Electro-optical devices and electronic equipment

By designing a non-crossing trench structure extending along the direction of the data line and the scanning line in the electro-optical equipment, the problem of filling difficulty in the prior art is solved, and a more efficient manufacturing process and more stable capacitive element performance are achieved.

JP7647194B2Active Publication Date: 2025-03-18SEIKO EPSON CORP
11 Cites 0 Cited by

Patent Information

Application Number
JP2021039804
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-03-12
Publication Date
2025-03-18
Estimated Expiration
2041-03-12

AI Technical Summary

Technical Problem

In the prior art, in order to increase the capacitance of the capacitance element, an intersection trench structure is designed, but during the etching process, the oblique opening width of the intersection points becomes larger, resulting in increased filling difficulty, and it is impossible to easily fill the recessed area formed by the intersection trench.

Method used

An electro-optical device is designed, including a first groove extending in the direction of the data line and a second groove extending in the direction of the scanning line. The second groove does not intersect with the first groove but is parallel to the X-axis direction of the first groove, ensuring that the groove width remains narrow at the intersection point, thereby facilitating filling.

Benefits of technology

Through this design, the opening width of the trench intersection is avoided, the filling process of the capacitance element is simplified, the manufacturing complexity and cost are reduced, and the stability and performance of the capacitance element are improved.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

To provide an electro-optical device and an electronic apparatus that, even when the capacitance of a capacitive element is increased by using grooves extending in directions intersecting with each other, can easily fill recesses caused by the grooves.SOLUTION: A first substrate 10 of an electro-optical device has a first groove 191 and second grooves 192, 193 extending in a direction intersecting with the first groove 191 formed in a substrate body 19. A capacitive element 55 comprises a laminated film 550 including a first conductive film 4a, a dielectric film, and a second conductive film 5a laminated in order in an area including the first groove 191 and the second grooves 192, 193. When the first groove 191 and the second grooves 192, 193 intersect with each other, the width of intersection parts is widened during etching, but when the first groove 191 and the second grooves 192, 193 do not intersect with each other such as when the grooves are separated from each other, wide width parts are not likely to occur. The grooves can thus be easily filled by a first insulating film 41.SELECTED DRAWING: Figure 8
Need to check novelty before this filing date? Find Prior Art