Beam scanning system

Abstract

The present application relates to the field of optical scanning technology, and more particularly to a beam scanning system. The system includes a beam splitter, an optical waveguide array, a beam synthesizing unit, a beam adjustment device, and a phase adjustment device. The beam splitter receives a laser beam, splits the laser beam into several sub-beams, and outputs the split beam. The optical waveguide array is used to receive several sub-beams and transmit the several sub-beams to a pre-installed waveguide output end. The beam synthesizing unit is connected to the optical waveguide array, and each sub-beam output from the waveguide output end is diffracted and superimposed in the beam synthesizing unit to be combined and focused on a pre-installed beam output surface. The beam adjustment device is used to expand and collimate the beam output from the beam output surface to form a scanning beam. The phase adjustment device is used to adjust the relative phase distribution between each sub-beam waveguide in the optical waveguide array, thereby adjusting the focal position of the combined beam on the beam output surface, and performing beam scanning in a first direction. This solves the problem of large coupling interference in the waveguide-type phased array. [Representative diagram] Figure 2

Description

Technical Field

[0001] The present invention relates to optical scanning technology, and particularly to a beam scanning system.

Background Art

[0002] Beam control is an important technology in fields such as LiDAR and free-space optical communication, and may also be applicable to fields such as holographic display and biological imaging.

[0003] Currently, beam control is often realized by a method via an optical phased array (OPA). For example, an input laser is equally divided into N array waveguides via a star coupler, and each array waveguide is integrated with a controllable phase shift array. Each phase-controlled array waveguide is connected to a quadratic linear waveguide type diffraction grating, so that the linear waveguide type diffraction grating serves as a surface perpendicular radiation output device, and a plurality of linear waveguide type diffraction grating emitters are arranged at equal intervals to form a one-dimensional optical antenna array. By adjusting the relative phase between the array waveguides, the sub-beams radiated by the arrays constituting the diffraction grating emitter are coherently superimposed in space, and scanning control in the array direction of the optical beam is realized.

[0004] However, the waveguide type diffraction grating used as an emitter has both a beam combining function and a surface perpendicular output function of a planar waveguide. Beam combining without grating side lobes requires sub-wavelength radiation of the waveguide type diffraction grating interval, and in order to output a beam with a small divergence angle, the waveguide type diffraction grating needs to have a large-size weak diffraction grating structure. In order to satisfy a narrow interval and long waveguide parallel radiation, it is inevitable to cause large coupling interference between the waveguide type diffraction gratings.

Summary of the Invention

[0005] [Technical Problem] Based on this, it is necessary to provide a beam scanning system for the above problems.

Means for Solving the Problems

[0006] [Technical solution] A beam scanning system, the beam scanning system includes the following:

[0007] Receiving the laser beam, the laser beam multiple A beam splitter that outputs the beam after splitting it into sub-beams,

[0008] The beam splitter is provided in the output direction of the beam splitter, multiple Receiving the aforementioned sub-beam, multiple Optical waveguide array used to transmit the aforementioned sub-beam to a pre-installed waveguide exit end. The optical waveguide array includes a focused transmission region, and each sub-beam is focused through the focused transmission region to the waveguide exit end. and,

[0009] A beam combining unit connected to the optical waveguide array, wherein each sub-beam output from the waveguide exit end undergoes diffraction and superposition within the beam combining unit and is coupled and focused to a pre-provided beam exit surface,

[0010] A beam adjustment device is provided in the exit direction of the beam exit surface and performs beam expansion collimation on the beam output by the beam exit surface to form a scanning beam.

[0011] A phase adjustment device connected to the optical waveguide array, which adjusts the relative phase distribution between each sub-beam waveguide in the optical waveguide array, thereby adjusting the focal position of the combined beam on the beam exit surface and performing optical beam scanning in a first direction.

[0012] In one embodiment, the pre-configured waveguide exit end is located on the circumference of a Rowland circle with radius 2R. The pre-configured beam exit surface is located inside the Rowland circle, and the distance to the waveguide exit end is 2R, where R is a positive number.

[0013] In one embodiment, the spacing between each of the sub-beam waveguides at the waveguide exit end is smaller than the wavelength of the laser beam.

[0014] In one embodiment, the beam splitter includes a star coupler or a cascaded 1×n waveguide splitter, where n is a natural number greater than or equal to 2.

[0015] In one embodiment, the beam adjustment device includes a collimating lens assembly.

[0016] In one embodiment, the phase adjustment device includes a phase modulator.

[0017] In one embodiment, the phase modulator adjusts the waveguide phase by coupling an optical signal in a silicon waveguide to an electro-optic dielectric layer waveguide on the silicon waveguide, thereby utilizing the electro-optic effect of the medium; or the phase modulator adjusts the waveguide phase by injecting a pin junction current into the silicon waveguide; or the phase modulator adjusts the waveguide phase by utilizing the thermo-optic effect of silicon using a metal heater placed above the silicon waveguide.

[0018] In one embodiment, the dielectric layer waveguide includes a lithium niobate waveguide.

[0019] In one embodiment, the beam scanning system further includes:

[0020] A laser switching device used to switch the laser beams of different wavelengths to the beam splitting device,

[0021] The laser switching device adjusts the beam scanning angle in the first direction by adjusting the focal position on the beam emission surface of the beam after it has been combined by the laser beams of different wavelengths.

[0022] In one embodiment, the beam scanning system further includes:

[0023] A moving platform that is connected to the beam adjustment device and is used to perform beam scanning in the second direction by moving the beam adjustment device along the second direction.

Advantages of the Invention

[0024] [Beneficial Effects] The above-described beam scanning system branches a laser beam into sub-beams by a beam branching device, and an optical waveguide array receives the sub-beams and transmits them to a pre-provided waveguide output end. Each sub-beam output from the waveguide output end performs diffraction and superposition within the beam combining unit and is combined and focused on a pre-provided beam output surface. The beam output from the beam output surface is output after beam expansion and collimation by the beam adjustment device to form a scanning beam. At the same time, the relative phase distribution between each sub-beam waveguide in the optical waveguide array is adjusted by a phase adjustment device, thereby adjusting the focal position of the combined beam on the beam output surface, adjusting the scanning angle of the scanning beam, and performing beam scanning in the first direction. This embodiment modifies the method of combining and outputting a beam through a waveguide-type diffraction grating in the prior art. Each sub-beam is transmitted to a pre-provided waveguide output end through the optical waveguide array, and each sub-beam performs diffraction and superposition within the beam combining unit and is combined and focused on a pre-provided beam output surface. By adjusting the relative phase distribution in the optical waveguide array, the beam focal position on the beam output surface can be adjusted, thereby realizing beam scanning. Since the conventional waveguide-type diffraction grating array output structure is not adopted, the large coupling interference problem caused by the need to simultaneously satisfy a narrow interval and a long waveguide in the prior art is avoided, and the difficulty and cost are reduced by realizing beam scanning with the above-described structure.

Brief Description of the Drawings

[0025] [Description of the Accompanying Drawings] [Figure 1] It is a beam control structure diagram in the prior art.

[0026] ​​​​ [Figure 2] This is a structural block diagram of a beam scanning system according to one embodiment of the present invention.

[0027] [Figure 3] This is a top view of a beam scanning system according to one embodiment of the present invention.

[0028] [Figure 4] This is a structural block diagram of a beam scanning system according to one embodiment of the present invention.

[0029] [Figure 5] This is a top view of a beam scanning system according to one embodiment of the present invention.

[0030] [Figure 6] This is a front view of a beam scanning system according to one embodiment of the present invention.

[0031] Explanation of symbols:

[0032] 100: Laser beam, 200: Beam splitter, 300: Optical waveguide array, 310: Sub-beam waveguide, 320: Waveguide exit end, 330: Diffuse transmission region, 340: Phase adjustment region, 350: Focused transmission region, 400: Beam combining section, 410: Beam exit surface, 500: Beam adjustment device, 600: Phase adjustment device, 700: Input waveguide, 800: Laser switching device [Modes for carrying out the invention]

[0033] [Implementation Method of the Invention] To facilitate understanding of the present invention, the invention will be described in more detail below with reference to the relevant accompanying drawings. The accompanying drawings illustrate preferred embodiments of the invention. However, the invention can be carried out in many different forms and is not limited to the embodiments described herein. The purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of the invention.

[0034] In this invention, unless otherwise specified or limited, terms such as "attach," "connect," "join," and "fix" should be understood in a broad sense. For example, it may be a fixed connection, a removable connection, or an integrated connection. It may be a mechanical connection or an electrical connection. It may be a direct connection or an indirect connection through an intermediate medium. Unless otherwise specified, it may be a connection within two members or an interaction between two members. Those skilled in the art will be able to understand the specific implications of the above terms in this invention based on the specific circumstances.

[0035] The terms “first,” “second,” etc., are used for descriptive purposes only and should not be understood as indicating or suggesting relative importance, or implying the quantity of the technical features described. For this reason, features designated as “first,” “second,” etc., may explicitly or implicitly include at least one such feature. In the description of this invention, unless explicitly and specifically limited, the implication of “multiple” is at least two, such as two, three, etc.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same implications as commonly understood by those skilled in the art. Terms used in the description of the present invention are for the sole purpose of describing specific embodiments and are not intended to limit the invention. The terms "and / or" used herein include any combination of one or more of the related items listed.

[0037] As described in the background technology section, beam control has already become an important technology in fields such as LiDAR and free-space optical communication, and also has the potential to be applied to fields such as holographic display and bioimaging. Of these, beam control can be implemented mechanically, or it can be implemented by employing an optical phased array (OPA). The optical phased array method has advantages that cannot be obtained with mechanical methods in terms of size, weight, and speed, and it is expected that by employing appropriate photonic integration chips such as silicon photonics technology, it will be possible to realize chip-level LiDAR by monolithically integrating the optical phased array with other related optoelectronic devices and circuits.

[0038] Figure 1 illustrates a commonly used solution for OPA beam control based on current photonic integrated chips. Specifically, the input laser is divided equally into N array waveguides via a star coupler or the like, and a controllable phase-shift array is integrated into each array waveguide. Each phase-controlled array waveguide is connected to a second-order linear waveguide diffraction grating, so that the linear waveguide diffraction grating acts as a surface perpendicular emission output device, and multiple linear waveguide diffraction grating emitters are arranged at equal intervals to form a one-dimensional optical antenna array. By adjusting the relative phase between the array waveguides, the subbeams emitted by the arrays constituting the diffraction grating emitters are coherently superimposed in space, enabling scanning control of the beam in the array direction.

[0039] To effectively suppress the side lobes of a phase-controlled uniform radiation grating, the grating spacing d must satisfy d < λ / 2, where λ is the laser wavelength. Naturally, under certain conditions, this limitation can be moderately relaxed, i.e., it is sufficient to satisfy d < λ. In the radio frequency field, since the wavelength is relatively long, it is relatively easy to satisfy the relaxed limitation. However, optical phased arrays typically operate at micron-level wavelengths, e.g., 1.5 μm, making it difficult to achieve the aforementioned grating spacing requirements. At the same time, to minimize the divergence angle of the emitted beam, weak waveguide gratings are usually employed, and the light field surface in the waveguide is emitted perpendicularly over relatively long distances. When the waveguide distance is relatively short, there is a possibility of coupling interference between them. Crosstalk increases with decreasing distance and also increases with longer waveguides. Furthermore, crosstalk within the waveguide array significantly affects the performance of the optical phased array. Simultaneously, the array spacing becomes narrower within the same aperture, usually requiring more array units, which means an increased difficulty in array phase control.

[0040] To avoid coupled crosstalk between diffraction grating emitters and simultaneously reduce the number of units in the phased array as much as possible, array spacings that are multiple times the wavelength are usually used. By arbitrarily distributing the unit spacing of the diffraction grating emitter array, diffraction grating sidelobes are effectively eliminated. However, this method generally disperses the energy in the diffraction grating sidelobes into space rather than concentrating it in the main lobe, which reduces beam efficiency.

[0041] This invention provides a beam scanning system to address the aforementioned contradiction.

[0042] In one embodiment, a beam scanning system is provided. Referring to Figures 2 and 3, the beam scanning system of this embodiment includes a beam splitter 200, an optical waveguide array 300, a beam combining unit 400, a beam adjustment device 500, and a phase adjustment device 600. Of these:

[0043] The beam splitter 200 receives the laser beam 100 and splits the laser beam 100 multiple The beam is split into sub-beams and then output. The optical waveguide array 300 is provided in the output direction of the beam splitter 200. multiple Receiving the subbeam, multiple It is used to transmit the sub-beams to the pre-installed waveguide exit end 320. The beam combining unit 400 is connected to the optical waveguide array 300 and performs diffraction and superposition within the beam combining unit 400 to couple and focus each sub-beam output from the waveguide exit end 320 onto the pre-installed beam exit surface 410. The beam adjustment device 500 is installed in the exit direction of the beam exit surface 410 and performs beam expansion collimation on the beam output from the beam exit surface 410 to form a scanning beam. The phase adjustment device 600 is connected to the optical waveguide array 300 and adjusts the relative phase distribution between each sub-beam waveguide 310 in the optical waveguide array 300 to adjust the focal position of the combined beam on the beam exit surface 410 and perform beam scanning in the first direction.

[0044] Specifically, first the laser beam 100 is coupled to the input waveguide 700, and then the laser beam 100 is split through the beam splitter 200. multiple The beam is split into sub-beams. The beam splitter 200 may use a star coupler or a cascaded 1×n waveguide splitter, where n is a natural number greater than or equal to 2.

[0045] The optical waveguide array 300 is arranged in parallel multiple The optical waveguide array 300 includes sub-beam waveguides 310, each of which transmits each sub-beam to a pre-prepared waveguide exit end 320. The optical waveguide array 300 has, in order, a diffuse transmission region 330, a phase adjustment region 340, and a focusing transmission region 350. Each sub-beam waveguide 310 first diffuses and transmits each sub-beam output by the beam splitter 200 in the diffuse transmission region 330, then enters the phase adjustment region 340, and finally each sub-beam waveguide 310 transmits each sub-beam so that it enters the focusing transmission region 350, where each sub-beam is focused to a pre-prepared waveguide exit end 320.

[0046] After each sub-beam reaches the waveguide exit end 320, it may be output through the waveguide exit end 320 to the free transmission region, i.e., the beam combining unit 400. In the beam combining unit 400, each sub-beam undergoes far-field diffraction and superposition, and is then coupled and focused to a pre-prepared beam exit surface 410. The beam exit surface 410 is the output end of the beam, and the beam output from the beam exit surface 410 undergoes beam expansion collimation through the beam adjustment device 500 to form the final scanning beam.

[0047] During the beam propagation process described above, the phase adjustment device 600 can adjust the relative phase distribution between each sub-beam waveguide 310, thereby adjusting the focal position of the beam on the beam exit surface 410 after it has been combined in the beam combining unit 400. After a change occurs in the focal position of the combined beam on the beam exit surface 410, a change also occurs in the scanning angle of the final scanned beam in the first direction, thereby realizing beam scanning in the first direction. The first direction may be horizontal or any other direction; in this embodiment, only the horizontal direction (the direction indicated by the dashed arrow in Figure 3) will be described. Figure 3 is a top view of the beam scanning system.

[0048] In this embodiment, the beam splitter 200, optical waveguide array 300, beam combining unit 400, and phase adjustment device 600 may be integrated on the same SOI (silicon-on-insulator) chip, and the beam adjustment device 500 may be implemented using a mechanical structure, such as by selecting and using a collimating lens assembly.

[0049] The beam scanning system described above uses a beam splitter 200 to split the laser beam 100. multiple The beam is split into sub-beams, and the optical waveguide array 300 multipleThe sub-beams are received and transmitted to a pre-installed waveguide exit end 320. The waveguide exit end 320 outputs each sub-beam, which is then subjected to far-field diffraction and superposition within the beam combining unit 400 to combine and focus onto a pre-installed beam exit surface 410. The beam output from the beam exit surface 410 is then beam-broadening collimated by the beam adjustment device 500 to form a scanning beam. Simultaneously, the phase adjustment device 600 adjusts the relative phase distribution between each sub-beam waveguide 310 in the optical waveguide array 300, thereby adjusting the focal position of the combined beam on the beam exit surface 410. This adjusts the scanning angle of the scanning beam, allowing for beam scanning in the first direction. This embodiment modifies the conventional method of combining and outputting beams via waveguide diffraction gratings. Each sub-beam is transmitted via a waveguide array 300 to a pre-prepared waveguide exit end 320, where far-field diffraction and superposition are performed on each sub-beam in the beam combining unit 400 to couple and focus them on a pre-prepared beam exit surface 410. By adjusting the relative phase distribution in the waveguide array, the beam focal position on the beam exit surface 410 can be adjusted, thereby achieving beam scanning. Since the conventional waveguide diffraction grating array output structure is not employed, the problem of large coupling interference caused by the need to simultaneously satisfy narrow spacing and long waveguides in the conventional technology is avoided. Furthermore, by achieving beam scanning with the above-described structure, when the sub-beams are focused to the waveguide exit end 320, each sub-beam enters the free transmission region and is combined, then focused to the beam exit surface 410, outputting the beam for scanning. There is no need to employ a diffraction grating plane perpendicular emitter array in the conventional structure, reducing difficulty and cost.

[0050] In one embodiment, a pre-configured waveguide exit end 320 is located on the circumference of a Rowland circle with radius 2R. The pre-configured beam exit surface 410 is located inside the Rowland circle, and the distance to the waveguide exit end 320 is 2R, where R is a positive number.

[0051] The waveguide exit end 320 of the optical waveguide array 300 is located on the circumference of a Rowland circle with radius 2R, so that the diffraction superposition of the optical waveguide array 300 in free space is equivalent to the effect of adding lens focus to the diffraction of a diffraction grating. The exit spot of the selected diffraction order is displayed on the circumference of a circle with radius R, that is, the beam focus after synthesis is on the circumferential surface of radius R, and at the same time, the distance between the circumferential surface of radius R and the waveguide exit end 320 is 2R. Conventional AWG wavelength division multiplexers can receive outputs of different wavelengths by arranging multiple waveguides, but in this embodiment, the output end face, i.e., the beam exit surface 410, is etched directly onto the SOI chip, and the phase distribution in the optical waveguide array 300 is modified to control the output of a fixed wavelength beam to different positions on the beam exit surface 410, thereby outputting scanning beams of different angles perpendicular to the beam exit surface 410, realizing a relatively simple method. Furthermore, conventional techniques generally achieve beam scanning perpendicular to the first direction by causing a change in the surface perpendicular output angle through wavelength adjustment of the waveguide diffraction grating. This requires the use of an adjustable laser device, which is often expensive. The method of the present invention achieves beam scanning without the need for an adjustable laser device, thereby reducing costs.

[0052] In one embodiment, the spacing between each sub-beam waveguide 310 at the waveguide exit end 320 is smaller than the wavelength of the laser beam 100, thereby effectively suppressing diffraction grating sidelobes caused by the synthesis of multiple beams in the optical waveguide array 300 and achieving highly efficient beam control. Furthermore, in this embodiment, the optical waveguide array 300 employs a design where the beams gradually approach each other, and each sub-beam waveguide 310 in the optical waveguide array 300 approaches and is emitted within a small region (focused transmission region 350) before entering the beam synthesis unit 400, so coupled crosstalk between each sub-beam waveguide 310 can be ignored.

[0053] In one embodiment, the beam adjustment device 500 includes a collimating lens assembly. In this embodiment, the collimating lens assembly may be positioned in the exit direction of the beam exit surface 410, and the beam is output vertically through the beam exit surface 410, then undergoes beam expansion collimation by the collimating lens assembly, and finally forms a scanning beam. When the combined beam is at different positions on the beam exit surface 410, it can have different beam angles after processing by the collimating lens assembly, thereby realizing one-dimensional scanning of the beam in the horizontal direction. By using the collimating lens assembly as the beam adjustment device 500, the hardware cost of the beam adjustment device 500 can be reduced and implementation is facilitated.

[0054] In one embodiment, the phase adjustment device 600 includes a phase modulator. The phase modulator is an optical modulator that changes the phase of light according to a specific rule, and in this embodiment, the phase modulator may be provided alone or integrated into the waveguide array.

[0055] Specifically, a phase modulator adjusts the waveguide phase by coupling an optical signal in a silicon waveguide to an electro-optic medium layer waveguide on top of the silicon waveguide, thereby utilizing the electro-optic effect of the medium; or by injecting a pin junction current into the silicon waveguide; or by using a metal heater placed above the silicon waveguide to adjust the waveguide phase by utilizing the thermo-optic effect of silicon.

[0056] In one embodiment, the beam combining unit 400 may be a silicon waveguide located on the SOI chip, i.e., each sub-beam output from the waveguide exit end 320 is coupled and focused in the silicon waveguide. Alternatively, the beam combining unit 400 may be an electro-optic medium layer waveguide located on the silicon waveguide, i.e., the optical signal in the silicon waveguide is coupled to the upper electro-optic medium layer waveguide, thereby performing coupling and focusing in the electro-optic medium layer waveguide.

[0057] In one embodiment, the electro-optical medium layer waveguide includes a lithium niobate waveguide.

[0058] In one embodiment, referring to Figure 4, the beam scanning system provided in this embodiment further includes a laser switching device 800, which is used to switch laser beams 100 of different wavelengths to a beam splitter 200.

[0059] In this embodiment, the laser switching device 800 adjusts the beam scanning angle in the first direction by adjusting the focal position of the combined beam on the beam emission surface 410 by switching between laser beams 100 of different wavelengths. In addition to modifying the focal position of the beam on the beam emission surface 410 by phase adjustment, this embodiment can further arrange lasers of different wavelengths and the laser switching device 800, thereby realizing a change in the wavelength of the input laser and a change in the focal position of the beam on the beam emission surface 410 using the laser switching device 800.

[0060] In actual applications, when the wavelength is kept fixed and the phase distribution is adjusted to maintain that fixed phase distribution, by switching between laser beams 100 of different wavelengths and combining wavelength conversion and phase adjustment, it is possible to achieve a larger beam focusing range at the beam exit surface 410, thereby obtaining a larger beam scanning range after beam expansion collimation by the beam adjustment device 500.

[0061] Referring to Figure 5, the laser switching device 800 may use an optical switch. The input terminal of the optical switch is connected to laser beams 100 of different wavelengths, and the output terminal is connected to the input waveguide 700. The laser, after being switched via the input waveguide 700, is transmitted to the beam splitter 200. Since the phase adjustment and optical switch switching speed can reach GHz, even beam scanning in the first direction of thousands of sampling points can be completed in microseconds.

[0062] In addition to achieving beam scanning in a first direction, the beam scanning system of this embodiment can further achieve beam scanning in a second direction. In one embodiment, the beam scanning system provided in this embodiment further includes a mobile platform. The mobile platform is connected to a beam adjustment device 500 and is used to perform beam scanning in the second direction by moving the beam adjustment device 500 along the second direction. The second direction may be vertical or any other direction. In this embodiment, only the vertical method will be described.

[0063] Figure 6 is a front view of the beam scanning system. Referring to Figure 6, in actual applications, the beam adjustment device 500 can be moved vertically (in the direction indicated by the bidirectional arrows in the figure) by a moving platform, thereby altering the position in the vertical where the beam output from the beam emission surface 410 strikes the beam adjustment device 500. This change in position results in a vertical angle change of the ultimately output scanning beam, thereby achieving vertical beam scanning. Based on high-speed scanning in the horizontal direction, vertical scanning can achieve two-dimensional beam scanning at >30 frames / s with a scanning frequency of >30 Hz.

[0064] In this embodiment, the moving platform may include a drive unit, which is connected to the beam adjustment device 500 and can be driven to move along the second direction via the drive unit. The drive unit has relatively low equipment costs. , Drive devices such as near motors or DC motors may be used. , and beneficial to implementation .

[0065] The technical features of the embodiments described above may be combined in any way, and for the sake of simplicity, not all possible combinations of the technical features of the embodiments described above will be described. However, as long as these combinations of technical features are inconsistent, they should be considered to fall within the scope described herein.

[0066] The embodiments described above are the present invention. multipleThese descriptions merely illustrate embodiments, and while their descriptions are relatively specific and detailed, they should not be understood as limiting the scope of the patent of the present invention. Those skilled in the art will be able to further explain the concept of the present invention without departing from it. multiple It should be noted that modifications and alterations may be made to the invention, and all of these fall within the scope of protection of this invention. For this reason, the scope of patent protection for this invention should be defined by the attached claims.

Claims

1. A beam splitter that receives a laser beam, splits the laser beam into multiple sub-beams, and then outputs them, An optical waveguide array provided in the output direction of the beam splitter, used to receive a plurality of sub-beams and transmit the plurality of sub-beams to a pre-provided waveguide exit end, wherein the optical waveguide array includes a focusing transmission region, and each sub-beam is focused to the waveguide exit end via the focusing transmission region, A beam combining unit connected to the optical waveguide array, wherein each sub-beam output from the waveguide exit end undergoes far-field diffraction and superposition within the beam combining unit and is coupled and focused to a pre-prepared beam exit surface, A beam adjustment device is provided in the exit direction of the beam exit surface and performs beam expansion collimation on the beam output by the beam exit surface to form a scanning beam. A phase adjustment device is connected to the optical waveguide array and adjusts the relative phase distribution between each sub-beam waveguide in the optical waveguide array, thereby adjusting the focal position of the combined beam on the beam exit surface and performing beam scanning in a first direction. Includes, The beam adjustment device adjusts the beam scanning angle based on the focal position adjusted by the phase adjustment device. Characterized by, Beam scanning system.

2. The pre-installed waveguide exit end is located on the circumference of a Rowland circle with a radius of 2R. The pre-configured beam emission surface is located within the Rowland circle, and the distance to the waveguide emission end is 2R, where R is a positive number. Characterized by, The beam scanning system according to claim 1.

3. The spacing between each of the sub-beam waveguides at the waveguide exit end is smaller than the wavelength of the laser beam. Characterized by, The beam scanning system according to claim 1.

4. The beam splitter includes a star coupler or a cascaded 1×n waveguide splitter, where n is a natural number greater than or equal to 2. Characterized by, The beam scanning system according to claim 1.

5. The beam adjustment device includes a collimating lens assembly. Characterized by, The beam scanning system according to claim 1.

6. The aforementioned phase adjustment device includes a phase modulator. Characterized by, The beam scanning system according to claim 1.

7. The phase modulator adjusts the waveguide phase by coupling the optical signal in the silicon waveguide to the electro-optic medium layer waveguide on the silicon waveguide, thereby utilizing the electro-optic effect of the medium. Or, The phase modulator performs waveguide phase adjustment by injecting a PIN junction current into the silicon waveguide. Or, The phase modulator uses a metal heater positioned above the silicon waveguide to adjust the waveguide phase by utilizing the thermo-optic effect of silicon. Characterized by, The beam scanning system according to claim 6.

8. The aforementioned electro-optical medium layer waveguide includes a lithium niobate waveguide. Characterized by, The beam scanning system according to claim 7.

9. The beam scanning system is A laser switching device used to switch the laser beams of different wavelengths to the beam splitting device. It further includes, The laser switching device adjusts the beam scanning angle in the first direction by adjusting the focal position on the beam emission surface of the beam after it has been combined by the laser beams of different wavelengths. Characterized by, The beam scanning system according to claim 1.

10. The beam scanning system is A mobile platform connected to the beam adjustment device and used to perform beam scanning in the second direction by moving the beam adjustment device along the second direction. Includes Characterized by, The beam scanning system according to claim 1.

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