Laminated structure, electronic device, electronic equipment and system

Abstract

[Problem] Provided are a multilayer structure, an electronic device and an electronic apparatus comprising an epitaxial film with satisfactory adhesion and crystallization, and a manufacturing method that can provide foregoing in an industrially advantageous manner. [Solution] This method for manufacturing a multilayer structure comprises stacking an epitaxial layer on a crystal substrate via at least a compound film, wherein said stacking is carried out by a step for providing a compound element supplying sacrificial layer containing a compound element on the crystal substrate and a step for forming the epitaxial layer with the compound element in the compound element supplying sacrificial layer.