Grinding device

The grinding device addresses the challenge of maintaining precise shape under increased reaction forces by utilizing a second air bearing to support the wheel base, thereby reducing deflection and enhancing grinding precision.

JP2025039262APending Publication Date: 2025-03-21DISCO CORP
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Patent Information

Application Number
JP2023146219
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-09-08
Publication Date
2025-03-21

AI Technical Summary

Technical Problem

Existing grinding devices face challenges in maintaining the desired shape of workpieces when the reaction force on the wheel base increases, leading to potential bending of the wheel base and difficulties in precise grinding.

Method used

The grinding device incorporates a design with a second air bearing that supports the thrust load, allowing the locus of the grinding wheels to overlap with this air bearing. This configuration supports the wheel base, reducing deflection and enabling precise grinding even with increased reaction forces.

Benefits of technology

The use of a second air bearing effectively suppresses the deflection of the wheel base, allowing for easier and more precise grinding of workpieces to the desired shape, even under increased reaction forces.

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Abstract

To provide a grinding device which can easily grind a workpiece so that the workpiece is formed into a desired shape even when reaction force occurring in a wheel base increases as the workpiece is ground.SOLUTION: A grinding device grinds a workpiece and includes: a chuck table configured to hold the workpiece on a holding surface; a spindle having a tip part to which a grinding wheel including a plurality of grinding stones is attached and an intermediate part provided with a recessed part; and a casing having a protruding part located at the inner side of the recessed part. A first air jet port for jetting air toward a bottom surface of the recessed part to form a first air bearing which supports a radial load is formed on a top surface of the protruding part, and second jet ports for jetting air toward side surfaces of the recessed part to form second air bearings which support a thrust load are formed on side surfaces of the protruding part. A trajectory of the grinding stones when the spindle rotates overlaps with the second air bearing in a direction along a rotation axis of the spindle.SELECTED DRAWING: Figure 2
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