 is attached to image capture device body 2 via mounting surface 154 (mounting surface), which is the surface opposite first ball receiving surface 152 (see FIG. 10).

[0052] [Drive yoke (first yoke) material] The drive yoke 150 (first yoke) described above is made of a material with a saturation magnetic flux density of 0.6 T or more and a surface hardness of 290 Hv or more. Examples of such materials include SUS630 and SUS631. These materials are precipitation hardened stainless steels and have relatively high residual magnetic flux density, and can satisfy the required performance for saturation magnetic flux density and surface hardness. Although there are multiple materials with different characteristics for SUS630 and SUS631, it is preferable to form the drive yoke 150 (first yoke) from a material with a surface hardness of 350 Hv or more.

[0053] FIG. 6 is a diagram showing the counter yoke 170 as viewed from the subject side (+Z side).

[0054] [Configuration of moving parts] 7 is a front view showing the holding frame 112 (holding frame) of the movable part 110. The holding frame 112 has an opening 112A, and the imaging element 17 (imaging element unit 16; not shown in FIG. 7) is disposed in this opening 112A. The holding frame 112 also has openings 114A, 114B, and 114C, and the coils 120, 122, and 124 (coil members) are disposed in these openings, respectively. The holding frame 112 also has ball holding portions 116 (ball holding portions) for holding the balls 134 formed in three locations. The ball holding portions 116 are formed at positions corresponding to the first ball receiving surface 152 described above.

[0055] [Catching the ball with the first ball receiving surface] 8 is a diagram (partial cross-sectional view) showing how ball 134 is received by first ball receiving surface 152. Ball receiving member 118 is disposed in ball holding section 116, and the surface on the +Z side of ball receiving member 118 comes into contact with ball 134 as second ball receiving surface 118A (second ball receiving surface). When image stabilization device 100 is in an assembled state, ball 134 held by ball holding section 116 comes into contact with first ball receiving surface 152, and ball 134 rolls relative to first ball receiving surface 152 as movable section 110 moves. Note that it is acceptable if some of the three balls 134 float up from first ball receiving surface 152 when the biasing force is unbalanced, for example.

[0056] [Effects of material selection and part integration] First ball receiving surface 152 is required to have a high degree of flatness so that movable section 110 can translate or rotate without falling over relative to a plane (perpendicular plane) intersecting optical axis L. For this reason, high-precision assembly is required to ensure high flatness in fixed section 130, which is made up of first ball receiving surface 152 and a yoke (drive yoke 150, counter yoke 170). Until now, the ball receiving surface and the yoke have been joined by a strong instant adhesive, spot welding, or the like.

[0057] Assembly using adhesives is a complicated process, as the bonding surface with the yoke and the side surface must be bonded while handling the parts to avoid scratches or dents on the ball receiving surface, and it is a high-cost process because it is difficult to control the assembly quality, as the ball receiving surface will tilt if the thickness of the adhesive applied to the bonding surface is not uniform, and the tracking ability of the moving part will be poor if the adhesive adheres to the ball receiving surface. Assembly using spot welding also requires dedicated equipment and welding know-how, and if the welding conditions are not appropriate, the ball receiving surface will warp or peel off, making it a similarly high-cost process because it is difficult to control the assembly quality.

[0058] As explained in this embodiment, in a part in which the yoke and ball receiving surface are integrated using a material with high saturation magnetic flux density and high surface hardness such as SUS630 or SUS631, these joining processes are unnecessary, so that costs can be expected to be reduced in terms of assembly man-hours, equipment, and quality control. In addition, when performing machining such as half punch processing on the integrated part, a high degree of flatness can be achieved by forming the convex ball receiving surface so as to reduce warping and distortion, thereby achieving high-precision vibration correction.

[0059] When designing the VCM for the BIS in a camera with interchangeable lenses, we assume that users will use it in combination with various lenses, and design a VCM that will work even with lenses that have the most stringent performance requirements. This results in a BIS with a large amount of movement. The VCM can generate maximum thrust when the moving part is at the center, and the thrust decreases the further away from the center. In designing a VCM to generate sufficient thrust near the edge of the moving range of the BIS, which has a large amount of movement, it was unavoidable to use a yoke made of SPCC material. On the other hand, when designing a VCM for the BIS in a camera with an integrated lens, the combination of the lens and the body is determined one-to-one, so the VCM can be individually optimized to match the performance of the lens. This means that the BIS has the minimum amount of movement, and it is possible to design a VCM that satisfies the required performance by using a yoke made of SUS630 / 631 material instead of a yoke made of SPCC material.

[0060] [Installation of image stabilization device] The mounting surface of the image stabilizer 100 is a mounting surface 154 which is the surface (the surface on the subject side, the surface on the +Z side) opposite to the first ball receiving surface 152 of the integrated part (drive yoke 150, first yoke), and this mounting surface 154 serves as a reference surface for fastening the image stabilizer 100 to the image capture device body 2. The lens device 12 is mounted to the image capture device body 2 via a mount surface 13 (see FIG. 10).

[0061] [Relationship between lens replacement and the biasing direction of the movable part] Interchangeable lens cameras have a mount structure that allows the lens to be attached and detached, and users can clean the image sensor from the mount. In this case, the image sensor will come into contact with the camera when cleaning it with cleaning paper or the like. Even if the camera is equipped with a BIS (body shake compensation mechanism), if the BIS configuration is such that the pressing direction of the paper and the biasing direction of the movable part are in the same direction, the image sensor will not wobble in the optical axis direction even if it is touched, and the quality will not be lost. On the other hand, if the pressing direction of the paper and the biasing direction of the movable part are in the opposite direction, there is a concern that the image sensor will wobble in the optical axis direction when it is touched, causing a loss of quality. For this reason, the BIS was conventionally configured so that the pressing direction of the paper and the biasing direction of the movable part are in the same direction.

[0062] In contrast to such interchangeable lens cameras, the lens-integrated camera is structured so that the user cannot directly access the image sensor. Therefore, there is no problem even if the biasing direction of the movable part is reversed to the +Z side (subject side), and the cost reduction can be achieved by using a simple BIS configuration. This embodiment is effective for a blur correction device with such a configuration and a camera equipped with such a blur correction device (especially a lens-integrated camera).

[0063] [Forced by a biasing member] Fig. 9 is a diagram showing the state of biasing by the biasing member. As shown in this figure, and as described above with reference to Fig. 4, magnets 136A, 136B, 138A, 138B, 140A, and 140B are arranged in the drive yoke 150 (first yoke), and coils 120, 122, and 124 are arranged on the -Z side of these magnets. Furthermore, magnetic springs 162, 164, and 166 (biasing members) are arranged on the -Z side of these coils, and the movable part 110 (including the image sensor unit 16 held by the holding frame 112 and the coils 120, 122, and 124) is biased to the drive yoke 150 (first yoke) by these magnetic springs. That is, in the image stabilization device 100, the biasing direction of the movable part is the +Z direction (toward the subject).

[0064] The magnetic springs 162, 164, and 166 are one example of the biasing members, and other biasing members such as mechanical springs may be used. Furthermore, the number and positions of the magnetic springs (biasing members) are not limited to the embodiment shown in FIG.

[0065] [Number of parts and resistance to tipping of image stabilization device] Mounting surface 154 (mounting surface), which is the surface opposite to first ball receiving surface 152 formed integrally with drive yoke 150 (first yoke), serves as a reference surface for mounting image stabilizer 100 to imaging device body 2. Imaging device body 2 has mount surface 13 for mounting lens device 12, and image stabilizer 100 is required to be mounted so that imaging surface 17A of imaging element 17 is parallel to mount surface 13. If there are a large number of parts between imaging element 17 and mounting surface 154, component tolerances will build up by the number of parts. In other words, mounting surface 154 is prone to tipping (inclining) relative to imaging element 17, making it difficult to achieve parallelism.

[0066] As described above, in conventional image stabilization devices for interchangeable lens cameras, the movable part is biased against the fixed part on the imaging surface side (-Z side). In an image stabilization device with this configuration, the ball receiving surface of the movable part, the ball, the ball receiving surface of the fixed part, the base yoke, the shaft, and the front yoke are interposed between the imaging element and the imaging device body.

[0067] In contrast, in the image stabilization device 100 according to this embodiment, as described above with reference to Figures 8 and 9, etc., the movable part 110 is biased against the fixed part (drive yoke 150) on the subject side (+Z side). In the image stabilization device 100 configured in this way, what is interposed between the image sensor 17 and the image capture device main body 2 are the second ball receiving surface 118A of the movable part 110, the ball 134, and the drive yoke 150 (first yoke). Note that in the image stabilization device 100 (movable part 110), a counter yoke 170 is attached to the drive yoke 150 via a shaft (not shown); however, in terms of "tilting of the attachment surface 154 relative to the image sensor 17", the shaft and the counter yoke 170 are not interposed.

[0068] Such image stabilizer 100 is less likely to tip over because there are fewer parts between image sensor 17 and mounting surface 154 than in conventional image stabilizers. This makes it possible to eliminate the tilt adjustment process for making image sensor 17 and mounting surface 13 parallel and to reduce the number of adjustment steps, thereby reducing costs.

[0069] [Effect of image stabilization device configuration on imaging device configuration] 10 is a schematic diagram showing the positional relationship between the rearmost lens and the optical member. When the imaging device 10 is an integrated lens type, the image stabilization device 100 can be designed to have a short distance between the optical member 18 arranged in front of the imaging element unit 16 (+Z side) and the rearmost surface of the lens (the surface on the -Z side of the rearmost lens 12C). This is because, when the biasing direction of the movable part 110 is the imaging surface side (photographer side; -Z side), there is a concern that the rearmost lens 12C and the optical member 126 may come into contact when the movable part 110 is lifted (to the +Z side) by an external force such as a fall or vibration applied in the opposite direction to the biasing direction, but when the biasing direction is the subject side (+Z side) as in the first embodiment, the direction in which the movable part 110 is lifted by the external force is the opposite direction (-Z side), so the optical member 18 moves away from the rearmost lens 12C, and the movable part 110 and the rearmost lens 12C do not come into contact with each other. It should be noted that no other optical components (lenses, filters, glass members, etc.) are interposed between the optical member 18 and the rearmost lens 12C in the direction of the optical axis L. However, cushioning members, mounting brackets, etc. may be interposed.

[0070] [Image sensor unit configuration] 11 is a diagram showing a schematic configuration of an imaging element unit according to the first embodiment. As shown in the figure, an imaging element unit 16 (imaging element unit) includes an imaging element 17 (imaging element) and an optical member 18 (optical member). A piezoelectric element 19 is disposed on a first surface 20 (first surface; surface on the -Z side) of the optical member 18. A second surface 21 of the optical member 18 has a first region 21A and a second region 21B, as will be described in detail later.

[0071] [Dust prevention measures for image stabilization devices] Next, measures against dust in the image stabilization device will be described.

[0072] Digital cameras are known to have a camera shake correction function to deal with image blur caused by camera shake. Conventionally, optical image stabilization (OIS) in a lens device was the mainstream mechanism for camera shake correction, but in recent years, due to improvements in digital camera performance and the miniaturization of the overall size of a camera consisting of a camera and a lens device, models equipped with in-body image stabilization (BIS, also called IBIS), which drives an image sensor for correction, have been increasing. In recent years, image sensors have become larger due to the progress of higher resolution and higher image quality, and BIS units (image stabilization devices) have also become larger as larger image sensors are used. Furthermore, because of the demand for higher image quality, it becomes a problem that dust and other particles adhere to the image sensor or an optical element arranged nearby, causing the dust to appear in the image. To prevent this, optical dummy glass is placed in front of the image sensor inside the camera to seal the image sensor and prevent dust from entering the sensor. Dust reduction (DR) function is also used to vibrate the dummy glass surface to remove any dust that has adhered to it, preventing it from appearing in the image.

[0073] [Dust prevention measures for interchangeable lens cameras and built-in lens cameras] In interchangeable lens cameras, dust can be removed by removing the lens and manually cleaning the area around the image sensor. Therefore, even if dust is generated during the operation of the BIS unit that drives the image sensor, cleaning will prevent dust from accumulating inside the camera and will not cause any problems. On the other hand, in cameras with an integrated lens, once dust is generated during the operation of the BIS unit that drives the image sensor, the dust will continue to remain inside the camera. For this reason, it is necessary to install a DR function in the BIS unit to remove dust, restrict the movement of dust, or capture dust to prevent dust from appearing in images.

[0074] Furthermore, in a camera with an integrated lens, the combination of the lens and the camera body is fixed one-to-one, and the lens optical system can be designed, including the optical element placed in front of the image sensor. Therefore, there is no need to place dummy glass in front of the image sensor to provide versatility, as is the case with interchangeable lens cameras, and it is possible to design a DR mechanism that consists only of IR-cut glass (IR: Infrared). In this case, a piezoelectric element is glued and fixed to the IR-cut glass, and dust is removed by applying a voltage to the piezoelectric element to vibrate the IR-cut glass.

[0075] 12 is a diagram showing the configuration of an image sensor unit with DR function in a lens-interchangeable camera. As shown in the figure, the image sensor unit 102 includes both a dummy glass 15 and an optical member 18, and a piezoelectric element 19 is adhesively fixed to the dummy glass 15 to vibrate the dummy glass 15 to remove dust. The dummy glass 15 has an anti-reflection coating deposited on both sides, and the optical member 18 has an IR / UV cut coating (UV: Ultraviolet, ultraviolet) deposited on one side and an anti-reflection coating deposited on the other side.

[0076] 13 is a diagram showing the configuration of the image sensor unit 16 according to the first embodiment. As shown in the figure, the image sensor unit 16 does not have dummy glass and only has an optical member 18 (optical member) made of IR-cut glass, and a piezoelectric element 19 is adhesively fixed to this optical member 18, and the optical member 18 is vibrated by the piezoelectric element 19 to remove dust.

[0077] [Various coating deposition] As with conventional imaging element units, an IR / UV cut coat is deposited on one side of the optical member 18, and an anti-reflection coat is deposited on the other side, but it is necessary to limit the deposition area of ​​the IR / UV cut coat. In other words, since the area where the piezoelectric element 19 is attached needs to transmit UV light, the coating is not deposited on the area of ​​the opposing surface where the piezoelectric element 19 is attached.

[0078] In addition, it is desirable to deposit the IR / UV cut coating on the subject side (+Z side) of the IR cut glass to prevent ghosting. This means that the piezoelectric element 19 is placed on the photographer side (-Z side), opposite the IR / UV cut coating. Here, it is desirable from an optical design perspective to design the IR cut glass in accordance with the following conditions (1) and (2).

[0079] Condition (1): In order to reduce the effect of dust particles appearing in images, increase the distance between the IR-cut glass and the image sensor. Condition (2): To increase the freedom of optical design, reduce the distance between the IR-cut glass and the rearmost lens surface.

[0080] It is desirable to place a piezoelectric element in the space created by "increasing the distance" in condition (1), which allows for both miniaturization and preventing image dust. Furthermore, since the piezoelectric element is not on the surface facing the subject, it contributes to "closing the distance" in condition (2), so the design with the above component placement is the best. For example, if the piezoelectric element were placed on the surface of the IR-cut glass facing the subject, it would affect the above condition (2).

[0081] [Coating on IR-cut glass and arrangement of piezoelectric elements] 14 is a diagram showing the arrangement of coatings and piezoelectric elements in an optical member 18 (IR-cut glass, optical member) according to the first embodiment. In the optical member 18, an anti-reflection coating film 18B is deposited on a first surface 20 (first surface), which is the surface (-Z side surface) of the IR-cut glass 18A on the imaging element 17 side, and an IR / UV-cut coating film 18C is deposited on a second surface 21 (second surface) opposite to the first surface 20. That is, the optical member 18 (IR-cut glass 18A) is a glass member that cuts infrared light.

[0082] The second surface 21 of the IR-cut glass 18A has a first region 21A and a second region 21B. The first region 21A includes a region overlapping with the piezoelectric element 19 (vibration imparting device) when viewed in the direction of the optical axis L, and the second region 21B is a region of the second surface 21 other than the first region 21A (a region other than the first region). The first region 21A and the second region 21B have different ultraviolet ray cut rates (one aspect of surface characteristics). Specifically, the ultraviolet ray cut rate in the first region 21A is lower than the ultraviolet ray cut rate in the second region 21B. Since ultraviolet rays are irradiated through the first region 21A, it is preferable that the ultraviolet ray cut rate in the first region 21A is as low as possible, but the cut rate does not have to be zero as long as the adhesive can be hardened. In addition, the difference in UV blocking rate between the first region 21A and the second region 21B can be achieved by masking the first region 21A and coating only the second region 21B, or by removing the coating in the first region 21A of the glass coated over the entire second surface 21 with an organic solvent or abrasive, etc.

[0083] [Fixing of piezoelectric element] In the imaging element unit having the above-mentioned configuration, highly accurate positioning and high adhesive strength are required for assembly in which the piezoelectric element 19 is attached to the optical member 18 (IR-cut glass 18A). If the attachment position of the piezoelectric element 19 is misaligned, the vibration mode of the glass changes, which affects the dust removal rate. Also, if the entire piezoelectric element 19 is not attached to the glass or if it is partially peeled off due to insufficient adhesive strength, large vibrations are not generated and the dust removal rate decreases. For this reason, it is desirable to fix the piezoelectric element 19 and the optical member 18 using UV adhesion (adhesion using an ultraviolet-curing adhesive), which allows fine adjustment of the attachment position without hardening even immediately after the piezoelectric element 19 and the optical member 18 are attached, and can be instantly hardened and fixed.

[0084] When an ultraviolet-curing adhesive is used, the piezoelectric element 19 (vibration imparting device) can be fixed to the first surface by utilizing the difference in ultraviolet light blocking rate between the first surface 20 and the second surface 21 of the optical member 18. Specifically, the piezoelectric element 19 is fixed to the first surface 20 by irradiating ultraviolet light to the ultraviolet-curing adhesive 19A applied between the first surface 20 and the piezoelectric element 19 through the first region 21A.

[0085] FIG. 15 is a diagram showing the arrangement of the imaging element 17, optical member 18, and piezoelectric element 19 configured in this manner, and FIG. 16 is a diagram showing the arrangement of the yokes (drive yoke 150, counter yoke 170) of the fixed portion 130 and the imaging element unit 16 (imaging element 17, optical member 18).

[0086] [Dust prevention measures using dust-proof materials, etc.] BIS units (image stabilization devices) that drive large imaging elements tend to be large, and even if they are assembled in a clean room and dust is removed to the maximum extent possible, it is impossible to remove all dust from within the BIS unit, and the components are assembled with minute dust particles attached to various positions. In addition, since the BIS unit moves (the moving parts move within a plane that intersects with the optical axis), an appropriate clearance is provided according to the amount of movement to prevent contact or interference with exterior parts. If dust moves through this gap and enters in front of the imaging element, it will appear in the image (for example, see FIG. 20, which will be described in the modified example below).

[0087] Therefore, it is preferable to separate the movable parts of the BIS unit into a dust-proof area and an exterior component area by surrounding them with a dust-proof sheet or the like, thereby limiting the amount of dust remaining in the dust-proof area and the movement of dust into the dust-proof area. There are many gaps in the dust-proof area through which dust can move, but the routes through which dust can move and appear in an image are limited. Therefore, by placing a dust-attracting material (such as double-sided tape or viscous grease; a dust-attracting material) on the problematic route of dust and capturing dust heading toward the imaging element, the movement of dust within the dust-proof area can also be limited. The dust-attracting material is effective not only for capturing dust heading toward the imaging element, but also for capturing dust dropped from the imaging element by the DR function.

[0088] 17 and 18 are diagrams showing the arrangement of the dustproof member and the dust adsorption member. As shown in these figures, a part of the gap between the side portion (in the XY plane) of the drive yoke 150 (first yoke) and the counter yoke 170 (second yoke) is shielded by the dustproof members 35A, 35B, and 35C (first dustproof members). Note that "at least a part" of the gap is shielded. From the viewpoint of dustproofing, it is preferable to shield as much of the gap as possible, and if possible, the entire gap, but it is acceptable to secure a space for other members, drawing out wiring, etc. However, it is preferable to shield the space secured for such a purpose as much as possible with other shielding members, etc.

[0089] Further, a dust collection member 36A (dust collection member) is provided on the subject side (+Z side) of the imaging element 17. As described above, double-sided tape, viscous grease, or the like can be used as the dust collection member 36A.

[0090] Furthermore, in the image stabilization device 100, at least a part of the gap between the counter yoke 170 (second yoke) and the movable part 110 in the direction of the optical axis L is covered by a dustproof member (second dustproof member). Specifically, as shown in FIG. 19, at the rear end (-Z side) of the image stabilization device 100, the gap between the counter yoke 170 and the movable part 110 is covered by a dustproof member 37 (second dustproof member). The meaning of "at least a part" is the same as that described above for the first dustproof member. In the embodiment shown in FIG. 19, the opening in the dustproof member 37 for drawing out wiring or the like is covered by tape members 37A and 37B.

[0091] [Advantages of the First Embodiment] As described above, the image sensor unit 16, image stabilizer 100, and image capture device 10 according to the first embodiment reduce restrictions on component arrangement and optical design in the image capture device 10, and enable the image sensor unit 16 and image stabilizer 100 to be made smaller and more accurate, making it possible to design a small, high-performance lens for a lens-integrated camera. Furthermore, dust prevention and removal can be performed effectively, and dust can be prevented from appearing in images.

[0092] [Modification of the first embodiment] In the first embodiment described above, the movable part 110 is biased toward the drive yoke 150 (first yoke) on the subject side (+Z side), but in the present invention, the movable part may be biased toward the opposite side (second yoke on the -Z side). Below, a description will be given of modified configurations of such a blur correction device and imaging device.

[0093] Fig. 20 is a diagram for explaining a modified example of the first embodiment. As shown in the figure, in the modified example, a movable part 110A of a vibration reduction device 100A is biased against a counter yoke 170A on the -Z side. The movable part 110A includes an image sensor unit 16A. The example shown in Fig. 20 shows a state in which no dust countermeasures have been implemented, and in this state, dirt 99 (dust) that has entered through a gap between an exterior 70 of the image pickup device and the movable part 110A or the like adheres to the optical member 18, etc.

[0094] In contrast, Figure 21 shows a state in which dust prevention measures have been taken, with at least a portion of the gap between the side portions of the drive yoke 150A (first yoke) and the counter yoke 170A (second yoke) being covered by dustproof member 35D (first dustproof member), and at least a portion of the gap between the counter yoke 170A (second yoke) and the movable part in the direction of the optical axis L being covered by dustproof member 37 (second dustproof member).

[0095] Moreover, the motion compensation device 100A is in contact with the lens frame 12D (lens frame) that holds the rearmost lens 12C (lens) via the cushioning member 14 (cushioning member), and the lens frame 12D and the motion compensation device 100A each include dust adsorption members 36B, 36C (dust adsorption members) in a portion between the coil member 121 (coil member) and the image pickup element 17 (image pickup element) in the XY in-plane direction (direction intersecting the optical axis L). Furthermore, the movable part 110A of the motion compensation device 100A includes a degreaser 39 (degreaser) on the opposite side of the coil member 121 to the image pickup element 17 (the side farther from the optical axis L than the coil member 121; the left side in FIG. 21). Note that, although FIG. 21 shows only one side of the motion compensation device 100A, it is preferable to provide a dust adsorption member and a degreaser in portions not shown.

[0096] Incidentally, the provision of a piezoelectric element 19 on the first surface 20 of the optical member 18, and the fact that the piezoelectric element 19 is fixed to the first surface 20 by utilizing the difference in surface characteristics between the first surface 20 and the second surface 21, are the same as those described above for the first embodiment.

[0097] The image sensor unit, image stabilization device, and image capture device according to such modified examples also achieve the same effects as the first embodiment, such as miniaturization, high accuracy, dust prevention, and dust removal.

[0098] [Application of the present invention to devices other than digital cameras] In the first embodiment and the modified example, the present invention has been described using a lens-integrated digital camera equipped with a BIS (image stabilization device) as an example, but the present invention is not an invention specialized for digital cameras. For example, the present invention can be applied to other photographic devices that can be equipped with a BIS, such as a lens-integrated surveillance camera or drone camera.

[0099] [Second embodiment] In the above-mentioned first embodiment and modified example, the present invention is applied to an imaging device having a shake correction device. However, the present invention can also be applied to an imaging device that does not have a shake correction device. FIG. 22 is a diagram showing a schematic configuration of an imaging device 11 according to a second embodiment, and FIG. 23 is a diagram showing an internal configuration of the imaging device 11. The imaging device 11 does not have a shake correction device, and the control unit 40 controls the imaging element unit 23 (optical member 18 and piezoelectric element 19; see FIG. 24) to remove dust. The other configuration of the imaging device 11 is the same as that of the first embodiment (see FIGS. 1 and 2, etc.), so the same reference symbols are used for the same components and detailed description is omitted.

[0100] 24 is a diagram showing a configuration of an image sensor unit 23 according to the second embodiment. As shown in the figure, the image sensor unit 23 has an image sensor 25 (the imaging surface is an image sensor surface 25A), and an optical member 18 (optical member) is disposed on the front surface (+Z side, subject side) of the image sensor 25.

[0101] The optical member 18 is an IR-cut glass, and is coated with an anti-reflection coating film and an IR / UV-cut coating film, as in the first embodiment. A piezoelectric element 19 is disposed on a first surface 20 of the optical member 18, and the control unit 40 controls the piezoelectric element 19 to vibrate, thereby removing dust. The second surface 21 of the optical member 18 has a first region 21A and a second region 21B, and by utilizing the difference in surface characteristics (cutting rate of ultraviolet rays), ultraviolet rays can be irradiated through the first region 21A to cure an ultraviolet-curing adhesive (not shown in FIG. 24; see FIG. 14) to fix the piezoelectric element 19. These points are the same as those described above for the first embodiment, and detailed explanations will be omitted.

[0102] 25 is a diagram showing the imaging element unit 23 of the imaging device 11. As in the first embodiment, the imaging device 11 has a dustproof member 35D (dustproof member) that shields the side portion of the imaging element unit 23, and a dustproof member 37 (dustproof member) that shields the bottom portion. Furthermore, the imaging device 11 has a dust adsorption member 36D. As in the first embodiment, the imaging device 11 preferably has a degreasing section.

[0103] The image sensor unit and the image capturing device having such a configuration also achieve the effects of miniaturization, high accuracy, dustproofing, etc., as described above for the first embodiment and the modified example. The image sensor unit and the image capturing device according to the second embodiment can be applied to other photographing devices such as cameras mounted on smartphones, tablet terminals, game devices, etc., surveillance cameras, drone cameras, etc., in addition to general digital cameras. [Explanation of symbols]

[0104] 1. Subject 2. Imaging device body 4 Eyepiece 10. Imaging device 11 Imaging device 12 Lens device 12A Lens Group 12B Lens Group 12C Rearmost lens 12D lens frame 13 Mounting surface 14 Cushioning material 15 Dummy Glass 16 Image sensor unit 16A Image sensor unit 17 Image sensor 17A Imaging surface 18 Optical Components 18A IR cut glass 18B Anti-reflective coating film 18C IR / UV cut coating film 19 Piezoelectric element 19A UV-curable adhesive 20 Page 1 21 Side 2 21A 1st area 21B 2nd area 22 Image Input Controller 23 Image sensor unit 24 Image Processing Section 25 Image sensor 25A Imaging surface 26 Compression / Expansion Processing Unit 28 Video Encoder 30 Image monitor 35A Dustproof material 35B Dustproof material 35C Dustproof material 35D Dustproof material 36A Dust absorption member 36B Dust absorption member 36C Dust absorption member 36D Dust-absorbing material 37 Dustproof material 37A Tape material 37B Tape material 38 Control section 39 Degreasing section 40 Control section 47 Flash Memory 48 Memory 52 Media Controller 54 Memory Card 58 Drive unit 66 Sensors 70 Exterior 99 Garbage 100 Image Stabilizer 100A Image Stabilizer 102 Image sensor unit 110 Moving parts 110A moving part 112 Retaining frame 112A aperture 114A aperture 114B opening 114C aperture 116 Ball holding section 118 Ball receiving member 118A Second ball receiving surface 120 Coil 121 Coil parts 122 Coil 124 Coil 130 Fixed part 134 Ball 136A Magnet 136B Magnet 138A Magnet 138B Magnet 140A Magnet 140B Magnet 150 Drive Yoke 150A Drive Yoke 152 First ball receiving surface 152A Recess 154 Mounting surface 162 Magnetic Spring 164 Magnetic Spring 166 Magnetic Spring 170 Counter Yoke 170A Counter Yoke

Claims

1. An imaging element; an optical member disposed on the imaging surface side of the imaging element; a vibration imparting device disposed on a first surface of the optical member; An imaging element unit comprising: a second surface of the optical member facing the first surface has a first region including a region overlapping with the vibration imparting device when viewed in an optical axis direction of the image pickup element, and a second region which is a region other than the first region, The first region and the second region of the image sensor unit have different surface characteristics.

2. The image pickup element unit according to claim 1 , wherein the vibration applying device is fixed to the first surface by utilizing the difference in surface characteristics.

3. The imaging element unit according to claim 1 or 2, wherein the vibration imparting device is fixed to the first surface by irradiating ultraviolet light through the first area onto an ultraviolet-curing adhesive applied between the first surface and the vibration imparting device.

4. 3. The image pickup device unit according to claim 1, wherein the surface characteristic is a cut rate of ultraviolet rays.

5. The image sensor unit according to claim 4 , wherein the cut rate in the first region is lower than the cut rate in the second region.

6. 3. The image pickup device unit according to claim 1, wherein the optical member is a glass member that blocks infrared light.

7. 3. The image pickup device unit according to claim 1, wherein dust adhering to the optical member is removed by vibrating the optical member with the vibration imparting device.

8. 3. The image pickup device unit according to claim 1, wherein the vibration applying device is a piezoelectric element.

9. The image sensor unit according to claim 1 , wherein the first surface is a surface of the optical member on the side of the image sensor.

10. a fixed portion including a magnet member and a yoke member; A movable section including the imaging element unit according to claim 1 or 2 and a coil member; Equipped with A blur correction device that corrects image blur by moving the movable part within a plane that intersects with the optical axis of the image sensor.

11. 11. The image blur correction device according to claim 10, wherein the yoke member is composed of a first yoke in which the magnet member is provided, and a second yoke that is disposed apart from the first yoke.

12. 12. The image blur correction device according to claim 11, wherein at least a portion of a gap between the side surfaces of the first yoke and the second yoke is covered by a first dustproof member.

13. The image blur correction device according to claim 11 , wherein at least a portion of a gap between the second yoke and the movable portion in the direction of the optical axis of the image sensor is covered by a second dustproof member.

14. The image blur correction device according to claim 10 , wherein the movable portion includes a degreased portion on an opposite side to the imaging element with respect to the coil member.

15. The image stabilizer according to claim 10 , wherein the movable portion includes a dust collecting member between the coil member and the imaging element.

16. A motion compensation device according to claim 10; an optical system that forms an optical image of a subject on the image sensor; An imaging device comprising:

17. 17. The imaging device according to claim 16, wherein no other optical components are interposed in the direction of the optical axis between the optical member and a rearmost lens, which is a lens among the lenses constituting the optical system and is located closest to an imaging surface of the imaging element.

18. The imaging device according to claim 16, wherein the imaging device is an imaging device with an integrated lens.

19. the vibration reduction device is in contact with a lens frame that holds a lens via a cushioning member, The imaging device according to claim 16 , wherein the lens frame includes a dust collecting member between the coil member and the imaging element.

Images