Flexures of various thicknesses for magnetic storage devices

Abstract

The present invention provides a head gimbal assembly that reduces contact between the flexure and the actuator, a method for manufacturing the same, and a magnetic storage system. [Solution] In a magnetic storage device, the head gimbal assembly 109 includes a load beam 196, a read / write head 134, and an actuator 120 configured to move the read / write head. The head gimbal assembly includes a flexure 140 attached to the actuator. The flexure includes an actuator side 123 facing the actuator and a recess 111 formed on the actuator side that at least partially overlaps the actuator along a virtual plane substantially perpendicular to the length of the load beam.

Description

Technical Field

[0001] The present disclosure generally relates to magnetic storage devices, and more particularly to flexures having various thicknesses for magnetic storage devices.

Background Art

[0002] Magnetic storage devices such as hard disk drives (“HDDs”) are widely used to store digital data or electronic information such as corporate data processing systems, computer workstations, portable computing devices, digital audio players, digital video players, and the like. Generally, an HDD includes a read / write head that helps facilitate the storage of data on a magnetic disk. Each read / write head is supported on a suspension assembly. Some HDDs include a suspension assembly having a flexure.

Summary of the Invention

[0003] There is a need for a magnetic storage device and a manufacturing method that helps reduce the contact between a flexure and an actuator. The subject matter of the present application has been developed in view of the current state of magnetic storage devices, and specifically in view of the problems and needs in the art as described above that have not yet been fully solved by currently available magnetic storage devices. Accordingly, embodiments of the present disclosure overcome at least some of the disadvantages of the prior art.

[0004] The following is a non-exhaustive list of examples of the subject matter disclosed herein that may or may not be claimed.

[0005] This specification discloses a head gimbal assembly for a magnetic storage device. The head gimbal assembly includes a load beam, a read / write head, an actuator configured to move the read / write head, and a flexure attached to the actuator. The flexure includes an actuator side facing the actuator. The flexure also includes a recess formed on the actuator side that at least partially overlaps the actuator along a virtual plane substantially perpendicular to the length of the load beam. The subject matter described herein is characterized by Embodiment 1 of this disclosure.

[0006] The head gimbal assembly further includes an adhesive placed between the actuator and the flexure at a position within a recess so that the adhesive partially fills the recess. The adhesive is made of a conductive material. The subject matter described above in this paragraph is characterized by an embodiment 2 of the present disclosure, which also includes the subject matter described above in embodiment 1.

[0007] The ratio of the thickness of the non-recessed portion of the flexure directly adjacent to the recess to the thickness of the recessed portion of the flexure defined by the recess is between 1.2 and 5.0. The subject matter described herein is characterized by Example 3 of the present disclosure, which also includes the subject matter described in any one of Examples 1 to 2 above.

[0008] The flexure includes a first flexure layer made of a first material and a second flexure layer made of a second material different from the first material. Recesses are formed in the second flexure layer. The flexure is attached to the load beam such that the first flexure layer is interposed between the load beam and the second flexure layer. The subject matter described herein is characterized by Embodiment 4 of the present disclosure, which also includes the subject matter described in any one of Embodiments 1 to 3 above.

[0009] The first flexure layer defines the substrate of the flexure, and the second flexure layer is made of a polyimide material applied on the substrate of the flexure. The subject matter described above in this paragraph is characterized by Example 5 of the present disclosure, which also includes the subject matter described in Example 4 above.

[0010] The head gimbal assembly further includes an adhesive interposed between the actuator and the third flexure layer of the flexure, and in contact with the second and third flexure layers. The subject matter described herein is characterized by Example 6 of the present disclosure, which also includes the subject matter described in Example 4 or 5 above.

[0011] The first flexure layer, the second flexure layer, and the third flexure layer are arranged in a manner in which they are stacked in a first direction substantially parallel to the depth of the recess. The subject matter described herein is characterized by Example 7 of the present disclosure, which also includes the subject matter described in any one of Examples 4 to 6 above.

[0012] The actuator side includes the surface of a second flexure layer substantially perpendicular to the first direction. The subject matter described above in this paragraph is characterized by Example 8 of the present disclosure, which also includes the subject matter described in Example 7.

[0013] The second flexure layer does not come into contact with the actuator. The subject matter described herein is characterized by Example 9 of the present disclosure, which also includes the subject matter described in any one of Examples 4 to 8 above.

[0014] The second flexure layer is made of a photosensitive dielectric material. The subject matter described herein is characterized by Example 10 of the present disclosure, which also includes the subject matter described in any one of Examples 4 to 9 above.

[0015] The flexure further includes a recessed portion defining the recess and a non-recessed portion directly adjacent to the recessed portion and at least partially overlapping the actuator along a virtual plane. The subject matter described herein is characterized by an embodiment 11 of the present disclosure, which also includes the subject matter described in any one of embodiments 1 to 10 above.

[0016] The actuator includes a first actuator. The head gimbal assembly further includes a second actuator. The recess is the first recess. The flexure is formed on the actuator side and further includes a second recess that at least partially overlaps the second actuator along a virtual plane. The subject matter described herein is characterized by Embodiment 12 of the present disclosure, which also includes the subject matter described in any one of Embodiments 1 to 11 above.

[0017] The maximum width of the actuator is less than the maximum width of the recess. The subject matter described above in this paragraph is characterized by Embodiment 13 of the present disclosure, which also includes the subject matter described in Embodiments 1 to 12 above.

[0018] The flexure includes a recessed portion defining the recess and a non-recessed portion directly adjacent to the recess. The actuator does not overlap with the non-recessed portion in a virtual plane. The subject matter described herein is further characterized by Embodiment 14 of the present disclosure, which also includes the subject matter described in Embodiments 1 to 13 above.

[0019] Furthermore, this specification discloses a magnetic storage system comprising a predetermined number of disks and a head gimbal assembly. The head gimbal assembly comprises a read / write head and a suspension assembly. The suspension assembly comprises a base plate, a load beam mounted to the base plate, an actuator configured to move the read / write head toward one of the predetermined number of disks, and a flexure mounted to the actuator. The flexure mounted to the actuator comprises an actuator side facing the actuator and a recess formed on the actuator side that at least partially overlaps the actuator along a virtual plane substantially perpendicular to the length of the load beam. The aforementioned subject matter of this paragraph is characterized by Embodiment 15 of the present disclosure.

[0020] The magnetic storage system further includes a slider mounted on the slider side of the flexure opposite to the actuator side. The slider includes a read / write head configured to read data from at least one of a predetermined number of disks, or to write data to at least one of a predetermined number of disks. The subject matter described herein is characterized by Embodiment 16 of the present disclosure, which also includes the subject matter described in Embodiment 15 above.

[0021] The load beam further includes a distal end portion, a proximal end portion, and a hinge interposed between the distal end portion and the proximal end portion. The proximal end portion is attached to a base plate. The flexure is attached to the load beam such that the actuator is positioned above the distal end portion of the load beam. The subject matter described herein is characterized by Embodiment 17 of the present disclosure, which also includes the subject matter described in Embodiment 15 or 16 above.

[0022] This specification further discloses a method for manufacturing a head gimbal assembly for a magnetic storage device. This method includes mounting an actuator to means for at least partially fitting the actuator to the actuator side of a flexure. The actuator is configured to move a read / write head mounted on the flexure. The actuator side of the flexure faces the actuator, and the means for at least partially fitting the actuator at least partially overlaps the actuator along a virtual plane substantially perpendicular to the length of the load beam mounted on the flexure. The subject matter described herein is characterized by Embodiment 18 of this disclosure.

[0023] Means for at least partially fitting the actuator include a recess formed on the actuator side. This method further includes forming the recess by removing material from the polyimide layer of the flexure. The subject matter described herein is characterized by Example 19 of the present disclosure, which also includes the subject matter described in Example 18 above.

[0024] The polyimide layer comprises a first polyimide layer, and the method further comprises attaching a slider having a read / write head to an additional polyimide layer of the flexure on the slider side of the flexure opposite to the actuator side. The subject matter described herein is characterized by Example 20 of the present disclosure, which also includes the subject matter described in Example 18 or 19 above.

[0025] The features, structures, advantages, and / or properties described in this disclosure can be combined in any preferred manner in one or more embodiments and / or implementations. Numerous specific details are provided in the following description to give a complete understanding of embodiments of the subject matter of this disclosure. Those skilled in the art will recognize that the subject matter of this disclosure may be implemented without one or more specific features, details, components, materials, and / or methods of a particular embodiment or implementation. In other examples, additional features and advantages may be recognized in certain embodiments and / or implementations that may not be present in all embodiments or implementations. Furthermore, in some examples, well-known structures, materials, or operations are not shown in detail or described in order to avoid obscuring aspects of the subject matter of this disclosure. The features and advantages of the subject matter of this disclosure may be more fully apparent from the following description and the accompanying claims, or may be acquired by implementing the subject matter as described below. [Brief explanation of the drawing]

[0026] To facilitate understanding of the merits of this disclosure, a more specific description of the disclosure, as briefly stated above, is provided by reference to specific embodiments shown in the accompanying drawings. While it is understood that these drawings only illustrate typical embodiments of the disclosure and should not be considered limiting in scope, the subject matter of this application is described and explained through the use of the accompanying drawings, with additional specificities and details. [Figure 1] This is a schematic perspective view of a magnetic storage device according to one or more embodiments of the present disclosure. [Figure 2A]A bottom view of a head gimbal assembly of a magnetic storage device and a detailed view of an actuator of the head gimbal assembly, according to one or more embodiments of the present disclosure. [Figure 2B] A cross-sectional side view of a head gimbal assembly of a magnetic storage device along plane A-A of FIG. 2A, according to one or more embodiments of the present disclosure. [Figure 2C] Another cross-sectional side view of a head gimbal assembly of a magnetic storage device along plane B-B of FIG. 2A, according to one or more embodiments of the present disclosure. [Figure 2D] A perspective view of a notch of a head gimbal assembly of a magnetic storage device, according to one or more embodiments of the present disclosure, where the notch is along plane A-A of FIG. 2A. [Figure 3A] A cross-sectional side view of a head gimbal assembly of a magnetic storage device having a flexure with a recess offset from an actuator along plane A-A of FIG. 2A, according to one or more embodiments of the present disclosure. [Figure 3B] Another cross-sectional side view of a head gimbal assembly of a magnetic storage device having a flexure with a recess offset from an actuator along plane B-B of FIG. 2A, according to one or more embodiments of the present disclosure. [Figure 3C] A perspective view of a notch of a head gimbal assembly of a magnetic storage device, according to one or more embodiments of the present disclosure, where the notch is along plane A-A of FIG. 2A. [Figure 4] A flowchart of a method for manufacturing a head gimbal assembly of a magnetic storage device, according to one or more embodiments of the present disclosure.

MODE FOR CARRYING OUT THE INVENTION

[0027] Throughout this specification, references to “one example,” “an example,” or similar terms mean that certain features, structures, or characteristics described in relation to these examples are included in at least one example of this disclosure. Throughout this specification, the phrases “in one example,” “in an example,” and similar terms do not necessarily all refer to the same example. Similarly, the term “implementation” means an implementation having certain features, structures, or characteristics described in relation to one or more examples of this disclosure. However, unless there is an express correlation to indicate otherwise, an implementation may be associated with one or more examples.

[0028] Referring to Figure 1, a magnetic storage device 100 according to one embodiment is shown as a hard disk drive (HDD). However, in other embodiments, the magnetic storage device 100 may be any of various magnetic storage devices without departing from the essence of the subject matter of this disclosure. The magnetic storage device 100 includes a housing 102 that seals or encloses an internal cavity 114 defined within the housing. The housing 102 includes a base 130 and a cover 132 (shown with dashed lines so as not to obscure the internal mechanism of the magnetic storage device 100 within the internal cavity 114 of the housing 102). The cover 132 is coupled to the base 130 so as to enclose the internal cavity 114 from the environment outside the housing 102. In some implementations, a seal or gasket is positioned between the base 130 and the cover 132 to facilitate sealing between the base 130 and the cover 132. In some examples, the base 130 is made of a metallic material such as stainless steel.

[0029] The magnetic storage device 100 includes various mechanisms located within an internal cavity 114 of the housing 102. In some examples, the magnetic storage device 100 includes a carriage 103, a disk 115, a spindle motor 121, and a voice coil motor (VCM) 125 within the internal cavity 114. Referring to Figures 1 and 2A, the carriage 103 includes a head stack assembly 107, which includes a plurality of carriage arms 105 and at least one head gimbal assembly 109 (e.g., suspension) coupled to the distal end of each carriage arm of the plurality of carriage arms 105. Each head gimbal assembly 109 includes a suspension assembly 135 and a slider 142. The slider 142 includes at least one read / write head coupled to (e.g., embedded in) the housing of the slider 142. The magnetic storage device 100 in Figure 1 is shown to have five carriage arms 105 and four disks 115, but in other examples, the magnetic storage device 100 may have fewer or more carriage arms 105 or fewer or more disks 115. In one example, each side of each carriage arm 105 facing the disks 115 has a head gimbal assembly 109 (for example, each of the bottom and top carriage arms 105 may have one head gimbal assembly 109, and each of the intermediate carriage arms 105 between the bottom and top carriage arms 105 may have two head gimbal assemblies 109). Similarly, the magnetic storage device 100 is shown to have one spindle motor 121 and one VCM 125, but in other examples, the magnetic storage device 100 may have any number of spindle motors 121 and VCM 125.

[0030] The spindle motor 121 is coupled to the base 130. Generally, the spindle motor 121 includes a stationary portion fixed immovably to the base 130 and a spindle rotatable relative to the stationary portion and the base 130. Thus, the spindle of the spindle motor 121 can be considered as part of the spindle motor or as an integral part of the spindle motor. Generally, the spindle motor 121 is operable to rotate the spindle relative to the base 130. The disks 115, or platters, are fixed to the spindle of the spindle motor 121 via their respective hubs 122 so as to be co-rotatable, and the hubs are fixed to the respective disks 115 and spindles so as to be co-rotatable. When the spindle of the spindle motor 121 rotates, the disks 115 rotate in correspondence. In this way, the spindle of the spindle motor 121 defines the axis of rotation for each disk 115. The spindle motor 121 can be controlled to operate in a way that rotates the disk 115 in the rotational direction 190 by a controlled amount at a controlled speed.

[0031] Each of the disks 115 may be any of various types of magnetic recording media. Generally, in one embodiment, each disk 115 includes a substrate and a magnetic material applied directly or indirectly on the substrate. For example, the magnetic material of the disk 115 may be a conventional granular magnetic recording disk or wafer having magnetic layer bits, each bit having multiple magnetic particles. In a granular magnetic medium, all bits are coplanar, and the surface 116 of the disk is substantially smooth and continuous. In one embodiment, each bit has a magnetic dipole moment that can have in-plane (longitudinal) or out-of-plane (perpendicular) orientation.

[0032] As the disk 115 rotates in read / write mode, the VCM 125 electromagnetically engages with the voice coil of the carriage arm 105, causing the carriage arm 105 and the head gimbal assembly 109 coupled to it to rotate relative to the disk 115 along a plane parallel to the read / write surface of the disk 115. Rotating the carriage arm 105 allows the read / write head of the head gimbal assembly 109 to be positioned on a specific radial area of ​​the corresponding read / write surface 116 of the disk 115 for read and / or write operations. The VCM 125 is fixed to the base 130 in engagement with the voice coil of the carriage arm 105, and the carriage arm is rotatably coupled to the base 130 via a spindle 127 extending through the carriage 103. Generally, the spindle 127 defines the axis of rotation on which the carriage arm 105 rotates when actuated by the VCM 125.

[0033] The carriage arms 105 are fixed immovably to the base of the carriage 103 (e.g., integrally formed as a single monolithic body) and extend away from it, spaced apart from each other. In some implementations, the carriage arms 105 are equidistant from each other and extend parallel to each other. One of each disk 115 is positioned between adjacent carriage arms 105. In idle mode (e.g., when no read-write operations are being performed), the VCM 125 is activated to rotate the carriage arms 105 radially outward relative to the disks 115, thereby placing the head gimbal assembly 109 on or unloading it from the ramp support 117 fixed to the base 130.

[0034] Referring to Figures 1, 2B, and 3A, the read / write head 134 embedded in the slider 142 includes at least one read transducer and at least one write transducer. The read transducer is configured to detect the magnetic properties (e.g., magnetic bit pattern) of the disk 115 and convert the magnetic properties into electrical signals. Conversely, the write transducer changes the magnetic properties of the disk 115 in response to the electrical signals. For each head gimbal assembly 109, electrical signals are transmitted to and from the read / write head 134 via electrical traces or lines formed on or coupled to the slider 142 and the flexure 140 (see, for example, the third layer 131 in Figures 2B to 3B). The electrical traces of the slider 142 and the flexure 140 are electrically interconnected to facilitate the transmission of electrical signals between the read / write head and the flex connector 104 of the magnetic storage device 100, which communicates with the control module of the magnetic storage device 100 (see, for example, Figure 1). The control module is configured to process electrical signals and facilitate the communication of electrical signals between the magnetic storage device 100 and one or more external computing devices. Generally, the control module includes software, firmware, and / or hardware used to control the operation of various components of the magnetic storage device 100. The control module may include a printed circuit board with the hardware mounted on top or inside. Solder welds are used to electrically connect the corresponding electrical contact pads (and corresponding electrical traces) of the slider 142 and the flexure 140.

[0035] Referring to Figures 2A to 3C, in some implementations, the head gimbal assembly 109 also includes an actuator 120 that can be selectively operated to move the read / write head 134. In some examples, the actuator 120 can transmit force to a flexure 140, which helps distribute force to the actuator and can enable more precise control of the movement of the read / write head 134.

[0036] Figure 2A is a bottom view of the head gimbal assembly 109 of a magnetic storage device 100 according to one or more embodiments of the present disclosure. As used herein, the term “bottom view” refers to any face of the head gimbal assembly 109 that faces the read / write surface 116 of the disk 115 on which the read / write head 134 reads and / or writes data (e.g., the bottom view of the suspension assembly 135). The head gimbal assembly 109 includes the suspension assembly 135 and the read / write head 134. In some examples of the present disclosure, the suspension assembly 135 includes a base plate 192 and a load beam 196 having a distal end portion 133, the bottom view of which is shown in Figure 2. The base plate 192 spans between the distal end portion 133 of the load beam 196 and the carriage arm 105, connecting them. The load beam 196 is coupled to the base plate 192 of the suspension assembly 135 via hinges 141 of the load beam 196 and bends relative to the base plate 192. In some examples, the hinges 141 include two hinges on either side of the gap in the load beam 196. The hinges 141 bias the load beam 196 toward the surface 116 of at least one of a predetermined number of disks 115, allowing a read / write head 134 on the distal end portion 133 of the carriage arm 105 to read data from and / or write data to one of the corresponding disks 115. In some examples, as the disk rotates relative to the read / write head 134, the read / write head 134 floats above the read / write surface 116.

[0037] In some examples, the load beam 196 is made of an elastically flexible material such as a metallic material. The hinge 141, when bent, acts as a spring to generate a force (referred to herein as the “Gram load”) that pushes the head 134 of the head gimbal assembly 109 toward the surface of the disk 115 to a position where the flying height between the surface and the read / write head 134 is minimized. This is achieved, for example, by forced air or another gas (e.g., helium). The gap between the read / write head 134 and the disk 115 is sometimes referred to herein as the “flying height” or “floating height”. In many cases, it is preferable to minimize and / or stabilize this gap in order to maximize the signal quality of the data transmitted between the disk 115 and the read / write head 134. In some examples, the flying height is about 5 nanometers ("nm") or less. However, the examples of this disclosure are not limited thereto.

[0038] The suspension assembly 135 also includes a flexure 140 extending along the base plate 192 and the underside of the road beam 196. The flexure 140 includes an actuator side 123 facing the actuator 120. Direct contact between the actuator 120 and the flexure 140 would result in increased friction, reducing the overall efficiency of the actuator 120 and potentially contributing to premature wear and / or failure. In addition, direct contact between the flexure and the actuator could introduce undesirable vibrations and / or noise, which could interfere with the performance of the actuator 120. The contact force may also contribute to deformation and / or damage of the flexure 140. Therefore, reducing direct contact between the flexure and the actuator could help improve performance and / or reduce wear on the actuator 120 and / or the flexure 140.

[0039] Examples of the present disclosure include a flexure 140 having a recess 111 on the actuator side 123 of the flexure 140 facing the actuator 120. The recess 111 at least partially overlaps the actuator 120 along plane AA and helps reduce direct contact between the flexure 140 and the actuator 120. In some examples, the flexure 140 has reduced thickness in the recessed portion 108 of the flexure 140. As used herein, the “recessed portion” of a feature refers to any portion of the feature that includes the recess 111. Thus, the recessed portion 108 of the flexure 140 is the portion of the flexure 140 that is defined by the recess 111 and is substantially within the area shown by the dashed line in Figure 2A.

[0040] As shown in Figures 2B-2D and 3A-3C, in some examples, the flexure 140 is a multilayer flexure including, for example, a first layer 128, a second layer 129, a third layer 131, and / or a fourth layer 136. In some examples, the flexure layers 128, 129, 131, and 136 are arranged in a stacked configuration in a first direction d1. As described herein, the various portions of layers 128, 129, 131, and / or 136 have varying thicknesses to minimize contact between the flexure and the actuator. In some examples, the recess 111 of the flexure 140 is the recess 111 of the second layer 129. As used herein, the actuator 120 attached to the flexure 140 is, in some examples, a component of the flexure 140 and includes an actuator 120 indirectly attached to at least one of the various layers 128, 129, 131, and / or 136 of the flexure 140.

[0041] In some examples, the first layer 128 is formed directly on the load beam 196. Like the load beam 196, the first layer 128 is often made of stainless steel or other similar material and has a greater thickness than the other layers of the multilayer flexure 140. In some examples, the first layer 128 is made of a metallic material. For example, in some examples, the first layer 128 is a sheet of stainless steel. According to some examples, the first layer 128 has a thickness t4 of about 20 micrometers ("μm"). In some examples, after the multilayer flexure 140 is formed, the first layer 128 is attached to the load beam 196 so that the entire flexure 140 is attached to the load beam. In other words, the first layer 128 is positioned directly adjacent to the load beam 196. As shown in Figures 2B to 3B, in some examples, the first layer 128 does not come into contact with the actuator 120. In some examples, the first layer 128 is the base material of the flexure 140.

[0042] A second layer 129 of the flexure 140 is formed (e.g., applied) on the first layer 128. In some examples, the second layer 129 is made of a dielectric and / or photosensitive material such as liquid polyimide. As shown in Figures 2B and 3A, the second layer 129 forms a barrier between the first layer 128 and the third layer 131. This barrier helps to maintain signal quality. The thickness of the second layer 129 is positively correlated with signal quality. Referring to Figures 3A–3C, in some examples, a portion of the second layer 129 overlaps with the actuator 120 in a plane AA substantially perpendicular to the length L1 of the load beam 196. However, as mentioned above, it may be beneficial to reduce or avoid contact between the second layer 129 and the flexure 140. Therefore, the present disclosure includes a flexure 140 having a recess 111 positioned to help reduce contact between the flexure and the actuator.

[0043] In some examples, the third layer 131 is made of copper. In some examples, the copper of the third layer 131 has a high purity, is less rigid, and is more flexible. For example, the third layer 131 contains copper with a purity of over 99 percent, similar to the purity of electronic grade copper foil. In some examples, the third layer 131 includes portions of one or more signal traces for the flexure 140. In some examples, the flexure 140 includes signal traces (sometimes called “circuit traces”) for conducting signals from the read / write head 134 to other components of the device 100. These traces are often made of copper and / or copper foil, but the examples of this disclosure are not so limited. For example, in some examples, the traces are made of aluminum, gold, or any combination thereof.

[0044] In some examples, the flexure 140 includes a fourth layer 136 positioned between the trace of the third layer 131 and the slider 142. Referring to Figures 2B and 3A, the slider 142 is bonded to the flexure at the fourth layer 136 in some examples. In some examples, the fourth layer is made of a material similar to that of the second layer 129. The fourth layer 136 can be made of a flexible material such as polyimide, for example. In some examples, the fourth layer 136 is made of an insulating heat-resistant material.

[0045] Referring to Figures 2C-2D and 3B-3C, the flexure 140 is attached directly and / or indirectly to the actuator 120 in some examples. The flexure 140 includes an actuator side 123 facing the actuator 120 and the load beam 196. The flexure 140 also includes a slider side 126 opposite to the actuator side 123. The slider side 126 faces the slider 142 and, in some examples, is attached to the slider 142. Thus, in some examples, the slider side 126 faces the read / write surface of the disk 115 from which the corresponding read / write head 134 of the head gimbal assembly 109 is reading and / or writing data.

[0046] The actuator side 123 includes, in some examples, an exposed portion of the second layer 129. The exposed portion includes, for example, the surface of the second layer 129 that is not covered by the first layer 128. In some examples, the surface of the second layer 129 extends substantially perpendicular to the direction d1 in which the layers of flexure 140 are laminated. The recess 111 is formed on the actuator side 123 so as to face the actuator 120. The flexure 140 is recessed away from the actuator 120.

[0047] Figures 2B and 3A are cross-sectional side views of two examples of a head gimbal assembly 109 along plane AA in Figure 2A. Plane AA is substantially perpendicular to the length L1 of the load beam 196. Referring to Figures 2B and 3A, in some examples, the recess 111 overlaps at least partially with the actuator 120 along the virtual plane AA. Both the recess 111 and the actuator 120 pass through at least one common plane substantially perpendicular to the virtual plane AA (e.g., plane BB shown in Figure 2A). In one or more examples, the actuator 120 does not overlap with the first layer 128 in the virtual plane AA. In some examples, the recess 111 is formed in the second layer 129.

[0048] Referring back to Figure 2A, in some examples, the load beam 196 includes a distal end portion 133 and a proximal end portion 119, with a hinge 141 interposed between the distal end portion 133 and the proximal end portion 119. In some examples, a flexure 140 is attached to the load beam 196 so that an actuator 120 is positioned above the distal end portion 133 of the load beam 196. In such examples, a recess 111 of the flexure 140 is also positioned above the distal end portion 133 of the load beam 196. In some examples, the recess 111 and the actuator 120 are limited to the distal end portion 133 and do not include any portion extending above the proximal end portion 119. As shown, the recess 111 helps to facilitate the at least partially fitted of the actuator 120 into the flexure 140.

[0049] In one or more examples, the depth d2 of the recessed portion 108, defined as the difference in thickness between the recess 111 and the non-recessed portion 124 directly adjacent to the recessed portion 108, is substantially parallel to the direction d1 in which the layers of flexure 140 are stacked. In some examples, the second layer 129 is recessed away from the first layer 128, the actuator 120, and / or the load beam 196. Referring to Figure 3B, in some examples, the depth d2 of the recess 111 varies along the plane "BB".

[0050] The recessed portion 108 has a thickness t2 that is smaller than the thickness t1 of the non-recessed portion 124. In some examples, the ratio of the non-recessed thickness t1 to the recessed thickness t2 is between 1.2 and 5. In some examples, the sum of the recess depth d2 and the thickness t2 of the recessed portion 108 is approximately equal to the thickness t1 of the non-recessed portion 124. In some examples, the recessed portion 108 and the non-recessed portion 124 are flush on the slider side 126 but not on the actuator side 123.

[0051] Figure 2C is another cross-sectional side view of the head gimbal assembly 109 of the magnetic storage device 100 according to one or more embodiments of the present disclosure, along plane BB of Figure 2A. Figure 3B is another cross-sectional side view of another example of the head gimbal assembly 109, along plane BB of Figure 2A.

[0052] Referring to Figures 2C and 3B, in some examples, the suspension assembly 135 includes an adhesive 101 positioned between the actuator 120 and the flexure 140 within the recess 111. In some examples, the adhesive 101 is made of a conductive material. In some examples, the adhesive 101 establishes an electrical connection between the actuator 120 and the flexure 140, enabling the flexure 140 to receive signals from the actuator 120. In some examples, the adhesive 101 is made of a thermally conductive material.

[0053] As shown in Figures 2C and 3B, in some examples, the adhesive 101 partially fills the recess 111. In some examples, the adhesive 101 does not completely fill the recess 111. In some examples, the adhesive 101 is received by the recess 111 and fills a total volume less than half of the recess 111. In some examples, the adhesive 101 is interposed between the actuator 120 and the flexure 140 at two or more locations within the recess 111. As shown in Figures 2C and 3B, in some examples, the adhesive 101 is located at two locations within the recess 111. In some examples, the adhesive 101 is located within the recess 111 at locations equal to the amount of the portion of the third layer 131 extending to the actuator side 123 within the recess. For example, as shown in Figures 2C and 3B, the third layer 131 extends to the actuator side 123 and is exposed to the recess 111 at two locations, and the adhesive 101 is located within the recess 111 at these two distinct locations.

[0054] In some examples, the adhesive 101 directly contacts the actuator 120 and extends through the depth d2 of the recess 111 to directly contact the flexure 140. The adhesive 101 contacts any combination of layers of the flexure 140. For example, referring to Figures 2C and 3B, the adhesive 101 contacts the third layer 131 to provide an electrical connection between the actuator 120 and the trace of the third layer 131. In some examples, the adhesive 101 contacts only the third layer 131 and not directly contacts any other layers of the flexure (for example, the adhesive 101 does not contact the first layer 128 or the second layer 129). In some examples, the third layer 131 extends through the second layer 129 to the actuator side 123 of the flexure 140 within the recess 111. In some examples, the adhesive 101 contacts both the second layer 129 and the third layer 131 within the recess 111.

[0055] In some examples, the adhesive 101 is completely or largely contained within the recess 111. In some examples, the adhesive 101 has a thickness t3 that does not exceed the depth d2 of the recess. In some examples, the adhesive 101 has a thickness t3 that does not significantly exceed the depth d2 of the recess 111. In some examples, the thickness t3 of the adhesive is less than or equal to the sum of the recess depth d2 and the thickness t4 of the first layer 128. In some examples, the ratio of the adhesive thickness t3 to the recess depth d2 is 1.5 or less.

[0056] In some examples, the adhesive 101 is made of a malleable material. Thus, as used herein, the “thickness” t3 of the adhesive 101 refers to the thickness t3 of the adhesive 101 when it is received by the recess 111 and in contact with both the actuator 120 and the flexure 140 during the operation of the magnetic memory device 100.

[0057] Referring to Figures 2B, 2D, 3A, and 3C, in some examples, the suspension assembly 135 includes two or more recesses 111. In some examples, the number of recesses 111 located on the distal end portion 133 of the load beam 196 is equal to the number of actuators 120 located on the distal end portion 133 of the load beam 196. In some examples, the suspension assembly 135 includes two recesses 111 formed in the same flexure 140 and two actuators 120 located on the distal end portion 133 of the load beam 196. While Figures 2B, 2D, 3A, and 3C show two recesses 111 and two actuators 120 corresponding to one flexure 140, the examples of the present disclosure are not limited thereto and may include more or fewer recesses 111 and / or actuators 120.

[0058] Referring to Figures 2B to 2D, in some examples, the flexure 140 does not directly contact the actuator 120. Referring to Figure 2C, in some examples, the flexure 140 indirectly contacts the actuator 120 via the adhesive 101 and is suspended above the actuator 120 by the adhesive 101. In some examples, the concave layer (e.g., the second layer 129) does not contact the actuator 120. Referring to Figure 2B, in some examples, the maximum width w1 of the actuator 120 is smaller than the maximum width w2 of the recess 111. In some examples, the actuator 120 is fully positioned above the recess 111 in plane AA, and the maximum width w1 of the actuator 120 is smaller than the maximum width w2 of the recess 111. In some examples, the adhesive 101 and / or another component of the suspension assembly 135 provides separation in direction d1 between the flexure 140 and the actuator 120 so that the actuator 120 does not even contact the non-concave portion 124 of the flexure 140. In some examples, the actuator 120 is positioned between the gaps of the first layer 128 so as not to come into contact with the first layer 128.

[0059] In some examples, the actuator 120 is positioned substantially centered with respect to the corresponding recess 111. Referring to Figure 2B, in some examples, the actuator 120 does not overlap the non-recessed portion 124 along the plane AA in which the actuator 120 overlaps with the recess 111.

[0060] Referring to Figures 3A to 3C, in other examples, the actuator 120 at least partially overlaps with at least one non-recessed portion 124 of the flexure 140 in plane AA. In some examples, the actuator 120 is offset along plane AA with respect to the recess 111. In some examples, the actuator 120 does not contact the flexure 140 even when the actuator 120 and the non-recessed portion 124 overlap. The separation between the flexure 140 and the actuator 120 is maintained in some examples via adhesive 101.

[0061] In some examples, the actuator 120 is offset relative to the recess 111 in plane AA and overlaps with the non-recessed portion 124 of the flexure 140. Referring to Figure 3C, in some examples, the actuator 120 is shaped similarly to a right-angle prism. In some examples, a first corner 144a of the actuator 120 overlaps with the non-recessed portion 124 of the flexure 140, while another corner 144b of the actuator 120 does not overlap with the non-recessed portion 124 of the flexure 140. In some examples, corner 144b of the actuator 120 overlaps with the recess 111, while another corner 144a of the actuator 120 does not overlap. In some examples, the actuator 120 overlaps with the non-recessed portion 124 of the flexure 140 in plane AA, but the actuator 120 still does not directly contact the flexure 140 due to the clearance provided by the adhesive 101 interposed between the actuator 120 and the flexure 140. The distance between flexure 140 and angle 144b is greater than the distance between flexure 140 and angle 144a.

[0062] Figure 4 is a flowchart of a method 400 for manufacturing a head gimbal assembly 109 of a magnetic storage device 100, according to one or more embodiments of the present disclosure. Specifically, method 400 includes manufacturing a flexure 140 of a suspension assembly 135 of the magnetic storage device 100. Those skilled in the art will understand that any combination of the steps shown in Figure 4 and / or described herein may be used.

[0063] Method 400 includes step 404 of mounting the actuator 120 to means for receiving the actuator 120 on the actuator side 123 of the flexure 140. In some examples, the means for receiving the actuator 120 includes a recess 111. In some examples, the means for receiving the actuator 120 is means for indirectly mounting the actuator 120 to the flexure 140 (e.g., via adhesive 131). In some examples, Method 400 includes mounting the actuator 120 to the flexure 140 such that the actuator side 123 of the flexure 140 faces the actuator and the recess 111 formed in the actuator side 123 at least partially overlaps the actuator along a plane "AA". In some examples, plane AA is substantially perpendicular to the length L1 of the load beam 196 when the load beam 196 is mounted to the flexure 140. In some examples, attaching the flexure 140 to the actuator 120 404 includes attaching the flexure 140 and the actuator 120 via adhesive 101.

[0064] In some examples, method 400 optionally includes an additional step 402 of forming a recess 111 on the actuator side 123 of the flexure 140. In some examples, method 400 includes forming the recess 111 402 before mounting the flexure 140 and actuator 120. In some examples, forming the recess 111 402 includes removing material from a second layer 129 (e.g., removing polyimide material from the flexure 140).

[0065] Forming the recess 111 402 includes, in some examples, forming the recess 111 in the second layer 129 by various means. In some examples, the mask is placed on the second layer 129 after the second layer 129 has been formed on the first layer 128. The phrase “placed on” is used herein, but the examples of the present disclosure are not limited thereto. For example, the mask may be formed on the second layer. This mask includes a portion that lies above the desired recessed portion 108 of the flexure 140. This portion of the mask differs in translucency from the rest of the mask. In some examples, the mask is a glass photomask and / or a halftone mask. For example, the portion of the mask placed above the desired recessed portion 108 is a halftone glass mask, and the rest of the mask is a full glass mask.

[0066] In some examples, the mask is an opaque plate having one or more openings or transparent or translucent portions. Thus, light can be shone through the mask. In some examples, the portion aligned with the desired recessed portion 108 is more translucent than the rest. In some examples, the higher translucency is at least partially attributable to a higher number and / or density of openings and / or transparent portions in different parts of the mask.

[0067] In some examples, forming the recess 111 402 includes irradiating light through a mask. The light is irradiated through both the recessed and non-recessed portions of the mask. In some examples, this is done through a lens. Parts of the mask may be more translucent than other parts, but the light may still be irradiated through the entire mask. In some examples, the method includes removing the mask from the second layer 129 and etching or removing the residue from the second layer 129 such that the recessed portion 108 of the second layer 129 has a thickness t2 less than the thickness t1 of the remaining non-recessed portion 124 of the second layer 129. In some examples, forming the recess 111 402 includes forming a photoresist material on the second layer 129 and etching one or more openings in the photoresist material to expose a portion of the second layer 129.

[0068] In some examples, method 400 further includes attaching the slider 142 to a fourth layer 136 of the flexure 140 on the slider side 126 opposite to the actuator side 123.

[0069] As used herein, the term “layer” may be used to describe multiple continuous or discontinuous layers. However, it may also be used to describe multiple parts of a layer of material. For example, as shown in Figures 2B–2D and 3A–3C, the second layer 129 includes multiple parts of different thicknesses, including parts 108 and 124. Parts 108 and 124 may be collectively referred to as “second layer 129” and / or “the second layer 129”).

[0070] In the above description, specific terms such as “up,” “down,” “upper,” “lower,” “horizontal,” “vertical,” “left,” “right,” “over,” and “under” may be used. These terms are used to clarify the description when dealing with relative relationships, where applicable. However, these terms are not intended to imply absolute relationships, positions, and / or orientations. For example, with respect to an object, the “upper” surface can become the “lower” surface simply by turning the object inside out. Yet, it is still the same object. Furthermore, the terms “including,” “comprising,” and “having,” and their variations, mean “including, but not limited to,” unless otherwise specified. The list of enumerated items does not implicitly mean that any or all of those items are mutually exclusive and / or mutually exclusive, unless otherwise specified. “A,” “an,” and “the” also mean “one or more,” unless otherwise specified. Furthermore, the term "plural" can be defined as "at least two."

[0071] As used herein, a system, apparatus, structure, article, element, component, or hardware “configured” to perform a particular function is not merely capable of performing the specified function after further modification, but is actually capable of performing the specified function without any modification. In other words, a system, apparatus, structure, article, element, component, or hardware “configured” to perform a particular function is specifically selected, created, implemented, used, programmed, and / or designed for the purpose of performing a particular function. As used herein, “configured” indicates an existing characteristic of the system, apparatus, structure, article, element, component, or hardware that enables the system, apparatus, structure, article, element, component, or hardware to perform a particular function without further modification. For the purposes of this disclosure, a system, apparatus, structure, article, element, component, or hardware described as “configured” to perform a particular function may be described as “adapted” and / or “operated” to perform that function, in addition or as a substitute.

[0072] In addition, instances in this specification in which one element is "joined" to another element can include direct and indirect joins. A direct join can be defined as one element joined to another element and in some contact with the other element. An indirect join can be defined as a join between two elements that do not directly contact each other but have one or more additional elements between the joined elements. Furthermore, as used herein, fixing one element to another element can include direct and indirect fixings. In addition, as used herein, "adjacent" does not necessarily mean contact. For example, one element may be adjacent to another element without contacting it.

[0073] As used herein, the phrase “at least one of” when used with a list of items means that one or more different combinations of the listed items may be used, and only one of the items in the list may be required. An item may be a specific object, thing, or category. In other words, “at least one of” means that any combination of items or number of items may be used from the list, but not all of the items in the list may be required. For example, “at least one of item A, item B, and item C” could mean item A; item A and item B; item B; item A, item B, and item C; item C; or item B and item C. In some cases, “at least one of item A, item B, and item C” could mean, for example, two of item A, one of item B, and ten of item C; four of item B and seven of item C; or several other preferred combinations.

[0074] Unless otherwise stated, terms such as “First,” “Second,” etc., are used herein solely as labels and are not intended to impose any order, position, or hierarchical requirements on the items they refer to. Furthermore, a reference to, for example, an item “Second,” does not require or exclude the presence of, for example, an item “First” or a lower-numbered item, and / or, for example, an item “Third” or a higher-numbered item.

[0075] The schematic flowcharts included herein are generally presented as logical flowcharts. Therefore, the depicted sequence and labeled steps represent one embodiment of the method presented. Other steps and methods may be conceived that are equivalent in function, logic, or effect to one or more steps or parts thereof of the presented method. Furthermore, the format and symbols employed are provided to illustrate the logical steps of the method and are not intended to limit the scope of the method. Various types of arrows and lines may be used in the flowcharts, but these are not intended to limit the scope of the corresponding method. In fact, some arrows or other connectors may be used to show only the logical flow of the method. For example, arrows may indicate waiting or monitoring periods of an unspecified duration between enumerated steps of the illustrated method. Additionally, the sequence in which a particular method is performed may or may not strictly adhere to the sequence of the corresponding steps shown.

[0076] This subject matter may be embodied in other specific forms without departing from its spirit or essential characteristics. The described embodiments should be considered in all respects to be illustrative and non-restrictive. All modifications that fall within the meaning and scope of the claims and equivalents should be included within those scopes.

Claims

1. A head gimbal assembly for a magnetic storage device, Road beam and, Read / write head and An actuator configured to move the read / write head, The actuator is equipped with a flexure, and the flexure is The actuator side facing the actuator, A head gimbal assembly comprising: a recess formed on the actuator side, which at least partially overlaps the actuator with respect to a virtual plane substantially perpendicular to the length of the load beam.

2. The head gimbal assembly according to claim 1, further comprising an adhesive positioned between the actuator and the flexure at a location within the recess such that the adhesive partially fills the recess, wherein the adhesive is made of a conductive material.

3. The head gimbal assembly according to claim 1, wherein the ratio of the thickness of the non-recessed portion of the flexure directly adjacent to the recess to the thickness of the recessed portion of the flexure defined by the recess is 1.2 or more and 5.0 or less.

4. The flexure further comprises a first flexure layer made from a first material and a second flexure layer made from a second material different from the first material. The recess is formed in the second flexure layer, The head gimbal assembly according to claim 1, wherein the flexure is attached to the load beam such that the first flexure layer is interposed between the load beam and the second flexure layer.

5. The first flexure layer defines the substrate of the flexure, The head gimbal assembly according to claim 4, wherein the second flexure layer is made of a polyimide material applied to the substrate of the flexure.

6. The head gimbal assembly according to claim 4, further comprising an adhesive interposed between the actuator and the third flexure layer of the flexure, and in contact with the second flexure layer and the third flexure layer.

7. The head gimbal assembly according to claim 4, wherein the first flexure layer, the second flexure layer, and the third flexure layer are arranged in a manner in which they are stacked in a first direction substantially parallel to the depth of the recess.

8. The head gimbal assembly according to claim 7, wherein the actuator side includes the surface of the second flexure layer substantially perpendicular to the first direction.

9. The head gimbal assembly according to claim 4, wherein the second flexure layer does not come into contact with the actuator.

10. The head gimbal assembly according to claim 4, wherein the second flexure layer is made of a photosensitive dielectric material.

11. The aforementioned flexure, A recessed portion defining the aforementioned recess, The head gimbal assembly according to claim 1, further comprising a non-recessed portion directly adjacent to the recessed portion and at least partially overlapping the actuator along the virtual plane.

12. The actuator includes a first actuator, The head gimbal assembly further comprises a second actuator, The aforementioned recess is the first recess, The head gimbal assembly according to claim 1, wherein the flexure further comprises a second recess formed on the actuator side and at least partially overlapping the second actuator along the virtual plane.

13. The head gimbal assembly according to claim 1, wherein the maximum width of the actuator is smaller than the maximum width of the recess.

14. The flexure comprises a recessed portion defining the recess and a non-recessed portion directly adjacent to the recess, The head gimbal assembly according to claim 1, wherein the actuator does not overlap with the non-recessed portion in the virtual plane.

15. A magnetic memory system, A predetermined amount of disks, A head gimbal assembly and a head gimbal assembly comprising, Read / write head and A suspension assembly comprising, base plate and The load beam attached to the base plate, An actuator configured to move the read / write head toward one of the predetermined number of disks, The actuator is equipped with a flexure, and the flexure is The actuator side facing the actuator, A magnetic storage system comprising: a recess formed on the actuator side, which at least partially overlaps the actuator along a virtual plane substantially perpendicular to the length of the load beam.

16. The magnetic storage system according to claim 15, further comprising a slider attached to the slider side of the flexure opposite to the actuator side, wherein the slider comprises a read / write head configured to perform at least one of reading data from at least one of the predetermined amount of disks or writing data to at least one of the predetermined amount of disks.

17. The load beam further includes a distal end portion, a proximal end portion, and a hinge interposed between the distal end portion and the proximal end portion. The aforementioned proximal end portion is attached to the base plate, The magnetic storage system according to claim 15, wherein the flexure is attached to the load beam such that the actuator is positioned on the distal end portion of the load beam.

18. A method for manufacturing a head gimbal assembly for a magnetic memory device, An actuator, wherein the actuator is configured to move a read / write head attached to the flexure, is mounted on means for at least partially fitting the actuator to the actuator side of the flexure, A method wherein the actuator side of the flexure faces the actuator, and the means for at least partially fitting the actuator at least partially overlaps the actuator along a virtual plane substantially perpendicular to the length of the load beam attached to the flexure.

19. The means for at least partially fitting the actuator comprises a recess formed on the actuator side, The method according to claim 18, further comprising forming the recess by removing material from the polyimide layer of the flexure.

20. The polyimide layer includes a first polyimide layer, The method according to claim 19, further comprising attaching the slider having the read / write head to an additional polyimide layer of the flexure on the slider side of the flexure opposite to the actuator side.

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