Inspection system and method for analyzing defects

JP7880308B2Active Publication Date: 2026-06-25ビットリンス スポレチノスト ス ルチェニーム オメゼニーム
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
ビットリンス スポレチノスト ス ルチェニーム オメゼニーム
Filing Date
2023-05-31
Publication Date
2026-06-25

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【0028】 検査システムを用いて製品、特に印刷回路基板製品、半導体ウェハ等の欠陥を分析する本発明の方法において、検査システムであって、検査システムは、検査装置と、投光装置と、光学的検出装置と、処理装置と、白色光をそのスペクトル成分に分光し、このように単色光線から形成された多色光線を製品に入射角βで投光するために使用される投光装置の照明ユニット及び分光器部材とを備え、この光学的検出装置は、カメラ及び対物レンズを有する検出ユニットを有し、多色光線は、検出ユニットの検出面において製品上で反射され、検出面は、製品の製品表面に対して垂直であり、好ましくは直交であり、多色光線はカメラによって検出され、この多色光線は、一列に配置された少なくとも2つの発光ダイオードと、前記一列に沿って延びる照明ユニットの出口アパーチャとが、検出面に沿って白色光の均一な強度分布を確立するために使用される、検査システムを用いて使用される。本発明による方法の有利な効果に関して、本発明による検査システムの利点の説明を参照する。

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Abstract

To provide an inspection system and a method for analyzing defects in a product, particularly a printed circuit board product, a semiconductor wafer, or the like.SOLUTION: An inspection system and a method include a projection device 11, an optical detection device 12, and a processing device. The projection device has an illuminating unit 16 and a spectrometer member configured to split white light into its spectral components and project a multichromatic light beam 18 thus formed from monochromatic light beams onto a product 19 at an angle of incidence β. The optical detection device has a detection unit 13 including a camera 14 and an objective lens 15. The camera is configured to detect the multichromatic light beam reflected on the product in a detection plane 21 of the detection unit, and the detection plane is perpendicular, preferably orthogonal, to a product surface 20 of the product. The illuminating unit has at least two light-emitting diodes arranged in a row and an exit aperture 25 extending along the row.SELECTED DRAWING: Figure 1
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Claims

1. An inspection system (10) for analyzing product defects, the inspection system (10) comprises a light projector (11), an optical detection device (12), and a processing device for calculating the height of the product surface from the spatial distribution of reflected polychromatic light rays onto the camera chip of a camera (14), the light projector (11) having illumination units (16, 26) and a spectrometer member (17) configured to spectrally separate white light into its spectral components and project polychromatic light rays (18) formed from monochromatic light rays onto the product (19) at an incident angle β, the optical detection device (12) having a detection unit (13) comprising a camera (14) and an objective lens (15), the camera being configured to detect polychromatic light rays reflected on the product at the detection surface (21) of the detection unit, the detection surface being perpendicular to the product surface (20) of the product, in the inspection system (10), The lighting unit has at least two light-emitting diodes (24, 27) arranged in a row (23) and exit apertures (25, 42) extending along the row. The inspection system (10) is characterized in that the lighting units (16, 26) each have aperture members (29) associated with the light-emitting diodes (24, 27).

2. The inspection system according to claim 1, characterized in that the lighting units (16, 26) are configured to establish a uniform intensity distribution of the white light along the detection surface (21).

3. The inspection system according to claim 1, wherein the lighting unit (16, 26) has an LED module (28) comprising a plurality of light-emitting diodes (24, 27), and the plurality of light-emitting diodes (24, 27) arranged in a row on the LED module (28) and spaced apart from each other are arranged parallel to the detection surface (21).

4. The inspection system according to claim 1, characterized in that the aperture member (29) has a three-dimensional aperture (30) having a cross section (32) that extends from the light-emitting diodes (24, 27) in the direction of the beam path (31) of the light-emitting device (11).

5. The inspection system according to claim 4, characterized in that each of the three-dimensional apertures (30) of the aperture member (29) is adjacent to one another.

6. The inspection system according to claim 4, characterized in that the three-dimensional aperture (30) has a pyramidal shape.

7. The inspection system according to claim 4, characterized in that the three-dimensional aperture (30) is formed by optical components, preferably at least one planar plate (33, 34, 35, 36, 37).

8. The inspection system according to claim 4, characterized in that the three-dimensional aperture (30) is formed by a laminate (38) of a plurality of optical components, preferably planar plates (33, 34, 35, 36, 37).

9. The inspection system according to claim 1, characterized in that the lighting units (16, 26) each have a lens assembly (39) associated with a light-emitting diode (24, 27).

10. The inspection system according to claim 9, characterized in that the lens assembly (39) has at least two lenses (40, 41) configured to focus and / or concentrate the white light of the light-emitting diodes (24, 27).

11. The inspection system according to claim 9, characterized in that the focal point of the lens assembly (39) is formed within the exit aperture (25, 42).

12. The inspection system according to claim 1, characterized in that the outlet apertures (25, 42) are formed by an uninterrupted gap (43).

13. The inspection system according to claim 1, characterized in that the spectrometer member (17) is positioned adjacent to and directly downstream of the illumination units (16, 26) in the direction of the beam path (31) of the light projection device (11).

14. The inspection system according to claim 1, characterized in that the spectrometer member (17) has at least one diffracting and / or dispersing optical element extending parallel to the detection surface (21).

15. The inspection system according to any one of claims 1 to 14, characterized in that the light projector (11) is configured to emit light in the wavelength range of red, green, blue (RGB), infrared (IR), and / or ultraviolet (UV), preferably in the wavelength range of 400 nm to 700 nm, and the camera (14) is configured to detect the light.

16. A method for analyzing product defects, In a method using the inspection system (10), the inspection system (10) comprises a light projector (11), an optical detection device (12), a processing device for calculating the height of the product surface from the spatial distribution of reflected polychromatic light rays onto the camera chip of a camera (14), illumination units (16, 26), and a spectrometer member (17) that spectrally separates white light into its spectral components and projects the polychromatic light rays (18) formed from monochromatic light rays onto the product (19) at an incident angle β, wherein the optical detection device has a detection unit (13) comprising a camera (14) and an objective lens (15), the polychromatic light rays are reflected on the product at the detection surface (21) of the detection unit, the detection surface is perpendicular to the product surface (20) of the product, and the polychromatic light rays are detected by the camera, The method comprises the step of using at least two light-emitting diodes (24, 27) arranged in a row (23) and exit apertures (25, 42) of the illumination unit extending along the row in order to establish a uniform intensity distribution of the white light along the detection surface. The lighting units (16, 26) each have aperture members (29) associated with the light-emitting diodes (24, 27), The method is characterized by comprising the step of analyzing defects in the product using the inspection system (10).