Drum coupler support module

Abstract

To provide a coupler support module to support a coupler for a drum container to be coupled for liquid flow to a drum container receiving a liquid in various types, more specifically a coupler support module for a drum container allowed to support a coupler to be inclined to an angle of a discharge port of a drum container.SOLUTION: A coupler support module for a drum container according to the present invention is allowed to tiltably support a coupler 300 to which a fluid line is coupled using a tilt joint 140, so that the coupler when vertically descending toward a drum container can be stably inserted, while being inclined to an angle of a discharge port of the drum container, into the discharge port. Thus, application is possible to an automated device to automatically couple a coupler to a drum container into effective use.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a coupler support module that supports a drum container coupler that is connected to a drum container in a manner that allows liquid to flow therethrough, and more particularly to a drum container coupler support module that supports the coupler so that it can be tilted to match the angle of the drum container's outlet. [Background technology]

[0002] High-purity and highly corrosive liquids or chemicals are commonly used in industries such as semiconductor processing and chemical manufacturing. For example, various chemicals are used for each process in semiconductor manufacturing, such as PR, BARC, HMDS, thinner, and developer in the photo process, slurry in the CMP process, hydrofluoric acid, BHF, stripper, sulfuric acid, hydrogen peroxide, ammonia, hydrochloric acid, and phosphoric acid in the wet process, and TEOS and copper plating solution in the thin film process.

[0003] In particular, in semiconductor manufacturing, the number of manufacturing processes has increased recently as semiconductor devices have become increasingly highly integrated. As a result, a large amount of residue or contaminants remain on the surface after each process, making the cleaning process for removing these residues even more important. Currently, semiconductor device manufacturing processes consist of approximately 400 manufacturing steps, of which at least 20% consist of cleaning and surface treatment processes to prevent wafer contamination. Contaminants generated during semiconductor device manufacturing processes have a particularly significant impact on the performance, reliability, and yield of the device by causing distortion of the device's structural shape and degrading its electrical characteristics, and therefore must be removed without fail.

[0004] Currently, the main contaminants generated on silicon substrates during semiconductor manufacturing processes are particles, organic contaminants, metal contaminants, native oxide films, etc., which have a significant impact on product yield, quality, and reliability. There are two methods for removing these contaminants: wet cleaning and dry cleaning. Among these, wet cleaning is the most widely used cleaning method during semiconductor device manufacturing. Wet cleaning has the advantages of being easily rinsed with deionized water (DI water), leaving very little residue after drying, and being able to use a variety of chemical solutions in appropriate amounts depending on the contaminants to be removed.

[0005] Wet cleaning processes use various liquids, such as hydrofluoric acid, which are usually stored and transported in drums that have excellent physical properties such as chemical resistance, durability, and impact resistance due to quality and safety concerns. Such drums have been developed and are in use in various structures, as disclosed in Patent Document 1 and elsewhere.

[0006] When connecting a drum container to a pump or other device in a process line in order to use the process liquid stored in the drum container, great care must be taken. Liquids such as hydrofluoric acid are extremely harmful to the human body, and leakage can result in loss of life.

[0007] Therefore, although devices that automate the process of connecting couplers to drums have been developed and used, they are lacking in performance.Drums often have different shapes and are arranged in various directions, so there is a need for a drum coupler support module that can insert and fasten couplers in the correct position and direction in accordance with such directions and angles. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] U.S. Patent No. 6,045,000 (April 4, 2000) Summary of the Invention [Problem to be solved by the invention]

[0009] The present invention has been devised to solve the above-mentioned need, and its object is to provide a drum container coupler support module that supports a drum container coupler so that the coupler can be tilted to match the angle of the drum container outlet, so that the coupler can be automatically attached and detached to and from a drum container containing liquid. [Means for solving the problem]

[0010] In order to achieve the above object, the present invention provides a coupler support module for a drum container that is connected to a coupler transfer unit that moves back and forth and left and right and moves up and down, and supports a coupler that discharges liquid contained inside a drum container, and is characterized by including: a base frame that is connected to the coupler transfer unit and moves up and down and horizontally; a slide frame that is installed to be able to slide horizontally relative to the base frame; a tilt support part that is connected to the slide frame; and a tilt joint that has a tilt part that is connected to the tilt support part so that the tilt angle can be adjusted in multiple directions relative to the tilt support part; and a coupler holder that is inserted into a discharge port of a drum container to be connected to the coupler that discharges liquid inside the drum container and supports the coupler, and is connected to the tilt part of the tilt joint. [Effects of the Invention]

[0011] The drum coupler support module according to the present invention tiltably supports a coupler connected to a fluid line using a tilt joint, so that when the coupler descends vertically toward the drum, it can be tilted to match the angle of the drum outlet and stably inserted into the outlet. Therefore, it can be effectively used in an automated device that automatically connects a coupler to a drum.

[0012] In addition, the drum coupler support module of the present invention can align the coupler while taking into consideration changes in the horizontal position during the process of inserting the coupler at an angle that matches the angle of the drum outlet, thereby providing the advantage of enabling safer and more efficient work execution. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a front view of a coupling device in which a drum coupler support module according to an embodiment of the present invention is used. [Figure 2] FIG. 2 is a right side view of the coupling device shown in FIG. 1. [Figure 3] FIG. 2 is a plan view of the coupling device shown in FIG. 1. [Figure 4] FIG. 2 is a perspective view of a portion of the drum coupler support module shown in FIG. 1. [Figure 5] FIG. 2 is a bottom perspective view of a portion of the drum coupler support module shown in FIG. 1. [Figure 6] FIG. 2 is a cross-sectional front view of a portion of the drum coupler support module shown in FIG. 1. [Figure 7] 2 is a diagram illustrating the operation of the drum coupler support module shown in FIG. 1. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0014] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The drum coupler support module according to the present invention will be described in detail below with reference to the accompanying drawings.

[0015] FIG. 1 is a front view of a coupling device using a drum container coupler support module according to one embodiment of the present invention, FIG. 2 is a right side view of the coupling device shown in FIG. 1, and FIG. 3 is a plan view of the coupling device shown in FIG. 1.

[0016] The coupling device using the drum coupler support module of this embodiment automatically connects and disconnects the fluid line 20 to the drum 10 storing fluids such as chemicals, significantly reducing the time required to connect or disconnect the fluid line 20 to the drum 10 and significantly reducing the risk of safety accidents in which workers are exposed to the liquid stored in the drum 10.

[0017] The drum 10 has an internal pipe 11 extending into the interior where a liquid is stored. The internal pipe 11 has a coupler coupling 12 exposed to the outside from the top of the drum 10, and an internal pipe 13 extending from the coupler coupling 12 to the bottom of the drum 10. An outlet 14 is provided in the center of the coupler coupling 12. After the coupler 300 is connected to the drum 10, when a pump connected to the fluid line 20 is operated, the liquid stored in the drum 10 is discharged to the outside via the internal pipe 11, the coupler 300, and the fluid line 20.

[0018] The drum receiving unit 200 includes a base 210, a base rotation mechanism 220, a drum support mechanism 230, and a base horizontal transfer mechanism 240. The drum receiving unit 200 supports the drum 10, rotates it about a vertical rotation axis (Z-axis), and transfers it horizontally in the Y-axis direction.

[0019] The base 210 supports the drum 10. A weight sensor may be installed on the base 210. When the drum 10 is placed on the base 210, the weight sensor detects it and provides a detection signal to the control unit 800. The control unit 800 can confirm that the drum 10 has been loaded onto the base 210 from the detection signal of the weight sensor, and then perform the operations after the drum 10 has been loaded.

[0020] The base rotation mechanism 220 is installed between the base 210 and the base horizontal transfer mechanism 240. The base rotation mechanism 220 rotates the base 210 about a vertical rotation axis. By rotating the base 210 with the base rotation mechanism 220, the angular displacement of the drum container 10 placed on the base 210 can be adjusted in various ways. The base rotation mechanism 220 can be connected to the base 210 and can rotate the base 210 about a vertical rotation axis. Various structures of the base rotation mechanism 220 can be used.

[0021] The platform horizontal transfer mechanism 240 includes a guide rail arranged on the base 110 in the Y-axis direction.

[0022] As shown in Figures 1 to 4, the coupler 300 includes a head portion 310 that is connected to the coupler connection portion 12 of the drum container 10, and an insertion tube 320 that extends from the head portion 310 so as to be inserted into the central discharge port 14 of the coupler connection portion 12.

[0023] The coupling structure for maintaining a stable and tight contact between the coupler 300 and the coupler coupling portion 12 of the drum container 10 is not limited to the illustrated example and can be modified in various ways. A fluid detection sensor for detecting the flow rate of a fluid passing through the coupler 300 is coupled to one side of the coupler 300. The coupler 300 is supported so as to be tiltable by the coupler support module 100 of the present invention and moved by the coupler transport unit 500. In addition, a pair of insertion grooves are formed on the outer surface of the head portion 310 of the coupler 300 for coupling with the coupler holder 410 of the coupler support module 100 of this embodiment.

[0024] 1 to 3, the drum container coupler support module according to this embodiment is used by being installed on a housing-type base 110 formed to accommodate a drum.

[0025] A coupler transfer unit 500 is installed on the base 110. The coupler transfer unit 500 is configured to transfer the drum container coupler support module of the present invention in the front-to-back, left-to-right, and up-and-down directions relative to the base 110. That is, the drum container coupler support module of the present invention is installed on the coupler transfer unit 500 and is transferred horizontally and up-and-down by the coupler transfer unit 500.

[0026] The drum coupler support module of this embodiment includes a base frame 120, a slide frame 130, a tilt joint 140, and a coupler holder 410.

[0027] The base frame 120 is coupled to the coupler transport unit 500. As a result, the base frame 120 is transported horizontally and vertically by the coupler transport unit 500. Once the base frame 120 is installed on the coupler transport unit 500, the coupler 300 can be transported to any desired position.

[0028] The slide frame 130 is installed so as to be able to slide horizontally relative to the base frame 120. The slide frame 130 is configured to take into consideration the tilted state of the drum coupler coupling portion 12. Taking into consideration that the horizontal position of the coupler holder 410 that holds the coupler 300 changes during the process of inserting the coupler 300 into the drum coupler coupling portion 12, the slide frame 130 is configured to accommodate such horizontal movement of the coupler holder 410.

[0029] In this embodiment, the slide frame 130 includes a first slide member 131, a second slide member 132, a first stopper 133, and a second stopper 134.

[0030] The first slide member 131 is coupled to the base frame 120 so that it can slide in a first direction, which is a horizontal direction. In this embodiment, the first direction is the X direction with reference to FIG. 3. The second slide member 132 is coupled to the first slide member 131 so that it can slide in a second direction, which is a horizontal direction perpendicular to the first direction. In this embodiment, the second direction is the Y direction with reference to FIG. 3. The tilt joint 140 is coupled to the second slide member 132 of the slide frame 130. As a result, the tilt joint 140 is installed by the slide frame 130 so that it can freely slide in the first and second directions with respect to the base frame 120. In this way, a guide rail, a ball bush, or other configuration can be used to install the first slide member 131 and the second slide member 132 so that they can slide in the first and second directions, respectively. In this embodiment, a guide rail is used as shown in FIGS. 4 and 5.

[0031] The first stopper 133 operates to allow or prevent the first slide member 131 from sliding in the first direction. In this embodiment, the first stopper 133 is formed in a cylindrical shape. When the first stopper 133 presses against the guide rail of the first slide member 131, the first slide member 131 is prevented from sliding in the first direction and is fixed. When the cylindrical first stopper 133 releases the pressure on the guide rail of the first slide member 131, the first slide member 131 becomes freely slidable in the first direction. Similarly, the second stopper 134 operates to allow or prevent the second slide member 132 from sliding in the second direction. In this embodiment, the second stopper 134 is also formed in a cylindrical shape. When the second stopper 134 presses against the guide rail of the second slide member 132, the second slide member 132 is prevented from sliding in the second direction and is fixed. When the cylindrical second stopper 134 releases the pressure on the guide rail of the second slide member 132, the second slide member 132 becomes freely slidable in the second direction. By the operation of the first stopper 133 and the second stopper 134, the tilt joint 140 is either allowed to slide horizontally relative to the base frame 120, or is fixed and prevented from sliding.

[0032] As described above, the tilt joint 140 is connected to the second slide member 132 of the slide frame 130. The tilt joint 140 includes a tilt support portion 141 and a tilt portion 142. The tilt support portion 141 is connected to the first slide member 131 so as to be rotatable about a vertical rotation axis. The tilt portion 142 is connected to the tilt support portion 141 so as to support tilt angles that can be adjusted in multiple directions. The tilt support portion 141 and the tilt portion 142 are connected to each other in the form of a universal joint. In this embodiment, the tilt joint 140 further includes a first joint 143 and a second joint 144 to form a universal joint. The first joint 143 is installed on the tilt support portion 141 so as to be tilted about a horizontal rotation axis. The second joint 144 is installed on the first joint 143 so as to be tilted about a rotation axis different from the rotation axis of the first joint 143, and is connected to the tilt portion 142. With this structure, the angle of tilt section 142 can be adjusted so that it can be tilted in any direction relative to tilt support section 141.

[0033] The coupler rotation module 436 is installed on the second slide member 132 of the slide frame 130. The coupler rotation module 436 adjusts the rotation angle of the tilt joint 140 relative to the second slide member 132. In this embodiment, the coupler rotation module 436 is configured in the form of a motor 437, a driving pulley, a driven pulley, and a belt, and adjusts the angular displacement of the tilt joint 140 as needed. The specific structure of the coupler rotation module 436 can be changed to various other structures other than a belt pulley structure.

[0034] The coupler holder 410 is connected to the tilt portion 142 of the tilt joint 140. The coupler holder 410 is connected to the coupler 300 that is inserted into the discharge port 14 of the drum 10 and discharges the liquid contained inside the drum 10. The coupler holder 410 is configured to support the coupler 300 and operates to assist the coupler 300 in inserting into the discharge port 14 of the drum 10.

[0035] Meanwhile, the tilt joint 140 is configured to vertically align the coupler holder 410 and the coupler 300 by gravity acting on the coupler holder 410 in a free state in which no external force is applied.

[0036] The operation of the drum container coupler support module configured as described above will now be described.

[0037] As shown in Figures 1 to 5, the drum container coupler support module of this embodiment supports the coupler 300 so that the coupler 300 can be tilted to match the angle of the discharge outlet 14 of the drum container 10, and thereby operates so that when the coupler 300 descends toward the drum container 10, the coupler 300 is smoothly and stably inserted into the discharge outlet 14 of the drum container 10.

[0038] First, the drum 10 is loaded onto the base 210 of the drum receiving unit 200 at the loading position. When the drum 10 is loaded, a weight sensor installed on the base 210 detects it and provides a detection signal to the control unit 800. If the drum 10 moves out of position while being placed on the base 210 and is detected by the drum detection sensor, the detection signal is provided to the control unit 800. The control unit 800 then corrects the loading position of the drum 10 on the base 210 by, for example, generating a warning signal.

[0039] Once the drum 10 is stably placed on the base 210, the drum support mechanism 230 is activated to support the drum 10 so that it does not tip over. If the drum 10 is not centered on the base 210, the drum support mechanism 230 aligns the drum 10 to the center of the base 210. After the drum 10 is supported on the drum support mechanism 230, the camera unit 600 captures an image of the top surface of the drum 10 and provides the image to the controller 800. When the camera unit 600 provides the image to the controller 800, the controller 800 calculates coordinates for the position and angle of the coupler coupling part 12, to which the discharge port 14 of the drum 10 is attached. The controller 800 then activates the base rotation mechanism 220 of the drum receiving unit 200 to rotate the drum 10 about the vertical rotation axis, thereby adjusting the angular displacement of the drum 10 for subsequent operations.

[0040] After the photographing unit 600 photographs the drum 10, the plug attaching / detaching unit is activated to detach the plug coupled to the coupler coupling portion 12 of the drum 10 from the drum 10.

[0041] When the stopper is separated from the drum 10, the control unit 800 operates the coupler transfer unit 500 to horizontally transfer the coupler 300 above the discharge port 14 of the drum 10. At this time, the control unit 800 operates the first stopper 133 and the second stopper 134 of the slide frame 130 to prevent the first slide member 131 and the second slide member 132 from sliding.

[0042] Next, the control unit 800 activates the coupler rotation module 436. The control unit 800 analyzes the shape of the outlet 14 of the drum 10 from the image acquired by the photography unit 600, and adjusts the angular displacement of the tilt joint 140 via the coupler rotation module 436 so that the angular displacement of the coupler 300 corresponds to the direction of the outlet 14 of the drum 10. As a result, the angular displacement of the coupler 300 clamped to the coupler holder 410 corresponds to the direction of the outlet 14. If a portion of the coupler 300 is configured to be rotatable relative to the main body of the coupler 300 to prevent twisting of the fluid line 20, only that portion rotates so that each displacement matches the direction of the outlet 14.

[0043] Next, the control unit 800 activates the coupler transfer unit 500 to vertically lower the drum coupler support module according to this embodiment. At this time, the control unit 800 activates the first stopper 133 and the second stopper 134 of the slide frame 130 to maintain a state that allows the first slide member 131 and the second slide member 132 to slide. As the coupler 300, together with the tilt joint 140, descends toward the coupler coupling portion 12 of the drum 10, the insertion tube 320 of the coupler 300 contacts the coupler coupling portion 12 and enters the interior of the discharge port 14. At this time, the reaction force applied to the coupler 300 from the drum 10 tilts the tilt portion 142 of the tilt joint 140 relative to the tilt support portion 141, as shown in FIG. 7 . At this time, the slide frame 130 is free to slide horizontally due to the first slide member 131 and the second slide member 132. Therefore, even if the horizontal displacement of the coupler holder 410 changes in accordance with the inclination of the discharge port 14 as the coupler 300 descends, the first slide member 131 and the second slide member 132 accommodate the change in horizontal displacement of the coupler holder 410. As a result, the first slide member 131 and the second slide member 132 act to relieve internal stress that may occur due to the angle change of the tilt portion 142 as the coupler holder 410 descends, thereby facilitating the insertion of the coupler 300 into the discharge port 14. In addition, damage to the drum 10 and the drum coupler support module can be prevented. As described above, the first slide member 131 and the second slide member 132 increase the degree of freedom of movement of the coupler holder 410, making it possible to effectively handle angle and position changes of the tilt portion 142 that may occur during the descent of the coupler holder 410. In particular, when the horizontal position of the coupler holder 410 is adjusted and fixed by the coupler transfer unit 500 and the coupler holder 410 is moved only in the vertical direction, the angle of the tilt portion 142 often changes.At this time, the first slide member 131 and the second slide member 132, which are in a free sliding state, move passively in accordance with the direction of the force acting on the tilt portion 142, and the position and direction of the coupler 300 naturally change in accordance with the outlet 14. As a result, it is possible to insert the coupler 300 into the outlet 14 with a relatively simple and easy mechanical configuration without using a sophisticated control device or actuator.

[0044] Once the coupler 300 has been inserted into the outlet 14 as described above, the fluid line 20 connected to the coupler 300 and the drum container 10 are connected.

[0045] After the coupler 300 is connected to the drum 10, when a pump connected to the fluid line 20 connected to the coupler 300 is operated, the liquid stored in the drum 10 is discharged to the outside through the built-in pipe 11, the coupler 300, and the fluid line 20. When all the liquid has been discharged from the drum 10, the control unit 800 operates the coupler transfer unit 500 to lift the coupler support module 100, thereby separating the coupler 300 from the drum 10. Even when the coupler holder 410 is lifted by the coupler transfer unit 500, the tilt joint 140 and the slide frame 130 interact with each other, allowing the coupler 300 to naturally come out without applying any external force to the discharge port 14 of the drum 10.

[0046] When the coupler 300 is separated from the drum 10, the tilting portion 142 and the coupler 300 naturally stand upright due to their own weight caused by gravity. When the coupler 300 is completely separated from the discharge port 14, the control unit 800 activates the first stopper 133 and the second stopper 134 to prevent the first sliding member 131 and the second sliding member 132 from sliding. This operation prevents the coupler 300 from moving unnecessarily.

[0047] After the coupler 300 is separated from the drum 10, the drum 10 loaded into the drum receiving unit 200 is transferred to the unloading position and unloaded from the drum receiving unit 200. A new drum 10 is then loaded into the drum receiving unit 200 at the loading position, and the above-described process is repeated. Before the drum 10 is unloaded, a plug may be attached to the discharge port 14 of the drum 10 by the plug attaching / detaching unit.

[0048] As described above, the drum coupler support module 100 of this embodiment tiltably supports the coupler 300 using the tilt joint 140, and the coupler 300 can be lowered and inserted into the outlet 14 of the drum 10 while tilting it to match the angle of the outlet 14. This allows the coupler 300 to be stably connected to the drum 10 without manual intervention by an operator. This also significantly reduces the risk of accidents such as liquid leaking from the drum 10 due to operator error or carelessness.

[0049] Although the present invention has been described above with reference to preferred examples, the scope of the present invention is not limited to these embodiments.

[0050] For example, the slide frame 130 can be modified into various structures, and the first stopper 133 and the second stopper 134 of the slide frame 130 can also have various mechanical structures other than the cylindrical structure.

[0051] Also, the coupler rotation module 436 may have various configurations other than the belt pulley structure.

[0052] Furthermore, the structure of tilt joint 140 may be other than a universal joint, and various other configurations that allow for angle changes of tilt portion 142 relative to tilt support portion 141 can be used.

[0053] Furthermore, the structure of the drum container receiving unit 200 that supports the lower part of the drum container 10 can be modified in various ways.

[0054] Although the liquid discharging operation has been described with one drum 10 placed in the chamber-shaped housing at a time, the drum coupler support module of the present invention can also be applied to liquid discharging operations with multiple drums placed in the housing at once. In this case, the liquid discharging operation can be performed while the coupler transfer unit transfers the couplers to each drum in sequence. [Explanation of symbols]

[0055] 10 drums 11 Built-in tube 12 Coupler connection part 13 Internal Tube 14 Outlet 20 fluid lines 100 Coupler Support Module 120 base frame 130 Slide Frame 131 first slide member 132 second slide member 133 First Stopper 134 Second Stopper 140 Tilt joint 141 Tilt support 142 Tilt section 143 First Joint 144 Second Joint 110 base 200 Drum container receiving unit 210 Pedestal 220 Base rotation mechanism 230 Drum container support mechanism 240 Base horizontal transfer mechanism 300 coupler 310 Head 320 Insertion tube 410 Coupler Holder 436 Coupler Rotation Module 437 Motor 500 Coupler Transfer Unit 600 shooting units 800 control section

Claims

1. A coupler support module for a drum container is connected to a coupler transfer unit that moves back and forth and left and right and moves up and down, and supports a coupler that discharges liquid contained inside the drum container, a base frame coupled to the coupler transport unit and transported in vertical and horizontal directions; a slide frame that is installed so as to be able to slide horizontally relative to the base frame; a tilt joint including a tilt support part connected to the slide frame, and a tilt part connected to the tilt support part so that the tilt angle can be adjusted and supported in multiple directions with respect to the tilt support part; a coupler holder that is inserted into the discharge port of the drum container to connect to and support a coupler that discharges liquid from the drum container, and that is connected to the tilt portion of the tilt joint.

2. The slide frame is a first slide member coupled to the base frame so as to be slidable in a first direction, which is a horizontal direction; 2. The drum container coupler support module according to claim 1, further comprising: a second slide member coupled to the first slide member so as to be capable of sliding in a second direction, which is a horizontal direction perpendicular to the first direction.

3. The slide frame is a first stopper that operates to allow or prevent the first slide member from sliding in the first direction; 3. The drum coupler support module of claim 2, further comprising: a second stopper operable to allow or prevent sliding of the second slide member in the second direction.

4. The tilt joint is installed on the second slide member of the slide frame so as to be rotatable about a rotation axis in the vertical direction, 3. The drum coupler support module of claim 2, further comprising: a coupler rotation module mounted on the second slide member and configured to adjust a rotation angle of the tilt joint relative to the second slide member.

5. 5. The drum container coupler support module according to claim 4, wherein the coupler rotation module rotates the tilt joint based on a control signal so that the coupler coupled to the coupler holder is at an angle corresponding to the discharge opening of the drum container.

6. The drum coupler support module according to any one of claims 1 to 5, wherein the tilt support portion and the tilt portion of the tilt joint are connected to each other in the form of a universal joint.

7. The tilt joint is 7. The drum coupler support module of claim 6, further comprising: a first joint mounted on the tilt support so as to be tilted about a horizontal rotation axis; and a second joint mounted on the first joint so as to be tilted about a rotation axis different from the rotation axis of the first joint and coupled to the tilt section, wherein the tilt section is coupled to the second joint.

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