Electromagnetic lens and multi-electron beam irradiation device
By designing an electromagnetic lens containing a coil, a magnetic material pole sheet and a magnetic pole, adjusting the magnetic pole position and magnetic field strength, the plane curvature problem of multi-primary electron beam image is solved, and the detection accuracy is improved.
JP2025038781APending Publication Date: 2025-03-19NUFLARE TECH INC
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Patent Information
- Application Number
- JP2023145593
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-09-07
- Publication Date
- 2025-03-19
AI Technical Summary
Technical Problem
The prior art is difficult to effectively correct the image plane curvature problem formed by the multi-primary electron beam under the electromagnetic lens, resulting in a decrease in detection accuracy.
Method used
An electromagnetic lens is designed, which includes a coil, a pole sheet made of magnetic material and a magnetic pole, and the curvature of the image plane is corrected by adjusting the position of the magnetic pole and the intensity of the magnetic field.
Benefits of technology
Effective correction of the curvature of the image plane formed by the multi-primary electron beam under the electromagnetic lens is achieved, and detection accuracy and image quality are improved.
✦ Generated by Eureka AI based on patent content.
Abstract
To provide an electromagnetic lens capable of correcting an image surface curvature aberration occurring to a multi-primary electron beam.SOLUTION: A multi-axis electromagnetic lens 210 comprises: a pole piece that encloses a coil 40; an upper magnetic pole 44 formed from a magnetic body, in which a plurality of first openings are formed, and which is connected to an inner peripheral wall or an upper wall on the upstream in a direction in which multi-electron beams travel through a gap of the inner peripheral wall; a lower magnetic pole 46 formed from a magnetic body, has a plurality of second openings formed therein, is connected to the inner peripheral wall or a lower wall on the downstream side in the direction in which the multi-electron beams travel through the gap of the inner peripheral wall; and a plurality of individual magnetic poles formed from a magnetic body, located between the upper and the lower magnetic poles, and forming a separate passage between coaxial openings which the same beam among the multi-electron beams passes through, so that the beam passes through the individual passages, as well as forming a gap between the coaxial openings. The center height position of the gap of the a plurality of individual magnetic poles is different between a central section and a peripheral section.SELECTED DRAWING: Figure 2
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