Optical element driving device

Abstract

An optical element driving device (100) comprises: three lower balls (11) disposed between a base member (18) and an intermediate member (3); three upper balls (12) disposed between the intermediate member (3) and an optical element holding member (2); a first driving means (DM1) for moving the intermediate member (3) in an X-axis direction with respect to the base member (18); and a second driving means (DM2) for moving the optical element holding member (2) in a Y-axis direction with respect to the intermediate member (3). The first driving means (DM1) has a first driving magnet (5A) provided on the intermediate member (3), and a first coil (9A) provided on the base member (18) so as to face the first driving magnet (5A) in a Z-axis direction. The second driving means (DM2) has a second driving magnet (5B) provided on the optical element holding member (2), and a second coil (9B) provided on the base member (18) so as to face the second driving magnet (5B) in the Z-axis direction.

Description

[Technical field]

[0001] The present disclosure relates to an optical element driving device. [Background technology]

[0002] Conventionally, a unit that uses a magnet and a coil to move a lens attached to a slide member relative to a holder is known (see Patent Document 1). This unit has a spring that presses the slide member against the holder by sandwiching a ball that is placed in a first groove formed in the holder so as to extend in a first direction perpendicular to the optical axis of the lens. A second groove is formed in the slide member so as to extend in a second direction perpendicular to the optical axis of the lens. A ball is also placed in the second groove. This unit is configured so that the first magnet and the first coil move the slide member along the first groove, and the second magnet and the second coil move the slide member along the second groove. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2011-158714 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in this unit, the first magnet, the second magnet, the first coil, and the second coil are each disposed outside the sliding member (outside in the radial direction of a circle centered on the optical axis of the lens), so there is a risk that the size of this unit in the radial direction of a circle centered on the optical axis of the lens will be large.

[0005] Therefore, it is desirable to further reduce the size of devices that drive optical elements such as lenses. [Means for solving the problem]

[0006] An optical element driving device according to an embodiment of the present invention includes a fixed side member including a support member, an optical element holding member having a through hole penetrating in the vertical direction in which an optical element can be arranged, an intermediate member provided between the support member and the optical element holding member in the vertical direction and movable in a first direction perpendicular to the vertical direction relative to the support member, at least three lower balls arranged between the support member and the intermediate member, at least three upper balls arranged between the intermediate member and the optical element holding member, a first driving means for moving the intermediate member in the first direction relative to the support member, and a second driving means for moving the optical element holding member in a second direction perpendicular to the vertical direction and perpendicular to the first direction relative to the intermediate member. a magnetic attraction means for generating a force that attracts the intermediate member and the optical element holding member to each other by sandwiching the upper ball; In the optical element driving device, the optical element holding member is movable along a plane perpendicular to the up-down direction with respect to the support member, the first driving means has a first driving magnet provided on the intermediate member and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, and the second driving means has a second driving magnet provided on the optical element holding member and a second coil provided on the support member so as to face the second driving magnet in the up-down direction. death , The magnetic attraction means includes an attraction magnet provided on the intermediate member or the optical element holding member, the optical element holding member being formed in a frame shape having a first side portion and a third side portion facing each other across the through hole, and a second side portion and a fourth side portion facing each other across the through hole in a direction intersecting a direction in which the first side portion and the third side portion face each other, the width dimension of the third side portion in a direction perpendicular to a direction in which the third side portion extends is smaller than the width dimensions of any of the first side portion, the second side portion and the fourth side portion, the intermediate member having a first side portion, a second side portion and a fourth side portion facing the first side portion, the second side portion and the fourth side portion, respectively, in a vertical direction, and the attraction magnet being provided on at least one of the second side portion and the fourth side portion of the intermediate member, or on at least one of the second side portion and the fourth side portion of the optical element holding member. . Effect of the Invention

[0007] The above-described optical element driving device can be further reduced in overall size. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view of an example of an optical element driving device. [Diagram 2] 2 is an exploded perspective view of the optical element driving device of FIG. 1. [Diagram 3] 2 is an exploded perspective view of a lower member constituting the optical element driving device of FIG. 1. FIG. [Figure 4] 2 is a bottom view of an optical element holding member constituting the optical element driving device of FIG. 1. [Diagram 5]2 is a bottom view of an intermediate member that constitutes the optical element driving device of FIG. 1. [Figure 6] 2 is an exploded perspective view of a fixed-side member constituting the optical element driving device of FIG. 1. [Figure 7] 2A to 2C are three-orthographic views of a magnetic system constituting the optical element driving device of FIG. 1. [Figure 8] FIG. 4 is a cross-sectional view of the ball receiving structure. [Figure 9] 2 is a top view of a driving magnet, an attracting magnet, a lower ball, and an upper ball that constitute the optical element driving device of FIG. 1. [Figure 10] FIG. 11 is a perspective view of another example of an optical element driving device. [Figure 11] 11 is an exploded perspective view of the optical element driving device of FIG. 10. [Figure 12] 11 is an exploded perspective view of a lower member constituting the optical element driving device of FIG. 10. FIG. [Figure 13] 11 is a bottom view of an optical element holding member constituting the optical element driving device of FIG. 10. [Figure 14] 11 is a bottom view of an intermediate member that constitutes the optical element driving device of FIG. 10. [Figure 15] 11A to 11C are three-orthographic views of a magnetic system constituting the optical element driving device of FIG. 10. [Figure 16] 11 is a top view of a driving magnet, an attracting magnet, a lower ball, and an upper ball that constitute the optical element driving device of FIG. 10. [Figure 17] FIG. 11 is a perspective view of yet another example of an optical element driving device. [Figure 18] 18 is an exploded perspective view of the optical element driving device of FIG. 17. [Figure 19] 18 is an exploded perspective view of a lower member constituting the optical element driving device of FIG. 17. FIG. [Figure 20] 18 is a bottom view of an optical element holding member constituting the optical element driving device of FIG. 17. [Figure 21] 18 is a bottom view of an intermediate member that constitutes the optical element driving device of FIG. 17. [Figure 22] 18A to 18C are three-orthographic views of a magnetic system constituting the optical element driving device of FIG. 17. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an optical element driving device 100 according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of the optical element driving device 100. FIG. 2 is an exploded perspective view of the optical element driving device 100 composed of a case 4 and a lower member LB, showing a state in which the case 4 is separated from the lower member LB. FIG. 3 is an exploded perspective view of the lower member LB, showing a state in which the movable side member MB is separated from the fixed side member FB. FIG. 4 is a bottom view of the optical element holding member 2 constituting the optical element driving device 100. FIG. 5 is a bottom view of the intermediate member 3 constituting the optical element driving device 100. FIG. 6 is an exploded perspective view of the fixed side member FB. In FIG. 4, a dot pattern is applied to the optical element holding member 2 for clarity. Similarly, in FIG. 5, a dot pattern is applied to the intermediate member 3 for clarity.

[0010] 1 to 6, X1 represents one direction of the X-axis constituting the three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X-axis. Y1 represents one direction of the Y-axis constituting the three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y-axis. Similarly, Z1 represents one direction of the Z-axis constituting the three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z-axis. In FIG. 1, the X1 side of the optical element driving device 100 corresponds to the front side (front side) of the optical element driving device 100, and the X2 side of the optical element driving device 100 corresponds to the rear side (rear side) of the optical element driving device 100. The Y1 side of the optical element driving device 100 corresponds to the left side of the optical element driving device 100, and the Y2 side of the optical element driving device 100 corresponds to the right side of the optical element driving device 100. Moreover, the Z1 side of the optical element driving device 100 corresponds to the upper side of the optical element driving device 100, and the Z2 side of the optical element driving device 100 corresponds to the lower side of the optical element driving device 100. The same applies to other members in other figures.

[0011] The optical element driving device 100 is a device for moving an optical element OE as shown in FIG. 2 on a virtual plane parallel to the XY plane. In FIG. 2, the optical element OE is shown to have a substantially rectangular parallelepiped shape for clarity, but may have other shapes such as a cylindrical shape. In addition, in figures other than FIG. 2, the optical element OE is omitted for clarity. The optical element OE is a lens body, a mirror, a prism, a diffraction grating, a light-emitting element, a light-receiving element, an imaging element, an optical filter, or the like. The lens body is a cylindrical lens barrel having at least one lens. In this embodiment, the optical element OE is a lens body. Therefore, hereinafter, the upper side of the optical element driving device 100 may be referred to as the "subject side", and the lower side of the optical element driving device 100 may be referred to as the "imaging element side".

[0012] As shown in FIGS. 1 and 2, the optical element driving device 100 includes a case 4, which is a part of a fixed member FB, and a lower member LB.

[0013] The case 4 is a cover member that covers the lower member LB. In this embodiment, the case 4 is made by performing punching, drawing, and the like on a plate material made of a non-magnetic metal such as austenitic stainless steel. Since the case 4 is made of a non-magnetic metal, it does not have an adverse magnetic effect on the driving means DM (described later) that utilizes electromagnetic force.

[0014] As shown in FIG. 2, the case 4 has a rectangular cylindrical shape with a lid that defines a storage section 4S. Specifically, the case 4 has an outer peripheral wall 4A that is substantially rectangular cylindrical, and a top plate 4B that is substantially rectangular annular and flat and is provided so as to be continuous with the upper end (the end on the Z1 side) of the outer peripheral wall 4A. A substantially rectangular through hole 4K is formed in the center of the top plate 4B. The outer peripheral wall 4A includes a first side plate 4A1 to a fourth side plate 4A4. The first side plate 4A1 and the third side plate 4A3 face each other, and the second side plate 4A2 and the fourth side plate 4A4 face each other. The second side plate 4A2 and the fourth side plate 4A4 extend perpendicularly to the first side plate 4A1 and the third side plate 4A3. As shown in FIG. 1, the case 4 is bonded to a base member 18 by an adhesive to form a housing HS together with the base member 18.

[0015] As shown in FIG. 3, the lower member LB includes a metal member 7, a magnetic member 13, and a base member 18 which are parts of the fixed member FB, a lower ball 11, and a movable member MB.

[0016] The lower balls 11 are configured to support the movable member MB movably in a direction parallel to the X-axis with respect to the fixed member FB. In this embodiment, the lower balls 11 are spherical rolling bodies made of a hard material such as resin, ceramic, or metal, and include the first lower ball 11A to the third lower ball 11C. The lower balls 11 are disposed between the recess 18S (see FIG. 3) as a lower upward recess formed in the base member 18 and the recess 3S (see the upper diagram of FIG. 5) as a lower downward recess formed in the intermediate member 3. Specifically, the first lower ball 11A is disposed between the first recess 18S1 (see FIG. 3) and the first recess 3S1 (see the upper diagram of FIG. 5). The second lower ball 11B is disposed between the second recess 18S2 (see FIG. 3) and the second recess 3S2 (see the upper diagram of FIG. 5). Moreover, the third lower ball 11C is disposed between the third recess 18S3 (see FIG. 3) and the third recess 3S3 (see the upper diagram in FIG. 5). With this configuration, the movable member MB is supported by the lower ball 11 so as to be movable in a direction parallel to the X-axis.

[0017] The coil 9 is a member fixed to the base member 18. In the example shown in Fig. 3, the coil 9 is a wound type coil, and includes a first coil 9A and a second coil 9B. The coil 9 may be a laminated type or a film type. Furthermore, each of the first coil 9A and the second coil 9B may be composed of a combination of multiple coils.

[0018] The magnetic member 13 is one of the members constituting the magnetic attraction means MA (described later), and is disposed away from the second drive magnet 5B and the attraction magnet 8, which are other members constituting the magnetic attraction means MA, so as to be magnetically attracted to the second drive magnet 5B and the attraction magnet 8. In the illustrated example, the magnetic member 13 includes a first magnetic member 13A, a second magnetic member 13B, and a third magnetic member 13C adhesively fixed to the upper surface of the base member 18.

[0019] The driving means DM includes a first driving means DM1 that moves the optical element OE along the X-axis direction, and a second driving means DM2 that moves the optical element OE along the Y-axis direction.

[0020] The first driving means DM1 includes a first coil 9A provided on the base member 18, and a first driving magnet 5A arranged to face and be spaced apart from the first coil 9A in the Z-axis direction.

[0021] The second driving means DM2 includes a second coil 9B provided on the base member 18, and a second driving magnet 5B arranged to face and be spaced apart from the second coil 9B in the Z-axis direction.

[0022] The optical element driving device 100 having a substantially rectangular parallelepiped shape is mounted, for example, on a main board (not shown). The coil 9 is connected to a current supply source via the metal member 7 and the main board. When a current flows through the coil 9, the driving means DM generates an electromagnetic force along a direction parallel to the XY plane.

[0023] For example, when the optical element OE is a lens body, the optical element driving device 100 can realize a shift function (image stabilization function) by utilizing an electromagnetic force generated by the driving means DM along a direction parallel to the XY plane to move the lens body as the optical element OE along a direction parallel to the XY plane.

[0024] The movable member MB includes an optical element holding member 2, an intermediate member 3, a driving magnet 5, a detection magnet 6, an attraction magnet 8, and an upper ball 12, as shown in FIG.

[0025] The drive magnet 5 includes a first drive magnet 5A and a second drive magnet 5B. In this embodiment, each of the first drive magnet 5A and the second drive magnet 5B is a rectangular parallelepiped permanent magnet magnetized with two poles, with the inside magnetized with the S pole and the outside magnetized with the N pole. In Fig. 3, the part magnetized with the N pole is shown with a dot pattern. The same is true for the detection magnet 6 and the attraction magnet 8.

[0026] The first drive magnet 5A is disposed at a distance from the first coil 9A so as to face the first coil 9A in the Z-axis direction. The second drive magnet 5B is disposed at a distance from the second coil 9B so as to face the second coil 9B in the Z-axis direction. Each of the first drive magnet 5A and the second drive magnet 5B may be magnetized with an N pole on the inside and an S pole on the outside. Alternatively, each of the first drive magnet 5A and the second drive magnet 5B may be composed of a combination of multiple permanent magnets.

[0027] The second drive magnet 5B is one of the members constituting the magnetic attraction means MA. In the illustrated example, the second drive magnet 5B is fixed to the optical element holding member 2 so that a magnetic attraction force acts between the second drive magnet 5B and the magnetic member 13. Specifically, the second drive magnet 5B is disposed apart from the third magnetic member 13C so as to face the third magnetic member 13C in the Z-axis direction. The third magnetic member 13C is disposed below the second coil 9B (Z2 side).

[0028] The detection magnet 6 is a member for detecting the displacement of the optical element OE. Specifically, the detection magnet 6 includes a first detection magnet 6A for detecting the displacement of the optical element OE in the X-axis direction and a second detection magnet 6B for detecting the displacement of the optical element OE in the Y-axis direction. In the illustrated example, each of the first detection magnet 6A and the second detection magnet 6B is a rectangular parallelepiped permanent magnet magnetized with two poles. The first detection magnet 6A is magnetized with two poles in the X-axis direction, and the second detection magnet 6B is magnetized with two poles in the Y-axis direction. The first detection magnet 6A and the second detection magnet 6B are fixed to the optical element holding member 2.

[0029] The first detection magnet 6A is disposed at a distance from the first magnetic sensor 10A so as to face the first magnetic sensor 10A in the Z-axis direction. The second detection magnet 6B is disposed at a distance from the second magnetic sensor 10B so as to face the second magnetic sensor 10B in the Z-axis direction. Each of the first detection magnet 6A and the second detection magnet 6B may be composed of a plurality of permanent magnets.

[0030] The attracting magnet 8 is one of the members constituting the magnetic attracting means MA. In the illustrated example, the attracting magnet 8 is fixed to the optical element holding member 2 so that a magnetic attraction force acts between the attracting magnet 8 and the magnetic member 13. Specifically, the attracting magnet 8 includes a first attracting magnet 8A arranged at a distance from the first magnetic member 13A so as to face the first magnetic member 13A in the Z-axis direction, and a second attracting magnet 8B arranged at a distance from the second magnetic member 13B so as to face the second magnetic member 13B in the Z-axis direction.

[0031] The upper balls 12 are configured to support the optical element holding member 2 movably in a direction parallel to the Y axis with respect to the intermediate member 3. In this embodiment, the upper balls 12 are spherical rolling bodies made of a hard material such as resin, ceramic, or metal, and include a first upper ball 12A to a third upper ball 12C. The upper balls 12 are disposed between a recess 3T (see FIG. 3) as an upper upward recess formed in the intermediate member 3, and a recess 2S (see the upper view of FIG. 4) as an upper downward recess formed in the optical element holding member 2. Specifically, the first upper ball 12A is disposed between the first recess 3T1 (see FIG. 3) and the first recess 2S1 (see the upper view of FIG. 5). The second upper ball 12B is disposed between the second recess 3T2 (see FIG. 3) and the second recess 2S2 (see the upper view of FIG. 5). Moreover, the third upper ball 12C is disposed between the third recess 3T3 (see FIG. 3) and the third recess 2S3 (see the upper diagram in FIG. 5). With this configuration, the optical element holding member 2 is supported by the upper ball 12 so as to be movable in a direction parallel to the Y axis.

[0032] The optical element holding member 2 is configured to be able to hold the optical element OE and the second drive magnet 5B. In this embodiment, the optical element holding member 2 is formed by injection molding a synthetic resin such as liquid crystal polymer (LCP). As shown in FIG. 3, the optical element holding member 2 includes a through hole 2K formed to extend parallel to the Z axis. The optical element OE is fixed to the inner circumferential surface of the through hole 2K with an adhesive.

[0033] Fig. 4 is a bottom view of the optical element holding member 2. Specifically, the upper view of Fig. 4 is a bottom view of the optical element holding member 2 when the second drive magnet 5B, the detection magnet 6, the attraction magnet 8, and the upper ball 12 are not arranged, and the lower view of Fig. 4 is a bottom view of the optical element holding member 2 when the second drive magnet 5B, the detection magnet 6, the attraction magnet 8, and the upper ball 12 are arranged.

[0034] Specifically, the optical element holding member 2 is a substantially rectangular ring-shaped frame body. The four sides 2E constituting the frame body include a first side 2E1 to a fourth side 2E4.

[0035] As shown in the upper diagram of FIG. 4, a recess 2P recessed in the Z1 direction is provided on the end face of the lower side (Z2 side) of the optical element holding member 2 on the imaging element side. As shown in the lower diagram of FIG. 4, a detection magnet 6 is accommodated in the recess 2P. In the illustrated example, the detection magnet 6 is fixed to the optical element holding member 2 with an adhesive. Specifically, the recess 2P includes a first recess 2P1 in which a first detection magnet 6A is accommodated and a second recess 2P2 in which a second detection magnet 6B is accommodated. The first recess 2P1 is provided in a first corner 2C1 that is one of the four corners 2C of the optical element holding member 2, and the second recess 2P2 is provided in a second corner 2C2 that is another one of the four corners 2C of the optical element holding member 2.

[0036] Further, a recess 2Q recessed in the Z1 direction is provided on the end face of the lower side (Z2 side) of the optical element holding member 2 as shown in the upper diagram of FIG. 4. An attracting magnet 8 is accommodated in the recess 2Q as shown in the lower diagram of FIG. 4. In the illustrated example, the attracting magnet 8 is fixed to the optical element holding member 2 with an adhesive. Specifically, the recess 2Q includes a first recess 2Q1 in which a first attracting magnet 8A is accommodated and a second recess 2Q2 in which a second attracting magnet 8B is accommodated. The first recess 2Q1 is provided in a fourth corner 2C4 that is one of the four corners 2C of the optical element holding member 2, and the second recess 2Q2 is provided in a third corner 2C3 that is another one of the four corners 2C of the optical element holding member 2.

[0037] Furthermore, a recess 2R recessed in the Z1 direction is provided on the end face on the lower side (Z2 side) of the first side portion 2E1, as shown in the upper diagram of Fig. 4. A second drive magnet 5B is housed in the recess 2R, as shown in the lower diagram of Fig. 4. In the illustrated example, the second drive magnet 5B is fixed to the optical element holding member 2 with an adhesive. Note that the recess 2R may be open not only downward but also to the side (radially outward).

[0038] In addition, as shown in the upper view of FIG. 4, a recess 2S is provided on the lower end face (Z2 side) of the optical element holding member 2 as an upper-side downward recess recessed in the Z1 direction. As shown in the lower view of FIG. 4, the upper part of the upper ball 12 is accommodated in the recess 2S. In the illustrated example, the recess 2S includes a first recess 2S1 in which the upper part of the first upper ball 12A is accommodated, a second recess 2S2 in which the upper part of the second upper ball 12B is accommodated, and a third recess 2S3 in which the upper part of the third upper ball 12C is accommodated. The first recess 2S1 is provided on the lower end face (Z2 side) of the third side portion 2E3, the second recess 2S2 is provided on the lower end face (Z2 side) of the second side portion 2E2, and the third recess 2S3 is provided on the lower end face (Z2 side) of the fourth side portion 2E4.

[0039] The lower portions of each of the first upper ball 12A to the third upper ball 12C are housed in a recess 3T (see FIG. 3) serving as an upper upward recess formed on the upper surface of the intermediate member 3. At least one of the recesses 2P, 2R, and 2Q may be a through hole extending parallel to the Z axis.

[0040] The intermediate member 3 is configured to be able to hold the first drive magnet 5A. In this embodiment, the intermediate member 3 is formed by injection molding a synthetic resin such as liquid crystal polymer (LCP). As shown in FIG. 3, the intermediate member 3 includes a through hole 3K formed to extend parallel to the Z axis. The through hole 3K corresponds to the through hole 2K of the optical element holding member 2. The optical element OE is held by the optical element holding member 2 so as not to come into contact with the inner circumferential surface of the through hole 3K even when the optical element holding member 2 moves relative to the intermediate member 3.

[0041] Fig. 5 is a bottom view of the intermediate member 3. Specifically, the upper view of Fig. 5 is a bottom view of the intermediate member 3 when the first drive magnet 5A and the lower ball 11 are not arranged, and the lower view of Fig. 5 is a bottom view of the intermediate member 3 when the first drive magnet 5A and the lower ball 11 are arranged.

[0042] Specifically, the intermediate member 3 is a substantially rectangular ring-shaped frame body. The four sides 3E constituting the frame body include a first side portion 3E1 to a fourth side portion 3E4.

[0043] A recess 3R recessed in the Z1 direction is provided on the end face of the lower side (Z2 side) of the intermediate member 3, which is on the imaging element side, as shown in the upper diagram of Fig. 5. A first drive magnet 5A is housed in the recess 3R, as shown in the lower diagram of Fig. 5. In the illustrated example, the first drive magnet 5A is fixed to the intermediate member 3 with an adhesive. Note that the recess 3R may be open not only to the lower side but also to the side side (radially outward).

[0044] In addition, as shown in the upper view of FIG. 5, a recess 3S is provided on the lower end surface (Z2 side) of the intermediate member 3 as a lower downward recess recessed in the Z1 direction. As shown in the lower view of FIG. 5, the upper portion of the lower ball 11 is accommodated in the recess 3S. In the illustrated example, the recess 3S includes a first recess 3S1 in which the upper portion of the first lower ball 11A is accommodated, a second recess 3S2 in which the upper portion of the second lower ball 11B is accommodated, and a third recess 3S3 in which the upper portion of the third lower ball 11C is accommodated. The first recess 3S1 is provided on the lower end surface (Z2 side) of the second side portion 3E2, the second recess 3S2 is provided on the lower end surface (Z2 side) of the first side portion 3E1, and the third recess 3S3 is provided on the lower end surface (Z2 side) of the third side portion 3E3.

[0045] The lower portions of the first to third lower balls 11A to 11C are housed in recesses 18S (see FIG. 3) serving as lower-side upward recesses formed in the upper surface of the base member 18. The recesses 3R may be through holes extending parallel to the Z-axis.

[0046] The base member 18 is formed by injection molding using a synthetic resin such as a liquid crystal polymer. In this embodiment, the base member 18 has a substantially rectangular outline in top view as shown in FIG. 6, and has a through hole 18K in the center. The coil 9, the magnetic sensor 10, and the magnetic member 13 are fixed to the upper surface of the base member 18, which is the surface on the subject side (the surface on the Z1 side), by adhesive. The through hole 18K corresponds to the through hole 2K of the optical element holding member 2 and the through hole 3K of the intermediate member 3. In addition, a recess 18B that accommodates the magnetic sensor 10 is formed on the upper surface of the base member 18. The recess 18B includes a first recess 18B1 that accommodates the first magnetic sensor 10A and a second recess 18B2 that accommodates the second magnetic sensor 10B. In addition, a recess 18U that accommodates the magnetic member 13 is formed on the upper surface of the base member 18. The recess 18U includes a first recess 18U1 that accommodates the first magnetic member 13A, a second recess 18U2 that accommodates the second magnetic member 13B, and a third recess 18U3 that accommodates the third magnetic member 13C. A protrusion 18P to which the coil 9 is fixed is formed on the upper surface of the base member 18. The protrusion 18P includes a first protrusion 18P1 to which the first coil 9A is fixed, and a second protrusion 18P2 to which the second coil 9B is fixed.

[0047] The magnetic sensor 10 is configured to detect the position of the optical element OE. In this embodiment, a plurality of magnetic sensors 10 are provided so as to detect the displacement in the X-axis direction and the Y-axis direction of the optical element holding member 2 to which the optical element OE is fixed. In the example shown in FIG. 6, the magnetic sensor 10 includes a first magnetic sensor 10A and a second magnetic sensor 10B. The magnetic sensor 10 is housed in the recess 18B with each of the four terminals connected to the metal member 7. Specifically, the first magnetic sensor 10A is housed in the first recess 18B1, and the second magnetic sensor 10B is housed in the second recess 18B2.

[0048] 6, the magnetic sensor 10 is configured to be composed of a Hall element and to be able to detect the position of the movable member MB including the detection magnet 6 by measuring an output voltage of the Hall element that changes according to the magnitude of the magnetic field from the detection magnet 6 that the Hall element receives. However, the magnetic sensor 10 may be configured to detect the position of the optical element OE by using a magnetoresistance element such as a Giant Magneto Resistive effect (GMR) element, a Semiconductor Magneto Resistive (SMR) element, an Anisotropic Magneto Resistive (AMR) element, or a Tunnel Magneto Resistive (TMR) element.

[0049] Further, on the upper surface of the base member 18, recesses 18S are formed as lower-side upward recesses for accommodating the lower balls 11. Specifically, the base member 18 is formed with three recesses 18S (first recess 18S1 to third recess 18S3) for accommodating the three lower balls 11 (first lower ball 11A to third lower ball 11C).

[0050] As shown in FIG. 6, the metal member 7 is embedded in the base member 18 and configured to realize electrical conduction between the coil 9 and the magnetic sensor 10 and the outside. In this embodiment, the metal member 7 is formed of a non-magnetic metal. FIG. 6 is a perspective view of the metal member 7 and the base member 18. Specifically, FIG. 6 shows the relationship between the metal member 7 not embedded in the base member 18 and the coil 9 and the magnetic sensor 10 fixed to the base member 18. The metal member 7, the coil 9, and the magnetic sensor 10 are joined to each other by solder or a conductive adhesive. In FIG. 6, a dot pattern is applied to the joint portion of the metal member 7 for clarity.

[0051] Specifically, the metal member 7 includes a first metal member 7A to a twelfth metal member 7L, and a portion of each of the metal members 7 is embedded in the base member 18 by insert molding.

[0052] In the example shown in Fig. 6, one end of the first coil 9A is joined to the second metal member 7B, and the other end of the first coil 9A is joined to the third metal member 7C. In addition, the first terminal of the first magnetic sensor 10A is joined to the fourth metal member 7D, the second terminal of the first magnetic sensor 10A is joined to the fifth metal member 7E, the third terminal of the first magnetic sensor 10A is joined to the sixth metal member 7F, and the fourth terminal of the first magnetic sensor 10A is joined to the seventh metal member 7G. In addition, one end of the second coil 9B is joined to the eighth metal member 7H, and the other end of the second coil 9B is joined to the ninth metal member 7I. In addition, the first terminal of the second magnetic sensor 10B is joined to the tenth metal member 7J, the second terminal of the second magnetic sensor 10B is joined to the eleventh metal member 7K, the third terminal of the second magnetic sensor 10B is joined to the twelfth metal member 7L, and the fourth terminal of the second magnetic sensor 10B is joined to the first metal member 7A.

[0053] Next, the positional relationship of the driving magnet 5, the detection magnet 6, the attraction magnet 8, the coil 9, the magnetic sensor 10, and the magnetic member 13 that constitute the magnetic system will be described with reference to Fig. 3 and Fig. 7. Fig. 7 is a three-view diagram (front view, top view, and right side view) of the magnetic system mounted on the optical element driving device 100 of Fig. 1.

[0054] The magnetic system is a system that utilizes magnetic force, and includes driving means DM, magnetic attraction means MA, and position detection means PD.

[0055] The driving means DM is a means for moving the optical element OE in the XY plane. In the illustrated example, the driving means DM includes a first driving means DM1 for moving the optical element OE along the X-axis direction, and a second driving means DM2 for moving the optical element OE along the Y-axis direction.

[0056] 3, the first driving means DM1 includes a first coil 9A provided on the base member 18, and a first driving magnet 5A arranged to face the first coil 9A at a distance in the Z-axis direction. The first driving magnet 5A and the first coil 9A are arranged to face each other with a small gap therebetween, as shown in FIG.

[0057] 3, the second driving means DM2 includes a second coil 9B provided on the base member 18, and a second driving magnet 5B arranged to face the second coil 9B at a distance in the Z-axis direction. The second driving magnet 5B and the second coil 9B are arranged to face each other with a small gap therebetween, as shown in FIG.

[0058] When a current flows through the first coil 9A as shown by the dashed arrow AR1, the intermediate member 3 (first drive magnet 5A) moves backward (X2 direction) relative to the base member 18 while being guided by a lower ball guide structure including the lower ball 11, which will be described later. When a current flows through the first coil 9A as shown by the dashed arrow AR2, the intermediate member 3 (first drive magnet 5A) moves forward (X1 direction) relative to the base member 18 while being guided by the lower ball guide structure. This is because a Lorentz force acts on the charged particles moving within the conductive wire constituting the first coil 9A fixed to the base member 18, and the first drive magnet 5A is moved backward or forward by the reaction force.

[0059] Similarly, when a current flows through the second coil 9B as shown by the dashed arrow AR3, the optical element holding member 2 (second driving magnet 5B) moves to the right (Y2 direction) relative to the intermediate member 3 and the base member 18 while being guided by an upper ball guide structure including the upper ball 12, which will be described later. When a current flows through the second coil 9B as shown by the dashed arrow AR4, the optical element holding member 2 (second driving magnet 5B) moves to the left (Y1 direction) relative to the intermediate member 3 and the base member 18 while being guided by the upper ball guide structure. This is because a Lorentz force acts on the charged particles moving within the conductive wire constituting the second coil 9B fixed to the base member 18, and the second driving magnet 5B is moved to the right or left by the reaction force.

[0060] The position detection means PD is a means for detecting the position in a virtual plane parallel to the XY plane of the optical element OE fixed to the optical element holding member 2. In the illustrated example, the position detection means PD includes a first position detection means PD1 for detecting the position of the optical element OE in the X-axis direction, and a second position detection means PD2 for detecting the position of the optical element OE in the Y-axis direction.

[0061] The first position detection means PD1 includes a first detection magnet 6A and a first magnetic sensor 10A that are spaced apart from each other in the vertical direction as shown in Fig. 3. The second position detection means PD2 includes a second detection magnet 6B and a second magnetic sensor 10B that are spaced apart from each other in the vertical direction as shown in Fig. 3.

[0062] The magnetic attraction means MA is a means for generating a force that attracts two members to each other in the vertical direction (Z-axis direction). In the illustrated example, the magnetic attraction means MA is configured to generate a force that attracts the optical element holding member 2 and the base member 18 to each other. Specifically, the magnetic attraction means MA includes a second driving magnet 5B, an attraction magnet 8, and a magnetic member 13. More specifically, the magnetic attraction means MA includes a first magnetic attraction means MA1, a second magnetic attraction means MA2, and a third magnetic attraction means MA3, as shown in FIG. 3.

[0063] The first magnetic attraction means MA1 is configured to exert a magnetic attraction force between the first attracting magnet 8A and the first magnetic member 13A, which are spaced apart from each other in the vertical direction. The second magnetic attraction means MA2 is configured to exert a magnetic attraction force between the second attracting magnet 8B and the second magnetic member 13B, which are spaced apart from each other in the vertical direction. The third magnetic attraction means MA3 is configured to exert a magnetic attraction force between the second driving magnet 5B and the third magnetic member 13C, which are spaced apart from each other in the vertical direction.

[0064] With this configuration, the magnetic attraction means MA can attract the optical element holding member 2 and the base member 18 to each other. Specifically, the recess 2S formed on the lower surface of the optical element holding member 2 is pressed against the upper part of the upper ball 12, the lower part of which is accommodated in the recess 3T formed on the upper surface of the intermediate member 3. Also, the recess 3S formed on the lower surface of the intermediate member 3 is pressed against the upper part of the lower ball 11, the lower part of which is accommodated in the recess 18S formed on the upper surface of the base member 18. Therefore, the magnetic attraction means MA can stably maintain a state in which the optical element holding member 2 and the upper part of the upper ball 12 are in contact with each other and the lower part of the upper ball 12 and the intermediate member 3 are in contact with each other. Also, the magnetic attraction means MA can stably maintain a state in which the intermediate member 3 and the upper part of the lower ball 11 are in contact with each other and the lower part of the lower ball 11 and the base member 18 are in contact with each other.

[0065] In the illustrated example, each of the first upper ball 12A to the third upper ball 12C constituting the upper ball 12 is sandwiched between the optical element holding member 2 and the intermediate member 3 in a state capable of rolling in the Y axis direction. Therefore, the optical element holding member 2 can move parallel to the Y axis without rotating (tilting) about the X axis and without rotating (tilting) about the Y axis.

[0066] Additionally, each of first lower ball 11A to third lower ball 11C constituting lower ball 11 is sandwiched between intermediate member 3 and base member 18 in a state in which it can roll in the X-axis direction. Therefore, intermediate member 3 can move parallel to the X-axis without rotating (tilting) about the X-axis and without rotating (tilting) about the Y-axis.

[0067] In the optical element driving device 100, the distance between the center of the first magnetic member 13A and the center of the first attracting magnet 8A in the Z-axis direction and the distance between the center of the second magnetic member 13B and the center of the second attracting magnet 8B in the Z-axis direction are the same. However, these distances are smaller than the distance between the center of the third magnetic member 13C and the center of the second driving magnet 5B in the Z-axis direction. This is because the magnetic force of the second driving magnet 5B is greater than the magnetic forces of the first attracting magnet 8A and the second attracting magnet 8B. In other words, this is to make the magnetic attraction forces generated by the first magnetic attraction means MA1, the second magnetic attraction means MA2, and the third magnetic attraction means MA3 approximately the same by adjusting the magnitude of each distance.

[0068] Here, the ball housing structure will be described with reference to FIG. 8. FIG. 8 is a cross-sectional view of the ball housing structure. Specifically, the upper left view of FIG. 8 shows a cross-section of the intermediate member 3, the third lower ball 11C, and the base member 18 in a virtual plane parallel to the YZ plane including the dashed line L1 in the lower view of FIG. 5. The upper right view of FIG. 8 shows a cross-section of the intermediate member 3, the second lower ball 11B, and the base member 18 in a virtual plane parallel to the YZ plane including the dashed line L2 in the lower view of FIG. 5. The lower left view of FIG. 8 shows a cross-section of the optical element holding member 2, the intermediate member 3, and the third upper ball 12C in a virtual plane parallel to the XZ plane including the dashed line L3 in the lower view of FIG. 4. The lower right view of FIG. 8 shows a cross-section of the optical element holding member 2, the intermediate member 3, and the second upper ball 12B in a virtual plane parallel to the XZ plane including the dashed line L4 in the lower view of FIG. 4.

[0069] The ball containing structure is a structure for containing a ball. Specifically, the ball containing structure is composed of a pair of wide grooves that do not restrict the moving direction of the ball and two pairs of narrow grooves that restrict the moving direction of the ball.

[0070] In the illustrated example, the ball accommodating structure includes a lower ball accommodating structure that accommodates the lower ball 11, and an upper ball accommodating structure that accommodates the upper ball 12. Specifically, the lower ball accommodating structure is composed of a pair of wide grooves that do not restrict the moving direction of the lower ball 11, and two pairs of narrow grooves that restrict the moving direction of the lower ball 11. In addition, the upper ball accommodating structure is composed of a pair of wide grooves that do not restrict the moving direction of the upper ball 12, and two pairs of narrow grooves that restrict the moving direction of the upper ball 12.

[0071] Furthermore, the two pairs of narrow grooves that regulate the moving direction of the ball constitute a ball guide structure. The ball guide structure is a structure that guides the moving direction of the ball. In the illustrated example, the ball guide structure includes a lower ball guide structure that guides the movement of the lower ball 11 along the X-axis direction, and an upper ball guide structure that guides the movement of the upper ball 12 along the Y-axis direction.

[0072] Specifically, the lower ball guide structure is composed of two pairs of narrow grooves that regulate the movement direction of the lower ball 11, and the upper ball guide structure is composed of two pairs of narrow grooves that regulate the movement direction of the upper ball 12.

[0073] The pair of wide grooves in the lower ball accommodating structure is a combination of a third recess 18S3 facing downward and formed on the upper surface of the base member 18 and a third recess 3S3 facing downward and formed on the lower surface of the intermediate member 3, as shown in the upper left diagram of Figure 8.

[0074] In addition, in the pair of wide grooves in the lower ball accommodating structure, as shown in the upper left diagram of Figure 8, the third lower ball 11C is sandwiched between the third recess 18S3 and the third recess 3S3, while contacting the third recess 3S3 at one contact point CP1 and contacting the third recess 18S3 at one contact point CP2.

[0075] That is, in the pair of wide grooves in the lower ball receiving structure, as shown in the upper left diagram of Fig. 8, the width of the opening of the third recess 3S3 in the Y-axis direction and the width of the opening of the third recess 18S3 in the Y-axis direction are both formed to be larger than the diameter D3 of the third lower ball 11C. In addition, the width D1 of the bottom surface of the third recess 3S3 in the Y-axis direction and the width D2 of the bottom surface of the third recess 18S3 in the Y-axis direction are both formed to be larger than the diameter D3 of the third lower ball 11C.

[0076] 8, one pair of the two pairs of narrow grooves in the lower ball receiving structure is a combination of a second recess 18S2 facing downward and upward formed in the upper surface of the base member 18 and a second recess 3S2 facing downward and downward formed in the lower surface of the intermediate member 3. In addition, another pair (not shown) of the two pairs of narrow grooves in the lower ball receiving structure is a combination of a first recess 18S1 facing downward and upward formed in the upper surface of the base member 18 and a first recess 3S1 facing downward and downward formed in the lower surface of the intermediate member 3.

[0077] In one pair of the two pairs of narrow grooves in the lower ball receiving structure, the second lower ball 11B is sandwiched between the second recess 18S2 and the second recess 3S2 so as to contact the second recess 3S2 at two contact points CP11 and CP12 and to contact the second recess 18S2 at two contact points CP13 and CP14, as shown in the upper right diagram of Fig. 8. In another pair (not shown) of the two pairs of narrow grooves in the lower ball receiving structure, the first lower ball 11A is sandwiched between the first recess 18S1 and the first recess 3S1 so as to contact the first recess 3S1 at two contact points and to contact the first recess 18S1 at two contact points.

[0078] That is, in one pair of the two pairs of narrow grooves in the lower ball receiving structure, as shown in the upper right diagram of FIG. 8, the width of the opening (open end) of the second recess 3S2 in the Y-axis direction and the width of the opening (open end) of the second recess 18S2 in the Y-axis direction are both formed to be larger than the diameter D13 of the second lower ball 11B. In addition, the width D11 of the bottom surface of the second recess 3S2 in the Y-axis direction and the width D12 of the bottom surface of the second recess 18S2 in the Y-axis direction are both formed to be smaller than the diameter D13 of the second lower ball 11B. In other words, the second recess 3S2 and the second recess 18S2 are both configured so that the distance between the two side surfaces facing each other in the Y-axis direction increases toward the open end (opening). The same is true for another pair (not shown) of the two pairs of narrow grooves in the lower ball receiving structure.

[0079] The two pairs of narrow grooves in this lower ball receiving structure, i.e., the lower ball guide structure, guides the lower ball 11 so as to move along the X-axis direction while restricting it from moving along the Y-axis direction.

[0080] The pair of wide grooves in the upper ball accommodating structure is a combination of an upper-upward facing third recess 3T3 formed on the upper surface of the intermediate member 3 and an upper-downward facing third recess 2S3 formed on the lower surface of the optical element holding member 2, as shown in the lower left diagram of Figure 8.

[0081] In addition, in the pair of wide grooves in the upper ball accommodating structure, as shown in the lower left diagram of Figure 8, the third upper ball 12C is sandwiched between the third recess 2S3 and the third recess 3T3, while contacting the third recess 2S3 at one contact point CP21 and contacting the third recess 3T3 at one contact point CP22.

[0082] That is, in the pair of wide grooves in the upper ball receiving structure, as shown in the lower left diagram of Fig. 8, the width of the opening of the third recess 2S3 in the X-axis direction and the width of the opening of the third recess 3T3 in the X-axis direction are both formed to be larger than the diameter D23 of the third upper ball 12C. In addition, the width D21 of the bottom surface of the third recess 2S3 in the X-axis direction and the width D22 of the bottom surface of the third recess 3T3 in the X-axis direction are both formed to be larger than the diameter D23 of the third upper ball 12C.

[0083] 8, one pair of the two pairs of narrow grooves in the upper ball holding structure is a combination of a second recess 3T2 facing upward and formed on the upper surface of the intermediate member 3 and a second recess 2S2 facing downward and formed on the lower surface of the optical element holding member 2. In addition, another pair (not shown) of the two pairs of narrow grooves in the upper ball holding structure is a combination of a first recess 3T1 facing upward and formed on the upper surface of the intermediate member 3 and a first recess 2S1 facing downward and formed on the lower surface of the optical element holding member 2.

[0084] In one pair of the two pairs of narrow grooves in the upper ball receiving structure, the second upper ball 12B is sandwiched between the second recess 3T2 and the second recess 2S2 so as to contact the second recess 2S2 at two contact points CP31 and CP32 and to contact the second recess 3T2 at two contact points CP33 and CP34, as shown in the lower right diagram of Fig. 8. In another pair (not shown) of the two pairs of narrow grooves in the upper ball receiving structure, the first upper ball 12A is sandwiched between the first recess 2S1 and the first recess 3T1 so as to contact the first recess 2S1 at two contact points and to contact the first recess 3T1 at two contact points.

[0085] That is, in one pair of the two pairs of narrow grooves in the upper ball receiving structure, as shown in the lower right diagram of FIG. 8, the width of the opening (open end) of the second recess 2S2 in the X-axis direction and the width of the opening (open end) of the second recess 3T2 in the X-axis direction are both formed to be larger than the diameter D33 of the second upper ball 12B. In addition, the width D31 of the bottom surface of the second recess 2S2 in the X-axis direction and the width D32 of the bottom surface of the second recess 3T2 in the X-axis direction are both formed to be smaller than the diameter D33 of the second upper ball 12B. In other words, the second recess 2S2 and the second recess 3T2 are both configured such that the distance between the two side surfaces facing each other in the X-axis direction increases toward the open end (opening). The same is true for another pair (not shown) of the two pairs of narrow grooves in the upper ball receiving structure.

[0086] The two pairs of narrow grooves in this upper ball receiving structure, i.e., the upper ball guide structure, restrict the upper ball 12 from moving along the X-axis direction, while guiding it so as to move along the Y-axis direction.

[0087] Next, the positional relationship between the driving magnet 5, the attracting magnet 8, the lower ball 11, and the upper ball 12 will be described with reference to Fig. 9. Fig. 9 is a top view of the driving magnet 5, the attracting magnet 8, the lower ball 11, and the upper ball 12 that constitute the optical element driving device 100.

[0088] The first triangle TR1 indicated by the dashed line is a triangle formed by connecting the center of the second driving magnet 5B and the center of each of the two attracting magnets 8 (the first attracting magnet 8A and the second attracting magnet 8B). The center of each member is, for example, the center of gravity of each member. The same applies to the following description.

[0089] The second triangle TR2 indicated by the dashed line is a triangle formed by connecting the centers of the three upper balls 12 (the first upper ball 12A, the second upper ball 12B, and the third upper ball 12C). The second triangle TR2 is oriented in a substantially opposite direction to the first triangle TR1.

[0090] In the illustrated example, the first upper ball 12A is disposed between the first attracting magnet 8A and the second attracting magnet 8B. The second upper ball 12B is disposed outside the first triangle TR1 and facing the first side TR1F of the first triangle TR1. The third upper ball 12C is disposed outside the first triangle TR1 and facing the second side TR1S of the first triangle TR1.

[0091] A third triangle TR3 indicated by a dashed line is a triangle formed by connecting the centers of the three lower balls 11 (the first lower ball 11A, the second lower ball 11B, and the third lower ball 11C).

[0092] In the illustrated example, the third lower ball 11C is disposed between the first attracting magnet 8A and the second attracting magnet 8B. The first lower ball 11A is disposed so as to be located outside the first triangle TR1 and to face the first side TR1F. The second lower ball 11B is disposed so as to be located outside the first triangle TR1 and to face the second side TR1S.

[0093] Point CG1 is the center of gravity of the first triangle TR1, point CG2 is the center of gravity of the second triangle TR2, and point CG3 is the center of gravity of the third triangle TR3. In the illustrated example, points CG1, CG2, and CG3 are all located within the area where the first triangle TR1, the second triangle TR2, and the third triangle TR3 overlap. In Fig. 9, for clarity, a cross pattern is added to the area where the first triangle TR1, the second triangle TR2, and the third triangle TR3 overlap.

[0094] With this arrangement, the intermediate member 3 is supported in a well-balanced manner on the base member 18 via the three lower balls 11 without rotating about the three axes, X-axis, Y-axis, and Z-axis, and without translating in the Y-axis and Z-axis directions, and able to translate in the X-axis direction. Also, the optical element holding member 2 is supported in a well-balanced manner on the intermediate member 3 via the three upper balls 12, without rotating about the three axes, X-axis, Y-axis, and Z-axis, and without translating in the X-axis and Z-axis directions, and able to translate in the Y-axis direction.

[0095] Next, with reference to Figs. 10 to 16, an optical element driving device 100A, which is another configuration example of the optical element driving device 100, will be described. Fig. 10 is a perspective view of the optical element driving device 100A, and corresponds to Fig. 1. Fig. 11 is an exploded perspective view of the optical element driving device 100A composed of a case 4 and a lower member LB, showing a state in which the case 4 is separated from the lower member LB, and corresponds to Fig. 2. Fig. 12 is an exploded perspective view of the lower member LB, showing a state in which the movable member MB is separated from the fixed member FB, and corresponds to Fig. 3. Fig. 13 is a bottom view of the optical element holding member 2 constituting the optical element driving device 100A, and corresponds to Fig. 4. Fig. 14 is a bottom view of the intermediate member 3 constituting the optical element driving device 100A, and corresponds to Fig. 5. Fig. 15 is a three-sided view (front view, top view, and right side view) of a magnetic system mounted on the optical element driving device 100A, and corresponds to Fig. 7. FIG. 16 is a top view of the driving magnet 5, the attracting magnet 8, the lower ball 11, and the upper ball 12 that constitute the optical element driving device 100A, and corresponds to FIG.

[0096] The optical element driving device 100A differs from the optical element driving device 100 in that the attracting magnet 8 is fixed to the intermediate member 3, in that the attracting magnet 8 is fixed to the optical element holding member 2.

[0097] 14, in the optical element driving device 100A, the first attracting magnet 8A is accommodated in a first recess 3Q1 which is one of the recesses 3Q formed on the lower surface of the second side portion 3E2 of the intermediate member 3, and the second attracting magnet 8B is accommodated in a second recess 3Q2 which is another of the recesses 3Q formed on the lower surface of the second side portion 3E2 of the intermediate member 3. Note that in the optical element driving device 100, the first attracting magnet 8A is accommodated in the first recess 2Q1 formed in the fourth corner portion 2C4 of the optical element holding member 2, and the second attracting magnet 8B is accommodated in the second recess 2Q2 formed in the third corner portion 2C3 of the optical element holding member 2, as shown in FIG.

[0098] Furthermore, the optical element driving device 100A has six magnetic attraction means MA (first magnetic attraction means MA1 to sixth magnetic attraction means MA6), which differs from the optical element driving device 100 having three magnetic attraction means MA (first magnetic attraction means MA1 to third magnetic attraction means MA3). Therefore, in the optical element driving device 100A, the magnetic member 13 includes a first magnetic member 13A to a third magnetic member 13C fixed to the base member 18, and a fourth magnetic member 13D to a sixth magnetic member 13F fixed to the optical element holding member 2.

[0099] Specifically, as shown in Fig. 12, the first magnetic attraction means MA1 is configured to exert a magnetic attraction force between the first attracting magnet 8A and the first magnetic member 13A, which are spaced apart from each other in the vertical direction. The second magnetic attraction means MA2 is configured to exert a magnetic attraction force between the second attracting magnet 8B and the second magnetic member 13B, which are spaced apart from each other in the vertical direction. The third magnetic attraction means MA3 is configured to exert a magnetic attraction force between the first driving magnet 5A and the third magnetic member 13C, which are spaced apart from each other in the vertical direction.

[0100] The fourth magnetic attraction means MA4 is configured to generate a magnetic attraction force between the first attracting magnet 8A, which are arranged at an interval from each other in the up-down direction, and a fourth magnetic member 13D (see the lower diagram in FIG. 13) provided on the lower surface of the optical element holder 2. The fourth magnetic member 13D is accommodated in a first recess 2U1 (see the upper diagram in FIG. 13), which is one of the recesses 2U formed on the lower surface of the second side portion 2E2 of the optical element holder 2.

[0101] The fifth magnetic attraction means MA5 is configured to generate a magnetic attraction force between the second attracting magnet 8B, which are arranged at an interval from each other in the up-down direction, and a fifth magnetic member 13E (see the lower diagram in FIG. 13) provided on the lower surface of the optical element holder 2. The fifth magnetic member 13E is housed in a second recess 2U2 (see the upper diagram in FIG. 13), which is another of the recesses 2U formed on the lower surface of the second side portion 2E2 of the optical element holder 2.

[0102] 12, the sixth magnetic attraction means MA6 is configured to generate a magnetic attraction force between the first driving magnet 5A, which are spaced apart from each other in the vertical direction, and a sixth magnetic member 13F provided on the upper surface of the optical element holder 2. The sixth magnetic member 13F is housed in a third recess 2U3 (see FIG. 12), which is yet another of the recesses 2U formed on the upper surface of the fourth side portion 2E4 of the optical element holder 2.

[0103] In the optical element driving device 100A, the first attracting magnet 8A in the initial state is arranged so as to overlap with the fourth magnetic member 13D in the up-down direction (Z-axis direction) but not overlap with the first magnetic member 13A as shown in Fig. 15. Similarly, the second attracting magnet 8B in the initial state is arranged so as to overlap with the fifth magnetic member 13E in the up-down direction (Z-axis direction) but not overlap with the second magnetic member 13B as shown in Fig. 15. The initial state of the optical element driving device 100A refers to the state of the optical element driving device 100A when no current is supplied to the coil 9.

[0104] Specifically, in the Y-axis direction, the first magnetic member 13A is positioned a predetermined distance on the Y1 side (left side) of the first attracting magnet 8A, and the second magnetic member 13B is positioned the same predetermined distance on the Y2 side (right side) of the second attracting magnet 8B in the Y-axis direction.

[0105] This arrangement has the effect of more reliably preventing the intermediate member 3 from tilting around the first lower ball 11A, compared to a case in which the first attracting magnet 8A in the initial state is arranged to overlap the first magnetic member 13A in the vertical direction (Z-axis direction) and the second attracting magnet 8B in the initial state is arranged to overlap the second magnetic member 13B in the vertical direction (Z-axis direction). This arrangement is because a force that attracts the intermediate member 3 and the base member 18 to each other can be applied at a position relatively far from the first lower ball 11A. However, the first attracting magnet 8A in the initial state may be arranged to overlap the first magnetic member 13A in the vertical direction (Z-axis direction), and the second attracting magnet 8B in the initial state may be arranged to overlap the second magnetic member 13B in the vertical direction (Z-axis direction).

[0106] In addition, in the optical element driving device 100A, the sixth magnetic member 13F is fixed to the upper surface of the optical element holding member 2, unlike the fourth magnetic member 13D and the fifth magnetic member 13E which are fixed to the lower surface of the optical element holding member 2. That is, in the optical element driving device 100A, the distance between the center of the fourth magnetic member 13D and the center of the first attracting magnet 8A in the Z-axis direction and the distance between the center of the fifth magnetic member 13E and the center of the second attracting magnet 8B in the Z-axis direction are the same, but these distances are smaller than the distance between the center of the sixth magnetic member 13F and the center of the first driving magnet 5A in the Z-axis direction. This is because the magnetic force of the first driving magnet 5A is greater than the magnetic forces of the first attracting magnet 8A and the second attracting magnet 8B. That is, by adjusting the magnitude of each distance, the magnetic attraction forces generated by the fourth magnetic attraction means MA4, the fifth magnetic attraction means MA5, and the sixth magnetic attraction means MA6 are made to be approximately the same.

[0107] Next, with reference to FIG. 16, the positional relationship between the driving magnet 5, the attracting magnet 8, the lower ball 11, and the upper ball 12 in the optical element driving device 100A will be described.

[0108] A first triangle TR11 indicated by a dashed line is a triangle formed by connecting the center of the first driving magnet 5A and the centers of the two attracting magnets 8 (the first attracting magnet 8A and the second attracting magnet 8B).

[0109] A second triangle TR12 indicated by a dashed line is a triangle formed by connecting the centers of the three upper balls 12 (the first upper ball 12A, the second upper ball 12B, and the third upper ball 12C).

[0110] In the illustrated example, the first upper ball 12A is located outside the first triangle TR11 and is arranged to face a first side TR11F which is one side of the first triangle TR11. The third upper ball 12C is located outside the first triangle TR11 and is arranged to face a second side TR11S which is the other side of the first triangle TR11. The second upper ball 12B is located on an extension of a virtual line TR11T connecting the center of the first attracting magnet 8A and the center of the second attracting magnet 8B, and is arranged to the side (right) of the attracting magnet 8 (second attracting magnet 8B).

[0111] A third triangle TR13 indicated by a dashed line is a triangle formed by connecting the centers of the three lower balls 11 (the first lower ball 11A, the second lower ball 11B, and the third lower ball 11C). The third triangle TR13 is oriented in a substantially opposite direction to the first triangle TR11.

[0112] In the illustrated example, the first lower ball 11A is disposed between the first attracting magnet 8A and the second attracting magnet 8B. The third lower ball 11C is disposed so as to be located outside the first triangle TR11 and to face the first side TR11F. The second lower ball 11B is disposed so as to be located outside the first triangle TR11 and to face the second side TR11S.

[0113] Point CG11 is the center of gravity of the first triangle TR11, point CG12 is the center of gravity of the second triangle TR12, and point CG13 is the center of gravity of the third triangle TR13. In the illustrated example, points CG11, CG12, and CG13 are all located within the area where the second triangle TR12 and the third triangle TR13 overlap. In Fig. 16, for clarity, a cross pattern is added to the area where the second triangle TR12 and the third triangle TR13 overlap.

[0114] With this arrangement, the intermediate member 3 is supported in a well-balanced manner on the base member 18 via the three lower balls 11 without rotating about the three axes, X-axis, Y-axis, and Z-axis, and without translating in the Y-axis and Z-axis directions, and able to translate in the X-axis direction. Also, the optical element holding member 2 is supported in a well-balanced manner on the intermediate member 3 via the three upper balls 12, without rotating about the three axes, X-axis, Y-axis, and Z-axis, and without translating in the X-axis and Z-axis directions, and able to translate in the Y-axis direction.

[0115] Next, with reference to Figs. 17 to 22, an optical element driving device 100B, which is yet another example of the optical element driving device 100, will be described. Fig. 17 is a perspective view of the optical element driving device 100B, and corresponds to Fig. 1. Fig. 18 is an exploded perspective view of the optical element driving device 100B, which is composed of a case 4 and a lower member LB, showing a state in which the case 4 is separated from the lower member LB, and corresponds to Fig. 2. Fig. 19 is an exploded perspective view of the lower member LB, showing a state in which the movable member MB is separated from the fixed member FB, and corresponds to Fig. 3. Fig. 20 is a bottom view of the optical element holding member 2 constituting the optical element driving device 100B, and corresponds to Fig. 4. Fig. 21 is a bottom view of the intermediate member 3 constituting the optical element driving device 100B, and corresponds to Fig. 5. Fig. 22 is a three-sided view (front view, top view, and right side view) of a magnetic system mounted on the optical element driving device 100B, and corresponds to Fig. 7.

[0116] Optical element driving device 100B differs from optical element driving device 100 in that metal member 7, attracting magnet 8, and magnetic member 13 are omitted, and magnetic member 14, insulating substrate 15, and magnetic member 16 are included instead.

[0117] Specifically, the magnetic member 14 and the magnetic member 16 are members constituting the magnetic attraction means MA, and are arranged away from the driving magnet 5 and the detection magnet 6, which are other members constituting the magnetic attraction means MA, so as to magnetically attract the driving magnet 5 and the detection magnet 6, respectively. In the illustrated example, the magnetic member 14 includes a first magnetic member 14A, a second magnetic member 14B, a third magnetic member 14C, and a fourth magnetic member 14D adhesively fixed to the upper surface of the optical element holding member 2. However, the second magnetic member 14B and the fourth magnetic member 14D do not constitute the magnetic attraction means MA. The magnetic member 16 is embedded in the base member 18 by insert molding so that the upper surface is exposed. In FIG. 19, a dot pattern is applied to the magnetic member 16 for clarity.

[0118] The insulating substrate 15 is a substrate on which a conductive pattern is formed. The insulating substrate 15 may be any of a flexible printed circuit board, a rigid printed circuit board, and a flexible rigid printed circuit board. In the illustrated example, the coil 9 and the magnetic sensor 10 are mounted on the insulating substrate 15.

[0119] In addition, the optical element driving device 100B differs from the optical element driving device 100 in which the first detection magnet 6A and the second detection magnet 6B are provided on the optical element holding member 2, in that the first detection magnet 6A is provided on the intermediate member 3 and the second detection magnet 6B is provided on the optical element holding member 2.

[0120] Specifically, in the optical element driving device 100B, as shown in Fig. 20, the second detection magnet 6B is accommodated in a recess 2P formed in the lower surface of the first side portion 2E1 of the optical element holding member 2, and as shown in Fig. 21, the first detection magnet 6A is accommodated in a recess 3P formed in the lower surface of the second side portion 3E2 of the intermediate member 3. Note that, in the optical element driving device 100, as shown in Fig. 4, the first detection magnet 6A is accommodated in a first recess 2P1 formed in the first corner portion 2C1 of the optical element holding member 2, and the second detection magnet 6B is accommodated in a second recess 2P2 formed in the second corner portion 2C2 of the optical element holding member 2.

[0121] Furthermore, optical element driving device 100B differs from optical element driving device 100 having three magnetic attraction means MA (first magnetic attraction means MA1 to third magnetic attraction means MA3) in that optical element driving device 100B has six magnetic attraction means MA (first magnetic attraction means MA1 to sixth magnetic attraction means MA6).

[0122] Specifically, as shown in FIG. 19, the first magnetic attraction means MA1 is configured to apply a magnetic attraction force between the first driving magnet 5A and the magnetic member 16, which are spaced apart from each other in the vertical direction. The second magnetic attraction means MA2 is configured to apply a magnetic attraction force between the second detection magnet 6B and the magnetic member 16, which are spaced apart from each other in the vertical direction. The third magnetic attraction means MA3 is configured to apply a magnetic attraction force between the first detection magnet 6A and the magnetic member 16, which are spaced apart from each other in the vertical direction. The fourth magnetic attraction means MA4 is configured to apply a magnetic attraction force between the second driving magnet 5B and the magnetic member 16, which are spaced apart from each other in the vertical direction. The fifth magnetic attraction means MA5 is configured to apply a magnetic attraction force between the first driving magnet 5A, which are spaced apart from each other in the vertical direction, and the first magnetic member 14A provided on the upper surface of the optical element holding member 2. The sixth magnetic attraction means MA6 is configured to exert a magnetic attraction force between the first detection magnet 6A, which is arranged at a distance from each other in the vertical direction, and the third magnetic member 14C, which is provided on the upper surface of the optical element holding member 2.

[0123] In addition, optical element driving device 100B differs from optical element driving device 100 which includes three lower balls 11 and three upper balls 12 in that optical element driving device 100B includes four lower balls 11 (first lower ball 11A to fourth lower ball 11D) and four upper balls 12 (first upper ball 12A to fourth upper ball 12D).

[0124] Specifically, as shown in FIG. 19, the lower portions of the first lower ball 11A to the fourth lower ball 11D are respectively accommodated in the first recess 18S1 to the fourth recess 18S4 formed in the upper surface of the base member 18, and the upper portions of the first lower ball 11A to the fourth lower ball 11D are respectively accommodated in the first recess 3S1 to the fourth recess 3S4 (see the upper diagram in FIG. 21) formed in the lower surface of the intermediate member 3.

[0125] As shown in FIG. 19, the lower portions of the first upper ball 12A to the fourth upper ball 12D are respectively accommodated in the first recess 3T1 to the fourth recess 3T4 formed on the upper surface of the intermediate member 3, and the upper portions of the first upper ball 12A to the fourth upper ball 12D are respectively accommodated in the first recess 2S1 to the fourth recess 2S4 (see the upper diagram in FIG. 20) formed on the lower surface of the optical element holding member 2.

[0126] In the optical element driving device 100B, the intermediate member 3 is configured to have a U-shape in a plan view as shown in Fig. 21. Specifically, the intermediate member 3 has three sides 3E (a first side 3E1, a second side 3E2, and a fourth side 3E4), and the side on the Y1 side is cut out to form a space SP. For clarity, Fig. 21 shows the space SP with a dashed line.

[0127] In the space SP, a second drive magnet 5B fixed to the third side portion 2E3 of the optical element holding member 2 is disposed, as shown in FIGS.

[0128] As described above, the optical element driving device 100 according to an embodiment of the present invention includes, as shown in Figures 2 and 3, a fixed side member FB including a support member (base member 18), an optical element holding member 2 having a through hole 2K penetrating in the vertical direction in which an optical element OE can be arranged, an intermediate member 3 provided between the support member (base member 18) and the optical element holding member 2 in the vertical direction (Z-axis direction) and movable in a first direction (X-axis direction) perpendicular to the vertical direction (Z-axis direction) relative to the support member (base member 18), at least three lower balls 11 arranged between the support member (base member 18) and the intermediate member 3, at least three upper balls 12 arranged between the intermediate member 3 and the optical element holding member 2, a first driving means DM1 for moving the intermediate member 3 in the first direction (X-axis direction) relative to the support member (base member 18), and a second driving means DM2 for moving the optical element holding member 2 in a second direction (Y-axis direction) perpendicular to the vertical direction (Z-axis direction) and perpendicular to the first direction (X-axis direction) relative to the intermediate member 3. In the optical element driving device 100, the optical element holding member 2 is configured to be movable along a plane (XY plane) perpendicular to the vertical direction (Z-axis direction) with respect to the support member (base member 18). The first driving means DM1 has a first driving magnet 5A provided on the intermediate member 3 and a first coil 9A provided on the support member (base member 18) so as to face the first driving magnet 5A in the vertical direction (Z-axis direction), and the second driving means DM2 has a second driving magnet 5B provided on the optical element holding member 2 and a second coil 9B provided on the support member (base member 18) so as to face the second driving magnet 5B in the vertical direction (Z-axis direction). The support member may be a case 4. In this case, the upper ball is replaced with the lower ball, and the lower ball is replaced with the upper ball.

[0129] In this configuration, the first drive magnet 5A is provided on the intermediate member 3. Therefore, even if the optical element holding member 2 moves in the second direction (Y-axis direction), the relative positional relationship between the first drive magnet 5A and the first coil 9A does not change. Therefore, this configuration can suppress a decrease in the drive efficiency of the first drive means DM1. In addition, in this configuration, when the intermediate member 3 moves in the first direction (X-axis direction), the relative positional relationship between the second drive magnet 5B and the second coil 9B changes. However, the effect of this change on the second drive means DM2 is smaller than the effect of this change on the first drive means DM1 when the relative positional relationship between the first drive magnet 5A and the first coil 9A changes due to the optical element holding member 2 moving in the second direction (Y-axis direction). This is because the first drive means DM1 moves both the intermediate member 3 and the optical element holding member 2, while the second drive means DM2 is a drive means that moves only the optical element holding member 2. Furthermore, in this configuration, the drive magnet 5 and the coil 9 face each other in the vertical direction (Z-axis direction). Therefore, this configuration can reduce the size of the optical element driving device 100 in a plan view.

[0130] Also, the intermediate member 3 may have a recess 3R as a first storage part with the side (lower side) of the support member (base member 18) open, as shown in the upper diagram of FIG. 5. In this case, the first drive magnet 5A is disposed in the recess 3R and fixed to the intermediate member 3, as shown in the lower diagram of FIG. 5. Also, the optical element holding member 2 may have a recess 2R as a second storage part with the side (lower side) of the support member (base member 18) open, as shown in the upper diagram of FIG. 4. In this case, the second drive magnet 5B is disposed in the recess 2R and fixed to the optical element holding member 2, as shown in the lower diagram of FIG. 4. Note that each of the recesses 2R and 3R that open downward may open to the lateral side (radial outer side) in addition to the downward side.

[0131] This configuration brings about the effect that the first drive magnet 5A and the second drive magnet 5B are each securely held.

[0132] The first drive magnet 5A and the second drive magnet 5B may be arranged so as to be at least partially at the same position in the vertical direction (Z-axis direction). That is, the first drive magnet 5A and the second drive magnet 5B may be arranged so as to overlap by a distance DX in the vertical direction (Z-axis direction) as shown in the front view and right side view of FIG. 7. In this case, the first coil 9A and the second coil 9B may also be arranged so as to be at least partially at the same position in the vertical direction (Z-axis direction). That is, the first coil 9A and the second coil 9B may also be arranged so as to overlap by a predetermined distance in the vertical direction (Z-axis direction) as shown in the front view and right side view of FIG. 7.

[0133] This configuration has the effect of reducing the vertical dimension of the optical element driving device 100.

[0134] 3, the optical element driving device 100 may include a magnetic attraction means MA that generates a force that attracts the optical element holding member 2 and the support member (base member 18) to each other in the up-down direction (Z-axis direction). In this case, the magnetic attraction means MA may have a second driving magnet 5B provided on the optical element holding member 2, an attraction magnet 8 provided on the optical element holding member 2, and a magnetic member 13 provided on the support member (base member 18). The magnetic member 13 may be provided on the support member (base member 18) such that an attraction force acts between the magnetic member 13 and each of the second driving magnet 5B and the attraction magnet 8.

[0135] This configuration has the advantage that the lower ball 11 can be clamped between the intermediate member 3 and the base member 18 by magnetic force, and the upper ball 12 can be clamped between the optical element holding member 2 and the intermediate member 3 by magnetic force, without using a biasing member such as a leaf spring or a coil spring.

[0136] 9, the optical element driving device 100 may include three upper balls 12. In this case, one of the three upper balls 12 (first upper ball 12A) may be disposed so as to be located between two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B). Another one of the three upper balls 12 (second upper ball 12B) may be disposed so as to be located outside a first triangle TR1 formed by connecting the center of the second driving magnet 5B and the centers of the two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B) in a plan view along the up-down direction (Z-axis direction) and to face a first side TR1F of the first triangle TR1 connecting the center of the second driving magnet 5B and the center of one of the two attracting magnets 8 (second attracting magnet 8B). Furthermore, the remaining one of the three upper balls 12 (third upper ball 12C) may be located outside the first triangle TR1 when viewed in a plane along the vertical direction (X-axis direction) and may be arranged so as to face the second side TR1S of the first triangle TR1 connecting the center of the second driving magnet 5B and the center of the other of the two attracting magnets 8 (first attracting magnet 8A).

[0137] This configuration brings about the effect that the upper ball 12 can be stably sandwiched between the optical element holding member 2 and the intermediate member 3 by the three magnets (the second driving magnet 5B, the first attracting magnet 8A, and the second attracting magnet 8B). This is because the first triangle TR1 and the second triangle TR2 formed by connecting the centers of the three upper balls 12 (the first upper ball 12A, the second upper ball 12B, and the third upper ball 12C) are oriented in approximately opposite directions.

[0138] 9, the optical element driving device 100 may include three lower balls 11. In this case, one of the three lower balls 11 (third lower ball 11C) may be disposed between two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B). Another of the three lower balls 11 (first lower ball 11A) may be disposed so as to be located outside the first triangle TR1 and face the first side TR1F in a plan view along the vertical direction. The remaining one of the three lower balls 11 (second lower ball 11B) may be disposed so as to be located outside the first triangle TR1 and face the second side TR1S in a plan view along the vertical direction.

[0139] This configuration brings about the effect that the lower ball 11 can be stably sandwiched between the intermediate member 3 and the base member 18 by the three magnets (the second driving magnet 5B, the first attracting magnet 8A, and the second attracting magnet 8B). This is because the three lower balls 11 (the first lower ball 11A, the second lower ball 11B, and the third lower ball 11C) that are spaced apart and distributed are sandwiched between the intermediate member 3 and the base member 18 by the three magnets that are spaced apart and distributed.

[0140] 9, the optical element driving device 100 may include three lower balls 11 and three upper balls 12. In this case, the optical element driving device 100 may be configured such that the center of gravity (point CG1) of a first triangle TR1 formed by connecting the center of the second driving magnet 5B and the centers of the two attracting magnets 8 (the first attracting magnet 8A and the second attracting magnet 8B), the center of gravity (point CG2) of a second triangle TR2 formed by connecting the centers of the three upper balls 12, and the center of gravity (point CG3) of a third triangle TR3 formed by connecting the centers of the three lower balls 11 are located within an area (area with a cross pattern) where the first triangle TR1, the second triangle TR2, and the third triangle TR3 overlap in a plan view along the up-down direction (Z-axis direction).

[0141] This configuration has the effect of allowing the lower ball 11 and the upper ball 12 to be more stably clamped between the optical element holding member 2 and the base member 18 by three magnets (second driving magnet 5B, first attracting magnet 8A, and second attracting magnet 8B).

[0142] In addition, the optical element driving device 100 may be configured so that the three lower balls 11 and the three upper balls 12 are positioned at different positions from each other when viewed in a plan view from the vertical direction (Z-axis direction), as shown in Figure 9.

[0143] In this configuration, the lower ball 11 and the upper ball 12 do not overlap in the vertical direction (Z-axis direction), which brings about the effect that the dimension of the optical element driving device 100 in the vertical direction (Z-axis direction) can be reduced.

[0144] 4, the optical element holding member 2 may be formed in a frame shape having a first side portion 2E1, a second side portion 2E2, a third side portion 2E3, and a fourth side portion 2E4. In this case, the third side portion 2E3 may be disposed so as to face the first side portion 2E1 across the through hole 2K, and a second driving magnet 5B extending in the first direction (X-axis direction) may be disposed on the first side portion 2E1. Also, one of the two attracting magnets 8 (first attracting magnet 8A) may be disposed on one end portion (fourth corner portion 2C4) of the third side portion 2E3, and the other of the two attracting magnets 8 (second attracting magnet 8B) may be disposed on the other end portion (third corner portion 2C3) of the third side portion 2E3. Also, a first detection magnet 6A may be arranged at one end (first corner 2C1) of the first side 2E1, and a second detection magnet 6B may be arranged at the other end (second corner 2C2) of the first side 2E1. Also, as shown in Fig. 3, a first magnetic sensor 10A may be provided on a support member (base member 18) facing the first detection magnet 6A in the vertical direction (Z-axis direction), and a second magnetic sensor 10B may be provided on a support member (base member 18) facing the second detection magnet 6B in the vertical direction (Z-axis direction).

[0145] This configuration brings about the effect of enabling a plurality of magnets (second driving magnet 5B, first detection magnet 6A, second detection magnet 6B, first attracting magnet 8A, and second attracting magnet 8B) to be arranged in a well-balanced manner.

[0146] 3, the optical element driving device 100 may include magnetic attraction means MA that generates a force that attracts the intermediate member 3 and the optical element holding member 2 to each other with the upper ball 12 sandwiched therebetween. In this case, the magnetic attraction means MA may include an attraction magnet 8 provided on the optical element holding member 2. In addition, the optical element driving device 100A may include magnetic attraction means MA that generates a force that attracts the intermediate member 3 and the optical element holding member 2 to each other with the upper ball 12 sandwiched therebetween, as shown in FIG. 12, the optical element driving device 100A may include magnetic attraction means MA that generates a force that attracts the intermediate member 3 and the optical element holding member 2 to each other with the upper ball 12 sandwiched therebetween. In this case, the magnetic attraction means MA may include an attraction magnet 8 provided on the intermediate member 3.

[0147] This configuration brings about the effect that the upper ball 12 can be sandwiched between the optical element holding member 2 and the intermediate member 3 by magnetic force, without using a biasing member such as a leaf spring or a coil spring.

[0148] 4 or 13, the optical element holding member 2 may be formed in a frame shape having a first side 2E1 and a third side 2E3 facing each other across the through hole 2K, and a second side 2E2 and a fourth side 2E4 facing each other across the through hole 2K in a direction (X-axis direction) intersecting with a direction (Y-axis direction) in which the first side 2E1 and the third side 2E3 face each other. In this case, a width dimension W3 of the third side 2E3 in a direction (Y-axis direction) perpendicular to the direction in which the third side 2E3 extends (X-axis direction) may be smaller than any of the width dimension W1 of the first side 2E1, the width dimension W2 of the second side 2E2, and the width dimension W4 of the fourth side 2E4. 5 or 14, the intermediate member 3 may have a first side portion 3E1, a second side portion 3E2, and a fourth side portion 3E4 that face the first side portion 2E1, the second side portion 2E2, and the fourth side portion 2E4 of the optical element holding member 2, respectively, in the up-down direction (Z-axis direction). In the optical element driving device 100, the attraction magnet 8 may be provided on the second side portion 2E2 and the fourth side portion 2E4 of the optical element holding member 2, as shown in FIG. 4. In the optical element driving device 100, the attraction magnet 8 may be provided on either the second side portion 2E2 or the fourth side portion 2E4 of the optical element holding member 2. For example, when the first direction in which the intermediate member 3 moves is defined as the Y-axis direction and the second direction in which the optical element holding member 2 moves is defined as the X-axis direction, the first driving magnet 5A may be disposed on the first side 3E1 of the intermediate member 3, and the second driving magnet 5B may be disposed on the fourth side 2E4 of the optical element holding member 2. In this case, the attracting magnet 8 is provided on the second side 2E2 of the optical element holding member 2. The optical element driving device 100 may be configured such that a magnetic attraction force is generated between the attracting magnet 8 and a magnetic member provided on the intermediate member 3 or the base member 18. In the optical element driving device 100A, the attracting magnet 8 may be provided on the second side 3E2 of the intermediate member 3 as shown in FIG. 14. In the optical element driving device 100A, the attracting magnet 8 may be provided on the second side 3E2 and the fourth side 3E4 of the intermediate member 3.For example, the first direction in which the intermediate member 3 moves may be defined as the Y-axis direction, and the first drive magnet 5A may be disposed on the first side 3E1 of the intermediate member 3, and the second direction in which the optical element holding member 2 moves may be defined as the X-axis direction, and the second drive magnet 5B may be disposed on the fourth side 2E4 of the optical element holding member 2. In this case, the attraction magnet 8 may be provided on each of the second side 3E2 and the fourth side 3E4 of the intermediate member 3. Also, in the optical element driving device 100A, the attraction magnet 8 may be provided on at least one of the second side 2E2 and the fourth side 2E4 of the optical element holding member 2. In this case, it is preferable that the second drive magnet 5B also constitutes the magnetic attraction means.

[0149] This configuration has the advantage that, since the width dimension of the third side portion 2E3 of the optical element holding member 2 is small, the distance between the optical element OE driven by the optical element driving device 100, 100A and another device arranged adjacent to the Y2 side (right side) of the optical element driving device 100, 100A can be reduced.

[0150] In the optical element driving device 100A, as shown in FIG. 13, the upper balls 12 are disposed on the first side 2E1, the second side 2E2, and the fourth side 2E4 of the optical element holding member 2. The second driving magnet 5B is provided on a side (first side 2E1) different from the third side 2E3 of the optical element holding member 2. The members (fourth magnetic member 13D to sixth magnetic member 13F) constituting the magnetic attraction means MA are provided on sides (second side 2E2 and fourth side 2E4) different from the third side 2E3 of the optical element holding member 2. In addition, the detection magnet 6, which is a member constituting the position detection means PD, is also provided on a side (first side 2E1) different from the third side 2E3 of the optical element holding member 2. That is, in the optical element driving device 100A, nothing, including the upper ball 12, is arranged on the third side portion 2E3 of the optical element holding member 2, at least in the portion corresponding to the formation area of ​​the through hole 2K in the X-axis direction (portion LX in the lower diagram of Figure 13).

[0151] This configuration allows the width dimension W3 of the third side portion 2E3 of the optical element holding member 2 to be further reduced, thereby having the effect of further reducing the distance between the optical element OE driven by the optical element driving device 100A and another device arranged adjacent to the Y2 side (right side) of the optical element driving device 100A.

[0152] 14, in the optical element driving device 100A, two attracting magnets 8 (a first attracting magnet 8A and a second attracting magnet 8B) may be fixed in a spaced-apart state to the second side 3E2 of the intermediate member 3, and a first driving magnet 5A may be fixed to the fourth side 3E4 of the intermediate member 3. In this case, the magnetic attraction means MA may be configured to include two attracting magnets 8 (the first attracting magnet 8A and the second attracting magnet 8B), the first driving magnet 5A, and the magnetic member 13 (the first magnetic member 13A to the sixth magnetic member 13F), as shown in FIG. The magnetic members 13 (fourth magnetic member 13D to sixth magnetic member 13F) may be fixed to the optical element holding member 2 such that an attractive force acts between each of the two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B) and the first driving magnet 5A and the magnetic members 13 (fourth magnetic member 13D to sixth magnetic member 13F) in the up-down direction (Z-axis direction). The three magnetic members 13 (fourth magnetic member 13D to sixth magnetic member 13F) may be composed of one or two magnetic members. For example, the fourth magnetic member 13D and the fifth magnetic member 13E may be integrated into one magnetic member.

[0153] This configuration brings about the effect that the upper ball 12 can be more stably sandwiched between the optical element holding member 2 and the intermediate member 3 by the magnetic forces generated at three points.

[0154] 14, in the optical element driving device 100A, two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B) may be fixed to the intermediate member 3 in a spaced apart state, and the first driving magnet 5A may be fixed at a position spaced apart from the two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B). In this case, the magnetic attraction means MA (fourth magnetic attraction means MA4 to sixth magnetic attraction means MA6) may be configured to include two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B), the first driving magnet 5A, and the magnetic member 13 (fourth magnetic member 13D to sixth magnetic member 13F), as shown in FIG. The magnetic members 13 (fourth magnetic member 13D to sixth magnetic member 13F) may be fixed to the optical element holding member 2 such that an attractive force acts between each of the two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B) and the first driving magnet 5A and the magnetic members 13 (fourth magnetic member 13D to sixth magnetic member 13F) in the up-down direction (Z-axis direction). The optical element driving device 100A may also include other magnetic attraction means MA (first magnetic attraction means MA1 to third magnetic attraction means MA3) that generate a force that attracts the intermediate member 3 and the support member (base member 18) to each other with the lower ball 11 in between. In this case, the other magnetic attraction means MA (first magnetic attraction means MA1 to third magnetic attraction means MA3) may be configured to include two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B), a first driving magnet 5A, and another magnetic member 13 (first magnetic member 13A to third magnetic member 13C) as shown in Fig. 12. The other magnetic member 13 (first magnetic member 13A to third magnetic member 13C) may be fixed to a support member (base member 18) so that an attractive force acts between each of the two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B) and the first driving magnet 5A and the other magnetic member 13 (first magnetic member 13A to third magnetic member 13C) in the up-down direction (Z-axis direction).

[0155] This configuration brings about an effect that the lower ball 11 can be sandwiched between the intermediate member 3 and the base member 18 by another magnetic attraction means MA (first magnetic attraction means MA1 to third magnetic attraction means MA3) without using a biasing member such as a leaf spring or a coil spring. In addition, this configuration brings about an effect that the lower ball 11 can be stably sandwiched between the intermediate member 3 and the base member 18 by the magnetic forces generated by each of the three magnets (first driving magnet 5A, first attraction magnet 8A, and second attraction magnet 8B), and the upper ball 12 can be stably sandwiched between the optical element holding member 2 and the intermediate member 3. In addition, in this configuration, each of the three magnets (first driving magnet 5A, first attraction magnet 8A, and second attraction magnet 8B) is shared by the magnetic attraction means MA (fourth magnetic attraction means MA4 to sixth magnetic attraction means MA6) and another magnetic attraction means MA (first magnetic attraction means MA1 to third magnetic attraction means MA3). Therefore, this configuration has the effect of reducing the number of parts.

[0156] Also, the optical element driving device 100A may include three lower balls 11 (first lower ball 11A to third lower ball 11C) as shown in FIG. 16. In this case, one of the three lower balls 11 (first lower ball 11A) may be disposed between two attracting magnets 8 (first attracting magnet 8A and second attracting magnet 8B). Another one of the three lower balls 11 (third lower ball 11C) may be disposed so as to face one end (end on the Y1 side) of the first driving magnet 5A extending in the second direction (Y axis direction) in a plan view along the up-down direction (Z axis direction). The remaining one of the three lower balls 11 (second lower ball 11B) may be disposed so as to face the other end (end on the Y2 side) of the first driving magnet 5A extending in the second direction (Y axis direction) in a plan view along the up-down direction (Z axis direction).

[0157] This configuration brings about the effect that the lower ball 11 can be stably sandwiched between the intermediate member 3 and the base member 18 by the three magnets (first driving magnet 5A, first attracting magnet 8A, and second attracting magnet 8B). This is because the first triangle TR11 formed by connecting the centers of the three magnets (first driving magnet 5A, first attracting magnet 8A, and second attracting magnet 8B) and the third triangle TR13 formed by connecting the centers of the three lower balls 11 (first lower ball 11A, second lower ball 11B, and third lower ball 11C) are oriented in substantially opposite directions.

[0158] 16, the optical element driving device 100A may include three upper balls 12. In this case, one of the three upper balls 12 (the second upper ball 12B) may be located on an extension of a virtual line TR11T connecting the centers of the two attracting magnets 8 (the first attracting magnet 8A and the second attracting magnet 8B) in a plan view along the up-down direction (Z-axis direction), and may be disposed to the side (right side) of the attracting magnet 8 (the second attracting magnet 8B). Another one (first upper ball 12A) of the three upper balls 12 may be located outside the first triangle TR11, which is a triangle formed by connecting the center of the first driving magnet 5A and the center of each of the two attracting magnets 8 (the first attracting magnet 8A and the second attracting magnet 8B), in a plan view along the vertical direction (Z-axis direction), and may be arranged to face a first side TR11F, which is one side of the first triangle TR11 connecting the center of the first driving magnet 5A and the center of one of the two attracting magnets 8 (the first attracting magnet 8A). Another remaining one (third upper ball 12C) of the three upper balls 12 may be located outside the first triangle TR11 in a plan view along the vertical direction (Z-axis direction), and may be arranged to face a second side TR11S, which is the other side of the first triangle TR11 connecting the center of the first driving magnet 5A and the center of the other of the two attracting magnets 8 (the second attracting magnet 8B).

[0159] This configuration brings about the effect that the upper ball 12 can be stably sandwiched between the optical element holding member 2 and the intermediate member 3 by the three magnets (the first driving magnet 5A, the first attracting magnet 8A, and the second attracting magnet 8B). This is because the three upper balls 12 (the first upper ball 12A, the second upper ball 12B, and the third upper ball 12C) arranged in a spaced-apart relationship are sandwiched between the optical element holding member 2 and the intermediate member 3 by the three magnets arranged in a spaced-apart relationship.

[0160] 16, the optical element driving device 100A may include three lower balls 11 and three upper balls 12. In this case, the optical element driving device 100A may be configured such that the center of gravity (point CG11) of a first triangle TR11 formed by connecting the center of the first driving magnet 5A and the centers of the two attracting magnets 8 (the first attracting magnet 8A and the second attracting magnet 8B), the center of gravity (point CG12) of a second triangle TR12 formed by connecting the centers of the three upper balls 12, and the center of gravity (point CG13) of a third triangle TR13 formed by connecting the centers of the three lower balls 11 are located within an area (area with a cross pattern) where the second triangle TR12 and the third triangle TR13 overlap in a plan view along the up-down direction (Z-axis direction).

[0161] This configuration has the effect of providing well-balanced support for the intermediate member 3 so that it can move parallel to the X-axis direction on the base member 18, and also providing well-balanced support for the optical element holding member 2 so that it can move parallel to the Y-axis direction on the intermediate member, by means of the appropriately distributed lower balls 11 and upper balls 12.

[0162] Also, the optical element driving device 100 may include three lower balls 11 and three upper balls 12, as shown in Fig. 3. In this case, the base member 18 as a support member may have three recesses 18S as lower upward recesses with an open upper side where the lower balls 11 are arranged. Also, the intermediate member 3 may have recesses 3S (see the upper diagram of Fig. 5) as three lower downward recesses with an open lower side where the lower balls 11 are arranged, and recesses 3T as three upper upward recesses with an open upper side where the upper balls 12 are arranged. Also, the optical element holding member 2 may have recesses 2S (see the upper diagram of Fig. 4) as three upper downward recesses with an open lower side where the upper balls 12 are arranged.

[0163] One of the three recesses 18S (first recess 18S1) and one of the three recesses 3S (first recess 3S1) may be arranged to face each other with one of the three lower balls 11 (first lower ball 11A) in between.

[0164] In addition, another one of the three recesses 18S (second recess 18S2) and another one of the three recesses 3S (second recess 3S2) may be arranged to face each other across another one of the three lower balls 11 (second lower ball 11B).

[0165] In addition, one of the three recesses 18S (first recess 18S1), one of the three recesses 3S (first recess 3S1), another one of the three recesses 18S (second recess 18S2), and another one of the three recesses 3S (second recess 3S2) may form a lower ball guide structure that guides the lower ball 11 so that the intermediate member 3 is movable in the first direction (X-axis direction) relative to the base member 18.

[0166] Furthermore, the remaining one of the three recesses 18S (third recess 18S3) and the remaining one of the three recesses 3S (third recess 3S3) may be disposed to face each other across the remaining one of the three lower balls 11 (third lower ball 11C). Each of the third recess 3S3 and the third recess 18S3 may be configured so that the size in plan view (width D1 and width D2) is larger than the diameter D3 of the lower ball 11 (third lower ball 11C), as shown in the upper left diagram of FIG.

[0167] This configuration provides the effect that the intermediate member 3 can be moved linearly relative to the base member 18 in the first direction (X-axis direction).

[0168] Furthermore, one of the three recesses 3T (first recess 3T1) and one of the three recesses 2S (first recess 2S1) may be arranged to face each other across one of the three upper balls 12 (first upper ball 12A).

[0169] In addition, another one of the three recesses 3T (the second recess 3T2) and another one of the three recesses 2S (the second recess 2S2) may be arranged to face each other across another one of the three upper balls 12 (the second upper ball 12B).

[0170] In addition, one of the three recesses 3T (first recess 3T1), one of the three recesses 2S (first recess 2S1), another one of the three recesses 3T (second recess 3T2), and another one of the three recesses 2S (second recess 2S2) may form an upper ball guide structure that guides the upper ball 12 so that the optical element holding member 2 is movable in the second direction (Y-axis direction) relative to the intermediate member 3.

[0171] Furthermore, the remaining one of the three recesses 3T (the third recess 3T3) and the remaining one of the three recesses 2S (the third recess 2S3) may be disposed to face each other across the remaining one of the three upper balls 12 (the third upper ball 12C). Each of the third recess 3T3 and the third recess 2S3 may be configured so that the size in plan view (width D21 and width D22) is larger than the diameter D23 of the upper ball 12 (the third upper ball 12C), as shown in the lower left diagram of FIG.

[0172] This configuration brings about the effect that the optical element holding member 2 can be moved linearly relative to the intermediate member 3 in the second direction (Y-axis direction).

[0173] In the optical element driving device 100B, the optical element holding member 2 may be formed in a frame shape having a first side portion 2E1 and a third side portion 2E3 facing each other across the through hole 2K, and a second side portion 2E2 and a fourth side portion 2E4 facing each other across the through hole 2K in a direction (X-axis direction) intersecting with a direction (Y-axis direction) in which the first side portion 2E1 and the third side portion 2E3 face each other. In addition, the intermediate member 3 may have a first side portion 3E1, a second side portion 3E2, and a fourth side portion 3E4 facing the first side portion 2E1, the second side portion 2E2, and the fourth side portion 2E4 of the optical element holding member 2, respectively, in the up-down direction (Z-axis direction), and may have a substantially U-shape with a portion facing the third side portion 2E3 of the optical element holding member 2 cut out, as shown in FIG. The second drive magnet 5B fixed to the optical element holding member 2 may be disposed in the cut-out portion (space SP) of the intermediate member 3, as shown in FIGS.

[0174] This configuration brings about the effect of reducing the size of the optical element driving device 100B in a plan view. Specifically, this configuration brings about the effect of reducing the width dimension of the optical element driving device 100B in the Y-axis direction.

[0175] In the optical element driving device 100, the fixed member FB may have a case 4 as a metal cover member constituting a housing HS together with the base member 18, as shown in FIG. 1. In this case, the intermediate member 3 and the optical element holding member 2 may be housed in the housing HS. In addition, the optical element holding member 2 may be larger than the intermediate member 3 in a plan view, as shown in FIG. 3. In addition, the optical element holding member 2 may have a first contact portion ST1 on its outer circumferential surface, which can contact the inner side surface of the case 4 when the optical element holding member 2 moves in the first direction (X-axis direction), and a second contact portion ST2 on its outer circumferential surface, which can contact the inner side surface of the case 4 when the optical element holding member 2 moves in the second direction (Y-axis direction), as shown in FIG. 3, to limit the movement range of the optical element holding member 2. The same applies to the optical element driving device 100A and the optical element driving device 100B.

[0176] Specifically, the abutment portion ST constituting a structure for limiting the movement range of the optical element holding member 2 includes a first abutment portion ST1 and a second abutment portion ST2, as shown in Fig. 4. The first abutment portion ST1 includes a first right front abutment portion ST11 and a first left front abutment portion ST12 formed on a side surface on the front side (X1 side) of the optical element holding member 2, and a first left rear abutment portion ST13 and a first right rear abutment portion ST14 formed on a side surface on the rear side (X2 side) of the optical element holding member 2. The second abutment portion ST2 includes a second left front abutment portion ST21 and a second left rear abutment portion ST22 formed on a side surface on the left side (Y1 side) of the optical element holding member 2, and a second right rear abutment portion ST23 and a second right front abutment portion ST24 formed on a side surface on the right side (Y2 side) of the optical element holding member 2.

[0177] This configuration provides the effect of being able to restrict the movement range of the optical element holding member 2 with a simple configuration. In other words, this configuration provides the effect of being able to realize a stopper mechanism for the optical element holding member 2 with a simple configuration. In addition, this configuration provides the effect of making it easier to improve the dimensional accuracy of the stopper mechanism compared to a configuration in which some of the multiple abutment portions ST are provided on the intermediate member 3. This is because the dimensional accuracy of the stopper mechanism can be improved simply by improving the dimensional accuracy of the optical element holding member 2.

[0178] The preferred embodiments of the present invention have been described above in detail. However, the present invention is not limited to the above-described embodiments. Various modifications and substitutions may be applied to the above-described embodiments without departing from the scope of the present invention. Furthermore, each of the features described with reference to the above-described embodiments may be appropriately combined as long as there is no technical contradiction.

[0179] For example, in the above embodiment, the first driving means DM1 is composed of one first driving magnet 5A and one first coil 9A, but it may be composed of a pair of first driving magnets 5A and a pair of first coils 9A spaced apart in the X-axis direction. The same applies to the second driving means DM2.

[0180] Furthermore, in optical element driving device 100A, intermediate member 3 is a rectangular ring-shaped member having four sides (first side 3E1 to fourth side 3E4) as shown in FIG. 14, but may also be an approximately U-shaped member (see FIG. 21) that does not have one side (third side 3E3) like optical element driving device 100B.

[0181] This application claims priority based on Japanese Patent Application No. 2021-203681, filed on December 15, 2021, the entire contents of which are incorporated by reference into this application. [Explanation of symbols]

[0182] 2 optical element holding member 2C corner 2C1 first corner 2C2 second corner 2C3 third corner 2C4 fourth corner 2E side 2E1 first side 2E2 second side 2E3 third side 2E4 fourth side 2K through hole 2P recess 2P1 first recess 2P2 second recess 2Q recess 2Q1 first recess 2Q2 second recess 2R recess 2S recess 2S1 first recess 2S2 second recess 2S3 third recess 2S4 fourth recess 2U recess 2U1 first recess 2U2...second recess 2U3...third recess 3...intermediate member 3E...side 3E1...first side 3E2...second side 3E3...third side 3E4...fourth side 3K...through hole 3P...recess 3Q...recess 3Q1...first recess 3Q2...second recess 3R...recess 3S...recess 3S1...first recess 3S2...second recess 3S3...third recess 3S4...fourth recess 3T...recess 3T1...first recess 3T2...second recess 3T3...third recess 3T4...fourth recess 4...case 4A...peripheral wall 4A1...First side plate portion 4A2...Second side plate portion 4A3...Third side plate portion 4A4...Fourth side plate portion 4B...Top plate portion 4K...Through hole 4S...Storage portion 5...Driving magnet 5A...First driving magnet 5B...Second driving magnet 6...Detecting magnet 6A...First detecting magnet 6B...Second detecting magnet 7...Metal member 7A...First metal member 7B...Second metal member 7C...Third metal member 7D...Fourth metal member 7E...Fifth metal member 7F...Sixth metal member 7G...Seventh metal member 7H...Eighth metal member 7I...Ninth metal member 7J...Tenth metal member 7K 11th metallic member 7L 12th metallic member 8 Attracting magnet 8A First attracting magnet 8B Second attracting magnet 9 Coil 9A First coil 9B Second coil 10 Magnetic sensor 10A First magnetic sensor 10B Second magnetic sensor 11 Lower ball 11A First lower ball 11B Second lower ball 11C Third lower ball 11D Fourth lower ball12...Upper ball 12A...First upper ball 12B...Second upper ball 12C...Third upper ball 12D...Fourth upper ball 13...Magnetic member 13A...First magnetic member 13B...Second magnetic member 13C...Third magnetic member 13D...Fourth magnetic member 13E...Fifth magnetic member 13F...Sixth magnetic member 14...Magnetic member 14A...First magnetic member 14B...Second magnetic member 14C...Third magnetic member 14D...Fourth magnetic member 15...Insulating substrate 16...Magnetic member 18...Base member 18B...Recess 18B1...First recess 18B2...Second recess 18K...Through hole 18P···Convex portion 18P1···First convex portion 18P2···Second convex portion 18S···Concave portion 18S1···First concave portion 18S2···Second concave portion 18S3···Third concave portion 18S4···Fourth concave portion 18U···Concave portion 18U1···First concave portion 18U2···Second concave portion 18U3···Third concave portion 100, 100A, 100B···Optical element drive device CG1 to CG3, CG11 to CG13···Points CP1, CP2, CP11 to CP14, CP21, CP22, CP31 to CP34···Contact points DM···Drive means DM1···First drive means DM2···Second drive means FB···Fixed side member HS···Housing LB...Lower member MA...Magnetic attraction means MA1...First magnetic attraction means MA2...Second magnetic attraction means MA3...Third magnetic attraction means MA4...Fourth magnetic attraction means MA5...Fifth magnetic attraction means MA6...Sixth magnetic attraction means MB...Movable member OE...Optical element PD...Position detection means PD1...First position detection means PD2...Second position detection means SP...Space ST...Contact part ST1...First contact part ST11...First right front contact part ST12...First left front contact part ST13...First left rear contact part ST14...First right rear contact part ST2...Second contact part ST21...Second left front contact part ST22...Second left rear contact part ST23...Second right rear contact part ST24: Second right front contact part TR1, TR11: First triangle TR2, TR12: Second triangle TR3, TR13: Third triangle TR1F, TR11F: First side TR1S, TR11S: Second sideTR11T...Virtual line

Claims

1. A fixed member including a support member; an optical element holding member having a through hole extending vertically therethrough in which an optical element can be placed; an intermediate member provided between the support member and the optical element holding member in a vertical direction and movable in a first direction perpendicular to the vertical direction with respect to the support member; at least three lower balls disposed between the support member and the intermediate member; At least three upper balls disposed between the intermediate member and the optical element holding member; a first driving means for moving the intermediate member in the first direction relative to the support member; a second driving means for moving the optical element holding member in a second direction perpendicular to the up-down direction and perpendicular to the first direction with respect to the intermediate member; a magnetic attraction means for generating a force that attracts the intermediate member and the optical element holding member to each other by sandwiching the upper ball, In the optical element driving device, the optical element holding member is movable along a plane perpendicular to a vertical direction with respect to the support member, the first driving means includes a first driving magnet provided on the intermediate member, and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, the second driving means includes a second driving magnet provided on the optical element holding member, and a second coil provided on the support member so as to face the second driving magnet in the up-down direction, the magnetic attraction means includes an attraction magnet provided on the intermediate member or the optical element holding member, the optical element holding member is formed in a frame shape having a first side portion and a third side portion opposed to each other with the through hole interposed therebetween, and a second side portion and a fourth side portion opposed to each other with the through hole interposed therebetween in a direction intersecting a direction in which the first side portion and the third side portion oppose each other, a width dimension of the third side portion in a direction perpendicular to a direction in which the third side portion extends is smaller than a width dimension of any of the first side portion, the second side portion, and the fourth side portion; the intermediate member has a first side portion, a second side portion, and a fourth side portion that respectively face the first side portion, the second side portion, and the fourth side portion of the optical element holding member in a vertical direction, the attracting magnet is provided on at least one of the second side portion and the fourth side portion of the intermediate member, or is provided on at least one of the second side portion and the fourth side portion of the optical element holding member; An optical element driving device comprising:

2. the two attracting magnets are fixed to the intermediate member in a spaced-apart state, and the first driving magnet is fixed at a position spaced apart from the two attracting magnets, the magnetic attraction means includes the two attraction magnets, the first drive magnet, and a magnetic member, the magnetic member is fixed to the optical element holding member such that an attractive force acts between the magnetic member and each of the two attracting magnets and the first driving magnet in the vertical direction, a separate magnetic attraction means for generating a force that attracts the intermediate member and the support member to each other by sandwiching the lower ball therebetween; the other magnetic attraction means is configured to include the two attraction magnets, the first drive magnet, and another magnetic member, the other magnetic member is fixed to the support member such that an attractive force acts between the other magnetic member and each of the two attracting magnets and the first driving magnet in the vertical direction; The optical element driving device according to claim 1 .

3. Three of the lower balls and three of the upper balls, the support member has three lower upwardly facing recesses each having an open upper portion in which the lower ball is disposed, the intermediate member has three lower downward recesses, the lower of which is open, in which the lower ball is disposed, and three upper upward recesses, the upper of which is open, in which the upper ball is disposed, the optical element holding member has three upper downward recesses, the lower portions of which are open and in which the upper balls are disposed; one of the three lower upward recesses and one of the three lower downward recesses are arranged to face each other with one of the three lower balls interposed therebetween; another one of the three lower upward recesses and another one of the three lower downward recesses are arranged to face each other with another one of the three lower balls interposed therebetween; one of the three lower upward recesses, one of the three lower downward recesses, another one of the three lower upward recesses, and another one of the three lower downward recesses constitute a lower ball guide structure that guides the lower ball so that the intermediate member is movable in the first direction relative to the support member; the remaining one of the three lower-side upward recesses and the remaining one of the three lower-side downward recesses are arranged to face each other across the remaining one of the three lower balls, and have a size in a plan view larger than a diameter of the lower ball; one of the three upper upward recesses and one of the three upper downward recesses are arranged to face each other with one of the three upper balls in between, Another one of the three upper upward recesses and another one of the three upper downward recesses are arranged to face each other with another one of the three upper balls interposed therebetween, one of the three upper upward recesses, one of the three upper downward recesses, another one of the three upper upward recesses, and another one of the three upper downward recesses constitute an upper ball guiding structure that guides the upper ball so that the optical element holding member is movable in the second direction relative to the intermediate member, the remaining one of the three upper upward recesses and the remaining one of the three upper downward recesses are arranged to face each other across the remaining one of the three upper balls, and have a size in a plan view larger than a diameter of the upper ball; The optical element driving device according to claim 1 .

4. A fixed side member including a support member; an optical element holding member having a through hole extending vertically therethrough in which an optical element can be placed; an intermediate member provided between the support member and the optical element holding member in a vertical direction and movable in a first direction perpendicular to the vertical direction with respect to the support member; at least three lower balls disposed between the support member and the intermediate member; three upper balls disposed between the intermediate member and the optical element holding member; a first driving means for moving the intermediate member in the first direction relative to the support member; a second driving means for moving the optical element holding member in a second direction perpendicular to the up-down direction and perpendicular to the first direction with respect to the intermediate member, In the optical element driving device, the optical element holding member is movable along a plane perpendicular to a vertical direction with respect to the support member, the first driving means includes a first driving magnet provided on the intermediate member, and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, the second driving means includes a second driving magnet provided on the optical element holding member, and a second coil provided on the support member so as to face the second driving magnet in the up-down direction, a magnetic attraction means for generating a force that attracts the optical element holding member and the support member to each other in a vertical direction; the magnetic attraction means includes the second drive magnet provided on the optical element holding member, an attraction magnet provided on the optical element holding member, and a magnetic member provided on the support member, the magnetic member is provided on the support member such that an attractive force acts between the magnetic member and each of the second drive magnet and the attracting magnet, One of the three upper balls is located between two of the attracting magnets, another one of the three upper balls is located outside a first triangle formed by connecting the center of the second drive magnet and the centers of the two attracting magnets in a plan view along the up-down direction, and faces a first side of the first triangle connecting the center of the second drive magnet and the center of one of the two attracting magnets, the remaining one of the three upper balls is located outside the first triangle in a plan view along the up-down direction and faces a second side of the first triangle that connects the center of the second drive magnet and the center of the other of the two attracting magnets; An optical element driving device comprising:

5. the intermediate member has a first housing portion that is open on the support member side, the first drive magnet is disposed in the first housing portion and fixed to the intermediate member, the optical element holding member has a second housing portion that is open on the support member side, the second drive magnet is disposed in the second housing portion and fixed to the optical element holding member, The first drive magnet and the second drive magnet are arranged so that at least a portion of each of them is at the same position in the vertical direction.

5. The optical element driving device according to claim 1.

6. Three of said lower balls are provided; One of the three lower balls is located between two of the attracting magnets, another one of the three lower balls is located outside the first triangle and faces the first side in a plan view along the up-down direction; the remaining one of the three lower balls is located outside the first triangle and faces the second side in a plan view along the up-down direction; The optical element driving device according to claim 4 .

7. A fixed side member including a support member; an optical element holding member having a through hole extending vertically therethrough in which an optical element can be placed; an intermediate member provided between the support member and the optical element holding member in a vertical direction and movable in a first direction perpendicular to the vertical direction with respect to the support member; three lower balls disposed between the support member and the intermediate member; three upper balls disposed between the intermediate member and the optical element holding member; a first driving means for moving the intermediate member in the first direction relative to the support member; a second driving means for moving the optical element holding member in a second direction perpendicular to the up-down direction and perpendicular to the first direction with respect to the intermediate member, In the optical element driving device, the optical element holding member is movable along a plane perpendicular to a vertical direction with respect to the support member, the first driving means includes a first driving magnet provided on the intermediate member, and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, the second driving means includes a second driving magnet provided on the optical element holding member, and a second coil provided on the support member so as to face the second driving magnet in the up-down direction, a magnetic attraction means for generating a force that attracts the optical element holding member and the support member to each other in a vertical direction; the magnetic attraction means includes the second drive magnet provided on the optical element holding member, an attraction magnet provided on the optical element holding member, and a magnetic member provided on the support member, the magnetic member is provided on the support member such that an attractive force acts between the magnetic member and each of the second drive magnet and the attracting magnet, the centers of gravity of a first triangle formed by connecting the center of the second drive magnet and the centers of each of the two attracting magnets, a second triangle formed by connecting the centers of each of the three upper balls, and a third triangle formed by connecting the centers of each of the three lower balls are located within an area where the first triangle, the second triangle, and the third triangle overlap in a plan view along the up-down direction; An optical element driving device comprising:

8. A fixed side member including a support member; an optical element holding member having a through hole extending vertically therethrough in which an optical element can be placed; an intermediate member provided between the support member and the optical element holding member in a vertical direction and movable in a first direction perpendicular to the vertical direction with respect to the support member; at least three lower balls disposed between the support member and the intermediate member; At least three upper balls disposed between the intermediate member and the optical element holding member; a first driving means for moving the intermediate member in the first direction relative to the support member; a second driving means for moving the optical element holding member in a second direction perpendicular to the up-down direction and perpendicular to the first direction with respect to the intermediate member, In the optical element driving device, the optical element holding member is movable along a plane perpendicular to a vertical direction with respect to the support member, the first driving means includes a first driving magnet provided on the intermediate member, and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, the second driving means includes a second driving magnet provided on the optical element holding member, and a second coil provided on the support member so as to face the second driving magnet in the up-down direction, a magnetic attraction means for generating a force that attracts the optical element holding member and the support member to each other in a vertical direction; the magnetic attraction means includes the second drive magnet provided on the optical element holding member, an attraction magnet provided on the optical element holding member, and a magnetic member provided on the support member, the magnetic member is provided on the support member such that an attractive force acts between the magnetic member and each of the second drive magnet and the attracting magnet, the optical element holding member is formed in a frame shape having a first side portion, a second side portion, a third side portion, and a fourth side portion, the third side portion is disposed to face the first side portion across the through hole, The second drive magnet is disposed on the first side portion and extends in the first direction, One of the two attracting magnets is disposed at one end of the third side portion, The other of the two attracting magnets is disposed at the other end of the third side portion, A first detection magnet is disposed at one end of the first side portion, A second detection magnet is disposed at the other end of the first side portion, a first magnetic sensor is provided on the support member so as to face the first detection magnet in the vertical direction; a second magnetic sensor is provided on the support member so as to face the second detection magnet in the vertical direction; An optical element driving device comprising:

9. The two attracting magnets are fixed to the second side of the intermediate member in a spaced-apart state, The first drive magnet is fixed to the fourth side portion of the intermediate member, the magnetic attraction means includes the two attraction magnets, the first drive magnet, and a magnetic member, the magnetic member is fixed to the optical element holding member such that an attractive force acts between the magnetic member and each of the two attracting magnets and the first driving magnet in the vertical direction; The optical element driving device according to claim 1 .

10. A fixed side member including a support member; an optical element holding member having a through hole extending vertically therethrough in which an optical element can be placed; an intermediate member provided between the support member and the optical element holding member in a vertical direction and movable in a first direction perpendicular to the vertical direction with respect to the support member; at least three lower balls disposed between the support member and the intermediate member; At least three upper balls disposed between the intermediate member and the optical element holding member; a first driving means for moving the intermediate member in the first direction relative to the support member; a second driving means for moving the optical element holding member in a second direction perpendicular to the up-down direction and perpendicular to the first direction with respect to the intermediate member; a magnetic attraction means for generating a force that attracts the intermediate member and the optical element holding member to each other by sandwiching the upper ball; and another magnetic attraction means for generating a force that attracts the intermediate member and the support member to each other by sandwiching the lower ball therebetween, In the optical element driving device, the optical element holding member is movable along a plane perpendicular to a vertical direction with respect to the support member, the first driving means includes a first driving magnet provided on the intermediate member, and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, the second driving means includes a second driving magnet provided on the optical element holding member, and a second coil provided on the support member so as to face the second driving magnet in the up-down direction, the magnetic attraction means includes an attraction magnet provided on the intermediate member or the optical element holding member, the two attracting magnets are fixed to the intermediate member in a spaced-apart state, and the first driving magnet is fixed at a position spaced apart from the two attracting magnets, the magnetic attraction means includes the two attraction magnets, the first drive magnet, and a magnetic member, the magnetic member is fixed to the optical element holding member such that an attractive force acts between the magnetic member and each of the two attracting magnets and the first driving magnet in the vertical direction, the other magnetic attraction means is configured to include the two attraction magnets, the first drive magnet, and another magnetic member, the other magnetic member is fixed to the support member such that an attractive force acts between the other magnetic member and each of the two attracting magnets and the first driving magnet in the vertical direction; An optical element driving device comprising:

11. Three of said lower balls are provided; One of the three lower balls is disposed between two of the attracting magnets; another one of the three lower balls is disposed so as to face one end of the first drive magnet extending in the second direction in a plan view along the up-down direction; the remaining one of the three lower balls is disposed so as to face the other end of the first drive magnet extending in the second direction in a plan view along the up-down direction; The optical element driving device according to claim 10.

12. Three of said upper balls are provided; one of the three upper balls is located on an extension of a virtual line connecting the centers of the two attracting magnets in a plan view along the up-down direction, and is disposed to the side of the attracting magnet; another one of the three upper balls is located outside a triangle formed by connecting the center of the first drive magnet and the centers of the two attracting magnets in a plan view along the up-down direction, and faces one side of the triangle connecting the center of the first drive magnet and the center of one of the two attracting magnets, the remaining one of the three upper balls is located outside the triangle in a plan view along the up-down direction and faces the other side of the triangle that connects the center of the first drive magnet and the center of the other of the two attraction magnets; The optical element driving device according to claim 11.

13. Three of the lower balls and three of the upper balls, the centers of gravity of a first triangle formed by connecting the center of the first drive magnet and the centers of each of the two attracting magnets, a second triangle formed by connecting the centers of each of the three upper balls, and a third triangle formed by connecting the centers of each of the three lower balls are located within an area where the second triangle and the third triangle overlap in a plan view along the up-down direction; The optical element driving device according to claim 10.

14. A fixed side member including a support member; an optical element holding member having a through hole extending vertically therethrough in which an optical element can be placed; an intermediate member provided between the support member and the optical element holding member in a vertical direction and movable in a first direction perpendicular to the vertical direction with respect to the support member; three lower balls disposed between the support member and the intermediate member; three upper balls disposed between the intermediate member and the optical element holding member; a first driving means for moving the intermediate member in the first direction relative to the support member; a second driving means for moving the optical element holding member in a second direction perpendicular to the up-down direction and perpendicular to the first direction with respect to the intermediate member, In the optical element driving device, the optical element holding member is movable along a plane perpendicular to a vertical direction with respect to the support member, the first driving means includes a first driving magnet provided on the intermediate member, and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, the second driving means includes a second driving magnet provided on the optical element holding member, and a second coil provided on the support member so as to face the second driving magnet in the up-down direction, the support member has three lower upwardly facing recesses each having an open upper portion in which the lower ball is disposed, the intermediate member has three lower downward recesses, the lower of which is open, in which the lower ball is disposed, and three upper upward recesses, the upper of which is open, in which the upper ball is disposed, the optical element holding member has three upper downward recesses, the lower portions of which are open and in which the upper balls are disposed; one of the three lower upward recesses and one of the three lower downward recesses are arranged to face each other with one of the three lower balls interposed therebetween; another one of the three lower upward recesses and another one of the three lower downward recesses are arranged to face each other with another one of the three lower balls interposed therebetween; one of the three lower upward recesses, one of the three lower downward recesses, another one of the three lower upward recesses, and another one of the three lower downward recesses constitute a lower ball guide structure that guides the lower ball so that the intermediate member is movable in the first direction relative to the support member; the remaining one of the three lower-side upward recesses and the remaining one of the three lower-side downward recesses are arranged to face each other across the remaining one of the three lower balls, and have a size in a plan view larger than a diameter of the lower ball; one of the three upper upward recesses and one of the three upper downward recesses are arranged to face each other with one of the three upper balls in between, Another one of the three upper upward recesses and another one of the three upper downward recesses are arranged to face each other with another one of the three upper balls interposed therebetween, one of the three upper upward recesses, one of the three upper downward recesses, another one of the three upper upward recesses, and another one of the three upper downward recesses constitute an upper ball guiding structure that guides the upper ball so that the optical element holding member is movable in the second direction relative to the intermediate member, the remaining one of the three upper upward recesses and the remaining one of the three upper downward recesses are arranged to face each other across the remaining one of the three upper balls, and have a size in a plan view larger than a diameter of the upper ball; An optical element driving device comprising:

15. A fixed side member including a support member; an optical element holding member having a through hole extending vertically therethrough in which an optical element can be placed; an intermediate member provided between the support member and the optical element holding member in a vertical direction and movable in a first direction perpendicular to the vertical direction with respect to the support member; at least three lower balls disposed between the support member and the intermediate member; At least three upper balls disposed between the intermediate member and the optical element holding member; a first driving means for moving the intermediate member in the first direction relative to the support member; a second driving means for moving the optical element holding member in a second direction perpendicular to the up-down direction and perpendicular to the first direction with respect to the intermediate member, In the optical element driving device, the optical element holding member is movable along a plane perpendicular to a vertical direction with respect to the support member, the first driving means includes a first driving magnet provided on the intermediate member, and a first coil provided on the support member so as to face the first driving magnet in the up-down direction, the second driving means includes a second driving magnet provided on the optical element holding member, and a second coil provided on the support member so as to face the second driving magnet in the up-down direction, the optical element holding member is formed in a frame shape having a first side portion and a third side portion opposed to each other with the through hole interposed therebetween, and a second side portion and a fourth side portion opposed to each other with the through hole interposed therebetween in a direction intersecting a direction in which the first side portion and the third side portion oppose each other, the intermediate member has a first side portion, a second side portion, and a fourth side portion that respectively face the first side portion, the second side portion, and the fourth side portion of the optical element holding member in the up-down direction, and has a shape in which a portion facing the third side portion of the optical element holding member is cut out, the second drive magnet fixed to the optical element holding member is disposed in a cut-out portion of the intermediate member, An optical element driving device comprising:

16. the fixed member has a metal cover member that constitutes a housing together with the support member, the intermediate member and the optical element holding member are housed in the housing, the optical element holding member is larger than the intermediate member in a plan view, a first contact portion that can contact an inner surface of the cover member when the optical element holding member moves in the first direction and a second contact portion that can contact an inner surface of the cover member when the optical element holding member moves in the second direction are provided on an outer peripheral surface of the optical element holding member, thereby limiting a movement range of the optical element holding member; The optical element driving device according to claim 1 .

Images