High-pressure sensor with hydrogen barrier layer

Abstract

This invention provides a high-pressure sensor for reducing or preventing the embrittlement of a metal substrate by hydrogen. [Solution] The present invention relates to a high-pressure sensor for measuring the pressure of a hydrogen-containing fluid, comprising a base made of metal, a diaphragm made of metal that can bend along the normal direction within an open area in response to ambient pressure, measuring means provided above the diaphragm in the normal direction and each having at least one measuring means layer for electrically capturing the deflection of the diaphragm, and an insulating layer disposed on the diaphragm, wherein at least the diaphragm is made of chromium-containing steel, and a hydrogen barrier layer is disposed above the diaphragm in the normal direction and stretched planarly on the diaphragm.

Claims

[Claim 1] A high-pressure sensor (10) for measuring the pressure of a hydrogen-containing fluid, A substrate (12) made of metal, A diaphragm (18) made of metal can bend along the normal direction (16) within the empty region (14) in response to ambient pressure, A measuring means (24) is provided above the diaphragm (18) in the normal direction (16) and has at least one measuring means layer (26) for electrically capturing the deflection of the diaphragm, At least an insulating layer (30) disposed on the diaphragm (18) and In a high-voltage sensor (10) having, A high-pressure sensor (10) characterized in that at least the diaphragm (18) is formed from chromium-containing steel, and a hydrogen barrier layer (34) is arranged above the diaphragm (18) in the normal direction (16), and at least the hydrogen barrier layer (34) is stretched planarly over the diaphragm (18). [Claim 2] The high-pressure sensor (10) according to claim 1, characterized in that the hydrogen barrier layer (34) is formed from aluminum oxide. [Claim 3] The high-pressure sensor (10) according to claim 1 or 2, characterized in that the hydrogen barrier layer (34) is formed from an amorphous material. [Claim 4] The high-pressure sensor (10) according to any one of claims 1 to 3, characterized in that the hydrogen barrier layer (34) is formed by atomic layer deposition. [Claim 5] The high-pressure sensor (10) according to any one of claims 1 to 4, characterized in that the chromium-containing steel is stainless steel. [Claim 6] The high-pressure sensor (10) according to any one of claims 1 to 5, characterized in that the average layer thickness (40) of the hydrogen barrier layer (34) is greater than 5 nm. [Claim 7] The high-pressure sensor (10) according to any one of claims 1 to 6, characterized in that the average layer thickness (40) of the hydrogen barrier layer (34) is less than 100 nm. [Claim 8] The high-voltage sensor (10) according to any one of claims 1 to 7, characterized in that the hydrogen barrier layer (34) is applied on the insulating layer (30). [Claim 9] The high-pressure sensor (10) according to any one of claims 1 to 8, characterized in that the hydrogen barrier layer (34) covers the surface (32) of the substrate (12). [Claim 10] The high-voltage sensor (10) according to any one of claims 1 to 9, characterized in that the hydrogen barrier layer (34) is disposed between the measuring means (24) and the insulating layer (30).

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