Mirror drive device, light source device, optical scanning device, correction method
The optical scanner system with equivalent response delay units addresses timing inaccuracies in mirror drive and laser illumination, ensuring precise image projection by correcting response times.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2022-07-06
- Publication Date
- 2026-03-27
AI Technical Summary
Existing optical deflector systems face challenges in accurately correcting the timing of mirror drive and laser beam illumination due to response delays in sensors and varying delays based on operating frequency and ambient temperature, affecting image projection quality.
The system includes an optical scanner with a sensor unit, correction unit, and delay processing unit to detect and correct the response time of the mirror and light source, using units with equivalent response delays to account for variations in driving conditions and temperature.
Accurately corrects the response time of the mirror and light source, ensuring precise image projection regardless of driving conditions or ambient temperature.
Smart Images

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Abstract
Description
Technical Field
[0001] The present invention relates to a mirror driving device for driving a MEMS mirror, a light source device for emitting light from a light source, an optical scanning device including the mirror driving device and the light source device, a method for correcting mirror driving timing, and a method for correcting light source driving timing.
Background Art
[0002] Conventionally, in an optical deflector that scans light to project an image, there is known one having a mirror portion manufactured by MEMS (Micro Electro Mechanical System) technology. At the time of projection, the light source is controlled to be turned on or off according to the displacement of the mirror portion.
[0003] Also, techniques for detecting the delay in the response to the driving signal of the mirror portion and the delay in the response to the control signal of the light source by various sensors and correcting the delay are well known.
[0004] For example, the image projection device of Patent Document 1 includes, inside the housing, an LD module, an optical scanning unit, an optical system, a compensation circuit, an optical sensor, and a temperature sensor. The optical system consists of three reflecting mirrors and a concave mirror.
[0005] The detection unit of the compensation circuit detects the phase shift in the horizontal scanning direction of the laser light and the swing angle variation of the MEMS mirror according to the deviation from the desired value of the first pixel (the pixel detected by the optical sensor in the forward path of the horizontal scanning of the laser light) detected by the optical sensor and the deviation from the desired value of the second pixel (the pixel detected by the optical sensor in the return path of the forward path) detected by the optical sensor (Patent Document 1 / paragraphs 0016, 0026, 0027, 0036, FIGS. 2, 4).
Prior Art Documents
Patent Documents
[0006]
Patent Document 1
[0007] To correct the timing of the mirror's drive and the laser beam's illumination, it is first necessary to detect the laser beam with an optical sensor and adjust the laser beam's illumination timing based on that information. However, the information on the mirror's drive state obtained from the sensor that detects the mirror's drive state includes a delay in the sensor's response.
[0008] Similarly, the timing information obtained from a sensor that detects the timing of laser beam activation includes the response delay of the sensor itself.
[0009] Furthermore, light sensors and sensor circuits have individual response characteristics, and the delay in this response can vary depending on the operating frequency of the device and the ambient temperature. Therefore, these variations can affect the correction of the lighting timing.
[0010] This invention has been made in view of these circumstances, and aims to provide a mirror drive device that can accurately correct the response time between the mirror and the light source, as well as the delay in drive control, regardless of the driving conditions or ambient temperature. [Means for solving the problem]
[0011] To achieve the above objective, the mirror driving device of the present invention is characterized by comprising: an optical scanner having a mirror for scanning light; an optical scanner driving unit that outputs a drive signal to drive the optical scanner; an optical scanner sensor unit that outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner; an optical scanner sensor correction unit having the same response delay time as the optical scanner sensor unit; and a delay processing unit that inputs a delay detection signal to the optical scanner sensor correction unit and calculates the output delay.
[0012] The mirror driving device of the present invention drives an optical scanner to scan light. Here, the mirror driving device comprises an optical scanner sensor unit, an optical scanner sensor correction unit, and a delay processing unit. The optical scanner sensor unit outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner (mirror), so the deflection angle of the mirror in operation can be detected.
[0013] The delay processing unit inputs a delay detection signal to the optical scanner sensor correction unit and calculates the output delay. The optical scanner sensor correction unit has the same response delay time as the optical scanner sensor unit. Here, "same response delay time" is not limited to exactly the same time, but includes substantially the same time.
[0014] By utilizing the delay time calculated by the delay processing unit, the delay in the response time of the optical scanner can be accurately corrected regardless of the driving conditions or ambient temperature.
[0015] Furthermore, the light source device of the present invention is characterized by comprising: a light source; a light source drive unit that outputs a drive signal to the light source to cause it to emit light; a light sensor unit that detects light from the light source and outputs a light sensor signal; a light sensor correction unit that has the same response delay time as the light sensor unit; and a delay processing unit that inputs a delay detection signal to the light sensor correction unit and calculates the output delay.
[0016] The light source device of the present invention has a light source drive unit that outputs a drive signal to the light source to cause it to emit light. The light source device includes a light sensor unit, a light sensor correction unit, and a delay processing unit. The light sensor unit detects light from the light source and outputs a light sensor signal, so the timing of light emission can be detected.
[0017] The delay processing unit inputs a delay detection signal to the optical sensor correction unit and calculates the output delay. Since the optical sensor correction unit has the same response delay time as the optical sensor unit, the delay time calculated by the delay processing unit can be used to accurately correct the response time delay of the light source, regardless of the driving conditions or ambient temperature.
[0018] Furthermore, the optical scanning device of the present invention is An optical scanner having a mirror for scanning light; an optical scanner drive unit that outputs a drive signal to drive the optical scanner; an optical scanner sensor unit that outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner; and an optical scanner sensor correction unit having the same response delay time as the optical scanner sensor unit. The device is characterized by comprising: a light source; a light source drive unit that outputs a light source drive signal to the light source to cause it to emit light; a light sensor unit that detects light from the light source and outputs a light sensor signal; a light sensor correction unit that has the same response delay time as the light sensor unit; and a delay processing unit that inputs a delay detection signal to at least one of the light scanner sensor correction unit and the light sensor correction unit and calculates the output delay for each.
[0019] The optical scanning device of the present invention drives an optical scanner with an optical scanner drive unit to scan light from a light source. The optical scanner sensor unit outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner (mirror), so the deflection angle of the mirror in operation can be detected. In addition, the optical sensor unit detects light from the light source and outputs an optical sensor signal, so the timing of light emission can be detected.
[0020] The delay processing unit inputs a delay detection signal to at least one of the optical scanner sensor correction unit and the optical sensor correction unit, and calculates the output delay for each. Here, since the optical scanner sensor correction unit and the optical sensor correction unit have the same response delay time as the optical scanner sensor unit and the optical sensor unit, respectively, the calculated delay time is used for correction. In other words, the response time of the optical scanner and light source, as well as the delay of the drive control, can be corrected with high accuracy regardless of the driving conditions or ambient temperature.
[0021] Furthermore, the present invention relates to a method for correcting the mirror drive timing of an apparatus comprising: an optical scanner having a mirror for scanning light; an optical scanner drive unit that outputs an optical scanner drive signal to drive the optical scanner; and an optical scanner sensor unit that outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner. A step of obtaining the time from the output of the optical scanner drive signal to the output of the optical scanner sensor signal; a step of obtaining an optical scanner sensor reproduced response delay time that reproduces the response delay by the optical scanner sensor unit; and calculating a response time until the optical scanner reaches a deflection angle corresponding to the optical scanner drive signal by subtracting the optical scanner sensor reproduced response delay time from the time from the output of the optical scanner drive signal to the output of the optical scanner sensor signal.
[0022] In the method for correcting the mirror drive timing of the present invention, first, the time (time T1) from when the optical scanner drive signal is output until the optical scanner sensor signal is output is obtained. Next, an optical scanner sensor reproduced response delay time (time T2) that reproduces the response delay by the optical scanner sensor unit is obtained.
[0023] Finally, the optical scanner sensor reproduced response delay time (time T2) is subtracted from the time (time T1) from when the optical scanner drive signal is output until the optical scanner sensor signal is output. As a result, the response time (time T1 - T2) until the optical scanner (mirror) reaches a deflection angle corresponding to the optical scanner drive signal can be calculated, so that the delay of the response time of the optical scanner can be accurately corrected regardless of the drive conditions and the environmental temperature.
[0024] Further, the method for correcting the light source drive timing of the present invention is a method for correcting the light source drive timing of an apparatus including a light source, a light source drive unit that outputs a light source drive signal to the light source to cause it to emit light, and a light sensor unit that detects light from the light source and outputs a light sensor signal, a step of obtaining the time from the output of the light source drive signal to the output of the optical scanner sensor signal; a step of obtaining a light sensor reproduced response delay time that reproduces the response delay by the light sensor unit; and calculating a response time until the light source emits light by the light source drive signal by subtracting the light sensor reproduced response delay time from the delay time from the output of the light source drive signal to the output of the light sensor signal.
[0025] In the method for correcting the light source driving timing of the present invention, first, the time (time T3) from the output of the scanner driving signal to the output of the scanner sensor signal is obtained. Next, the optical sensor reproduction response delay time (time T4) that reproduces the response delay by the optical sensor unit is obtained.
[0026] Finally, the optical sensor reproduction response delay time (time T4) is subtracted from the time (time T3) from the output of the scanner driving signal to the output of the scanner sensor signal. As a result, the response time (time T3 - T4) until the light source emits light by the light source driving signal can be calculated, so that the delay of the response time of the light source can be accurately corrected regardless of the driving conditions and the environmental temperature.
Brief Description of Drawings
[0027] [Figure 1] It is a schematic diagram of the optical scanning device of the present invention. [Figure 2] It is a block diagram of the optical system of the optical scanning device. [Figure 3] It is a diagram for explaining the details of the delay processing unit and the sensor correction unit. [Figure 4] It is a schematic diagram of the optical scanning device (modified form) of the present invention.
Embodiments for Carrying Out the Invention
[0028] Hereinafter, preferred embodiments of the present invention will be described, but these may be appropriately modified and combined. In the following description and the accompanying drawings, substantially the same or equivalent parts will be described with the same reference numerals.
[0029] [Embodiment] FIG. 1 shows a schematic diagram of an optical scanning device 1 according to an embodiment of the present invention. Further, FIG. 2 is a block diagram of the optical system of the optical scanning device 1. The optical scanning device 1 is mainly composed of a mirror driving device 10 and a light source device 50.
[0030] As shown in Figure 1, the mirror drive device 10 consists of a MEMS mirror 20, a MEMS drive unit 30, a MEMS sensor unit 40, an integrated control unit 100, a drive signal generation unit 105, a delay processing unit 110, and a sensor correction unit 120. The integrated control unit 100, the drive signal generation unit 105, and the delay processing unit 110 are sometimes referred to as the control circuit 150.
[0031] The MEMS mirror 20 is a rotating mirror that scans by reflecting laser light incident from a specific direction. The MEMS mirror 20 is provided on the optical deflector 25 and only needs to reciprocate and rotate around at least one axis.
[0032] The optical deflector 25 of this embodiment is a device fabricated using semiconductor processes and MEMS technology. The optical deflector 25 includes, for example, a semi-annular piezoelectric actuator, a torsion bar, and a bellows-type piezoelectric actuator, which constitute the MEMS drive unit 30 (the "optical scanner drive unit" of the present invention). In this case, the incident light can be scanned in two axes perpendicular to each other by resonant driving of the semi-annular piezoelectric actuator (horizontal direction) and non-resonant driving of the bellows-type piezoelectric actuator (vertical direction).
[0033] The integrated control unit 100 causes the drive signal generation unit 105 to generate a drive signal for the MEMS mirror 20 and transmits it to the MEMS drive unit 30 to operate the MEMS mirror 20. When laser light is incident on the operating MEMS mirror 20, the laser light is scanned and an image is projected.
[0034] As shown in Figure 2, the MEMS sensor unit 40 (the "optical scanner sensor unit" of the present invention) consists of a piezoelectric sensor 27 provided on the optical deflector 25 and a MEMS sensor signal processing circuit 45 (the "optical scanner sensor signal processing circuit" of the present invention). The MEMS sensor unit 40 detects the deflection angle of the MEMS mirror 20 with the piezoelectric sensor 27 and generates a sensor signal corresponding to the deflection angle with the MEMS sensor signal processing circuit 45. Furthermore, the MEMS sensor signal processing circuit 45 outputs the sensor signal to the control circuit 150 (delay processing unit 110).
[0035] As will be described in more detail later, the delay processing unit 110 inputs a delay detection signal to the MEMS sensor correction circuit 126 (the "optical scanner sensor correction unit" of the present invention) of the sensor correction unit 120 and calculates the output delay.
[0036] The MEMS sensor correction circuit 126 has response characteristics equivalent to those of the MEMS sensor unit 40 (in particular, identical delay times). Note that "identical delay times" in this specification are not limited to cases where the delay times are exactly the same. This "identical delay time" includes delay times that are negligible with respect to the response time of the output signal to the input signal of the sensor circuit, etc., or substantially identical delay times within a certain error range (the same applies hereinafter).
[0037] The MEMS sensor correction circuit 126 consists of, for example, an integrated circuit that has equivalent response characteristics to the piezoelectric sensor 27 and an electrical circuit that has equivalent response characteristics to the MEMS sensor signal processing circuit 45. In this specification, "circuit with equivalent response characteristics" includes circuits whose response characteristics to driving conditions, ambient temperature, etc., are equivalent.
[0038] Therefore, the MEMS sensor correction circuit 126 can correct the phase difference between the drive signal of the MEMS mirror 20 and the sensor signal of the piezoelectric sensor 27. In other words, it can accurately correct the response time of the MEMS mirror 20 and the delay of the drive control, regardless of the driving conditions or ambient temperature.
[0039] In this embodiment, the light source 60 uses a pulsed laser diode. The color of the laser light may be monochromatic or a mixture of multiple colors. The integrated control unit 100 transmits a control signal to the light source drive unit 70, and the light source drive unit 70 causes the light source 60 to emit light.
[0040] In detail, the laser light emitted from the light source 60 passes through the half mirror 65 and is incident on the MEMS mirror 20 (see Figure 2). The MEMS mirror 20 scans the incident light and projects an image onto the screen S.
[0041] The optical sensor unit 80 consists of a photodetector 82 and an optical sensor signal processing circuit 85. The laser light reflected by the half mirror 65 is detected by the photodetector 82. The optical sensor unit 80 generates an optical sensor signal corresponding to the detection timing of the laser light using the optical sensor signal processing circuit 85 and outputs it to the control circuit 150 (delay processing unit 110).
[0042] Figure 3 shows details of the delay processing unit 110 and the sensor correction unit 120.
[0043] The delay processing unit 110 consists of a state monitoring unit 111, an optical delay measurement unit 112, a MEMS delay measurement unit 113, a delay calculation unit 114, an optical sensor correction processing unit 115, and a MEMS sensor correction processing unit 116.
[0044] The status monitoring unit 111 monitors the input of the light emission timing signal from the integrated control unit 100. The light emission timing signal is, for example, a signal generated simultaneously with or immediately after the instruction to emit laser light. The status monitoring unit 111 then transmits the light emission timing signal to the optical delay measurement unit 112.
[0045] The aforementioned light emission timing signal only needs to have a known delay time from the timing at which the light emission is instructed, and is not limited to being generated simultaneously with or immediately after the laser light emission is instructed.
[0046] The optical delay measurement unit 112 receives the light emission timing signal and the optical sensor signal from the optical sensor unit 80. This allows the optical delay measurement unit 112 to measure the delay time t1 from the instruction to emit light until the optical sensor unit 80 detects light.
[0047] Meanwhile, the MEMS delay measurement unit 113 receives the MEMS drive signal and the MEMS sensor signal and measures the delay time t2. Both delay times t1 and t2 are transmitted to the delay calculation unit 114.
[0048] Furthermore, the optical sensor correction processing unit 115 outputs a signal (for example, a pulse signal) to the optical sensor correction circuit 125 (the "optical sensor correction unit" of the present invention) of the sensor correction unit 120, and measures the delay time t3 (the "optical sensor reproducible response delay time" of the present invention) until the signal is returned.
[0049] Here, since the optical sensor correction circuit 125 has response characteristics equivalent to those of the optical sensor unit 80, it outputs a signal with the same phase difference as the optical sensor unit 80 in response to the input signal. Therefore, the delay time t3 can be considered to be the same value as the delay time of the optical sensor unit 80.
[0050] The optical sensor correction circuit 125 consists of, for example, an integrated circuit that has equivalent response characteristics to the photodetector 82 and an electrical circuit that has equivalent response characteristics to the optical sensor signal processing circuit 85.
[0051] Similarly, the MEMS sensor correction processing unit 116 outputs a signal (for example, a signal of the same frequency) to the MEMS sensor correction circuit 126 (the "MEMS sensor correction unit" of the present invention) of the sensor correction unit 120, and measures the delay time t4 (the "optical scanner sensor reproducibility response delay time" of the present invention) until the signal is returned.
[0052] Here, since the MEMS sensor correction circuit 126 has response characteristics equivalent to those of the MEMS sensor unit 40 (MEMS sensor signal processing circuit 45), it outputs a signal with the same phase difference as the MEMS sensor unit 40 in response to the input signal. Therefore, the delay time t4 can be considered to be the same value as the delay time of the MEMS sensor unit 40.
[0053] The delay processing unit 110 then calculates and outputs the correction phase amounts for driving the MEMS mirror 20 and controlling the light source 60 from the delay times t1 to t4. For the MEMS mirror 20, the delay time excluding the influence of the response characteristics of the MEMS sensor unit 40 is obtained by subtracting the delay time t4 from the delay time t2.
[0054] Furthermore, for the light source 60, the delay time t3 is obtained by subtracting the delay time t1 from the delay time t3, thereby removing the influence of the response characteristics of the light sensor unit 80.
[0055] The delay processing unit 110 is connected to the drive signal generation unit 105 (see Figure 1). The drive signal generation unit 105 generates a drive signal for the MEMS mirror 20 and a drive signal for the light source 60 that is phase-shifted by the same amount as the correction phase amount relative to the said drive signal, based on the correction phase amount.
[0056] The optical scanning device 1 generates a new drive signal through the above process to correct the timing of the operation of the MEMS mirror 20 and the emission of light from the light source 60. This allows for high-precision adjustment of the response time and the time difference in drive control between the two. If the timing of the operation of the MEMS mirror 20 and the emission of light from the light source 60 are out of sync, for example, when scanning a laser beam in only one direction and attempting to project an optical image onto the center of the screen S (projection area), the optical image will be projected off-center from the screen S. However, by correcting this timing discrepancy, the optical image will appear in the center of the screen S.
[0057] This correction process may be performed periodically, such as when the optical scanning device 1 is started up, or in response to changes in the external environment. Furthermore, the timing of the processing can be appropriately determined, for example, by performing the correction process (correction of the light emission timing of the light source 60) when only the resonant driving of the MEMS mirror 20 is being performed in the optical scanning device 1.
[0058] Figure 4 shows a schematic diagram of an optical scanning device 11 according to a modified version of the present invention.
[0059] The present invention can also take the configuration shown in Figure 4. In difference from the embodiment shown in Figure 1, the drive signal generation unit 105 transmits a signal to the delay processing unit 119 indicating whether or not the MEMS mirror 20 is being driven.
[0060] Furthermore, the delay processing unit 119 transmits a drive signal to the light source drive unit 70. This allows control over the timing of the light source 60's light emission start.
[0061] According to this modified configuration, it becomes unnecessary to control the start of light emission using external elements such as the integrated control unit 100. Furthermore, the processing capacity and communication paths of the external control device can be simplified, and the modularization of the present invention becomes easier.
[0062] Although the optical scanning device 1,11 according to this embodiment has been described above, the present invention is not limited to the above-described embodiment and can be implemented in various forms without departing from the spirit of the invention.
[0063] The present invention is mainly applied to laser scanning type projection devices equipped with MEMS mirrors, but it can also be applied to vehicle lighting fixtures and LiDAR devices equipped with MEMS mirrors.
[0064] The correction process described above can be performed on a single mirror drive unit 10 and a single light source unit 50 using the MEMS sensor correction circuit 126 and the optical sensor correction circuit 125, respectively. [Explanation of Symbols]
[0065] 1,11...Optical scanning device, 10...Mirror drive device, 20...MEMS mirror, 25...Optical deflector, 27...Piezoelectric sensor, 30...MEMS drive unit, 40...MEMS sensor unit, 45...MEMS sensor signal processing circuit, 50...Light source device, 60...Light source, 65...Half mirror, 70...Light source drive unit, 80...Optical sensor unit, 82...Photodetector, 85...Optical sensor signal processing circuit, 100...Integrated control unit, 105...Drive signal generation unit, 110,119...Delay processing unit, 111...Status monitoring unit, 112...Optical delay measurement unit, 113...MEMS delay measurement unit, 114...Delay calculation unit, 115...Optical sensor correction processing unit, 116...MEMS sensor correction processing unit, 120...Sensor correction unit, 125...Optical sensor correction circuit, 126...MEMS sensor correction circuit, 150...Control circuit.
Claims
1. An optical scanner having a mirror for scanning light, The optical scanner drive unit outputs a drive signal to the optical scanner to drive it, An optical scanner sensor unit that outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner, An optical scanner sensor correction unit having the same response delay time as the optical scanner sensor unit, A delay processing unit inputs a delay detection signal to the optical scanner sensor correction unit and calculates the output delay, A mirror drive device characterized by being equipped with the following features.
2. The aforementioned optical scanner sensor unit consists of a piezoelectric sensor and an optical scanner sensor signal processing circuit. The mirror driving device according to claim 1, wherein the optical scanner sensor correction unit is a circuit having the same response delay time as both the piezoelectric sensor and the optical scanner sensor signal processing circuit.
3. Light source and A light source drive unit that outputs a drive signal to the light source to cause it to emit light, A light sensor unit that detects light from the light source and outputs a light sensor signal, A photo sensor correction unit having the same response delay time as the aforementioned photo sensor unit, A delay processing unit inputs a delay detection signal to the aforementioned optical sensor correction unit and calculates the output delay, A light source device characterized by having the following features.
4. The aforementioned light sensor unit consists of a photodetector and a light sensor signal processing circuit. The light source device according to claim 3, wherein the light sensor correction unit is a circuit having the same response delay time as both the photodetector and the light sensor signal processing circuit.
5. An optical scanner having a mirror for scanning light, The optical scanner drive unit outputs a drive signal to the optical scanner to drive it, An optical scanner sensor unit that outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner, An optical scanner sensor correction unit having the same response delay time as the optical scanner sensor unit, Light source and A light source drive unit that outputs a light source drive signal to the aforementioned light source to cause it to emit light, A light sensor unit that detects light from the light source and outputs a light sensor signal, A photo sensor correction unit having the same response delay time as the aforementioned photo sensor unit, A delay processing unit inputs a delay detection signal to at least one of the optical scanner sensor correction unit and the optical sensor correction unit, and calculates the output delay for each. An optical scanning device characterized by having the following features.
6. The optical scanning apparatus according to claim 5, wherein the optical sensor correction unit corrects the delay of the output during the period when the optical scanner is resonantly driven.
7. A method for correcting the mirror drive timing of an apparatus comprising: an optical scanner having a mirror for scanning light; an optical scanner drive unit that outputs an optical scanner drive signal to drive the optical scanner; and an optical scanner sensor unit that outputs an optical scanner sensor signal corresponding to the deflection angle of the optical scanner, wherein The steps include obtaining the time from the output of the optical scanner drive signal to the output of the optical scanner sensor signal, The steps include: obtaining the optical scanner sensor reproduced response delay time, which reproduces the response delay by the optical scanner sensor unit; The steps include: calculating the response time until the optical scanner reaches the deflection angle corresponding to the optical scanner drive signal by subtracting the optical scanner sensor reproduction response delay time from the time from the output of the optical scanner drive signal to the output of the optical scanner sensor signal; A method for correcting the timing of a mirror drive, characterized by having the following:
8. A method for correcting the light source drive timing of a device comprising a light source, a light source drive unit that outputs a light source drive signal to the light source to cause it to emit light, and a light sensor unit that detects light from the light source and outputs a light sensor signal, A step of obtaining the time from the output of the light source drive signal to the output of the light sensor signal, The steps include: obtaining the optical sensor reproduced response delay time, which reproduces the response delay by the optical sensor unit; The steps include: calculating the response time until the light source emits light due to the light source drive signal by subtracting the delay time of the light sensor reproduction response from the delay time from the output of the light source drive signal to the output of the light sensor signal, A method for correcting the driving timing of a light source, characterized by having the following:
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