Salt, acid generator, resist composition, and method for producing resist patterns

Abstract

Provided are a salt, an acid generator, and a resist composition that can produce a resist pattern having good pattern collapse resistance (PCM). 【Solution means】A salt, an acid generator, and a resist composition represented by formula (I). JPEG2026108698000198.jpg59156 [In the formula, R 1 , R 2 and R 3 each represent a hydroxy group; R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , A 1 , A 2 and A 3 each represent a substituted / unsubstituted hydrocarbon group, and -CH2- in the group may be replaced by -O-, -S-, -CO- or -SO2-.]

Description

[Technical Field]

[0001] The present invention relates to salts, acid generators, resist compositions, and methods for producing resist patterns. [Background technology]

[0002] Patent Document 1 describes a salt represented by the following formula and a resist composition containing the salt as an acid generator. The item is described. Patent Document 2 (TIFF2026108698000001.tif3658) describes a salt represented by the following formula and a resist composition containing the salt as an acid generator. The item is described. Patent document 3 (TIFF2026108698000002.tif2789) describes a salt represented by the following formula. TIFF2026108698000003.tif3354 [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2011-186248 [Patent Document 2] Japanese Patent Publication No. 2020-015713 [Patent Document 3] Japanese Patent Publication No. 2011-038091 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] The present invention provides a resist pattern formed from a resist composition containing the above-mentioned salt that is more effective than a resist pattern formed from a resist composition containing the above-mentioned salt. To provide a salt that forms a resist pattern with good pattern deformation resistance (PCM). This will be the challenge. [Means for solving the problem]

[0005] The present invention includes the following inventions. [1] An acid generator containing a salt represented by formula (I). TIFF2026108698000004.tif60159[In formula (I), R , R 2 and R 3 each independently represents a hydroxy group, *-O-R 10 , *-O-C O-O-R 10 or *-O-L 10 -CO-O-R 10 where * represents the bonding site with the benzene ring. L 10 represents an alkanediyl group having 1 to 6 carbon atoms. R 10 represents an acid-labile group. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the haloalkyl group and the hydrocarbon group may be replaced by -O- , -S-, -CO- or -SO2-. A 1 , A 2 and A 3 each independently represents a hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -C O-, -S- or -SO2-. m1 represents any integer from 0 to 5, and when m1 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. m2 represents any integer from 0 to 4, and when m2 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. They may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within multiple parentheses are mutually exclusive. They may be the same or different. m4 represents an integer between 0 and 4, and when m4 is 2 or greater, multiple R 4 They are the same It can be one or different. m5 represents an integer between 0 and 4, and when m5 is 2 or greater, multiple R 5 They are the same It can be one or different. m6 represents an integer between 0 and 4, and when m6 is 2 or greater, multiple R 6 They are the same It can be one or different. m7 represents an integer between 0 and 5, and when m7 is 2 or greater, multiple R 7 They are the same It can be one or different. m8 represents an integer between 0 and 4, and when m8 is 2 or greater, multiple R 8 They are the same It can be one or different. m9 represents an integer between 0 and 4, and when m9 is 2 or greater, multiple R 9 They are the same It can be one or different. However, 0≦m1+m7≦5, 0≦m2+m8≦4, 0≦m3+m9≦4, and m1, At least one of m2 and m3 represents an integer greater than or equal to 1. X 4 This refers to single bonds, -CH2-, -O-, -S-, -CO-, -SO-, or -SO2- represent. AI - This represents an organic anion. [2]A 1 However, *-X 01 -L 01 - or *-L 01 -X 01 - and A 2 but,*- X 02-L 02 - or *-L 02 -X 02 - and A 3 However, *-X 03 -L 03 - or *-L 03 -X 03 -is (X 01 , X 02 and X 03 These are, independently, -O-, L represents -CO-, -S-, or -SO2-. 01 , L 02 and L 03 Each is independent , represents a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have substituents, the carbon The -CH2- contained in the hydrogen group is replaced by -O-, -CO-, -S-, or -SO2-. It may be done. * is R 1 , R 2 or R 3 (This indicates the bonding site with the benzene ring to which it is bonded.) [1] The acid generator described above. [3]X 01 , X 02 and X 03 However, each is independently -O- or -S-.[2] The acid generator described above. [4]L 01 , L 02 and L 03 However, each is independently an alkanediyl with 1 to 6 carbon atoms. The group (the -CH2- contained in the alkanediyl group is replaced by -O- or -CO-) The acid generator described in [2] or [3] may be: [5]R 1 , R 2 and R 3 However, each independently has a hydroxyl group, *-OR 10 or * -OL 10 -CO-OR 10 (* indicates a bonding site with the benzene ring.) [1 An acid generator as described in any of [4]. [6]R 10 The acid-unstable group is the group represented by formula (1a) or the group represented by formula (2a) An acid generator as described in any of [1] to [5]. TIFF2026108698000005.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3 These are, independently, alkyl groups with 1 to 8 carbon atoms. C1-C2 group, C2-C8 alkenyl group, C3-C20 alicyclic hydrocarbon group, C6-C1 8 represents aromatic hydrocarbon groups or groups formed by combining them, or R aa1 and R aa2 They are intertwined They bond to each other, forming alicyclic hydrocarbon groups with 3 to 20 carbon atoms together with the carbon atoms to which they are bonded. do. * indicates a connection site. TIFF2026108698000006.tif2161 [In formula (2a), R aa1’ and R aa2’ Each of these is independently a hydrogen atom or a carbon atom with 1 to 1 carbon atoms. Represents two hydrocarbon groups, R aa3’ represents a hydrocarbon group with 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they join together -CX a -along with 3 to 20 carbon atoms A heterocyclic group is formed, and the hydrocarbon group and the -CH2- contained in the heterocyclic group are -O- or - It may be replaced with S-. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site. [7] If m4, m5, or m6 is an integer greater than or equal to 1, R 4 , R 5 and R 6 But each These can be used independently by a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a carbon atom. 1 to 4 alkyl groups (the -CH2- contained in the alkyl group is replaced with -O- or -CO-) The acid generator described in any of [1] to [6], which may be replaced. [8] If m7, m8, or m9 is an integer greater than or equal to 1, R 7 , R 8 and R 9 But each These can be used independently by a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a carbon atom. 1 to 4 alkyl groups (the -CH2- contained in the alkyl group is replaced with -O- or -CO-) The acid generator described in any of [1] to [7] (which may be replaced). [9] AI - However, sulfonate anions, sulfonylimide anions, sulfonylmethides An acid generator as described in any of [1] to [8], which is an anion or a carboxylic acid anion.

[10] AI - This is a sulfonate anion, and the sulfonate anion is represented by formula (IA). The anion is one of the acid generators described in any of [1] to [9]. TIFF2026108698000007.tif2862[In formula (IA), Q 1 and Q 2 These are, independently, a hydrogen atom, a fluorine atom, and an alkyl group having 1 to 6 carbon atoms. Alternatively, it represents a perfluoroalkyl group having 1 to 6 carbon atoms. L 1 This represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH 2- may be replaced by -O- or -CO-, and the water contained in the saturated hydrocarbon group The elementary atoms may be substituted with fluorine atoms or hydroxyl groups. Y 1 This is a methyl group which may have substituents or a carbon 3- which may have substituents represents an alicyclic hydrocarbon group having 24 carbon atoms, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-.]

[11] A resist composition comprising the acid generator according to any one of [1] to

[10] and a resin having an acid-labile group.

[12] The resist composition according to

[11] , wherein the resin having an acid-labile group contains at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1- 1) and a structural unit represented by formula (a1-2). TIFF2026108698000008.tif46151 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 、L a1 and L a2 each independently represents -O- or *-O-(CH2) k1 -[[]] CO-O-, k1 represents an integer of any one of 1 to 7, and * represents a bonding site with -CO. R a01 、R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 [[]]、R a03 [[]]and R a04 [[]]each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to [[]]18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group formed by combining these. <着 [[]][[]] [[ID=][1]] [[]]R a6 [[]]and R a7 [[]]each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group formed by combining these. [[]] [[]] [[]][[]] [[]]​​m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

[13] The resist composition according to

[0011] or

[12] , wherein the resin having an acid-unstable group comprises a structural unit represented by formula (a2-A). TIFF2026108698000009.tif4653[In formula (a2-A), R a50 This is a hydrogen atom, a halogen atom, or a C1-C6 element which may have a halogen atom. It represents an alkyl group. R a51 This includes halogen atoms, hydroxyl groups, alkyl groups with 1 to 6 carbon atoms, and C1 to 6 atoms. Alkoxy group, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms Lucoxy group, C2-C4 alkylcarbonyl group, C2-C4 alkylcarbonyl This represents an oxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or * -X a51 -( A a52 -X a52 ) nb - represents -R a50 they combine This represents the bonding site with the carbon atom. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent -O-, -CO-O-, or -O-CO- independently. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, Number R a51 They may be the same or different from each other.

[14] Further contains a salt that generates an acid that is less acidic than the acid generated by the acid generator. A resist composition according to any one of

[11] to

[13] .

[15] (1)

[11] ~

[14] is applied to the substrate. The process, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, (5) A method for manufacturing a resist pattern, comprising the step of developing the composition layer after heating.

[16] A salt represented by formula (I). TIFF2026108698000010.tif60159 [In formula (I), R 1 , R 2 and R 3 These are, independently, a hydroxyl group and *-OR 10 *-OC OOR 10 or *-OL 10 -CO-OR 10 This represents the bond with the benzene ring. This indicates the joining point. L 10 This represents an alkanediyl group with 1 to 6 carbon atoms. R 10 This represents an acid-unstable group. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 These are, independently, halogen atoms and carbon atoms with 1 carbon. Represents a haloalkyl group of ~12 or a hydrocarbon group having 1 to 18 carbon atoms, wherein the hydrocarbon group is substituted. They may have groups, and the -CH2- contained in the haloalkyl group and the hydrocarbon group is -O- It may be replaced by -S-, -CO-, or -SO2-. A 1 , A 2 and A 3 Each of these independently represents a hydrocarbon group having 2 to 20 carbon atoms, and the carbonization The hydrogen group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -C It may be replaced with O-, -S-, or -SO2-. m1 represents an integer between 0 and 5, and when m1 is 2 or greater, the bases within multiple parentheses are mutually exclusive. They may be the same or different. m2 represents an integer between 0 and 4, and when m2 is 2 or greater, the bases in multiple parentheses are mutually exclusive. They may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within multiple parentheses are mutually exclusive. They may be the same or different. m4 represents an integer between 0 and 4, and when m4 is 2 or greater, multiple R 4 They are the same It can be one or different. m5 represents an integer between 0 and 4, and when m5 is 2 or greater, multiple R 5 They are the same It can be one or different. m6 represents an integer between 0 and 4, and when m6 is 2 or greater, multiple R 6 They are the same It can be one or different. m7 represents an integer between 0 and 5, and when m7 is 2 or greater, multiple R 7 They are the same It can be one or different. m8 represents an integer between 0 and 4, and when m8 is 2 or greater, multiple R 8 They are the same It can be one or different. m9 represents an integer between 0 and 4, and when m9 is 2 or greater, multiple R 9 They are the same It can be one or different. However, 0≦m1+m7≦5, 0≦m2+m8≦4, 0≦m3+m9≦4, and m1, At least one of m2 and m3 represents an integer greater than or equal to 1. X 4This refers to single bonds, -CH2-, -O-, -S-, -CO-, -SO-, or -SO2- represent. AI - This represents an organic anion.

[17] A 1 However, *-X 01 -L 01 - or *-L 01 -X 01 - and A 2 but,* -X 02 -L 02 - or *-L 02 -X 02 - and A 3 However, *-X 03 -L 03 -also is *-L 03 -X 03 -is (X 01 , X 02 and X 03 These are, independently, -O- , represents -CO-, -S-, or -SO2-. 01 , L 02 and L 03 Each is independent This represents a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have substituents. The -CH2- contained in the hydrogenated group is replaced by -O-, -CO-, -S-, or -SO2-. It's okay to leave it there. * is R 1 , R 2 or R 3 This indicates the bonding site with the benzene ring to which it is bonded. The salt described in

[16] .

[18] X 01 , X 02 and X 03 However, each is independently -O- or -S-, as described in

[0017] .

[19] L 01 , L 02 and L 03 However, each independently, alkandies with 1 to 6 carbon atoms The -CH2- contained in the alkanediyl group is replaced by -O- or -CO- The salts described in

[17] or

[18] may be:

[20] R 1 , R 2 and R 3 However, each independently has a hydroxyl group, *-OR 10 or *-OL 10 -CO-OR 10 (* indicates a bonding site with a benzene ring.) A salt as described in any of

[0016] to

[19] .

[21] R 10 The acid-unstable group is the group represented by formula (1a) or the group represented by formula (2a) The salts described in any of

[16] to

[20] . TIFF2026108698000011.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3 These are, independently, alkyl groups with 1 to 8 carbon atoms. C1-C2 group, C2-C8 alkenyl group, C3-C20 alicyclic hydrocarbon group, C6-C1 8 represents aromatic hydrocarbon groups or groups formed by combining them, or R aa1 and R aa2 They are intertwined They bond to each other, forming alicyclic hydrocarbon groups with 3 to 20 carbon atoms together with the carbon atoms to which they are bonded. do. * indicates a connection site. TIFF2026108698000012.tif2161[In formula (2a), R aa1’ and R aa2’ Each of these is independently a hydrogen atom or a carbon atom with 1 to 1 carbon atoms. Represents two hydrocarbon groups, R aa3’ represents a hydrocarbon group with 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they join together -CX a -along with 3 to 20 carbon atoms A heterocyclic group is formed, and the hydrocarbon group and the -CH2- contained in the heterocyclic group are -O- or - It may be replaced with S-. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site.

[22] If m4, m5, or m6 is an integer greater than or equal to 1, R 4 , R 5 and R 6 But Each independently consists of a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a carbon atom. Alkyl groups numbered 1 to 4 (the -CH2- contained in the alkyl group is replaced with -O- or -CO-) The salts listed in any of

[16] to

[21] (may be substituted.)

[23] If m7, m8, or m9 is an integer greater than or equal to 1, R 7 , R 8 and R 9 But Each independently consists of a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a carbon atom. Alkyl groups numbered 1 to 4 (the -CH2- contained in the alkyl group is replaced with -O- or -CO-) The salts listed in any of

[16] to

[22] (which may be substituted.)

[24] AI - However, sulfonate anion, sulfonylimide anion, sulfonylmethyl A salt described in any of the following

[16] -

[23] , which is a deanion or a carboxylate anion.

[25] AI - This is a sulfonate anion, and the sulfonate anion is represented by formula (IA). The salts listed in any of the following

[16] -

[24] are anions that are used. TIFF2026108698000013.tif2862[In formula (IA), Q 1 and Q 2 These are, independently, a hydrogen atom, a fluorine atom, and an alkyl group having 1 to 6 carbon atoms. Alternatively, it represents a perfluoroalkyl group having 1 to 6 carbon atoms. L 1 This represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH 2- may be replaced by -O- or -CO-, and the water contained in the saturated hydrocarbon group The elementary atoms may be substituted with fluorine atoms or hydroxyl groups. Y 1 This is a methyl group which may have substituents or a carbon 3- which may have substituents It represents 24 alicyclic hydrocarbon groups, and the -CH2- contained in the alicyclic hydrocarbon group is -O-, It may be replaced by -S-, -SO2-, or -CO-. [Effects of the Invention]

[0006] By using a resist composition containing the salt of the present invention, good pattern deformation resistance ( Resist patterns can be manufactured using PCM. [Modes for carrying out the invention]

[0007] In this specification, "(meth)acrylic monomer" means "acrylic monomer and This means "at least one methacrylate monomer." "(meth)acrylate" and " The notation "(meth)acrylic acid," etc., also has the same meaning. In the groups described herein, For substances that can take both a linear and branched structure, either is acceptable. Hydrocarbon group When the -CH2- contained in etc. is replaced by -O-, -S-, -CO- or -SO2-, The same example shall apply to each group. "Combined groups" refers to two of the example groups. This refers to groups formed by bonding one or more species, and the valencies of these groups may be appropriately changed depending on the bonding configuration. "Derived from" or "induced from" means that the polymerizable C=C bond contained in the molecule is involved in polymerization. This refers to the formation of more -CC- groups (single bonds). If stereoisomers exist, all of them are... Includes isomers. In this specification, "solid content of the resist composition" means the amount of solids of the resist composition that is added to the total amount of solids of the resist composition. This refers to the sum of the components excluding the solvent (E) described above.

[0008] [Salt represented by formula (I)] This invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)"). In salt (I), the side with a positive charge is called "cation (I)" and the side with a negative charge is called "A It is sometimes referred to as "Nion (I)". TIFF2026108698000014.tif60159[In this formula, all symbols have the same meaning as defined above.]

[0009] [Cation (I)] The cation (I) of the salt represented by formula (I) is the cation represented by formula (IC). TIFF2026108698000015.tif59160[In formula (IC), all symbols have the same meaning as in formula (I).]

[0010] In equation (I), R 1 , R 2 and R 3 L contained in 10 Alkanediyl group and For example, methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl Linear alkaned groups such as pentane-1,5-diyl groups and hexane-1,6-diyl groups. Iyl group; and Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl Examples include branched alkanediyl groups such as the 2-methylbutane-1,4-diyl group. L 10It is preferably an alkanediyl group having 1 to 3 carbon atoms, and is a methylene group. It is preferable to do so.

[0011] R 1 , R 2 and R 3 R included 10 An acid-unstable group is an acid (for example, trifluoromethyl When it comes into contact with sulfonic acid, R 10 A leaving group containing the group represented by carboxy is eliminated, It refers to a group that forms a hydroxyl group or a hydroxyl group. Acid-unstable groups include groups represented by formula (1a) (hereinafter, depending on the case, "acid-unstable group (1a )」」. ), the group represented by formula (2a) (hereinafter, depending on the case, referred to as "acid-unstable group (2a)" and It is preferable to say. TIFF2026108698000016.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3 These are, independently, alkyl groups with 1 to 8 carbon atoms. C1-C2 group, C2-C8 alkenyl group, C3-C20 alicyclic hydrocarbon group, C6-C1 8 represents aromatic hydrocarbon groups or groups formed by combining them, or R aa1 and R aa2 They are intertwined They bond to each other, forming alicyclic hydrocarbon groups with 3 to 20 carbon atoms together with the carbon atoms to which they are bonded. do. * indicates a connection site. TIFF2026108698000017.tif2161[In formula (2a), R aa1’ and R aa2’ Each of these is independently a hydrogen atom or a carbon atom with 1 to 1 carbon atoms. Represents two hydrocarbon groups, R aa3’ represents a hydrocarbon group with 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they join together -CX a -along with 3 to 20 carbon atoms A heterocyclic group is formed, and the hydrocarbon group and the -CH2- contained in the heterocyclic group are -O- or - It may be replaced with S-. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site.

[0012] R aa1 , R aa2 and R aa3 Examples of alkyl groups include methyl group, ethyl group, propyl group, n Examples include the butyl group, n-pentyl group, n-hexyl group, n-heptyl group, and n-octyl group. It can be done. aa1 , R aa2 and R aa3 The number of carbon atoms in the alkyl group is preferably 1 to 6. More preferably 1 to 4, and even more preferably 1 to 3. R aa1 , R aa2 and R aa3 Examples of alkenyl groups include ethenyl group, propenyl group, and isop Lopenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hex Examples include the senyl group, heptenyl group, octenyl group, isooctenyl group, and nonenyl group. R aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopentyl group, cyclohexyl group, and cyclohexyl group. Examples include cycloalkyl groups such as cyclooctyl groups and cyclooctyl groups. Polycyclic alicyclic hydrocarbons. Examples of groups include decahydronaphthyl group, adamantyl group, norbornyl group and the following: Examples include the base (* indicates a binding site). aa1 , R aa2 and R aa3 Alicyclic carbonized water The number of carbon atoms in the elemental group is preferably 3 to 16, and more preferably 3 to 12. TIFF2026108698000018.tif9159R aa1 , R aa2 and R aa3 Examples of aromatic hydrocarbon groups include phenyl group, naphthyl group, and ammonium group. Examples of aryl groups include tolyl groups, biphenyl groups, and phenanthryl groups. aa1 , R aa2 and R aa3 The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, and more preferably The range is 6 to 10.

[0013] The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group) Cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbol Alkylcycloalkyl groups such as ylethyl groups or cycloalkylalkyl groups), benzyl Aralkyl groups such as p-methylphenyl groups, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p -tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2, 6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc., alicyclic hydrocarbon group Aromatic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group) Examples include aryl-cycloalkyl groups such as phenylcyclohexyl groups.

[0014] R aa1 and R aa2 These atoms bond to each other, forming an alicyclic hydrocarbon group with the carbon atoms to which they are bonded. -C(R aa1 )(R aa2 )(R aa3 The following are examples of such elements. The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms, and more preferably 3 to 12 carbon atoms. * indicates the bonding site with -O-. TIFF2026108698000019.tif30140

[0015] The group represented by formula (1a) is a 1,1,1-trialkyl group (in formula (1a) te R aa1 , R aa2 and R aa3 A group which is an alkyl group, preferably a tert-butyl group, 2 -Alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 and these are combined The carbon atoms form an adamantyl group, R aa3 (a group in which is an alkyl group) and 1-(adamantine) R aa1 and R aa2 is alkyl It is a base, R aa3 Examples include groups that are adamantyl groups.

[0016] R aa1' , R aa2' and R aa3' Examples of hydrocarbon groups include alkyl groups, alicyclic hydrocarbon groups, and aromatic groups. Examples include aromatic hydrocarbon groups and groups formed by combining them. Alkyl and alicyclic hydrocarbon groups are R aa1 , R aa2 and R aa3 The same base as the one mentioned above It can be listed. Aromatic hydrocarbon groups include phenyl group, naphthyl group, anthryl group, biphenyl group, Examples include aryl groups such as phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group) Cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbol Cycloalkylalkyl groups such as ylethyl groups or alkylcycloalkyl groups), benzyl Aralkyl groups such as p-methylphenyl groups, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p -tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2, 6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc., alicyclic hydrocarbon group Aromatic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group) Examples include aryl-cycloalkyl groups such as phenylcyclohexyl groups. R aa2' and R aa3' They bond with each other, and the carbon atoms and X that they bond to are bonded together. a along with complex algebras When forming a group, -C(R aa1' )(R aa2' )-X a -(R aa3' ) The following are the basis These are listed. * indicates a connection site. TIFF2026108698000020.tif21143R aa1' and R aa2' Preferably, at least one of them is a hydrogen atom.

[0017] Specific examples of acid-unstable groups (1a) include the following groups. * indicates a bonding site. TIFF2026108698000021.tif67167

[0018] Specific examples of acid-unstable groups (2a) include the following groups. * indicates a bonding site. TIFF2026108698000022.tif76165R 1 , R 2 and R3 The bond positions to the benzene ring are, independently of each other, A 1 , A 2 and A 3 The bond position can be any of the or, m, or p positions. Among these, R 1 , R 2 and R 3 Each of them is independently, A 1 , A 2 and A 3 Bonding at the p-position or m-position relative to the bonding site. It is preferable that it is bonded at the p-position, and more preferably that it is bonded at the p-position. R 1 , R 2 and R 3 These are, independently, a hydroxyl group and *-OR 10 or *-O- L 10 -CO-OR 10 It is preferable that it be *-OR 10 or *-OL 10 - CO-OR 10 This is more preferable. * indicates a bonding site with the benzene ring.

[0019] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of halogen atoms include fluorine atoms and chlorine atoms. Examples include ions, bromine atoms, and iodine atoms. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Haloalkyl groups with 1 to 12 carbon atoms are... This represents an alkyl group with 1 to 12 carbon atoms that contains a gen atom, and is a C1 to C12 alkyl fluoride. Group, C1-C12 alkyl chloride, C1-C12 alkyl bromide, C1-C1 Examples include alkyl iodides of type 2. Haloalkyl groups include perylamines with 1 to 12 carbon atoms. Fluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoromethyl group) Propyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3, 3-trifluoropropyl group, 4,4,4-trifluorobutyl group, and 3,3,4,4 ,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, etc. Examples include: The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 9. It is 6, more preferably 1 to 4, and even more preferably 1 to 3. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 As for hydrocarbon groups with 1 to 18 carbon atoms, a Chain hydrocarbon groups such as kill groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and combinations thereof Examples of groups formed by this process include: Examples of alkyl groups include linear or branched alkyl groups, such as methyl groups and ethyl groups. n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group 2-ethylhexyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl Examples include the 1x group, decyl group, undecyl group, and dodecyl group. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 12, more preferably 1 to 9. , more preferably 1 to 6, even more preferably 1 to 4, even more preferably The values ​​are 1 to 3.

[0020] The alicyclic hydrocarbon group may be monocyclic or polycyclic, and may include the following groups, etc. These are some examples. The connection point can be at any position. TIFF2026108698000023.tif47169 Specifically, monocyclic alicyclic hydrocarbon groups include cyclopropyl groups and cyclobutyl groups. cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclo Examples include monocyclic cycloalkyl groups such as decyl groups. Polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl groups. Examples include the following. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, and more preferably The value is between 3 and 16, and more preferably between 3 and 12. Aromatic hydrocarbon groups include phenyl group, naphthyl group, biphenyl group, anthryl group, Examples include phenanthryl groups and binaphthyl groups. The number of carbon atoms in the aromatic hydrocarbon group is preferred. The value is 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. .

[0021] The groups formed by combining them include aromatic hydrocarbon groups and chain hydrocarbon groups. Groups that combine (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic) Aromatic hydrocarbon groups (*), groups combining alicyclic hydrocarbon groups and chain hydrocarbon groups (for example) , alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*), fragrance A group that combines a fragrant hydrocarbon group and an alicyclic hydrocarbon group (for example, an aromatic hydrocarbon group - alicyclic hydrocarbon group) Examples include cyclic hydrocarbon groups (*) and alicyclic hydrocarbon groups (*) (aromatic hydrocarbon groups). This indicates the joining point. Aromatic hydrocarbon groups - alkanediyl groups - * include benzyl groups, phenethyl groups, etc. One example is the larchyl group. Examples of alkyl-aromatic hydrocarbon groups include tolyl, xylyl, and coumenyl groups. It can be listed. Examples of alicyclic hydrocarbon groups - alkanediyl groups -* include cyclohexylmethyl group, cyclo Hexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1 Examples include cycloalkylalkyl groups such as -yl-1-methylethyl group. Examples of alkyl-alicyclic hydrocarbon groups include methylcyclohexyl group and dimethylcyclohexyl group. Cyclohexyl group, 2-alkyladamantan-2-yl group, and other alkyl groups Examples include the luquill group. Examples of aromatic hydrocarbon groups (alicyclic hydrocarbon groups) include the phenylcyclohexyl group. It can be done. Examples of alicyclic hydrocarbon groups - aromatic hydrocarbon groups -* include the cyclohexylphenyl group. It can be done. In terms of combinations, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups are Each of these may be combined in two or more ways. Also, any of the groups bonded to the benzene ring That's fine.

[0022] The -CH2- contained in the haloalkyl group and hydrocarbon group is -O-, -S-, -CO- or The group that has been replaced by -SO2- is the hydroxyl group (the -CH2 contained in the methyl group). - is a group that has been replaced by -O-), thiol group (the -CH2- contained in the methyl group, - (a group replaced by S-), carboxyl group (the -CH2-CH2- contained in the ethyl group, - Groups replaced by O-CO-, alkoxy groups (any position within an alkyl group) CH2- is replaced by -O-, alkylthio group (any group contained within an alkyl group) (A group in which the -CH2- at the position is replaced by -S-), an alkoxycarbonyl group (alkyl A group in which any -CH2-CH2- at any position in the group is replaced by -O-CO-, The alkylcarbonyl group (where -CH2- at any position within the alkyl group is replaced by -CO-) (Replaced group), alkylsulfonyl group (-CH2 at any position within the alkyl group) -A group that has been replaced by -SO2-), an alkylcarbonyloxy group (containing within the alkyl group) A group in which any -CH2-CH2- at any given position is replaced by -CO-O-, an oxy group ( A group in which the -CH2- contained in the methylene group is replaced by -O-), a carbonyl group (methyl A group in which the -CH2- contained in the ethylene group is replaced by -CO-), a thio group (in the methylene group) (A group in which the -CH2- contained in the methylene group is replaced by an -S-), sulfonyl group (contained in the methylene group) (A group in which the -CH2- is replaced by -SO2-), an alkanediyloxy group (alka (A group in which any -CH2- at any position in the nucleotide group is replaced by -O-), Alkanediyloxycarbonyl group (-CH2-C at any position within the alkanediyl group) (A group in which H2- is replaced by -O-CO-), an alkanediylcarbonyl group (alkanedi Alkanes (groups in which any -CH2- at any position within the yl group is replaced by -CO-) Diylcarbonyloxy group (a -CH2-CH2 group at any position within an alkanediyl group) - is a group that has been replaced by -CO-O-), an alkanediylthio group (with an alkanediyl group) (A group in which any -CH2- at any position is replaced by -S-), alkanediylsulfo The -CH2- at any position within the alkanediyl group is replaced by -SO2- (Divided group), cycloalkoxy group, cycloalkylalkoxy group, alkoxycarbonyl Oxy group, aromatic hydrocarbon group-carbonyloxy group, aromatic hydrocarbon group-carbonyl group, Aromatic hydrocarbon group - oxy group, haloalkoxy group (any position contained within a haloalkyl group) (A group in which the -CH2- is replaced by -O-), a haloalkoxycarbonyl group (haloal (A group in which any -CH2-CH2- at any position in the kill group is replaced with -O-CO-) , Haloalkylcarbonyl group (a -CH2- at any position within the haloalkyl group, (a group replaced by -CO-), haloalkylcarbonyloxy group (containing within the haloalkyl group) (A group in which any -CH2-CH2- at any given position is replaced by -CO-O-), these groups Examples include bases that combine two or more of the following types.

[0023] Examples of alkoxy groups include alkoxy groups having 1 to 17 carbon atoms, such as methoxy. Group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, o Cutyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, un Examples include decyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 11. More preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 It is ~3. Examples of alkylthio groups include alkylthio groups having 1 to 17 carbon atoms, for example, methyl Luthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio O group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, un Examples include decylthio groups. The number of carbon atoms in the alkylthio group is preferably 1 to 11. More preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 It is ~3. Alkoxycarbonyl groups, alkylcarbonyl groups, and alkylcarbonyloxy groups are A carbonyl group or carbonyloxy group is bonded to the alkyl group or alkoxy group mentioned above. It represents the basis. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 17 carbon atoms. For example, methoxycarbonyl groups, ethoxycarbonyl groups, butoxycarbonyl groups, etc. Examples include alkylcarbonyl groups with 2 to 18 carbon atoms. Examples include acetyl groups, propionyl groups, and butyryl groups. Examples of carbonyloxy groups include alkylcarbonyloxy groups having 2 to 17 carbon atoms. Examples include acetyloxy groups, propionyloxy groups, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, and more preferably 2. ~6, more preferably 2~4, and even more preferably 2 or 3. The number of carbon atoms in the lucylcarbonyl group is preferably 2 to 12, more preferably 2 to 6. More preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the rubonyloxy group is preferably 2 to 11, more preferably 2 to 6. More preferably 2 to 4, and even more preferably 2 or 3. Examples of alkylsulfonyl groups include alkylsulfonyl groups having 1 to 17 carbon atoms. For example, methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group Honyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2- Ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecyl Examples include ulfonyl groups. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11. more preferably 1 to 6, even more preferably 1 to 4, and even more preferably The answer is 1 to 3. Examples of alkanediyloxy groups include those with 1 to 17 carbon atoms. For example, methyleneoxy group, ethyleneoxy group, propanediyloxy group, butanedi Examples include yloxy groups and pentanediyloxy groups. The number is preferably 1 to 11, more preferably 1 to 6, and even more preferably 1 to It is 4, and more preferably 1 to 3. Alkanediyloxycarbonyl groups include those with 2 to 17 carbon atoms. Examples of carbonyl groups include methyleneoxycarbonyl groups and ethyleneoxycarbonyl groups. Examples include the nyl group, propanediyloxycarbonyl group, and butanediyloxycarbonyl group. It can be. As for the alkanediylcarbonyl group, alkanediylcarbonyl groups with 2 to 18 carbon atoms are available. Examples include the nyl group, such as the methylenecarbonyl group, ethylenecarbonyl group, and propanedi Examples include ylcarbonyl groups, butanediylcarbonyl groups, and pentanediylcarbonyl groups. Alkanediylcarbonyloxy groups include alkanediylcarbonyl groups with 2 to 17 carbon atoms. Examples of carbonyloxy groups include methylenecarbonyloxy groups and ethylenecarbonyloxy groups. Luoxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. For example, the number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11. , more preferably 2 to 6, even more preferably 2 to 4, even more It is 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12. More preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 Or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11. more preferably 2 to 6, even more preferably 2 to 4, and even more preferably It is either 2 or 3. Examples of alkanediylthio groups include those with 1 to 17 carbon atoms. Examples include methylenethio groups, ethylenethio groups, and propylenethio groups. The number of carbon atoms in the diylthio group is preferably 1 to 11, more preferably 1 to 6. More preferably, the values ​​are 1 to 4, and even more preferably, 1 to 3. Examples of alkanediylsulfonyl groups include alkanediylsulfonyl groups having 1 to 17 carbon atoms. Examples include methylene sulfonyl group, ethylene sulfonyl group, and propylene sulfonyl group. Examples include the nyl group. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11. Yes, more preferably 1 to 6, even more preferably 1 to 4, even more preferably The values ​​are 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups with 3 to 17 carbon atoms, for example Examples include cyclohexyloxy groups. Examples of cycloalkylalkoxy groups include carbon Examples include cycloalkylalkoxy groups with prime numbers 4 to 17, for example, cyclohexylmethyl Examples include alkoxycarbonyloxy groups, which have 2 to 16 carbon atoms. Examples include xycarbonyloxy groups, such as the butoxycarbonyloxy group. Aromatic hydrocarbon groups - carbonyloxy groups include aromatic hydrocarbons with 7 to 17 carbon atoms. Examples of carbonyloxy groups include the benzoyloxy group. Carbonyl groups include aromatic hydrocarbon groups with 7 to 17 carbon atoms. Examples of groups include the benzoyl group. Aromatic hydrocarbon group-oxy group Examples include aromatic hydrocarbon groups with 6 to 16 carbon atoms, such as phenyloxy. Examples include the C group. Haloalkoxy group, haloalkoxycarbonyl group, haloalkylcarbonyl group, halo Examples of lucylcarbonyloxy groups include haloalkoxy groups with 1 to 11 carbon atoms and groups with 2 to 1 carbon atoms. 1 haloalkoxycarbonyl group, C2-C12 haloalkylcarbonyl group, C2 Examples include 2 to 11 haloalkylcarbonyloxy groups, for example, 1 of the groups exemplified above. Examples of groups in which the above hydrogen atoms are replaced with halogen atoms include those mentioned above.

[0024] Furthermore, the -CH2- contained in the alicyclic hydrocarbon group may be -O-, -S-, -CO-, or -S The groups that have been replaced by O2- include the following: The -O- or -CO- may be replaced with -S- or -SO2-. The bonding site is arbitrary. It can be positioned as follows: TIFF2026108698000024.tif47168 The -CH2- contained in the haloalkyl and hydrocarbon groups is -O-, -S-, -CO- or If it is replaced by -SO2-, the number of carbon atoms before replacement is equal to the total number of carbon atoms in the hydrocarbon group. Let's assume that there are only one, or two or more. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The hydrocarbon group may have substituents as This includes halogen atoms, cyano groups, and alkyl groups having 1 to 12 carbon atoms (the alkyl group contains - Examples include CH2- (which may be replaced by -O- or -CO-). Examples of halogen atoms include the same groups as those described above. Examples of alkyl groups having 1 to 12 carbon atoms include the same groups as those described above. As a substituent, the -CH2- group in the alkyl group is replaced with -O- or -CO-. If this is the case, the number of carbon atoms before replacement shall be the total number of carbon atoms of the alkyl group. The replaced group and For example, hydroxyl group, carboxyl group, alkoxy group, alkoxycarbonyl group, alkyl Examples include carbonyl groups and alkylcarbonyloxy groups. Alkoxy group, alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyl Examples of alkoxy groups include alkoxy groups with 1 to 11 carbon atoms and alkoxycal groups with 2 to 11 carbon atoms. Bonyl group, alkylcarbonyl group having 2 to 12 carbon atoms, and alkylcarbonyl group having 2 to 11 carbon atoms. Examples include the yloxy group, and other groups similar to those mentioned above. The hydrocarbon group may have one substituent or more substituents.

[0025] A 1 , A 2 and A 3 Examples of hydrocarbon groups include chain-type hydrocarbon groups such as alkanediyl groups, and lipids. Cyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these are Examples include: The number of carbon atoms in the hydrocarbon group is preferably 2 to 19, and more preferably 2 to 1 8, more preferably 2 to 16, even more preferably 2 to 14, and further More preferably, the range is 2 to 12. Examples of alkanediyl groups include methylene group, ethylene group, propane-1,3-diyl group, Butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,1 2-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, Pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane Linear alkanediyl groups such as n-1,17-diyl groups and Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl Examples include branched alkanediyl groups such as the 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain-like hydrocarbon group is preferably 2 to 18, more preferably 2 to 12. More preferably 2 to 9, even more preferably 2 to 6, and even more preferably More preferably 2 to 4, and even more preferably 2 or 3. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and may include the following groups, etc. These are some examples. The connection point can be at any position. TIFF2026108698000025.tif47169 Specifically, cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, Monocyclic cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc. The alkanediyl group is a monocyclic alicyclic hydrocarbon group and norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane- Polycyclic cycloalkanediyl groups such as 1,5-diyl groups and adamantane-2,6-diyl groups Examples include polycyclic alicyclic hydrocarbon groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16. Yes, more preferably 3 to 12, and even more preferably 3 to 10. Aromatic hydrocarbon groups include phenylene, naphthylene, anthrylene, and biphenyl Aromatic hydrocarbon groups such as len groups, phenanthrylene groups, and arylene groups are examples. The number of carbon atoms in the group hydrocarbon is preferably 6 to 18, more preferably 6 to 14. More preferably, the value is 6 to 10.

[0026] The groups formed by combining them are alicyclic hydrocarbon groups and alkanediyl groups. Groups combining and, groups combining aromatic hydrocarbon groups and alkanediyl groups, and alicyclic groups Examples include groups that combine a cyclic hydrocarbon group and an aromatic hydrocarbon group. Here, alicyclic carbon Alkanediyl groups in combination with hydrogen groups and / or aromatic hydrocarbon groups are methylated It may contain a cyclic hydrocarbon group. In combination, chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic groups may be present. The aromatic hydrocarbon groups may be a combination of two or more types. Also, any of the groups may be R 1 , R 2 or R 3 It may also be bonded to the benzene ring to which it is attached. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -2 valent groups. Alicyclic hydrocarbon group -alkanediyl group-,-alkanediyl group-divalent alicyclic hydrocarbon group Examples include -alkanediyl groups- and -alkanediyl group-divalent alicyclic hydrocarbon groups-. . Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include, for example, a -2 valent group. Aromatic hydrocarbon group -alkanediyl group-,-alkanediyl group-divalent aromatic hydrocarbon group Examples include -alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, etc. . Groups that combine an alicyclic hydrocarbon group and an aromatic hydrocarbon group include: -aromatic hydrocarbons Base - alicyclic hydrocarbon group -, - alicyclic hydrocarbon group - aromatic hydrocarbon group -, - alicyclic hydrocarbon Examples include groups such as aromatic hydrocarbon groups and alicyclic hydrocarbon groups.

[0027] The -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, or -SO2-. If a substitution has occurred, the number of carbon atoms before the substitution shall be considered the total number of carbon atoms in the hydrocarbon group. The number can be one, or two or more. The -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, or -SO2-. The replaced group is the hydroxyl group (where the -CH2- contained in the methyl group is replaced by -O-). (The replaced group), carboxyl group (the -CH2-CH2- contained in the ethyl group is -O-CO- (A group that has been replaced by a thiol group) (The -CH2- contained in the methyl group is replaced by an -S-) (A split group), an alkoxy group (where -CH2- is at any position within the alkyl group, -O- (a group replaced by), an alkoxycarbonyl group (a group at any position contained within an alkyl group) A group in which CH2-CH2- is replaced by -O-CO-), an alkylcarbonyl group (alkyl (A group in which any -CH2- at any position within the group is replaced by -CO-), alkylcal Bonyloxy group (where any -CH2-CH2- in the alkyl group is -CO-O - A group replaced by -CH2 (a group that has been replaced by -CH2 at any position within the alkyl group) - (a group in which -S- is replaced), alkylsulfonyl group (any group contained within an alkyl group) (A group in which the -CH2- at the position is replaced by -SO2-), an oxy group (contained within the methylene group) A group in which -CH2- is replaced by -O-, a carbonyl group (contained within a methylene group) A group in which -CH2- is replaced by -CO-, a thio group (a group in which -CH2- is contained within a methylene group) However, the group replaced by -S-, the sulfonyl group (the -CH2- contained in the methylene group, (a group replaced by -SO2-), alkanediyloxy group (contained within the alkanediyl group) (A group in which -CH2- at any position is replaced by -O-), alkanediyloxycarb The nyl group (where any -CH2-CH2- is located within the alkanediyl group) is -O-CO- (a group replaced by), an alkanediylcarbonyl group (any group contained in the alkanediyl group) (A group in which the -CH2- at the position is replaced by -CO-), alkanediylcarbonyloxy The group (where any -CH2-CH2- in the alkanediyl group is placed in the -CO-O- group) (Replaced group), alkanediylsulfonyl group (any position contained in the alkanediyl group) (A group in which the -CH2- is replaced by -SO2-), an alkanediylthio group (alkanedi A cycloal group (a group in which any -CH2- at any position in the yl group is replaced by -S-), Coxy group, cycloalkylalkoxy group, alkoxycarbonyloxy group, aromatic carbonized water Elementary group - carbonyloxy group, aromatic hydrocarbon group - carbonyl group, aromatic hydrocarbon group - oxy Examples include the cy group, and groups that combine two or more of these groups. Examples of alkoxy groups include alkoxy groups having 1 to 17 carbon atoms, such as methoxy. Group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, o Cutyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, un Examples include decyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 11. More preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 It is ~3. Alkoxycarbonyl groups, alkylcarbonyl groups, and alkylcarbonyloxy groups are A carbonyl group or carbonyloxy group is bonded to the alkyl group or alkoxy group mentioned above. It represents the basis. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 17 carbon atoms. For example, methoxycarbonyl groups, ethoxycarbonyl groups, butoxycarbonyl groups, etc. Examples include alkylcarbonyl groups with 2 to 18 carbon atoms. Examples include acetyl groups, propionyl groups, and butyryl groups. Examples of carbonyloxy groups include alkylcarbonyloxy groups having 2 to 17 carbon atoms. Examples include acetyloxy groups, propionyloxy groups, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, and more preferably 2. ~6, more preferably 2~4, and even more preferably 2 or 3. The number of carbon atoms in the lucylcarbonyl group is preferably 2 to 12, more preferably 2 to 6. More preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the rubonyloxy group is preferably 2 to 11, more preferably 2 to 6. More preferably 2 to 4, and even more preferably 2 or 3. Examples of alkylthio groups include alkylthio groups having 1 to 17 carbon atoms, for example, methyl Luthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio O group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, un Examples include decylthio groups. The number of carbon atoms in the alkylthio group is preferably 1 to 11. More preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 It is ~3. Examples of alkylsulfonyl groups include alkylsulfonyl groups having 1 to 17 carbon atoms. For example, methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group Honyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2- Ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecyl Examples include ulfonyl groups. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11. more preferably 1 to 6, even more preferably 1 to 4, and even more preferably The answer is 1 to 3. Examples of alkanediyloxy groups include those with 1 to 17 carbon atoms. For example, methyleneoxy group, ethyleneoxy group, propanediyloxy group, butanedi Examples include yloxy groups and pentanediyloxy groups. The number is preferably 1 to 11, more preferably 1 to 6, and even more preferably 1 to It is 4, and more preferably 1 to 3. Alkanediyloxycarbonyl groups include those with 2 to 17 carbon atoms. Examples of carbonyl groups include methyleneoxycarbonyl groups and ethyleneoxycarbonyl groups. Examples include the nyl group, propanediyloxycarbonyl group, and butanediyloxycarbonyl group. It can be. As for the alkanediylcarbonyl group, alkanediylcarbonyl groups with 2 to 18 carbon atoms are available. Examples include the nyl group, such as the methylenecarbonyl group, ethylenecarbonyl group, and propanedi Examples include ylcarbonyl groups, butanediylcarbonyl groups, and pentanediylcarbonyl groups. Alkanediylcarbonyloxy groups include alkanediylcarbonyl groups with 2 to 17 carbon atoms. Examples of carbonyloxy groups include methylenecarbonyloxy groups and ethylenecarbonyloxy groups. Luoxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. For example, the number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11. , more preferably 2 to 6, even more preferably 2 to 4, even more It is 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12. More preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 Or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11. more preferably 2 to 6, even more preferably 2 to 4, and even more preferably It is either 2 or 3. Examples of alkanediylsulfonyl groups include alkanediylsulfonyl groups having 1 to 17 carbon atoms. Examples include methylene sulfonyl group, ethylene sulfonyl group, and propylene sulfonyl group. Examples include the nyl group. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11. Yes, more preferably 1 to 6, even more preferably 1 to 4, even more preferably The values ​​are 1 to 3. Examples of alkanediylthio groups include those with 1 to 17 carbon atoms. Examples include methylenethio groups, ethylenethio groups, and propylenethio groups. The number of carbon atoms in the diylthio group is preferably 1 to 11, more preferably 1 to 6. More preferably, the values ​​are 1 to 4, and even more preferably, 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups with 3 to 17 carbon atoms, for example Examples include cyclohexyloxy groups. Examples of cycloalkylalkoxy groups include carbon Examples include cycloalkylalkoxy groups with prime numbers 4 to 17, for example, cyclohexylmethyl Examples include alkoxycarbonyloxy groups, which have 2 to 16 carbon atoms. Examples include xycarbonyloxy groups, such as the butoxycarbonyloxy group. Aromatic hydrocarbon groups - carbonyloxy groups include aromatic hydrocarbons with 7 to 17 carbon atoms. Examples of carbonyloxy groups include the benzoyloxy group. Carbonyl groups include aromatic hydrocarbon groups with 7 to 17 carbon atoms. Examples of groups include the benzoyl group. Aromatic hydrocarbon group-oxy group Examples include aromatic hydrocarbon groups with 6 to 16 carbon atoms, such as phenyloxy. Examples include the C group.

[0028] Furthermore, the -CH2- contained in the alicyclic hydrocarbon group may be -O-, -CO-, -S-, or -S The groups that have been replaced by O2- include the following: The -O- or -CO- may be replaced with -S- or -SO2-. The bonding site is arbitrary. It can be positioned as follows: TIFF2026108698000026.tif47169A 1 , A 2 and A 3 The substituents that the hydrocarbon group may have include R 4 ~R 9 raised Similar groups to the geta group can be cited.

[0029] A 1 , A 2 and A 3Each of these is independently a hydrocarbon group having 2 to 20 carbon atoms (the hydrocarbon group The hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, It may be replaced with -S- or -SO2-. However, the hydrocarbon group may contain -CH At least one of the 2- is replaced by -O-, -CO-, -S-, or -SO2-. It is preferable that . ) Specifically, A 1 is, *-L 011 -X 01 -L 012 -in Yes, A 2 is, *-L 021 -X 02 -L 022 - and A 3 is, *-L 031 -X 0 3 -L 032 -is (X 01 , X 02 and X 03 These are -O- and -CO, respectively, independently. -, -S- or -SO2- represents L. 011 , L 012 , L 021 , L 022 , L 031 and L 032 Each of these independently represents a single bond or a hydrocarbon group having 1 to 19 carbon atoms. The hydrogen group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, - It may be replaced with CO-, -S-, or -SO2-. However, L 011 and L 012 and The total number of carbon atoms is 1 to 19, L 021 and L 022 The total number of carbon atoms is between 1 and 19. L 031 and L 032 The total number of carbon atoms is between 1 and 19. * is R 1 , R 2 or R 3 This represents the bonding site with the benzene ring to which it is bonded. ) is more preferable, A 1 is, *-X 01 -L 01 - or *-L 01 -X 01 - and A 2 is, *-X 02 -L 02 - or *-L 02 -X 02 - and A 3 is, *-X 03 -L 03 - or *-L 03 -X 03 - is (X 01 , X 02 and X 03 These are, independently, -O-, -CO-, -S-, or -SO-. Represents 2. 01 , L 02 and L 03 These are, independently, hydrocarbons with 1 to 19 carbon atoms. A group is represented, and the hydrocarbon group may have substituents, and the hydrocarbon group contains -CH2- * may be replaced with -O-, -CO-, -S-, or -SO2-. 1 , R 2 or R 3 This represents the bonding site with the benzene ring to which it is bonded. ) It is even more preferable that this is represented. L 011 , L 012 , L 021 , L 022 , L 031 , L 032 , L 01 , L 02 and L 03 A hydrocarbon group having 1 to 19 carbon atoms (the hydrocarbon group may have substituents, and the carbon The -CH2- contained in the hydrogen group is replaced by -O-, -CO-, -S-, or -SO2-. It may also be the case that the number of carbon atoms is in the range of 1 to 19. 1 , A2 and A 3 The basis mentioned above Similar bases can be cited. X 01 , X 02 and X 03 Each is preferable to be either -O- or -S- independently. It is more preferable that it be -O-.

[0030] A 1 S + The bond position to the benzene ring to which it is bonded is S + With respect to the bonding position, position o, m Either the first position or the p-position is acceptable. In particular, when m1 is 1, A 1 is, S + For the bond position It is preferable that the bond is at the p-position or m-position, and more preferably that it is at the p-position. i. If m1 is 2, A 1 Each of them is independent of S + With respect to the bonding position, one is at position O or It is bonded at the m position, preferably one bonded at the or or m position, and two bonded at the m position. It is more preferable that it is coupled to m1. 1 Each of them is independent of S + of With respect to the bonding site, two are bonded at the orthogonal or metamorphic position, and one is bonded at the paramorphic or metamorphic position. It is preferable that two are bonded at the m position and one at the p position. Preferred. If m1 is 4, A 1 Each of them is independent of S + With respect to the bonding position, the two It is preferably bonded at the O or m position, and two of them are bonded at the p or m position. It is more preferable that one atom is bonded at the O position, and both atoms are bonded at the M position. A 2 and A 3 S + The bond positions to the benzene ring to which each is bonded are, independently, S+ The conclusion The position can be any of the following: position 0, position m, or position p. In particular, when m2 and m3 are 1. If, A 2 and A 3 Each of them is independent of S + The binding site is at the p-position or m-position. It is preferable that m2 and m3 are bonded at the p position. If, A 2 and A 3 Each of them is independent of S + With respect to the bonding position, one is at position O or m. They are bonded, preferably one bonded at the ortho or m position, and two bonded at the m position. It is more preferable that m2 and m3 are 3. 2 and A 3 Each is independent S + Regarding the bonding site, two are bonded at the orthogonal or metagonal position, and one is bonded at the p- or metagonal position. It is preferable that they are bonded, with two bonded at the m position and one bonded at the p position. That is preferable. L 011 , L 012 , L 021 , L 022 , L 031 and L 032 Each is independent , single bond or hydrocarbon group having 1 to 18 carbon atoms (the -CH2- contained in the hydrocarbon group is -O It is preferable that it be replaced by -, -CO-, -S-, or -SO2-. A single bond or a hydrocarbon group having 1 to 14 carbon atoms (the -CH2- contained in the hydrocarbon group is - It may be replaced by O-, -CO-, -S-, or -SO2-. Preferably, a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms. Alternatively, a combination of a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms. The group (the -CH2- contained in the chain-type hydrocarbon group and the alicyclic hydrocarbon group is -O-, -C) It is even more preferable that it be replaced by O-, -S-, or -SO2-. , single bond or alkanediyl group having 1 to 6 carbon atoms (the alkanediyl group contains -CH2 - may be replaced with -O- or -CO-. ) is even more preferable. , single bond or alkanediyl group having 1 to 4 carbon atoms (the alkanediyl group contains -CH2 - may be replaced with -O- or -CO-. ) is even more preferable. A single bond or an alkanediyl group having 1 to 3 carbon atoms (the alkanediyl group contains -CH 2- may be replaced with -O- or -CO-. ) It is even more preferable that this is the case. In particular, single bonds, methylene groups, ethane-1,1-diyl groups, and propane-1,1-diyl groups. Iyl group, propane-2,2-diyl group, carbonyl group, carbonyloxy group, carbonyl Oxymethylene group, ethylene oxy group, methylenecarbonyloxymethylene group or ethylene It is preferably an oxycarbonyl group, and more preferably a single bond or a methylene group. It seems so. However, L 011 and L 012 The total number of carbon atoms is 1 to 19, L 021 and L 0 22 The total number of carbon atoms is 1 to 19, L 031 and L 032 The total number of carbon atoms is 1 to 1 The answer is 9. L 01 , L 02 and L 03 Each of these independently comprises a hydrocarbon group having 1 to 18 carbon atoms (the carbon The -CH2- contained in the hydrogen group is replaced by -O-, -CO-, -S-, or -SO2-. It is preferable that it be a hydrocarbon group having 1 to 14 carbon atoms (the hydrocarbon group may be Even if the contained -CH2- is replaced by -O-, -CO-, -S- or -SO2- It is good.) More preferably, a chain hydrocarbon group having 1 to 9 carbon atoms, and a group having 3 to 12 carbon atoms. Alicyclic hydrocarbon groups or chain hydrocarbon groups with 1 to 4 carbon atoms and alicyclic hydrocarbons with 3 to 10 carbon atoms A group that combines with a group (the chain hydrocarbon group and the alicyclic hydrocarbon group contain -CH2- (This may be replaced by -O-, -CO-, -S-, or -SO2-.) More preferably, an alkanediyl group having 1 to 6 carbon atoms (the alkanediyl group contains - CH2- may be replaced with -O- or -CO-. Furthermore, an alkanediyl group having 1 to 4 carbon atoms (the -CH2- contained in the alkanediyl group is It is even more preferable that it is replaced by -O- or -CO-, Alkanediyl groups having 1 to 3 carbon atoms (the -CH2- contained in the alkanediyl group is -O- Or it may be replaced with -CO-. ) is even more preferable. Among them, Methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2, 2-diyl group, carbonyl group, carbonyloxy group, carbonyloxymethylene group, eth A yleneoxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group It is preferable that it be present, and more preferably that it be a methylene group. m1 is preferably 0, 1, 2, 3 or 4, and is 0, 1, 2 or 3. More preferably, 0, 1 or 2, and even more preferably 0 or 1. A layer is preferable, and one is even more preferable. m2 is preferably 0, 1, 2, or 3, and more preferably 0, 1, or 2. It is more preferably 0 or 1, and even more preferably 0. m3 is preferably 0, 1, 2, or 3, and more preferably 0, 1, or 2. It is more preferably 0 or 1, and even more preferably 0. m4 is preferably 0, 1, 2, or 3, and more preferably 0, 1, or 2. It's nice. m5 is preferably 0, 1, 2, or 3, and more preferably 0, 1, or 2. It's nice. m6 is preferably 0, 1, 2, or 3, and more preferably 0, 1, or 2. It's nice. m7 is preferably 0, 1, 2, 3 or 4, and is 0, 1, 2 or 3. More preferably, 0, 1 or 2, and even more preferably 0 or 1 More preferable. m8 is preferably 0, 1, 2, or 3, and more preferably 0, 1, or 2. It is even more preferable that it be 0 or 1. m9 is preferably 0, 1, 2, or 3, and more preferably 0, 1, or 2. It is even more preferable that it be 0 or 1. R 4 , R 5 and R 6 These are, independently, halogen atoms and alkyl fluorides with 1 to 6 carbon atoms. A C1-C6 alkyl group (the -CH2- contained in the alkyl group is -O- or It may be replaced by -CO-.) Preferably, it is a halogen atom, with 1 carbon atom. ~4 fluorinated alkyl groups or alkyl groups having 1 to 4 carbon atoms (the alkyl group contains -CH 2- may be replaced with -O- or -CO-. ) More preferably, Fluorine atom, iodine atom, perfluoroalkyl group having 1 to 4 carbon atoms, or a perfluoroalkyl group having 1 to 4 carbon atoms The alkyl group (the -CH2- contained in the alkyl group is replaced by -O- or -CO-) It is also preferable that it contains a fluorine atom, an iodine atom, a hydroxyl group, and It is even more preferable that the group be a toxic group or a trifluoromethyl group. R 4 , R 5 and R 6 The bond positions to the benzene ring are, independently of each other, A 1 , A 2 and A 3 The bond position can be any of the or, m, or p positions. In particular, m4, m5 and If m6 is 1, R 4 , R 5 and R 6 Each of them is independently, A 1 , A 2 and A 3 bond position It is preferable that the bond is at the p-position or m-position, and preferably at the m-position. It is preferable. If m4, m5 and m6 are 2, R 4 , R 5 and R 6 Each of them operates independently. A 1 , A 2 and A 3 Regarding the bonding site, one atom is bonded at the O or M position, and the other is bonded at the P position. It is preferable that they are bonded at the m-position or the m-position, and more preferably that two are bonded at the m-position. i. If m4, m5 and m6 are 3, R 4 , R 5 and R 6 Each of them is independently, A 1 , A 2 and A 3 Regarding the bonding site, two are bonded at the ortho or m position, and one is bonded at the p or m position. It is preferable that they are bonded at the O position, with one bonded at the O position and two bonded at the M position. It is more preferable to do so. If m4, m5 and m6 are 4, R 4 , R 5 and R 6 Each Independently, A 1 , A 2 and A 3 The two are bonded at the O-position or the M-position relative to the bond site. Preferably, two are bonded at the p or m position, and two are bonded at the o position. It is more preferable that it is bonded at the m position. R 7 , R 8 and R 9 These are, independently, halogen atoms and alkyl fluorides with 1 to 6 carbon atoms. A C1-C6 alkyl group (the -CH2- contained in the alkyl group is -O- or It may be replaced by -CO-.) Preferably, it is a halogen atom, with 1 carbon atom. ~4 fluorinated alkyl groups or alkyl groups having 1 to 4 carbon atoms (the alkyl group contains -CH 2- may be replaced with -O- or -CO-. ) More preferably, Fluorine atom, iodine atom, perfluoroalkyl group having 1 to 4 carbon atoms, or a perfluoroalkyl group having 1 to 4 carbon atoms The alkyl group (the -CH2- contained in the alkyl group is replaced by -O- or -CO-) It is also preferable that it contains a fluorine atom, an iodine atom, and trifluoromethyl It is more preferable that the group be a hydroxyl group, a methoxy group, a methyl group, or a t-butyl group. It's nice. R 7 The bond position to the benzene ring is S + With respect to the bonding position, the o position, m position, p position This is also acceptable. In particular, when m7 is 1, R 7 is, S + With respect to the bonding position, p-position or m-position It is preferable that the bond is at the p position, and more preferably that the bond is at the p position. m7 is 2 In that case, R 7 Each of them is independent of S + For each bonded position, one bonded to the O-position or the M-position. Preferably, one atom is bonded at the p-position or m-position, and one atom is bonded at the m-position. It is more preferable that one is bonded at the p-position or m-position. If m7 is 3, R 7 That is, Each independently, S + Regarding the bonding site, two are bonded at the ortho or m position, and one is at the p Preferably, the atoms are bonded at the 11 or m position, with two being bonded at the m position and one at the p position. It is more preferable that they match. If m7 is 4, R 7 Each of them is independent of S + Binding In relation to the position, two are connected at the O or m position, and two are connected at the P or m position. Preferably, two are bonded at the m position, one at the o position, and one at the p position. It is more preferable that they are bonded. R 8 and R 9 The bond positions to the benzene ring are, independently of each other, S + For the bond position It can be any of the O, M, or P positions. In particular, if m8 and m9 are 1, R 8 and R 9 Each of them is independent of S + It is preferable that the bond is located at the p-position or m-position relative to the binding site. It is more preferable that they are bonded at the p position. When m8 and m9 are 2, R 8 and R 9 Each of them is independent of S + With respect to the bonding site, one atom is bonded at the O-position or the M-position. Preferably, one is bonded at the p-position or m-position, one is bonded at the m-position, and one is It is more preferable that the bonds are at the p or m position. 8 and R 9 Each of them is independent of S + With respect to the bonding position, the two are bonded at the O-position or the M-position. Preferably, one is bonded at the p-position or m-position, two are bonded at the m-position, and one is It is more preferable that the bond is at the p-position.

[0031] The cation (I) represented by formula (IC) is the catio represented by formula (IC-1). One example is n (which may be referred to as "cation (IC-1)" below). TIFF2026108698000027.tif59168[In formula (IC-1), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , X 4 m1, m2, m3, m4, m5, m6, m7, m8, and m9 have the same meaning as in equation (I). L 1 , L 2 and L 3 Each of these independently represents a hydrocarbon group having 1 to 18 carbon atoms, and the carbonization The hydrogen group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -C It may be replaced with O-, -S-, or -SO2-. X 1 , X 2 and X 3 These represent either -O- or -S- independently.

[0032] L 1 , L 2 and L 3 A hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group has substituents) Also, the -CH2- contained in the hydrocarbon group is often -O-, -CO-, -S- or -SO2 -It may be replaced by ).) For example, the number of carbon atoms is in the range of 1 to 18, A 1 , A 2 and A 3 The same groups as those listed above can be cited. X 1 It is preferable that it be -O-. X 2 It is preferable that it be -O-. X 3 It is preferable that it be -O-. X 1 The bond position to the benzene ring is S + With respect to the bonding position, the o position, m position, p position Any of these is acceptable. In particular, when m1 is 1, X 1 is, S + With respect to the bonding position, p-position or m-position It is preferable that the bond is at the p position, and more preferably that the bond is at the p position. In case X 1 Each of them is independent of S + For each bonded position, one bonded to the O-position or the M-position. Preferably, one atom is bonded at the O or m position, and two atoms are bonded at the m position. It is more preferable that m1 is 3, X 1 Each of them is independent of S + For the bond position It is preferable that two are bonded at the orthogonal or m-position, and one is bonded at the p-position or m-position. Furthermore, it is more preferable that two are bonded at the m position and one is bonded at the p position. If it is 4, X 1 Each of them is independent of S + With respect to the bonding position, the two are at the O position or the M position. They are bonded, preferably two bonded at the p-position or m-position, and two bonded at the o-position. It is more preferable that the two are bonded at the m-position. X2 and X 3 The bond position to the benzene ring is S + For the bond position, the O position, m position, p Any of the positions is acceptable. In particular, if m2 and m3 are 1, X 2 and X 3 These are each German Standing, S + It is preferable that the bond is located at the p-position or m-position relative to the bonding site, and is located at the p-position. It is more preferable that they match. If m2 and m3 are 2, X 2 and X 3 These are each German Standing, S + With respect to the bonding site, one is bonded at the o-position or m-position, and the other is bonded at the o-position or m-position. It is preferable that they are bonded at the m position, and more preferably that two are bonded at the m position. And if m3 is 3, X 2 and X 3 Each of them is independent of S + For the bond position, two Preferably, one of them is bonded at the O or m position, and one is bonded at the p or m position. It is more preferable that one atom is bonded at the m-position and the other at the p-position. L 1 , L 2 and L 3 Each of these is independently a hydrocarbon group having 1 to 16 carbon atoms (the hydrocarbon group The -CH2- contained in is replaced by -O-, -CO-, -S- or -SO2-. It is also preferable that it be a hydrocarbon group having 1 to 14 carbon atoms (contained in the hydrocarbon group) The -CH2- group may be replaced by -O-, -CO-, -S-, or -SO2-. ) is more preferably a chain-like hydrocarbon group having 1 to 9 carbon atoms, or an alicyclic group having 3 to 12 carbon atoms. A hydrocarbon group or a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms The combined group (the -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is - It may be replaced by O-, -CO-, -S-, or -SO2-. Preferably, an alkanediyl group having 1 to 6 carbon atoms (the alkanediyl group contains -CH2 - may be replaced with -O- or -CO-. ) is even more preferable. , an alkanediyl group having 1 to 4 carbon atoms (the -CH2- contained in the alkanediyl group is -O - or -CO- may be replaced.) It is even more preferable that the number of carbon atoms 1-3 Alkanediyl groups (the -CH2- contained in the alkanediyl group is -O- or - It is even more preferable that it is replaced by CO-. Among them, methyl ¹ group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2,2-diyl group Iyl group, carbonyl group, carbonyloxy group, carbonyloxymethylene group, ethyleneoxymethylene group The group is a xyl group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group. It is preferable that it be a methylene group, and more preferably a methylene group.

[0033] The cation (I) of salt (I) is represented by the following equations (Ic-1) to (Ic-104). Examples include cations represented by the following symbols. TIFF2026108698000028.tif243151

[0034] TIFF2026108698000029.tif241164

[0035] TIFF2026108698000030.tif249169

[0036] TIFF2026108698000031.tif247170

[0037] TIFF2026108698000032.tif235163

[0038] TIFF2026108698000033.tif213149

[0039] TIFF2026108698000034.tif249156

[0040] TIFF2026108698000035.tif230161

[0041] [Anion (I)] The anion (I) of the salt represented by equation (I) is AI - This is an organic anion represented by [formula]. AI - Examples of organic anions represented by these include sulfonic acid anions and sulfonylimido anions. Examples include ions, sulfonylmethide anions, and carboxylic acid anions. - Represented by The organic anion is preferably a sulfonate anion, represented by formula (IA). It is preferable that it be so. TIFF2026108698000036.tif2965[In formula (IA), Q 1 and Q 2 These are, independently, a hydrogen atom, a fluorine atom, and an alkyl group having 1 to 6 carbon atoms. Alternatively, it represents a perfluoroalkyl group having 1 to 6 carbon atoms. L 1 This represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH 2- may be replaced by -O- or -CO-, and the water contained in the saturated hydrocarbon group The elementary atoms may be substituted with fluorine atoms or hydroxyl groups. Y 1 This is a methyl group which may have substituents or a carbon 3- which may have substituents It represents 24 alicyclic hydrocarbon groups, and the -CH2- contained in the alicyclic hydrocarbon group is -O-, It may be replaced by -S-, -SO2-, or -CO-.

[0042] In formula (IA), the -CH2- contained in the saturated hydrocarbon group is replaced by -O- or -CO-. If substitution has occurred, the number of carbon atoms before substitution shall be considered the number of carbon atoms in the saturated hydrocarbon group. The -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, S-, -SO2-, or -CO-. If substitution has occurred, the number of carbon atoms before substitution shall be considered the number of carbon atoms in the alicyclic hydrocarbon group.

[0043] Q 1 and Q 2 Examples of perfluoroalkyl groups with 1 to 6 carbon atoms include trifluoromethyl Group, perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, pe Perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group Examples include perfluoropentyl groups and perfluorohexyl groups. Q 1 and Q 2 Examples of alkyl groups include methyl group, ethyl group, propyl group, and isopropyl group. Examples include the butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. It can be done. Q 1 and Q 2 This includes at least one fluorine atom or a perfluoroalkyl group. Preferably, at least one of them is a fluorine atom or a perfluoroalkyl group. More preferably, each is independently a fluorine atom or a trifluoromethyl group. Preferably, both are fluorine atoms, and even more preferably.

[0044] L 1Examples of divalent saturated hydrocarbon groups in this context include linear alkanediyl groups and branched alkanediyl groups. Examples include dipropyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and these groups It may also be a group formed by combining two or more of these types. Specifically, methylene group, ethylene group, propane-1,3-diyl group, butane-1,4 -diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1 ,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1 ,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, Tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane- 1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17- Linear alkanediyl groups such as diyl groups; Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl Branched alkanediyl groups such as the 2-methylbutane-1,4-diyl group; Cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexa Cycloalkanediyl groups such as n-1,4-diyl group and cyclooctane-1,5-diyl group A monocyclic, divalent, alicyclic saturated hydrocarbon group; norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane- Polycyclic divalent alicyclic saturated carbon such as 1,5-diyl group and adamantane-2,6-diyl group Examples include hydrogen groups. L 1The -CH2- contained in the divalent saturated hydrocarbon group represented by -O- or -CO- The substituted base can be represented, for example, by any of the following equations: (b1-1) to (b1-3). The bases are listed. Furthermore, the bases represented by formulas (b1-1) to (b1-3) and their specific examples are In the example bases represented by formulas (b1-4) to (b1-11), * and ** are bonding parts. The position is indicated by *, and -Y 1 This represents the connection point.

[0045] TIFF2026108698000037.tif26118[In formula (b1-1), L b2 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b3 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon The hydrogen atoms contained in the group may be substituted with fluorine atoms or hydroxyl groups, and the saturated The -CH2- group in the hydrocarbon group may be replaced by -O- or -CO-. However, L b2 and L b3 The total number of carbon atoms is 22 or less. In formula (b1-2), L b4 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b5 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon The hydrogen atoms contained in the group may be substituted with fluorine atoms or hydroxyl groups, and the saturated The -CH2- group in the hydrocarbon group may be replaced by -O- or -CO-. However, L b4 and L b5The total number of carbon atoms is 22 or less. In formula (b1-3), L b6 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms or hydroxyl groups. L b7 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon The hydrogen atoms contained in the group may be substituted with fluorine atoms or hydroxyl groups, and the saturated The -CH2- group in the hydrocarbon group may be replaced by -O- or -CO-. However, L b6 and L b7 The total number of carbon atoms is 23 or less.

[0046] In the groups represented by formulas (b1-1) to (b1-3), the saturated hydrocarbon group is included. If -CH2- is replaced by -O- or -CO-, the number of carbon atoms before replacement is... This is the number of carbon atoms in the hydrocarbon group. As for divalent saturated hydrocarbon groups, L 1 Examples include divalent saturated hydrocarbon groups. ru. L b2 Preferably, a single bond, a methylene group, -CH(CF3)-, -C(CF3)2- That is the case. L b3 This is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b4 The is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms, and the divalent saturated carbon The hydrogen atoms in the hydrogen group may be substituted with fluorine atoms, and more preferably with methylated The groups are -CH(CF3)- and -C(CF3)2-. L b5 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b6The saturated hydrocarbon group is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. The hydrogen atoms in the hydrocarbon group may be substituted with fluorine atoms. L b7 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated The hydrogen atoms in the hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. The -CH2- contained in the divalent saturated hydrocarbon group is replaced by -O- or -CO-. That's fine. L 1 The -CH2- contained in the divalent saturated hydrocarbon group represented by -O- or -CO- The replaced group is preferably the group represented by formula (b1-1) or formula (b1-3).

[0047] The base represented by equation (b1-1) is shown in equations (b1-4) to (b1-8), respectively. The basis for this is listed below. TIFF2026108698000038.tif48120[In formula (b1-4), L b8 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms or hydroxyl groups. In formula (b1-5), L b9 This represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and this divalent saturated hydrocarbon group The -CH2- group may be replaced by -O- or -CO-. L b10 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and the divalent saturated The hydrogen atoms in the hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. . However, L b9 and L b10 The total number of carbon atoms is 20 or less. In formula (b1-6), L b11 This represents a divalent saturated hydrocarbon group with 1 to 21 carbon atoms. L b12 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the divalent saturated The hydrogen atoms in the hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. . However, L b11 and L b12 The total number of carbon atoms is 21 or less. In formula (b1-7), L b13 This represents a divalent saturated hydrocarbon group with 1 to 19 carbon atoms. L b14 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the divalent saturated The -CH2- group in the hydrocarbon group may be replaced by -O- or -CO-. L b15 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the divalent saturated The hydrogen atoms in the hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. . However, L b13 ~L b15 The total number of carbon atoms is 19 or less. In formula (b1-8), L b16 This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the divalent saturated hydrocarbon group The -CH2- group contained in may be replaced by -O- or -CO-. L b17 This represents a divalent saturated hydrocarbon group with 1 to 18 carbon atoms. L b18 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and the divalent saturated The hydrogen atoms in the hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. . However, L b16 ~L b18 The total number of carbon atoms is 19 or less. L b8 This is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b9 Preferably, it is a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b10 It is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b11 Preferably, it is a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b12 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b13 This is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b14 This is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b15 It is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b16 This is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b17 This is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b18 It is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.

[0048] The base represented by equation (b1-3) is given by equations (b1-9) to (b1-11), respectively. The bases that can be represented are listed below. TIFF2026108698000039.tif23139[In formula (b1-9), L b19 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b20 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the saturated hydrocarbon The hydrogen atom contained in the group is a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. It may be substituted. The -CH2- contained in the alkylcarbonyloxy group is -O- Alternatively, it may be replaced with -CO-, and the hydrogen contained in the alkylcarbonyloxy group The atoms may be substituted with hydroxyl groups. However, L b19 and L b20 The total number of carbon atoms is 23 or less. In formula (b1-10), L b21 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b22 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b23 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the saturated hydrocarbon The hydrogen atom contained in the group is a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. It may be substituted. The -CH2- contained in the alkylcarbonyloxy group is -O- Alternatively, it may be replaced with -CO-, and the hydrogen contained in the alkylcarbonyloxy group The atoms may be substituted with hydroxyl groups. However, L b21 , L b22 and L b23 The total number of carbon atoms is 21 or less. In formula (b1-11), L b24 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the saturated hydrocarbon The hydrogen atoms in the group may be substituted with fluorine atoms. L b25 This represents a divalent saturated hydrocarbon group with 1 to 21 carbon atoms. L b26 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the saturated hydrocarbon The hydrogen atom contained in the group is a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. It may be substituted. The -CH2- contained in the alkylcarbonyloxy group is -O- Alternatively, it may be replaced with -CO-, and the hydrogen contained in the alkylcarbonyloxy group The atoms may be substituted with hydroxyl groups. However, L b24 , L b25 and L b26 The total number of carbon atoms is 21 or less. Furthermore, between the group represented by formula (b1-9) and the group represented by formula (b1-11), When a hydrogen atom in a hydrocarbon group is substituted with an alkylcarbonyloxy group, The number of carbon atoms before replacement is defined as the number of carbon atoms in the saturated hydrocarbon group. Examples of alkylcarbonyloxy groups include acetyloxy group, propionyloxy group, and b thyryloxy group, cyclohexylcarbonyloxy group, adamantylcarbonyloxy group These are some examples.

[0049] The following are examples of bases represented by formula (b1-4): TIFF2026108698000040.tif17153

[0050] The following are examples of bases represented by formula (b1-5): TIFF2026108698000041.tif69163

[0051] The following are examples of bases represented by formula (b1-6): TIFF2026108698000042.tif44148

[0052] The following are examples of bases represented by formula (b1-7): TIFF2026108698000043.tif62153

[0053] The following are examples of bases represented by formula (b1-8): TIFF2026108698000044.tif23146

[0054] The following are examples of bases represented by formula (b1-2): TIFF2026108698000045.tif31161

[0055] The following are examples of bases represented by formula (b1-9): TIFF2026108698000046.tif44136

[0056] The following are examples of bases represented by formula (b1-10): TIFF2026108698000047.tif92165

[0057] The following are examples of bases represented by formula (b1-11): TIFF2026108698000048.tif84164

[0058] Y 1 The -CH2- contained in the alicyclic hydrocarbon group represented by -O-, -S-, -SO2- Alternatively, examples of alicyclic hydrocarbon groups that have not been replaced by -CO- include formulas (Y1) to (Y1). Examples of bases include those represented by equations (Y11), (Y36) to (Y38). Y 1 The -CH2- contained in the alicyclic hydrocarbon group represented by -O-, -S-, -SO2- Or, if it is replaced by -CO-, the number of replacements may be one or two or more. The base is represented by equations (Y12) to (Y35) and (Y39) to (Y43). The following can be listed. The bases represented by equations (Y12) to (Y35) and (Y39) to (Y43) -O- or -CO- may be replaced with -S- or -SO2-. * is L 1 to This indicates a connection site. TIFF2026108698000049.tif87168

[0059] Y 1 The alicyclic hydrocarbon group represented by formula (Y1) to formula (Y20) is preferably formula (Y1) to formula (Y20), formula (Y26), Formula (Y27), Formula (Y30), Formula (Y31), Formula (Y39) ~ Formula (Y43) A group represented by any of the following, more preferably formula (Y11), formula (Y15), or formula (Y1 6), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula ( A group represented by formula (Y39), formula (Y40), formula (Y42), or formula (Y43), and more preferably The formulas are (Y11), (Y15), (Y20), (Y26), (Y27), and (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42), or formula (Y43 It is a base represented by ). Y 1 The alicyclic hydrocarbon group represented by formulas (Y28) to (Y35), (Y39), and ( In the case of a spiro ring having an oxygen atom, such as Y40, formula (Y42), or formula (Y43): Preferably, the alkanediyl group between the two oxygen atoms has one or more fluorine atoms. Furthermore, among the alkanediyl groups contained in the ketal structure, the methylene group adjacent to the oxygen atom. It is preferable that the base does not have fluorine atoms substituted on it.

[0060] Y 1The substituents of the methyl group represented by this symbol include halogen atoms, hydroxyl groups, and carbon 3- 16 alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, glycidyloxy groups, - (CH2) ja -CO-OR b1 Base or -(CH2) ja -O-CO-R b1 group (in the formula , R b1 These are alkyl groups having 1 to 16 carbon atoms, alicyclic hydrocarbon groups having 3 to 16 carbon atoms, and carbon atoms It represents groups with 6 to 18 aromatic hydrocarbon groups or combinations thereof. ja represents groups with 0 to 4 Represents any integer. The -CH2- contained in the alkyl group and the alicyclic hydrocarbon group is -O -, -SO2- or -CO- may be replaced, and the alkyl group, the alicyclic carbonized water The hydrogen atoms contained in the elementary group and the aromatic hydrocarbon group are replaced with hydroxyl groups or fluorine atoms. Examples include: (It may be replaced.) Y 1 The substituents of the alicyclic hydrocarbon group represented by this formula include halogen atoms, hydroxyl groups, and hydroxyl groups. A C1-C16 alkyl group which may be substituted with a droxy group (contains The -CH2- group may be replaced by -O- or -CO-. ) C3- to C16 Alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, and aralkyl groups with 7 to 21 carbon atoms. , glycidyloxy group, -(CH2) ja -CO-OR b1 Base or -(CH2) ja - O-CO-R b1 group (in the formula, R b1 This includes alkyl groups with 1 to 16 carbon atoms, and groups with 3 to 16 carbon atoms. This represents alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, or groups combining these. The integer ja represents one of 0 to 4. The alkyl group and the alicyclic hydrocarbon group contain The -CH2- that is formed may be replaced by -O-, -SO2- or -CO-, and the The hydrogen atoms contained in the hydroxyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group are hydroxyl Examples include: (which may be replaced by a fluorine group or a fluorine atom.)

[0061] Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. ru. Examples of alicyclic hydrocarbon groups include cyclopentyl groups, cyclohexyl groups, and methyl cyclohexyl groups. Chlohexyl group, dimethylcyclohexyl group, cycloheptyl group, cyclooctyl group, no Examples include the rubornyl group and the adamantyl group. Alicyclic hydrocarbon groups are chain hydrocarbon groups. They may also contain, for example, a methylcyclohexyl group, a dimethylcyclohexyl group, etc. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 12, more preferably 3 to 10. be. Examples of aromatic hydrocarbon groups include phenyl, naphthyl, anthryl, and biphenyl groups. Examples include aryl groups such as nyl groups and phenanthryl groups. Aromatic hydrocarbon groups are chain carbon It may have a hydrogenated group or an alicyclic hydrocarbon group, and a chain hydrocarbon group having 1 to 18 carbon atoms. Aromatic hydrocarbon groups (tolyl group, xylyl group, cumenyl group, mesityl group, p-methyl) Phenyl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethyl (e.g., 2-methyl-6-ethylphenyl group, 2-methyl-6-ethylphenyl group), and alicyclic carbons having 3 to 18 carbon atoms. Aromatic hydrocarbon groups having a hydrogenated group (p-cyclohexylphenyl group, p-adamantyl group) Examples include phenyl groups, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14. Furthermore, it is 6 to 10. Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, and b Tyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group , 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group Examples include the following. The number of carbon atoms in the alkyl group is preferably 1 to 12, and more preferably 1 It is ~6, and more preferably 1~4. Alkyl groups substituted with hydroxyl groups include hydroxymethyl groups and hydroxy Examples include hydroxyalkyl groups such as ethyl groups. Examples of aralkyl groups include benzyl group, phenethyl group, phenylpropyl group, and naphthyl group. Examples include tyl groups and naphthylethyl groups. The -CH2- group in the alkyl group is replaced by -O-, -SO2-, or -CO-, etc. The groups include alkoxy groups, alkylsulfonyl groups, alkoxycarbonyl groups, and alkyl groups. Examples include carbonyl groups, alkylcarbonyloxy groups, or combinations thereof. ru. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, and pentoxy groups. oxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group Examples include dodecyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 12. Yes, more preferably 1 to 6, and even more preferably 1 to 4. Examples of alkylsulfonyl groups include methylsulfonyl groups and ethylsulfonyl groups. Examples include propyl sulfonyl groups. The number of carbon atoms in the alkyl sulfonyl group is preferably 1. It is ~12, more preferably 1~6, and even more preferably 1~4. Examples of alkoxycarbonyl groups include methoxycarbonyl groups and ethoxycarbonyl groups. Examples include alkoxycarbonyl groups and butoxycarbonyl groups. The number of carbon atoms in the alkoxycarbonyl group is preferred. More preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. Examples include the following. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, and more preferably The value is between 2 and 6, and more preferably between 2 and 4. Examples of alkylcarbonyloxy groups include acetyloxy groups and propionyloxy groups. Examples include the cy group and the butyryloxy group. The number of carbon atoms in the alkylcarbonyloxy group is preferred. More preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of combined groups include groups that combine an alkoxy group and an alkyl group, and A group combining a lucoxy group and an alkoxy group, or a group combining an alkoxy group and an alkylcarbonyl group. Groups combining these, groups combining an alkoxy group and an alkylcarbonyloxy group, etc. It can be listed. Examples of groups combining an alkoxy group and an alkyl group include the methoxymethyl group. Alkoxyalkyl groups such as methoxyethyl group, ethoxyethyl group, and ethoxymethyl group For example, the number of carbon atoms in the alkoxyalkyl group is preferably 2 to 12, and more preferably k is 2 to 6, and more preferably 2 to 4. Groups that combine alkoxy groups include methoxymethoxy groups and metoxy groups. Alkoxyalkoxy groups such as xyethoxy group, ethoxymethoxy group, and ethoxyethoxy group Examples include the following. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 12, and more Preferably, it is 2 to 6, and more preferably 2 to 4. Examples of groups combining an alkoxy group and an alkylcarbonyl group include methoxyacetyl. Alco groups such as methoxypropionyl group, ethoxyacetyl group, and ethoxypropionyl group Examples include xyalkylcarbonyl groups. The number of carbon atoms in an alkoxyalkylcarbonyl group is... Preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5. be. Groups that combine an alkoxy group and an alkylcarbonyloxy group include methoxya Cetyloxy group, Methoxypropionyloxy group, Ethoxyacetyloxy group, Ethoxy Examples include alkoxyalkylcarbonyloxy groups such as propionyloxy groups. The number of carbon atoms in the coxyalkylcarbonyloxy group is preferably 3 to 13, and more preferably The value of k is between 3 and 7, and more preferably between 3 and 5. The -CH2- group in the alicyclic hydrocarbon group is replaced by -O-, -SO2-, or -CO-, etc. The basis for the division is expressed by equations (Y12) to (Y35) and (Y39) to (Y43). Examples include the bases.

[0062] Y 1 This is preferably an alicyclic hydrocarbon group having 3 to 24 carbon atoms, which may have substituents. More preferably, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, which may have substituents. More preferably, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents. More preferably, an adamantyl group having a substituent or a substituted A norbornyl group which may be an alicyclic hydrocarbon group, an adamantyl group or norbornyl The -CH2- group is replaced by -O-, -S-, -SO2-, or -CO-. These are also good. Specifically, the following are examples: TIFF2026108698000050.tif118161

[0063] TIFF2026108698000051.tif57161 Among them, Y 1 Preferably, an adamantyl group, a hydroxyadamantyl group, or an oxoa Damantyl group, norbornane lactone group or formula (Y42), formula (Y100) to formula (Y11 4) A group represented by formulas (Y134) to (Y139), and particularly preferably a hydrocyan group. sheadamantyl group, oxoadamantyl group, groups containing these, or formula (Y42), formula (Y1 It is a base represented by equations (Y114) and (Y134) to (Y139).

[0064] The anions represented by formula (IA) are given by formulas (IA-1) to (IA-63). The anion represented [Hereafter, depending on the formula number, it may be referred to as "anion (IA-1)," etc.] The following is preferred: formulas (IA-1) to (IA-4), formula (IA-9), formula (I- A-10), Equations (IA-24) to (IA-33), Equations (IA-36) to (I- A-40), an anion represented by any of the formulas (IA-47) to (IA-63) More preferable. TIFF2026108698000052.tif80143

[0065] TIFF2026108698000053.tif235154

[0066] TIFF2026108698000054.tif221155

[0067] TIFF2026108698000055.tif140165

[0068] Here R i2 ~R i7Each of these can be independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably It is either a methyl group or an ethyl group. i8 For example, chain hydrocarbons with 1 to 12 carbon atoms. Groups, preferably alkyl groups having 1 to 4 carbon atoms, alicyclic hydrocarbon groups having 5 to 12 carbon atoms, or the same Groups formed by combining these, more preferably methyl groups, ethyl groups, cyclohex groups It is a syl group or an adamantyl group. A41 These are single-bonded or C1-C4 alkandies. It is a group. 1 and Q 2 This expresses the same meaning as above. Specifically, the anion represented by formula (IA) is as described in Japanese Patent Publication No. 2010-204646. Anions listed in the official gazette are among those mentioned.

[0069] Preferably, the anion represented by formula (IA) is formula (Ia-1)~(Ia- The anions represented in 41) are listed below. TIFF2026108698000056.tif89154

[0070] TIFF2026108698000057.tif135144

[0071] TIFF2026108698000058.tif82167

[0072] TIFF2026108698000059.tif144165

[0073] In particular, equations (Ia-1) to (Ia-4), and equations (Ia-7) to (Ia-1 1) Equations (Ia-14) to (Ia-30) and (Ia-35) to (Ia- An anion represented by any of 41) is preferred.

[0074] AI -Examples of sulfonylimid anions represented by the formula include the following: TIFF2026108698000060.tif36136

[0075] Examples of sulfonylmethide anions include the following: TIFF2026108698000061.tif30128

[0076] Examples of carboxylic acid anions include the following: TIFF2026108698000062.tif45167

[0077] Specific examples of salt (I) include salts formed by arbitrarily combining the cations and anions mentioned above. It can be produced. Specific examples of salt (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the anion or cation described above. The "~" indicates that the salt (I) corresponds to either the anion (I) or cation (I). This shows that, for example, salt (I-1) is an anion represented by formula (Ia-1) and formula (Ic A salt consisting of the cation shown in (1), salt (I-2), is shown by formula (Ia-2). Salt (I-39), which consists of an anion and a cation represented by formula (Ic-1), is a salt of formula ( A salt consisting of the anion shown in formula Ia-1) and the cation shown in formula (Ic-2) This shows that the salt (I-3953) is formed from the anion shown by formula (Ia-39) and formula (I- The salt (I-3954) consisting of the cation shown in c-1) is given by formula (Ia-39) A salt consisting of an anion represented by formula (Ic-2) and a cation represented by formula (Ic-2), salt (I-40 57) is an anion represented by formula (Ia-40) and catio represented by formula (Ic-1). This indicates a salt composed of n and n. TIFF2026108698000063.tif4576 [Table 1] TIFF2026108698000065.tif229158 TIFF2026108698000066.tif151154

[0078] In particular, salt (I) is given by equations (Ia-1) to (Ia-4), equation (Ia-7) to ( Ia-11), equations (Ia-14) to (Ia-30) and equations (Ia-35) to equation Anions represented by any of (Ia-41) and equations (Ic-1) to (Ic-10) A salt combined with a cation represented by any of 4) is preferred, specifically a salt (I -1) ~ Salt (I-4), Salt (I-7) ~ Salt (I-11), Salt (I-14) ~ Salt (I-30 ), salt (I-35) ~ salt (I-38), salt (I-39) ~ salt (I-42), salt (I-45 )~Salt (I-49), Salt (I-52)~Salt (I-68), Salt (I-73)~Salt (I-76 ), salt (I-77) ~ salt (I-80), salt (I-83) ~ salt (I-87), salt (I-90 )~Salt (I-106), Salt (I-111)~Salt (I-114), Salt (I-115)~Salt ( I-118), Salt (I-121) ~ Salt (I-125), Salt (I-128) ~ Salt (I-14 4) Salt (I-149) ~ Salt (I-152), Salt (I-153) ~ Salt (I-156), Salt (I-159)~Salt (I-163), Salt (I-166)~Salt (I-182), Salt (I-1 87) ~Salt (I-190), Salt (I-191)~Salt (I-194), Salt (I-197)~ Salt (I-201), Salt (I-204) ~ Salt (I-220), Salt (I-225) ~ Salt (I- 228), Salt (I-229) ~ Salt (I-232), Salt (I-235) ~ Salt (I-239) , salt (I-242) ~ salt (I-258), salt (I-263) ~ salt (I-266), salt (I -267)~Salt (I-270), Salt (I-273)~Salt (I-277), Salt (I-280 )~Salt (I-296), Salt (I-301)~Salt (I-304), Salt (I-305)~Salt ( I-308), Salt (I-311) ~ Salt (I-315), Salt (I-318) ~ Salt (I-33 4) Salt (I-339) ~ Salt (I-342), Salt (I-343) ~ Salt (I-346), Salt (I-349)~Salt (I-353), Salt (I-356)~Salt (I-372), Salt (I-3 77) Salt (I-380), Salt (I-381), Salt (I-384), Salt (I-387) Salt (I-391), Salt (I-394) ~ Salt (I-410), Salt (I-415) ~ Salt (I- 418), Salt (I-419) ~ Salt (I-422), Salt (I-425) ~ Salt (I-429) , salt (I-432) ~ salt (I-448), salt (I-453) ~ salt (I-456), salt (I -457)~Salt (I-460), Salt (I-463)~Salt (I-467), Salt (I-470 )~Salt (I-486), Salt (I-491)~Salt (I-494), Salt (I-495)~Salt ( I-498), Salt (I-501) ~ Salt (I-505), Salt (I-508) ~ Salt (I-52 4) Salt (I-529) ~ Salt (I-532), Salt (I-533) ~ Salt (I-536), Salt (I-539)~Salt (I-543), Salt (I-546)~Salt (I-562), Salt (I-5 67) Salt (I-570), Salt (I-571), Salt (I-574), Salt (I-577) Salt (I-581), Salt (I-584) ~ Salt (I-600), Salt (I-605) ~ Salt (I- 608), Salt (I-609) ~ Salt (I-612), Salt (I-615) ~ Salt (I-619) , salt (I-622) ~ salt (I-638), salt (I-643) ~ salt (I-646), salt (I -647)~Salt (I-650), Salt (I-653)~Salt (I-657), Salt (I-660 )~Salt (I-676), Salt (I-681)~Salt (I-684), Salt (I-685)~Salt ( I-688), Salt (I-691) ~ Salt (I-695), Salt (I-698) ~ Salt (I-71 4) Salt (I-719) ~ Salt (I-722), Salt (I-723) ~ Salt (I-726), Salt (I-729)~Salt (I-733), Salt (I-736)~Salt (I-752), Salt (I-7 57) ~Salt (I-760), Salt (I-761)~Salt (I-764), Salt (I-767)~ Salt (I-771), Salt (I-774) ~ Salt (I-790), Salt (I-795) ~ Salt (I- 798), Salt (I-799) ~ Salt (I-802), Salt (I-805) ~ Salt (I-809) , salt (I-812) ~ salt (I-828), salt (I-833) ~ salt (I-836), salt (I -837)~Salt (I-840), Salt (I-843)~Salt (I-847), Salt (I-850 )~Salt (I-866), Salt (I-871)~Salt (I-874), Salt (I-875)~Salt ( I-878), Salt (I-881) ~ Salt (I-885), Salt (I-888) ~ Salt (I-90 4) Salt (I-909) ~ Salt (I-912), Salt (I-913) ~ Salt (I-916), Salt (I-919)~Salt (I-923), Salt (I-926)~Salt (I-942), Salt (I-9 47) Salt (I-950), Salt (I-951), Salt (I-954), Salt (I-957) Salt (I-961), Salt (I-964) ~ Salt (I-980), Salt (I-985) ~ Salt (I- 988), Salt (I-989) ~ Salt (I-992), Salt (I-995) ~ Salt (I-999) , salt (I-1002) ~ salt (I-1018), salt (I-1023) ~ salt (I-1026) , salt (I-1027) ~ salt (I-1030), salt (I-1033) ~ salt (I-1037) , salt (I-1040) ~ salt (I-1056), salt (I-1061) ~ salt (I-1064) , salt (I-1065) ~ salt (I-1068), salt (I-1071) ~ salt (I-1075) , salt (I-1078) ~ salt (I-1094), salt (I-1099) ~ salt (I-1102) , salt (I-1103) ~ salt (I-1106), salt (I-1109) ~ salt (I-1113) , salt (I-1116) ~ salt (I-1132), salt (I-1137) ~ salt (I-1140) , salt (I-1141) ~ salt (I-1144), salt (I-1147) ~ salt (I-1151) , salt (I-1154) ~ salt (I-1170), salt (I-1175) ~ salt (I-1178) , salt (I-1179) ~ salt (I-1182), salt (I-1185) ~ salt (I-1189) , salt (I-1192) ~ salt (I-1208), salt (I-1213) ~ salt (I-1216) , salt (I-1217) ~ salt (I-1220), salt (I-1223) ~ salt (I-1227) , salt (I-1230) ~ salt (I-1246), salt (I-1251) ~ salt (I-1254) , salt (I-1255) ~ salt (I-1258), salt (I-1261) ~ salt (I-1265) , salt (I-1268) ~ salt (I-1284), salt (I-1289) ~ salt (I-1292) , salt (I-1293) ~ salt (I-1296), salt (I-1299) ~ salt (I-1303) , salt (I-1306) ~ salt (I-1322), salt (I-1327) ~ salt (I-1330) , salt (I-1331) ~ salt (I-1334), salt (I-1337) ~ salt (I-1341) Salt (I-1344) ~ Salt (I-1360), Salt (I-1365) ~ Salt (I-1368) , salt (I-1369) ~ salt (I-1372), salt (I-1375) ~ salt (I-1379) , salt (I-1382) ~ salt (I-1398), salt (I-1403) ~ salt (I-1406) , salt (I-1407) ~ salt (I-1410), salt (I-1413) ~ salt (I-1417) , salt (I-1420) ~ salt (I-1436), salt (I-1441) ~ salt (I-1444) , salt (I-1445) ~ salt (I-1448), salt (I-1451) ~ salt (I-1455) , salt (I-1458) ~ salt (I-1474), salt (I-1479) ~ salt (I-1482) , salt (I-1483) ~ salt (I-1486), salt (I-1489) ~ salt (I-1493) Salt (I-1496) ~ Salt (I-1512), Salt (I-1517) ~ Salt (I-1520) , salt (I-1521) ~ salt (I-1524), salt (I-1527) ~ salt (I-1531) , salt (I-1534) ~ salt (I-1550), salt (I-1555) ~ salt (I-1558) , salt (I-1559) ~ salt (I-1562), salt (I-1565) ~ salt (I-1569) , salt (I-1572) ~ salt (I-1588), salt (I-1593) ~ salt (I-1596) Salt (I-1597) ~ Salt (I-1600), Salt (I-1603) ~ Salt (I-1607) , salt (I-1610) ~ salt (I-1626), salt (I-1631) ~ salt (I-1634) , salt (I-1635) ~ salt (I-1638), salt (I-1641) ~ salt (I-1645) , salt (I-1648) ~ salt (I-1664), salt (I-1669) ~ salt (I-1672) , salt (I-1673) ~ salt (I-1676), salt (I-1679) ~ salt (I-1683) Salt (I-1686) ~ Salt (I-1702), Salt (I-1707) ~ Salt (I-1710) , salt (I-1711) ~ salt (I-1714), salt (I-1717) ~ salt (I-1721) , salt (I-1724) ~ salt (I-1740), salt (I-1745) ~ salt (I-1748) , salt (I-1749) ~ salt (I-1752), salt (I-1755) ~ salt (I-1759) , salt (I-1762) ~ salt (I-1778), salt (I-1783) ~ salt (I-1786) , salt (I-1787) ~ salt (I-1790), salt (I-1793) ~ salt (I-1797) Salt (I-1800) ~ Salt (I-1816), Salt (I-1821) ~ Salt (I-1824) , salt (I-1825) ~ salt (I-1828), salt (I-1831) ~ salt (I-1835) Salt (I-1838) ~ Salt (I-1854), Salt (I-1859) ~ Salt (I-1862) Salt (I-1863) ~ Salt (I-1866), Salt (I-1869) ~ Salt (I-1873) Salt (I-1876) ~ Salt (I-1892), Salt (I-1897) ~ Salt (I-1900) Salt (I-1901) ~ Salt (I-1904), Salt (I-1907) ~ Salt (I-1911) Salt (I-1914) ~ Salt (I-1930), Salt (I-1935) ~ Salt (I-1938) Salt (I-1939) ~ Salt (I-1942), Salt (I-1945) ~ Salt (I-1949) Salt (I-1952) ~ Salt (I-1968), Salt (I-1973) ~ Salt (I-1976) Salt (I-1977) ~ Salt (I-1980), Salt (I-1983) ~ Salt (I-1987) Salt (I-1990) ~ Salt (I-2006), Salt (I-2011) ~ Salt (I-2014) Salt (I-2015) ~ Salt (I-2018), Salt (I-2021) ~ Salt (I-2025) , salt (I-2028) ~ salt (I-2044), salt (I-2049) ~ salt (I-2052) , salt (I-2053) ~ salt (I-2056), salt (I-2059) ~ salt (I-2063) , salt (I-2066) ~ salt (I-2082), salt (I-2087) ~ salt (I-2090) , salt (I-2091) ~ salt (I-2094), salt (I-2097) ~ salt (I-2101) Salt (I-2104) ~ Salt (I-2120), Salt (I-2125) ~ Salt (I-2128) , salt (I-2129) ~ salt (I-2132), salt (I-2135) ~ salt (I-2139) , salt (I-2142) ~ salt (I-2158), salt (I-2163) ~ salt (I-2166) , salt (I-2167) ~ salt (I-2170), salt (I-2173) ~ salt (I-2177) Salt (I-2180) ~ Salt (I-2196), Salt (I-2201) ~ Salt (I-2204) , salt (I-2205) ~ salt (I-2208), salt (I-2211) ~ salt (I-2215) , salt (I-2218) ~ salt (I-2234), salt (I-2239) ~ salt (I-2242) , salt (I-2243) ~ salt (I-2246), salt (I-2249) ~ salt (I-2253) Salt (I-2256) ~ Salt (I-2272), Salt (I-2277) ~ Salt (I-2280) , salt (I-2281) ~ salt (I-2284), salt (I-2287) ~ salt (I-2291) Salt (I-2294) ~ Salt (I-2310), Salt (I-2315) ~ Salt (I-2318) , salt (I-2319) ~ salt (I-2322), salt (I-2325) ~ salt (I-2329) , salt (I-2332) ~ salt (I-2348), salt (I-2353) ~ salt (I-2356) , salt (I-2357) ~ salt (I-2360), salt (I-2363) ~ salt (I-2367) , salt (I-2370) ~ salt (I-2386), salt (I-2391) ~ salt (I-2394) , salt (I-2395) ~ salt (I-2398), salt (I-2401) ~ salt (I-2405) , salt (I-2408) ~ salt (I-2424), salt (I-2429) ~ salt (I-2432) , salt (I-2433) ~ salt (I-2436), salt (I-2439) ~ salt (I-2443) , salt (I-2446) ~ salt (I-2462), salt (I-2467) ~ salt (I-2470) , Salt (I-2471) ~ Salt (I-2474), Salt (I-2477) ~ Salt (I-2481), Salt (I-2484) ~ Salt (I-2500), Salt (I-2505) ~ Salt (I-2508), Salt (I-2509) ~ Salt (I-2512), Salt (I-2515) ~ Salt (I-2519), Salt (I-2522) ~ Salt (I-2538), Salt (I-2543) ~ Salt (I-2546), Salt (I-2547) ~ Salt (I-2550), Salt (I-2553) ~ Salt (I-2557), Salt (I-2560) ~ Salt (I-2576), Salt (I-2581) ~ Salt (I-2584), Salt (I-2585) ~ Salt (I-2588), Salt (I-2591) ~ Salt (I-2595), Salt (I-2598) ~ Salt (I-2614), Salt (I-2619) ~ Salt (I-2622), Salt (I-2623) ~ Salt (I-2626), Salt (I-2629) ~ Salt (I-2633), Salt (I-2636) ~ Salt (I-2652), Salt (I-2657) ~ Salt (I-2660), Salt (I-2661) ~ Salt (I-2664), Salt (I-2667) ~ Salt (I-2671), Salt (I-2674) ~ Salt (I-2690), Salt (I-2695) ~ Salt (I-2698), Salt (I-2699) ~ Salt (I-2702), Salt (I-2705) ~ Salt (I-2709), Salt (I-2712) ~ Salt (I-2728), Salt (I-2733) ~ Salt (I-2736), Salt (I-2737) ~ Salt (I-2740), Salt (I-2743) ~ Salt (I-2747), Salt (I-2750) ~ Salt (I-2766), Salt (I-2771) ~ Salt (I-2774), Salt (I-2775) ~ Salt (I-2778), Salt (I-2781) ~ Salt (I-2785), Salt (I-2788) ~ Salt (I-2804), Salt (I-2809) ~ Salt (I-2812), Salt (I-2813) ~ Salt (I-2816), Salt (I-2819) ~ Salt (I-2823), Salt (I-2826) ~ Salt (I-2842), Salt (I-2847) ~ Salt (I-2850), Salt (I-2851) ~ Salt (I-2854), Salt (I-2857) ~ Salt (I-2861), Salt (I-2864) ~ Salt (I-2880), Salt (I-2885) ~ Salt (I-2888), Salt (I-2889) ~ Salt (I-2892), Salt (I-2895) ~ Salt (I-2899), Salt (I-2902) ~ Salt (I-2918), Salt (I-2923) ~ Salt (I-2926), Salt (I-2927) ~ Salt (I-2930), Salt (I-2933) ~ Salt (I-2937), Salt (I-2940) ~ Salt (I-2956), Salt (I-2961) ~ Salt (I-2964), Salt (I-2965) ~ Salt (I-2968), Salt (I-2971) ~ Salt (I-2975), Salt (I-2978) ~ Salt (I-2994), Salt (I-2999) ~ Salt (I-3002), Salt (I-3003) ~ Salt (I-3006), Salt (I-3009) ~ Salt (I-3013), Salt (I-3016) ~ Salt (I-3032), Salt (I-3037) ~ Salt (I-3040), Salt (I-3041) ~ Salt (I-3044), Salt (I-3047) ~ Salt (I-3051), Salt (I-3054) ~ Salt (I-3070), Salt (I-3075) ~ Salt (I-3078), Salt (I-3079) ~ Salt (I-3082), Salt (I-3085) ~ Salt (I-3089), Salt (I-3092) ~ Salt (I-3108), Salt (I-3113) ~ Salt (I-3116), Salt (I-3117) ~ Salt (I-3120), Salt (I-3123) ~ Salt (I-3127), Salt (I-3130) ~ Salt (I-3146), Salt (I-3151) ~ Salt (I-3154), Salt (I-3155) ~ Salt (I-3158), Salt (I-3161) ~ Salt (I-3165), Salt (I-3168) ~ Salt (I-3184), Salt (I-3189) ~ Salt (I-3192), Salt (I-3193) ~ Salt (I-3196), Salt (I-3199) ~ Salt (I-3203), Salt (I-3206) ~ Salt (I-3222), Salt (I-3227) ~ Salt (I-3230), Salt (I-3231) ~ Salt (I-3234), Salt (I-3237) ~ Salt (I-3241), Salt (I-3244) ~ Salt (I-3260), Salt (I-3265) ~ Salt (I-3268), Salt (I-3269) ~ Salt (I-3272), Salt (I-3275) ~ Salt (I-3279), Salt (I-3282) ~ Salt (I-3298), Salt (I-3303) ~ Salt (I-3306), Salt (I-3307) ~ Salt (I-3310), Salt (I-3313) ~ Salt (I-3317), Salt (I-3320) ~ Salt (I-3336), Salt (I-3341) ~ Salt (I-3344), Salt (I-3345) ~ Salt (I-3348), Salt (I-3351) ~ Salt (I-3355), Salt (I-3358) ~ Salt (I-3374), Salt (I-3379) ~ Salt (I-3382), Salt (I-3383) ~ Salt (I-3386), Salt (I-3389) ~ Salt (I-3393), Salt (I-3396) ~ Salt (I-3412), Salt (I-3417) ~ Salt (I-3420), Salt (I-3421) ~ Salt (I-3424), Salt (I-3427) ~ Salt (I-3431), Salt (I-3434) ~ Salt (I-3450), Salt (I-3455) ~ Salt (I-3458), Salt (I-3459) ~ Salt (I-3462), Salt (I-3465) ~ Salt (I-3469), Salt (I-3472) ~ Salt (I-3488), Salt (I-3493) ~ Salt (I-3496), Salt (I-3497) ~ Salt (I-3500), Salt (I-3503) ~ Salt (I-3507), Salt (I-3510) ~ Salt (I-3526), ​​Salt (I-3531) ~ Salt (I-3534), Salt (I-3535) ~ Salt (I-3538), Salt (I-3541) ~ Salt (I-3545), Salt (I-3549) ~ Salt (I-3564), Salt (I-3569) ~ Salt (I-3572), Salt (I-3573) ~ Salt (I-3576), Salt (I-3579) ~ Salt (I-3583), Salt (I-3586) ~ Salt (I-3602), Salt (I-3607) ~ Salt (I-3610), Salt (I-3611) ~ Salt (I-3614), Salt (I-3617) ~ Salt (I-3621), Salt (I-3624) ~ Salt (I-3640), Salt (I-3645) ~ Salt (I-3648), Salt (I-3649) ~ Salt (I-3652), Salt (I-3655) ~ Salt (I-3659), Salt (I-3662) ~ Salt (I-3678), Salt (I-3683) ~ Salt (I-3686), Salt (I-3687) ~ Salt (I-3690), Salt (I-3693) ~ Salt (I-3697), Salt (I-3700) ~ Salt (I-3716), Salt (I-3721) ~ Salt (I-3724), Salt (I-3725) ~ Salt (I-3728), Salt (I-3731) ~ Salt (I-3735), Salt (I-3738) ~ Salt (I-3754), Salt (I-3759) ~ Salt (I-3762), Salt (I-3763) ~ Salt (I-3766), Salt (I-3769) ~ Salt (I-3773), Salt (I-3776) ~ Salt (I-3792), Salt (I-3797) ~ Salt (I-3800), Salt (I-3801) ~ Salt (I-3804), Salt (I-3807) ~ Salt (I-3811), Salt (I-3814) ~ Salt (I-3830), Salt (I-3835) ~ Salt (I-3838), Salt (I-3839) ~ Salt (I-3842), Salt (I-3845) ~ Salt (I-3849), Salt (I-3852) ~ Salt (I-3868), Salt (I-3873) ~ Salt (I-3876), Salt (I-3877) ~ Salt (I-3880), Salt (I-3883) ~ Salt (I-3887), Salt (I-3890) ~ Salt (I-3906), Salt (I-3911) ~ Salt (I-3914), Salt (I-3915) ~ Salt (I-3918), Salt (I-3921) ~ Salt (I-3925), Salt (I-3928) ~ Salt (I-3944), Salt (I-3949) ~ Salt (I-3952), It is preferable that the salt is (I-3953) to (I-4264).

[0079] <Method for producing salt (I)> Salt (I) is a mixture of the salt represented by formula (Ia) and the salt represented by formula (Ib) in a solvent. It can be manufactured by reaction. TIFF2026108698000067.tif85164[In the formula, all signs have the same meaning as above. R A , R B and R C Each These independently represent hydrocarbon groups with 1 to 12 carbon atoms, or R A , R B and R C together It may form an aromatic ring. D This represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. ] Examples of solvents include chloroform, monochlorobenzene, acetonitrile, and water. It can be done. The reaction temperature is typically between 15°C and 80°C, and the reaction time is typically between 0.5 and 24 hours.

[0080] Examples of salts represented by formula (Ib) include the salts represented by the following formulas. This refers to the method described in Japanese Patent Publication No. 2011-116747 and Japanese Patent Publication No. 2016-047815. It can be easily manufactured by a method similar to that of the law, or by a known manufacturing method. TIFF2026108698000068.tif221162

[0081] In salt (Ia), R 1 , R 2 and R 3 However, *-OL 10 -CO-OR 10 in A certain salt (the salt represented by formula (I-a1)) is a salt represented by formula (Ic) and formula (Id) It can be produced by reacting the represented compound with a solvent in the presence of a base catalyst. Cut. TIFF2026108698000069.tif78170[In this formula, all symbols have the same meaning as defined above.] Examples of bases include potassium carbonate, potassium iodide, pyridine, and triethylamine. It can be done. The solvents include chloroform, monochlorobenzene, dimethylformamide, and acetonamide. Examples include tolyl, ethyl acetate, and water. The reaction temperature is typically between 15°C and 80°C, and the reaction time is typically between 0.5 and 24 hours.

[0082] Examples of compounds represented by formula (Id) include the following compounds, and It can be easily obtained from the market and can also be easily manufactured using known methods. . TIFF2026108698000070.tif15164

[0083] The salt represented by formula (Ic) is the same as the salt represented by formula (Ie) and the salt represented by formula (I-f1). The compound represented by formula (I-f2) and the compound represented by formula (I-f3) It can be produced by reacting the product in a solvent in the presence of a catalyst. TIFF2026108698000071.tif91162[In this formula, all symbols have the same meaning as defined above.] Potassium carbonate and sodium hydride are examples of catalysts. Examples of solvents include chloroform, monochlorobenzene, acetonitrile, and water. It can be done. The reaction temperature is typically between 15°C and 100°C, and the reaction time is typically between 0.5 and 24 hours. .

[0084] Examples of salts represented by formula (Ie) include those represented by the following formula, which are readily available on the market. It can be obtained. TIFF2026108698000072.tif62160

[0085] Compound represented by formula (I-f1), compound represented by formula (I-f2), and compound represented by formula (I-f3 Examples of compounds represented by ) include the following compounds, which are readily available from the market. It is possible. TIFF2026108698000073.tif58164

[0086] The salt represented by formula (Ic) is the same as the salt represented by formula (Ie) and the salt represented by formula (I-f4). The compound represented by formula (I-f5) and the compound represented by formula (I-f6) It can also be produced by reacting the product in a solvent in the presence of potassium carbonate, followed by acid treatment. can. TIFF2026108698000074.tif153162[In the formula, all signs have the same meaning as above. R ac This represents an acid-unstable group. Examples of solvents include chloroform, monochlorobenzene, acetonitrile, and water. It can be done. The reaction temperature is typically between 15°C and 100°C, and the reaction time is typically between 0.5 and 24 hours. . Examples of acids include p-toluenesulfonic acid and hydrochloric acid.

[0087] Compounds represented by formula (I-f4), compounds represented by formula (I-f5), and compounds represented by formula (I-f6 Examples of compounds represented by ) include the following compounds, which are readily available from the market. It is possible. TIFF2026108698000075.tif62157

[0088] In salt (Ia), R 1 , R 2 and R 3 However, *-OR 10 The salt is (Equation (Ia 2) The salt represented by formula (Ic) and the compound represented by formula (I-d2) It can be produced by reacting it in a solvent in the presence of a base catalyst. TIFF2026108698000076.tif82167[In this formula, all symbols have the same meaning as defined above.] Examples of bases include sodium hydroxide and potassium hydroxide. The solvents include chloroform, monochlorobenzene, dimethylformamide, and acetonamide. Examples include tolyl, ethyl acetate, and water. The reaction temperature is typically between 15°C and 80°C, and the reaction time is typically between 0.5 and 24 hours.

[0089] Examples of compounds represented by formula (I-d2) include the following compounds: It can be easily obtained from the market and can also be easily manufactured using known methods. ru. TIFF2026108698000077.tif17147

[0090] In salt (Ia), R 1 , R 2 and R 3 However, *-O-CO-OR 10 salt ( The salt represented by formula (I-a3) is the same as the salt represented by formula (Ic) and the salt represented by formula (I-d2). It is produced by reacting a compound with carbonyldiimidazole in a solvent. It is possible. TIFF2026108698000078.tif81167[In this formula, all symbols have the same meaning as defined above.] The solvents include chloroform, monochlorobenzene, dimethylformamide, and acetonamide. Examples include tolyl, ethyl acetate, and water. The reaction temperature is typically between 15°C and 80°C, and the reaction time is typically between 0.5 and 24 hours.

[0091] <Acid Generator> The acid generator of the present invention is an acid generator containing salt(I). It contains one type of salt(I). It may contain two or more types of salt (I). The acid generator of the present invention, in addition to salt (I), contains an acid generator known in the resist field (hereinafter referred to as "acid generator"). It may contain a herbal agent (B), which may be used alone. You may use one type, or you may use two or more types in combination.

[0092] The acid generator (B) may be either nonionic or ionic. As herbal preparations, sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate ester) are used. Sulfonate, oximesulfonate, N-sulfonyloxiimide, sulfonyloxyke Ton, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, keto Examples include sulfones, sulfonyl diazomethanes, etc. Ionic acid generators include onions. Onium salts containing um cations (e.g., diazonium salts, phosphonium salts, sulfonium salts) Typical examples include salts (iodonium salts). An anion of anium salts is aniodonium sulfonate. Examples include sulfonylimide anions, sulfonylmethide anions, and others.

[0093] As for the acid generating agent (B), see Japanese Patent Publication No. 63-26653, Japanese Patent Publication No. 55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452 Japanese Patent Publication No. 62-153853, Japanese Patent Publication No. 63-146029, U.S. Patent No. 3,779, Patent No. 778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. Compounds that generate acid when exposed to radiation, as described in publications No. 126, 712, etc., can be used. Compounds manufactured by known methods may also be used. The acid generator (B) may consist of two or more types. They may be used in combination.

[0094] The acid generator (B) is preferably a salt represented by formula (B1) (hereinafter referred to as "acid generator (B1)") This is sometimes the case. However, this excludes salt (I). TIFF2026108698000079.tif2962[In formula (B1), Q b1 and Q b2 These are, independently, a hydrogen atom, a fluorine atom, and an alkyl group with 1 to 6 carbon atoms. This represents a perfluoroalkyl group or a perfluoroalkyl group having 1 to 6 carbon atoms. L b1 This represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and this divalent saturated hydrocarbon group The -CH2- contained may be replaced by -O- or -CO-, and the divalent saturated carbon The hydrogen atoms in the hydrogen group may be substituted with fluorine atoms or hydroxyl groups. Y is a methyl group which may have substituents or a C3-C2 group which may have substituents 4 represents an alicyclic hydrocarbon group, and the -CH2- contained in the alicyclic hydrocarbon group is -O-, - It may be replaced by S-, -SO2-, or -CO-. Z1 + This represents an organic cation.

[0095] Q in equation (B1) b1 Q b2 , L b1 And Y are, respectively, in the above-mentioned equation (IA). ruQ 1 Q 2 , L 1 and Y 1 Similar examples can be given. The sulfonic acid anion in formula (B1) is the anion represented by formula (IA) and Similar examples can be given.

[0096] Z1 + Examples of organic cations include organic onium cations and organic sulfonium cations. Organic iodium cation, organic ammonium cation, benzothiazolium cation and Examples include organic phosphonium cations. Among these, organic sulfonium cationic cations are particularly noteworthy. N and organic iodonium cations are preferred, and aryl sulfonium cations are more preferred. Specifically, a cation represented by any of formulas (b2-1) to (b2-4) ( Below, depending on the formula number, it may be referred to as "cation (b2-1)," etc. ) is an example.

[0097] In formulas (b2-1) to (b2-4) of TIFF2026108698000080.tif46170, R b4 ~R b6 These are, independently, chain hydrocarbon groups with 1 to 30 carbon atoms and groups with 3 to 36 carbon atoms. This term represents an alicyclic hydrocarbon group or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and is contained in the chain-like hydrocarbon group. The hydrogen atoms present are found in hydroxyl groups, alkoxy groups with 1 to 12 carbon atoms, and lipid groups with 3 to 12 carbon atoms. The alicyclic hydrocarbon group may be substituted with a cyclic hydrocarbon group or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the hydrocarbon group are halogen atoms and aliphatic hydrocarbon groups with 1 to 18 carbon atoms. They may also be substituted with an alkylcarbonyl group or glycidyloxy group having 2 to 4 carbon atoms. The hydrogen atoms contained in the aromatic hydrocarbon group are halogen atoms, hydroxyl groups, and C1- 18 aliphatic hydrocarbon groups, C1-C12 alkyl fluorides, or C1-C12 It may be substituted with a coxy group. R b4 and R b5 These atoms bond with each other and, together with the sulfur atoms they bond to, form a ring. Even if the -CH2- contained in the ring is replaced by -O-, -S-, or -CO- good. R b7 and R b8 These are, independently, a halogen atom, a hydroxyl group, and a lipid with 1 to 12 carbon atoms. Alkaline hydrocarbon groups, C1-C12 alkyl fluorides, or C1-C12 alkoxy groups It represents. m2 and n2 each independently represent an integer between 0 and 5. When m2 is 2 or more, multiple R b7 They may be the same or different, and when n2 is 2 or more, multiple Number R b8 They may be the same or different. R b9 and R b10 Each of these is independently a chain-like hydrocarbon group having 1 to 36 carbon atoms or a group having 3 to 3 carbon atoms. It represents 36 alicyclic hydrocarbon groups. R b9 and R b10These atoms bond with each other and, together with the sulfur atoms they bond to, form a ring. It may be done, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. That's good too. R b11 This consists of a hydrogen atom, a chain hydrocarbon group with 1 to 36 carbon atoms, and an alicyclic carbon group with 3 to 36 carbon atoms. This represents a hydrogen group or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 This refers to a chain-type hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or This represents an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atoms contained in this chain-like hydrocarbon group are carbon It may be substituted with an aromatic hydrocarbon group having prime numbers 6 to 18, and the aromatic hydrocarbon group contains The hydrogen atom is a carbon-1 to carbon-12 alkoxy group or a carbon-1 to carbon-12 alkyl carbonyl group. It may be substituted with an oxy group. R b11 and R b12 These molecules bond to each other, forming a ring including the -CH-CO- groups to which they are joined. It is also possible that the -CH2- contained in the ring is replaced by -O-, -S-, or -CO-. That's fine. R b13 ~R b18 These are, independently, a halogen atom, a hydroxyl group, and a lipid with 1 to 12 carbon atoms. Alkaline hydrocarbon groups, C1-C12 alkyl fluorides, or C1-C12 alkoxy groups It represents. R b13 and R b14 This refers to the fact that they bond with each other and together with the benzene ring to which they bond, they form sulfurous compounds. A ring containing a child may be formed, and the -CH2- contained in the ring may be -O-, -S-, or -CO - may be used instead. L b31 This represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer between 0 and 5. q2 and r2 each independently represent an integer between 0 and 4. u2 represents either 0 or 1. When o2 is 2 or more, multiple R b13 They are the same or different, and when p2 is 2 or more, multiple R b14 They are the same or different, and when q2 is 2 or more, multiple R b15 They are the same or different, r2 When there are 2 or more R b16 They are the same or different, and when s2 is 2 or more, multiple R b17 teeth If the same or different, and t2 is 2 or more, multiple R b18 They are either the same or different. When u2 is 0, then at least one of o2, p2, q2, and r2 is 1 or greater, and R b1 3 ~R b16 Preferably, at least one of them is a halogen atom, when u2 is 1. , one of o2, p2, s2, t2, q2 and r2 is 1 or more, R b13 ~ R b18 Preferably, at least one of them is a halogen atom. Furthermore, when u2 is 0, it is preferable that r2 is 1 or greater, and even more preferable that it is 1. This is preferable. Also, when u2 is 0 and r2 is 1 or greater, R b16 is a halogen atom It is preferable. Aliphatic hydrocarbon groups refer to both chain-type hydrocarbon groups and alicyclic hydrocarbon groups. Examples of chain hydrocarbon groups include methyl, ethyl, propyl, isopropyl, and butyl groups. Group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and Examples include alkyl groups with a 2-ethylhexyl group. In particular, R b9 ~R b12 The chain-like hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and monocyclic alicyclic carbon Examples of hydrogen groups include cyclopropyl group, cyclobutyl group, cyclopentyl group, and cyclohexyl group. Examples of cycloalkyl groups include cycloheptyl, cyclooctyl, and cyclodecyl groups. Examples of polycyclic alicyclic hydrocarbon groups include the decahydronaphthyl group and the adamantyl group. Examples include norbornyl groups and the following groups. TIFF2026108698000081.tif10158 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably These have 4 to 12 carbon atoms. As an example of an alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, methylcyclohex xyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyl Ruadamantan-2-yl group, 2-isopropyladamantan-2-yl group, methyl nor Examples include bornyl groups and isobornyl groups. Hydrogen atoms are substituted with aliphatic hydrocarbon groups. In alicyclic hydrocarbon groups, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferable. The number is 20 or less. A fluoride alkyl group refers to an alkyl group having 1 to 12 carbon atoms and containing a fluorine atom. Oromethyl group, difluoromethyl group, trifluoromethyl group, perfluorobutyl group, etc. Examples include: The number of carbon atoms in the alkyl fluoride is preferably 1 to 9, and more preferably 1 It is ~6, and more preferably 1~4.

[0098] Aromatic hydrocarbon groups include phenyl, biphenyl, naphthyl, and phenanthryl groups. Examples include aryl groups. Aromatic hydrocarbon groups include chain hydrocarbon groups or alicyclic hydrocarbon groups. It may have an elementary group, and an aromatic hydrocarbon group having a chain-like hydrocarbon group with 1 to 18 carbon atoms ( Tolyl group, xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert -Butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group (etc.), and aromatic hydrocarbon groups having alicyclic hydrocarbon groups with 3 to 18 carbon atoms (p-cyclo Examples include xylphenyl groups, p-adamantylphenyl groups, etc. Furthermore, aromatic carbonization If the hydrogen group has a chain-type hydrocarbon group or an alicyclic hydrocarbon group, it is a chain-type hydrocarbon group with 1 to 18 carbon atoms. Hydrocarbon groups and alicyclic hydrocarbon groups having 3 to 18 carbon atoms are preferred. As an aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group, p-methoxyphenyl Examples include the 'L' group. Examples of chain hydrocarbon groups in which hydrogen atoms are substituted with aromatic hydrocarbon groups include the benzyl group and the ferrous hydrocarbon group. Netyl group, phenylpropyl group, trityl group, naphthylmethyl group, naphthylethyl group, etc. An example is the aralkyl group. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, and pentoxy groups. oxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group Examples include dodecyloxy groups, etc. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. It is possible. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. ru. Examples of alkylcarbonyloxy groups include methylcarbonyloxy group and ethylcarbonyl Oxy group, propyl carbonyloxy group, isopropyl carbonyloxy group, butylcarbon Bonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy C group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyl Examples include oxy groups and 2-ethylhexylcarbonyloxy groups. R b4 and R b5 The ring formed when these atoms bond to each other and together with the sulfur atom they bond to is The rings may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may have 3 to 18 carbon atoms, preferably 4 to 18 carbon atoms. Furthermore, the ring containing the sulfur atom can be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. For example, the following ring can be cited. * indicates a bonding site. TIFF2026108698000082.tif23143R b9 and R b10 The rings formed by these elements together can be monocyclic, polycyclic, aromatic, or non-aromatic. The ring may be either saturated or unsaturated. Examples of rings include 3-membered to 12-membered rings. Preferably a 3-membered to 7-membered ring. For example, a thiolan-1-ium ring (tetrahydrothi Examples include the ophenium ring, thian-1-ium ring, and 1,4-oxatian-4-ium ring. It can be done. R b11 and R b12 The rings formed by these elements together can be monocyclic, polycyclic, aromatic, or non-aromatic. The ring may be either saturated or unsaturated. Examples of rings include 3-membered to 12-membered rings. Preferably a 3-membered to 7-membered ring. Oxocycloheptane ring, oxocyclohexane ring Examples include oxonorbornane rings and oxoadamantane rings.

[0099] Among cations (b2-1) to (b2-4), preferably cation (b2 -1) The following cations can be considered as cations (b2-1): TIFF2026108698000083.tif80158

[0100] TIFF2026108698000084.tif110165

[0101] The following cations can be considered as cations (b2-2): TIFF2026108698000085.tif18150

[0102] The following cations can be considered as cations (b2-3): TIFF2026108698000086.tif24126

[0103] The following cations can be considered as cations (b2-4): TIFF2026108698000087.tif149159

[0104] The acid generator (B) is a combination of the anion and the organic cation described above, and these are They can be combined in any way. Preferably, the acid generator (B) is formula (Ia-1)~ Formula (Ia-3), Formula (Ia-7) ~ Formula (Ia-19), Formula (Ia-22) ~ Formula ( Anions represented by any of Ia-41), and cations (b2-1), cations (b 2-2) Combinations with cation (b2-3) or cation (b2-4) are also possible.

[0105] The acid generator (B) is preferably represented by formulas (B1-1) to (B1-60), respectively. Examples include those that are used. Among them, those containing arylsulfonium cations are preferred. Formula (B1-1) ~ Formula (B1-3), Formula (B1-5) ~ Formula (B1-7), Formula (B1-11) ~Formula (B1-14), Formula (B1-20) ~Formula (B1-26), Formula (B1-29), Formula (B 1-31) Those represented by formula (B1-60) are particularly preferred. TIFF2026108698000088.tif218166

[0106] TIFF2026108698000089.tif235159

[0107] TIFF2026108698000090.tif237165

[0108] When the acid generator contains salt (I) and acid generator (B), salt (I) and acid generator (B) The ratio of the content of (by mass; salt (I): acid generator (B)) is usually 1:99 to 99:1 The ratio is preferably 2:98 to 98:2, and more preferably 5:95 to 95:5. More preferably 10:90 to 90:10, and especially preferably 15:85 to 85 :15.

[0109] <Resist Composition> The resist composition of the present invention comprises an acid generator containing salt (I) and a resin having an acid-unstable group ( It contains the following (sometimes referred to as "resin (A)"). Here, "acid-unstable group" refers to the elimination group. It has a group, and upon contact with an acid, the leaving group is removed, and the constituent unit becomes a hydrophilic group (for example, hydroxy This refers to a group that converts into a constituent unit having a carboxyl group or a carboxyl group. The resist composition of the present invention generates an acid that is less acidic than the acid generated by the acid generator. It may contain a quencher such as salt (hereinafter sometimes referred to as "quencher (C)"). Preferably, it contains a solvent (which may be referred to as "solvent (E)" below).

[0110] <Acid Generator> In the resist composition of the present invention, the total content of the acid generator is as follows: resin (A)1 Preferably 1 to 45 parts by mass, more preferably 1 part by mass, per 00 parts by mass The amount is 40 parts by mass or less, more preferably 3 parts by mass or more and 40 parts by mass or less.

[0111] <Resin (A)> Resin (A) is a structural unit having an acid-unstable group (hereinafter referred to as "structural unit (a1)"). It is preferable that the resin (A) further contains structural units other than structural unit (a1). It is so. Structural units other than structural unit (a1) include structural units that do not have acid-unstable groups ( (Sometimes referred to as "structural unit (s)"), structural unit (a1), and other structural units (s) Structural units (for example, structural units having halogen atoms as described later (hereinafter referred to as "structural units (a4)") (There are cases where this occurs), structural units having non-eliminating hydrocarbon groups (hereinafter referred to as "structural units (a) 5) In some cases, this refers to structural units derived from monomers known in the field, etc. These are some examples.

[0112] <Structural unit (a1)> Structural unit (a1) is a monomer having an acid-unstable group (hereinafter referred to as "monomer (a1)"). It is derived from (in some cases). The acid-unstable group contained in resin (A) is the group represented by formula (1) (hereinafter also referred to as group (1)). ) and / or a group represented by formula (2) (hereinafter also referred to as group (2)) is preferred. TIFF2026108698000091.tif2298[In formula (1), R a1 , R a2 and R a3 Each of these is an alkyl group having 1 to 8 carbon atoms, independently of the others. , alkenyl groups with 2 to 8 carbon atoms, alicyclic hydrocarbon groups with 3 to 20 carbon atoms, and groups with 6 to 18 carbon atoms R represents an aromatic hydrocarbon group or a group formed by combining these groups. a1 and R a2 They are joined together Together with the carbon atoms to which they bond, they form alicyclic hydrocarbon groups with 3 to 20 carbon atoms. ma and na each independently represent 0 or 1, and at least one of ma and na This represents 1. * indicates a connection site. TIFF2026108698000092.tif2278[In formula (2), R a1’ and R a2’ Each of these is independently a hydrogen atom or a carbon atom with 1 to 1 carbon atoms. Represents two hydrocarbon groups, R a3’ R represents a hydrocarbon group with 1 to 20 carbon atoms. a2’ Reach biR a3’ They bond with each other, and together with the carbon atoms and X they bond to, they have 3 to 20 carbon atoms. A heterocyclic group is formed, and the hydrocarbon group and the -CH2- contained in the heterocyclic group are -O- or - It may be replaced with S-. X represents either an oxygen atom or a sulfur atom. 'na' represents either 0 or 1. * indicates a connection site.

[0113] R a1 , R a2 and R a3 Examples of alkyl groups in this context include methyl group, ethyl group, and propyl group. Examples include the hydroxyl group, butyl group, pentyl group, hexyl group, heptyl group, and octyl group. R a1 , R a2 and R a3 The alkenyl groups in this context include ethenyl, propenyl, and iso Propenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, he Examples include xenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. . R a1 , R a2 and R a3 In this context, the alicyclic hydrocarbon group is either monocyclic or polycyclic. This is also acceptable. Examples of monocyclic alicyclic hydrocarbon groups include cyclopentyl group, cyclohexyl group, and cyclopentyl group. Examples include cycloalkyl groups such as chloroheptyl and cyclooctyl groups. Polycyclic and alicyclic groups. The hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following: Examples include the base (* indicates a binding site). a1 , R a2 and R a3 Alicyclic hydrocarbons The number of carbon atoms in the group is preferably 3 to 16. TIFF2026108698000093.tif10159R a1 , R a2 and R a3 Aromatic hydrocarbon groups in this context include phenyl groups and naphthyl groups. Examples of aryl groups include anthryl, biphenyl, and phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group) Cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbol Alkylcycloalkyl groups such as ylethyl groups or cycloalkylalkyl groups), benzyl Aralkyl groups such as p-methylphenyl groups, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p -tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2, 6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc., alicyclic hydrocarbon group Aromatic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group) Examples include aryl-cycloalkyl groups such as phenylcyclohexyl groups. Preferably, ma is 0 and na is 1. R a1 and R a2-C(R a1 )(R a2 )(R a3 Examples of such groups include the following: Alicyclic hydrocarbon groups are preferably those having 3 carbon atoms. It is ~12. * represents the bond site with -O-. TIFF2026108698000094.tif35157

[0114] R a1’ , R a2’ and R a3’ Examples of hydrocarbon groups in this context include alkyl groups and alicyclic carbon groups. Examples include hydrogenated groups, aromatic hydrocarbon groups, and groups formed by combining these. It is possible. Alkyl and alicyclic hydrocarbon groups are R a1 , R a2 and R a3 Similar to the base mentioned above This is one example. Aromatic hydrocarbon groups include phenyl group, naphthyl group, anthryl group, biphenyl group, Examples include aryl groups such as phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group) Cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbol Alkylcycloalkyl groups such as ylethyl groups or cycloalkylalkyl groups), benzyl Aralkyl groups such as p-methylphenyl groups, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p -tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2, 6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc., alicyclic hydrocarbon group Aromatic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group) Examples include aryl-cycloalkyl groups such as phenylcyclohexyl groups. R a2’ and R a3’ They bond with each other and together with the carbon atoms and X they bond to, complex When forming a ring group, -C(R a1’ )(R a2’ )-XR a3’ The following are some of the reasons: * indicates a connection point. TIFF2026108698000095.tif19124R a1’ and R a2’ Preferably, at least one of them is a hydrogen atom. na' is preferably 0.

[0115] The following are examples of base (1): In equation (1), R a1 , R a2 and R a3 is an alkyl group, ma=0, na= A group that is 1. A tert-butoxycarbonyl group is preferred as this group. In equation (1), R a1 , R a2 However, together with the carbon atoms to which these bond, adamant Forms a chill group, R a3 A group that is an alkyl group, with ma=0 and na=1. In equation (1), R a1 and R a2 Each of them is an alkyl group independently, and R a3 Adama A methyl group with ma=0 and na=1. The following are specific examples of group (1). * indicates a bonding site. TIFF2026108698000096.tif154163

[0116] The following are specific examples of group (2). * indicates a bonding site. TIFF2026108698000097.tif55153

[0117] The monomer (a1) preferably has an acid-unstable group and an ethylenically unsaturated bond. Mer, more preferably a (meth)acrylic monomer having an acid-unstable group.

[0118] Among (meth)acrylic monomers having an acid-unstable group, preferably those having 5 to 20 carbon atoms. Examples include those having alicyclic hydrocarbon groups. A resin (A) having structural units derived from monomer (a1) is used in the resist composition. This allows for an improvement in the resolution of the resist pattern.

[0119] Preferably, a structural unit derived from a (meth)acrylic monomer having group (1) is used. , a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)). ), a structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1) . ) or a structural unit represented by formula (a1-2) (hereinafter referred to as structural unit (a1-2) Examples include: (a1-0), (a1-1), and At least one or two structural units selected from the group consisting of structural units (a1-2). More preferably, selected from the group consisting of structural units (a1-1) and structural units (a1-2) These are at least one or two structural units. These may be used individually, or two or more. You can use the above in combination. TIFF2026108698000098.tif48155[In formulas (a1-0), (a1-1), and (a1-2), L a01 , L a1 and L a2These are, independently, -O- or *-O-(CH2) k1 - CO-O- represents a bond, k1 is an integer from 1 to 7, and * is the bonding site with -CO-. represent. R a01 , R a4 and R a5 These are, independently, a hydrogen atom, a halogen atom, or a halogen. This represents an alkyl group having 1 to 6 carbon atoms, which may contain atoms. R a02 , R a03 and R a04 These are, independently, alkyl groups with 1 to 8 carbon atoms and alkyl groups with 3 to 8 carbon atoms. 18 alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, or combinations thereof It represents the basis. R a6 and R a7 These are, independently, alkyl groups with 1 to 8 carbon atoms and axyl groups with 2 to 8 carbon atoms. Lukenyl group, alicyclic hydrocarbon group having 3 to 18 carbon atoms, aromatic hydrocarbon group having 6 to 18 carbon atoms or This represents the group formed by combining these elements. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

[0120] R a01 , R a4 and R a5 This is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. It is a chill group. L a01 , L a1 and L a2 Preferably, an oxygen atom or *-O-(CH2) k01 -C OO- (where k01 is preferably an integer from 1 to 4, more preferably It is 1, more preferably an oxygen atom. R a02 , Ra03 , R a04 , R a6 and R a7 Alkyl groups, alkenyl groups, alicyclic groups in Examples of hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining them include R in formula (1). a1 , R a2 and R a3 The same groups as those listed above can be cited. R a02 , R a03 , and R a04 The alkyl group in this case is preferably an alkyl group having 1 to 6 carbon atoms. It is a group, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. ru. R a6 and R a7 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms. More preferably, a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and further Preferably, it is an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms. Yes, more preferably an ethenyl group, propenyl group, isopropenyl group or butenyl group. ru. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the alicyclic hydrocarbon group is preferably The range is 5 to 12, and more preferably 5 to 10. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the aromatic hydrocarbon group is preferably The range is 6 to 12, and more precisely, 6 to 10. Groups that combine alkyl groups and alicyclic hydrocarbon groups are formed by combining these alkyl groups and alicyclic hydrocarbon groups. It is preferable that the total number of carbon atoms in the combined group is 18 or less. Groups formed by combining alkyl groups and aromatic hydrocarbon groups are composed of these alkyl groups and aromatic hydrocarbon groups. It is preferable that the total number of carbon atoms in the combined group is 18 or less. R a02 and R a03 Preferably, an alkyl group having 1 to 6 carbon atoms or an aromatic group having 6 to 12 carbon atoms. A hydrocarbon group, more preferably a methyl group, an ethyl group, a phenyl group, or a naphthyl group. ru. R a04 Preferably, an alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon having 5 to 12 carbon atoms. The group is a methyl group, more preferably an ethyl group, a cyclohexyl group, or an adamantyl group. be. R a6 and R a7 Preferably, alkyl groups having 1 to 6 carbon atoms, and alkenes having 2 to 6 carbon atoms. A C6 group or an aromatic hydrocarbon group having 6 to 12 carbon atoms, more preferably a methyl group or an ethyl group. , isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group, further Preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group. ru. m1 is preferably an integer between 0 and 3, and more preferably 0 or 1. n1 is preferably an integer between 0 and 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0121] Examples of structural units (a1-0) are given by equations (a1-0-1) to (a1-0-18). A structural unit represented by one of the following and R in the structural unit (a1-0) a01 This corresponds to The til group consists of a hydrogen atom, a halogen atom, and a haloalkyl group (an alkyl group containing a halogen atom). Alternatively, structural units in which other alkyl groups are replaced include formulas (a1-0-1) to (a1 The structure can be represented by any of the following: (a1-0-10), (a1-0-13), or (a1-0-14). Units are preferred. JPEG2026108698000099.jpg92168

[0122] As for the structural unit (a1-1), for example, as described in Japanese Patent Publication No. 2010-204646 Examples of structural units derived from monomers include those from formula (a1-1-1) to formula (a1 -1-7) Structural units represented by any of the above and R in structural units (a1-1) a4 ni The corresponding methyl group is replaced by a hydrogen atom, halogen atom, haloalkyl group, or other alkyl group. A divided structural unit is preferred, and can be represented by any of the formulas (a1-1-1) to (a1-1-4). A structural unit that can be made into a structural unit is preferable. TIFF2026108698000100.tif38165

[0123] The structural unit (a1-2) is any of the formulas (a1-2-1) to (a1-2-14). The structural unit represented by and the R in the structural unit (a1-2) a5 The methyl group corresponding to water Examples of structural units that are replaced by elementary atoms, halogen atoms, haloalkyl groups, or other alkyl groups include Equations (a1-2-2), (a1-2-5), (a1-2-6), and (a1- 2-10) A structural unit represented by any of the formulas (a1-2-14) is preferred. TIFF2026108698000101.tif69167

[0124] Resin (A) is structural unit (a1-0) and / or structural unit (a1-1) and / or structural unit If positions (a1-2) are included, the total content of these is, relative to the total structural units of resin (A), Examples include 10 mol% or more, preferably 15 mol% or more, and more preferably 20 mol%. It is % or more, more preferably 25 mol% or more, and even more preferably 30 mol It is % or more. Also, it is 95 mol% or less, preferably 90 mol% or less, and Preferably it is 85 mol% or less, and even more preferably 70 mol% or less. Specifically The amount can be 10 to 95 mol%, preferably 15 to 90 mol%, and more preferably It is 20-85 mol%, more preferably 25-70 mol%, and even more preferably The percentage is between 30 and 70 moles. If resin (A) contains structural unit (a1-0), its content is the total structural unit of resin (A). A value of 5 mol% or more relative to the position is given, preferably 10 mol% or more. Also, 80 mol Examples include % or less, preferably 75 mol% or less, and more preferably 70 mol% or less. Specifically, 5 to 80 mol% is a possible range, preferably 5 to 75 mol%, and so on. Preferably, it is 10 to 70 mol%. If resin (A) contains structural unit (a1-1) and / or structural unit (a1-2), The total content of these is preferably 10 mol% or more relative to the total structural units of resin (A). More preferably 15 mol% or more, and more preferably 20 mol% or more. Also, 90 mol% The following are examples, preferably 85 mol% or less, and more preferably 80 mol% or less. More preferably, it is 75 mol% or less, and even more preferably 70 mol% or less. Specifically, 10 to 90 mol% is a possible range, preferably 15 to 85 mol%, and more Preferably 15-80 mol%, more preferably 20-80 mol%, and further More preferably, it is 20 to 75 mol%.

[0125] A structural unit having a base (2) in structural unit (a1) is represented by formula (a1-4). Examples of structural units (hereinafter sometimes referred to as "structural units (a1-4)") include the following. TIFF2026108698000102.tif4765[In formula (a1-4), R a32 This is a hydrogen atom, a halogen atom, or a carbon-1 atom which may have a halogen atom. Represents alkyl groups up to 6. R a33 This includes halogen atoms, hydroxyl groups, alkyl groups with 1 to 6 carbon atoms, and C1 to 6 atoms. Alkoxy group, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms Lucoxy group, C2-C4 alkylcarbonyl group, C2-C4 alkylcarbonyl This represents an oxy group, an acryloyloxy group, or a methacryloyloxy group. A a30 is a single bond or * -X a31 -( A a32 -X a32 ) nc - represents -R a32 they combine This represents the bonding site with the carbon atom. A a32 This represents an alkanediyl group with 1 to 6 carbon atoms. X a31 and X a32 These represent -O-, -CO-O-, or -O-CO- independently. nc represents 0 or 1. la represents an integer from 0 to 4. If la is an integer greater than or equal to 2, Number R a33 They may be the same or different from one another. R a34 and Ra35 Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. R a36 R represents a hydrocarbon group with 1 to 20 carbon atoms. a35 and R a36 they combine with each other and Together with the -CO- to which they bond, they form a divalent hydrocarbon group having 2 to 20 carbon atoms, and the carbonized water The -CH2- contained in the elementary group and the divalent hydrocarbon group is replaced by -O- or -S- That's good too.

[0126] R a32 and R a33 Examples of halogen atoms in this context include fluorine, chlorine, and bromine atoms. These are some examples. R a32 C1-C6 alkyl groups that may have a halogen atom include: Trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2 ,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, pe fluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, Perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, Tyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoro Examples include pentyl groups, pentyl groups, hexyl groups, and perfluorohexyl groups. R a32 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, and the hydrogen atom, methyl group or An ethyl group is more preferable, and a hydrogen atom or a methyl group is even more preferable. R a33 The alkyl groups in this context are methyl, ethyl, propyl, and isopropyl groups. Examples include the butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, and may have a methyl group or an ethyl group. More preferably, a methyl group is even more preferred. R a33 The alkoxy groups in this context include methoxy, ethoxy, propoxy, and iso Propoxy group, butoxy group, sec-butoxy group, tert-butoxy group, pentyl oxy Examples include the hydroxyl group and the hexyloxy group. Alkoxy groups are alkoxy groups with 1 to 4 carbon atoms. Preferably, a methoxy group or an ethoxy group is preferred, and a methoxy group is even more preferred. R a33 The alkoxyalkyl groups in this context are methoxymethyl group and ethoxyethyl group. , propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxy Examples include methyl groups and tert-butoxymethyl groups. Alkoxyalkyl groups have a number of carbon atoms. 2 to 8 alkoxyalkyl groups are preferred, and methoxymethyl or ethoxyethyl groups are preferred. A methoxymethyl group is more preferable, and a methoxymethyl group is even more preferable. R a33 Examples of alkoxyalkoxy groups in this context include methoxymethoxy groups and methoxyethyl groups. Xy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isoprop Xymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxy A cymethoxy group is one example. Alkoxyalkoxy groups are alkoxyal groups with 2 to 8 carbon atoms. A coxy group is preferred, and a methoxyethoxy group or an ethoxyethoxy group is more preferred. R a33 The alkylcarbonyl groups in this context include acetyl, propionyl, and butyric groups. Examples include lyl groups. Alkyl carbonyl groups are alkyl carbonyl groups having 2 to 3 carbon atoms. A is preferred, and an acetyl group is more preferred. R a33Examples of alkylcarbonyloxy groups in this context include acetyloxy groups and propionyl groups. Examples include the oxy group and the butyryloxy group. The alkylcarbonyloxy group has a number of carbon atoms. Two to three alkylcarbonyloxy groups are preferred, and acetyloxy groups are more preferred. R a33 This includes halogen atoms, hydroxyl groups, C1-C4 alkyl groups, and C1-C4 An alkoxy group or an alkoxyalkoxy group having 2 to 8 carbon atoms is preferred, along with a fluorine atom and iodine. Elementary atom, hydroxyl group, methyl group, methoxy group, ethoxy group, ethoxyethoxy group or ethoxyethoxy group A toxicmethoxy group is more preferred, along with a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, A methoxy group or an ethoxyethoxy group is even more preferred.

[0127] *-X a31 -( A a32 -X a32 ) nc - for example, *-O-, *-CO-O-, *-OC O-, *-CO-OA a32 -CO-O-, *-O-CO-A a32 -O-, *-OA a32 -CO-O-, *-CO-OA a32 -O-CO-, *-O-CO-A a32 -O-CO-, These include *-CO-O- and *-CO-OA. a32 -CO-O- or *- OA a32 -CO-O- is preferred. A a32 The alkanediyl groups in this include methylene group, ethylene group, propane-1, 3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1 ,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methyl Propane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1, Examples include 4-diyl groups and 2-methylbutane-1,4-diyl groups. A a32 It is preferable that this is a methylene group or an ethylene group. A a30 These are single bonds, *-CO-O- or *-CO-OA a32 Being a CO-O Preferably, it is a single bond, *-CO-O- or *-CO-O-CH2-CO-O-. More preferably, the bond is a single bond or even more preferably *-CO-O-.

[0128] la is preferably 0, 1, or 2, more preferably 0 or 1, and even more preferably 0. R a34 , R a35 and R a36 Examples of hydrocarbon groups in this context include alkyl groups and alicyclic hydrocarbon groups. Examples include aromatic hydrocarbon groups and groups formed by combining these. Alkyl groups include methyl, ethyl, propyl, butyl, pentyl, and hexyl groups. Examples include syl groups, heptyl groups, and octyl groups. The alicyclic hydrocarbon group may be monocyclic or polycyclic. Monocyclic alicyclic hydrocarbon group Examples include cyclopentyl groups, cyclohexyl groups, cycloheptyl groups, and cyclooctyl groups. Examples of cycloalkyl groups include decahydrona. Phthyl groups, adamantyl groups, norbornyl groups, and the following groups (* indicates a bonding site), etc. It can be listed. TIFF2026108698000103.tif10151 Aromatic hydrocarbon groups include phenyl group, naphthyl group, anthryl group, biphenyl group, Examples include aryl groups such as phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. (For example, methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group) Cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbol Alkylcycloalkyl groups such as ylethyl groups or cycloalkylalkyl groups), benzyl Aralkyl groups such as p-methylphenyl groups, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p -tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2, 6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc., alicyclic hydrocarbon group Aromatic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group) Examples include aryl-cycloalkyl groups such as phenylcyclohexyl groups, etc. , R a36 Examples include alkyl groups having 1 to 18 carbon atoms, and alicyclic hydrocarbon groups having 3 to 18 carbon atoms. Aromatic hydrocarbon groups having 6 to 18 carbon atoms, or groups formed by combining these. It can be listed.

[0129] R a34 Preferably, it is a hydrogen atom. R a35 Preferably, a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or a C3 to 12 carbon atom. It is an alicyclic hydrocarbon group, more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group is preferably an alkyl group having 1 to 18 carbon atoms, or a C3 to 18 carbon atom Alicyclic hydrocarbon groups, aromatic hydrocarbon groups with 6 to 18 carbon atoms, or combinations thereof The group formed is more preferably an alkyl group having 1 to 18 carbon atoms, or a group having 3 to 1 carbon atoms. It is an 8-cell alicyclic hydrocarbon group or an aralkyl group having 7 to 18 carbon atoms. a36Alki in The rico group and alicyclic hydrocarbon group are preferably unsubstituted. a36 Aromatic carbonization in The hydrogen group is preferably an aromatic ring having an aryloxy group with 6 to 10 carbon atoms.

[0130] -OC(R) in structural units (a1-4) a34 )(R a35 )-OR a36 is an acid (for example) It is eliminated upon contact with p-toluenesulfonic acid, forming a hydroxyl group. -OC(R a34 )(R a35 )-OR a36 It bonds to the ortho- or para-position of the benzene ring. It is preferable that the bond is formed at the p-position, and more preferably that it is formed at the p-position.

[0131] As for structural units (a1-4), for example, see Japanese Patent Publication No. 2010-204646. Examples include monomer-derived structural units. Preferably, formulas (a1-4-1) to (a1 -4-24) The structural units and R in the structural unit (a1-4) a32 to A structure in which the corresponding hydrogen atom is replaced by a halogen atom, a haloalkyl group, or an alkyl group. The units are listed, more preferably formulas (a1-4-1) to (a1-4-5), formula (a1 -4-10), formula (a1-4-13), formula (a1-4-14), formula (a1-4-19), The structural units are represented by equation (a1-4-20). TIFF2026108698000104.tif134169

[0132] If resin (A) contains structural units (a1-4), the content of these units is the total structural content of resin (A). A range of 5-95 mol% is given for the total units, and 10-95 mol% is preferred. <, 15 to 90 mol% is more preferable, and 20 to 85 mol% is even more preferable, 20 to 70 mol% is even more preferable, and 20 to 60 mol% is particularly preferable.

[0133] The structural unit derived from the (meth)acrylic monomer having group (2) also includes the structural unit represented by formula (a1 -5) (hereinafter sometimes referred to as "structural unit (a1-5)"). In formula (a1-5) in TIFF2026108698000105.tif4253, R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH2) h3 -CO-L 54 -, h3 represents any integer from 1 to 4 and * represents the bonding site with L 51 . L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents any integer from 1 to 3. s1' represents any integer from 0 to 3.

[0134] Examples of the halogen atom include a fluorine atom and a chlorine atom, and a fluorine atom is preferable. Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a fluoro methyl group and a trifluoromethyl group. In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 Preferably, it is an oxygen atom. L 52 and L 53 Among them, it is preferable that one of them is -O- and the other is -S-. For s1, 1 is preferable. For s1’, any integer from 0 to 2 is preferable. Z a1 Preferably, it is a single bond or *-CH2-CO-O-.

[0135] Examples of the structural unit (a1-5) include, for example, those described in JP-A-2010-61117 structural units derived from the monomers described. Among them, the structural units represented by Formula (a1-5-1) to Formula (a1-5- 4) are preferable, and the structural unit represented by Formula (a1-5-1) or Formula (a1-5-2 ) is more preferable. TIFF2026108698000106.tif31130

[0136] When the resin (A) contains the structural unit (a1-5), its content is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, even more preferably 5 to 40 mol%, and even more preferably 5 to 30 mol% with respect to all the structural units of the resin (A).

[0137] In addition, examples of the structural unit (a1) also include the following structural units. TIFF2026108698000107.tif27161

[0138] When the resin (A) contains structural units such as the above (a1-3-1) to (a1-3-7), its content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, and even more preferably 20 to 70 mol% with respect to all the structural units of the resin (A). Particularly preferably, it is 20 to 60 mol%.

[0139] <Structural unit (s)> A structural unit (s) is a monomer that does not have an acid-unstable group (hereinafter referred to as "monomer (s)"). It is derived from (there is a combination). The monomer that derives the structural unit (s) is an acid-resistant monomer known in the field of resists. Monomers without a stable group can be used. The structural unit (s) preferably has a hydroxyl group or a lactone ring. A structural unit having a xyl group and not having an acid-unstable group (hereinafter referred to as "structural unit (a2)") A structural unit having a lactone ring and / or not having an acid-unstable group (hereinafter referred to as "structural unit") If a resin containing a "production unit (a3)" is used in the resist composition of the present invention, This improves the resolution of the resist pattern and its adhesion to the substrate.

[0140] <Structural Unit (a2)> The hydroxyl group in structural unit (a2) can be an alcoholic hydroxyl group or a phenolic group. A hydroxyl group may also be used. When manufacturing a resist pattern from the resist composition of the present invention, KrF is used as the exposure light source. High-energy beams such as excimer lasers (248 nm), electron beams, or EUV (ultra-ultraviolet light) are used. If present, the structural unit (a2) is a structural unit having a phenolic hydroxyl group ( a2) is preferred, and it is even more preferable to use the structural unit (a2-A) described later. When using an ArF excimer laser (193 nm), the structural unit (a2) is A A structural unit (a2) having a hydroxyl group is preferred, and the structural unit (a2) described later -1) is more preferable. The structural unit (a2) contains one type alone. It is acceptable to include two or more types.

[0141] Structural units having a phenolic hydroxyl group in structural unit (a2) include those of formula (a Examples of structural units represented by 2-A) (hereinafter sometimes referred to as "structural unit (a2-A)") include It is possible. TIFF2026108698000108.tif4753[In formula (a2-A), R a50 This is a hydrogen atom, a halogen atom, or a C1-C6 element which may have a halogen atom. It represents an alkyl group. R a51 This includes halogen atoms, hydroxyl groups, alkyl groups with 1 to 6 carbon atoms, and C1 to 6 atoms. Alkoxy group, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms Lucoxy group, C2-C4 alkylcarbonyl group, C2-C4 alkylcarbonyl This represents an oxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 This is a single bond or *-X a51 -( A a52 -X a52 ) nb - represents -R a50 they combine This represents the bonding site with the carbon atom. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent -O-, -CO-O-, or -O-CO- independently. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, Number R a51 They may be the same or different from each other.

[0142] R a50 and R a51 Examples of halogen atoms in this context include fluorine, chlorine, and bromine atoms. These are some examples. Ra50 C1-C6 alkyl groups that may have a halogen atom include: Trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2 ,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, pe fluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, Perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, Tyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoro Examples include pentyl groups, pentyl groups, hexyl groups, and perfluorohexyl groups. R a50 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, and the hydrogen atom, methyl group or An ethyl group is more preferable, and a hydrogen atom or a methyl group is even more preferable. R a51 The alkyl groups in this context are methyl, ethyl, propyl, and isopropyl groups. Examples include the butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, and may have a methyl group or an ethyl group. More preferably, a methyl group is even more preferred. R a51 The alkoxy groups in this context include methoxy, ethoxy, propoxy, and iso Examples include propoxy groups, butoxy groups, sec-butoxy groups, and tert-butoxy groups. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, and is either a methoxy group or an ethoxy group. More preferably, a methoxy group is even more preferred. R a51 The alkoxyalkyl groups in this context are methoxymethyl group and ethoxyethyl group. , propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxy Examples include methyl groups and tert-butoxymethyl groups. Alkoxyalkyl groups have a number of carbon atoms. 2 to 8 alkoxyalkyl groups are preferred, and methoxymethyl or ethoxyethyl groups are preferred. A methoxymethyl group is more preferable, and a methoxymethyl group is even more preferable. R a51 Examples of alkoxyalkoxy groups in this context include methoxymethoxy groups and methoxyethyl groups. Xy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isoprop Xymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, tert-butoxy A cymethoxy group is one example. Alkoxyalkoxy groups are alkoxyal groups with 2 to 8 carbon atoms. A coxy group is preferred, and a methoxyethoxy group or an ethoxyethoxy group is more preferred. R a51 The alkylcarbonyl groups in this context include acetyl, propionyl, and butyric groups. Examples include lyl groups. Alkyl carbonyl groups are alkyl carbonyl groups having 2 to 3 carbon atoms. A is preferred, and an acetyl group is more preferred. R a51 Examples of alkylcarbonyloxy groups in this context include acetyloxy groups and propionyl groups. Examples include the oxy group and the butyryloxy group. The alkylcarbonyloxy group has a number of carbon atoms. Two to three alkylcarbonyloxy groups are preferred, and acetyloxy groups are more preferred. R a51 This includes halogen atoms, hydroxyl groups, C1-C4 alkyl groups, and C1-C4 An alkoxy group or an alkoxyalkoxy group having 2 to 8 carbon atoms is preferred, along with a fluorine atom and iodine. Elementary atom, hydroxyl group, methyl group, methoxy group, ethoxy group, ethoxyethoxy group or ethoxyethoxy group A toxicmethoxy group is more preferred, along with a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, A methoxy group or an ethoxyethoxy group is even more preferred.

[0143] *-X a51 -( A a52 -X a52 ) nb - for example, *-O-, *-CO-O-, *-OC O-, *-CO-OA a52 -CO-O-, *-O-CO-A a52 -O-, *-OA a52 -CO-O-, *-CO-OA a52 -O-CO-, *-O-CO-A a52 -O-CO-, These include *-CO-O- and *-CO-OA. a52 -CO-O- or *- OA a52 -CO-O- is preferred. A a52 The alkanediyl groups in this include methylene group, ethylene group, propane-1, 3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1 ,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methyl Propane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1, Examples include 4-diyl groups and 2-methylbutane-1,4-diyl groups. A a52 It is preferable that this is a methylene group or an ethylene group. A a50 These are single bonds, *-CO-O- or *-CO-OA a52 Being a CO-O Preferably, it is a single bond, *-CO-O- or *-CO-O-CH2-CO-O-. More preferably, the bond is a single bond or even more preferably *-CO-O-.

[0144] mb is preferably 0, 1, or 2, more preferably 0 or 1, and even more preferably 0. At least one hydroxyl group is bonded to the meta or para position of the benzene ring. Preferably, the phenyl group is bonded to the meta position, and more preferably, to two or more hydroxyl groups. If present, it is preferable that the two hydroxyl groups are bonded to the meta and para positions, respectively. It seems so.

[0145] As for the structural unit (a2-A), see Japanese Patent Publication No. 2010-204634, Japanese Patent Publication No. 2012- Examples include monomer-derived structural units described in Publication No. 12577. The structural unit (a2-A) is represented by equations (a2-2-1) to (a2-2-24). In the structural units and structural units represented by formulas (a2-2-1) to (a2-2-24) , R in structural unit (a2-A) a50 The methyl group corresponding to a hydrogen atom, halogen atom Examples include structural units that are replaced by haloalkyl groups or other alkyl groups. Structural unit ( a2-A) is a structural unit represented by formulas (a2-2-1) to (a2-2-4), formula (a2 Structural units represented by formula (a2-2-8), formula (a2-2 -12)~Structural units represented by formula (a2-2-18) and formula (a2-2-1)~formula (a2 Structural units represented by formula (a2-2-4), structural units represented by formula (a2-2-6), formula (a2-2 -8) Structural units represented by formulas (a2-2-12) to (a2-2-18) In the structural unit, R in the structural unit (a2-A) a50 The methyl group corresponding to the hydrogen atom It is preferable that the structural unit is replaced by the structural unit represented by formula (a2-2-3). , structural units represented by formula (a2-2-4), structural units represented by formula (a2-2-8), formula (a2-2-12) ~ Structural units represented by equation (a2-2-14), equation (a2-2-18) Structural units represented by and structural units represented by formula (a2-2-3), and formula (a2-2-4) The structural units represented, the structural units represented by formula (a2-2-8), formula (a2-2-12) to formula The structural units represented by formula (a2-2-14) and formula (a2-2-18) And, in the structural unit (a2-A), R a50 The corresponding methyl group is replaced by a hydrogen atom. It is more preferable that the structural unit is a structural unit represented by formula (a2-2-3), formula ( Structural units represented by formula (a2-2-4), structural units represented by formula (a2-2-8), and formula (a Structural units represented by formula (a2-2-3), structural units represented by formula (a2-2-4), formula (a2- In the structural unit represented by 2-8), R in structural unit (a2-A) a50 This corresponds to It is even more preferable that the structural unit is one in which the methyl group is replaced by a hydrogen atom. TIFF2026108698000109.tif80170

[0146] Content of structural unit (a2-A) when structural unit (a2-A) is present in resin (A) The amount of this component is preferably 5 mol% or more, and more preferably 10 mol% or less, relative to the total structural units. It is above, more preferably 15 mol% or more, and even more preferably 20 mol% or more. Furthermore, it is preferably 80 mol% or less, and more preferably 70 mol% or less. More preferably, it is 65 mol% or less. Specifically, it is preferably 5 to 80 mol%. More preferably 10 to 70 mol%, and even more preferably 15 to 65 mol%. More preferably, it is 20 to 65 mol%. Structural unit (a2-A) is polymerized using structural unit (a1-4), for example, and then p-Tol It can be incorporated into resin (A) by treating it with an acid such as ene sulfonic acid. After polymerization using acetoxystyrene, etc., tetramethylammonium hydroxide, etc. By treating with alkali, the structural unit (a2-A) can be incorporated into the resin (A). can.

[0147] Structural units having an alcoholic hydroxyl group in structural unit (a2) include those with the formula ( The structural unit represented by a2-1) (hereinafter sometimes referred to as "structural unit (a2-1)") It can be listed. TIFF2026108698000110.tif4258 formula (a2-1), L a3 is -O- or *-O-(CH2) k2 -CO-O- represents, k2 represents an integer between 1 and 7. * represents a connection site with -CO-. R a14 represents a hydrogen atom or a methyl group. R a15 and R a16 Each of these independently represents a hydrogen atom, a methyl group, or a hydroxyl group. o1 represents an integer between 0 and 10.

[0148] In equation (a2-1), L a3 Preferably, -O-, -O-(CH2) f1 -CO-O- (where f1 represents any integer from 1 to 4), and more preferably -O-. R a14 The group is preferably a methyl group. R a15 Preferably, it is a hydrogen atom. R a16 This is preferably a hydrogen atom or a hydroxyl group. o1 is preferably an integer between 0 and 3, more preferably 0 or 1.

[0149] As for the structural unit (a2-1), for example, see Japanese Patent Publication No. 2010-204646. Examples of structural units derived from monomers are given by equations (a2-1-1) to (a2-1-6). A structural unit represented by any of the following formulas is preferred, from formula (a2-1-1) to formula (a2-1-4) A structural unit represented by either formula (a2-1-1) or formula (a2-1- The structural unit represented in 3) is even more preferable. TIFF2026108698000111.tif54150

[0150] If resin (A) contains structural units (a2-1), the content of these units is the total structural unit content of resin (A). A concentration of 1 mol% or more per unit area is recommended, with 2 mol% or more being preferable. Also, 45 mol% or less is recommended. Examples include, preferably 40 mol% or less, and more preferably 35 mol% or less. More preferably, it is 20 mol% or less, and even more preferably, 10 mol% or less. Generally, the amount is 1 to 45 mol%, preferably 1 to 40 mol%, and more preferably is 1 to 35 mol%, more preferably 1 to 20 mol%, and even more preferably It is 1-10 mol%.

[0151] <Structural unit (a3)> The lactone rings of structural unit (a3) ​​are a β-propiolactone ring and a γ-butyrolactone ring. It can be a monocyclic ring such as a δ-valerolactone ring, and the contraction of a monocyclic lactone ring with other rings. A ring compound is also acceptable. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or γ - A bridged ring containing a butyrolactone ring structure (e.g., a structural unit represented by the following formula (a3-2)) These are some examples.

[0152] The structural unit (a3) ​​is preferably formula (a3-1), formula (a3-2), formula (a3-3) or a structural unit represented by formula (a3-4). It may contain one of these alone, or may contain two or more of them. TIFF2026108698000112.tif51164[In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 、L a5 and L a6 each independently represents -O- or *-O-(CH2) k3 - CO-O- (where k3 represents an integer from 1 to 7). L a7 represents -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 [[ID=3P]]-O-CO-L a9 represents -O-. That is. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding site with the carbonyl group. R a18 、R a19 and R a20 each independently represents a hydrogen atom or a methyl group. R a24 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 、R a23 and R a25 each independently represents a carboxy group, a cyano group or a aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer between 0 and 5. q1 represents an integer between 0 and 3. r1 represents an integer between 0 and 3. w1 represents an integer between 0 and 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a2 3 and / or R a25 They may be the same as each other, or they may be different.

[0153] R a21 , R a22 , R a23 and R a25 Examples of aliphatic hydrocarbon groups in this context include methyl and ethyl groups. group, propyl group, isopropyl group, butyl group, sec-butyl group and tert-butyl group Examples of alkyl groups include the following. R a24 The halogen atoms in this include fluorine, chlorine, bromine, and iodine. Atoms are one example. R a24 The alkyl groups in this context include methyl, ethyl, propyl, and isopropyl groups. butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group, etc. Examples include alkyl groups having 1 to 4 carbon atoms, and more preferably methyl groups. Alternatively, an ethyl group may be used. R a24 Examples of alkyl groups having a halogen atom include the trifluoromethyl group. Perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perf Perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, Lufluoropentyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl Examples include the 14-3 group and the triiodomethyl group. L a8 and L a9 Examples of alkanediyl groups in this context include methylene groups, ethylene groups, and pro groups. Pan-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, tan-1,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pen Examples include tan-1,4-diyl groups and 2-methylbutane-1,4-diyl groups.

[0154] In equations (a3-1) to (a3-3), L a4 ~L a6 Each is independently preferred Alternatively, -O- or *-O-(CH2) k3 In -CO-O-, k3 is 1 to 4 A base that is any integer, more preferably -O- and *-O-CH2-CO-O-, and further Preferably, it is an oxygen atom. R a18 ~R a21 The group is preferably a methyl group. R a22 and R a23 Each of these is independently preferably a carboxyl group, a cyano group, or a melanin group. It is a chill group. p1, q1, and r1 are each independently, preferably integers between 0 and 2. More preferably, it is 0 or 1.

[0155] In equation (a3-4), R a24 Preferably, a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. It is a group, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a group of the same type. It is either a hydrogen atom or a methyl group. R a25 The group is preferably a carboxyl group, a cyano group, or a methyl group. L a7 Preferably -O- or *-OL a8 -CO-O- and, far It is -O-, -O-CH2-CO-O-, or -O-C2H4-CO-O-. w1 is preferably an integer between 0 and 2, and more preferably 0 or 1. In particular, formula (a3-4)' is preferred over formula (a3-4). TIFF2026108698000113.tif4051 (in the formula, R a24 , L a7 (This expresses the same meaning as above.)

[0156] The structural unit (a3) ​​is the monomer described in Japanese Patent Publication No. 2010-204646. , monomers described in Japanese Patent Publication No. 2000-122294, Japanese Patent Publication No. 2012-41274 Examples of structural units derived from monomers described in the publication are listed below. Structural unit (a3) ​​is , formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2) , equation (a3-3-1), equation (a3-3-2), and equation (a3-4-1) ~ equation (a3-4-1 2) A structural unit represented by any of the above, and in the said structural unit, formula (a3-1) to formula ( R in a3-4) a18 , R a19 , R a20 and R a24 The methyl group corresponding to hydrogen Structural units replaced by atoms are preferred. TIFF2026108698000114.tif118168

[0157] If resin (A) contains structural units (a3), the total content of these units is the total structural unit content of resin (A). A value of 1 mol% or more is given for each position, preferably 3 mol% or more, and more preferably It is 5 mol% or more, more preferably 10 mol% or more. Also, 70 mol% or less The amount is listed, preferably 65 mol% or less, and more preferably 60 mol% or less. Generally, the amount is 1 to 70 mol%, preferably 3 to 70 mol%, and more preferably The amount is 5 to 65 mol%, more preferably 5 to 60 mol%, and even more preferably It is 10-60 mol%. Also, structural unit (a3-1), structural unit (a3-2), structural unit (a3-3) or structure The content of each unit (a3-4) is preferably, relative to the total structural units of resin (A). It is 1 mol% or more, more preferably 3 mol% or more, and even more preferably 5 mol% or less. The above. Furthermore, it is preferably 60 mol% or less, and more preferably 55 mol% or less. More preferably, it is 50 mol% or less. Specifically, 1 to 60 mol% is preferred. 3 to 60 mol% is more preferable, 5 to 55 mol% is even more preferable, and 5 to 50 mol% is preferable. More preferably, 10 to 50 mol% is even more preferable.

[0158] <Structural Unit (a4)> The following are examples of structural units (a4): TIFF2026108698000115.tif3066[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 This represents a saturated hydrocarbon group having fluorine atoms with 1 to 24 carbon atoms, and the saturated hydrocarbon The -CH2- group in the group may be replaced by -O- or -CO-. R 42 The saturated hydrocarbon group represented by this term includes chain hydrocarbon groups and monocyclic or polycyclic alicyclic hydrocarbon groups. Examples include bases, and bases formed by combining them.

[0159] Chain hydrocarbon groups include methyl group, ethyl group, propyl group, butyl group, pentyl group, Hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexa Examples include decyl groups, heptadecyl groups, and octadecyl groups. Monocyclic or polycyclic alicyclic carbides. Examples of hydrogen groups include cyclopentyl group, cyclohexyl group, cycloheptyl group, and cycloocyl group. Cycloalkyl groups such as tyl groups; decahydronaphthyl group, adamantyl group, norbornyl group Examples include polycyclic alicyclic hydrocarbon groups such as the following groups (* indicates a bonding site). TIFF2026108698000116.tif11159 The groups formed by the combination include one or more alkyl groups or one or more alkanes. Examples of groups formed by combining an yl group with one or more alicyclic hydrocarbon groups include -Alkanediyl group-alicyclic hydrocarbon group, -Alkanediyl group-alkyl group, -Al Examples include candiyl group-alicyclic hydrocarbon group-alkyl group, etc.

[0160] As structural units (a4), equation (a4-0), equation (a4-1), equation (a4-2), equation ( Structures represented by at least one selected from the group consisting of a4-3) and formula (a4-4) The units are listed. TIFF2026108698000117.tif4652[In formula (a4-0), R 5 represents a hydrogen atom or a methyl group. L 4a This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 4 carbon atoms. L 3a This is a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluoroalkanediyl group having 3 to 12 carbon atoms. This represents a luorocycloalkanediyl group. R 6 This represents a hydrogen atom or a fluorine atom.

[0161] L 4a Examples of divalent aliphatic saturated hydrocarbon groups in this context include methylene groups, ethylene groups, and pronitriles. Linear alkanediyl groups such as pan-1,3-diyl group and butane-1,4-diyl group, ethanol n-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2- Branching of methylpropane-1,3-diyl groups and 2-methylpropane-1,2-diyl groups, etc. Examples include alkanediyl groups. L 3a In this context, perfluoroalkanediyl groups include difluoromethylene groups and per Fluoroethylene group, perfluoropropane-1,1-diyl group, perfluoropropane -1,3-diyl group, perfluoropropane-1,2-diyl group, perfluoropropane -2,2-diyl group, perfluorobutane-1,4-diyl group, perfluorobutane-2 ,2-diyl group, perfluorobutane-1,2-diyl group, perfluoropentane-1, 5-diyl group, perfluoropentane-2,2-diyl group, perfluoropentane-3, 3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2, 2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1, 7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3, 4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1, 8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3, Examples include 3-diyl groups and perfluorooctane-4,4-diyl groups. L 3a As for the perfluorocycloalkanediyl group in this context, perfluorocyclo xandiyl group, perfluorocyclopentanediyl group, perfluorocycloheptanediyl Examples include yl groups and perfluoroadamantanediyl groups.

[0162] L 4a The is preferably a single bond, a methylene group or an ethylene group, and more preferably a single bond. The bond is a methylene group. L 3a is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and more preferably Alternatively, it is a perfluoroalkanediyl group with 1 to 3 carbon atoms.

[0163] The structural units (a4-0) include the structural units shown below and the structural units within the following structural units ( a4-0) R 5 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom include It can be done. TIFF2026108698000118.tif100166

[0164] An example of a structural unit (a4) is the structural unit represented by formula (a4-1). TIFF2026108698000119.tif4670[In formula (a4-1), R a41 represents a hydrogen atom or a methyl group. R a42 This represents a saturated hydrocarbon group having 1 to 20 carbon atoms, which may have substituents. The -CH2- group in the hydrocarbon group may be replaced by -O- or -CO-. A a41 This is an alkanediyl group having 1 to 6 carbon atoms, which may have substituents, or a compound of formula (ag 1) represents the base. However, A a41 and R a42 At least one of them is a substitution It has a halogen atom (preferably a fluorine atom) as a base. TIFF2026108698000120.tif1384 [In formula (a-g1), s represents either 0 or 1. A a42 and A a44 Each of these is independently a divalent carbon atom having 1 to 5 carbon atoms, which may have substituents. This represents a saturated hydrocarbon group. A a43 This is a divalent aliphatic hydrocarbon having 1 to 5 carbon atoms, which may have single bonds or substituents. It represents the basis. X a41 and X a42 These are, independently, -O-, -CO-, -CO-O-, or -O-CO - represents However, A a42 , A a43 , A a44 , X a41 and X a42 The total number of carbon atoms is 7 or less. * indicates a binding site, and the * on the right is -O-CO-R a42 This is the junction site.

[0165] R a42 The saturated hydrocarbon groups in this context include chain-type saturated hydrocarbon groups and monocyclic or polycyclic alicyclic groups. Examples include saturated hydrocarbon groups and groups formed by combining them. ru. Examples of chain-type saturated hydrocarbon groups include methyl, ethyl, propyl, butyl, and pentyl groups. Hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, Examples include xadecyl groups, heptadecyl groups, and octadecyl groups. Examples of monocyclic or polycyclic alicyclic saturated hydrocarbon groups include cyclopentyl groups and cyclohexyl groups. cycloalkyl groups such as cycloheptyl and cyclooctyl groups; decahydronaphthyl groups, Polycyclic lipids such as adamantyl groups, norbornyl groups, and the following groups (* indicates the binding site). Examples include cyclic saturated hydrocarbon groups. TIFF2026108698000121.tif11159 The groups formed by the combination include one or more alkyl groups or one or more alkanes. Examples of groups formed by combining an yl group with one or more alicyclic saturated hydrocarbon groups include -Alkanediyl group-alicyclic saturated hydrocarbon group, -Alkanediyl group-alkyl Examples include AL groups, -alkanediyl groups, -alicyclic saturated hydrocarbon groups, -alkyl groups, etc.

[0166] R a42 The substituents that may be present are halogen atoms and those represented by formula (a-g3). At least one selected from the group consisting of groups is mentioned. As for halogen atoms, Examples include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms, and preferably fluorine atoms. . TIFF2026108698000122.tif965[In formula (a-g3), X a43 * represents an oxygen atom, a carbonyl group, *-O-CO-, or *-CO-O-. A a45 This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. . * is R a42 This represents the connection point with [the other element]. However, R a42 -X a43 -A a45 In R a42 If it does not have a halogen atom, then A a4 5 This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms and containing at least one halogen atom. .

[0167] A a45 The aliphatic hydrocarbon groups in this context include methyl, ethyl, propyl, and butyl groups. Group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, penta Alkyl groups such as decyl, hexadecyl, heptadecyl, and octadecyl groups; Monocyclic groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups Alicyclic hydrocarbon groups; as well as decahydronaphthyl groups, adamantyl groups, norbornyl groups and Examples include polycyclic alicyclic hydrocarbon groups such as the following groups (* indicates a bonding site). TIFF2026108698000123.tif11159 The groups formed by the combination include one or more alkyl groups or one or more alkanes. Examples of groups formed by combining an yl group with one or more alicyclic hydrocarbon groups include -Alkanediyl group-alicyclic hydrocarbon group, -Alkanediyl group-alkyl group, -Al Examples include candiyl group-alicyclic hydrocarbon group-alkyl group, etc.

[0168] R a42 The halogen element is preferably an aliphatic hydrocarbon group which may have a halogen atom. Alkyl groups having a derivative and / or aliphatic hydrocarbon groups having a group represented by formula (a-g3) This is preferable. R a42 If the group is an aliphatic hydrocarbon group having a halogen atom, preferably the fluorine atom It is an aliphatic hydrocarbon group, more preferably a perfluoroalkyl group or perfluoro Rocycloalkyl groups, more preferably perfluoroalkyl groups having 1 to 6 carbon atoms. The perfluoroalkyl group is particularly preferred, and is a perfluoroalkyl group having 1 to 3 carbon atoms. Examples of perfluoromethyl groups include perfluoromethyl groups, perfluoroethyl groups, and perfluoropropyl groups. Perfluorobutyl group, perfluorobutyl group, perfluoropentyl group, perfluorohexyl group, perfluorobutyl group Examples include fluoroheptyl groups and perfluorooctyl groups. Examples of lukyl groups include perfluorocyclohexyl groups. R a42 However, if it is an aliphatic hydrocarbon group having a group represented by formula (a-g3), then formula (a Including the number of carbon atoms in the group represented by -g3), R a42 The total number of carbon atoms is preferably 15 or less. Furthermore, 12 or less is more preferable. (When the group represented by formula (a-g3) is used as a substituent.) The number should preferably be one.

[0169] R a42 If R is an aliphatic hydrocarbon group having a group represented by formula (a-g3), a42 teeth, More preferably, the group is represented by formula (a-g2). TIFF2026108698000124.tif879[In formula (a-g2), A a46 This is a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. It represents. X a44 This represents **-O-CO- or **-CO-O- (where ** is A a46 The connection site represent). A a47 This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. . However, A a46 , A a47 and X a44 The total number of carbon atoms is 18 or less, A a46 and A a47 of Of these, at least one has at least one halogen atom. * indicates a bonding site with a carbonyl group.

[0170] A a46 The aliphatic hydrocarbon group preferably has 1 to 6 carbon atoms, and more preferably 1 to 3 carbon atoms. A a47The number of carbon atoms in the aliphatic hydrocarbon group is preferably 4 to 15, more preferably 5 to 12. A a47 A cyclohexyl group or an adamantyl group is more preferable.

[0171] The preferred structure of the group represented by formula (a-g2) is as follows (* represents a carbonyl group) (This is the junction site.) JPEG2026108698000125.jpg13161

[0172] A a41 The alkanediyl groups in this include methylene group, ethylene group, propane-1, 3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 Linear alkanediyl groups such as ,6-diyl groups; propane-1,2-diyl groups, butane-1 ,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4- Examples include branched alkanediyl groups such as diyl groups and 2-methylbutane-1,4-diyl groups. ru. A a41 The substituents on the alkanediyl group include a hydroxyl group and a carbon-1 to carbon-6 group. Examples include alkoxy groups. A a41 is preferably an alkanediyl group having 1 to 4 carbon atoms, more preferably a carbon number The group is an alkanediyl group of type 2 to 4, and more preferably an ethylene group.

[0173] A in the group represented by formula (a-g1) a42 , A a43 and A a44 The divalent saturation represented by The hydrocarbon groups include linear or branched alkanediyl groups and monocyclic or polycyclic divalent alicyclic groups. By combining a compound hydrocarbon group, as well as an alkanediyl group and a divalent alicyclic hydrocarbon group... Examples of groups formed from these include methylene groups, ethylene groups, and propane-1. ,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, 1-methyl Propane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylprop Examples include pan-1,2-diyl groups. A a42 , A a43 and A a44 As substituents on the divalent saturated hydrocarbon group represented by , Examples include oxy groups and alkoxy groups having 1 to 6 carbon atoms. s is preferably 0.

[0174] In the group represented by formula (a-g1), X a42 -O-, -CO-, -CO-O- or The following are examples of groups that are -O-CO-. In the following examples, * and ** represents a binding site, and ** is -O-CO-R a42 This is the junction site. TIFF2026108698000126.tif54162

[0175] The structural units represented by formula (a4-1) are the structural units shown below and the structural units shown below. R in the structural unit represented by formula (a4-1) a41 A methyl group corresponding to this is placed on a hydrogen atom. Examples of replaced structural units include: JPEG2026108698000127.jpg167144

[0176] TIFF2026108698000128.tif66133

[0177] An example of a structural unit (a4) is the structural unit represented by formula (a4-2). TIFF2026108698000129.tif4365[In formula (a4-2), Rf5 represents a hydrogen atom or a methyl group. L 44 This represents an alkanediyl group having 1 to 6 carbon atoms, and the -C contained in the alkanediyl group H2- may be replaced by -O- or -CO-. R f6 This represents a saturated hydrocarbon group having 1 to 20 fluorine atoms. However, L 44 and R f6 The upper limit for the total number of carbon atoms is 21.

[0178] L 44 The alkanediyl group with 1 to 6 carbon atoms is A a41 An example of an alkanediyl group in Similar to the above, the same types of groups can be cited. R f6 The saturated hydrocarbon group is R a42 Similar to the examples given earlier, the same types of bases can be cited. L 44 As for the alkanediyl groups with 1 to 6 carbon atoms, the alkanediyl groups with 2 to 4 carbon atoms are... Iyl groups are preferred, and ethylene groups are more preferred.

[0179] Examples of structural units represented by formula (a4-2) include formulas (a4-1-1) to (a4 The structural units represented in (a4-2) are as follows: R f5 The structural unit in which the corresponding methyl group is replaced by a hydrogen atom is also represented by formula (a4-2). It can be cited as a structural unit.

[0180] An example of a structural unit (a4) is the structural unit represented by formula (a4-3). TIFF2026108698000130.tif5771[In formula (a4-3), R f7 represents a hydrogen atom or a methyl group. L 5 This represents an alkanediyl group with 1 to 6 carbon atoms. A f13 This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, which may contain a fluorine atom. vinegar. X f12 This represents *-O-CO- or *-CO-O- (* is A f13 This represents the connection point. ). A f14 This represents a saturated hydrocarbon group having 1 to 17 carbon atoms, which may contain a fluorine atom. However, A f13 and A f14 At least one of them has a fluorine atom, L 5 , A f13 and A f14 The upper limit for the total number of carbon atoms is 20.

[0181] L 5 The alkanediyl group in A is a41 An example using the alkanediyl group in Similar to the same basic elements as those mentioned above, they are examples of the same basic elements as those found in other materials. A f13 A preferred divalent saturated hydrocarbon group which may have a fluorine atom is A divalent chain-type saturated hydrocarbon group which may have a fluorine atom and a fluorine atom A divalent alicyclic saturated hydrocarbon group, more preferably a perfluoroalkanedi It is a lu group. Examples of divalent chain-type saturated hydrocarbon groups that may contain a fluorine atom include methylene groups and ethyl acetate groups. Alkanediyl groups such as len group, propanediyl group, butanediyl group and pentanediyl group ; Difluoromethylene group, perfluoroethylene group, perfluoropropanediyl group, Perfluoroalkanes such as the fluorobutanediyl group and the perfluoropentanediyl group. Examples include diyl groups. Divalent alicyclic saturated hydrocarbon groups, which may contain a fluorine atom, are monocyclic and polycyclic. A slight misalignment is also acceptable. Examples of monocyclic groups include cyclohexanediyl groups and perfluorocyclodiyl groups. Examples include the xandiyl group. Polycyclic groups include the adamantanediyl group and norbol. Examples include the nandiyl group and the perfluoroadamantanediyl group. A f14 The saturated hydrocarbon group and the saturated hydrocarbon group which may have a fluorine atom are R a42 in Similar groups to those exemplified can be cited. Among them, the trifluoromethyl group and the difluoromethyl group are particularly noteworthy. Tyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1 ,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3, 3,3-Pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2, 2,3,3,4,4-Octafluorobutyl group, butyl group, perfluoropentyl group, 2 ,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group , perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group and per Fluoroctyl groups and other alkyl fluorides, cyclopropylmethyl groups, cyclopropyl groups Cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group Xyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbol Nyl group, norbornylmethyl group, perfluoroadamantyl group, perfluoroadamantyl A methyl group is preferred.

[0182] In equation (a4-3), L 5 An ethylene group is preferred. A f13 The divalent saturated hydrocarbon group is a divalent chain-type saturated hydrocarbon group having 1 to 6 carbon atoms and carbon A group containing a divalent alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms is preferred, and a divalent chain having 2 to 3 carbon atoms is preferred. A hydrocarbon group is even more preferred. A f14 The saturated hydrocarbon group is a chain-type saturated hydrocarbon group having 3 to 12 carbon atoms and a group having 3 to 12 carbon atoms. Groups containing alicyclic saturated hydrocarbon groups are preferred, and chain-type saturated hydrocarbon groups having 3 to 10 carbon atoms and Groups containing alicyclic saturated hydrocarbon groups having 3 to 10 carbon atoms are even more preferred. Among them, A f14 teeth Preferably, the group contains an alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, and more preferably, Cyclopropylmethyl group, cyclopentyl group, cyclohexyl group, norbornyl group and It is a damantyl group.

[0183] Examples of structural units represented by equation (a4-3) include equation (a4-1'-1) ~ equation (a The structural units represented in 4-1'-11) are listed below. Keru R f7 The structural unit in which the corresponding methyl group is replaced by a hydrogen atom is also shown in formula (a4-3). It can be cited as a structural unit.

[0184] As a structural unit (a4), the structural unit represented by formula (a4-4) can also be cited. TIFF2026108698000131.tif4466[In formula (a4-4), R f21 represents a hydrogen atom or a methyl group. A f21 is, -(CH2) j1 -,-(CH2) j2 -O-(CH2) j3 - or - (CH2) j4 - CO-O-(CH2) j5 - represents j1 through j5 each independently represent an integer from 1 to 6. R f22This represents a saturated hydrocarbon group with 1 to 10 carbon atoms containing a fluorine atom.

[0185] R f22 The saturated hydrocarbon group is R a42 Examples include the same saturated hydrocarbon group represented by . R f22 This refers to an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom, or a carbon atom containing a fluorine atom. A cycloaliphatic hydrocarbon group having 1 to 10 carbon atoms is preferred, and an alkyl group having 1 to 10 carbon atoms and a fluorine atom is preferred. A fluorine group is more preferred, and an alkyl group having 1 to 6 carbon atoms and containing a fluorine atom is even more preferred.

[0186] In equation (a4-4), A f21 As for, -(CH2) j1 - is preferred, ethylene A group or a methylene group is more preferred, and a methylene group is even more preferred.

[0187] Examples of structural units represented by formula (a4-4) include the following structural units and the following formula In the structural unit shown, R in structural unit (a4-4) f21 The methyl group corresponding to One example is a structural unit in which a hydrogen atom has been replaced. JPEG2026108698000132.jpg84155

[0188] If resin (A) contains structural units (a4), the content of these units is equal to the total structural units of resin (A). For this, 1 to 20 mol% is preferred, 2 to 15 mol% is more preferred, and 3 to 10 mol% That is even more preferable.

[0189] <Structural Unit (a5)> The non-leaved hydrocarbon groups possessed by structural unit (a5) include linear, branched, or cyclic hydrocarbons. Groups having a group are examples. In particular, structural unit (a5) has an alicyclic hydrocarbon group. The base is preferable. Examples of structural units (a5) include the structural unit represented by formula (a5-1). . TIFF2026108698000133.tif3971[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 This represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the water contained in this alicyclic hydrocarbon group The elementary atoms may be substituted with aliphatic hydrocarbon groups having 1 to 8 carbon atoms. L 55 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated hydrocarbon group The -CH2- group contained in may be replaced by -O- or -CO-.

[0190] R 52 The alicyclic hydrocarbon group in this can be either monocyclic or polycyclic. Examples of alicyclic hydrocarbon groups include cyclopropyl group, cyclobutyl group, and cyclopene. Examples include chill groups and cyclohexyl groups. Examples of polycyclic alicyclic hydrocarbon groups include, for example, Examples include adamantyl groups and norbornyl groups. Aliphatic hydrocarbon groups with 1 to 8 carbon atoms include, for example, methyl, ethyl, propyl, and iso groups. Propyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl Examples include alkyl groups such as the octyl group and the 2-ethylhexyl group. Examples of alicyclic hydrocarbon groups with substituents include the 3-methyladamantyl group. ru. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably k is an adamantyl group, a norbornyl group, or a cyclohexyl group. L 55In this context, divalent saturated hydrocarbon groups include divalent chain saturated hydrocarbon groups and divalent lipids. Examples include cyclic saturated hydrocarbon groups, preferably divalent chain saturated hydrocarbon groups. Examples of divalent chain-type saturated hydrocarbon groups include methylene groups, ethylene groups, and propanedi groups. Examples include alkanediyl groups such as the yl group, butanediyl group, and pentanediyl group. The divalent alicyclic saturated hydrocarbon group may be monocyclic or polycyclic. Examples of saturated hydrocarbon groups include cyclopentanediyl groups and cyclohexanediyl groups. Examples include the roalkanediyl group. Examples of polycyclic divalent alicyclic saturated hydrocarbon groups include ada Examples include mantanediyl groups and norbornanediyl groups.

[0191] L 55 The -CH2- contained in the divalent saturated hydrocarbon group represented by can be replaced with -O- or -CO-. Examples of the replaced groups include those represented by formulas (L1-1) to (L1-4). In the following formula, * and ** represent bonding sites, respectively, with * representing the bonding site with the oxygen atom. TIFF2026108698000134.tif18165 formula (L1-1), X x1 This represents *-O-CO- or *-CO-O- (* is L x1 (This represents the connection point with [another element].) . L x1 This represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 17 carbon atoms. L x4This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 15 carbon atoms. L x6 and L x7 Each of these independently consists of a single bond or a divalent aliphatic saturated carbon with 1 to 14 carbon atoms. It represents a hydrogen group. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less. In formula (L1-4), L x8 and L x9 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 This represents a divalent alicyclic saturated hydrocarbon group with 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less.

[0192] L x1 Preferably, a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably, It is a methylene group or an ethylene group. L x2 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably It is a single bond. L x3 Preferably, it is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 Preferably, a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably, It is a methylene group or an ethylene group. L x6 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably The group is either a methylene group or an ethylene group. L x7 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably A single bond or a methylene group is a single bond or a methylene group. L x9 Preferably, a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably A single bond or a methylene group is a single bond or a methylene group. W x1 Preferably, a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably It is either a cyclohexanediyl group or an adamantanediyl group.

[0193] Examples of groups represented by formula (L1-1) include the divalent groups shown below. TIFF2026108698000135.tif23135

[0194] TIFF2026108698000136.tif34117

[0195] Examples of groups represented by formula (L1-2) include the divalent groups shown below. TIFF2026108698000137.tif23130

[0196] Examples of groups represented by formula (L1-3) include the divalent groups shown below. TIFF2026108698000138.tif15147

[0197] Examples of groups represented by formula (L1-4) include the divalent groups shown below. TIFF2026108698000139.tif26114

[0198] L 55 Preferably, it is a single bond or a group represented by formula (L1-1).

[0199] Structural units (a5-1) include the structural units shown below and the structural units within the following structural units ( a5-1) R 51 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom include It can be done. TIFF2026108698000140.tif111150 If resin (A) contains structural unit (a5), its content is the total structural unit of resin (A). For this, 1 to 30 mol% is preferred, 2 to 20 mol% is more preferred, and 3 to 15 mol% That is even more preferable.

[0200] <Structural Unit (a6)> Structural unit (a6) is a structural unit having an -SO2- group, and has an -SO2- group in its side chain. It is preferable to do so. A structural unit having an -SO2- group may also have a linear structure having an -SO2- group. or it may have a branched structure having an -SO2- group, or a ring having an -SO2- group It may have a ring structure (monocyclic and polycyclic structures). Preferably, a ring having an -SO2- group. A structural unit having a cyclic structure, more preferably a cyclic structure containing -SO2-O- It is a structural unit that has a Ton ring.

[0201] As a sultone ring, the following equation (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula ( T 1 A ring represented by -4) is an example. The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. This refers to a bridging ring containing -SO2-O- as the atomic group that makes up the ring, and is given by equation (T 1 -1 ) and formula (T 1 A ring represented by equation (T) is an example. A Sultone ring is given by equation (T 1 (-2) is expressed as Like a ring, in addition to -SO2-O-, there are also heteroatoms as atomic groups that make up the ring. It may also contain heteroatoms. Examples of heteroatoms include oxygen atoms, sulfur atoms, or nitrogen atoms. , preferably an oxygen atom. TIFF2026108698000141.tif3186

[0202] The sultone ring may have substituents, such as halogen atoms or hydroxyl groups. Alkyl groups with 1 to 12 carbon atoms, halogen atoms, hydroxyl groups, cyanoacrylate atoms may also be present. alkoxy groups with 1 to 12 carbon atoms, aryl groups with 6 to 12 carbon atoms, and aryl groups with 7 to 12 carbon atoms. Larkyl group, glycidyloxy group, alkoxycarbonyl group having 2 to 12 carbon atoms and carbon number Examples include 2-4 alkylcarbonyl groups.

[0203] Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. . Alkyl groups include methyl, ethyl, propyl, butyl, pentyl, and hexyl groups. Examples include syl groups, octyl groups, and decyl groups, preferably alkyl groups having 1 to 6 carbon atoms. More preferably, it is a methyl group. Examples of alkyl groups having a halogen atom include trifluoromethyl and perfluoroethyl groups. Perfluoropropyl group, perfluoroisopropyl group, perfluorobutyl group, Perfluorosec-butyl group, perfluorotert-butyl group, perfluoropentyl chloromethyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl group and triyomethyl group Examples include methyl groups, preferably trifluoromethyl groups. Examples of alkyl groups having a hydroxyl group include hydroxymethyl and 2-hydroxymethyl groups. Examples include hydroxyalkyl groups with a chill group. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, and pentoxy groups. oxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group Examples include the dodecyloxy group. Examples of aryl groups include phenyl, naphthyl, anthryl, and p-methylphenyl groups. p-tert-butylphenyl group, p-adamantylphenyl group, tolyl group, xylyl group, cumyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl Examples include the 2-methyl-6-ethylphenyl group and the 2-methyl-6-ethylphenyl group. Examples of aralkyl groups include benzyl group, phenethyl group, phenylpropyl group, and naphthyl group. Examples include tyl groups and naphthyl ethyl groups. Examples of alkoxycarbonyl groups include methoxycarbonyl groups and ethoxycarbonyl groups. Examples include groups in which an alkoxy group and a carbonyl group are bonded, preferably having 6 or fewer carbon atoms. Examples include the coxycarbonyl group, and more preferably the methoxycarbonyl group. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. It can be done.

[0204] From the viewpoint of ease of manufacturing monomers that lead to structural unit (a6), substituents are not present. A sultone ring is preferred. As the sultone ring, the ring represented by the following formula (T1') is preferred. TIFF2026108698000142.tif3172[In formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This is an alkyl group having 1 to 12 carbon atoms, which may have a halogen atom or a hydroxyl group. C1-C12 alkoxy group, halogen atom, hydroxyl group, cyano group, C1-C12 alkoxy group, C1 6-12 aryl groups, 7-12 aralkyl groups, glycidyloxy groups, 2 carbon atoms This represents an alkoxycarbonyl group with up to 12 carbon atoms or an alkylcarbonyl group with 2 to 4 carbon atoms. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They are the same It's fine if it exists or not. The connection point can be at any location. X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group. ru. R 41 Examples include substituents similar to those of a sultone ring, such as halogen atoms or hydrides C1 to C12 alkyl groups, which may have a roxy group, are preferred.

[0205] As a sultone ring, the ring represented by formula (T1) is more preferable. TIFF2026108698000143.tif3148[In formula (T1), R 8 This is an alkyl group having 1 to 12 carbon atoms, which may have a halogen atom or a hydroxyl group. Groups, halogen atoms, hydroxyl groups, cyano groups, alkoxy groups with 1 to 12 carbon atoms, and 6 carbon atoms. ~12 aryl groups, aralkyl groups with 7-12 carbon atoms, glycidyloxy groups, 2- carbon atoms This represents 12 alkoxycarbonyl groups or alkylcarbonyl groups with 2 to 4 carbon atoms. m represents an integer from 0 to 9. When m is 2 or greater, multiple R8 They are the same. They can also be different. The connection point can be at any location.

[0206] R 8 R 41 Similar examples include the above. In formula (T1'), ma and in formula (T1), m are preferably 0 or 1. More preferably, it is 0.

[0207] The following are examples of rings represented by equation (T1') and equation (T1): The connection point can be at any position. TIFF2026108698000144.tif47145

[0208] The structural unit having a sultone ring preferably has the following group: * in the following group The symbol represents the bonding site. TIFF2026108698000145.tif45144

[0209] The structural unit having the -SO2- group preferably also has a group derived from a polymerizable group. The polymerizable groups include vinyl group, acryloyl group, methacryloyl group, and acryloyl Oxy group, methacryloyloxy group, acryloylamino group, methacryloylamino group, Examples include acryloylthio groups and methacryloylthio groups. In particular, the monomer that leads to the structural unit (a6) preferably has an ethylenically unsaturated bond. It is a monomer, and more preferably a (meth)acrylic monomer.

[0210] The structural unit (a6) is preferably a structural unit represented by formula (Ix). TIFF2026108698000146.tif4956[In formula (Ix), R xThis is an alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, and water Represents an elementary atom or a halogen atom. A xx is an oxygen atom, -N(R c )- or represents a sulfur atom. A x This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated hydrocarbon group contains -CH2- is -O-, -CO-, or -N(R d )- may be replaced with this. X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This is an alkyl group having 1 to 12 carbon atoms, which may have a halogen atom or a hydroxyl group. C1-C12 alkoxy group, halogen atom, hydroxyl group, cyano group, C1-C12 alkoxy group, C1 6-12 aryl groups, 7-12 aralkyl groups, glycidyloxy groups, 2 carbon atoms This represents an alkoxycarbonyl group with up to 12 carbon atoms or an alkylcarbonyl group with 2 to 4 carbon atoms. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They are the same It's fine if it exists or not. R c and R d Each of these independently represents either a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

[0211] R x Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. It is possible. R x Examples of alkyl groups include methyl group, ethyl group, n-propyl group, isopropyl group. Pyr group, n-butyl group, sec-butyl group, tert-butyl group, n-pentyl group and n - Examples include hexyl groups, preferably alkyl groups having 1 to 4 carbon atoms, and more preferably This is either a methyl group or an ethyl group. Rx Examples of alkyl groups having a halogen atom include trifluoromethyl group, pe Perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluoroethyl group Olobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, per Fluoropentyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl Examples include the triiodomethyl group and other similar groups. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and more preferably water It is an elementary atom, a methyl group, or an ethyl group, and more preferably a hydrogen atom or a methyl group.

[0212] A x Examples of divalent saturated hydrocarbon groups include linear alkanediyl groups and branched alkanediyl groups. Examples include divalent alicyclic saturated hydrocarbon groups, monocyclic or polycyclic, and of these groups, 2 Combinations of more than one species are also acceptable. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1, 2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane- 1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, do Decane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,1 4-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1- Linear alkanediyl groups such as diyl groups and propane-2,2-diyl groups; Butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylprop Pan-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group Branched alkanediyl groups such as yl groups; Cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexa Cycloalkanediyl groups such as n-1,4-diyl group and cyclooctane-1,5-diyl group A monocyclic, divalent, alicyclic saturated hydrocarbon group; norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane- Polycyclic divalent alicyclic saturated carbon such as 1,5-diyl group and adamantane-2,6-diyl group Examples include hydrogen groups.

[0213] R 41 , X 11 And ma can be the same as in equation (T1'). Examples of sultone rings include those mentioned above, and among them, those whose bonding positions have been identified are also noteworthy. It is preferable to do so.

[0214] The following are examples of structural units (a6): TIFF2026108698000147.tif93150

[0215] In particular, equations (a6-1), (a6-2), (a6-6), (a6-7), ( Structural units represented by formulas a6-8) and (a6-12) are preferred, and formulas (a6-1), ( a6-2), more preferably, structural units represented by formulas (a6-7) and (a6-8). If resin (A) has structural units (a6), the content of these units is the total structural unit content of resin (A). A percentage of the total volume is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and 3 to 30 mol%. A percentage is even more preferable.

[0216] <Structural Unit (II)> Resin (A) further decomposes upon exposure to generate acid, resulting in structural units (hereinafter referred to as "structural units") It may contain (II) (in some cases). Specifically, structural unit (II) is Examples include the structural unit described in Japanese Patent Publication No. 2016-79235, with a sulfonate group in the side chain. Alternatively, a structural unit having a carboxylate group and an organic cation, or a side chain with a sulfonio group. It is preferable that the structural unit has an organic anion.

[0217] Structural units having a sulfonate group or carboxylate group and an organic cation in the side chain It is preferable that the structural unit is represented by formula (II-2-A'). TIFF2026108698000148.tif35104[In formula (II-2-A'), X III3 This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the saturated hydrocarbon group contains The -CH2- that is present may be replaced by -O-, -S-, or -CO-, and the saturated coal The hydrogen atoms contained in the hydrogen group are halogen atoms, and the number of carbon atoms that may contain halogen atoms. It may be replaced by alkyl groups or hydroxyl groups numbered 1 to 6. A x1 This represents an alkanediyl group having 1 to 8 carbon atoms, and the water contained in the alkanediyl group The elementary atoms may be substituted with fluorine atoms or perfluoroalkyl groups having 1 to 6 carbon atoms. stomach. RA - This represents a sulfonate group or a carboxylate group. R III3 This is a hydrogen atom, a halogen atom, or a C1 atom which may have a halogen atom. Represents alkyl groups up to 6. ZA + This represents an organic cation.

[0218] R III3The halogen atoms represented include fluorine, chlorine, bromine, and yo Examples include porcini atoms. R III3 A C1-C6 alkyl group which may have a halogen atom represented by So, R a8 A C1-C6 alkyl group which may have a halogen atom represented by the same Some examples include the following. A x1 Examples of alkanediyl groups with 1 to 8 carbon atoms, represented by the methylene group and the ethylene group, are available. , propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl Group, hexane-1,6-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group yl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4- Diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl Examples include the 1,4-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. ru. A x1 Perfluoroalkyl groups having 1 to 6 carbon atoms that may be substituted include: , trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoro Roisopropyl group, perfluorobutyl group, perfluorosec-butyl group, perfluorote Examples include rt-butyl groups, perfluoropentyl groups, and perfluorohexyl groups. X III3 Divalent saturated hydrocarbon groups having 1 to 18 carbon atoms, as represented by , can be linear or branched. Examples include alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and these These can be combined in any way. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1, 2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane- 1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, do Linear alkanediyl groups such as decane-1,12-diyl groups; butane-1,3-diyl groups, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pen Branched alkanedi such as tan-1,4-diyl group and 2-methylbutane-1,4-diyl group cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclo Cycloalkanes such as xane-1,4-diyl groups and cyclooctane-1,5-diyl groups Lu group; norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamanta Divalent polycyclic alicyclic saturated carbon such as n-1,5-diyl groups and adamantane-2,6-diyl groups Examples include hydrogenated groups. The -CH2- group in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO-. Examples include the divalent groups represented by equations (X1) to (X53). However, Furthermore, the -CH2- group contained in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO-. The number of carbon atoms in each preceding element is 17 or less. In the following formula, * and ** represent bonding sites. * is A x1 This represents the connection point. JPEG2026108698000149.jpg145161

[0219] X 3 This represents a divalent saturated hydrocarbon group with 1 to 16 carbon atoms. X 4 This represents a divalent saturated hydrocarbon group with 1 to 15 carbon atoms. X 5This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms. X 6 This represents a divalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 7 This represents a trivalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 8 This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms.

[0220] ZA in equation (II-2-A') + This is the cation Z1 in the salt represented by formula (B1). + Similar examples include the above.

[0221] The structural unit represented by formula (II-2-A') is the structural unit represented by formula (II-2-A) It is preferable that this be the case. TIFF2026108698000150.tif38109 [In formula (II-2-A), R III3 , X III3 and ZA + This expresses the same meaning as above. z2A represents an integer between 0 and 6. R III2 and R III4 Each of these is independently a hydrogen atom, a fluorine atom, or a carbon atom with 1 carbon atom. Represents a perfluoroalkyl group of ~6, and when z2A is 2 or more, multiple R III2 and R III4 They may be the same or they may be different. Q a and Q b Each is independently a fluorine atom or a perfluoroal with 1 to 6 carbon atoms. [Represents the kill group.] R III2 , R III4 Q a and Q b Perfluoroalkyl compounds with 1 to 6 carbon atoms, represented by As for the group Q, see the aforementioned Q b1This is the same as a perfluoroalkyl group with 1 to 6 carbon atoms, as represented by This is one example.

[0222] The structural unit represented by formula (II-2-A) is the same as the structural unit represented by formula (II-2-A-1). It is preferable that it be in that position. TIFF2026108698000151.tif5577 [In formula (II-2-A-1), R III2 , R III3 , R III4 Q a Q b and ZA + This expresses the same meaning as above. . R III5 This represents a saturated hydrocarbon group with 1 to 12 carbon atoms. z2A1 represents an integer between 0 and 6. X I2 This represents a divalent saturated hydrocarbon group having 1 to 11 carbon atoms, and contains -CH2- may be replaced with -O-, -S-, or -CO- in the saturated carbonized water. The hydrogen atoms in the elementary group may be substituted with halogen atoms or hydroxyl groups. R III5 Examples of saturated hydrocarbon groups having 1 to 12 carbon atoms include the methyl group and the ethyl group. propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pe Nthyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group and Examples include linear or branched alkyl groups such as dodecyl groups. X I2 As a divalent saturated hydrocarbon group represented by , X III3 Divalent saturated carbon represented by Examples include those similar to hydrogenated groups.

[0223] The structural unit represented by formula (II-2-A-1) is represented by formula (II-2-A-2). A structural unit that can be made into a structure is preferable. TIFF2026108698000152.tif5287 [In formula (II-2-A-2), R III3 , R III5 and ZA + This expresses the same meaning as above. m and nA independently represent either 1 or 2.

[0224] Examples of structural units represented by formula (II-2-A') include the following structural unit, R III3 The group corresponding to the methyl group is a hydrogen atom, a halogen atom (for example, a fluorine atom), or a halogen. A C1-C6 alkyl group that may contain atoms (e.g., a trifluoromethyl group). Examples include structural units that have been replaced and structural units described in International Publication No. 2012 / 050015. It can be done. ZA + This represents an organic cation. JPEG2026108698000153.jpg86163

[0225] A structural unit having a sulfonio group and an organic anion in its side chain is represented by formula (II-1-1). It is preferable that the structural unit is such that it can be formed. TIFF2026108698000154.tif3791 [In formula (II-1-1), A II1 This represents a single bond or a divalent linking group. R II1 This represents a divalent aromatic hydrocarbon group with 6 to 18 carbon atoms. R II2 and R II3 Each of these independently represents a hydrocarbon group with 1 to 18 carbon atoms, and R II2 and R II3 They bond to each other, forming a ring with the sulfur atoms to which they are bonded. That's fine. R II4 This is a hydrogen atom, a halogen atom, or a C1-C6 atom which may have a halogen atom. This represents a luquill group. A - This represents an organic anion. R II1 As a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms, the phenylene group is an example. Examples include naphthylene groups, etc. R II2 and R II3 Examples of hydrocarbon groups represented include alkyl groups and alicyclic hydrocarbon groups. Examples include aromatic hydrocarbon groups and groups formed by combining them. Examples of alkyl groups and alicyclic hydrocarbon groups are the same as those described above. Aromatic hydrocarbon groups include phenyl group, naphthyl group, anthryl group, biphenyl group, Examples include aryl groups such as phenanthryl groups. The combined groups include those that combine the alkyl group and alicyclic hydrocarbon group mentioned above. , aralkyl groups such as benzyl groups, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl Nyl group, p-tert-butylphenyl group, tolyl group, xylyl group, coumenyl group, mesityl (e.g., 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group), alicyclic carbon Aromatic hydrocarbon groups having a hydrogenated group (p-cyclohexylphenyl group, p-adamantyl group) Examples include phenyl groups, phenylcyclohexyl groups, and other aryl-cycloalkyl groups. It can be done. R II4 The halogen atoms represented include fluorine, chlorine, bromine, and iodine. Examples include elementary atoms. R II4 A C1-C6 alkyl group which may have a halogen atom represented by R a8 The same as an alkyl group having 1 to 6 carbon atoms which may have a halogen atom represented by Some examples can be listed. A II1Examples of divalent linking groups represented by include divalent saturated carbons with 1 to 18 carbon atoms. A hydrogen group is one example, and the -CH2- contained in the divalent saturated hydrocarbon group is -O-, -S- or It may be replaced with -CO-. Specifically, X III3 Represented by 1 to 1 carbon atoms Examples include the same divalent saturated hydrocarbon group as in 8.

[0226] The structural units containing cations in formula (II-1-1) are the structural units represented below and biR II4 The group equivalent to the methyl group is a hydrogen atom, a halogen atom (for example, a fluorine atom) or This is an alkyl group having 1 to 6 carbon atoms, which may have a halogen atom (for example, trifluoromethyl alkyl group). Examples include structural units that have been replaced by chill groups, etc. JPEG2026108698000155.jpg84130

[0227] A - Examples of organic anions represented by this include sulfonic acid anions and sulfonylimido anions. Examples include sulfonylmethide anions and carboxylic acid anions. - It is represented The organic anion is preferably a sulfonate anion, and as for the sulfonate anion, as mentioned above. It is more preferable that the anion is contained in the salt represented by formula (B1). Anions, sulfonylmethide anions, and carboxylate anions are represented by the above formula (I). The anion AI contained in the salt - It is preferable that it be so.

[0228] Examples of structural units represented by formula (II-1-1) include the following structural units. It is possible. JPEG2026108698000156.jpg88149

[0229] When resin (A) contains structural unit (II), the content of structural unit (II) is: The amount is preferably 1 to 20 mol%, and more preferably 2 to 1 mol%, relative to the total structural units of fat (A). The percentage is 15 mol%, and more preferably 3 to 10 mol%.

[0230] The resin (A) may contain structural units other than those described above, and such structural units In terms of rank, well-known structural units in this field can be cited.

[0231] The resin (A) is preferably a resin consisting of structural unit (a1) and structural unit (s), In other words, it is a copolymer of monomer (a1) and monomer (s). The structural unit (a1) is preferably structural unit (a1-0), structural unit (a1-1) and structural unit (a1-0) Manufacturing unit (a1-2) (preferably having a cyclohexyl group or a cyclopentyl group) At least one, more preferably at least two, selected from the group consisting of (production units). More preferably, a group consisting of structural unit (a1-1) and structural unit (a1-2). It consists of at least two types selected from the following. The structural unit (s) is preferably from the group consisting of structural unit (a2) and structural unit (a3). At least one of the selected structural units (a2) is preferably structural unit (a2-1). Alternatively, it is a structural unit (a2-A). The structural unit (a3) ​​is preferably expressed by formula (a3-1). The structural units that are formed, the structural units represented by formula (a3-2) and the structural units represented by formula (a3-4) It is at least one of the units selected from the group. Each structural unit constituting resin (A) may be used individually or in combination of two or more types. Furthermore, using monomers that derive these structural units, known polymerization methods (e.g., radical polymerization) can be used. Therefore, it can be manufactured. The content of each structural unit in resin (A) is used in polymerization. This can be adjusted by controlling the amount of monomer used. The weight-average molecular weight of resin (A) is preferably 2,000 or more (more preferably 2,5 00 or more, more preferably 3,000 or more), 50,000 or less (more preferably 30 (less than 15,000, more preferably less than 15,000). In this specification, weight average fraction The amount of molecules was determined by gel permeation chromatography under the conditions described in the examples. That is the case.

[0232] <Resins other than resin (A)> The resist composition of the present invention may also contain resins other than resin (A). Examples of resins other than resin (A) include structural unit (a4) or structural unit (a5). Examples include resins (hereinafter sometimes referred to as resin(X)). Among the resins (X), resins containing structural units (a4) are preferred. In resin (X), the content of structural unit (a4) is equal to the sum of all structural units in resin (X). In contrast, it is preferable that the amount be 30 mol% or more, and more preferably 40 mol% or more. Furthermore, it is more preferable that the amount be 45 mol% or more. The structural units that resin (X) may further possess include structural unit (a1) and structural unit (a2) Structural units (a3) ​​and structural units derived from other known monomers are examples. In particular, resin (X) consists only of structural unit (a4) and / or structural unit (a5). It is preferable that it be made of resin. Each structural unit constituting the resin (X) may be used individually or in combination of two or more types. These monomers that induce structural units can be used in known polymerization methods (e.g., radical polymerization). Therefore, it can be manufactured. The content of each structural unit in resin (X) is used in polymerization. This can be adjusted by controlling the amount of monomer used. The weight-average molecular weight of resin (X) is preferably 6,000 or more (more preferably 7,000). The value is 0 or greater, and 80,000 or less (more preferably 60,000 or less). The method for measuring the weight-average molecular weight is the same as in the case of resin (A).

[0233] If the resist composition of the present invention contains resin (X), its content is such that resin (A) 100 Preferably 1 to 60 parts by mass, and more preferably 1 to 50 parts by mass, relative to the mass. More preferably 1 to 40 parts by mass, and even more preferably 1 to 30 parts by mass. More preferably, the amount is 1 to 8 parts by mass.

[0234] The content of resin (A) in the resist composition is 8 in relation to the solid content of the resist composition. Preferably, it is 0% by mass or more and 99% by mass or less, and preferably 90% by mass or more and 99% by mass or less. It is preferable. Also, if it contains resins other than resin (A), then resin (A) and resins other than resin (A) The total content of the resin is 80% by mass or more and 99% by mass or less relative to the solid content of the resist composition. The resist composition is preferably as follows: The solid content of a substance and the resin content thereto are determined by liquid chromatography or gas chromatography. It can be measured using known analytical methods such as fluoroscopy.

[0235] <Solvent (E)> The solvent (E) content is typically 90% by mass or more and 99.9% by mass or less in the resist composition. Yes, preferably 92% by mass or more and 99% by mass or less, and more preferably 94% by mass or more. The content of solvent (E) is 99% by mass or less. The content of solvent (E) is determined, for example, by liquid chromatography or gas chromatography. It can be measured using known analytical methods such as chromatography.

[0236] The solvent (E) includes ethyl cellosolve acetate, methyl cellosolve acetate, and Glycol ether esters such as propylene glycol monomethyl ether acetate ; Glycol ethers such as propylene glycol monomethyl ether; Ethyl lactate, vinegar Esters such as butyl acid, amyl acetate, and ethyl pyruvate; acetone, methyl isobutyl Ketones such as lucetone, 2-heptanone, and cyclohexanone; γ-butyrolactone, etc. Examples include cyclic esters; etc. One of the solvents (E) may be used alone. You may use two or more types.

[0237] <Quencher (C)> Quencher (C) consists of basic nitrogen-containing organic compounds and acids generated from acid generators. Examples include salts that produce a less acidic acid than the resist composition quencher (C) If it contains, the quencher (C) content is based on the solid content of the resist composition, Preferably, it is about 0.01 to 15% by mass, and more preferably about 0.01 to 10% by mass. More preferably, about 0.1 to 8% by mass, and even more preferably 0.1 to 7% by mass. It is even more preferable if it is to a certain degree. Basic nitrogen-containing organic compounds include amines and ammonium salts. Examples include aliphatic amines and aromatic amines. Aliphatic amines include primary amines. Examples include amines, secondary amines, and tertiary amines.

[0238] Examples of amines include 1-naphthylamine, 2-naphthylamine, aniline, and diisopropylamine. Ruaniline, 2-,3- or 4-methylaniline, 4-nitroaniline, N-methylaniline Phosphorus, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine Octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, Dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine mine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, Trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, Methyldioctylamine, methyldinonylamine, methylddecylamine, ethyl dibuty Luamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine Ethyl dioctylamine, ethyl dinonylamine, ethyl didecylamine, dicyclo Xylmethylamine, Tris[2-(2-methoxyethoxy)ethyl]amine, Triiso Propanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine Mine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3' -dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmeth , 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridazole 4-methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl (Lu)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3 - Di(4 - pyridyl)propane, 1,2 - di(4 - pyridyloxy)ethane, di( (2 - pyridyl)ketone, 4,4’ - dipyridyl sulfide, 4,4’ - dipyridyl disulf ide, 2,2’ - dipyridylamine, 2,2’ - dipicolylamine, bipyridine, etc. are listed, preferably diisopropylaniline is listed, more preferably 2,6 - diiso propyl aniline is listed.

[0239] Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3 - (trifluoromethyl)phenyl trimethylammonium hydroxide, tetra - n - butylammonium salicylate, and choline, etc. are listed.

[0240] The acidity of the salt that generates an acid with a lower acidity than the acid generated from the acid generator is indicated by the acid dissociation constant (pKa). The salt that generates an acid with a lower acidity than the acid generated from the acid generator is a salt with an acid dissociation constant of the acid generated from the salt usually being - 3 < pKa, preferably - 1 < pKa < 7, and more preferably 0 < pKa < 5. Examples of the salt that generates an acid with a lower acidity than Examples include the salts described in Japanese Patent Publication No. 2 and Japanese Patent Application Publication No. 2011-191745. A salt that produces an acid weaker in acidity than the acid produced is preferably one that produces an acid weaker acid than the acid produced by the acid generator. It is a salt that generates a carboxylic acid with weaker acidity (a salt having a carboxylic acid anion), and More preferably, it is a weak acid intramolecular salt (D), and even more preferably, a weak acid intramolecular salt (D) It is a diphenyliodonium salt containing a phenyl group substituted with a carboxylate anion. . TIFF2026108698000157.tif114168

[0241] As a weak acid intramolecular salt (D), there is an iodonium cation with two phenyl groups bonded to it, At least one of the two phenyl groups bonded to the iodonium cation It is preferable that the diphenyliodonium salt has a substituted carboxylic acid anion. More specifically, the following salts can be cited.

[0242] TIFF2026108698000158.tif1695[In formula (D), R D1 and R D2 These are, independently, hydrocarbon groups with 1 to 12 carbon atoms and aluminum groups with 1 to 6 carbon atoms. Coxy group, acyl group with 2-7 carbon atoms, acyloxy group with 2-7 carbon atoms, acyloxy group with 2-7 carbon atoms This represents a lucoxycarbonyl group, a nitro group, or a halogen atom. m' and n' each independently represent an integer from 0 to 4, and when m' is 2 or greater... In combination, multiple R D1 They may be the same or different, and if n' is 2 or more, there may be multiple R D2 is the same It may be one or different. R D1 and R D2Examples of hydrocarbon groups include chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic carbon groups. Examples include hydrogen groups and groups formed by combining them. Examples of chain hydrocarbon groups include methyl, ethyl, propyl, isopropyl, and butyl groups. Alkyl groups such as isobutyl group, tert-butyl group, pentyl group, hexyl group, and nonyl group. One example is the 'L' group. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and can be saturated or unsaturated. Any misalignment is acceptable. Cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl Cycloalkyl groups such as cyclononyl groups and cyclododecyl groups, norbonyl groups, adamant Examples include chill groups. Examples of aromatic hydrocarbon groups include phenyl group, 1-naphthyl group, 2-naphthyl group, and 2-methyl group. methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group, 4-propylphenyl group, 4-isopropylphenyl group, 4-butylphenyl group, 4-t -Butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, ant Lyl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group , biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6- Examples include aryl groups such as ethylphenyl groups. The groups formed by combining these include alkyl-cycloalkyl groups. , cycloalkyl-alkyl groups, aralkyl groups (e.g., phenylmethyl group, 1-phenyl ethyl group, 2-phenylethyl group, 1-phenyl-1-propyl group, 1-phenyl-2 -propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-propyl Phenyl-1-butyl group, 5-phenyl-1-pentyl group, 6-phenyl-1-hexyl group Examples include: Examples of alkoxy groups include methoxy groups and ethoxy groups. Examples of acyl groups include acetyl, propanoyl, benzoyl, and cyclohexanecal. Examples include the bonyl group. Examples of acyloxy groups include groups in which an oxy group (-O-) is bonded to the above-mentioned acyl group. It can be done. As an alkoxycarbonyl group, a carbonyl group (-CO-) is bonded to the above alkoxy group. Examples include combined bases, etc. Examples of halogen atoms include fluorine, chlorine, and bromine atoms. R D1 and R D2 These are, independently, alkyl groups with 1 to 8 carbon atoms and sicq groups with 3 to 10 carbon atoms. alkoxy groups with 1 to 6 carbon atoms, acyl groups with 2 to 4 carbon atoms, and groups with 2 to 4 carbon atoms. Acyloxy group, alkoxycarbonyl group with 2-4 carbon atoms, nitro group, or halogen atom preferable. m' and n' are each preferably independent integers between 0 and 2. It is more preferable that m' is 2 or more, D1 Even if they are the same, they are different Also, if n' is 2 or greater, multiple R D2 They may be the same or different.

[0243] More specifically, the following salts are examples: TIFF2026108698000159.tif72165

[0244] <Other ingredients> The resist composition of the present invention may optionally include components other than those described above (hereinafter referred to as "other components"). It may be referred to as "F (F)". It may contain other components (F) in particular. There are no known additives in the resist field, such as sensitizers, dissolution inhibitors, surfactants, and stabilizers. Agents, dyes, etc. can be used.

[0245] <Preparation of resist composition> The resist composition of the present invention comprises a salt (I) and a resin (A), and, if necessary, an acid generator. Agent (B), resins other than resin (A), solvent (E), quencher (C) and other components ( It can be prepared by mixing F). The mixing order is arbitrary and not particularly limited. It is not. The temperature when mixing should be between 10 and 40°C, depending on the type of resin, etc. and the solvent used in the resin, etc. An appropriate temperature can be selected depending on the solubility of E). The mixing time depends on the mixing temperature. Depending on the situation, an appropriate time can be selected from 0.5 to 24 hours. Furthermore, a special mixing method is also available. There are no restrictions, and stirring and mixing can be used. After mixing each component, filter the mixture using a filter with a pore size of approximately 0.003 to 0.2 μm. It is preferable to do so.

[0246] <Method for manufacturing resist patterns> The method for manufacturing a resist pattern of the present invention is: (1) A step of coating the resist composition of the present invention onto a substrate, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, (5) Includes a step of developing the composition layer after heating. To coat the resist composition onto the substrate, a commonly used device such as a spin coater is used. This can be done. The substrate can be an inorganic substrate such as a silicon wafer, with a resist on the surface. An example is an organic substrate on which a film has been formed. Before applying the resist composition, the substrate is cleaned. Alternatively, an anti-reflective coating or the like may be formed on the substrate. By drying the applied composition, the solvent is removed and a composition layer is formed. Drying is performed. For example, evaporating a solvent using a heating device such as a hot plate (so-called private heating) This is done by (k) or by using a vacuum device. The heating temperature is 50-200°C. It is preferable that the heating time be 10 to 180 seconds. Also, vacuum drying The pressure used during this process is 1 to 1.0 × 10 5 It is preferable that the pressure be around Pa. The resulting composition layer is typically exposed using an exposure machine. The exposure machine is an immersion exposure machine. This is also good. As exposure light sources, KrF excimer laser (wavelength 248nm), ArF excimer Ultraviolet lasers such as lasers (wavelength 193nm) and F2 excimer lasers (wavelength 157nm) Laser light is emitted from solid-state laser sources (such as YAG or semiconductor lasers). These devices emit high-harmonic laser light in the far-ultraviolet or vacuum-ultraviolet region by wavelength conversion, such as electron beams and ultra-high-frequency lasers. Various methods can be used, such as those that irradiate with ultraviolet light (EUV). In some cases, the act of irradiating with these radiations is collectively referred to as "exposure." Typically, exposure is performed through a mask corresponding to the desired pattern. The exposure light source is electron In the case of lines, exposure may be performed by direct drawing without using a mask. The composition layer after exposure is heat-treated to promote the deprotection reaction at the acid-unstable groups. Perform a loose post-exposure bake. The heating temperature is usually around 50-200°C, or as preferred. The temperature is approximately 70-150°C. The hydrophilicity or hydrophobicity of the resin on the surface of the composition after heating. Chemical treatments (silylation) may be performed to adjust the properties. Also, before developing, the post-exposure components may be combined. The process of coating, drying, exposure, and heating of the resist composition may be repeated on the resulting layer. The heated composition layer is typically developed using a developing device and a developing solution. Examples include the dipping method, paddle method, spray method, and dynamic dispensing method. The development temperature is preferably, for example, 5 to 60°C, and the development time is, for example, 5 It is preferable that the developing time is ~300 seconds. By selecting the type of developer as follows: Positive-type resist patterns or negative-type resist patterns can be manufactured. When producing a positive-type resist pattern from the resist composition of the present invention, the developer is used as follows: An alkaline developer is used. The alkaline developer is a type of alkaline water used in this field. Any solution will do. For example, tetramethylammonium hydroxide or (2-hydroxy Examples include aqueous solutions of ethyl)trimethylammonium hydroxide (commonly known as choline). Alkaline developers may contain surfactants. After development, the resist pattern is washed with ultrapure water, and then the water remaining on the substrate and pattern is washed away. It is preferable to remove it. When manufacturing a negative-type resist pattern from the resist composition of the present invention, the developer is used as A developer containing an organic solvent (hereinafter sometimes referred to as "organic developer") is used. Organic solvents contained in organic developers include ketosols such as 2-hexanone and 2-heptanone. Solvents; glycol ethers such as propylene glycol monomethyl ether acetate Sterling solvents; ester solvents such as butyl acetate; propylene glycol monomethyl ether, etc. Glycol ether solvents; amide solvents such as N,N-dimethylacetamide; anisole Examples include aromatic hydrocarbon solvents such as the like. In organic developer solutions, the content of organic solvents is preferably 90% by mass or more and 100% by mass or less. It is more preferable that the concentration be 95% by mass or more and 100% by mass or less, and that it be substantially composed of only organic solvents. It is preferable. Among organic developers, those containing butyl acetate and / or 2-heptanone are Preferred. The total content of butyl acetate and 2-heptanone in the organic developer is 50% by mass. Preferably, the amount is 100% by mass or less, and more preferably 90% by mass or more and 100% by mass or less. It is even more preferable that the composition consists solely of butyl acetate and / or 2-heptanone. Organic developers may contain surfactants. Also, organic developers may contain trace amounts of surfactants. It may contain moisture. During development, by substituting a different type of solvent than the organic developer, development can be stopped. That's good too. It is preferable to wash the resist pattern with a rinsing solution after development. The rinsing solution can be: There are no particular restrictions as long as it does not dissolve the resist pattern, including general organic solvents. A liquid can be used, preferably an alcohol solvent or an ester solvent. After cleaning, it is preferable to remove any remaining rinse solution from the substrate and patterns.

[0247] <Application> The resist composition of the present invention is a resist composition for KrF excimer laser exposure, and ArF Resist compositions for Kishima laser exposure, resist compositions for electron beam (EB) exposure, or EU Resist compositions for V exposure, particularly resist compositions for electron beam (EB) exposure or EUV exposure It is suitable as a resist composition for use and is useful for semiconductor microfabrication. [Examples]

[0248] The present invention will be described in more detail with reference to examples. In the examples, the content or amount used is expressed Unless otherwise specified, "%" and "parts" refer to mass. The weight-average molecular weight is a value obtained by gel permuration chromatography. The analytical conditions for gel permuration chromatography are as follows: Column: TSKgel Multipore HXL-M x 3 + guard column (manufactured by Tosoh Corporation) Eluent: Tetrahydrofuran Flow rate: 1.0mL / min Detector: RI detector Column temperature: 40℃ Injection volume: 100μl Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation) The compound structure was determined by mass spectrometry (LC: Agilent 1100, MASS: Agil This was confirmed by measuring molecular ion peaks using an ent LC / MSD (manufactured by ent). In the examples, the value of this molecular ion peak is indicated by "MASS".

[0249] Example 1: Synthesis of the salt represented by formula (I-1946) TIFF2026108698000160.tif38138 22.55 parts of the compound represented by formula (I-1946-a), and the compound represented by formula (I-1946-c) Mix 4.56 parts of the compound, 150 parts of ethyl acetate, and 15 parts of tetrahydrofuran. The mixture was stirred at 23°C for 30 minutes. The resulting mixed solution was then treated with the chemical compound represented by formula (I-1946-b). 13.10 parts of the mixture were added and stirred at 23°C for 18 hours. To the resulting reaction mass, n-heptopropyl alcohol was added. Add 50 parts of tan and 70 parts of deionized water, stir at 23°C for 30 minutes, then separate to form organic The layer was removed. 70 parts of deionized water were added to the recovered organic layer and stirred at 23°C for 30 minutes. Afterward, the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated four times. The resulting organic layer The concentrated mass is collected in a column (silica gel 60N (spherical, neutral) 100-210 μm; related Manufactured by Tokagaku Co., Ltd., developing solvent: n-heptane / ethyl acetate (1 / 1) by fractionation, 8.91 parts of the compound represented by formula (I-1946-d) were obtained. TIFF2026108698000161.tif69130 1.02 parts of the compound represented by formula (I-1946-d) and 10 parts of tetrahydrofuran Mix, stir at 23°C for 30 minutes, then cool to 5°C, and add 0.14 parts of sodium hydride. It was added. To the resulting mixture, 1.81 parts of the salt represented by formula (I-1946-e) were added. The mixture was stirred at 5°C for 3 hours, and then stirred again at 23°C for 1 hour. The resulting mixture was then mixed with chlorophosphate. Add 30 parts of lumen and 15 parts of deionized water, stir at 23°C for 30 minutes, then separate the liquid and liquid. The organic layer was removed. The resulting organic layer was concentrated, and then tert-butylmethyl methyl ester was added to the concentrated residue. Add 30 parts of ether, stir at 23°C for 30 minutes, then remove the supernatant and concentrate. This yielded 1.89 parts of the salt represented by formula (I-1946-f). TIFF2026108698000162.tif70166 0.78 parts of salt represented by formula (I-1946-f), 1 part of salt represented by formula (I-8-g). Mix 2 parts of 0, 30 parts of chloroform, and 15 parts of ethyl acetate, and stir at 23°C for 2 hours. To the resulting mixture, add 20 parts of deionized water and stir at 23°C for 30 minutes, then separate the liquid and drain. The organic layer was removed. This washing procedure was repeated five times. The obtained organic layer was concentrated, and the concentrated residue Add 30 parts of tert-butyl methyl ether to the residue and stir at 23°C for 30 minutes, then filter. By passing the mixture through the process, 1.22 parts of the salt represented by formula (I-1946) were obtained. MASS(ESI(+)Spectrum):M + 455.2 MASS(ESI(-)Spectrum): M - 517.1

[0250] Example 2: Synthesis of the salt represented by formula (I-1954) TIFF2026108698000163.tif69154 0.78 parts of salt represented by formula (I-1946-f), 0 parts of salt represented by formula (I-16-g) Mix 0.91 parts, 30 parts chloroform, and 15 parts ethyl acetate, and stir at 23°C for 2 hours. Add 20 parts of deionized water to the resulting mixture, stir at 23°C for 30 minutes, and then separate the liquids. The organic layer was then removed. This washing operation was repeated five times. The resulting organic layer was concentrated. Add 30 parts of tert-butyl methyl ether to the residue and stir at 23°C for 30 minutes, By filtration, 1.25 parts of the salt represented by formula (I-1954) were obtained. MASS(ESI(+)Spectrum):M + 455.2 MASS(ESI(-)Spectrum): M - 467.1

[0251] Example 3: Synthesis of the salt represented by formula (I-8) TIFF2026108698000164.tif109158 1.02 parts of the compound represented by formula (I-1946-d) and 10 parts of tetrahydrofuran Mix, stir at 23°C for 30 minutes, then cool to 5°C, and add 0.14 parts of sodium hydride. It was added. To the resulting mixture, 1.81 parts of the salt represented by formula (I-1946-e) were added. The mixture was stirred at 5°C for 3 hours. 6.30 parts of 1N hydrochloric acid were added to the resulting mixture, and then it was heated to 23°C. The mixture was heated and stirred at 23°C for 6 hours. To the resulting mixture, 30 parts of chloroform and ions were added. After adding 15 parts of replacement water and stirring at 23°C for 30 minutes, the organic layer was separated. After concentrating the organic layer, the concentrated residue was mixed with 1 part acetonitrile and tert-butylmethylmethyl phosphate. Add 30 parts of ether, stir at 23°C for 30 minutes, then remove the supernatant and concentrate. This yielded 1.49 parts of the salt represented by formula (I-8-f). TIFF2026108698000165.tif57161 0.67 parts of salt represented by formula (I-8-f), 1.02 parts of salt represented by formula (I-8-g) 30 parts of chloroform and 15 parts of ethyl acetate were mixed and stirred at 23°C for 2 hours. Add 20 parts of deionized water to the mixture and stir at 23°C for 30 minutes, then separate to form the organic layer. This was removed. This washing operation was repeated five times. The resulting organic layer was concentrated, and the concentrated residue was used. Add 30 parts of tert-butyl methyl ether, stir at 23°C for 30 minutes, then filter. This yielded 1.17 parts of the salt represented by formula (I-8). MASS(ESI(+)Spectrum):M + 383.1 MASS(ESI(-)Spectrum): M - 517.1

[0252] Example 4: Synthesis of the salt represented by formula (I-16) TIFF2026108698000166.tif61168 0.79 parts of salt represented by formula (I-8-f), 1.07 parts of salt represented by formula (I-16-g) Add 20 parts of chloroform and stir at 23°C for 3 hours. To the resulting reaction product, add io After adding 15 parts of decontaminated water and stirring at 23°C for 30 minutes, the organic layer was separated. To the obtained organic layer, 15 parts of deionized water were added, and after stirring at 23°C for 30 minutes, the liquid-liquid was separated. Then the organic layer was removed. This washing procedure was repeated five times. After concentrating the obtained organic layer, Add 1.5 parts acetonitrile and 30 parts tert-butyl methyl ether to the concentrated residue. Then, after stirring at 23°C for 30 minutes, the supernatant is removed and concentrated to obtain formula (I-1 1.27 parts of the salt represented in 6) were obtained. MASS(ESI(+)Spectrum):M + 383.1 MASS(ESI(-)Spectrum): M - 467.1

[0253] Example 5: Synthesis of the salt represented by formula (I-312) Mix 0.98 parts of the salt represented by formula (I-8-f) and 30 parts of dimethylformamide. After stirring at 23°C for 30 minutes, add 0.16 parts potassium carbonate and 0.05 parts potassium iodide. The mixture was added and heated to 75°C. The resulting mixture was then mixed with the compound represented by formula (I-312-a). 1.13 parts of the substance were added, stirred at 75°C for 5 hours, and then cooled to 23°C. The resulting mixture Add 50 parts chloroform and 20 parts 5% oxalic acid aqueous solution to the mixture and stir at 23°C for 30 minutes. Afterward, the organic layer was separated by liquid-liquid extraction. 20 parts of deionized water were added to the resulting organic layer. After stirring at 23°C for 30 minutes, the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated five times. It was returned. By concentrating the resulting organic layer, salt 1, represented by formula (I-312-b), was obtained. I obtained 33 copies. TIFF2026108698000168.tif56169 1.00 part of salt represented by formula (I-312-b), 1.0 part of salt represented by formula (I-8-g) Mix 2 parts of the mixture with 30 parts of chloroform and 15 parts of ethyl acetate, and stir at 23°C for 2 hours. Add 20 parts of deionized water to the mixture and stir at 23°C for 30 minutes, then separate the liquid and extract the liquid. The organic layer was removed. This washing operation was repeated five times. The resulting organic layer was concentrated, and the concentrated residue was... Add 30 parts of tert-butyl methyl ether and stir at 23°C for 30 minutes, then filter. By doing so, 1.29 parts of the salt represented by formula (I-312) were obtained. MASS(ESI(+)Spectrum):M + 589.2 MASS(ESI(-)Spectrum): M - 517.1

[0254] Example 6: Synthesis of the salt represented by formula (I-320) TIFF2026108698000169.tif53168 1.00 part of salt represented by formula (I-312-b), 0.00 part of salt represented by formula (I-16-g). 91 parts of the mixture, 30 parts of chloroform, and 15 parts of ethyl acetate were mixed and stirred at 23°C for 2 hours. To the resulting mixture, add 20 parts of deionized water and stir at 23°C for 30 minutes, then separate the liquid and drain. The organic layer was removed. This washing procedure was repeated five times. The obtained organic layer was concentrated, and the concentrated residue Add 30 parts of tert-butyl methyl ether to the residue and stir at 23°C for 30 minutes, then filter. By passing the mixture over a period of time, 1.25 parts of the salt represented by formula (I-320) were obtained. MASS(ESI(+)Spectrum):M + 589.2 MASS(ESI(-)Spectrum): M - 467.1

[0255] Example 7: Synthesis of the salt represented by formula (I-308) TIFF2026108698000170.tif59163 1.00 part of salt represented by formula (I-312-b), 0.6 part of salt represented by formula (I-4-g) Mix 6 parts of the mixture with 30 parts of chloroform and 15 parts of ethyl acetate, and stir at 23°C for 2 hours. Add 20 parts of deionized water to the mixture and stir at 23°C for 30 minutes, then separate the liquid and extract the liquid. The organic layer was removed. This washing operation was repeated five times. The resulting organic layer was concentrated, and then concentrated again. To the residue, add 1 part acetonitrile and 30 parts tert-butyl methyl ether, and 23 After stirring at °C for 30 minutes, the supernatant is removed and the mixture is concentrated to obtain the solution given by formula (I-308). 1.05 parts of the salt were obtained. MASS(ESI(+)Spectrum):M + 589.2 MASS(ESI(-)Spectrum): M - 311.0

[0256] Example 8: Synthesis of the salt represented by formula (I-1992) TIFF2026108698000171.tif69116 1.09 parts of compound represented by formula (I-1992-d), represented by formula (I-1946-e) Mix 1.39 parts of salt and 20 parts of dimethylformamide and stir at 23°C for 30 minutes. Then, the temperature was raised to 90°C. 1.44 parts of potassium carbonate were added to the resulting mixture, and the temperature was raised to 90°C. After stirring for 3 hours, the mixture was cooled to 23°C. To the resulting mixture, 50 parts of chloroform and Add 30 parts of deionized water, stir at 23°C for 30 minutes, then separate and remove the organic layer. Then, 30 parts of deionized water were added to the resulting organic layer, and after stirring at 23°C for 30 minutes, The organic layer was removed by rinsing. This washing procedure was repeated three times. The resulting organic layer was concentrated. Next, add 1 part acetonitrile and 29 parts tert-butyl methyl ether to the concentrated residue. Then, after stirring at 23°C for 30 minutes, the supernatant is removed and concentrated to obtain formula (I-1 2.45 parts of the salt represented by 992-f) were obtained. TIFF2026108698000172.tif63164 0.80 parts of salt represented by formula (I-1992-f), 0 parts of salt represented by formula (I-16-g) Mix 0.91 parts, 30 parts chloroform, and 15 parts ethyl acetate, and stir at 23°C for 2 hours. Add 20 parts of deionized water to the resulting mixture, stir at 23°C for 30 minutes, and then separate the liquids. The organic layer was then removed. This washing operation was repeated five times. The resulting organic layer was concentrated. Add 30 parts of tert-butyl methyl ether to the residue and stir at 23°C for 30 minutes, By filtration, 1.20 parts of the salt represented by formula (I-1992) were obtained. MASS(ESI(+)Spectrum):M + 467.2 MASS(ESI(-)Spectrum): M - 467.1

[0257] Example 9: Synthesis of the salt represented by formula (I-4) TIFF2026108698000173.tif56157 0.67 parts of salt represented by formula (I-8-f), 0.66 parts of salt represented by formula (I-4-g) 30 parts of chloroform and 15 parts of ethyl acetate were mixed and stirred at 23°C for 2 hours. Add 20 parts of deionized water to the mixture and stir at 23°C for 30 minutes, then separate to form the organic layer. The product was removed. This washing procedure was repeated five times. The resulting organic layer was concentrated, and then the concentrated residue was removed. Add 30 parts of tert-butyl methyl ether, stir at 23°C for 30 minutes, then... By removing the clear liquid and concentrating it, 0.81 parts of the salt represented by formula (I-4) were obtained. MASS(ESI(+)Spectrum):M + 383.1 MASS(ESI(-)Spectrum): M - 311.0

[0258] Example 10: Synthesis of the salt represented by formula (I-2752) TIFF2026108698000174.tif126160 4.34 parts of the compound represented by formula (I-2752-b) and 30 parts of dimethylformamide The mixture was stirred at 23°C for 30 minutes. After the resulting mixture was cooled to 0°C, sodium hydride was added. Mix 0.30 parts of lium and stir at 0°C for 4 hours. Add formula (I) to the resulting mixture at 0°C. Add 3.15 parts of the salt represented by -1946-e) and stir at 0°C for 3 hours. A mixture containing the salt represented by formula (I-2752-c) was obtained. The obtained mixture was kept at 23°C. After raising the temperature, add 11 parts of a 5% oxalic acid aqueous solution and stir at 23°C for 30 minutes, then the formula (I- 5.70 parts of the salt represented by 16-g) were added and the mixture was stirred at 23°C for 7 hours. The resulting reaction product Add 60 parts chloroform and 30 parts deionized water, and stir at 23°C for 30 minutes. Then, the organic layer was separated and the organic layer was removed. 30 parts of deionized water were added to the recovered organic layer, and 2 After stirring at 3°C ​​for 30 minutes, the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated seven times. The resulting organic layer was concentrated, and then 30 parts of tert-butyl methyl ether were added to the concentrated residue. After adding and stirring at 23°C for 30 minutes, the supernatant is removed and concentrated to obtain formula ( 9.88 parts of the salt represented by I-2752) were obtained. MASS(ESI(+)Spectrum):M + 693.0 MASS(ESI(-)Spectrum): M - 467.1

[0259] Example 11: Synthesis of the salt represented by formula (I-2758) TIFF2026108698000175.tif121161 4.34 parts of the compound represented by formula (I-2752-b) and 30 parts of dimethylformamide The mixture was stirred at 23°C for 30 minutes. After the resulting mixture was cooled to 0°C, sodium hydride was added. Mix 0.30 parts of lium and stir at 0°C for 4 hours. Add formula (I) to the resulting mixture at 0°C. Add 3.15 parts of the salt represented by -1946-e) and stir at 0°C for 3 hours. A mixture containing the salt represented by formula (I-2752-c) was obtained. The obtained mixture was kept at 23°C. After raising the temperature, add 11 parts of a 5% oxalic acid aqueous solution and stir at 23°C for 30 minutes, then the formula (I- 5.84 parts of the salt represented by 22-d) were added and the mixture was stirred at 23°C for 7 hours. The resulting reaction product Add 60 parts chloroform and 30 parts deionized water, and stir at 23°C for 30 minutes. Then, the organic layer was separated and the organic layer was removed. 30 parts of deionized water were added to the recovered organic layer, and 2 After stirring at 3°C ​​for 30 minutes, the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated seven times. The resulting organic layer was concentrated, and then 30 parts of tert-butyl methyl ether were added to the concentrated residue. After adding and stirring at 23°C for 30 minutes, the supernatant is removed and concentrated to obtain formula ( 9.96 parts of the salt represented in I-2758) were obtained. MASS(ESI(+)Spectrum):M + 693.0 MASS(ESI(-)Spectrum): M - 481.1

[0260] Example 12: Synthesis of the salt represented by formula (I-4233) TIFF2026108698000176.tif118163 4.34 parts of the compound represented by formula (I-2752-b) and 30 parts of dimethylformamide The mixture was stirred at 23°C for 30 minutes. After the resulting mixture was cooled to 0°C, sodium hydride was added. Mix 0.30 parts of lium and stir at 0°C for 4 hours. Add formula (I) to the resulting mixture at 0°C. Add 3.15 parts of the salt represented by -1946-e) and stir at 0°C for 3 hours. A mixture containing the salt represented by formula (I-2752-c) was obtained. The obtained mixture was kept at 23°C. After raising the temperature, add 11 parts of a 5% oxalic acid aqueous solution and stir at 23°C for 30 minutes, then the formula (I- 5.40 parts of the salt represented by 41-g) were added and the mixture was stirred at 23°C for 7 hours. The resulting reaction product Add 60 parts chloroform and 30 parts deionized water, and stir at 23°C for 30 minutes. Then, the organic layer was separated and the organic layer was removed. 30 parts of deionized water were added to the recovered organic layer, and 2 After stirring at 3°C ​​for 30 minutes, the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated seven times. The resulting organic layer was concentrated, and then 30 parts of tert-butyl methyl ether were added to the concentrated residue. After adding and stirring at 23°C for 30 minutes, the supernatant is removed and concentrated to obtain formula ( 9.88 parts of the salt represented by I-4233) were obtained. MASS(ESI(+)Spectrum):M + 693.0 MASS(ESI(-)Spectrum): M - 437.1

[0261] Example 13: Synthesis of the salt represented by formula (I-2866) TIFF2026108698000177.tif119163 3.08 parts of the compound represented by formula (I-2866-b) and 30 parts of dimethylformamide The mixture was stirred at 23°C for 30 minutes. After the resulting mixture was cooled to 0°C, sodium hydride was added. Mix 0.30 parts of lium and stir at 0°C for 4 hours. Add formula (I) to the resulting mixture at 0°C. Add 3.15 parts of the salt represented by -1946-e) and stir at 0°C for 3 hours. A mixture containing the salt represented by formula (I-2866-c) was obtained. The obtained mixture was kept at 23°C. After raising the temperature, add 11 parts of a 5% oxalic acid aqueous solution and stir at 23°C for 30 minutes, then the formula (I- 5.70 parts of the salt represented by 16-g) were added and the mixture was stirred at 23°C for 7 hours. The resulting reaction product Add 60 parts chloroform and 30 parts deionized water, and stir at 23°C for 30 minutes. Then, the organic layer was separated and the organic layer was removed. 30 parts of deionized water were added to the recovered organic layer, and 2 After stirring at 3°C ​​for 30 minutes, the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated seven times. The resulting organic layer was concentrated, and then 30 parts of tert-butyl methyl ether were added to the concentrated residue. After adding and stirring at 23°C for 30 minutes, the supernatant is removed and concentrated to obtain formula ( 8.93 parts of the salt represented in I-2866) were obtained. MASS(ESI(+)Spectrum):M + 567.1 MASS(ESI(-)Spectrum): M - 467.1

[0262] Example 14: Synthesis of the salt represented by formula (I-2980) TIFF2026108698000178.tif120164 3.38 parts of the compound represented by formula (I-2980-b) and 30 parts of dimethylformamide The mixture was stirred at 23°C for 30 minutes. After the resulting mixture was cooled to 0°C, sodium hydride was added. Mix 0.30 parts of lium and stir at 0°C for 4 hours. Add formula (I) to the resulting mixture at 0°C. Add 3.15 parts of the salt represented by -1946-e) and stir at 0°C for 3 hours. A mixture containing the salt represented by formula (I-2980-c) was obtained. The obtained mixture was heated to 23°C. After raising the temperature, add 11 parts of a 5% oxalic acid aqueous solution and stir at 23°C for 30 minutes, then the formula (I- 5.70 parts of the salt represented by 16-g) were added and the mixture was stirred at 23°C for 7 hours. The resulting reaction product Add 60 parts chlorof...

Claims

1. An acid generator containing a salt represented by formula (I). [In formula (I), R １ , R ２ and R ３ Each of these independently represents a hydroxyl group. R ４ , R ５ and R ６ Each of these independently represents a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. R ７ , R ８ and R ９ each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and -CH 2 - in the haloalkyl group and the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO ２ -. A １ A ２ and A ３ Each of these independently represents a hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -CO-, -S-, or -SO ２ It may be replaced with -. m1 represents an integer from 1 to 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different. m² represents an integer between 0 and 4, and when m² is 2 or greater, the bases within the parentheses may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within the parentheses may be the same or different. m4 represents an integer from 0 to 4, and when m4 is 2 or greater, multiple R ４ They may be identical or different from one another. m5 represents an integer from 0 to 4, and when m5 is 2 or greater, multiple R ５ They may be identical or different from one another. m6 represents an integer from 0 to 4, and when m6 is 2 or greater, multiple R ６ They may be identical or different from one another. m7 represents an integer from 0 to 4, and when m7 is 2 or greater, multiple R ７ They may be identical or different from one another. m8 represents an integer from 0 to 4, and when m8 is 2 or greater, multiple R ８ They may be identical or different from one another. m9 represents an integer from 0 to 4, and when m9 is 2 or greater, multiple R ９ They may be identical or different from one another. However, 1 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, and 0 ≤ m3 + m9 ≤ 4. X ４ This is a single bond, -CH 2 -, -O-, -S-, -CO-, -SO-, or -SO ２ It represents -. AI － This represents organic anions other than carboxylate anions.

2. An acid generator containing a salt represented by formula (I). [In formula (I), R １ , R ２ and R ３ Each of these independently represents a hydroxyl group. R ４ , R ５ and R ６ Each of these independently represents a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. R ７ , R ８ and R ９ Each of these independently represents a halogen atom, a C1-C12 haloalkyl group, or a C1-C18 hydrocarbon group, and the hydrocarbon group may have substituents, and the haloalkyl group and the hydrocarbon group contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. A １ is, *-L ０１１ -X ０１ -L ０１２ - represents A ２ is, *-L ０２１ -X ０２ -L ０２２ - represents A ３ is, *-L ０３１ -X ０３ -L ０３２ It represents -. X ０１ , X ０２ and X ０３ These are, independently, -O-, -CO-, -S-, or -SO-, respectively. ２ It represents -. L ０１１ , L ０１２ , L ０２１ , L ０２２ , L ０３１ and L ０３２ Each of these independently represents a single bond or a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -CO-, -S-, or -SO ２ It may be replaced with -. However, L ０１１ and L ０１２ The total number of carbon atoms is 1 to 19, L ０２１ and L ０２２ The total number of carbon atoms is 1 to 19, L ０３１ and L ０３２ The total number of carbon atoms is between 1 and 19. * is R １ , R ２ or R ３ This indicates the bonding site with the benzene ring to which it is bonded. m1 represents an integer between 0 and 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different. m² represents an integer between 0 and 4, and when m² is 2 or greater, the bases within the parentheses may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within the parentheses may be the same or different. m4 represents an integer from 0 to 4, and when m4 is 2 or greater, multiple R ４ They may be identical or different from one another. m5 represents an integer from 0 to 4, and when m5 is 2 or greater, multiple R ５ They may be identical or different from one another. m6 represents an integer from 0 to 4, and when m6 is 2 or greater, multiple R ６ They may be identical or different from one another. m7 represents an integer from 0 to 5, and when m7 is 2 or greater, multiple R ７ They may be identical or different from one another. m8 represents an integer from 0 to 4, and when m8 is 2 or greater, multiple R ８ They may be identical or different from one another. m9 represents an integer from 0 to 4, and when m9 is 2 or greater, multiple R ９ They may be identical or different from one another. However, 0 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, and 0 ≤ m3 + m9 ≤ 4, and at least one of m1, m2, and m3 represents an integer greater than or equal to 1. X ４ This is a single bond, -CH 2 -, -O-, -S-, -CO-, -SO-, or -SO ２ It represents -. AI － This represents organic anions other than carboxylate anions.

3. A １ is *-X ０１ -L ０１ - or *-L ０１ -X ０１ -, and A ２ is *-X ０２ -L ０２ - or *-L ０２ -X ０２ -, and A ３ is *-X ０３ -L ０３ - or *-L ０３ -X ０３ -(where X ０１ , X ０２ and X ０３ each independently represents -O-, -CO-, -S- or -SO ２ -). L ０１ , L ０２ and L ０３ each independently represents a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO ２ -. * represents the bonding site with the benzene ring to which R １ , R ２ or R ３ is bonded. ) The acid generator according to claim 1 or 2.

4. X ０１ , X ０２ and X ０３ The acid generator according to claim 3, wherein each is independently -O- or -S-.

5. L ０１ , L ０２ and L ０３ However, each independently, an alkanediyl group having 1 to 6 carbon atoms (the alkanediyl group contains -CH 2 The acid generator according to claim 3, wherein - may be replaced by -O- or -CO-.

6. If m4, m5, or m6 is an integer of 1 or more, R ４ , R ５ and R ６ However, each independently, an alkyl group having 1 to 4 carbon atoms (the alkyl group contains -CH 2 The acid generator according to claim 1 or 2, wherein - may be replaced by -O- or -CO-.

7. If m7, m8, or m9 is an integer of 1 or greater, R ７ , R ８ and R ９ However, each independently contains a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (the alkyl group contains -CH 2 The acid generator according to claim 1 or 2, wherein - may be replaced by -O- or -CO-.

8. AI － The acid generator according to claim 1 or 2, wherein the anion is a sulfonate anion, a sulfonylimide anion, or a sulfonylmethide anion.

9. AI － The acid generator according to claim 1 or 2, wherein is a sulfonate anion, and the sulfonate anion is an anion represented by formula (I-A). [In formula (IA), Q １ and Q ２ Each of these independently represents a hydrogen atom, a fluorine atom, a C1-C6 alkyl group, or a C1-C6 perfluoroalkyl group. L １ This represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH ２ The - may be replaced by -O- or -CO-, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxyl group. Y １ This represents a methyl group which may have substituents or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the alicyclic hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ It may be replaced with - or -CO-.

10. A resist composition comprising the acid generator described in claim 1 or 2 and a resin having an acid-unstable group.

11. The resist composition according to claim 10, wherein the resin having an acid-unstable group comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). [In formulas (a1-0), (a1-1), and (a1-2), L a01 , L ａ１ and L ａ２ These are, independently, -O- or *-O- (CH ２ ) ｋ１ This represents -CO-O-, where k1 is an integer from 1 to 7, and * represents the bonding site with -CO-. R a01 , R ａ４ and R ａ５ Each of these independently represents a hydrogen atom, a halogen atom, or a C1-C6 alkyl group which may have a halogen atom. R a02 , R a03 and R a04 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. R ａ６ and R ａ７ Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination of these. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

12. The resist composition according to claim 10, wherein the resin having an acid-unstable group comprises a structural unit represented by formula (a2-A). [In formula (a2-A), R a50 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a51 This represents a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 This is a single bond or *-X a51 - (A a52 -X a52 ) nｂ - represents -R a50 This represents the bonding site with the carbon atom to which it is bonded. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent, independently, -O-, -CO-O-, or -O-CO-. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, then multiple R a51 They may be the same or different from each other.

13. The resist composition according to claim 10, further comprising a salt that generates an acid with a lower acidity than the acid generated from the acid generator.

14. (1) A step of applying the resist composition according to claim 10 onto a substrate, (2) A step of drying the coated composition to form a composition layer, (3) Exposure step of the composition layer, (4) A step of heating the composition layer after exposure, (5) A step of developing the composition layer after heating, A method for manufacturing a resist pattern that includes [the specified element].

15. A salt represented by formula (I). [In formula (I), R １ , R ２ and R ３ Each of these independently represents a hydroxyl group. R ４ , R ５ and R ６ Each of these independently represents a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. R ７ , R ８ and R ９ Each of these independently represents a halogen atom, a C1-C12 haloalkyl group, or a C1-C18 hydrocarbon group, and the hydrocarbon group may have substituents, and the haloalkyl group and the hydrocarbon group contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. A １ A ２ and A ３ Each of these independently represents a hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -CO-, -S-, or -SO ２ It may be replaced with -. m1 represents an integer from 1 to 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different. m² represents an integer between 0 and 4, and when m² is 2 or greater, the bases within the parentheses may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within the parentheses may be the same or different. m4 represents an integer from 0 to 4, and when m4 is 2 or greater, multiple R ４ They may be identical or different from one another. m5 represents an integer from 0 to 4, and when m5 is 2 or greater, multiple R ５ They may be identical or different from one another. m6 represents an integer from 0 to 4, and when m6 is 2 or greater, multiple R ６ They may be identical or different from one another. m7 represents an integer from 0 to 4, and when m7 is 2 or greater, multiple R ７ They may be identical or different from one another. m8 represents an integer from 0 to 4, and when m8 is 2 or greater, multiple R ８ They may be identical or different from one another. m9 represents an integer from 0 to 4, and when m9 is 2 or greater, multiple R ９ They may be identical or different from one another. However, 1 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, and 0 ≤ m3 + m9 ≤ 4. X ４ This is a single bond, -CH 2 -, -O-, -S-, -CO-, -SO-, or -SO ２ It represents -. AI － This represents organic anions other than carboxylate anions.

16. A salt represented by formula (I). [In formula (I), R １ , R ２ and R ３ Each of these independently represents a hydroxyl group. R ４ , R ５ and R ６ Each of these independently represents a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. R ７ , R ８ and R ９ Each of these independently represents a halogen atom, a C1-C12 haloalkyl group, or a C1-C18 hydrocarbon group, and the hydrocarbon group may have substituents, and the haloalkyl group and the hydrocarbon group contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. A １ is, *-L ０１１ -X ０１ -L ０１２ - represents A ２ is, *-L ０２１ -X ０２ -L ０２２ - represents A ３ is, *-L ０３１ -X ０３ -L ０３２ It represents -. X ０１ , X ０２ and X ０３ These are, independently, -O-, -CO-, -S-, or -SO-, respectively. ２ It represents -. L ０１１ , L ０１２ , L ０２１ , L ０２２ , L ０３１ and L ０３２ Each of these independently represents a single bond or a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -CO-, -S-, or -SO ２ It may be replaced with -. However, L ０１１ and L ０１２ The total number of carbon atoms is 1 to 19, L ０２１ and L ０２２ The total number of carbon atoms is 1 to 19, L ０３１ and L ０３２ The total number of carbon atoms is between 1 and 19. * is R １ , R ２ or R ３ This indicates the bonding site with the benzene ring to which it is bonded. m1 represents an integer between 0 and 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different. m² represents an integer between 0 and 4, and when m² is 2 or greater, the bases within the parentheses may be the same or different. m3 represents an integer between 0 and 4, and when m3 is 2 or greater, the bases within the parentheses may be the same or different. m4 represents an integer from 0 to 4, and when m4 is 2 or greater, multiple R ４ They may be identical or different from one another. m5 represents an integer from 0 to 4, and when m5 is 2 or greater, multiple R ５ They may be identical or different from one another. m6 represents an integer from 0 to 4, and when m6 is 2 or greater, multiple R ６ They may be identical or different from one another. m7 represents an integer from 0 to 5, and when m7 is 2 or greater, multiple R ７ They may be identical or different from one another. m8 represents an integer from 0 to 4, and when m8 is 2 or greater, multiple R ８ They may be identical or different from one another. m9 represents an integer from 0 to 4, and when m9 is 2 or greater, multiple R ９ They may be identical or different from one another. However, 0 ≤ m1 + m7 ≤ 5, 0 ≤ m2 + m8 ≤ 4, and 0 ≤ m3 + m9 ≤ 4, and at least one of m1, m2, and m3 represents an integer greater than or equal to 1. X ４ This is a single bond, -CH 2 -, -O-, -S-, -CO-, -SO-, or -SO ２ It represents -. AI － This represents organic anions other than carboxylate anions.

17. A １ However, *-X ０１ -L ０１ - or * - L ０１ -X ０１ - and A ２ However, *-X ０２ -L ０２ - or * - L ０２ -X ０２ - and A ３ However, *-X ０３ -L ０３ - or * - L ０３ -X ０３ - is (X ０１ , X ０２ and X ０３ These are, independently, -O-, -CO-, -S-, or -SO-, respectively. ２ Represents -. L ０１ , L ０２ and L ０３ Each of these independently represents a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - stands for -O-, -CO-, -S-, or -SO ２ It may be replaced with -. * is R １ , R ２ or R ３ This indicates the bonding site with the benzene ring to which it is bonded. ) The salt according to claim 15 or 16.

18. X ０１ , X ０２ and X ０３ The salt according to claim 17, wherein each is independently -O- or -S-.

19. L ０１ , L ０２ and L ０３ However, each independently, an alkanediyl group having 1 to 6 carbon atoms (the alkanediyl group contains -CH 2 The salt according to claim 17, wherein - may be replaced by -O- or -CO-.

20. If m4, m5, or m6 is an integer of 1 or more, R ４ , R ５ and R ６ However, each independently, an alkyl group having 1 to 4 carbon atoms (the alkyl group contains -CH 2 The salt according to claim 15 or 16, wherein - may be replaced by -O- or -CO-.

21. If m7, m8, or m9 is an integer of 1 or greater, R ７ , R ８ and R ９ However, each independently contains a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (the alkyl group contains -CH 2 The salt according to claim 15 or 16, wherein - may be replaced by -O- or -CO-.

22. AI － The salt according to claim 15 or 16, wherein the salt is a sulfonate anion, a sulfonylimide anion, or a sulfonylmethide anion.

23. AI － The salt according to claim 15 or 16, wherein is a sulfonate anion, and the sulfonate anion is an anion represented by formula (I-A). [In formula (IA), Q １ and Q ２ Each of these independently represents a hydrogen atom, a fluorine atom, a C1-C6 alkyl group, or a C1-C6 perfluoroalkyl group. L １ This represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and the saturated hydrocarbon group contains -CH ２ The - may be replaced by -O- or -CO-, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxyl group. Y １ This represents a methyl group which may have substituents or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the alicyclic hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ It may be replaced with - or -CO-.

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