Collection member

Abstract

This suppresses clogging of the exhaust path caused by foreign matter generated during the rotary coating process of substrates. [Solution] A collecting member for collecting substances generated by substrate processing, which is disposed around a substrate holding part in a substrate processing apparatus for processing substrates, the collecting member comprising a cylindrical side wall and at least one opening provided in the side wall.

Claims

1. A collection member for collecting substances generated by the substrate processing, which is arranged around a substrate holding portion in a substrate processing apparatus for processing substrates, A cylindrical side wall, A collecting member comprising at least one opening provided in the side wall.

2. The collection member according to claim 1, further comprising a substantially horizontal portion formed in an annular shape on the upper surface of the collection member.

3. The collecting member according to claim 2, wherein a portion of the substantially horizontal portion protrudes outward from the outer peripheral surface of the side wall.

4. A collection member according to claim 1 or 2, formed from a material having solvent resistance.

5. The collection member according to claim 1 or 2, further comprising a fixing portion for fixing to a cylindrical wall portion that forms an exhaust path within the substrate processing apparatus.

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