Inertial sensor device

Abstract

To provide an inertial sensor device that, after assembly, allows an external device to generate the information necessary for processing each inertial measurement unit. [Solution] An inertial sensor device comprising: a first inertial measurement unit comprising a first inertial sensor, a first signal processing unit, a selector, a first communication unit and a second communication unit; and a second inertial measurement unit comprising a second inertial sensor, a second signal processing unit and a third communication unit, wherein the third communication unit transmits third data, which is data output from the second signal processing unit or the second inertial sensor, to the second communication unit; the first signal processing unit performs calculations on the second data and the third data output from the first inertial sensor and outputs first data; the selector selects and outputs any of a plurality of data including the first data, the second data and the third data based on output mode information; and the first communication unit transmits the data output from the selector to an external device.

Description

Technical Field

[0001] The present invention relates to an inertial sensor device.

Background Art

[0002] Patent Document 1 describes an inertial sensor device in which a first inertial measurement unit receives data from each of a second inertial measurement unit, a third inertial measurement unit, and a fourth inertial measurement unit, and performs a synthesis process on the data of each inertial measurement unit, and transmits the inertial data to an external device. According to the inertial measurement system described in Patent Document 1, by averaging the data of the four inertial measurement units, the noise component is reduced to 1 / 2.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, after assembling an inertial sensor device by connecting four inertial measurement units, an external device cannot read data from the second inertial measurement unit, the third inertial measurement unit, and the fourth inertial measurement unit, and cannot generate information necessary for the processing of these inertial measurement units.

Means for Solving the Problems

[0005] One aspect of the inertial sensor device according to the present invention is an inertial sensor device having a plurality of inertial measurement units and connected to an external device, wherein the plurality of inertial measurement units include a first inertial measurement unit and a second inertial measurement unit, the first inertial measurement unit a first inertial sensor, A first signal processing unit that processes the output signal of the first inertial sensor, Selector and, The First Communications Department and, It is equipped with a second communications unit, The second inertial measurement unit is, The second inertial sensor, A second signal processing unit that processes the output signal of the second inertial sensor, It includes the third communications section, The third communication unit transmits third data, which is data output from the second signal processing unit or data output from the second inertial sensor, to the second communication unit. The first signal processing unit performs calculations on the second data and the third data output from the first inertial sensor and outputs the first data. The selector selects and outputs one of a plurality of data, including the first data, the second data, and the third data, based on the output mode information. The first communication unit transmits the data output from the selector to the external device.

[0006] Another aspect of the inertial sensor device according to the present invention is: An inertial sensor device having multiple inertial measurement units and connected to an external device, The plurality of inertial measurement units include a first inertial measurement unit and a second inertial measurement unit, The first inertial measurement unit is, First inertial sensor and, A first signal processing unit that processes the output signal of the first inertial sensor, Selector and, The First Communications Department and, It is equipped with a second communications unit, The second inertial measurement unit is, The second inertial sensor, A second signal processing unit that processes the output signal of the second inertial sensor, It includes the third communications section, The third communication unit transmits third data, which is data output from the second signal processing unit or data output from the second inertial sensor, to the second communication unit. The first signal processing unit includes a correction processing unit that performs correction processing on the second data output from the first inertial sensor and outputs fourth data, an alignment processing unit that performs alignment processing on the detection axis of the first inertial sensor on the fourth data and outputs fifth data, and a synthesis processing unit that performs synthesis processing on a plurality of data including the fifth data and the third data and outputs first data. The selector selects and outputs one of a plurality of data, including the first data, second data, third data, fourth data, and fifth data, based on the output mode information. The first communication unit transmits the data output from the selector to the external device. [Brief explanation of the drawing]

[0007] [Figure 1] A diagram showing the overall configuration of the inertial sensor device according to the first embodiment. [Figure 2] A diagram showing an example configuration of the inertial measurement unit in the first embodiment. [Figure 3] This diagram shows the correspondence between the output modes of the IMU2a and the output data of the selector. [Figure 4] This diagram shows the correspondence between the output modes of IMU2b and 2c and the output data of the selector. [Figure 5] A flowchart illustrating an example of the processing procedure for an inertial sensor device when a host device reads corrected data from the IMU2c. [Figure 6] A flowchart illustrating an example of the processing procedure for an inertial sensor device when the host device writes matching information to the non-volatile memory of the IMU2c. [Figure 7] A diagram showing an example configuration of the inertial measurement unit in the second embodiment. [Figure 8] A diagram showing the overall configuration of the inertial sensor device according to the third embodiment. [Figure 9]A flowchart showing an example of the procedure of the inertial sensor device when the host device reads corrected data from IMU2g. [Figure 10] A flowchart showing an example of the procedure of the inertial sensor device when the host device writes alignment information to the non-volatile memory of IMU2g.

Embodiments for Carrying Out the Invention

[0008] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. Note that the embodiments described below do not unduly limit the content of the present invention described in the claims. Also, not all of the configurations described below are essential constituent elements of the present invention.

[0009] 1. First Embodiment 1-1. Configuration of Inertial Sensor Device FIG. 1 is a diagram showing the overall configuration of the inertial sensor device according to the first embodiment. As shown in FIG. 1, the inertial sensor device 1 according to the first embodiment has three inertial measurement units (IMUs) 2a, 2b, 2c and is connected to a host device 3 which is an external device.

[0010] Each of the IMUs 2a, 2b, 2c has an inertial sensor and performs predetermined signal processing on the data output from the inertial sensor to generate measurement data. The inertial sensors each of the IMUs 2a, 2b, 2c has detect the same type of physical quantity with respect to each other. For example, each inertial sensor may detect one-axis or two-axis or more acceleration, one-axis or two-axis or more angular velocity, or three-axis acceleration and three-axis angular velocity. Hereinafter, it will be described assuming that each inertial sensor measures three-axis acceleration and three-axis angular velocity.

[0011] IMU2a is connected to host device 3 and can communicate with host device 3. In communication between IMU2a and host device 3, host device 3 acts as the master and IMU2a as the slave. That is, host device 3 sends various commands to IMU2a, and IMU2a performs processing according to the received commands.

[0012] Furthermore, IMU2a is connected to two IMU2b and 2c units, and can communicate with each of them. In communication between IMU2a and each of IMU2b and 2c, IMU2a acts as the master, and IMU2b and 2c act as slaves. That is, IMU2a sends various commands to IMU2b and 2c, and IMU2b and 2c each perform processing according to the received commands.

[0013] When IMU2a receives a sampling start command from the host device 3 requesting the transmission of measurement data, it samples the data detected by its own inertial sensor and performs predetermined signal processing, and also sends a sampling start command to IMU2b and 2c respectively. When IMU2b and 2c each receive a sampling start command from IMU2a, they sample the data detected by their own inertial sensor, perform predetermined signal processing, and transmit the data obtained from the signal processing to IMU2a. IMU2a acquires the data from IMU2b and 2c respectively and performs a synthesis process on the acquired data and the data obtained from its own predetermined signal processing. The synthesis process may be, for example, an averaging process. IMU2a then transmits the measurement data obtained from the synthesis process to the host device 3. The measurement data obtained from the synthesis process includes measured values ​​of the three-axis acceleration of the mutually orthogonal X, Y, and Z axes, and measured values ​​of the three-axis angular velocity of the X, Y, and Z axes.

[0014] IMU2a outputs a clock signal CLK generated by its built-in oscillator circuit to IMU2b and 2c. Each of IMU2a, 2b, and 2c performs signal processing in synchronization with the clock signal CLK. Therefore, by sampling the output signals of the inertial sensors at the same edge of the clock signal CLK, IMU2a can synthesize the three data points measured simultaneously by each of IMU2a, 2b, and 2c.

[0015] 1-2. Configuration of the Inertial Measurement Unit (IMU) Figure 2 shows an example configuration of IMU2a, 2b, and 2c. In the example in Figure 2, IMU2b and 2c have the same configuration and lack some of the components of IMU2a. Therefore, in IMU2a, 2b, and 2c, similar components are given the same reference numerals. In the following, common operations of IMU2a, 2b, and 2c will be described without distinction, while non-common operations will be described separately.

[0016] As shown in Figure 2, IMU 2a includes an inertial sensor 10, a signal processing unit 20, communication interface circuits 31 and 32, a control unit 40, a memory unit 50, and an oscillator circuit 60. IMUs 2b and 2c each include an inertial sensor 10, a signal processing unit 20, a selector 30, a communication interface circuit 31, a control unit 40, and a memory unit 50.

[0017] The memory unit 50 includes a register 51 and a non-volatile memory 52. ​​The memory unit 50 may also include RAM instead of the register 51, or it may include RAM together with the register 51. RAM is an abbreviation for Random Access Memory.

[0018] The oscillation circuit 60 performs an oscillation operation and outputs an oscillation signal. For example, the oscillation circuit 60 may be a crystal oscillator that vibrates a crystal resonator to output an oscillation signal. Since crystal resonators have a high Q value and good temperature characteristics, by using a crystal oscillator for the oscillation circuit 60, an oscillation signal with a small frequency deviation can be obtained. To further reduce the frequency deviation of the oscillation signal, the oscillation circuit 60 may be a temperature-compensated crystal oscillator.

[0019] The oscillation signal output from the oscillation circuit 60 is output to IMU2b and 2c as a clock signal CLK, and each part of IMU2b and 2c operates in synchronization with the clock signal CLK. This clock signal CLK is also supplied to each part of IMU2a, and each part of IMU2a operates in synchronization with the clock signal CLK.

[0020] The inertial sensor 10 is, for example, a 6DoF sensor that detects 3-axis acceleration and 3-axis angular velocity. DoF is an abbreviation for Degrees of freedom. Specifically, the inertial sensor 10 detects 3-axis acceleration of the x, y, and z axes, and 3-axis angular velocity of the x, y, and z axes. The inertial sensor 10 has a temperature sensor (not shown) and outputs sensor data SD including the detected values ​​of 3-axis acceleration, 3-axis angular velocity, and temperature. The sensor data SD is input to the signal processing unit 20. The temperature sensor may be provided outside the inertial sensor 10, in which case the sensor data SD, which is a combination of the data output from the inertial sensor 10 and the temperature data detected by the temperature sensor, may be input to the signal processing unit 20.

[0021] The signal processing unit 20 processes the sensor data SD output from the inertial sensor 10. As shown in Figure 2, the signal processing unit 20 of IMU 2a includes a correction processing unit 21, a matching processing unit 22, and a synthesis processing unit 23. The signal processing units 20 of IMUs 2b and 2c also include a correction processing unit 21 and a matching processing unit 22.

[0022] The correction processing unit 21 performs correction processing on the sensor data SD and outputs the corrected data CPD. The correction processing includes, for example, bias correction, sensitivity correction, linearity correction, and temperature correction. The correction processing may also include orthogonality correction processing, which converts the 3-axis acceleration and 3-axis angular velocity of the x, y, and z axes detected by the inertial sensor 10 into 3-axis acceleration and 3-axis angular velocity of the mutually orthogonal x', y', and z' axes. Note that orthogonality correction may be performed internally by the inertial sensor 10. Various correction information used in the correction processing is created in advance and stored in the non-volatile memory 52 of the storage unit 50. The corrected data CPD is input to the matching processing unit 22. Note that in the matching processing, the 3-axis acceleration and 3-axis angular velocity of the x, y, and z axes detected by the inertial sensor 10 may be converted into 3-axis acceleration values ​​of the X, Y, and Z axes, and 3-axis angular velocity values ​​of the X, Y, and Z axes of the inertial sensor device 1.

[0023] The alignment processing unit 22 performs alignment processing on the corrected data CPD for the detection axes of the inertial sensor 10 and outputs the aligned data ALD. Specifically, the alignment processing is the process of converting the 3-axis acceleration values ​​and 3-axis angular velocity values ​​of the x', y', and z' axes included in the corrected data CPD into 3-axis acceleration values ​​of the X, Y, and Z axes, and 3-axis angular velocity values ​​of the X, Y, and Z axes of the inertial sensor device 1. The alignment information used in the alignment processing is created in advance and stored in the non-volatile memory 52 of the storage unit 50. This alignment information may be, for example, a rotation matrix that converts the 3 mutually orthogonal x', y', and z' axes into the 3 mutually orthogonal X, Y, and Z axes set in the inertial sensor device 1. In IMU 2a, the aligned data ALD is input to the synthesis processing unit 23. In IMU 2b and 2c, the aligned data ALD is input to the selector 30.

[0024] The synthesis processing unit 23 performs synthesis processing on the matched data ALD and the sensor data SD2 and SD3 acquired from IMU2b and 2c, respectively, via the communication interface circuit 32, and outputs the synthesized data AVD. The synthesis processing may be, for example, averaging. Specifically, the synthesis processing unit 23 calculates the average value of the X, Y, and Z axis accelerations by adding the X, Y, and Z axis acceleration values ​​included in the matched data ALD, the X, Y, and Z axis acceleration values ​​included in the sensor data SD2, and the X, Y, and Z axis acceleration values ​​included in the sensor data SD3, and dividing by 3. Similarly, the synthesis processing unit 23 calculates the average value of the X, Y, and Z axis angular velocities by adding the X, Y, and Z axis angular velocity values ​​included in the matched data ALD, the X, Y, and Z axis angular velocity values ​​included in the sensor data SD2, and the X, Y, and Z axis angular velocity values ​​included in the sensor data SD3, and dividing by 3. Alternatively, the synthesis processing unit 23 may calculate the average temperature by adding the temperature values ​​included in the matched data ALD, the temperature values ​​included in the sensor data SD2, and the temperature values ​​included in the sensor data SD3, and then dividing by 3.

[0025] The number of data points (=3) used to calculate the average value is stored in advance in the non-volatile memory 52 or register 51 of the IMU2a.

[0026] The selector 30 of the IMU2a receives sensor data SD, SD2, SD3, corrected data CPD, matched data ALD, and combined data AVD as inputs. Based on the output mode information set in register 51, it selects one of these data and outputs it as measurement data DO. Figure 3 shows the correspondence between the output mode set in the output mode information of the IMU2a and the output data of the selector 30. As shown in Figure 3, in the IMU2a, if "combined data output mode" is set in the output mode information, the selector 30 selects and outputs the combined data AVD. Also, if "corrected data output mode" is set in the output mode information, the selector 30 selects and outputs the corrected data CPD. Also, if "matched data output mode" is set in the output mode information, the selector 30 selects and outputs the matched data ALD. Also, if "first sensor data output mode" is set in the output mode information, the selector 30 selects and outputs the sensor data SD. Furthermore, if "Second Sensor Data Output Mode" is set in the output mode information, selector 30 selects and outputs sensor data SD2. Also, if "Third Sensor Data Output Mode" is set in the output mode information, selector 30 selects and outputs sensor data SD3. In IMU2a, the initial value of the output mode information is "Synthesized Data Output Mode".

[0027] Each selector 30 of IMU2b and 2c receives sensor data SD, corrected data CPD, and matched data ALD as input, and selects one of these data based on the output mode information set in register 51, and outputs it as measurement data DO. Figure 4 is a diagram showing the correspondence between the output mode set in the output mode information of IMU2b and 2c and the output data of selector 30. As shown in Figure 4, in each of IMU2a and 2b, if "matched data output mode" is set in the output mode information, selector 30 selects and outputs matched data ALD. Also, if "corrected data output mode" is set in the output mode information, selector 30 selects and outputs corrected data CPD. Also, if "sensor data output mode" is set in the output mode information, selector 30 selects and outputs sensor data SD. In each of IMU2b and 2c, the initial value of the output mode information is "matched data output mode".

[0028] The communication interface circuit 31 of IMU2a is connected to the host device 3 and is a circuit for the control unit 40 of IMU2a to communicate with the host device 3. It receives various commands sent from the host device 3 and outputs them to the control unit 40. The communication interface circuit 31 of IMU2b is connected to the communication interface circuit 32 of IMU2a and is a circuit for the control unit 40 of IMU2b to communicate with the control unit 40 of IMU2a. It receives various commands sent from IMU2a and outputs them to the control unit 40. The communication interface circuit 31 of IMU2c is connected to the communication interface circuit 32 of IMU2a and is a circuit for the control unit 40 of IMU2c to communicate with the control unit 40 of IMU2a. It receives various commands sent from IMU2a and outputs them to the control unit 40. The communication standard used via the communication interface circuits 31 of IMU2a, 2b, and 2c may be, for example, UART, SPI, or other standards.

[0029] The control units 40 of IMUs 2a, 2b, and 2c interpret the commands received by the communication interface circuit 31 and perform processing according to those commands. For example, if the received command is a write command to register 51 or non-volatile memory 52, the control unit 40 writes the data contained in the command to register 51 or non-volatile memory 52. ​​For example, if the received command is a write command for output mode information to register 51, the control unit 40 sets the data contained in the command as the output mode information for register 51. If the received command is a read command to register 51 or non-volatile memory 52, the control unit 40 reads the data stored in register 51 or non-volatile memory 52 and transmits the read data via the communication interface circuit 31. If the received command is a sampling start command, the control unit 40 transmits the measurement data DO output from the selector 30 via the communication interface circuit 31.

[0030] The communication interface circuit 32 of IMU2a is connected to the respective communication interface circuits 31 of IMU2b and 2c, and is a circuit for the control unit 40 of IMU2a to communicate with the respective control units 40 of IMU2b and 2c. The communication standard used via the communication interface circuit 32 may be, for example, UART, SPI, or other standards. If the communication standard is SPI, the communication interface circuit 32 of IMU2a is composed of one circuit that communicates with the respective control units 40 of IMU2b and 2c via SPI. If the communication standard is UART, the communication interface circuit 32 of IMU2a is composed of a first circuit that communicates with the control unit 40 of IMU2b via UART, and a second circuit that communicates with the control unit 40 of IMU2c via UART. In other words, the communication interface circuit 32 of IMU2a may be composed of one circuit that communicates with IMU2b and 2c, or it may be composed of two circuits: one that communicates with IMU2b and another that communicates with IMU2c. The control unit 40 of IMU2a generates various commands for IMU2b and 2c, and transmits the generated commands to the respective communication interface circuits 31 of IMU2b and 2c via the communication interface circuit 32.

[0031] For example, when the control unit 40 of IMU2a receives a sampling start command from the host device 3 via the communication interface circuit 31, it sends a sampling start command to the respective communication interface circuits 31 of IMU2b and 2c via the communication interface circuit 32.

[0032] In each of the IMUs 2b and 2c, the control unit 40 receives the command via the communication interface circuit 31. Then, in IMU 2b, under the control of the control unit 40, the communication interface circuit 31 transmits the measurement data DO output from the selector 30 to the communication interface circuit 32 of IMU 2a. Similarly, in IMU 2c, under the control of the control unit 40, the communication interface circuit 31 transmits the measurement data DO output from the selector 30 of IMU 2c to the communication interface circuit 32 of IMU 2a.

[0033] In other words, in each of the IMUs 2b and 2c, the communication interface circuit 31 transmits the corrected data CPD or matched data ALD output from the signal processing unit 20, or the sensor data SD output from the inertial sensor 10, as measurement data DO to the communication interface circuit 32 of the IMU 2a.

[0034] Subsequently, in IMU2a, the control unit 40 receives measurement data DO from IMU2b via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD2 to the signal processing unit 20 and selector 30. Similarly, the control unit 40 receives measurement data DO from IMU2c via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD3 to the signal processing unit 20 and selector 30. Then, in IMU2a, the signal processing unit 20 performs calculations on the sensor data SD and sensor data SD2 and SD3 output from the inertial sensor 10 and outputs the combined data AVD. Specifically, the combining processing unit 23 performs combining processing on the matched data ALD and sensor data SD2 and SD3 and outputs the combined data AVD. Furthermore, if the signal processing unit 20 has a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 is performed on the matched data ALD. However, if the signal processing unit 20 does not have a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the corrected data CPD. Also, if the signal processing unit 20 does not have a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the sensor data SD output from the inertial sensor 10.

[0035] As mentioned above, the initial value of the output mode information for each of the IMUs 2b and 2c is "matched data output mode," so sensor data SD2 is the matched data ALD of IMU2b, and sensor data SD3 is the matched data ALD of IMU2c. Therefore, in IMU2a, the signal processing unit 20 uses the synthesis processing unit 23 to perform averaging on the matched data ALD of IMU2a, the matched data ALD of IMU2b (which is sensor data SD2), and the matched data ALD of IMU2c (which is sensor data SD3), and outputs the synthesized data AVD. As mentioned above, the initial value of the output mode information for IMU2a is "matched data output mode," so the communication interface circuit 31 transmits the synthesized data AVD output from the selector 30 as measurement data DO to the host device 3.

[0036] Each of the IMUs 2a, 2b, and 2c is assigned a different ID, and the host device 3 can read or write data to any of the registers 51 or non-volatile memory 52 of IMUs 2a, 2b, or 2c by sending a command to IMU 2a that includes one of the IDs of IMUs 2a, 2b, or 2c.

[0037] For example, when the communication interface circuit 31 of IMU2a receives a write command to the storage unit 50 of IMU2a from the host device 3, the control unit 40 of IMU2a writes the data included in the command to the storage unit 50. Also, when the communication interface circuit 31 of IMU2a receives a write command to the storage unit 50 of IMU2b from the host device 3, the communication interface circuit 32 of IMU2a transmits the command to the communication interface circuit 31 of IMU2b, the communication interface circuit 31 of IMU2b receives the command, and the control unit 40 of IMU2b writes the data included in the command to the storage unit 50 of IMU2b. Similarly, when the communication interface circuit 31 of IMU2a receives a write command to the storage unit 50 of IMU2c from the host device 3, the communication interface circuit 32 of IMU2a transmits the command to the communication interface circuit 31 of IMU2c, the communication interface circuit 31 of IMU2c receives the command, and the control unit 40 of IMU2c writes the data contained in the command to the storage unit 50 of IMU2c.

[0038] Furthermore, for example, if the communication interface circuit 31 of IMU2a receives a read command from the host device 3 for the storage unit 50 of IMU2a, the control unit 40 of IMU2a reads the data specified by the command from the storage unit 50, and the communication interface circuit 31 of IMU2a transmits the data to the host device 3. Also, if the communication interface circuit 31 of IMU2a receives a read command from the host device 3 for the storage unit 50 of IMU2b, the communication interface circuit 32 of IMU2a transmits the command to the communication interface circuit 31 of IMU2b, and the communication interface circuit 31 of IMU2b receives the command. Then, the control unit 40 of IMU2b reads the data specified by the command from the storage unit 50, the communication interface circuit 31 of IMU2b transmits the data to the communication interface circuit 32 of IMU2a, the communication interface circuit 32 of IMU2a receives the data, and the communication interface circuit 31 of IMU2a transmits the data to the host device 3.

[0039] Furthermore, IMU2a may function as a correction processing unit 21, a matching processing unit 22, a synthesis processing unit 23, a selector 30, and a control unit 40 by having a processing unit, such as a CPU or microcontroller unit (not shown), execute a program stored in the non-volatile memory 52. ​​Similarly, IMU2b and 2c may each function as a correction processing unit 21, a matching processing unit 22, a selector 30, and a control unit 40 by having a processing unit, such as a CPU or microcontroller unit (not shown), execute a program stored in the non-volatile memory 52.

[0040] 1-3. Generation and writing of correction information and consistency information In each of the IMUs 2a, 2b, and 2c, the correction information used by the correction processing unit 21 and the alignment information used by the alignment processing unit 22 are pre-stored in the non-volatile memory 52. ​​Specifically, the inertial sensor device 1 is mounted on a jig equipped with a vibration mechanism and a rotation mechanism, and the host device 3, which is an inspection device, changes the acceleration and angular velocity applied to the inertial sensor device 1 by operating the vibration mechanism and rotation mechanism at each of several temperatures, and reads the sensor data SD of each of the IMUs 2a, 2b, and 2c. Then, the host device 3 generates correction information for each of the IMUs 2a, 2b, and 2c using the read sensor data SD of each of the IMUs 2a, 2b, and 2c, and writes the generated correction information for each of the IMUs 2a, 2b, and 2c to the non-volatile memory 52 of each of the IMUs 2a, 2b, and 2c. Furthermore, the host device 3 changes the orientation of the inertial sensor device 1 so that the X, Y, and Z axes each face the direction of gravity, mounts it on the jig, and reads the corrected data CPD for each of the IMUs 2a, 2b, and 2c. The host device 3 then compares the measured values ​​of the three-axis acceleration included in the read corrected data CPD for each of the IMUs 2a, 2b, and 2c with the gravitational acceleration to generate matching information for each of the IMUs 2a, 2b, and 2c, and writes the generated matching information for each of the IMUs 2a, 2b, and 2c to the respective non-volatile memory 52 of each of the IMUs 2a, 2b, and 2c.

[0041] As an example, the procedure for processing by the inertial sensor device 1 when the host device 3 reads the corrected data CPD from the IMU 2c, generates alignment information, and writes the generated alignment information to the non-volatile memory 52 of the IMU 2c will be described.

[0042] Figure 5 is a flowchart illustrating an example of the processing procedure of the inertial sensor device 1 when the host device 3 reads the corrected data CPD from the IMU 2c.

[0043] As shown in Figure 5, first, in step S1, IMU2a receives a command from the host device 3 to set the output mode information of IMU2c to "corrected data output mode", and sends this command to IMU2c.

[0044] Next, in step S2, the IMU2c receives a command and writes the data contained in the command to register 51, thereby setting the output mode information to "corrected data output mode". As a result, the IMU2c's selector 30 selects and outputs the corrected data CPD.

[0045] Next, in step S3, IMU2a receives a command from the host device 3 to set IMU2a's output mode information to "third sensor data output mode," and writes the data included in the command to register 51, thereby setting the output mode information to "third sensor data output mode." As a result, IMU2a's selector 30 selects and outputs sensor data SD2.

[0046] Next, in step S4, IMU2a receives a sampling start command from host device3 and starts sampling, and sends the command to IMU2b and 2c.

[0047] Next, in step S5, IMU2b and 2c receive a command and start sampling, sending the measurement data DO to IMU2a. In step S2, the output mode information of IMU2c was set to "corrected data output mode", so the measurement data DO of IMU2c is the corrected data CPD.

[0048] Next, in step S6, IMU2a receives the measurement data DO from IMU2b and 2c as sensor data SD2 and SD3, and transmits its own measurement data DO to the host device 3. Since the output mode information of IMU2a was set to "third sensor data output mode" in step S3, the measurement data DO of IMU2a is sensor data SD3, that is, the corrected data CPD of IMU2c.

[0049] Next, in step S7, IMU2a receives a sampling stop command from host device3, stops sampling, and sends the command to IMU2b and 2c.

[0050] Finally, in step S8, IMU2b and 2c receive a command and stop sampling.

[0051] The host device 3 compares the measured values ​​of the three-axis acceleration included in the corrected data CPD of the IMU2c read out in step S6 with the gravitational acceleration to generate IMU2c alignment information.

[0052] Figure 6 is a flowchart illustrating an example of the processing procedure of the inertial sensor device 1 when the host device 3 writes the generated matching information to the non-volatile memory 52 of the IMU 2c.

[0053] As shown in Figure 6, first, in step S11, IMU2a receives a command from the host device 3 to write matching information to IMU2c and sends the command to IMU2c.

[0054] Then, in step S12, the IMU2c receives a command and writes the consistency information contained in the command to the non-volatile memory 52.

[0055] Furthermore, IMU2a is an example of a "first inertial measurement unit," the inertial sensor 10 of IMU2a is an example of a "first inertial sensor," the signal processing unit 20 of IMU2a is an example of a "first signal processing unit," the communication interface circuit 31 of IMU2a is an example of a "first communication unit," and the communication interface circuit 32 of IMU2a is an example of a "second communication unit." Additionally, IMU2b is an example of a "second inertial measurement unit," the inertial sensor 10 of IMU2b is an example of a "second inertial sensor," the signal processing unit 20 of IMU2b is an example of a "second signal processing unit," and the communication interface circuit 31 of IMU2b is an example of a "third communication unit." Furthermore, the synthesized data AVD output from the synthesis processing unit 23 of IMU2a is an example of "first data," the sensor data SD output from the inertial sensor 10 of IMU2a is an example of "second data," and the sensor data SD2 output from the communication interface circuit 32 of IMU2a is an example of "third data." Furthermore, the corrected data CPD output from the correction processing unit 21 of IMU2a is an example of "fourth data," and the matched data ALD output from the matching processing unit 22 of IMU2a is an example of "fifth data." Also, the synthesized data output mode is an example of "first mode," the first sensor data output mode is an example of "second mode," and the second sensor data output mode is an example of "third mode." Furthermore, the corrected data output mode is an example of "fourth mode," and the matched data output mode is an example of "fifth mode." Also, the storage unit 50 of IMU2a is an example of "first storage unit," and the storage unit 50 of IMU2b is an example of "second storage unit." Furthermore, the control unit 40 of IMU2a is an example of a "first control unit," and the control unit 40 of IMU2b is an example of a "second control unit."

[0056] 1-4. Effects As described above, according to the inertial sensor device 1 of the first embodiment, after assembly, the host device 3 can acquire various types of data by setting various modes for the output mode information of each of the IMUs 2a, 2b, and 2c.

[0057] For example, by setting the output mode information of IMU2a to "First Sensor Data Output Mode," the selector 30 of IMU2a selects and outputs sensor data SD, allowing the host device 3 to acquire IMU2a's sensor data SD and generate correction information for IMU2a. Alternatively, by setting the output mode information of IMU2a to "Second Sensor Data Output Mode" and the output mode information of IMU2b to "Sensor Data Output Mode," the selector 30 of IMU2b selects and outputs sensor data SD, and the selector 30 of IMU2a selects and outputs sensor data SD2, allowing the host device 3 to acquire IMU2b's sensor data SD and generate correction information for IMU2b. Furthermore, by setting the output mode information of IMU2a to "Third Sensor Data Output Mode" and the output mode information of IMU2c to "Sensor Data Output Mode", the selector 30 of IMU2c selects and outputs sensor data SD, and the selector 30 of IMU2a selects and outputs sensor data SD3. As a result, the host device 3 can acquire the sensor data SD from IMU2c and generate correction information for IMU2c.

[0058] Furthermore, for example, by setting the output mode information of the IMU2a to "corrected data output mode", the selector 30 of the IMU2a selects and outputs the corrected data CPD, so the host device 3 can acquire the corrected data CPD of the IMU2a and generate the IMU2a's alignment information. Also, by setting the output mode information of the IMU2a to "second sensor data output mode" and the output mode information of the IMU2b to "corrected data output mode", the selector 30 of the IMU2b selects and outputs the corrected data CPD, and the selector 30 of the IMU2a selects and outputs the sensor data SD2, so the host device 3 can acquire the corrected data CPD of the IMU2b and generate the IMU2b's alignment information. Furthermore, by setting the output mode information of IMU2a to "Third Sensor Data Output Mode" and the output mode information of IMU2c to "Corrected Data Output Mode", the selector 30 of IMU2c selects and outputs the corrected data CPD, and the selector 30 of IMU2a selects and outputs the sensor data SD3. As a result, the host device 3 can acquire the corrected data CPD from IMU2c and generate the IMU2c's alignment information.

[0059] Furthermore, for example, by setting the "matched data output mode" in the output mode information of IMU2b and 2c, the selectors 30 of IMU2b and 2c select and output the matched data ALD. The synthesis processing unit 23 of IMU2a then performs a synthesis process on the matched data ALD of IMU2a, the matched data ALD of IMU2b, and the matched data ALD of IMU2c to output high-precision synthesized data AVD with random noise reduced to 1 / √3. Therefore, by setting the "matched data output mode" in the output mode information of IMU2a, the selector 30 of IMU2a selects and outputs the synthesized data AVD, allowing the host device 3 to acquire high-precision measurement data DO with reduced noise.

[0060] Furthermore, according to the inertial sensor device 1 of the first embodiment, the host device 3 can send a command to write correction information and alignment information to the IMU 2a, and the IMU 2a can receive the command and write the correction information and alignment information to the non-volatile memory 52. ​​Also, the host device 3 can send a command to write correction information and alignment information to the IMU 2b, and the IMU 2a can receive the command and send it to the IMU 2b, and the IMU 2b can receive the command and write the correction information and alignment information to the non-volatile memory 52. ​​Also, the host device 3 can send a command to write correction information and alignment information to the IMU 2c, and the IMU 2a can receive the command and send it to the IMU 2c, and the IMU 2c can receive the command and write the correction information and alignment information to the non-volatile memory 52.

[0061] 2. Second Embodiment In the following description of the second embodiment, the same reference numerals are used for components similar to those in the first embodiment, and explanations that overlap with those in the first embodiment will be omitted or simplified. The main points to be described will be those that differ from the first embodiment.

[0062] The overall configuration of the inertial sensor device 1 of the second embodiment is the same as that of Figure 1, so its illustration is omitted. Figure 7 shows an example of the configuration of IMUs 2a, 2b, and 2c included in the inertial sensor device 1 of the second embodiment. As shown in Figure 7, the IMU 2a in the second embodiment has a switch 70 added to it compared to the IMU 2a in the first embodiment shown in Figure 2. In addition, the IMUs 2b and 2c in the second embodiment have a communication interface circuit 32, an oscillation circuit 60, and a switch 70 added to them compared to the IMUs 2b and 2c in the first embodiment shown in Figure 2, and a synthesis processing unit 23 added to the signal processing unit 20. In other words, in the inertial sensor device 1 of the second embodiment, IMUs 2a, 2b, and 2c have the same configuration.

[0063] As shown in Figure 7, in IMU2a, the oscillation signal output from the oscillation circuit 60 is output as a clock signal CLK to IMU2b and 2c via the ON switch 70. This clock signal CLK is also supplied to each part of IMU2a, and each part of IMU2a operates in synchronization with the clock signal CLK. On the other hand, in IMU2b and 2c, the oscillation circuit 60 is set to stop operating, and the switch 70 is set to the OFF state. Then, each part of IMU2b and 2c operates in synchronization with the clock signal CLK supplied from IMU2a. The on / off operation of the oscillation circuits 60 and the on / off operation of the switches 70 in each of IMU2a, 2b, and 2c are controlled by the setting values ​​of the registers 51 in the respective memory units 50 of IMU2a, 2b, and 2c.

[0064] Each selector 30 of IMU2a, 2b, and 2c receives sensor data SD, SD2, SD3, corrected data CPD, matched data ALD, and combined data AVD as input. Based on the output mode information set in register 51, it selects one of these data and outputs it as measurement data DO. The correspondence between the output mode set in the output mode information and the output data of selector 30 in each of IMU2a, 2b, and 2c is the same as in Figure 3, so its illustration and explanation are omitted. Note that the initial value of the output mode information in IMU2a, 2b, and 2c is "Combined Data Output Mode".

[0065] In each of the IMUs 2b and 2c, since the IMU is not connected to the communication interface circuit 32, the sensor data SD2 and SD3 are not used for synthesis processing by the synthesis processing unit 23. That is, the synthesis processing unit 23 in each of the IMUs 2b and 2c outputs the synthesized data AVD which includes the values ​​obtained by dividing each of the three-axis acceleration values, each of the three-axis angular velocity values, and the temperature value, all of which are included in the matched data ALD, by 3.

[0066] On the other hand, in IMU2a, since two IMUs 2b and 2c are connected to the communication interface circuit 32, the sensor data SD2 and SD3 are used for synthesis processing by the synthesis processing unit 23. That is, the synthesis processing unit 23 of IMU2a adds the value obtained by dividing each of the three-axis acceleration values ​​included in the matched data ALD by 3, each of the three-axis acceleration values ​​included in the sensor data SD2, and each of the three-axis acceleration values ​​included in the sensor data SD3. Similarly, the synthesis processing unit 23 of IMU2a adds the value obtained by dividing each of the three-axis angular velocity values ​​included in the matched data ALD by 3, each of the three-axis angular velocity values ​​included in the sensor data SD2, and each of the three-axis angular velocity values ​​included in the sensor data SD3. Alternatively, the synthesis processing unit 23 of IMU2a may add the value obtained by dividing the temperature value included in the matched data ALD by 3, the temperature value included in the sensor data SD2, and the temperature value included in the sensor data SD3.

[0067] When the combined data AVD is sent from IMU2b and 2c to IMU2a as measurement data DO, the sensor data SD2 and SD3 input to the IMU2a's synthesis processing unit 23 are the combined data AVD from IMU2b and 2c respectively. Therefore, the IMU2a's synthesis processing unit 23 outputs the combined data AVD which includes the average values ​​of the three-axis acceleration, three-axis angular velocity, and temperature measured by IMU2a, 2b, and 2c.

[0068] In each of the IMUs 2a, 2b, and 2c, the non-volatile memory 52 or register 51 pre-stores the number of data points for which the average value is calculated (=3) and the number of IMUs connected to the communication interface circuit 32 (=2 or 0).

[0069] Furthermore, IMUs 2a, 2b, and 2c may function as a correction processing unit 21, a matching processing unit 22, a synthesis processing unit 23, a selector 30, and a control unit 40, respectively, by having a processing unit such as a CPU or microcontroller unit (not shown) execute a program stored in the non-volatile memory 52.

[0070] The other components of the inertial sensor device 1 of the second embodiment are the same as those of the inertial sensor device 1 of the first embodiment, so their description will be omitted.

[0071] According to the inertial sensor device 1 of the second embodiment described above, since IMUs 2a, 2b, and 2c have the same configuration, production costs can be reduced, and high expandability can be achieved because the number of IMUs can be easily increased or decreased.

[0072] Furthermore, the inertial sensor device 1 of the second embodiment provides the same effects as the inertial sensor device 1 of the first embodiment.

[0073] 3. Third Embodiment In the following description of the third embodiment, the same reference numerals are used for components similar to those in the first or second embodiment. Descriptions that overlap with those of the first or second embodiment will be omitted or simplified, and the differences from the first and second embodiments will be described primarily.

[0074] Figure 8 shows the overall configuration of the inertial sensor device 1 of the third embodiment. As shown in Figure 8, the inertial sensor device 1 of the third embodiment has seven IMUs 2a to 2g and is connected to an external device, the host device 3.

[0075] Each of the IMUs 2a to 2g has an inertial sensor, and performs predetermined signal processing on the data output from the inertial sensor to generate measurement data. The inertial sensors in each of the IMUs 2a to 2g detect the same type of physical quantity. For example, each inertial sensor may detect acceleration in one axis or two or more axes, or it may detect angular velocity in one axis or two or more axes, or it may detect 3-axis acceleration and 3-axis angular velocity. In the following description, we will assume that each inertial sensor measures 3-axis acceleration and 3-axis angular velocity.

[0076] IMU2a is connected to host device 3 and can communicate with host device 3. In communication between IMU2a and host device 3, host device 3 acts as the master and IMU2a as the slave. That is, host device 3 sends various commands to IMU2a, and IMU2a performs processing according to the received commands.

[0077] Furthermore, IMU2a is connected to two IMU2b and 2c units, and can communicate with each of them. In communication between IMU2a and each of IMU2b and 2c, IMU2a acts as the master, and IMU2b and 2c act as slaves. That is, IMU2a sends various commands to IMU2b and 2c, and IMU2b and 2c each perform processing according to the received commands.

[0078] Furthermore, IMU2b is connected to two IMU2d and 2e units, and can communicate with each of them. In communication between IMU2b and each of IMU2d and 2e, IMU2b acts as the master, and IMU2d and 2e act as slaves. That is, IMU2b sends various commands to IMU2d and 2e, and IMU2d and 2e each perform processing according to the received commands.

[0079] Furthermore, IMU2c is connected to two IMU2f and 2g units, and can communicate with each of them. In communication between IMU2c and each of IMU2f and 2g, IMU2c acts as the master, and IMU2f and 2g act as slaves. In other words, IMU2c sends various commands to IMU2f and 2g, and IMU2f and 2g each perform processing according to the received commands.

[0080] When IMU2a receives a sampling start command from host device 3 requesting the transmission of measurement data, it samples the data detected by its own inertial sensor, performs predetermined signal processing, and also sends sampling start commands to IMU2b and 2c, respectively.

[0081] When IMU2b receives a sampling start command from IMU2a, it samples the data detected by its own inertial sensor, performs predetermined signal processing, and also sends sampling start commands to IMU2d and 2e, respectively.

[0082] When IMU2d and 2e receive a sampling start command from IMU2b, they sample the data detected by their own inertial sensors, perform predetermined signal processing, and transmit the resulting 3-axis acceleration and 3-axis angular velocity measurement data to IMU2b. IMU2b acquires the measurement data from both IMU2d and 2e and performs a synthesis process on the acquired measurement data and the 3-axis acceleration and 3-axis angular velocity data obtained through its own predetermined signal processing. Then, IMU2b transmits the measurement data, including the 3-axis acceleration and 3-axis angular velocity measurements obtained through the synthesis process, to IMU2a.

[0083] When IMU2c receives a sampling start command from IMU2a, it samples the data detected by its own inertial sensor, performs predetermined signal processing, and also sends sampling start commands to IMU2f and 2g, respectively.

[0084] When IMU2f and 2g receive a sampling start command from IMU2c, they sample the data detected by their own inertial sensors, perform predetermined signal processing, and transmit the resulting 3-axis acceleration and 3-axis angular velocity measurement data to IMU2c. IMU2c acquires the measurement data from both IMU2f and 2g and performs a synthesis process on the acquired measurement data and the 3-axis acceleration and 3-axis angular velocity data obtained through its own predetermined signal processing. Then, IMU2c transmits the measurement data, including the 3-axis acceleration and 3-axis angular velocity measurements obtained through the synthesis process, to IMU2a.

[0085] IMU2a acquires measurement data from IMU2b and 2c respectively, and performs a synthesis process on the acquired measurement data and the 3-axis acceleration and 3-axis angular velocity data obtained through its own predetermined signal processing. Then, IMU2a transmits the measurement data, including the measured values ​​of 3-axis acceleration and 3-axis angular velocity obtained through the synthesis process, to the host device 3.

[0086] IMU2a outputs a clock signal CLK generated by its built-in oscillator circuit to IMU2b-2g. Each of IMU2a-2g performs signal processing in synchronization with the clock signal CLK. Therefore, by sampling the output signals of the inertial sensors at the same edge of the clock signal CLK, IMU2a can synthesize the seven data points measured simultaneously by each of IMU2a-2g.

[0087] IMUs 2a to 2g have the same configuration, which is the same as IMUs 2a, 2b, and 2c in the second embodiment shown in Figure 7. That is, IMUs 2a to 2g include an inertial sensor 10, a signal processing unit 20, a selector 30, communication interface circuits 31 and 32, a control unit 40, a memory unit 50, an oscillator circuit 60, and a switch 70, similar to IMUs 2a, 2b, and 2c in Figure 7. The functions of the inertial sensor 10, signal processing unit 20, communication interface circuits 31 and 32, control unit 40, memory unit 50, and oscillator circuit 60 are the same as in the second embodiment. Furthermore, in each of IMUs 2a to 2g, the correspondence between the output mode set in the output mode information and the output data of the selector 30 is the same as in Figure 3, and the initial value of the output mode information is "synthesized data output mode". Note that IMUs 2a to 2g do not have to have the same configuration.

[0088] In the third embodiment, the oscillation signal output from the oscillation circuit 60 is output as a clock signal CLK to IMUs 2b to 2g via the ON switch 70. In each of IMUs 2b to 2g, the oscillation circuit 60 is set to stop operating, and the switch 70 is set to the OFF state. Then, each part of IMUs 2b to 2g operates in synchronization with the clock signal CLK supplied from IMU 2a.

[0089] The communication interface circuit 32 of IMU2a is connected to the respective communication interface circuits 31 of IMU2b and 2c, the communication interface circuit 32 of IMU2b is connected to the respective communication interface circuits 31 of IMU2d and 2e, and the communication interface circuit 32 of IMU2c is connected to the respective communication interface circuits 31 of IMU2f and 2g.

[0090] In each of the IMUs 2d, 2e, 2f, and 2g, the IMU is not connected to the communication interface circuit 32, so the sensor data SD2 and SD3 are not used for synthesis processing by the synthesis processing unit 23. That is, the synthesis processing unit 23 for each of the IMUs 2d, 2e, 2f, and 2g outputs the synthesized data AVD which includes the values ​​obtained by dividing each of the three-axis acceleration values, each of the three-axis angular velocity values, and the temperature value by dividing the value included in the matched data ALD by 7.

[0091] In each of the IMUs 2a to 2g, the non-volatile memory 52 or register 51 pre-stores the number of data points for which the average value is calculated (=7) and the number of IMUs connected to the communication interface circuit 32 (=2 or 0).

[0092] The communication interface circuit 31 of IMU2a is connected to the host device 3, receives various commands transmitted from the host device 3, and outputs them to the control unit 40. The communication interface circuit 31 of IMU2b is connected to the communication interface circuit 32 of IMU2a, receives various commands transmitted from IMU2a, and outputs them to the control unit 40. The communication interface circuit 31 of IMU2c is connected to the communication interface circuit 32 of IMU2a, receives various commands transmitted from IMU2a, and outputs them to the control unit 40.

[0093] The communication interface circuit 31 of IMU2d is connected to the communication interface circuit 32 of IMU2b, receives various commands transmitted from IMU2b, and outputs them to the control unit 40. The communication interface circuit 31 of IMU2e is connected to the communication interface circuit 32 of IMU2b, receives various commands transmitted from IMU2b, and outputs them to the control unit 40.

[0094] The communication interface circuit 31 of IMU2f is connected to the communication interface circuit 32 of IMU2c, receives various commands transmitted from IMU2c, and outputs them to the control unit 40. The communication interface circuit 31 of IMU2g is connected to the communication interface circuit 32 of IMU2c, receives various commands transmitted from IMU2c, and outputs them to the control unit 40.

[0095] The communication standard used via the communication interface circuit 31 of IMU2a~2g may be, for example, UART, SPI, or any other standard.

[0096] The communication interface circuit 32 of IMU2a is connected to the respective communication interface circuits 31 of IMU2b and 2c. The control unit 40 of IMU2a generates various commands for IMU2b and 2c, and transmits the generated commands to the respective communication interface circuits 31 of IMU2b and 2c via the communication interface circuit 32.

[0097] The communication interface circuit 32 of IMU2b is connected to the respective communication interface circuits 31 of IMU2d and 2e. The control unit 40 of IMU2b generates various commands for IMU2d and 2e, and transmits the generated commands to the respective communication interface circuits 31 of IMU2d and 2e via the communication interface circuit 32.

[0098] The communication interface circuit 32 of IMU2c is connected to the respective communication interface circuits 31 of IMU2f and 2g. The control unit 40 of IMU2c generates various commands for IMU2f and 2g, and transmits the generated commands to the respective communication interface circuits 31 of IMU2f and 2g via the communication interface circuit 32.

[0099] The communication standard used for communication via the communication interface circuit 32 of IMU2a,2b, and2c may be, for example, UART, SPI, or other standards. The communication interface circuit 32 of IMU2a may consist of one circuit that communicates with IMU2b and 2c, or it may consist of two circuits: one that communicates with IMU2b and another that communicates with IMU2c. Similarly, the communication interface circuit 32 of IMU2b may consist of one circuit that communicates with IMU2d and 2e, or it may consist of two circuits: one that communicates with IMU2d and another that communicates with IMU2e. Similarly, the communication interface circuit 32 of IMU2c may consist of one circuit that communicates with IMU2f and 2g, or it may consist of two circuits: one that communicates with IMU2f and another that communicates with IMU2g.

[0100] For example, when the control unit 40 of IMU2a receives a sampling start command from the host device 3 via the communication interface circuit 31, it sends a sampling start command to the respective communication interface circuits 31 of IMU2b and 2c via the communication interface circuit 32.

[0101] In IMU2b, the control unit 40 receives the command via the communication interface circuit 31 and sends a sampling start command to the respective communication interface circuits 31 of IMU2d and 2e via the communication interface circuit 32. In each of IMU2d and 2e, the control unit 40 receives the command via the communication interface circuit 31. Then, in IMU2d, under the control of the control unit 40, the communication interface circuit 31 transmits the measurement data DO output from the selector 30 to the communication interface circuit 32 of IMU2b. Similarly, in IMU2e, under the control of the control unit 40, the communication interface circuit 31 transmits the measurement data DO output from the selector 30 to the communication interface circuit 32 of IMU2b.

[0102] Subsequently, in IMU2b, the control unit 40 receives measurement data DO from IMU2d via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD2 to the signal processing unit 20 and selector 30. Similarly, the control unit 40 receives measurement data DO from IMU2e via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD3 to the signal processing unit 20 and selector 30. Then, in IMU2b, the signal processing unit 20 performs calculations on the sensor data SD and sensor data SD2 and SD3 output from the inertial sensor 10 and outputs the combined data AVD. Specifically, the combining processing unit 23 performs combining processing on the matched data ALD and sensor data SD2 and SD3 and outputs the combined data AVD. Furthermore, if the signal processing unit 20 has a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 is performed on the matched data ALD. However, if the signal processing unit 20 does not have a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the corrected data CPD. Also, if the signal processing unit 20 does not have a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the sensor data SD output from the inertial sensor 10.

[0103] In IMU2d and 2e, the initial value of the output mode information is "Synthesized Data Output Mode". Therefore, sensor data SD2 is the synthesized data AVD of IMU2d, and sensor data SD3 is the synthesized data AVD of IMU2e. Consequently, in IMU2b, the signal processing unit 20, using the synthesis processing unit 23, performs synthesis processing on the matched data ALD of IMU2b, the synthesized data AVD of IMU2d (which is sensor data SD2), and the synthesized data AVD of IMU2e (which is sensor data SD3), and outputs the synthesized data AVD. In IMU2b, since the initial value of the output mode information is "Synthesized Data Output Mode", the communication interface circuit 31 transmits the synthesized data AVD output from the selector 30 as measurement data DO to the communication interface circuit 32 of IMU2a.

[0104] Furthermore, in IMU2c, the control unit 40 receives the command via the communication interface circuit 31 and sends a sampling start command to the respective communication interface circuits 31 of IMU2f and 2g via the communication interface circuit 32. In each of IMU2f and 2g, the control unit 40 receives the command via the communication interface circuit 31. Then, in IMU2f, under the control of the control unit 40, the communication interface circuit 31 transmits the measurement data DO output from the selector 30 to the communication interface circuit 32 of IMU2c. Similarly, in IMU2g, under the control of the control unit 40, the communication interface circuit 31 transmits the measurement data DO output from the selector 30 to the communication interface circuit 32 of IMU2c.

[0105] Subsequently, in IMU2c, the control unit 40 receives measurement data DO from IMU2f via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD2 to the signal processing unit 20 and selector 30. Similarly, the control unit 40 receives measurement data DO from IMU2g via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD3 to the signal processing unit 20 and selector 30. Then, in IMU2c, the signal processing unit 20 performs calculations on the sensor data SD and sensor data SD2 and SD3 output from the inertial sensor 10 and outputs the combined data AVD. Specifically, the combining processing unit 23 performs combining processing on the matched data ALD and sensor data SD2 and SD3 and outputs the combined data AVD. Furthermore, if the signal processing unit 20 has a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 is performed on the matched data ALD. However, if the signal processing unit 20 does not have a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the corrected data CPD. Also, if the signal processing unit 20 does not have a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the sensor data SD output from the inertial sensor 10.

[0106] In IMU2f and 2g, the initial value of the output mode information is "Synthesized Data Output Mode". Therefore, sensor data SD2 is the synthesized data AVD of IMU2f, and sensor data SD3 is the synthesized data AVD of IMU2g. Consequently, in IMU2c, the signal processing unit 20, using the synthesis processing unit 23, performs synthesis processing on the matched data ALD of IMU2c, the synthesized data AVD of IMU2f (which is sensor data SD2), and the synthesized data AVD of IMU2g (which is sensor data SD3), and outputs the synthesized data AVD. In IMU2c, since the initial value of the output mode information is "Synthesized Data Output Mode", the communication interface circuit 31 transmits the synthesized data AVD output from the selector 30 as measurement data DO to the communication interface circuit 32 of IMU2a.

[0107] Subsequently, in IMU2a, the control unit 40 receives measurement data DO from IMU2b via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD2 to the signal processing unit 20 and selector 30. Similarly, the control unit 40 receives measurement data DO from IMU2c via the communication interface circuit 32 and outputs the received measurement data DO as sensor data SD3 to the signal processing unit 20 and selector 30. Then, in IMU2a, the signal processing unit 20 performs calculations on the sensor data SD and sensor data SD2 and SD3 output from the inertial sensor 10 and outputs the combined data AVD. Specifically, the combining processing unit 23 performs combining processing on the matched data ALD and sensor data SD2 and SD3 and outputs the combined data AVD. Furthermore, if the signal processing unit 20 has a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 is performed on the matched data ALD. However, if the signal processing unit 20 does not have a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the corrected data CPD. Also, if the signal processing unit 20 does not have a correction processing unit 21 and a matching processing unit 22, the combining process in the combining processing unit 23 may be performed on the sensor data SD output from the inertial sensor 10.

[0108] In IMU2b and 2c, the initial value of the output mode information is "Synthesized Data Output Mode". Therefore, sensor data SD2 is the synthesized data AVD of IMU2b, and sensor data SD3 is the synthesized data AVD of IMU2c. Consequently, in IMU2a, the signal processing unit 20, using the synthesis processing unit 23, performs synthesis processing on the matched data ALD of IMU2a, the synthesized data AVD of IMU2b (which is sensor data SD2), and the synthesized data AVD of IMU2c (which is sensor data SD3), and outputs the synthesized data AVD. In IMU2a, since the initial value of the output mode information is "Synthesized Data Output Mode", the communication interface circuit 31 transmits the synthesized data AVD output from the selector 30 as measurement data DO to the host device 3.

[0109] Similar to the second embodiment, IMUs 2a to 2g are assigned different IDs, and the host device 3 can read or write data to any of the registers 51 or non-volatile memory 52 of IMUs 2a to 2g by sending a command to IMU 2a that includes the ID of any of IMUs 2a to 2g.

[0110] Furthermore, IMUs 2a to 2g may function as a correction processing unit 21, a matching processing unit 22, a synthesis processing unit 23, a selector 30, and a control unit 40, respectively, by having a processing unit such as a CPU or microcontroller unit (not shown) execute a program stored in the non-volatile memory 52.

[0111] The other configurations of the inertial sensor device 1 of the third embodiment are the same as those of the inertial sensor device 1 of the second embodiment, so their description will be omitted.

[0112] In each of the IMUs 2a to 2g, the correction information used by the correction processing unit 21 and the alignment information used by the alignment processing unit 22 are pre-stored in the non-volatile memory 52. ​​Specifically, the inertial sensor device 1 is mounted on a jig equipped with a vibration mechanism and a rotation mechanism, and the host device 3, which is an inspection device, changes the acceleration and angular velocity applied to the inertial sensor device 1 by operating the vibration mechanism and rotation mechanism at each of several temperatures, and reads the sensor data SD for each of the IMUs 2a to 2g. Then, the host device 3 generates correction information for each of the IMUs 2a to 2g using the read sensor data SD for each of the IMUs 2a to 2g, and writes the generated correction information for each of the IMUs 2a to 2g to the respective non-volatile memory 52 of the IMUs 2a to 2g. Furthermore, the host device 3 changes the orientation of the inertial sensor device 1 so that the X, Y, and Z axes are all oriented in the direction of gravity, mounts it on the jig, and reads the corrected data CPD for each of the IMUs 2a to 2g. The host device 3 then compares the measured values ​​of the three-axis acceleration included in the corrected data CPD of each IMU2a to 2g that it has read out with the gravitational acceleration, generates matching information for each IMU2a to 2g, and writes the generated matching information for each IMU2a to 2g to the respective non-volatile memory 52 of each IMU2a to 2g.

[0113] As an example, the procedure for processing by the inertial sensor device 1 when the host device 3 reads the corrected data CPD from the IMU 2g, generates alignment information, and writes the generated alignment information to the non-volatile memory 52 of the IMU 2g will be described.

[0114] Figure 9 is a flowchart illustrating an example of the processing procedure of the inertial sensor device 1 when the host device 3 reads the corrected data CPD from the IMU 2g.

[0115] As shown in Figure 9, first, in step S21, IMU2a receives a command from the host device 3 to set the output mode information of IMU2g to "corrected data output mode", and transmits this command to IMU2c.

[0116] Next, in step S22, IMU2c receives a command and transmits the command to IMU2g.

[0117] Next, in step S23, the IMU2g receives a command and writes the data contained in the command to register 51, thereby setting the output mode information to "corrected data output mode". As a result, the IMU2g's selector 30 selects and outputs the corrected data CPD.

[0118] Next, in step S24, IMU2a receives a command from the host device 3 to set the output mode information of IMU2c to "third sensor data output mode" and sends the command to IMU2c.

[0119] Next, in step S25, the IMU2c receives a command and writes the data contained in the command to register 51, thereby setting the output mode information to "third sensor data output mode". As a result, the IMU2c's selector 30 selects and outputs sensor data SD3.

[0120] Next, in step S26, IMU2a receives a command from the host device 3 to set IMU2a's output mode information to "third sensor data output mode," and writes the data included in the command to register 51, thereby setting the output mode information to "third sensor data output mode." As a result, IMU2a's selector 30 selects and outputs sensor data SD3.

[0121] Next, in step S27, IMU2a receives a sampling start command from host device3 and starts sampling, and transmits the command to IMU2b and 2c.

[0122] Next, in step S28, IMU2b receives a command and starts sampling, and sends the command to IMU2d and 2e.

[0123] Next, in step S29, IMU2d and 2e receive a command, start sampling, and send the measurement data DO to IMU2b.

[0124] Next, in step S30, IMU2b receives the measurement data DO from IMU2d and 2e as sensor data SD2 and SD3, and transmits its own measurement data DO to IMU2a.

[0125] Furthermore, in step S31, IMU2c receives a command and starts sampling, and then transmits the command to IMU2f and 2g.

[0126] Next, in step S32, IMU2f and 2g receive a command, start sampling, and send the measurement data DO to IMU2c. In step S23, the output mode information of IMU2g is set to "corrected data output mode," so the measurement data DO of IMU2g is the corrected data CPD.

[0127] Next, in step S33, IMU2c receives the measurement data DO from IMU2f and 2g as sensor data SD2 and SD3, and transmits its own measurement data DO to IMU2a. In step S25, the output mode information of IMU2c is set to "third sensor data output mode," so the measurement data DO of IMU2c is sensor data SD3, that is, the corrected data CPD of IMU2g.

[0128] Next, in step S34, IMU2a receives the measurement data DO from IMU2b and 2c as sensor data SD2 and SD3, and transmits its own measurement data DO to the host device 3. In step S26, since the output mode information of IMU2a is set to "third sensor data output mode", the measurement data DO of IMU2a is sensor data SD3, that is, the measurement data DO of IMU2c, that is, the corrected data CPD of IMU2g.

[0129] Next, in step S35, IMU2a receives a sampling stop command from host device3, stops sampling, and sends the command to IMU2b and 2c.

[0130] Next, in step S36, IMU2b receives a command, stops sampling, and sends the command to IMU2d and 2e.

[0131] Then, in step S37, IMU2d and 2e receive a command and stop sampling.

[0132] Furthermore, in step S38, IMU2c receives a command, stops sampling, and sends the command to IMU2f and 2g.

[0133] Then, in step S39, IMU2f and 2g receive a command and stop sampling.

[0134] The host device 3 compares the measured values ​​of the three-axis acceleration included in the corrected data CPD of IMU2g read in step S34 with the gravitational acceleration to generate IMU2g alignment information.

[0135] Figure 10 is a flowchart illustrating an example of the processing procedure of the inertial sensor device 1 when the host device 3 writes the generated matching information to the non-volatile memory 52 of the IMU 2g.

[0136] As shown in Figure 10, first, in step S41, IMU2a receives a command from the host device 3 to write matching information to IMU2g and sends the command to IMU2c.

[0137] Next, in step S42, IMU2c receives a command and transmits the command to IMU2g.

[0138] Then, in step S43, the IMU2g receives a command and writes the consistency information contained in the command to the non-volatile memory 52.

[0139] As described above, according to the inertial sensor device 1 of the third embodiment, after assembly, the host device 3 can acquire various types of data by setting various modes for the output mode information of each of the IMUs 2a to 2g.

[0140] For example, by setting the output mode information of IMU2a to "second sensor data output mode", the output mode information of IMU2b to "third sensor data output mode", and the output mode information of IMU2e to "first sensor data output mode", the selector 30 of IMU2e selects and outputs sensor data SD, the selector 30 of IMU2b selects and outputs sensor data SD3, and the selector 30 of IMU2a selects and outputs sensor data SD2. As a result, the host device 3 can acquire the sensor data SD from IMU2e and generate correction information for IMU2e. Furthermore, by setting the output mode information of IMU2a to "Third Sensor Data Output Mode," the output mode information of IMU2c to "Third Sensor Data Output Mode," and the output mode information of IMU2g to "First Sensor Data Output Mode," the selector 30 of IMU2g selects and outputs sensor data SD, the selector 30 of IMU2c selects and outputs sensor data SD3, and the selector 30 of IMU2a selects and outputs sensor data SD3. As a result, the host device 3 can acquire the sensor data SD from IMU2g and generate correction information for IMU2g.

[0141] For example, by setting the output mode information of IMU2a to "second sensor data output mode", the output mode information of IMU2b to "third sensor data output mode", and the output mode information of IMU2e to "corrected data output mode", the selector 30 of IMU2e selects and outputs the corrected data CPD, the selector 30 of IMU2b selects and outputs the sensor data SD3, and the selector 30 of IMU2a selects and outputs the sensor data SD2. As a result, the host device 3 can obtain the corrected data CPD from IMU2e and generate the alignment information for IMU2e. Furthermore, by setting the output mode information of IMU2a to "Third Sensor Data Output Mode", the output mode information of IMU2c to "Third Sensor Data Output Mode", and the output mode information of IMU2g to "Corrected Data Output Mode", the selector 30 of IMU2g selects and outputs the corrected data CPD, the selector 30 of IMU2c selects and outputs the sensor data SD3, and the selector 30 of IMU2a selects and outputs the sensor data SD3. As a result, the host device 3 can acquire the corrected data CPD from IMU2g and generate the alignment information for IMU2g.

[0142] Furthermore, for example, by setting the "post-combined data output mode" in the output mode information of each IMU2b to 2g, the selectors 30 of each IMU2b to 2g select and output the post-combined data AVD. The synthesis processing unit 23 of IMU2a then performs a synthesis process on the matched data ALD of IMU2a, the post-combined data AVD of IMU2b, and the post-combined data AVD of IMU2c, outputting a highly accurate post-combined data AVD with random noise reduced to 1 / √7. Therefore, by setting the "post-combined data output mode" in the output mode information of IMU2a, the selector 30 of IMU2a selects and outputs the post-combined data AVD, allowing the host device 3 to acquire highly accurate measurement data DO with reduced noise.

[0143] Furthermore, according to the inertial sensor device 1 of the third embodiment, for example, the host device 3 can send a command to write correction information and alignment information to IMU2e, IMU2a can receive the command and send it to IMU2b, IMU2b can receive the command and send it to IMU2e, and IMU2e can receive the command and write the correction information and alignment information to the non-volatile memory 52. ​​Also, for example, the host device 3 can send a command to write correction information and alignment information to IMU2g, IMU2a can receive the command and send it to IMU2c, IMU2c can receive the command and send it to IMU2g, and IMU2g can receive the command and write the correction information and alignment information to the non-volatile memory 52.

[0144] Furthermore, the inertial sensor device 1 of the third embodiment provides the same effects as the inertial sensor device 1 of the first or second embodiment.

[0145] 4. Variations The present invention is not limited to this embodiment, and various modifications can be implemented within the scope of the gist of the present invention.

[0146] For example, in the inertial sensor device 1 of each of the embodiments described above, the number of IMUs connected to the respective communication interface circuits 32 of IMUs 2a, 2b, and 2c is not limited to 0 or 2, but may be 1. Also, one or two IMUs may be connected to the respective communication interface circuits 32 of IMUs 2d, 2e, 2f, and 2g. In other words, the number of IMUs included in the inertial sensor device 1 is not particularly limited.

[0147] Furthermore, in each of the above embodiments, the clock signal CLK output from IMU2a is input to IMU2b~2g, but IMU2a~2g may each operate with an independent clock signal. For example, IMU2a~2g may each operate with a clock signal output from their built-in oscillator circuit 60. In this case, the wiring for propagating the clock signal between IMU2a~2g becomes unnecessary, simplifying the system configuration.

[0148] The embodiments and variations described above are examples only and are not limited thereto. For example, each embodiment and each variation can be combined as appropriate.

[0149] The present invention includes configurations substantially identical to those described in the embodiments, for example, configurations with the same function, method, and results, or configurations with the same purpose and effect. Furthermore, the present invention includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. Furthermore, the present invention includes configurations that produce the same effects or achieve the same purpose as those described in the embodiments. Finally, the present invention includes configurations that add known technology to the configurations described in the embodiments.

[0150] The following can be derived from the embodiments and modifications described above.

[0151] One embodiment of an inertial sensor device is: An inertial sensor device having multiple inertial measurement units and connected to an external device, The plurality of inertial measurement units include a first inertial measurement unit and a second inertial measurement unit, The first inertial measurement unit is, First inertial sensor and, A first signal processing unit that processes the output signal of the first inertial sensor, Selector and, The First Communications Department and, It is equipped with a second communications unit, The second inertial measurement unit is, The second inertial sensor, A second signal processing unit that processes the output signal of the second inertial sensor, It includes the third communications section, The third communication unit transmits third data, which is data output from the second signal processing unit or data output from the second inertial sensor, to the second communication unit. The first signal processing unit performs calculations on the second data and the third data output from the first inertial sensor and outputs the first data. The selector selects and outputs one of a plurality of data, including the first data, the second data, and the third data, based on the output mode information. The first communication unit transmits the data output from the selector to the external device.

[0152] With this inertial sensor device, after assembly, a selector selects and outputs the second data output from the first inertial sensor, allowing an external device to acquire the second data and generate information necessary for processing by the first inertial measurement unit. Furthermore, with this inertial sensor device, after assembly, a selector selects and outputs the third data output from the second signal processing unit or the second inertial sensor, allowing an external device to acquire the third data and generate information necessary for processing by the second inertial measurement unit.

[0153] Furthermore, in this inertial sensor device, the first signal processing unit performs calculations on the second data output from the first inertial sensor and the third data output from the second signal processing unit or the second inertial sensor to output highly accurate first data. Therefore, with this inertial sensor device, an external device can acquire highly accurate first data by having the selector select and output the first data.

[0154] In one embodiment of the inertial sensor device, The output mode information is set by the external device, When the first mode is set in the output mode information, the selector selects and outputs the first data. If the second mode is set in the output mode information, the selector selects and outputs the second data. If the output mode information is set to a third mode, the selector may select and output the third data.

[0155] According to this inertial sensor device, an external device can arbitrarily acquire first, second, or third data by setting the output mode information to first mode, second mode, or third mode.

[0156] In one embodiment of the inertial sensor device, The first signal processing unit includes a correction processing unit that performs a correction process on the second data and outputs a fourth data, If the fourth mode is set in the output mode information, the selector may select and output the fourth data.

[0157] With this inertial sensor device, after assembly, the selector selects and outputs the fourth data output from the correction processing unit, allowing an external device to acquire the fourth data and generate the information necessary for processing by the first inertial measurement unit.

[0158] In one embodiment of the inertial sensor device, The first signal processing unit includes a matching processing unit that performs matching processing on the fourth data to match the detection axis of the first inertial sensor and outputs fifth data. If the fifth mode is set in the output mode information, the selector may select and output the fifth data.

[0159] With this inertial sensor device, after assembly, the selector selects and outputs the fifth data output from the matching processing unit, allowing an external device to acquire the fifth data and generate the information necessary for processing by the first inertial measurement unit.

[0160] In one embodiment of the inertial sensor device, The first signal processing unit may also include a synthesis processing unit that performs synthesis processing on a plurality of data including the fifth data and the third data and outputs the first data.

[0161] In this inertial sensor device, the synthesis processing unit performs synthesis processing on multiple data, including the fifth and third data, to output first data with reduced noise components. Therefore, with this inertial sensor device, by having the selector select and output the first data, an external device can acquire high-precision first data with reduced noise.

[0162] In one embodiment of the inertial sensor device, The first inertial measurement unit is, First memory unit and, A first control unit is provided, The second inertial measurement unit is, The second memory unit, A second control unit is provided, When the first communication unit receives a write command to the first storage unit from the external device, the first control unit writes the data included in the command to the first storage unit. When the first communication unit receives a write command to the second storage unit from the external device, the second communication unit transmits the command to the third communication unit, the third communication unit receives the command, and the second control unit may write the data included in the command to the second storage unit.

[0163] With this inertial sensor device, an external device can write information necessary for processing the first inertial measurement unit to the first memory unit by transmitting a write command to the first communication unit of the first inertial measurement unit. Furthermore, with this inertial sensor device, an external device can write information necessary for processing the second inertial measurement unit to the second memory unit by transmitting a write command to the first communication unit of the second inertial measurement unit.

[0164] Another embodiment of an inertial sensor device is: An inertial sensor device having multiple inertial measurement units and connected to an external device, The plurality of inertial measurement units include a first inertial measurement unit and a second inertial measurement unit, The first inertial measurement unit is, First inertial sensor and, A first signal processing unit that processes the output signal of the first inertial sensor, Selector and, The First Communications Department and, It is equipped with a second communications unit, The second inertial measurement unit is, The second inertial sensor, A second signal processing unit that processes the output signal of the second inertial sensor, It includes the third communications section, The third communication unit transmits third data, which is data output from the second signal processing unit or data output from the second inertial sensor, to the second communication unit. The first signal processing unit includes a correction processing unit that performs correction processing on the second data output from the first inertial sensor and outputs fourth data, an alignment processing unit that performs alignment processing on the detection axis of the first inertial sensor on the fourth data and outputs fifth data, and a synthesis processing unit that performs synthesis processing on a plurality of data including the fifth data and the third data and outputs first data. The selector selects and outputs one of a plurality of data, including the first data, second data, third data, fourth data, and fifth data, based on the output mode information. The first communication unit transmits the data output from the selector to the external device. [Explanation of symbols]

[0165] 1...Inertial sensor device, 2a~2g...Inertial measurement unit (IMU), 3...Host device, 10...Inertial sensor, 20...Signal processing unit, 21...Correction processing unit, 22...Matching processing unit, 23...Combination processing unit, 30...Selector, 31...Communication interface circuit, 32...Communication interface circuit, 40...Control unit, 50...Storage unit, 51...Register, 52...Non-volatile memory, 60...Oscillator circuit, 70...Switch

Claims

1. An inertial sensor device having multiple inertial measurement units and connected to an external device, The plurality of inertial measurement units include a first inertial measurement unit and a second inertial measurement unit. The first inertial measurement unit is, First inertial sensor and, A first signal processing unit that processes the output signal of the first inertial sensor, Selector and, First Communications Department and, It is equipped with a second communications unit, The second inertial measurement unit is, The second inertial sensor, A second signal processing unit that processes the output signal of the second inertial sensor, It is equipped with a third communications section, The third communication unit transmits the third data, which is the data output from the second signal processing unit or the data output from the second inertial sensor, to the second communication unit. The first signal processing unit performs calculations on the second data and the third data output from the first inertial sensor and outputs the first data. The selector selects and outputs one of a plurality of data, including the first data, the second data, and the third data, based on the output mode information. The first communication unit is an inertial sensor device that transmits data output from the selector to the external device.

2. In claim 1, The output mode information is set by the external device, When the first mode is set in the output mode information, the selector selects and outputs the first data. When the second mode is set in the output mode information, the selector selects and outputs the second data. When a third mode is set in the output mode information, the selector selects and outputs the third data, inertial sensor device.

3. In claim 2, The first signal processing unit includes a correction processing unit that performs a correction process on the second data and outputs a fourth data, When the output mode information is set to a fourth mode, the selector selects and outputs the fourth data, inertial sensor device.

4. In claim 3, The first signal processing unit includes a matching processing unit that performs matching processing on the fourth data to match the detection axis of the first inertial sensor and outputs fifth data. When the output mode information is set to a fifth mode, the selector selects and outputs the fifth data, inertial sensor device.

5. In claim 4, The inertial sensor device includes a first signal processing unit which performs a synthesis process on a plurality of data including the fifth data and the third data and outputs the first data.

6. In claim 1, The first inertial measurement unit is, First memory unit, A first control unit is provided, The second inertial measurement unit is, The second memory unit, A second control unit is provided, When the first communication unit receives a write command to the first storage unit from the external device, the first control unit writes the data included in the command to the first storage unit. Inertial sensor device, in which, when the first communication unit receives a write command to the second storage unit from the external device, the second communication unit transmits the command to the third communication unit, the third communication unit receives the command, and the second control unit writes the data contained in the command to the second storage unit.

7. An inertial sensor device having multiple inertial measurement units and connected to an external device, The plurality of inertial measurement units include a first inertial measurement unit and a second inertial measurement unit. The first inertial measurement unit is, First inertial sensor and, A first signal processing unit that processes the output signal of the first inertial sensor, Selector and, First Communications Department and, It is equipped with a second communications unit, The second inertial measurement unit is, The second inertial sensor, A second signal processing unit that processes the output signal of the second inertial sensor, It is equipped with a third communications section, The third communication unit transmits the third data, which is the data output from the second signal processing unit or the data output from the second inertial sensor, to the second communication unit. The first signal processing unit includes a correction processing unit that performs correction processing on the second data output from the first inertial sensor and outputs fourth data, an alignment processing unit that performs alignment processing on the detection axis of the first inertial sensor on the fourth data and outputs fifth data, and a synthesis processing unit that performs synthesis processing on a plurality of data including the fifth data and the third data and outputs first data. The selector selects and outputs one of a plurality of data, including the first data, second data, third data, fourth data, and fifth data, based on the output mode information. The first communication unit is an inertial sensor device that transmits data output from the selector to the external device.

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