Quantum devices and methods for manufacturing quantum devices

Abstract

A quantum device of the present invention has: a first waveguide; an optical resonator connected to the first waveguide; a first light source that introduces first light into the first waveguide; and a second light source that radiates second light onto the optical resonator. The optical resonator has a second waveguide extending in a first direction, and a color center provided to the second waveguide. The second light source has an optical axis in a second direction orthogonal to the first direction, and the color center is irradiated with the second light.

Description

Technical Field

[0001] The present disclosure relates to a quantum device and a method for manufacturing a quantum device.

Background Art

[0002] In recent years, research and development of quantum computers have been vigorously promoted. For example, a quantum computer that uses the energy levels of the electron spins of color centers in diamond as quantum bits is known. In such a quantum computer, the information of the electron spins is converted into the information of photons, and optical reading is performed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The optical transitions used for state reading occur probabilistically based on the selection rules of quantum mechanics. Therefore, in the quantum devices used in conventional quantum computers, it is difficult to efficiently convert the information of electron spins into the information of photons.

[0006] An object of the present disclosure is to provide a quantum device and a method for manufacturing a quantum device that can improve the conversion efficiency of the information of electron spins into the information of photons. [Means for solving the problem]

[0007] According to one embodiment of the present disclosure, the optical resonator comprises a first waveguide, an optical resonator connected to the first waveguide, a first light source for introducing first light into the first waveguide, and a second light source for irradiating the optical resonator with second light, wherein the optical resonator comprises a second waveguide extending in a first direction and a color center provided in the second waveguide. , of the two end faces of the second waveguide in the first direction, a metal film is provided on the second end face opposite to the first end face connected to the first waveguide. It has, The metal film functions as a reflective film for the first light passing through the second waveguide. A quantum device is provided in which the second light source has an optical axis in a second direction perpendicular to the first direction, and the second light is irradiated onto the color center. [Effects of the Invention]

[0008] According to this disclosure, the efficiency of converting electron spin information into photon information can be improved. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a plan view showing a quantum device according to the first embodiment. [Figure 2] Figure 2 is a cross-sectional view showing a quantum device according to the first embodiment. [Figure 3] Figure 3 shows an example of the operation of the quantum device according to the first embodiment. [Figure 4] Figure 4 shows another example of the operation of the quantum device according to the first embodiment. [Figure 5] Figure 5 shows the relationship between the parameter (Ωd / χ) and γmn / γ (where m is 3 or 4, and n is 1 or 2). [Figure 6] Figure 6 is a perspective view (part 1) showing a method for manufacturing an optical resonator in a quantum device according to the first embodiment. [Figure 7] Figure 7 is a perspective view (part 2) showing a method for manufacturing an optical resonator in a quantum device according to the first embodiment. [Figure 8] Figure 8 is a perspective view (part 3) showing a method for manufacturing an optical resonator in a quantum device according to the first embodiment. [Figure 9] Figure 9 is a perspective view (part 4) showing a method for manufacturing an optical resonator in a quantum device according to the first embodiment. [Figure 10] Figure 10 is a perspective view (part 5) showing a method for manufacturing an optical resonator in a quantum device according to the first embodiment. [Figure 11] Figure 11 shows the calculation results of the electromagnetic field distribution according to the first embodiment. [Figure 12] Figure 12 shows the intensity profile of standing waves extracted near the color center. [Figure 13] Figure 13 is a plan view showing a quantum device according to the second embodiment. [Figure 14] Figure 14 is a plan view showing a quantum device according to the third embodiment. [Figure 15] Figure 15 shows a quantum computing device according to the fourth embodiment. [Modes for carrying out the invention]

[0010] Embodiments of this disclosure will be described in detail below with reference to the attached drawings. In this specification and drawings, components having substantially the same functional configuration will be denoted by the same reference numerals to avoid redundant explanations. In this disclosure, the X1-X2 direction, Y1-Y2 direction, and Z1-Z2 direction are mutually orthogonal directions. A plane including the X1-X2 direction and the Y1-Y2 direction is described as the XY plane, a plane including the Y1-Y2 direction and the Z1-Z2 direction is described as the YZ plane, and a plane including the Z1-Z2 direction and the X1-X2 direction is described as the ZX plane. For convenience, the Z1-Z2 direction is considered the up and down direction, with the Z1 side being the upper side and the Z2 side being the lower side. Furthermore, a plan view means viewing the object from the Z1 side, and a planar shape means the shape of the object as viewed from the Z1 side.

[0011] (First Embodiment) A first embodiment will now be described. Figure 1 is a plan view showing a quantum device according to the first embodiment. Figure 2 is a cross-sectional view showing a quantum device according to the first embodiment. Figure 2 corresponds to a cross-sectional view along line II in Figure 1.

[0012] The quantum device 1 according to the first embodiment mainly comprises a first waveguide 100, an optical resonator 200, a first light source 10, a second light source 20, a static magnetic field source 30, and a microwave source 40. The second light source 20 is provided on a printed circuit board 91, the static magnetic field source 30 is provided on a printed circuit board 92, and the microwave source 40 is provided on a printed circuit board 93.

[0013] Printed circuit board 92 is provided on printed circuit board 91, and printed circuit board 93 is provided on printed circuit board 92. The static magnetic field source 30 is located on the second light source 20, and the microwave source 40 is located on the static magnetic field source 30. The second light source 20, the static magnetic field source 30, and the microwave source 40 overlap in the Z1-Z2 direction. The second light source 20 has an optical axis 29 in the Z1-Z2 direction. The second light source 20 is, for example, a coherent light source. The Z1-Z2 direction is an example of the second direction. Note that the stacking order between printed circuit boards 91, 92, and 93 is not limited to the above.

[0014] A substrate 50 is provided on a printed circuit board 93, and a first waveguide 100 and an optical resonator 200 are provided on the substrate 50. The substrate 50 supports the first waveguide 100 and the optical resonator 200. The refractive index of the substrate 50 material is lower than that of diamond. For example, the material of the substrate 50 is silicon oxide (SiO2) or sapphire.

[0015] The optical resonator 200 has a second waveguide 210 extending in the X1-X2 direction. The second waveguide 210 contains a diamond having a color center 220. For example, the second waveguide 210 is made of a diamond having a color center 220. The color center 220 is located at the X2-side end of the second waveguide 210. For example, the color center 220 is located at a distance of several tens of nanometers toward the X1 side from the X2-side end face of the second waveguide 210. The color center 220 is on the optical axis 29. Therefore, the second light 22 emitted from the second light source 20 irradiates the color center 220. The color center 220 is, for example, a nitrogen-vacancy center (NV center) composed of nitrogen and vacancies. The color center 220 may be a silicon-vacancy center (SiV center) composed of silicon and vacancies, a germanium-vacancy center (GeV center) composed of germanium and vacancies, a tin-vacancy center (SnV center) composed of tin and vacancies, a lead-vacancy center (PbV center) composed of lead and vacancies, or a boron-vacancy center (BV center) composed of boron and vacancies. The substrate 50 is an example of a support. The X1-X2 direction is an example of a first direction.

[0016] The second waveguide 210 has multiple openings 211 arranged in the X1-X2 direction at equal intervals. The openings 211 penetrate the second waveguide 210 in the Z1-Z2 direction. The openings 211 function as mirrors. The optical resonator 200 also has a reflective film 230 covering the X2-side end face of the second waveguide 210. The reflective film 230 is a metal film with high reflectivity for visible light. The reflective film 230 is, for example, an Ag film with a thickness of several tens of nanometers. The reflective film 230 suppresses the emission of light from the X2-side end face inside the optical resonator 200.

[0017] The first waveguide 100 is connected to the end on the X1 side of the second waveguide 210. The first waveguide 100 extends in the X1-X2 direction. The first waveguide 100 includes a nitride semiconductor, such as AlN, that has a lower refractive index and a lower absorption rate in the visible light range than diamond. For example, the first waveguide 100 is composed of AlN. The first light source 10 irradiates the first waveguide 100 with the first light 11. The first light source 10 is, for example, a quantum light source.

[0018] In this embodiment, the following relationship holds. The coupling coefficient g of the optical resonator 200 is the resonance frequency ω of the optical resonator 200 c and the emission frequency ω of the color center 220 a The absolute value of the difference between (|ω c -ω a |). The frequency ω of the second light 22 d is equal to ω a -2χ. Here, χ is g 2 / (ω c -ω a ).

[0019] Next, the operation of the quantum device 1 according to the first embodiment will be described. FIG. 3 is a diagram showing an example of the operation of the quantum device 1 according to the first embodiment. FIG. 4 is a diagram showing another example of the operation of the quantum device 1 according to the first embodiment.

[0020] In quantum device 1, the first light 11 is introduced from the first light source 10 into the first waveguide 100, and the first light 11 reaches the color center 220. The color center 220 forms energetically discretized spin levels (spin triplet) within the band gap at a frequency on the order of GHz, corresponding to its own spin quantum number of 1. At this time, if we consider the spin levels with spin magnetic quantum numbers 0 and -1 as qubits, spin 0 exhibits a photo-absorption-emission process between the ground-excited level, i.e., a luminescence relaxation process, in the visible light range. On the other hand, spin -1 exhibits a process of non-luminescence relaxation to the ground level of spin 0 via a metastable state of spin 0 (spin singlet). In other words, after microwave state manipulation of the qubit levels, by measuring the photon information (presence or absence of photon emission) emitted after photoexcitation within a timescale in which state coherence is maintained, it is possible to read out the qubit via photons (spin-photon conversion).

[0021] Furthermore, regarding the luminescence-relaxed transition between the ground and excited levels, based on the Jaynes-Cummings model, two sets of two-level systems are formed, represented by four levels: |g,0>, |g,1>, |e,0>, and |e,1>. Here, g represents the luminescence-relaxed ground level, e represents the luminescence-relaxed excited level, and 0 or 1 represents the number of photons in the optical resonator 200. These two sets of two-level systems are transformed by the second light 22 (external control light) to form dressed levels consisting of four levels: |1>, |2>, |3>, and |4>, as shown in Figures 3 and 4. The two levels |1> and |2> are the levels of the color center 220 itself, while |3> and |4> are levels formed by irradiation with the second light 22. Here, the relaxation rate from the |4> level to the |1> level is γ 41 Let γ be the relaxation rate from level |4> to level |2>. 42 Let γ be the relaxation rate from level |3> to level |1>. 31 Let γ be the relaxation rate from level |3> to level |2>. 32 Let's assume that γ = γ 31 +γ 32 =γ 41 +γ 42 The following holds true. The intensity of the second light 22 is Ω d Therefore, γ31 gamma 32 gamma 41 and γ 42 It can be expressed as follows:

[0022] γ 32 / γ=γ 41 / γ=cos 2 (tan -1 (2Ω d / χ)) γ 31 / γ=γ 42 / γ=sin 2 (tan -1 (2Ω d / χ))

[0023] Figure 5 shows the parameter (Ω d / χ) and γ mn The relationship with / γ (where m is 3 or 4, and n is 1 or 2) is shown. Here, we assume that color center 220 is the NV center, and ω a = 2.959 × 10 15 rad / s (637nm), ω c =ω a +10 10 (1.6GHz), g=10 10 rad / s, χ=10 6 rad / s, Ω d = 5 × 10 5 rad / s, γ = 2.4 × 10⁻⁶ 3 The value is given as rad / s. 637nm is the emission frequency ω of the color center. a This corresponds to the wavelength, and 1.6 GHz is the frequency of the resonator. As shown in Figure 5, the parameter (Ω d When / χ) is 0.5, γ 31 / γ, γ 32 / γ, γ 41 / γ and γ 42 / γ are equal. That is, the parameter (Ω d If / χ) is 0.5, then at least the relaxation rate γ 31 and relaxation rate γ 32 Is it equal to, or relaxation rate γ 41 and relaxation rate γ 42 And are equal. Also, the coupling coefficient g and the volume gω of the optical resonator 200 are equal. c Vm Considering this, (2g 2 / kγ)×(4π 2 / 3λ 3 )×V m The value of Q, expressed as , is approximately 500. This indicates that highly efficient spin-photon conversion occurs. Ultimately, on-demand (deterministic) optical spin-photon conversion may also be possible. Note that k and λ represent the relaxation rate and resonance wavelength of the resonator, respectively.

[0024] In this embodiment, in the example shown in Figure 3, the |3> level is not used, but the three levels |1>, |2>, and |4> are used to focus on a Λ-type three-level system and perform spin-photon conversion. Similarly, in the example shown in Figure 4, the |4> level is not used, but the three levels |1>, |2>, and |3> are used to focus on a Λ-type three-level system and perform spin-photon conversion. During spin-photon conversion, the static magnetic field source 30 generates a static magnetic field extending to the color center 220, and the microwave source 40 generates microwaves extending to the color center 220. A third light 13 (inelastic scattered light) with a different wavelength from the first light 11 is output from the optical resonator 200 to the first waveguide 100. By observing this third light 13, the state of the color center 220 can be understood.

[0025] Thus, in the first embodiment, in the color center 220, one of the spin levels constituting the qubit, specifically the ground-excited state transition that undergoes luminescence relaxation with respect to the first light 11 (readout light) introduced into the color center 220, is coupled with the optical resonator 200. Furthermore, the relaxation rate of the three-level system formed by the application of the second light 22 (external control light) is controlled. As a result, the two relaxation rates from the excited state to the ground state of the three-level system become equal, improving the efficiency of spin-photon conversion. In other words, the efficiency of converting electron spin information into photon information can be improved.

[0026] Next, the manufacturing method of the optical resonator 200 will be described. Figures 6 to 10 are perspective views showing the manufacturing method of the optical resonator 200 in the quantum device 1 according to the first embodiment.

[0027] First, as shown in Figure 6, a thin diamond substrate 210A, which will serve as the base material for the second waveguide 210, is prepared, and the diamond substrate 210A is cleaned. Next, a desired element, such as nitrogen, is implanted by ion implantation or the like, and the color center 220 is formed by annealing (activation treatment).

[0028] Subsequently, as shown in Figure 7, a diamond substrate 210B is obtained that is closer in dimensions to the second waveguide 210 than the diamond substrate 210A by processing using a focused ion beam (FIB) method and forming the aperture 211.

[0029] Next, as shown in Figure 8, a reflective film 230 is formed by vapor deposition or the like so as to cover the X2 side end face of the diamond substrate 210B.

[0030] Next, as shown in Figure 9, the diamond substrate 210B is processed using FIB or the like to obtain the second waveguide 210.

[0031] Subsequently, as shown in Figure 10, the second waveguide 210 is bonded to the substrate 50. For example, the first waveguide 100 is formed on the substrate 50 beforehand.

[0032] In this way, the optical resonator 200 can be manufactured.

[0033] When manufacturing the quantum device 1, a printed circuit board 91 equipped with a second light source 20, a printed circuit board 92 equipped with a static magnetic field source 30, and a printed circuit board 93 equipped with a microwave source 40 are stacked. Then, a substrate 50 (see Figure 10) on which the first waveguide 100 and optical resonator 200 are provided is placed on top of the printed circuit board 93. The first light source 10 may be connected to the first waveguide 100 in advance, or it may be connected to the first waveguide 100 after the substrate 50 is placed on the printed circuit board 93.

[0034] Here, we will explain the calculation results of the electromagnetic field distribution according to the first embodiment. In this calculation, assuming that the color center 220 is an NV center, the electromagnetic field distribution inside the optical resonator 200 was determined under the following dimensions (structural parameters).

[0035] The distance between the X2 end face of the second waveguide 210 and the color center 220 is 25 nm. The reflective film 230 is an Ag film with a thickness of 10 nm. The diameter of the aperture 211 is 100 nm. The pitch of the aperture 211 is 200 nm. The length of the second waveguide 210 (dimension in the X1-X2 direction) is 2000 nm. The width of the second waveguide 210 (dimension in the Y1-Y2 direction) is 280 nm. The height of the second waveguide 210 (dimension in the Z1-Z2 direction) is 120 nm.

[0036] Figure 11 shows the calculation results of the electromagnetic field distribution according to the first embodiment. The electromagnetic field intensity is normalized. The horizontal axis in Figure 11 shows the position with the X1 side end face of the optical resonator 200 as the reference and the X2 side as the positive. The vertical axis in Figure 11 shows the position with the Y1-Y2 direction center of the optical resonator 200 as the reference and the Y1 side as the positive. As shown in Figure 11, since a reflective film 230 is provided, the emission of energy toward the X2 side is suppressed beyond the reflective film 230. In addition, a standing wave with a relatively high electromagnetic field intensity is formed at the position of the color center 220. Figure 12 shows the intensity profile of the standing wave extracted near the color center 220. The Q value of the optical resonator 200 estimated from the intensity profile shown in Figure 12 is 520. This indicates that highly efficient spin-photon conversion is performed. In general, if the Q value is around 500, on-demand (deterministic) photon generation is possible. Therefore, the calculation results of this electromagnetic field distribution suggest that on-demand (deterministic) photon generation is possible according to the quantum device 1 of the first embodiment.

[0037] (Second Embodiment) A second embodiment will now be described. Figure 13 is a plan view showing a quantum device according to the second embodiment.

[0038] The quantum device 2 according to the second embodiment has an optical resonator 300 instead of the optical resonator 200. The optical resonator 300 has a second waveguide 310 extending in the X1-X2 direction and a ring resonator 340.

[0039] The second waveguide 310, like the second waveguide 210, includes a diamond having a color center 320. For example, the second waveguide 310 is made of a diamond having a color center 320. The color center 320 is located at the X2-side end of the second waveguide 310. For example, the color center 320 is located several tens of nanometers away from the X2-side end face of the second waveguide 310 towards the X1 side. Similar to the color center 220, the color center 320 is on the optical axis 29 (see Figure 2). Therefore, the second light 22 emitted from the second light source 20 irradiates the color center 320. The color center 320 is, for example, an NV center, SiV center, GeV center, SnV center, PbV center, or BV center. Unlike the second waveguide 210, the second waveguide 310 does not have an opening.

[0040] The ring resonator 340 contains diamond. For example, the ring resonator 340 is made of diamond. The ring resonator 340 is coupled to the portion of the second waveguide 310 where the color center 320 is located.

[0041] The other configurations are the same as in the first embodiment.

[0042] In the second embodiment, the electromagnetic field distribution of the eigenmodes within the ring resonator 340 is reflected in the second waveguide 310, and the electromagnetic field strength increases near the color center 320. As a result, the interaction between the color center 320 and the electromagnetic field is enhanced. In other words, the absorption and emission of light by the color center 320 is enhanced. And, as in the first embodiment, the efficiency of converting electron spin information into photon information can be improved in the second embodiment as well.

[0043] (Third embodiment) A third embodiment will now be described. Figure 14 is a plan view showing a quantum device according to the third embodiment.

[0044] The quantum device 3 according to the third embodiment has an optical resonator 400 instead of an optical resonator 200. The optical resonator 400 has a second waveguide 410 extending in the X1-X2 direction and a third waveguide 450 extending in the Y1-Y2 direction.

[0045] The second waveguide 410, like the second waveguide 210, includes a diamond having a color center 420. For example, the second waveguide 410 is made of a diamond having a color center 420. The color center 420 is located at the X2-side end of the second waveguide 410. For example, the color center 420 is located several tens of nanometers away from the X2-side end face of the second waveguide 410 towards the X1 side. Similar to the color center 220, the color center 420 is on the optical axis 29 (see Figure 2). Therefore, the second light 22 emitted from the second light source 20 irradiates the color center 420. The color center 420 is, for example, an NV center, SiV center, GeV center, SnV center, PbV center, or BV center. Unlike the second waveguide 210, the second waveguide 410 does not have an opening.

[0046] The third waveguide 450 contains diamond. For example, the third waveguide 450 is made of diamond. The third waveguide 450 is perpendicular to the second waveguide 410 in a T-shape. The third waveguide 450 has a portion extending towards Y1 from the intersection with the second waveguide 410 and a portion extending towards Y2. The color center 420 may also be included in the third waveguide 450. The third waveguide 450 has a plurality of openings 451 arranged in the Z1-Z2 direction and formed at equal intervals. The openings 451 penetrate the third waveguide 450 in the Z1-Z2 direction. The openings 451 function as mirrors.

[0047] The other configurations are the same as in the first embodiment.

[0048] In the third embodiment, the electromagnetic field distribution of the eigenmodes within the third waveguide 450 is reflected in the second waveguide 410, and the electromagnetic field strength increases near the color center 420. As a result, the interaction between the color center 420 and the electromagnetic field is enhanced. In other words, the absorption and emission of light by the color center 420 is enhanced. And, as with the first embodiment, the third embodiment can also improve the efficiency of converting electron spin information into photon information.

[0049] (Fourth Embodiment) A fourth embodiment will now be described. Figure 15 shows a quantum computing device according to the fourth embodiment.

[0050] The quantum computing device 4 according to the fourth embodiment includes one beam splitter 67, two detectors 68, two wavelength filters 66, and two multiplexers 65. One end of four waveguides 73 is connected to each multiplexer 65, a half mirror 64 is provided at the other end of the waveguide 73, and one end of a waveguide 72 is connected to the half mirror 64. A waveguide 71 is connected in a T-shape to the other end of the waveguide 72. A first light source 61 is connected to one end of the waveguide 71, and an optical resonator 62 is connected to the other end. A dielectric mirror 63 is provided at the intersection of waveguide 71 and waveguide 72. For example, a first light source 10 is used as the first light source 61. For example, an optical resonator 200, 300, or 400 is used as the optical resonator 62. Although not shown in the diagram, below the optical resonator 62, a second light source 20, a static magnetic field source 30, and a microwave source 40 are provided, similar to the first, second, or third embodiment. For example, the first waveguide 100 is used as the waveguide 71.

[0051] Thus, in the fourth embodiment, the structures of the first, second, or third embodiment are arranged in parallel.

[0052] During single-qubit operation, after a state manipulation of the color center (qubit) using microwaves, the first light (readout light) is incident on the optical resonator 62 via the dielectric mirror 63. Additionally, the second light is irradiated onto the color center from the second light source. The first light is reflected by the optical resonator 62, and a third light (photon) is output. The third light (photon) is reflected by the dielectric mirror 63 towards the waveguide 72, and is detected by the detector 68 after passing through the half-mirror 64, waveguide 73, multiplexer 65, wavelength filter 66, and beam splitter 67.

[0053] During two-qubit operation, a third beam (photon) output from one multiplexer 65 is correlated with a third beam (photon) output from the other multiplexer 65 by a beam splitter 67. By observing the two photons with a detector, an entangled state between the qubits can be formed via the photons.

[0054] Thus, the combination of arbitrary gate operations on one qubit and gate operations on two qubits enables universal quantum computation. Therefore, according to this embodiment, a general-purpose quantum computer using diamond color centers can be constructed.

[0055] Although preferred embodiments have been described in detail above, the invention is not limited to the embodiments described above, and various modifications and substitutions can be made to the embodiments described above without departing from the scope of the claims. [Explanation of Symbols]

[0056] 1, 2, 3: Quantum devices 4: Quantum computing device 10, 61: 1st light source 11:First light 13: Third light 20:Second light source 22:Second light 29: Optical axis 30: Static magnetic field source 40: Microwave source 50: Circuit board 62, 200, 300, 400: Optical resonator 71, 72, 73: Waveguides 100: Waveguide 1 210, 310, 410: Second waveguide 211, 451: Opening 220, 320, 420: Color Center 230: Reflective film 340: Ring resonator 450: Third Waveguide

Claims

1. The first waveguide and, An optical resonator connected to the first waveguide, A first light source that introduces first light into the first waveguide, A second light source that irradiates the optical resonator with second light, It has, The optical resonator includes a second waveguide extending in a first direction, a color center provided in the second waveguide, and a metal film provided on the second end face of the second waveguide, which is one of the two end faces in the first direction of the second waveguide and is opposite to the first end face connected to the first waveguide. The metal film functions as a reflective film for the first light passing through the second waveguide. The second light source has an optical axis in a second direction perpendicular to the first direction, A quantum device characterized in that the second light is irradiated onto the color center.

2. The quantum device according to claim 1, characterized in that a third light having a different wavelength from the first light is output from the optical resonator to the first waveguide.

3. The color center is provided at one end of the second waveguide. The quantum device according to claim 1, characterized in that the first waveguide is connected to the other end of the second waveguide.

4. A static magnetic field source that generates a magnetic field extending to the aforementioned color center, A microwave source that generates microwaves extending to the aforementioned color center, A quantum device according to claim 1 or 2, characterized by having the following features.

5. The quantum device according to claim 1 or 2, characterized in that the color center includes a composite defect of N, Si, Ge, Sn, or Pb or any combination thereof, and a vacancy.

6. The quantum device according to claim 1 or 2, characterized in that the material of the second waveguide is diamond, and the refractive index of the material of the first waveguide is lower than that of diamond.

7. The first light source is a quantum light source, The quantum device according to claim 1 or 2, characterized in that the second light source is a coherent light source.

8. The quantum device according to claim 1 or 2, characterized in that a plurality of openings arranged in the first direction are formed at equal intervals in the second waveguide.

9. The quantum device according to claim 1 or 2, characterized in that the coupling coefficient of the optical resonator is smaller than the absolute value of the difference between the resonance frequency of the optical resonator and the emission frequency of the color center.

10. The first light source is a coherent light source, The light intensity of the second light source is Ωd, the coupling coefficient of the optical resonator is g, and the resonance frequency of the optical resonator is ω ｃ The emission frequency of the color center is ω ａ , when that is the case, χ = g ２ / (ω ｃ - ω ａ ), and አማርስ ２ (tan) －１ (2Ω) ｄ / x))=sin ２ (tan) －１ (2Ω) ｄ / x)) A quantum device according to claim 1 or 2, characterized in that the following holds true.

11. The frequency of the second light is ω ａ The quantum device according to claim 10, characterized in that it is equal to -2χ.

12. The process of installing an optical resonator connected to the first waveguide, A step of providing a first light source for introducing first light into the first waveguide, A step of providing a second light source that irradiates the optical resonator with a second light, It has, The optical resonator has a second waveguide extending in a first direction and a color center provided in the second waveguide. A method for manufacturing a quantum device, characterized in that the second light source has an optical axis in a second direction perpendicular to the first direction, and is arranged so that the second light irradiates the color center.

Images