Light source device and irradiation device

Abstract

To provide a light source device and an irradiation device capable of improving uniformity of illuminance and a spectrum in an irradiation area.SOLUTION: A light source device 1A includes: a first light source unit 10-1 which includes one or more kinds of semiconductor light sources and emits a first ultraviolet ray L1; a second light source unit 10-2 which includes one or more kinds of semiconductor light sources and emits a second ultraviolet ray L2 where at least one of a center wavelength and a spectrum is different from those of the first ultraviolet ray L1; a light tunnel 30 for guiding the first ultraviolet ray L1 and the second ultraviolet ray L2; and a mixing optical system 40 provided inside the light tunnel 30 for mixing the first ultraviolet ray L1 and the second ultraviolet ray L2, and obtaining a third ultraviolet ray L3. An inner surface 30A of the light tunnel 30 is a reflection surface for reflecting the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3, and emits the third ultraviolet ray L3 mixed by the mixing optical system 40 from the light tunnel 30.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a light source device and an irradiation device.

Background Art

[0002] A light source device including an ultraviolet discharge lamp such as a high-pressure mercury lamp or a metal halide lamp as a light source is known. This type of light source device is widely used in various devices such as a light resistance test device for testing the light resistance of an object, a photocuring device for photocuring a photocurable resin, and an ultraviolet light source device mounted on a printing machine for curing an ultraviolet curable ink. On the other hand, in recent years, in the technical field to which the light source device belongs, for the purpose of reducing environmental impact, etc., replacement from a discharge lamp containing mercury to an LED (light-emitting diode) has been carried out. However, since the spectral spectrum of the ultraviolet discharge lamp has a continuous spectrum in a relatively wide wavelength range, it may be difficult to replace the ultraviolet discharge lamp with a single type of ultraviolet LED. Therefore, as a light source device that can be used for replacing the ultraviolet discharge lamp, a configuration is required that includes a plurality of types of ultraviolet LEDs having different center wavelengths and obtains a continuous spectrum in a desired wavelength range by mixing and irradiating the ultraviolet LEDs.

[0003] Patent Document 1 discloses a technique of mixing lights of different light sources by a beam splitter. Further, Patent Document 2 discloses a technique of mixing lights of different light sources by a dichroic mirror.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the conventional technology, the illuminance in the irradiation area irradiated with the mixed ultraviolet rays and the uniformity of the spectral spectrum are not considered.

[0006] An object of the present disclosure is to provide a light source device and an irradiation device that can improve the illuminance in the irradiation area and the uniformity of the spectral spectrum.

Means for Solving the Problems

[0007] A light source device according to one aspect of the present disclosure includes one or more types of semiconductor light sources, a first light source unit that emits a first ultraviolet ray, one or more types of semiconductor light sources, and a second ultraviolet ray having a central wavelength different from that of the first ultraviolet ray. A second light source unit that emits light, a light tunnel that guides each of the first ultraviolet ray and the second ultraviolet ray, and a mixing optical system that is provided inside the light tunnel and synthesizes the first ultraviolet ray and the second ultraviolet ray to obtain a third ultraviolet ray. The inner surface of the light tunnel is a reflecting surface that reflects the first ultraviolet ray, the second ultraviolet ray, and the third ultraviolet ray, and the third ultraviolet ray mixed by the mixing optical system is emitted from the light tunnel.

Effects of the Invention

[0008] According to one aspect of the present disclosure, the illuminance in the irradiation area and the uniformity of the spectral spectrum can be improved.

Brief Description of the Drawings

[0009]

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Embodiments for Carrying Out the Invention

[0010] Hereinafter, preferred embodiments according to the present disclosure will be described with reference to the drawings. In the drawings, the dimensions and scales of each part may be appropriately different from the actual ones, and there may be parts shown schematically for easy understanding. Also, in the following description, unless there is a special description to limit the present disclosure, the scope of the present disclosure is not limited to the embodiments described below. The scope of the present disclosure includes the equivalent scope of the embodiments.

[0011] 1. First Embodiment FIG. 1 is a perspective view schematically showing an example of the configuration of the light source device 1A according to the present embodiment. FIG. 2 is a cross-sectional view schematically showing an example of the internal configuration of the light source device 1A. The light source device 1A is a device that can be incorporated and used as an alternative light source to an ultraviolet discharge lamp in various devices such as a light resistance test device, a photo-curing device, and a semiconductor processing device. As shown in FIGS. 1 and 2, the light source device 1A of the present embodiment includes a first light source unit 10-1 that emits a first ultraviolet ray L1, and a second ultraviolet ray L2 whose at least one of the center wavelength and the spectral spectrum is different from that of the first ultraviolet ray L1. A second light source unit 10-2 that emits light, a light tunnel 30 that guides each of the first ultraviolet ray L1 and the second ultraviolet ray L2, and a mixing optical system 40 that is provided inside the light tunnel 30 and mixes the first ultraviolet ray L1 and the second ultraviolet ray L2. And irradiates the stage A with the third ultraviolet ray L3 mixed by the mixing optical system 40 from the light tunnel 30. An appropriate irradiation object irradiated with the third ultraviolet ray L3 is arranged on the stage A.

[0012] The light source device 1A of the present embodiment includes a first cooling unit 50-1 that cools the first light source unit 10-1, and a second cooling unit 50-2 that cools the second light source unit 10-2. The first cooling unit 50-1 and the second cooling unit 50-2 include one or more appropriate types of cooling means such as a heat sink, an air-cooling fan, and a water cooler. Although not shown, the light source device 1A includes a light source control device that controls the lighting, extinguishing, and dimming of the first light source unit 10-1 and the second light source unit 10-2, and a cooling control device that controls the operations of the first cooling unit 50-1 and the second cooling unit 50-2.

[0013] FIG. 3 is a diagram showing an example of ultraviolet LEDs included in each of the first light source unit 10-1 and the second light source unit 10-2. In order to approximate the spectral spectrum of the ultraviolet discharge lamp to be replaced, the first light source unit 10-1 and the second light source unit 10-2 of the light source device 1A each include one or more types of ultraviolet LEDs whose at least one of the center wavelength and the spectral spectrum is different from each other. The ultraviolet LED is an example of the "semiconductor light source" in the present disclosure. An existing accelerated weathering test apparatus using a metal halide lamp as a light source is an apparatus that irradiates an object to be irradiated with light emitted from the metal halide lamp and transmitted through a filter. The light source device 1A of the present embodiment realizes the spectral spectrum of the light transmitted through the filter in the existing accelerated weathering test apparatus by mixing the emitted lights of a plurality of LEDs having different peak wavelengths. Specifically, in order to reproduce the spectral spectrum, as shown in FIG. 3, the first light source unit 10-1 includes two types of ultraviolet LEDs, a first ultraviolet LED and a second ultraviolet LED, and the second light source unit 10-2 includes four types of ultraviolet LEDs, a third ultraviolet LED, a fourth ultraviolet LED, a fifth ultraviolet LED, and a sixth ultraviolet LED. In the present embodiment, the first ultraviolet LED to the sixth ultraviolet LED are LEDs having different center wavelengths. That is, as shown in FIG. 3, the center wavelengths of the first ultraviolet LED, the second ultraviolet LED, the third ultraviolet LED, the fourth ultraviolet LED, the fifth ultraviolet LED, and the sixth ultraviolet LED are 325 nm, 340 nm, 365 nm, 375 nm, 385 nm, and 405 nm, respectively. By mixing the ultraviolet lights of the six types of ultraviolet LEDs having different center wavelengths by the mixing optical system 40 as the third ultraviolet L3, the spectral spectrum of the third ultraviolet L3 becomes a continuous spectrum in a relatively wide wavelength range. In addition, the number of each type of ultraviolet LED mounted and the forward current are determined so that the spectral spectrum of the third ultraviolet L3 approximates the spectral spectrum of the light of the metal halide lamp transmitted through the filter in the existing accelerated weathering test apparatus.

[0014] FIG. 4 is a plan view showing an example of the LED substrate 100 included in the second light source unit 10-2. The LED substrate 100 includes four types of ultraviolet LEDs, namely the third to sixth ultraviolet LEDs provided in the second light source unit 10-2, and a mounting substrate 110 on which these ultraviolet LEDs are mounted. The mounting substrate 110 is a printed circuit board that is substantially rectangular in plan view. Each ultraviolet LED is mounted within the range of a central region 110R located approximately at the center of the mounting substrate 110. Within the range of this central region 110R, the various types of ultraviolet LEDs are widely dispersed and arranged for each type so as to be point-symmetrical about the center of the central region.

[0015] As shown in FIG. 1 above, the first light source unit 10-1 includes two LED substrates 100. The first ultraviolet LED is arranged in the central region 110R on one LED substrate 100, and the second ultraviolet LED is arranged in the central region 110R on the other LED substrate 100.

[0016] In the present embodiment, the central region 110R is rectangular with a side length of approximately 25 mm, and ultraviolet rays of various types of ultraviolet LEDs are emitted from substantially the entire surface of the central region 110R. Also, in the present embodiment, the first to sixth ultraviolet LEDs are all package-type LEDs, which are light sources that do not have optical elements such as lenses by themselves. Ultraviolet rays are emitted from each ultraviolet LED at a relatively wide emission angle (for example, 120 degrees). As a result, the emission angle of the ultraviolet rays emitted by the LED substrate 100 is also relatively wide. The emission angle is assumed to be an appropriate angle of 15 degrees or more and 180 degrees or less. Note that some or all of the one or more types of LEDs included in each of the first light source unit 10-1 and the second light source unit 10-2 may be provided with optical elements, or may be SMD (Surface Mount Device)-type, COB (Chip On Board)-type, or bullet-type LEDs.

[0017] Returning to FIG. 2 above, the hybrid optical system 40 of the present embodiment includes a beam splitter 400. The beam splitter 400 of the present embodiment is a plate-type optical element, having optical characteristics with a transmittance of 70% and a reflectance of 30% when the incident angle of incident light is 45 degrees, and is arranged in a posture having an inclination of 45 degrees with respect to the first optical axis K1 of the first ultraviolet ray L1 and the second optical axis K2 of the second ultraviolet ray L2 at the intersection point Ba where the first optical axis K1 and the second optical axis K2 are orthogonal. By this beam splitter 400, the third ultraviolet ray L3 is obtained by mixing the light component transmitted through the beam splitter 400 among the first ultraviolet rays L1 and the light component reflected by the beam splitter 400 among the second ultraviolet rays L2.

[0018] As shown in FIG. 2, the light tunnel 30 is a hollow cylindrical body 300 that linearly extends and has an emission port 300Q for emitting the third ultraviolet ray L3 opening at one end 300T1. At the other end 300T2 of this cylindrical body 300, a first introduction port 300M1 for introducing one of the first ultraviolet ray L1 and the second ultraviolet ray L2 opens, and on the side surface of the cylindrical body 300, a second introduction port 300M2 for introducing the other of the first ultraviolet ray L1 and the second ultraviolet ray L2 opens.

[0019] In the present embodiment, the first light source unit 10-1 is arranged at the first introduction port 300M1, and the first ultraviolet ray L1 is introduced from the first introduction port 300M1. On the other hand, the second light source unit 10-2 is arranged in a sub-cylindrical body 300S extending from the second introduction port 300M2, and the second ultraviolet ray L2 is introduced from the second introduction port 300M2. In this configuration, the first light source unit 10-1 is installed such that the first optical axis K1 of the first ultraviolet ray L1 generally coincides with the central axis of the cylindrical body 300, and the second light source unit 10-2 is installed such that the second optical axis K2 of the second ultraviolet ray L2 is orthogonal to the central axis of the cylindrical body 300. Then, inside the cylindrical body 300, as described above, the beam splitter 400 is installed at the intersection point Ba of the first optical axis K1 and the second optical axis K2, and the third ultraviolet ray L3 travels from this beam splitter 400 toward the emission port 300Q.

[0020] In this embodiment, in order to make the distances from the intersection point Ba to each of the first inlet 300M1 and the second inlet 300M2 approximately equal, the second inlet 300M2 is provided with a sub-cylinder 300S extending from the side surface of the cylinder 300 in a direction perpendicular to the central axis of the cylinder 300, and the second light source unit 10-2 is arranged at the end of this sub-cylinder 300S. The cross-sectional shape and cross-sectional dimensions of this sub-cylinder 300S are substantially equal to those of the cylinder 300.

[0021] In this embodiment, the cross-sectional shapes of the cylinder 300 and the sub-cylinder 300S, and the opening shapes of the first inlet 300M1, the second inlet 300M2, and the outlet 300Q are all square shapes. The inner dimensions of each of the cylinder 300 and the sub-cylinder 300S are such that one side is about 50 mm, and the distance from the first inlet 300M1 to the outlet 300Q is 160.5 mm. Also, the distance from the intersection point Ba to the first inlet 300M1 is 65.5 mm, and the distance from the intersection point Ba to the installation position of the second light source unit 10-2 in the sub-cylinder 300S is also 65.5 mm. The outlet 300Q is a square shape with one side of 50 mm, similar to the inner dimensions of the cylinder 300. At a position 5 mm away from the outlet 300Q, an irradiation area D with a predetermined dimension and a predetermined shape centered on the first optical axis K1 and centered at point E is defined. In this embodiment, the irradiation area D is defined as a range of a square with one side of 25 mm.

[0022] Note that the shapes and dimensions of the cylinder 300 and the sub-cylinder 300S, and the shapes and dimensions of the first inlet 300M1, the second inlet 300M2, and the outlet 300Q are appropriately set according to, for example, the desired shape, dimension, and illuminance of the irradiation area D.

[0023] In the light tunnel 30 of the present embodiment, the cylindrical body 300 and the auxiliary cylindrical body 300S are each formed using a plate material mainly made of a material having a high reflectivity such as aluminum, and their inner surface 30A is a reflecting surface that reflects ultraviolet rays with a high reflectivity. On the other hand, as described above, the first light source unit 10-1 and the second light source unit 10-2 each emit the first ultraviolet ray L1 and the second ultraviolet ray L2 with a relatively large radiation angle (for example, 120 degrees or more). Therefore, inside the light tunnel 30, as shown by the broken-line arrow C1 in FIG. 2, the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 each travel while being multiply reflected by the inner surface 30A. As a result, the third ultraviolet ray L3 becomes an ultraviolet ray in which the ultraviolet rays of each of the six types of ultraviolet LEDs provided in the first light source unit 10-1 and the second light source unit 10-2 are sufficiently mixed. When such a third ultraviolet ray L3 is irradiated onto the irradiation area D, the illuminance and the uniformity of the spectral spectrum in the irradiation area D can be improved. Note that the broken-line arrow C1 shown in FIG. 2 conceptually shows the state of reflection and does not show the actual trajectory of the light rays.

[0024] Next, the measurement results of the illuminance and the spectral spectrum in the irradiation area D will be described.

[0025] FIG. 5 is a diagram showing the positions of the measurement points of the spectral spectrum in the irradiation area D. FIG. 6 is a diagram showing the measurement results of the spectral spectrum at each measurement point shown in FIG. 5. As described above, the irradiation area D of the present embodiment is a square shape with a side length of 25 mm. As shown in FIG. 5, measurement points from the first measurement point DP1 to the fifth measurement point DP5 are set in this irradiation area D. The first measurement point DP1, the second measurement point DP2, the third measurement point DP3, the fourth measurement point DP4, and the fifth measurement point DP5 respectively correspond to the center of the irradiation area D, the vicinity of the upper left corner, the vicinity of the lower left corner, the vicinity of the lower right corner, and the vicinity of the upper right corner. In FIG. 5, the circles surrounding each measurement point indicate the light receiving range of the spectral sensor.

[0026] As shown in FIG. 6, the relative intensities of the spectral spectra measured at each of the first measurement point DP1 to the fifth measurement point DP5 are all approximately equal. Therefore, it can be seen that the spectral spectrum is uniform in the irradiation area D.

[0027] FIG. 7 is a diagram showing the measurement points for illuminance measurement in the irradiation area D and the illuminance measurement values at those measurement points. As shown in the figure, in the irradiation area D, the sixth measurement point DP6 to the fourteenth measurement point DP14 are set as the measurement points for illuminance measurement. The sixth measurement point DP6 to the fourteenth measurement point DP14 respectively correspond to the center, the upper left corner, the center of the left side, the lower left corner, the center of the upper side, the center of the lower side, the upper right corner, the center of the right side, and the lower right corner of the irradiation area D. From the illuminance measurement values at each of the positions of the sixth measurement point DP6 to the fourteenth measurement point DP14, it is required that the uniformity in the irradiation area D is 90% or more. When the illuminance measurement values in FIG. 7 are calculated according to the formula (uniformity = MIN value / MAX value × 100), the uniformity is about 93%, indicating that the uniformity of illuminance is high.

[0028] FIG. 8 is a diagram showing the conformity state of the third ultraviolet ray L3 to the wavelength range regulation of JIS (Japanese Industrial Standards). Such a wavelength range regulation is the regulation for JIS A 1501A method "Accelerated weather resistance test method for resin building fixtures using metal halide lamps". As shown in the figure, it is shown that at any of the points from the first measurement point DP1 to the fifth measurement point DP5, it conforms to the wavelength range regulation of JIS.

[0029] As described above, the light source device 1A of the present embodiment includes two types of ultraviolet LEDs, a first light source unit 10-1 that emits a first ultraviolet ray L1, and four types of ultraviolet LEDs, and emits a second ultraviolet ray L2 in which at least one of the central wavelength and the spectral spectrum is different from the first ultraviolet ray L1. A second light source unit 10-2, a light tunnel 30 that guides each of the first ultraviolet ray L1 and the second ultraviolet ray L2, and a mixing optical system 40 that is provided inside the light tunnel 30 and mixes the first ultraviolet ray L1 and the second ultraviolet ray L2 to obtain a third ultraviolet ray. The inner surface 30A of the light tunnel 30 is a reflecting surface that reflects the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3, and emits the third ultraviolet ray L3 mixed by the mixing optical system 40 from the light tunnel 30.

[0030] According to this configuration, since the third ultraviolet ray L3 is obtained by mixing the ultraviolet rays of a total of six types of ultraviolet LEDs, the spectral spectrum of the third ultraviolet ray L3 is a continuous spectrum, similar to that of an ultraviolet discharge lamp, and has optical characteristics that can be an alternative light source to the ultraviolet discharge lamp. In particular, since the light source device 1A does not contain mercury like a mercury discharge lamp, it can contribute to reducing the environmental load. In addition, since the light source device 1A uses a semiconductor light source such as an ultraviolet LED as the light source, it has a relatively long life compared to a discharge lamp, and the frequency of maintenance work such as replacing the discharge lamp can be reduced. Furthermore, since the light sources are divided into two, the first light source unit 10-1 and the second light source unit 10-2, even when the number of mounted ultraviolet LEDs increases according to the illuminance requirement, the installation area of the ultraviolet LEDs in each light source unit can be secured, and the size of the device can be prevented from increasing. In addition, by dividing the light sources into the first light source unit 10-1 and the second light source unit 10-2, the cooling capacity required for the cooling units (the first cooling unit 50-1 and the second cooling unit 50-2) that cool each light source unit can be reduced, and the size and cost of the cooling units can be suppressed. In addition to this, due to the reflection on the inner surface 30A of the light tunnel 30, the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 are mixed with each other, so the uniformity of the illuminance and the spectral spectrum in the irradiation area D can be improved.

[0031] In the light source device 1A of the present embodiment, the first light source unit 10-1 and the second light source unit 10-2 each emit the first ultraviolet ray L1 and the second ultraviolet ray L2 at a radiation angle that causes multiple reflections on the inner surface 30A of the light tunnel 30.

[0032] According to this configuration, since multiple reflections of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 are induced on the inner surface 30A of the light tunnel 30, the uniformity of the illuminance and the spectral spectrum in the irradiation area D can be further improved.

[0033] 2. Second Embodiment In the first embodiment, the light source device 1A in which the hybrid optical system 40 includes a beam splitter 400 has been described. In this embodiment, a light source device 1B in which the hybrid optical system 40 includes a dichroic mirror 410 will be described. In the description of the second embodiment, the same reference numerals are given to the elements described in the first embodiment, and the description thereof is omitted.

[0034] FIG. 9 is a perspective view schematically showing an example of the configuration of the light source device 1B according to the present embodiment. FIG. 10 is a cross-sectional view schematically showing an example of the internal configuration of the light source device 1B. As shown in FIGS. 9 and 10, in the light source device 1B, the dichroic mirror 410 as an example of the hybrid optical system 40 is provided inside the light tunnel 30. Similar to the first embodiment, the dichroic mirror 410 is disposed at the intersection Ba where the first optical axis K1 of the first ultraviolet ray L1 and the second optical axis K2 of the second ultraviolet ray L2 are orthogonal, with a posture having an inclination of 45 degrees with respect to the first optical axis K1 and the second optical axis K2.

[0035] FIG. 11 is a diagram showing the transmission characteristics and reflection characteristics of the dichroic mirror 410 of the present embodiment. The dichroic mirror 410 has a designed incident angle of 45 degrees for both transmission and reflection, and as shown in FIG. 11, it has the property of reflecting ultraviolet light in a wavelength band of about 356 nm or less and transmitting ultraviolet light in a wavelength band of about 356 nm or more. On the other hand, as shown in FIG. 3 mentioned above, the first light source unit 10-1 is provided with an ultraviolet LED having a central wavelength of 340 nm or less, and the first light source unit 10-1 is optimally configured as a light source that utilizes the reflection of the dichroic mirror 410. Further, the second light source unit 10-2 is provided with an ultraviolet LED having a central wavelength of 365 nm or more, and the second light source unit 10-2 is optimally configured as a light source that utilizes the transmission of the dichroic mirror 410.

[0036] Therefore, among the first surface 410P1 and the second surface 410P2 of the dichroic mirror 410, the second ultraviolet ray L2 of the second light source unit 10-2 is incident on the first surface 410P1 for incident transmission light, and the first ultraviolet ray L1 of the first light source unit 10-1 is incident on the second surface 410P2 for incident reflection light. By doing so, the loss due to the dichroic mirror 410 is suppressed, and the third ultraviolet ray L3 can be efficiently obtained.

[0037] Here, in the present embodiment, the first light source unit 10-1 that emits the first ultraviolet ray L1 having a wavelength shorter than the second ultraviolet ray L2 of the second light source unit 10-2 is arranged at the second inlet 300M2 formed on the side surface of the light tunnel 30, rather than the second light source unit 10-2. That is, the dichroic mirror 410 is installed in a posture where the second surface 410P2 faces the side surface of the light tunnel 30 and further faces the outlet 300Q. Further, in the light tunnel 30 of the present embodiment, the sub-cylinder 300S is not provided at the second inlet 300M2, and the first light source unit 10-1 is directly installed at the second inlet 300M2. Therefore, the distance from the first light source unit 10-1 to the outlet 300Q (irradiation area D) is shorter than the distance from the second light source unit 10-2 to the outlet 300Q (irradiation area D).

[0038] Generally, semiconductor light sources such as LEDs have lower luminous efficiency as the wavelength of the emitted light becomes shorter. Therefore, to obtain a certain amount of light, more power is consumed. On the other hand, according to this light source device 1B, since the first light source unit 10-1 with a shorter wavelength is arranged closer to the irradiation area D than the second light source unit 10-2, the first ultraviolet ray L1 with a desired light amount can be obtained with less power, and a highly efficient light source device 1B can be realized.

[0039] FIG. 12 is a plan view showing an example of two LED substrates 100 included in the first light source unit 10-1. As described above, a central region 110R is provided on each of the two LED substrates 100. A plurality of first ultraviolet LEDs are arranged in one central region 110R, and a plurality of second ultraviolet LEDs are arranged in the other central region 110R. Also, as shown in FIG. 12, on both sides of the LED substrate 100 of the present embodiment sandwiching the central region 110R, a reflector 120 that reflects the second ultraviolet ray L2 emitted by the second light source unit 10-2 and the first ultraviolet ray L1 emitted by the first light source unit 10-1 is provided. The reflector 120 is an example of the "reflecting portion" in the present disclosure and is, for example, a metal plate such as aluminum. Since the dichroic mirror 410 has a relatively high transmittance, as shown by the broken-line arrow C2 in FIG. 10, a part of the second ultraviolet ray L2 that has passed through the dichroic mirror 410 enters the LED substrate 100 of the first light source unit 10-1. Then, when this second ultraviolet ray L2 is reflected by the reflector 120, it is emitted from the emission port 300Q as the third ultraviolet ray L3, and the loss of the second ultraviolet ray L2 is suppressed. Also, by adding the first ultraviolet ray L1, the efficiency of the light source device 1B is further enhanced.

[0040] Moreover, even if a part of the second ultraviolet ray L2 that has passed through the dichroic mirror 410 enters the second inlet 300M2 where the first light source unit 10-1 is arranged, since the auxiliary cylinder 300S is not provided, the second ultraviolet ray L2 does not enter the auxiliary cylinder 300S and is reflected by the reflector 120 installed at the second inlet 300M2. As a result, due to a part of the second ultraviolet ray L2 entering the sub-cylindrical body 300S or being absorbed by the LED substrate 100 of the first light source unit 10-1, etc., a decrease in the uniformity in the irradiation area D is prevented, and the uniformity of the illuminance can be maintained. In addition to installing the reflector 120, using a resist with a high reflectance to ultraviolet rays on the LED substrate 100 also has the same effect. Although not shown in FIG. 4, a reflecting portion such as the reflector 120 may be provided in the second light source unit 10-2.

[0041] Next, the measurement results of the illuminance and the spectral spectrum in the irradiation area D will be described. In addition, the following measurement is performed by reducing the forward current of the third ultraviolet LED to the sixth ultraviolet LED provided in the second light source unit 10-2 to half (more precisely, 350 mA) of that in the first embodiment.

[0042] FIG. 13 is a diagram showing the measurement results of the spectral spectrum at each measurement point in the irradiation area D. The positions of the respective measurement points are the same as those in the first embodiment. As shown in the figure, also in the light source device 1B of the present embodiment, similar to the light source device 1A of the first embodiment, the relative intensities of the spectral spectra measured at each of the first measurement point DP1 to the fifth measurement point DP5 are all substantially equal. Therefore, it can be seen that the spectral spectrum is uniform in the irradiation area D.

[0043] FIG. 14 is a diagram showing the measurement points of the illuminance measurement in the irradiation area D and the illuminance measurement values at those measurement points. Also in the light source device 1B of the present embodiment, similar to the light source device 1A of the first embodiment, from the illuminance measurement values at the respective positions of the sixth measurement point DP6 to the fourteenth measurement point DP14, the uniformity in the irradiation area D is required to be 90% or more. Calculating the illuminance measurement values in FIG. 14 according to the formula (uniformity = MIN value / MAX value × 100), the uniformity is about 93%, and it can be seen that the uniformity of the illuminance is high. In addition, even when the forward currents of the third to sixth ultraviolet LEDs included in the second light source unit 10-2 are lower than those in the first embodiment, illuminance measurement values equivalent to those in the first embodiment are obtained at the respective positions from the sixth measurement point DP6 to the fourteenth measurement point DP14, indicating that high efficiency has been achieved.

[0044] FIG. 15 is a diagram showing the conformity state of the third ultraviolet ray to the wavelength range regulation of JIS. Such wavelength range regulation is the regulation regarding JIS A 1501A method "Accelerated weather resistance test method for resin building fixtures using metal halide lamps", similar to the first embodiment. As shown in the figure, also in this embodiment, it is shown that, similar to the first embodiment, any of the first to fifth measurement points DP1 to DP5 conforms to the wavelength range regulation of JIS.

[0045] In addition, the inventors measured by shortening the total length of the cylindrical body 300 (that is, the distance from the first inlet 300M1 to the outlet 300Q) in the configuration of the light source device 1B. In this case, the distance from the intersection point Ba (the second inlet 300M2) to the outlet 300Q also becomes shorter. As a result of this measurement, in any case where the total length of the cylindrical body 300 is 140.5 mm (the distance between the intersection point Ba and the outlet 300Q is 75 mm), 120.5 mm (the distance between the intersection point Ba and the outlet 300Q is 55 mm), 100.5 mm (the distance between the intersection point Ba and the outlet 300Q is 35 mm), and 51 mm (the distance between the intersection point Ba and the outlet 300Q is 25 mm), it was found that the uniformity of the spectral spectrum in the irradiation area D and the conformity state to the wavelength range regulation of JIS are not affected even when the total length of the cylindrical body 300 is shortened.

[0046] On the other hand, when the total length becomes shorter, although the uniformity of illuminance is affected due to differences in the arrangement positions of the first light source unit 10-1 and the second light source unit 10-2 viewed from the irradiation area D, and an increase in the direct light component that reaches the irradiation area D without being reflected by the inner surface 30A of the light tunnel 30, it was found that a uniformity of 90% or more can be obtained at any total length.

[0047] As described above, the light source device 1B of the present embodiment exhibits the same effects as the light source device 1A of the first embodiment.

[0048] In addition, in the light source device 1B of the present embodiment, among the first light source unit 10-1 and the second light source unit 10-2, the light source unit that emits ultraviolet light with a shorter wavelength (that is, the first light source unit 10-1) is arranged at the second inlet 300M2.

[0049] According to this configuration, since the first light source unit 10-1 with a shorter wavelength is arranged closer to the irradiation area D than the second light source unit 10-2, the first ultraviolet light L1 with a desired light amount can be obtained with less power, and a highly efficient light source device 1B can be realized.

[0050] In the light source device 1B of the present embodiment, among the first light source unit 10-1 and the second light source unit 10-2, the light source unit arranged at the second inlet 300M2 (that is, the first light source unit 10-1) includes a reflector 120 that reflects the ultraviolet light emitted by the other light source unit (that is, the second light source unit 10-2).

[0051] According to this configuration, a decrease in uniformity in the irradiation area D is prevented, and the uniformity of illuminance can be maintained. In addition, the illuminance of the irradiation area D can be increased, and a more efficient light source device 1B can be realized.

[0052] In the light source device 1B of the present embodiment, the hybrid optical system 40 includes a dichroic mirror 410.

[0053] According to this configuration, even when the hybrid optical system 40 includes a dichroic mirror 410 having a relatively high transmittance, a light source device 1B can be obtained that maintains the uniformity of illuminance and suppresses a decrease in the efficiency of the light source device 1B.

[0054] 3. Third Embodiment In the present embodiment, the irradiation device 1000 will be described. The irradiation device 1000 includes components of the plurality of light source devices 1A according to the first embodiment or the plurality of light source devices 1B according to the second embodiment, and while aiming to expand the area of the irradiation area D compared to a single light source device 1A or light source device 1B, it achieves uniformity equivalent to that of the light source device 1A and the light source device 1B in terms of illuminance and spectral spectrum.

[0055] Hereinafter, such an irradiation device 1000 will be described in detail. In this embodiment, an irradiation device 1000 including components of the plurality of light source devices 1B according to the second embodiment will be described. Also, in the description of this embodiment, the same reference numerals are given to the components described in the first embodiment or the second embodiment, and the description thereof is omitted.

[0056] FIG. 16 is a perspective view of the irradiation device 1000 according to this embodiment viewed from above. FIG. 17 is a perspective view of the external configuration of the irradiation device 1000 viewed from below. FIG. 18 is an exploded perspective view of the irradiation device 1000. As shown in FIGS. 16 and 17, the irradiation device 1000 includes a cylindrical external housing 2, and as shown in FIG. 18, a light source device 1C is provided inside the external housing 2. In this embodiment, the cross-sectional shape of the external housing 2 is rectangular, but other shapes may also be used. For the external housing 2, a highly rigid plate material made of, for example, an alloy is used. As shown in FIG. 17, a bottom plate 3 is attached to the bottom surface portion 2A of the external housing 2, and an emission opening 3A for emitting the third ultraviolet ray L3 is opened in this bottom plate 3. The upper surface portion 2B of the external housing 2 is an open end as shown in FIG. 16, and air and the wiring of the LED substrate can flow between the inside and the outside of the external housing 2. Further, a gripping portion 5 that is gripped by an operator during transportation or the like is provided on the side surface of the external housing 2.

[0057] FIG. 19 is a longitudinal sectional view of the light source device 1C according to this embodiment. As shown in FIG. 19, the light source device 1C includes, similar to the light source device 1A according to the first embodiment and the light source device 1B according to the second embodiment, a first light source unit 10-1 that emits a first ultraviolet ray L1, a second light source unit 10-2 that emits a second ultraviolet ray L2 whose at least one of the center wavelength and the spectral spectrum is different from the first ultraviolet ray L1, a light tunnel 30 that guides each of the first ultraviolet ray L1 and the second ultraviolet ray L2, and a mixing optical system 40 that is provided inside the light tunnel 30 and mixes the first ultraviolet ray L1 and the second ultraviolet ray L2. The third ultraviolet ray L3 mixed by the mixing optical system 40 is irradiated from the light tunnel 30.

[0058] Also, similar to the light source device 1B according to the second embodiment, the light source device 1C of the present embodiment includes a dichroic mirror 410 as an example of the mixing optical system 40. In addition, similar to the light source device 1B according to the second embodiment, the first light source unit 10-1 is arranged at the second inlet 300M2 provided on the side surface of the light tunnel 30, and the second light source unit 10-2 is arranged at the first inlet 300M1 provided at the end 300T2 of the light tunnel 30. A window plate 4 is arranged at the other end 300T1 of the light tunnel 30. As the material of the window plate 4, for example, quartz glass or the like that is transparent at least to the wavelength of the third ultraviolet ray L3 is used.

[0059] FIG. 20 is a plan view of the irradiation device 1000 viewed from the bottom surface, and FIG. 21 is a perspective view of the irradiation device 1000 viewed from the side of the bottom surface. In FIGS. 20 and 21, the bottom plate 3 of the irradiation device 1000 and the window plate 4 of the light source device 1C are omitted. As shown in FIGS. 20 and 21, the light tunnel 30 of the light source device 1C has its interior partitioned into a plurality (four in this embodiment) of cylindrical bodies 300 by a partition unit 60 composed of a plurality of reflectors 61. Each cylindrical body 300 of this embodiment has the same configuration as the cylindrical bodies 300 of the first and second embodiments. That is, each cylindrical body 300 is cylindrical with a constant cross-sectional area and cross-sectional shape in the axial direction, and the cross-sectional shape is rectangular. Note that the cross-sectional shape of the cylindrical body 300 is not limited to rectangular. Also, the plurality of cylindrical bodies 300 provided in the light tunnel 30 may have the same cross-sectional area as each other, or may have different cross-sectional areas from each other, or may have different cross-sectional shapes from each other.

[0060] As shown in FIG. 19 above, in the irradiation device 1000, the second ultraviolet ray L2 is introduced into each of the plurality of cylindrical bodies 300 from the second light source unit 10-2 disposed at the first inlet 300M1. Further, the irradiation device 1000 includes a first light source unit 10-1 and a dichroic mirror 410 for each of the plurality of cylindrical bodies 300. On the side surface of the light tunnel 30, a second inlet 300M2 is opened for each of the plurality of cylindrical bodies 300, the first light source unit 10-1 is disposed at each second inlet 300M2, and the first ultraviolet ray L1 of the first light source unit 10-1 is introduced from each second inlet 300M2. Inside each cylindrical body 300, the first ultraviolet ray L1 is mixed with the second ultraviolet ray L2 by passing through the dichroic mirror 410 while undergoing multiple reflections, and the third ultraviolet ray L3 obtained by the mixing, the first ultraviolet ray L1, and the second ultraviolet ray L2 reach the end 300T1 while undergoing multiple reflections and are emitted to the outside. Therefore, the areas irradiated by the third ultraviolet ray L3 of the individual cylindrical bodies 300 all have uniform illuminance and spectral distribution. And since these areas are adjacent to form the irradiation area D of the irradiation device 1000, it is possible to maintain the uniformity of the illuminance and spectral distribution while expanding the area of the irradiation area D.

[0061] In addition, since the interior of the light tunnel 30 is partitioned into a plurality of cylindrical bodies 300, the cross-sectional area of each cylindrical body 300 becomes smaller, and the number of multiple reflections of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 inside each cylindrical body 300 increases. Therefore, while maintaining the illuminance and the uniformity of the spectral distribution in the irradiation area D, the overall length of the light tunnel 30 can be shortened.

[0062] Next, the details of the irradiation device 1000 will be described. As described above, the light source device 1C includes a partitioning unit 60 that partitions the interior of the light tunnel 30 into a plurality of cylindrical bodies 300 inside the light tunnel 30. In the present embodiment, for the fixation between the respective parts of the partitioning unit 60 and the fixation of the partitioning unit 60 to the light tunnel 30, an insertion structure between members is used instead of fastening members such as screws and bolts.

[0063] FIG. 22 is an assembly diagram of the partitioning unit 60 and the light tunnel 30. As shown in the figure, the partitioning unit 60 includes two rectangular reflectors 61, 61, and each of the reflectors 61, 61 is formed with an insertion slit 62 that extends along the central axis of the respective reflector 61 to the center 61O of the reflector 61. Then, by inserting the two reflectors 61 into each other's insertion slits 62, the partitioning unit 60 that partitions the light tunnel 30 into four cylindrical bodies 300 is assembled by the insertion structure.

[0064] Further, the light tunnel 30 includes two reflectors 31, 31 that are bent in an L shape in plan view, and the two reflectors 31, 31 are fastened to each other in a facing posture to assemble the hollow light tunnel 30 having a rectangular cross-section. Regarding the fastening structure of the reflectors 31, 31 in detail, on the edge 31A of the two reflectors 31, 31, there are provided a bent piece 32 that is bent outward in an L shape and a contact piece 33 that contacts the bent piece 32 of the other reflector 31. Then, the bent piece 32 of one reflector 31 and the contact piece 33 of the other reflector 31 are firmly fastened by fastening means such as bolts and screws.

[0065] In addition, a plurality of insertion pieces 63 are formed at the edges 61A of the reflecting plates 61, 61 that constitute the partition unit 60. On the other hand, in the light tunnel 30, insertion holes 34 into which the insertion pieces 63 of the partition unit 60 are inserted are also formed in the plane of the two reflecting plates 31, 31. Then, the two reflecting plates 31, 31 are fastened in a state where the partition unit 60 is sandwiched so that the insertion pieces 63 of the partition unit 60 are inserted into the insertion holes 34 of the reflecting plates 31, 31. By doing so, the partition unit 60 is fixed to the light tunnel 30 by an insertion structure.

[0066] In this way, an insertion structure is used for fixing the reflecting plates 61 of the partition unit 60 to each other and for fixing the partition unit 60 to the light tunnel 30, instead of fastening members such as screws and bolts. As a result, the low-reflection portions due to the fastening members are not included in the inner surfaces of any of the cylindrical bodies 300 of the light tunnel 30, and the loss during multiple reflections of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 can be suppressed.

[0067] In this embodiment, the dichroic mirror 410 is fixed to each cylindrical body 300 by an adhesive. In this case, a flange may be provided at the edge of the dichroic mirror 410, and the flange may be fixed to the reflecting plates 31, 31 of the light tunnel 30 and the reflecting plates 61, 61 of the partition unit 60 by an insertion structure.

[0068] Also, in this embodiment, as shown in FIG. 18 mentioned above, the above-described light tunnel 30 is fixed by fastening a fixing piece 70 to the contact piece 33 for fastening the reflecting plates 31, 31 to each other and then fastening this fixing piece 70 to the external housing 2.

[0069] Here, similar to the light source device 1A of the first embodiment and the light source device 1B of the second embodiment, as shown in FIG. 18, the irradiation device 1000 includes a first cooling unit 50-1 that cools the first light source unit 10-1 and a second cooling unit 50-2 that cools the second light source unit 10-2. In this embodiment, the first light source unit 10-1 is fixed to the first cooling unit 50-1, and the second light source unit 10-2 is fixed to the second cooling unit 50-2. And both the first cooling unit 50-1 and the second cooling unit 50-2 are fixed to the outer casing 2 instead of the light tunnel 30. Therefore, the loads of the first cooling unit 50-1, the second cooling unit 50-2, the first light source unit 10-1, and the second light source unit 10-2 are not applied to the light tunnel 30. Thereby, even when a material with low rigidity such as an aluminum plate is used for the reflectors 31, 31 of the light tunnel 30 and the reflectors 61, 61 of the partition unit 60, the light tunnel 30 and the partition unit 60 are prevented from being bent or damaged. In addition, for example, since it is not necessary to increase the rigidity of the light tunnel 30 by the partition unit 60, the plate thickness of each of the reflectors 61, 61 of the partition unit 60 can be reduced, and the influence of the shadow generated in the irradiation area D by the plate thickness of each of the reflectors 61, 61 on the illuminance and the spectral spectrum can be suppressed.

[0070] In this embodiment, a water-cooled unit is used for the first cooling unit 50-1, and an air-cooled unit is used for the second cooling unit 50-2. More specifically, as shown in FIG. 18, the first cooling unit 50-1 includes a water-cooled heat sink 501A through which cooling water circulates inside, an introduction port 501B for introducing the cooling water into the water-cooled heat sink 501A, and a drain port 501C for draining the cooling water from the water-cooled heat sink 501A. The first light source unit 10-1 is fixed to the water-cooled heat sink 501A. Such a first cooling unit 50-1 is provided with a plurality of support columns 501D on the water-cooled heat sink 501A, and each support column 501D is fixed to a first support plate 80 fixed to the side surface of the outer casing 2, whereby the first cooling unit 50-1 is fixed to the outer casing 2.

[0071] FIG. 23 is a perspective view of the irradiation device 1000 viewed from the upper side. In the figure, the second support plate 81 included in the irradiation device 1000 is omitted. As shown in Fig. 18, the second cooling unit 50-2 includes one or more (two in this embodiment) air-cooled heat sinks 502A provided with a large number of radiation fins, and an axial flow fan 502B that blows cooling air onto the air-cooled heat sink 502A. In the second cooling unit 50-2, as shown in Figs. 18 and 23, the air-cooled heat sink 502A is fixed to the outer casing 2 by a support rod 502C, and as shown in Fig. 18, the axial flow fan 502B is fixed to a second support plate 81 fixed to the upper surface portion 2B of the outer casing 2, whereby the second cooling unit 50-2 is fixed to the outer casing 2.

[0072] As described in the second embodiment, since the first light source unit 10-1 includes LEDs that emit ultraviolet rays having a shorter wavelength than those of the second light source unit 10-2, it consumes more power and generates more heat. In addition, the first light source unit 10-1 of this embodiment emits the second ultraviolet ray L2 to be introduced into each of the plurality of cylindrical bodies 300, so that the number and density of ultraviolet LEDs are larger than those of the first light source units 10-1 of the first and second embodiments, and the heat generation also increases significantly. On the other hand, in this embodiment, a water-cooling method that can achieve higher cooling performance than the air-cooling method is used for the cooling method of the first light source unit 10-1. Therefore, even if the first light source unit 10-1 generates a large amount of heat, it can be sufficiently cooled, and a decrease in the efficiency of the first light source unit 10-1 due to heat generation can be suppressed.

[0073] On the other hand, in this embodiment, as shown in Fig. 20, the second light source unit 10-2 includes a plurality of LED substrate groups 100G, each LED substrate group 100G corresponds one-to-one to one of the plurality of cylindrical bodies 300, and the second ultraviolet ray L2 emitted from one corresponding LED substrate group 100G is introduced into one cylindrical body 300.

[0074] Fig. 24 is a plan view of the LED substrate group 100G. One LED substrate group 100G includes a plurality (six in this embodiment) of LED substrates 101. In-plane fastening holes 101H are provided in each LED substrate 101, and fastening members such as screws are inserted through the holes 101H and fastened to a base plate 102 (FIG. 20). Note that heat generated from the LEDs is dissipated to an air-cooled heat sink by applying heat-conductive grease or sandwiching a heat-conductive sheet between the LED substrate 101 and the base plate 102. One LED substrate group 100G corresponds to the LED substrate 100 of the first and second embodiments, and includes four types of ultraviolet LEDs, namely, a third ultraviolet LED, a fourth ultraviolet LED, a fifth ultraviolet LED, and a sixth ultraviolet LED, in the same manner as the LED substrate 100. The arrangement of each ultraviolet LED on the LED substrate 100 is appropriate.

[0075] The planar shape and dimensions of each LED substrate 101 are all the same (i.e., congruent shapes), and the LED substrate 101 of this embodiment includes a rectangular portion 103 and an engaging shape portion 104. The rectangular portion 103 is a rectangular portion in the plan view of the LED substrate 101.

[0076] On the other hand, the engaging shape portion 104 is a portion continuous with one side of the rectangular portion 103. The planar shape of this engaging shape portion 104 is symmetric with respect to the center line 101C of the LED substrate 101, and a receiving portion δ, which is a gap having a shape corresponding to the contour of the engaging shape portion 104, is formed between the engaging shape portion 104 and the engaging shape portion 104 of another adjacent LED substrate 101 arranged side by side. In FIG. 24, the shape of the receiving portion δ is indicated by a double-dashed line.

[0077] By providing each LED substrate 101 with the rectangular portion 103, a plurality of LED substrates 101 can be arranged side by side with substantially no gap, and the light-emitting region of the second light source unit 10-2 can be easily expanded in the horizontal direction. Further, by engaging the engaging shape portion 104 of another LED substrate 101 in an upside-down posture with each receiving portion δ formed by two horizontally arranged LED substrates 101, the light-emitting region of the second light source unit 10-2 can be easily expanded in the vertical direction.

[0078] Here, the engaging shape portion 104 of the present embodiment includes a protruding portion 104A and a shoulder portion 104B. The planar shape of the shoulder portion 104B is inclined at a predetermined angle α (α = 30 degrees in the present embodiment) from the rectangular portion 103 to the protruding portion 104A with respect to the center line 101C. Also, the planar shape of the protruding portion 104A is a V-shaped formed by two sides 104A1 whose tip ends are inclined at the same angle α as the shoulder portion 104B. By each LED substrate 101 including such an engaging shape portion 104, the variations in the arrangement of the LED substrates 101 can be increased. Specifically, depending on the way of engaging the engaging shape portions 104 of the plurality of LED substrates 101 with each other, for example, as shown in the arrangement mode A of FIG. 25, two LED substrates 101 that are vertically inverted can be arranged linearly in the vertical direction, or as shown in the arrangement mode B of FIG. 25, a plurality of LED substrates 101 can be arranged in a star shape.

[0079] As described above, the light source device 1C of the present embodiment includes a partitioning unit 60 that partitions the inside of the light tunnel 30 into a plurality of cylindrical bodies 300. According to this configuration, in the area irradiated by each cylindrical body 300, the illuminance and the spectral distribution are uniform. Therefore, when these areas are adjacent to form the irradiation area D, while expanding the area of the irradiation area D, the illuminance is increased compared to the light source device 1B of the second embodiment, and the uniformity of the spectral distribution is maintained. The irradiation device 1000 including such a light source device 1C achieves an illuminance of about three times that of the light source device 1B (about 150 mW / cm 2 ).

[0080] In addition, since the inside of the light tunnel 30 is partitioned into a plurality of cylindrical bodies 300, the cross-sectional area of each cylindrical body 300 becomes smaller, and the number of multiple reflections of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 inside each cylindrical body 300 increases. As a result, while maintaining the uniformity of the illuminance and the spectral distribution in the irradiation area D, the overall length of the light tunnel 30 can be shortened.

[0081] In the light source device 1C of the present embodiment, the partitioning unit 60 includes a plurality of reflectors 61, and the plurality of reflectors 61 are fixed to each other by an insertion structure. According to this configuration, the low-reflection portions due to the fastening members are not included in the inner surfaces of any of the cylindrical bodies 300, and the loss during the multiple reflections of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 can be suppressed.

[0082] The irradiation device 1000 of the present embodiment includes a light source device 1C, a first cooling unit 50-1 that cools the first light source unit 10-1, a second cooling unit 50-2 that cools the second light source unit 10-2, and an external housing 2 that houses the light source device 1C, and the first cooling unit 50-1 and the second cooling unit 50-2 are fixed to the external housing 2. According to this configuration, even when a material with low rigidity such as an aluminum plate is used for the reflectors 31, 31 of the light tunnel 30 and the reflectors 61, 61 of the partitioning unit 60, it is possible to prevent the light tunnel 30 and the partitioning unit 60 from being bent or damaged. In addition, for example, since it is not necessary to increase the rigidity of the light tunnel 30 by the partitioning unit 60, the thickness of each of the reflectors 61, 61 of the partitioning unit 60 can be reduced, and the influence of the shadow generated in the irradiation area D by the thickness of each of the reflectors 61, 61 on the illuminance and the spectral spectrum can be suppressed.

[0083] In the third embodiment, the irradiation device 1000 may include a plurality of light source devices 1A, a plurality of light source devices 1B, or a plurality of light source devices 1C, and the area of the irradiation area D may be expanded by housing the plurality of light source devices 1A, the plurality of light source devices 1B, or the plurality of light source devices 1C in the external housing 2 in a state where the light tunnels 30 of each other are connected in contact.

[0084] Further, instead of the light source device 1B according to the second embodiment, the irradiation device 1000 may include elements of the plurality of light source devices 1A according to the first embodiment. In this case, for example, as shown in FIG. 26, an irradiation device 1000A may be configured in which a plurality (two in the illustrated example) of light source devices 1A are arranged side by side, and the light tunnels 30 of the respective light source devices 1A are connected in a state of being in contact with each other. Further, for example, as shown in FIG. 27, an irradiation device 1000B may be configured in which a pair of light source devices 1A are arranged opposite to each other, and the light tunnels 30 of the respective light source devices 1A are connected in a state of being in contact with each other. Further, the irradiation device 1000A and the irradiation device 1000B may include an outer housing 2, each light source device 1A may be housed in the outer housing 2, and the first cooling unit 50-1 and the second cooling unit 50-2 may be fixed to the outer housing 2.

[0085] 4. Modification The modified forms added to each of the embodiments exemplified above are exemplified below. Two or more forms arbitrarily selected from the following examples may be appropriately combined within a range that does not conflict with each other.

[0086] The light source control device may dynamically change the relative intensity of the spectral spectrum of the third ultraviolet ray L3 by dimming each of the various types of ultraviolet LEDs included in the first light source unit 10-1 and the second light source unit 10-2.

[0087] A light source system that irradiates a larger irradiation area D may be configured by installing a plurality of light source devices 1A or a plurality of light source devices 1B side by side. Further, the irradiation area D may be enlarged by increasing the cross-sectional size of the light tunnel 30 of the light source device 1A or the light source device 1B.

[0088] In each of the first light source unit 10-1 and the second light source unit 10-2, a configuration may be adopted in which a higher illuminance is obtained by mounting more ultraviolet LEDs on the LED substrate 100 at a high density.

[0089] The ultraviolet LEDs included in each of the first light source unit 10-1 and the second light source unit 10-2 may be bare chip type instead of package type. In this case, a substrate on which the bare chip type ultraviolet LED is mounted may be used as the LED substrate 100 described above.

[0090] The wavelength range of the semiconductor light sources included in each of the first light source unit 10-1 and the second light source unit 10-2 is not limited to the range of 325 nm to 405 nm described in the first embodiment and the second embodiment. That is, the wavelength range of the semiconductor light source may be in the UV-C range less than 300 nm, the visible light range, or the infrared range.

Explanation of Reference Numerals

[0091] 1A…Light source device, 1B…Light source device, 1C…Light source device, 10-1…First light source unit, 2…External housing, 10-2…Second light source unit, 50-1…First cooling unit, 50-2…Second cooling unit, 30…Light tunnel, 30A…Inner surface, 40…Hybrid optical system, 60…Partition unit, 61…Reflector, 100…LED substrate, 110…Mounting substrate, 110R…Central region, 120…Reflector, 300…Cylindrical body, 300M1…First inlet, 300M2…Second inlet, 300Q…Outlet, 400…Beam splitter, 410…Dichroic mirror, 1000…Irradiation device, D…Irradiation area, K1…First optical axis, K2…Second optical axis, L1…First ultraviolet ray, L2…Second ultraviolet ray, L3…Third ultraviolet ray.

Claims

1. a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and configured to emit second ultraviolet light having at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet light; a light tunnel that guides each of the first ultraviolet light and the second ultraviolet light; a mixing optical system provided inside the light tunnel, mixing the first ultraviolet light and the second ultraviolet light to obtain a third ultraviolet light; a partition unit that partitions the inside of the light tunnel into a plurality of cylinders, The inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet ray, the second ultraviolet ray, and the third ultraviolet ray, and the third ultraviolet ray mixed by the mixing optical system is emitted from the light tunnel. Light source device.

2. a light source unit that emits ultraviolet light having a shorter wavelength out of the first light source unit and the second light source unit, and the mixing optical system are provided for each of the plurality of cylinders; A second inlet is opened on a side surface of the light tunnel for each of the plurality of cylinders, and the light source unit is disposed in each of the second inlets. The light source device according to claim 1 .

3. The partition unit comprises: Equipped with a plurality of reflectors, The plurality of reflectors are fixed to each other by an insert structure. The light source device according to claim 1 .

4. a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and configured to emit second ultraviolet light having at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet light; a light tunnel that guides each of the first ultraviolet light and the second ultraviolet light; a mixing optical system provided inside the light tunnel, for mixing the first ultraviolet light and the second ultraviolet light to obtain a third ultraviolet light, an inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet light, the second ultraviolet light, and the third ultraviolet light, and the third ultraviolet light mixed by the mixing optical system is emitted from the light tunnel; the second light source unit includes a plurality of LED substrates that emit the second ultraviolet light, Each of the plurality of LED boards includes a rectangular portion and an engagement portion, The rectangular portion is a portion having a rectangular shape in a plan view, The engagement portion is a portion that is continuous with one side of the rectangular portion, The engaging shape portion of another LED board in an upside-down position engages with a gap between the engaging shape portions of two adjacent LED boards. Light source device.

5. a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and configured to emit second ultraviolet light having at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet light; a light tunnel that guides each of the first ultraviolet light and the second ultraviolet light; a mixing optical system provided inside the light tunnel, for mixing the first ultraviolet light and the second ultraviolet light to obtain a third ultraviolet light, an inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet light, the second ultraviolet light, and the third ultraviolet light, and the third ultraviolet light mixed by the mixing optical system is emitted from the light tunnel; the light tunnel includes a hollow cylinder extending linearly and having an exit port for emitting the third ultraviolet light opening at one end, a first inlet for introducing one of the first ultraviolet ray and the second ultraviolet ray is opened at the other end of the cylindrical body; a second inlet for introducing the other of the first ultraviolet ray and the second ultraviolet ray is opened on a side surface of the cylindrical body; Of the first light source unit and the second light source unit, the light source unit that emits ultraviolet light having a shorter wavelength is disposed at the second inlet, Of the first light source unit and the second light source unit, the light source unit disposed at the second inlet includes a reflecting portion that reflects ultraviolet light emitted by the other light source unit. Light source device.

6. The first light source unit and the second light source unit each include The first ultraviolet light and the second ultraviolet light are emitted within a radiation angle range in which multiple reflection occurs on an inner surface of the light tunnel. The light source device according to any one of claims 1 to 5.

7. The mixing optical system includes a dichroic mirror. The light source device according to any one of claims 1 to 5.

8. A plurality of light source devices according to any one of claims 1 to 5; an external housing that houses the plurality of light source devices whose light tunnels are connected to each other; An irradiation device comprising:

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