Processing equipment

JP7874471B2Active Publication Date: 2026-06-16DISCO CORP

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
DISCO CORP
Filing Date
2022-08-02
Publication Date
2026-06-16

AI Technical Summary

Benefits of technology

【0013】 本発明の加工装眮においおは、被加工物の加工を正垞に実斜できないず刀定された堎合に、その理由を瀺すテキスト(䟋えば、「カバヌロックが出来おいたせん。」)ず、耇数のセンサのそれぞれによっお怜知された情報のうち圓該理由に関連する少なくずも二぀の情報(䟋えば、加工宀カバヌ郚及びカセット宀カバヌ郚のそれぞれの状態に関する情報)ず、が衚瀺ナニットに衚瀺される。

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Abstract

To provide a processing device that can make work for processing a work-piece in a normal manner simple and make a time required for the work shorter.SOLUTION: When it is determined that a work-piece cannot be processed in a normal manner, a processing device displays, on a display unit, a text showing a reason for the determination and at least two pieces of information relating to the reason out of information sensed respectively by a plurality of sensors. This can notify an operator of the fact whether any of the plurality of sensors has sensed an event that disenables the operator to process the work-piece in the normal manner, so that the operator can confirm a constituent element in which the event occurs out of constituent elements of the processing device to return the constituent element into a proper state, which enables the processing device to process the work-piece in the normal manner. This can make work for processing the work-piece in the normal manner simple and make a time required for the work shorter.SELECTED DRAWING: Figure 8
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Claims

[Claim 1] A processing apparatus comprising a holding table for holding a workpiece, and a processing unit for processing the workpiece held by the holding table, Multiple sensors, Display unit and The system includes a control unit that controls the display unit based on information detected by each of the multiple sensors, The control unit is, A determination unit that determines whether or not the workpiece can be processed normally based on the information detected by each of the multiple sensors, The determination unit determines that the workpiece cannot be processed normally, and the display unit controls the display unit to display text indicating the reason why the workpiece cannot be processed normally, and at least two pieces of information related to the reason from the information detected by each of the plurality of sensors. The display unit controls the display unit so that the at least two pieces of information from when the determination unit determined that the workpiece could not be processed normally, and the at least two pieces of information from the current state are displayed together.