Sample holder
The sample holder's innovative design with a recessed adhesive layer and extended current path addresses dielectric breakdown issues, ensuring high durability and adsorptive force by minimizing dielectric breakdown and stress from thermal cycles.
JP7746199B2Active Publication Date: 2025-09-30KYOCERA CORP
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Patent Information
- Application Number
- JP2022038302
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2022-03-11
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2042-03-11
AI Technical Summary
Technical Problem
Dielectric breakdown in sample holders occurs due to current flowing through the insulating portion, reducing the clamping force of the electrode, especially when the current path is short, leading to reduced durability.
Method used
The sample holder design includes a ceramic substrate with a recessed area for the adhesive layer, a cylindrical body, and a power supply terminal connected to an electrode, with a longer current path and additional adhesive layers to prevent dielectric breakdown, enhancing durability.
Benefits of technology
The design increases the distance of the current path, reducing the risk of dielectric breakdown and maintaining the adsorptive force of the electrode, thus improving the sample holder's durability and thermal stability.
✦ Generated by Eureka AI based on patent content.
Abstract
To improve durability of a sample holder.SOLUTION: A sample holder comprises a ceramic substrate, an electrode, a cylindrical body, a first adhesive layer, a feeding terminal, a metal member, and a second adhesive layer. The ceramic substrate has a first surface and a second surface opposite to the first surface, and the second surface as a recess. The electrode is located inside the ceramic substrate. The cylindrical body has a third surface facing the second surface. The first adhesive layer is located in contact with at least the second surface and the third surface. The feeding terminal is located inside the cylindrical body and connected with the electrode. The metal member has a fourth surface facing the second surface and is located surrounding an outer peripheral surface of the cylindrical body. The second adhesive layer is located in contact with the outer peripheral surface, second surface, and fourth surface. The recess is located partially overlapping the third surface in plan perspective seen toward the first surface, and the first adhesive layer is located in the recess.SELECTED DRAWING: Figure 1
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