Safety sampling modules and safety chemical devices

Abstract

The present invention provides a safe sampling module and a safe chemical device equipped with the safe sampling module, which enable the safe and convenient collection of chemical samples, particularly flammable organic solvents and chemicals, used in semiconductor production lines. [Solution] The safety sampling module 100 includes a sampling bottle fixing seat 110 and a lid tightening device 150. The sampling bottle fixing seat is used to fix the body of the sampling bottle, and the lid tightening device is installed above the sampling bottle fixing seat and is used to open and close the bottle cap 620 of the sampling bottle 600. The sampling bottle fixing seat fixes the sampling bottle by air pressure, and the lid tightening device generates a torsional force by air pressure to rotate the bottle cap of the sampling bottle, thereby opening and closing the bottle cap of the sampling bottle.

Description

【Technical Field】 【0001】 The present invention relates to a safety chemical device, and particularly to a safety chemical liquid sampling device. 【Background Art】 【0002】 In recent years, due to the material demand of computers and their peripheral products, the semiconductor markets at home and abroad have developed rapidly. The semiconductor industry has been continuously expanding and generating a large amount of foreign exchange income. 【0003】 The manufacturing process of semiconductor devices is very complex, and related technologies cover almost all of the most important and key science and technologies and inventions in the development of modern human science. Therefore, the production of semiconductor devices is not only a cutting-edge technology industry but also a field that requires a huge amount of funds to maintain development. 【0004】 However, as the design of semiconductor devices becomes increasingly complex, the manufacturing technology of semiconductor devices becomes increasingly advanced and complex, and potential occupational hazards and property losses, including chemical liquids commonly used in manufacturing process units such as epitaxy, diffusion, ion implantation, chemical vapor deposition, etching, and lithography in the semiconductor process, are also becoming increasingly complex. 【0005】 In semiconductor factories, chemical liquids are stored in chemical liquid storage containers and connected to the supply lines in the factory during use. In current semiconductor manufacturing systems, more than 30 types of chemical liquids may be supplied to the manufacturing line simultaneously. In order to ensure the quality and yield of device manufacturing, it is necessary to regularly test various chemical liquids. 【Summary of the Invention】 【Problems to be Solved by the Invention】 【0006】 However, since some chemical solutions are flammable, there is a need for safe and convenient sampling methods when proceeding with the sampling process of test products. This contributes to improving the quality and safety of semiconductor manufacturing and is an issue that those skilled in the art should actively address. 【0007】 The summary of this invention is intended to provide a simplified overview of the disclosure so that readers may have a basic understanding of the disclosure. The summary of this invention is not a comprehensive overview of the disclosure, nor does it identify important / definitive elements of the embodiments of the invention, nor does it define the scope of the invention. 【0008】 One objective of the present invention is to provide a safe chemical device that can safely sample chemical solutions in order to improve the quality and safety of semiconductor production. [Means for solving the problem] 【0009】 To achieve the above objective, the technical aspects of the present invention relate to a safety sampling module including a sampling bottle fixing base and a lid tightening device. The sampling bottle fixing base is used to fix the sampling bottle, and the lid tightening device is installed above the sampling bottle fixing base and is used to open and close the bottle cap of the sampling bottle. The sampling bottle fixing base fixes the body of the sampling bottle by air pressure, and the lid tightening device generates a torsional force by air pressure to rotate the bottle cap of the sampling bottle, thereby opening and closing the bottle cap of the sampling bottle. 【0010】 In one embodiment, the safety sampling module further includes a rotating base connected to a sampling bottle holder and used to rotate the sampling bottle. 【0011】 In one embodiment, the safety sampling module further includes a pneumatic rotary actuator connected to a rotating base, such that it causes the rotating base to roll, thereby causing the sampling bottle to roll. 【0012】 In one embodiment, the safety sampling module further includes a vertical movement device connected to a lid-tightening device and used to move the lid-tightening device up and down. Furthermore, the vertical movement device includes a vertical movement pneumatic cylinder that moves the lid-tightening device up and down by air pressure. 【0013】 In one embodiment, the safety sampling module further includes a belt drive system connected to a cap-tightening device for opening and closing the bottle cap of the sampling bottle. 【0014】 In one embodiment, the safety sampling module further includes an air motor, which is connected to a belt drive system to open and close the bottle cap of a sampling bottle by causing the belt drive system to rotate and a cap-tightening device. 【0015】 In one embodiment, the safety sampling module further includes a sealed housing and a double-glazed isolation door. The double-glazed isolation door is attached to the sealed housing, and the sampling bottle holder and lid fastening device are sealed within the sealed housing and the double-glazed isolation door. 【0016】 In one embodiment, the safety sampling module further includes a chemical discharge piping transfer device installed between the sampling bottle fixing base and the lid tightening device, and used for injecting the chemical solution into the sampling bottle. 【0017】 In one embodiment, the chemical discharge piping repositioning device includes a discharge piping holder and a pneumatic horizontal movement device. The discharge piping holder is used to secure multiple chemical discharge piping, and the pneumatic horizontal movement device is connected to the discharge piping holder and is used to move the chemical discharge piping to align with the sampling bottle. 【0018】 In one embodiment, the safety chemical device includes a controller and the aforementioned safety sampling module, the safety sampling module being connected to the controller so as to be controlled by the controller. 【0019】 In one embodiment, the safety chemical device further includes a chemical storage device, which is installed on one side of the safety sampling module for sampling the chemical solution. 【0020】 In one embodiment, the chemical storage device is used to store flammable organic solvents and chemical agents. 【0021】 In one embodiment, the safety chemical device is a Chemical Transfer Unit (CTU), a Clear Coupler Booth (CCB), or a chemical storage device. [Effects of the Invention] 【0022】 Therefore, the safety sampling module and the safety chemical device having the safety sampling module of the present invention can safely and easily collect samples of chemicals used in semiconductor production lines, particularly flammable organic solvents and chemicals, thereby improving safety and convenience during sampling and increasing the revenue and profits of semiconductor production. [Brief explanation of the drawing] 【0023】 To make the above-mentioned objectives, other objectives, features, advantages, and embodiments of the present invention clearer and easier to understand, the accompanying drawings are described below. [Figure 1] This is a schematic perspective view of a safety sampling module according to one embodiment of the present invention. [Figure 2] Figure 1 is a schematic perspective view of the safety sampling module from a different angle. [Figure 3]A perspective schematic view of a safety sampling module according to another embodiment of the present invention. [Figure 4] A perspective schematic view of a safety chemical device according to another embodiment of the present invention. 【Embodiments for Carrying Out the Invention】 【0024】 Hereinafter, embodiments will be given and described in detail with reference to the accompanying drawings. However, the provided embodiments are not intended to limit the scope of coverage of the present disclosure, and the description of the operation of the structure does not limit the execution order thereof. Any structure formed by re-combining elements and any device that produces the same effect are within the scope of coverage of the present disclosure. Note that the drawings are for illustrative purposes only and are not drawn to scale. For ease of understanding, in the following description, the same elements or similar elements will be represented by the same reference numerals and described. 【0025】 Regarding the terms used in the present text, unless otherwise specified, generally, each term has its ordinary meaning in this field in the context of the content and special content of the present invention. For certain terms used to describe the present invention, further consideration will be given below or elsewhere in this specification to guide those skilled in the art regarding the description of the present invention. 【0026】 In the embodiments and claims, unless otherwise specifically limited in the context with respect to the article, "one" and "the" may refer to a single or plural. The numbers used in the steps are only for labeling the steps for ease of explanation and do not limit the order and embodiments before and after. 【0027】 Furthermore, any of "including", "comprising", "having", "containing", etc. used in the present text are open terms, that is, they are intended to include but not be limited to that. 【0028】 Figure 1 is a schematic perspective view of a safety sampling module according to one embodiment of the present invention. Figure 2 is a schematic perspective view from a different angle. Figure 3 is a schematic perspective view of a safety sampling module according to another embodiment of the present invention. Furthermore, Figure 4 is a schematic perspective view of a safety chemical device according to another embodiment of the present invention. 【0029】 Please refer to Figures 1 and 2 simultaneously. As shown in the figures, the safety sampling module 100 includes a sampling bottle fixing seat 110 and a cap tightening device 150. The sampling bottle fixing seat 110 is used to fix the body 610 of the sampling bottle 600, and the cap tightening device 150 is installed above the sampling bottle fixing seat 110 and is used to open and close the bottle cap 620 of the sampling bottle 600. The sampling bottle fixing seat 110 uses air pressure to clamp and fix the sampling bottle 600 with a structure such as an air pressure ring, and the cap tightening device generates a torsional force using air pressure to rotate the bottle cap 620, thereby opening and closing the bottle cap 620 of the sampling bottle 600. 【0030】 The safety sampling module 100 uses air pressure to press and secure the sampling bottle 600 and various elements, effectively preventing sparks from being generated during the sampling process, reducing the risks involved in the sampling process, and improving the safety and convenience of the sampling process. 【0031】 Therefore, the safety sampling module 100 enables safe and rapid sampling of chemical solutions. In particular, semiconductor factories often use a variety of chemical substances due to the requirements of the manufacturing process, and highly dangerous chemical substances such as flammable, organic, and strong acids and alkalis, such as acetone and isopropyl alcohol, are frequently used in the workplace. If the design, operation, and control of the sampling process are inadequate, serious accidents and disasters such as poisoning, fire, and explosion can occur. Once an accident occurs, it not only causes significant losses to the company but also leads to substantial losses such as increased insurance premiums and loss of orders. The safety sampling module 100 of the present invention can safely and rapidly sample chemical solutions, avoid risks such as sparks during the sampling process, reduce risks in the sampling process, and improve the safety and convenience of the sampling process. 【0032】 In one embodiment, the chemical solution used for sampling may include a chemical solvent, a chemical solution, or other liquid. Examples include silica methane (SiH4), phosphine (PH3), hydrofluoric acid (HF), acetone, isopropyl alcohol, tetramethylammonium hydroxide (TMAH), hydrofluoric acid (HF), nitric acid, phosphoric acid, acetic acid, hydrogen peroxide, sulfuric acid, or deionized water (DI water). 【0033】 In one embodiment, the safety sampling module 100 further includes a rotating base 120 and a pneumatic rotary actuator 122. The rotating base 120 is connected to the sampling bottle mounting base 110 and is used to rotate the sampling bottle 600 by a predetermined angle (e.g., 10 degrees, 20 degrees, 30 degrees, 45 degrees, 90 degrees, 120 degrees, 150 degrees, 180 degrees and / or 360 degrees) in a clockwise or counterclockwise direction, without departing from the spirit and scope of protection of the present invention. The pneumatic rotary actuator 122 is connected to the rotating base 120 and generates rotation by gas pressure to roll the rotating base 120 and the sampling bottle 600. 【0034】 In one embodiment, the safety sampling module 100 further includes a vertical movement device 160. The vertical movement device 160 is connected to a lid-tightening device 150 and is used to move the lid-tightening device 150 up and down. In one embodiment, the vertical movement device 160 includes a vertical movement pneumatic cylinder 162 that moves the lid-tightening device 150 up and down by air pressure. 【0035】 In one embodiment, the safety sampling module 100 further includes a belt drive system 170 and an air motor 180. The belt drive system 170 is connected to a cap-tightening device 150 and is used to open and close the bottle cap 620 of the sampling bottle 600. Furthermore, the air motor 180 is connected to the belt drive system 170 and is used to open and close the bottle cap 620 of the sampling bottle 600 by causing the belt drive system 170 to roll, which in turn causes the cap-tightening device 150 to roll. 【0036】 In one embodiment, the safety sampling module 100 further includes a chemical discharge piping transfer device 130, which is installed between the sampling bottle fixing seat 110 and the lid tightening device 150 and is used to inject the chemical into the sampling bottle 600. 【0037】 In one embodiment, the chemical discharge piping repositioning device 130 includes a discharge piping holder 134 and a pneumatic horizontal movement device 132. The discharge piping holder 134 is used to fix a plurality of chemical discharge piping 140, and the pneumatic horizontal movement device 132 is connected to the discharge piping holder 134 and is used to move the chemical discharge piping 140 to align with the sampling bottle 600. 【0038】 Furthermore, please refer to Figure 3. In one embodiment, the safety sampling module 300 not only includes the safety sampling module 100 shown in Figures 1 and 2, but also further includes a sealed housing 310 and a double-glazed isolation door 320. The sealed housing 310 effectively seals the various elements of the safety sampling module 100, and the double-glazed isolation door 320 can further improve safety and convenience during sampling. In one embodiment, the double-glazed isolation door 320 is mounted on the sealed housing 310, and both the sampling bottle fixing seat 110 and the lid tightening device 150 are sealed within the sealed housing 310 and the double-glazed isolation door 320. Furthermore, the double-glazed isolation door 320 may include two glass isolation doors to enhance safety and convenience during sampling, without departing from the spirit and scope of the present invention. 【0039】 In one embodiment, each power element in the sealed housing 310 employs gas power to improve safety during sampling. 【0040】 Furthermore, please refer to Figure 4. The safety chemical device 400 includes a controller 420, a chemical storage device 410, and the safety sampling module 100 described above. The safety sampling module 100 is connected to the controller 420 so as to be controlled by the controller 420. The chemical storage device 410 may be installed on one side of the safety sampling module 100, and the safety sampling module 100 may directly sample the chemical by the chemical storage device 410. 【0041】 In one embodiment, the chemical storage device 410 is used to store flammable organic solvents and chemical agents, and any other liquids, without departing from the spirit and scope of the present invention. 【0042】 In one embodiment, the safety chemical device 400 is a Chemical Transfer Unit (CTU), a Clear Coupler Booth (CCB), and / or a chemical storage device, but the present invention is not limited thereto. 【0043】 As described above, the safety sampling module and the safety chemical device having the safety sampling module of the present invention can safely and easily collect samples of chemicals used in semiconductor production lines, particularly flammable organic solvents and chemical solutions, thereby improving safety and convenience during sampling and increasing the revenue and profits of semiconductor production. 【0044】 The embodiments disclosed above are not intended to limit the present invention, and those skilled in the art can make various modifications and embellishments without departing from the spirit and scope of the invention. Accordingly, the scope of protection of the present invention should be based on the appended claims. [Explanation of symbols] 【0045】 100: Safety Sampling Module 110: Sampling bottle mounting base 120: Rotating base 122: Pneumatic Rotary Actuator 130: Chemical solution discharge piping relocation device 132: Pneumatic horizontal movement equipment 134: Discharge piping holder 140: Chemical solution discharge piping 150: Lid fastening device 160: Vertical movement device 162: Vertical moving pneumatic cylinder 170: Belt transmission system 180: Air motor 300: Safety Sampling Module 310: Sealed Housing 320: Double-glazed isolation door 400: Safety Chemical Devices 410: Chemical solution storage device 420: Controller 600: Sampling bottle 610: Torso 620: Bottle cap

Claims

[Claim 1] A sampling bottle fixing base used to secure the body of the sampling bottle, It includes a lid-tightening device installed above the sampling bottle fixing base and used to open and close the bottle cap of the sampling bottle, The sampling bottle fixing base secures the sampling bottle by air pressure, and the lid tightening device generates a torsional force by air pressure to rotate the bottle cap of the sampling bottle, thereby opening and closing the bottle cap of the sampling bottle. Safety sampling module. [Claim 2] The safety sampling module according to claim 1, further comprising a rotating base connected to the sampling bottle fixing seat and used for rotating the sampling bottle. [Claim 3] The safety sampling module according to claim 2, further comprising a pneumatic rotary actuator connected to the rotating base so as to roll the sampling bottle by rolling the rotating base. [Claim 4] The safety sampling module according to claim 3, further comprising a vertical movement device connected to the lid-tightening device and used to move the lid-tightening device up and down. [Claim 5] The safety sampling module according to claim 4, characterized in that the vertical movement device includes a vertical movement pneumatic cylinder that moves the lid tightening device up and down by air pressure. [Claim 6] The safety sampling module according to claim 1, further comprising a belt transmission system connected to the lid-tightening device for opening and closing the bottle cap of the sampling bottle. [Claim 7] The safety sampling module according to claim 6, further comprising an air motor connected to the belt transmission system to open and close the bottle cap of the sampling bottle by causing the belt transmission system to rotate and the lid tightening device to rotate. [Claim 8] A sealed housing and The aforementioned sealed housing further includes a double-glazed isolation door attached to the sealed housing, The sampling bottle fixing seat and the lid fastening device are sealed within the sealed housing and the double-glazed isolation door, characterized in that The safety sampling module according to claim 1. [Claim 9] The safety sampling module according to claim 1, further comprising a liquid discharge piping transfer device installed between the sampling bottle fixing seat and the lid tightening device, and used for injecting the liquid into the sampling bottle. [Claim 10] The aforementioned chemical solution discharge piping transfer device, A discharge pipe holder used to secure multiple chemical discharge pipes, The invention is characterized by including a pneumatic horizontal movement device connected to the discharge pipe holder and used to move the chemical solution discharge pipe so as to align it with the sampling bottle, The safety sampling module according to claim 9. [Claim 11] Controller and A safety sampling module according to any one of claims 1 to 10, which is connected to the controller so as to control the safety sampling module by the controller, is characterized in that it includes Safety chemical devices. [Claim 12] The safety chemical device according to claim 11, further comprising a chemical storage device installed on one side of the safety sampling module for sampling the chemical solution. [Claim 13] The safety chemical device according to claim 12, characterized in that the chemical storage device is used for storing flammable organic solvents and chemical agents. [Claim 14] The safety chemical device according to claim 11, characterized in that the safety chemical device is a chemical transmission system, a tanker filling device, or a chemical storage device.

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