Chemical solution supply pump and chemical solution supply pump system

Abstract

By miniaturizing the film-type volume change mechanism, the substitution characteristics are further improved, and a chemical supply pump is provided that can uniformly form a thin film by dropping a fixed amount of resist solution onto a wafer, thereby improving wafer yield. [Solution] The pump chamber 10 is used for inhaling and discharging the drug solution, there is an inhalation passage 20 for drawing the drug solution into the pump chamber 10, there is a discharge passage 30 for discharging the drug solution from the pump chamber 10, there is a pump-side diaphragm 40 for pressurizing or depressurizing the pump chamber 10, and there are valve-side diaphragms 50 and 60 for opening and closing the inhalation passage 20 and the discharge passage 30. The pump chamber 10 is depressurized, the inhalation passage 20 is opened and the discharge passage 30 is closed to draw the drug solution into the pump chamber 10, and the pump chamber 10 is pressurized, the discharge passage 30 is opened and the inhalation passage 20 is closed to discharge the drug solution from the pump chamber 10. The pump-side diaphragm 40 and the valve-side diaphragms 50 and 60 are arranged in parallel.

Description

Technical Field

[0001] The present invention relates to a chemical solution supply pump and a chemical solution supply pump device used in a photoresist coating process in semiconductor manufacturing.

Background Art

[0002] The film thickness of the photoresist is controlled by the viscosity of the photoresist solution, the type of solvent, the wafer rotation speed, etc. However, it cannot be uniformly coated unless the same amount of photoresist solution is dropped each time. The photoresist solution is a photosensitive resin solution, which is altered by light or ultraviolet rays and also by contact with gas. Therefore, the resist pump is required to have a constant discharge and needs to pay attention to air bubble entrainment. Patent Document 1 and Patent Document 2 propose a resist pump using a bellows type volume change mechanism. Also, Patent Document 3 proposes a resist pump using an elastic tube type volume change mechanism. Also, Patent Documents 4 to 6 propose a resist pump using a diaphragm type volume change mechanism using a diaphragm.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

[0004] However, the bellows-type volume change mechanism proposed in Patent Documents 1 and 2 has good responsiveness, but it has the problem that air bubbles tend to accumulate in the bellows section. Furthermore, while the elastic tube type volume change mechanism proposed in Patent Document 3 allows air bubbles to escape easily, the tube becomes white, which can lead to particle generation. The membrane-type volume change mechanism proposed in Patent Documents 4 to 6 has the advantage of being less prone to bubble accumulation and less prone to deterioration of the membrane compared to the bellows-type volume change mechanism.

[0005] Therefore, the present invention aims to provide a chemical supply pump that can further improve substitution characteristics by miniaturizing the film-type volume change mechanism, thereby uniformly forming a thin film by dropping a fixed amount of resist solution onto a wafer, and improving wafer yield. [Means for solving the problem]

[0006] The chemical solution supply pump of the present invention as described in claim 1 comprises a pump chamber 10 for inhaling and discharging a chemical solution, an inhalation passage 20 for drawing the chemical solution into the pump chamber 10, a discharge passage 30 for discharging the chemical solution from the pump chamber 10, a pump-side diaphragm 40 for pressurizing or depressurizing the pump chamber 10, and valve-side diaphragms 50, 60 for opening and closing the inhalation passage 20 and the discharge passage 30, wherein the pump chamber 10 is depressurized, the inhalation passage 20 is opened, the discharge passage 30 is closed to draw the chemical solution into the pump chamber 10, the pump chamber 10 is pressurized, the discharge passage 30 is opened, and the inhalation passage 20 is closed to discharge the chemical solution from the pump chamber 10, characterized in that the pump-side diaphragm 40 and the valve-side diaphragms 50, 60 are arranged in parallel. The present invention as described in claim 2 is characterized in that, in the chemical supply pump described in claim 1, at least a portion of the valve-side diaphragms 50 and 60 are arranged within the projection plane of the pump-side diaphragm 40. The present invention as described in claim 3 is a chemical supply pump as described in claim 1, wherein the valve-side diaphragms 50 and 60 include an intake valve-side diaphragm 50 that opens and closes the intake passage 20 and a discharge valve-side diaphragm 60 that opens and closes the discharge passage 30, and at least a portion of the intake valve-side diaphragm 50 and at least a portion of the discharge valve-side diaphragm 60 are arranged within the projection plane of the pump-side diaphragm 40. The present invention as described in claim 4 is a chemical supply pump as described in claim 3, characterized in that the intake port 21 of the intake passage 20 and the discharge port 31 of the discharge passage 30 are arranged on the outer periphery of the pump chamber 10, the pump-side intake passage 22 that forms the intake port 21 is arranged within the projection plane of the pump-side diaphragm 40, the pump-side discharge passage 32 that forms the discharge port 31 is arranged within the projection plane of the pump-side diaphragm 40, the intake valve side opening 23 of the pump-side intake passage 22 is arranged within the range of the intake valve side diaphragm 50, and the discharge valve side opening 33 of the pump-side discharge passage 32 is arranged within the range of the discharge valve side diaphragm 60. The present invention as described in claim 5 is a chemical supply pump as described in claim 1, comprising a bubble removal passage 70 for discharging bubbles from the pump chamber 10, and a bubble removal diaphragm 80 for opening and closing the bubble removal passage 70, wherein at least a portion of the bubble removal diaphragm 80 is arranged within the projection plane of the pump-side diaphragm 40. The present invention as described in claim 6 is characterized in that, in the chemical supply pump as described in claim 5, the outlet 71 of the air venting passage 70 is arranged on the outer periphery of the pump chamber 10, the pump-side air venting passage 72 that forms the outlet 71 is arranged within the projection plane of the pump-side diaphragm 40, and the discharge valve-side opening 73 of the pump-side air venting passage 72 is arranged within the range of the air venting diaphragm 80. The present invention as described in claim 7 is a chemical supply pump as described in claim 1, wherein the valve-side diaphragms 50 and 60 include an intake valve-side diaphragm 50 that opens and closes the intake passage 20 and a discharge valve-side diaphragm 60 that opens and closes the discharge passage 30, and has a pump-side working chamber 41 that operates the pump-side diaphragm 40, an intake valve-side working chamber 51 that operates the intake valve-side diaphragm 50 and a discharge valve-side working chamber 61 that operates the discharge valve-side diaphragm 60, and supplies pump-side working air to the pump-side working chamber 41. The pump chamber 10 is pressurized, the pump chamber 10 is depressurized by discharging the pump-side operating air from the pump-side operating chamber 41, the suction passage 20 is closed by supplying the suction valve-side operating air to the suction valve-side operating chamber 51, the suction passage 20 is opened by discharging the suction valve-side operating air from the suction valve-side operating chamber 51, the discharge passage 30 is closed by supplying the discharge valve-side operating air to the discharge valve-side operating chamber 61, and the discharge passage 30 is opened by discharging the discharge valve-side operating air from the discharge valve-side operating chamber 61. The present invention as described in claim 8 is a chemical supply pump as described in claim 1, wherein the valve-side diaphragms 50 and 60 include an intake valve-side diaphragm 50 that opens and closes the intake passage 20 and a discharge valve-side diaphragm 60 that opens and closes the discharge passage 30, the pump chamber 10 has an intake port 21 of the intake passage 20 and an outlet port 31 of the discharge passage 30, the pump-side intake passage 22 that forms the intake port 21 has an intake valve-side opening 23 that is opened and closed by the intake valve-side diaphragm 50, the pump-side discharge passage 32 that forms the discharge port 31 has a discharge valve-side opening 33 that is opened and closed by the discharge valve-side diaphragm 60, the pump-side intake passage 22 and the pump-side discharge passage 32 are formed in a first block A, the pump chamber 10 is formed on one end face of the first block A The other end face of block A is formed with the intake valve side opening 23 and the discharge valve side opening 33, the pump side diaphragm 40 is placed on the one end face of the first block A, the intake valve side diaphragm 50 and the discharge valve side diaphragm 60 are placed on the other end face of the first block A, the second block B is placed on the one end face of the first block A, the pump side operating chamber 41 for operating the pump side diaphragm 40 is formed on the surface of the second block B that abuts against the first block A, the third block C is placed on the other end face of the first block A, and the intake valve side operating chamber 51 for operating the intake valve side diaphragm 50 and the discharge valve side operating chamber 61 for operating the discharge valve side diaphragm 60 are formed on the surface of the third block C that abuts against the first block A. The present invention as described in claim 9 is a chemical supply pump as described in claim 8, wherein the second block B has a pump-side operating air passage 42 that supplies pump-side operating air to the pump-side operating chamber 41 and discharges the pump-side operating air from the pump-side operating chamber 41, and the third block C has an suction valve-side operating air passage 52 that supplies suction valve-side operating air to the suction valve-side operating chamber 51 and discharges the suction valve-side operating air from the suction valve-side operating chamber 51, and a discharge valve-side operating air passage 62 that supplies discharge valve-side operating air to the discharge valve-side operating chamber 61 and discharges the discharge valve-side operating air from the discharge valve-side operating chamber 61. The present invention as described in claim 10 is characterized in that, in the chemical supply pump described in claim 8, the suction valve side diaphragm 50 and the discharge valve side diaphragm 60 are formed from a single diaphragm. The present invention as described in claim 11 is characterized in that, in the chemical supply pump described in claim 1, the pump-side diaphragm 40 is formed of a composite material of polyimide and fluororesin. The present invention as described in claim 12 is characterized in that, in the chemical supply pump described in claim 1, the valve-side diaphragms 50 and 60 are formed from a composite material of polyimide and fluororesin. The present invention as described in claim 13 is characterized in that, in the chemical supply pump described in claim 8, the pump-side diaphragm 40 is welded to the one end face of the first block A. The present invention as described in claim 14 is characterized in that, in the chemical supply pump described in claim 8, the suction valve side diaphragm 50 and the discharge valve side diaphragm 60 are welded to the other end face of the first block A. The chemical solution supply pump device of the present invention according to claim 15 comprises a first chemical solution supply pump F and a second chemical solution supply pump R, wherein the first chemical solution supply pump F comprises a first pump chamber 10A for inhaling and discharging a chemical solution, a first suction passage 20A for drawing the chemical solution into the first pump chamber 10A, a first discharge passage 30A for discharging the chemical solution from the first pump chamber 10A, a first pump-side diaphragm 40A for pressurizing or depressurizing the first pump chamber 10A, a first suction valve-side diaphragm 50A for opening and closing the first suction passage 20A, and a first discharge valve-side diaphragm 60A for opening and closing the first discharge passage 30A, and the second chemical solution supply pump R Pump R is a chemical supply pump device having a second pump chamber 10B for inhaling and discharging a chemical solution, a second inhalation passage 20B for inhaling the chemical solution into the second pump chamber 10B, a second discharge passage 30B for discharging the chemical solution from the second pump chamber 10B, a second pump-side diaphragm 40B for pressurizing or depressurizing the second pump chamber 10B, a second inhalation valve-side diaphragm 50B for opening and closing the second inhalation passage 20B, and a second discharge valve-side diaphragm 60B for opening and closing the second discharge passage 30B, characterized in that the first pump-side diaphragm 40A and the second pump-side diaphragm 40B are arranged parallel to each other within block X. The present invention as described in claim 16 is characterized in that, in the chemical solution supply pump device described in claim 15, at least a portion of the first suction valve side diaphragm 50A and at least a portion of the first discharge valve side diaphragm 60A are arranged within the projection plane of the first pump side diaphragm 40A, and at least a portion of the second suction valve side diaphragm 50B and at least a portion of the second discharge valve side diaphragm 60B are arranged within the projection plane of the second pump side diaphragm 40B. The present invention as described in claim 17 is a chemical supply pump device as described in claim 15, characterized in that it has a first bubble removal passage 70A for discharging bubbles from the first pump chamber 10A and a first bubble removal diaphragm 80A for opening and closing the first bubble removal passage 70A, wherein at least a portion of the first bubble removal diaphragm 80A is arranged within the projection plane of the first pump-side diaphragm 40A, and a second bubble removal passage 70B for discharging bubbles from the second pump chamber 10B and a second bubble removal diaphragm 80B for opening and closing the second bubble removal passage 70B, wherein at least a portion of the second bubble removal diaphragm 80B is arranged within the projection plane of the second pump-side diaphragm 40B. The present invention as described in claim 18 is a chemical supply pump device as described in claim 15, wherein a first inlet 21A of the first inlet passage 20A and a first discharge port 31A of the first discharge passage 30A are arranged in the first pump chamber 10A, the first pump-side inlet passage 22A forming the first inlet 21A has a first inlet valve-side opening 23A that is opened and closed by the first inlet valve-side diaphragm 50A, and the first pump-side discharge passage 32A forming the first discharge port 31A has a first discharge valve-side opening 33A that is opened and closed by the first discharge valve-side diaphragm 60A. The first pump-side suction passage 22A and the first pump-side discharge passage 32A are formed in the first block A, the first pump chamber 10A is formed on one end face of the first block A, the first suction valve-side opening 23A and the first discharge valve-side opening 33A are formed on the other end face of the first block A, the first pump-side diaphragm 40A is placed on the one end face of the first block A, the first suction valve-side diaphragm 50A and the first discharge valve-side diaphragm 60A are placed on the other end face of the first block A, A second block B is positioned, and a first pump-side operating chamber 41A for operating the first pump-side diaphragm 40A is formed on the surface of the second block B that abuts against the first block A, and a third block C is positioned on the other end surface of the first block A, and a first suction valve-side operating chamber 51A for operating the first suction valve-side diaphragm 50A and a first discharge valve-side operating chamber 61A for operating the first discharge valve-side diaphragm 60A are formed on the surface of the third block C that abuts against the first block A, and within the second pump chamber 10B, the first of the second suction passages 20B Two suction ports 21B and a second discharge port 31B of the second discharge passage 30B are arranged, and the second pump-side suction passage 22B forming the second suction port 21B has a second suction valve-side opening 23B that is opened and closed by the second suction valve-side diaphragm 50B, and the second pump-side discharge passage 32B forming the second discharge port 31B has a second discharge valve-side opening 33B that is opened and closed by the second discharge valve-side diaphragm 60B, and the second pump-side suction passage 22B and the second pump-side discharge passage 32B are formed in the first block A, and on one end face of the first block A,The invention is characterized in that the second pump chamber 10B is formed, the second suction valve side opening 23B and the second discharge valve side opening 33B are formed on the other end face of the first block A, the second pump side diaphragm 40B is placed on the one end face of the first block A, the second suction valve side diaphragm 50B and the second discharge valve side diaphragm 60B are placed on the other end face of the first block A, the second block B is placed on the one end face of the first block A, the second pump side operating chamber 41B for operating the second pump side diaphragm 40B is formed on the surface of the second block B that abuts against the first block A, the third block C is placed on the other end face of the first block A, and the second suction valve side operating chamber 51B for operating the second suction valve side diaphragm 50B and the second discharge valve side operating chamber 61B for operating the second discharge valve side diaphragm 60B are formed on the surface of the third block C that abuts against the first block A. , The present invention as described in claim 19 is a chemical solution supply pump device as described in claim 18, wherein the second block B has a first pump-side operating air passage 42A that supplies first pump-side operating air to the first pump-side operating chamber 41A and discharges the first pump-side operating air from the first pump-side operating chamber 41A, and a second pump-side operating air passage 42B that supplies second pump-side operating air to the second pump-side operating chamber 41B and discharges the second pump-side operating air from the second pump-side operating chamber 41B, and the third block C has a first suction valve-side operating passage that supplies first suction valve-side operating air to the first suction valve-side operating chamber 51A and discharges the first suction valve-side operating air from the first suction valve-side operating chamber 51A The device is characterized by having an intake valve side operating air passage 52A, a first discharge valve side operating air passage 62A that supplies first discharge valve side operating air to the first discharge valve side operating chamber 61A and discharges the first discharge valve side operating air from the first discharge valve side operating chamber 61A, a second intake valve side operating air passage 52B that supplies second intake valve side operating air to the second intake valve side operating chamber 51B and discharges the second intake valve side operating air from the second intake valve side operating chamber 51B, and a second discharge valve side operating air passage 62B that supplies second discharge valve side operating air to the second discharge valve side operating chamber 61B and discharges the second discharge valve side operating air from the second discharge valve side operating chamber 61B. The present invention as described in claim 20 is characterized in that, in the chemical solution supply pump device described in claim 15, the first discharge passage 30A and the second suction passage 20B are connected via a filter 7, and a filter bubble removal passage 70C for discharging air bubbles from the filter 7 and a filter bubble removal diaphragm 80C for opening and closing the filter bubble removal passage 70C are arranged within the block X. The present invention as described in claim 21 is a chemical supply pump device as described in claim 17, wherein the first discharge passage 30A and the second suction passage 20B are connected via a filter 7, a filter bubble removal passage 70C for discharging air bubbles from the filter 7 and a filter bubble removal diaphragm 80C for opening and closing the filter bubble removal passage 70C are arranged in the block X, the first pump chamber 10A is depressurized, the first suction passage 20A is opened, and the first discharge passage 30A and the first air The de-bubble passage 70A is closed to draw the chemical solution into the first pump chamber 10A, pressurize the first pump chamber 10A, close the first suction passage 20A and the first discharge passage 30A, open the first de-bubble passage 70A to discharge the bubbles from the first pump chamber 10A, pressurize the first pump chamber 10A, close the first suction passage 20A, the first de-bubble passage 70A, and the second suction passage 20B, open the first discharge passage 30A to draw the chemical solution into the filter 7, and Pressurize the first pump chamber 10A, close the first suction passage 20A, the first bubble removal passage 70A and the second suction passage 20B, open the first discharge passage 30A and the filter bubble removal passage 70C to discharge the bubbles from the filter 7, pressurize the first pump chamber 10A, close the first suction passage 20A, the first bubble removal passage 70A, the second discharge passage 30B, the second bubble removal passage 70B and the filter bubble removal passage 70C, and open the first discharge passage 30A and the first The invention is characterized by opening the second inhalation passage 20B to draw the drug solution into the second pump chamber 10B, pressurizing the second pump chamber 10B, closing the second inhalation passage 20B and the second discharge passage 30B, opening the second air bubble removal passage 70B to discharge the air bubbles from the second pump chamber 10B, pressurizing the second pump chamber 10B, closing the second inhalation passage 20B and the second air bubble removal passage 70B, and opening the second discharge passage 30B to discharge the drug solution from the second pump chamber 10B. [Effects of the Invention]

[0007] According to the chemical solution supply pump of the present invention, by arranging the pump-side diaphragm and the valve-side diaphragm in parallel, the suction passage and the discharge passage located between the pump-side diaphragm and the valve-side diaphragm can be shortened. Therefore, the chemical solution supply pump can be miniaturized, the replacement characteristics can be improved, a fixed amount of resist solution can be dropped onto the wafer to uniformly form a thin film, and the yield of the wafer can be improved. According to the chemical solution supply pump device of the present invention, by arranging the first pump-side diaphragm and the second pump-side diaphragm in parallel within the block, the first chemical solution supply pump and the second chemical solution supply pump can be provided side by side in one block. Therefore, the chemical solution supply pump device can be miniaturized, and the replacement characteristics can be improved.

Brief Description of the Drawings

[0008] [Figure 1] Side cross-sectional view of the chemical solution supply pump according to an embodiment of the present invention [Figure 2] Side cross-sectional view in a state where the block forming the chemical solution supply pump is separated [Figure 3] Cross-sectional view taken along the line X-X shown in FIG. 1 [Figure 4] Operation air circuit diagram for operating the pump-side diaphragm, valve-side diaphragm, and air bleeding diaphragm in the chemical solution supply pump [Figure 5] Principal part cross-sectional view showing the diaphragm welded to the first block [Figure 6] Principal part cross-sectional view when using a diaphragm formed by cutting and shaping [Figure 7] Principal part cross-sectional view when forming a plurality of diaphragms with a single diaphragm [Figure 8] Conceptual perspective view showing another embodiment of the third block shown in FIG. 2 [Figure 9] Conceptual perspective view showing yet another embodiment to which the embodiment shown in FIG. 8 is applied [Figure 10] Conceptual perspective view showing yet another embodiment of the third block shown in FIG. 2 [Figure 11] 0]]Conceptual perspective view showing yet another embodiment to which the embodiment shown in FIG. 10 is applied [Figure 12] Chemical solution supply circuit diagram showing a chemical solution supply pump device according to one embodiment of the present invention. [Figure 13] Chemical solution supply circuit diagram showing a chemical solution supply pump device according to another embodiment of the present invention. [Figure 14] Operating air circuit diagram for a chemical solution supply pump according to yet another embodiment of the present invention [Figure 15] A chemical solution supply circuit diagram showing a chemical solution supply pump device according to yet another embodiment of the present invention. [Figure 16] Figure 15 shows the operation of the chemical solution supply pump device. [Figure 17] A chemical solution supply circuit diagram showing a chemical solution supply pump device according to yet another embodiment of the present invention. [Modes for carrying out the invention]

[0009] The first embodiment of the present invention is a chemical supply pump in which the pump-side diaphragm and the valve-side diaphragm are arranged in parallel. According to this embodiment, by arranging the pump-side diaphragm and the valve-side diaphragm in parallel, the suction passage and discharge passage located between the pump-side diaphragm and the valve-side diaphragm can be shortened, thereby enabling miniaturization of the chemical supply pump and improving the displacement characteristics.

[0010] A second embodiment of the present invention is a chemical supply pump according to the first embodiment, wherein at least a portion of the valve-side diaphragm is positioned within the projection plane of the pump-side diaphragm. According to this embodiment, the suction passage and discharge passage located between the pump-side diaphragm and the valve-side diaphragm can be further shortened, thereby enabling miniaturization of the chemical supply pump.

[0011] A third embodiment of the present invention is a chemical supply pump according to the first embodiment, wherein the valve-side diaphragm includes an intake valve-side diaphragm that opens and closes an intake passage and a discharge valve-side diaphragm that opens and closes a discharge passage, and at least a portion of the intake valve-side diaphragm and at least a portion of the discharge valve-side diaphragm are arranged within the projection plane of the pump-side diaphragm. According to this embodiment, the intake passage located between the pump-side diaphragm and the intake valve-side diaphragm, and the discharge passage located between the pump-side diaphragm and the discharge valve-side diaphragm can be further shortened, thereby enabling miniaturization of the chemical supply pump.

[0012] A fourth embodiment of the present invention is a chemical supply pump according to the third embodiment, wherein an inlet for an inlet passage and an outlet for a discharge passage are arranged on the outer periphery of the pump chamber, the pump-side inlet passage forming the inlet is located within the projection plane of the pump-side diaphragm, the pump-side discharge passage forming the discharge port is located within the projection plane of the pump-side diaphragm, the inlet valve-side opening of the pump-side inlet passage is located within the range of the inlet valve-side diaphragm, and the discharge valve-side opening of the pump-side discharge passage is located within the range of the discharge valve-side diaphragm. According to this embodiment, the pump-side inlet passage and the pump-side discharge passage can be made even shorter, so the chemical supply pump can be made smaller.

[0013] A fifth embodiment of the present invention is a chemical supply pump according to the first embodiment, which includes a bubble removal passage for discharging bubbles from the pump chamber and a bubble removal diaphragm for opening and closing the bubble removal passage, wherein at least a portion of the bubble removal diaphragm is positioned within the projection plane of the pump-side diaphragm. According to this embodiment, the bubble removal passage located between the pump-side diaphragm and the bubble removal diaphragm can be shortened, thereby enabling miniaturization of the chemical supply pump.

[0014] A sixth embodiment of the present invention is a chemical supply pump according to the fifth embodiment, wherein the outlet of the air venting passage is located on the outer periphery of the pump chamber, the pump-side air venting passage forming the outlet is located within the projection plane of the pump-side diaphragm, and the discharge valve side opening of the pump-side air venting passage is located within the range of the air venting diaphragm. According to this embodiment, the air venting passage can be made even shorter, so the chemical supply pump can be made smaller.

[0015] A seventh embodiment of the present invention is a chemical supply pump according to the first embodiment, wherein the valve-side diaphragm includes an inhalation valve-side diaphragm that opens and closes an inhalation passage and a discharge valve-side diaphragm that opens and closes a discharge passage, and has a pump-side working chamber for operating the pump-side diaphragm, an inhalation valve-side working chamber for operating the inhalation valve-side diaphragm, and a discharge valve-side working chamber for operating the discharge valve-side diaphragm, and pressurizes the pump chamber by supplying pump-side working air to the pump-side working chamber, depressurizes the pump chamber by discharging pump-side working air from the pump-side working chamber, closes the inhalation passage by supplying inhalation valve-side working air to the inhalation valve-side working chamber, opens the inhalation passage by discharging inhalation valve-side working air from the inhalation valve-side working chamber, closes the discharge passage by supplying discharge valve-side working air to the discharge valve-side working chamber, and opens the discharge passage by discharging discharge valve-side working air from the discharge valve-side working chamber. According to this embodiment, since the suction valve side diaphragm is operated by the suction valve side operating chamber and the discharge valve side diaphragm is operated by the discharge valve side operating chamber without using an actuator, the chemical supply pump can be made smaller.

[0016] An eighth embodiment of the present invention is a chemical supply pump according to the first embodiment, wherein the valve-side diaphragm includes an intake valve-side diaphragm that opens and closes an intake passage and a discharge valve-side diaphragm that opens and closes a discharge passage, and the pump chamber has an intake port for the intake passage and a discharge port for the discharge passage, the pump-side intake passage that forms the intake port has an intake valve-side opening that is opened and closed by the intake valve-side diaphragm, the pump-side discharge passage that forms the discharge port has a discharge valve-side opening that is opened and closed by the discharge valve-side diaphragm, the pump-side intake passage and the pump-side discharge passage are formed in a first block, and the pump chamber is formed on one end face of the first block, and the first block An intake valve side opening and a discharge valve side opening are formed on the other end face of the lock. A pump side diaphragm is placed on one end face of the first block. An intake valve side diaphragm and a discharge valve side diaphragm are placed on the other end face of the first block. A second block is placed on one end face of the first block. A pump side operating chamber for operating the pump side diaphragm is formed on the surface of the second block that abuts against the first block. A third block is placed on the other end face of the first block. An intake valve side operating chamber for operating the intake valve side diaphragm and a discharge valve side operating chamber for operating the discharge valve side diaphragm are formed on the surface of the third block that abuts against the first block. According to this embodiment, a pump chamber is formed on one end face of the first block and a pump-side diaphragm is placed thereon, an suction valve-side opening and a discharge valve-side opening are formed on the other end face of the first block and an suction valve-side diaphragm and a discharge valve-side diaphragm are placed thereon, a pump-side working chamber is formed in the second block, and an suction valve-side working chamber and a discharge valve-side working chamber are formed in the third block, thereby enabling miniaturization of the chemical supply pump.

[0017] The ninth embodiment of the present invention is a chemical supply pump according to the eighth embodiment, wherein the second block has a pump-side operating air passage that supplies pump-side operating air to the pump-side operating chamber and discharges the pump-side operating air from the pump-side operating chamber, and the third block has an suction valve-side operating air passage that supplies suction valve-side operating air to the suction valve-side operating chamber and discharges the suction valve-side operating air from the suction valve-side operating chamber, and a discharge valve-side operating air passage that supplies discharge valve-side operating air to the discharge valve-side operating chamber and discharges the discharge valve-side operating air from the discharge valve-side operating chamber. According to this embodiment, by forming the pump-side operating air passage in the second block and the suction valve-side operating air passage and discharge valve-side operating air passage in the third block, the chemical supply pump can be further miniaturized.

[0018] A tenth embodiment of the present invention is a chemical supply pump according to the eighth embodiment, in which the suction valve side diaphragm and the discharge valve side diaphragm are formed from a single diaphragm. According to this embodiment, the suction valve side diaphragm and the discharge valve side diaphragm are sandwiched between the first block and the third block, so they can be formed from a single diaphragm.

[0019] An eleventh embodiment of the present invention is a chemical supply pump according to the first embodiment, wherein the pump-side diaphragm is formed from a composite material of polyimide and fluororesin. According to this embodiment, since the polyimide suppresses creep of the fluororesin, the inclusion of air bubbles can be prevented, and the reproducibility of quantitative dispensing is improved.

[0020] A twelfth embodiment of the present invention is a chemical supply pump according to the first embodiment, wherein the valve-side diaphragm is formed from a composite material of polyimide and fluororesin. According to this embodiment, since the polyimide suppresses creep of the fluororesin, the inclusion of air bubbles can be prevented, and the reproducibility of quantitative dispensing is improved.

[0021] A thirteenth embodiment of the present invention is a chemical supply pump according to the eighth embodiment, wherein the pump-side diaphragm is welded to one end face of the first block. According to this embodiment, it is possible to prevent the chemical solution from flowing into the pump-side working chamber.

[0022] A fourteenth embodiment of the present invention is a chemical supply pump according to the eighth embodiment, wherein the suction valve side diaphragm and the discharge valve side diaphragm are welded to the other end face of the first block. According to this embodiment, it is possible to prevent the chemical solution from flowing into the suction valve side working chamber and the discharge valve side working chamber.

[0023] The chemical solution supply pump device according to the 15th embodiment of the present invention has a first pump-side diaphragm and a second pump-side diaphragm arranged parallel to each other within a block. According to this embodiment, by arranging the first pump-side diaphragm and the second pump-side diaphragm parallel to each other within a block, the first chemical solution supply pump and the second chemical solution supply pump can be installed together in a single block, the chemical solution supply pump device can be miniaturized, and the displacement characteristics can be improved.

[0024] A sixteenth embodiment of the present invention is a chemical supply pump device according to the fifteenth embodiment, wherein at least a portion of the first inhalation valve side diaphragm and at least a portion of the first discharge valve side diaphragm are arranged within the projection plane of the first pump side diaphragm, and at least a portion of the second inhalation valve side diaphragm and at least a portion of the second discharge valve side diaphragm are arranged within the projection plane of the second pump side diaphragm. According to this embodiment, the inhalation passage and discharge passage located between the pump side diaphragm and the valve side diaphragm of the first and second chemical supply pumps can be shortened, thereby enabling miniaturization of the chemical supply pump device.

[0025] The 17th embodiment of the present invention is a chemical solution supply pump device according to the 15th embodiment, which has a first bubble removal passage for discharging bubbles from a first pump chamber and a first bubble removal diaphragm for opening and closing the first bubble removal passage, with at least a portion of the first bubble removal diaphragm positioned within the projection plane of the first pump-side diaphragm, and a second bubble removal passage for discharging bubbles from a second pump chamber and a second bubble removal diaphragm for opening and closing the second bubble removal passage, with at least a portion of the second bubble removal diaphragm positioned within the projection plane of the second pump-side diaphragm. According to this embodiment, the bubble removal passage located between the pump-side diaphragm and the bubble removal diaphragm can be shortened for both the first and second chemical solution supply pumps, thus enabling miniaturization of the chemical solution supply pump device.

[0026] The 18th embodiment of the present invention is a chemical supply pump device according to the 15th embodiment, wherein a first inlet of a first inlet passage and a first discharge port of a first discharge passage are arranged in a first pump chamber, the first pump-side inlet passage forming the first inlet has a first inlet valve-side opening that is opened and closed by a first inlet valve-side diaphragm, the first pump-side discharge passage forming the first discharge port has a first discharge valve-side opening that is opened and closed by a first discharge valve-side diaphragm, the first pump-side inlet passage and the first pump-side discharge passage are formed in a first block, and on one end face of the first block, A first pump chamber is formed, a first suction valve side opening and a first discharge valve side opening are formed on the other end face of the first block, a first pump side diaphragm is placed on one end face of the first block, a first suction valve side diaphragm and a first discharge valve side diaphragm are placed on the other end face of the first block, a second block is placed on one end face of the first block, a first pump side operating chamber for operating the first pump side diaphragm is formed on the surface of the second block that abuts against the first block, a third block is placed on the other end face of the first block, and the surface of the third block that abuts against the first block The pump chamber is formed with a first suction valve side working chamber for operating the first suction valve side diaphragm and a first discharge valve side working chamber for operating the first discharge valve side diaphragm. The pump chamber is arranged with a second suction port of the second suction passage and a second discharge port of the second discharge passage. The second pump side suction passage forming the second suction port has a second suction valve side opening that is opened and closed by the second suction valve side diaphragm, and the second pump side discharge passage forming the second discharge port has a second discharge valve side opening that is opened and closed by the second discharge valve side diaphragm. A side discharge passage is formed in the first block, a second pump chamber is formed on one end face of the first block, a second suction valve side opening and a second discharge valve side opening are formed on the other end face of the first block, a second pump side diaphragm is placed on one end face of the first block, a second suction valve side diaphragm and a second discharge valve side diaphragm are placed on the other end face of the first block, a second block is placed on one end face of the first block, a second pump side operating chamber for operating the second pump side diaphragm is formed on the surface of the second block that abuts the first block, and on the other end face of the first block,A third block is positioned, and on the surface of the third block that abuts the first block, a second inhalation valve side operating chamber for operating the second inhalation valve side diaphragm and a second discharge valve side operating chamber for operating the second discharge valve side diaphragm are formed. According to this embodiment, a first pump chamber and a second pump chamber are formed on one end face of the first block, and a first pump side diaphragm and a second pump side diaphragm are positioned thereon. On the other end face of the first block, a first inhalation valve side opening, a first discharge valve side opening, a second inhalation valve side opening, and a second discharge valve side opening are formed, and a first inhalation valve side diaphragm, a first discharge valve side diaphragm, a second inhalation valve side diaphragm, and a second discharge valve side diaphragm are positioned thereon. A first pump side operating chamber and a second pump side operating chamber are formed in the second block, and a first inhalation valve side operating chamber, a first discharge valve side operating chamber, a second inhalation valve side operating chamber, and a second discharge valve side operating chamber are formed in the third block, thereby enabling miniaturization of the chemical supply pump device. ,

[0027] The 19th embodiment of the present invention is a chemical solution supply pump device according to the 18th embodiment, wherein the second block has a first pump-side operating air passage that supplies first pump-side operating air to the first pump-side operating chamber and discharges the first pump-side operating air from the first pump-side operating chamber, and a second pump-side operating air passage that supplies second pump-side operating air to the second pump-side operating chamber and discharges the second pump-side operating air from the second pump-side operating chamber, and the third block has a first suction valve-side operating air that supplies first suction valve-side operating air to the first suction valve-side operating chamber and discharges first suction valve-side operating air from the first suction valve-side operating chamber The pump is configured to have a first inhalation valve side operating air passage, a first discharge valve side operating air passage that supplies first discharge valve side operating air to the first discharge valve side operating chamber and discharges first discharge valve side operating air from the first discharge valve side operating chamber, a second inhalation valve side operating air passage that supplies second inhalation valve side operating air to the second inhalation valve side operating chamber and discharges second inhalation valve side operating air from the second inhalation valve side operating chamber, and a second discharge valve side operating air passage that supplies second discharge valve side operating air to the second discharge valve side operating chamber and discharges second discharge valve side operating air from the second discharge valve side operating chamber.According to this embodiment, the pump device for supplying chemicals can be further miniaturized by forming the first pump side operating air passage and the second pump side operating air passage in the second block, and the first inhalation valve side operating air passage, the first discharge valve side operating air passage, the second inhalation valve side operating air passage and the second discharge valve side operating air passage in the third block.

[0028] A 20th embodiment of the present invention is a chemical supply pump device according to the 15th embodiment, wherein a first discharge passage and a second suction passage are connected via a filter, and a filter bubble removal passage for discharging air bubbles from the filter and a filter bubble removal diaphragm for opening and closing the filter bubble removal passage are arranged within the block. According to this embodiment, the chemical supply pump device can be miniaturized and the displacement characteristics can be improved.

[0029] A 21st embodiment of the present invention is a chemical solution supply pump device according to the 17th embodiment, wherein a first discharge passage and a second suction passage are connected via a filter, a filter bubble removal passage for discharging air bubbles from the filter and a filter bubble removal diaphragm for opening and closing the filter bubble removal passage are arranged in the block, the first pump chamber is depressurized and the first suction passage is opened, the first discharge passage and the first bubble removal passage are closed to draw the chemical solution into the first pump chamber, the first pump chamber is pressurized and the first suction passage and the first discharge passage are closed, the first bubble removal passage is opened to discharge air bubbles from the first pump chamber, the first pump chamber is pressurized and the first suction passage, the first bubble removal passage and the second suction passage are closed, and the first discharge passage is opened. The first pump chamber is pressurized by drawing the liquid drug into the filter, closing the first suction passage, the first bubble removal passage, and the second suction passage, opening the first discharge passage and the filter bubble removal passage to discharge bubbles from the filter, pressurizing the first pump chamber, closing the first suction passage, the first bubble removal passage, the second discharge passage, the second bubble removal passage, and the filter bubble removal passage, opening the first discharge passage and the second suction passage to draw the liquid drug into the second pump chamber, pressurizing the second pump chamber, closing the second suction passage and the second discharge passage, opening the second bubble removal passage to discharge bubbles from the second pump chamber, pressurizing the second pump chamber, closing the second suction passage and the second bubble removal passage, opening the second discharge passage to discharge the liquid drug from the second pump chamber. According to this embodiment, it is possible to prevent bubbles from being mixed into the liquid drug, and since the second pump chamber only operates to pressurize, creep of the second pump-side diaphragm can be minimized, and the accuracy of the liquid drug discharge amount can be improved. [Examples]

[0030] A chemical solution supply pump according to one embodiment of the present invention will be described below. Figure 1 is a side cross-sectional view of the chemical supply pump according to this embodiment, Figure 2 is a side cross-sectional view of the block forming the chemical supply pump with the block separated, and Figure 3 is a cross-sectional view taken along line XX shown in Figure 1.

[0031] As shown in Figures 1 to 3, the chemical supply pump according to this embodiment includes a pump chamber 10 for drawing in and discharging the chemical solution, an intake passage 20 for drawing the chemical solution into the pump chamber 10, a discharge passage 30 for discharging the chemical solution from the pump chamber 10, a pump-side diaphragm 40 for pressurizing or depressurizing the pump chamber 10, and valve-side diaphragms 50 and 60 for opening and closing the intake passage 20 and the discharge passage 30. The valve-side diaphragms 50 and 60 include an intake valve-side diaphragm 50 that opens and closes the intake passage 20, and a discharge valve-side diaphragm 60 that opens and closes the discharge passage 30. The pump-side diaphragm 40 and the valve-side diaphragms 50 and 60 are arranged in parallel. By arranging the pump-side diaphragm 40 and the valve-side diaphragms 50 and 60 in parallel in this way, the suction passage 20 and discharge passage 30 located between the pump-side diaphragm 40 and the valve-side diaphragms 50 and 60 can be shortened, thereby allowing for a smaller chemical supply pump and improving the displacement characteristics, that is, the characteristic of replacing all the air inside the pump with the chemical solution. At least a portion of the valve-side diaphragms 50 and 60 are positioned within the projection plane of the pump-side diaphragm 40. Therefore, the suction passage 20 and discharge passage 30 located between the pump-side diaphragm 40 and the valve-side diaphragms 50 and 60 can be further shortened, thus enabling miniaturization of the chemical supply pump.

[0032] In this embodiment, at least a portion of the suction valve side diaphragm 50 and at least a portion of the discharge valve side diaphragm 60 are positioned within the projection plane of the pump side diaphragm 40. Therefore, the suction passage 20 located between the pump side diaphragm 40 and the suction valve side diaphragm 50, and the discharge passage 30 located between the pump side diaphragm 40 and the discharge valve side diaphragm 60 can be further shortened, thereby enabling a miniaturization of the chemical supply pump.

[0033] The outer perimeter of the pump chamber 10 is equipped with an inlet 21 for the suction passage 20 and an outlet 31 for the discharge passage 30. The pump-side suction passage 22, which forms the suction port 21, is located within the projection plane of the pump-side diaphragm 40. It is preferable that the pump-side suction passage 22 be positioned perpendicular to the pump-side diaphragm 40. The pump-side discharge passage 32, which forms the discharge port 31, is located within the projection plane of the pump-side diaphragm 40. It is preferable that the pump-side discharge passage 32 be positioned perpendicular to the pump-side diaphragm 40. Furthermore, the suction valve side opening 23 of the pump-side suction passage 22 is located within the range of the suction valve side diaphragm 50, and the discharge valve side opening 33 of the pump-side discharge passage 32 is located within the range of the discharge valve side diaphragm 60. In this way, by arranging the pump-side suction passage 22 within the projection plane of the pump-side diaphragm 40, the pump-side discharge passage 32 within the projection plane of the pump-side diaphragm 40, the suction valve-side opening 23 within the range of the suction valve-side diaphragm 50, and the discharge valve-side opening 33 within the range of the discharge valve-side diaphragm 60, the pump-side suction passage 20 and the pump-side discharge passage 30 can be further shortened, thereby enabling miniaturization of the chemical supply pump. Furthermore, by arranging the pump-side suction passage 22 perpendicular to the pump-side diaphragm 40 and the pump-side discharge passage 32 perpendicular to the pump-side diaphragm 40, the pump-side suction passage 20 and the pump-side discharge passage 30 can be made even shorter, thus enabling a miniaturization of the chemical supply pump.

[0034] The chemical supply pump according to this embodiment has a bubble removal passage 70 for discharging air bubbles from the pump chamber 10, and a bubble removal diaphragm 80 for opening and closing the bubble removal passage 70. At least a portion of the bubble removal diaphragm 80 is positioned within the projection plane of the pump-side diaphragm 40. Therefore, the bubble removal passage 70 located between the pump-side diaphragm 40 and the bubble removal diaphragm 80 can be shortened, thus enabling miniaturization of the chemical supply pump.

[0035] An outlet 71 for the air bubble venting passage 70 is located on the outer perimeter of the pump chamber 10. The pump-side air venting passage 72, which forms the discharge port 71, is positioned within the projection plane of the pump-side diaphragm 40, and the discharge valve-side opening 73 of the pump-side air venting passage 72 is positioned within the range of the air venting diaphragm 80. It is preferable that the pump-side air venting passage 72 be positioned perpendicular to the pump-side diaphragm 40. In this way, by positioning the pump-side air venting passage 72 within the projection plane of the pump-side diaphragm 40 and the discharge valve-side opening 73 within the range of the air venting diaphragm 80, the pump-side air venting passage 72 can be made even shorter, thus enabling a miniaturization of the chemical supply pump. Furthermore, by positioning the pump-side air venting passage 72 perpendicular to the pump-side diaphragm 40, the pump-side air venting passage 72 can be made even shorter, thus enabling a smaller chemical supply pump.

[0036] Opposite the pump chamber 10 is a pump-side operating chamber 41 for operating the pump-side diaphragm 40. Opposite the intake valve side opening 23 is an intake valve side operating chamber 51 for operating the intake valve side diaphragm 50. Opposite the discharge valve side opening 33 is a discharge valve side operating chamber 61 for operating the discharge valve side diaphragm 60.

[0037] As shown in Figure 2, the chemical supply pump according to this embodiment is formed of a first block A, a second block B, and a third block C. The second block B is placed on one end face of the first block A, and the third block C is placed on the other end face of the first block A.

[0038] The first block A includes a pump-side suction passage 22, an upstream suction passage 24 formed upstream of the pump-side suction passage 22, a pump-side discharge passage 32, a downstream discharge passage 34 formed downstream of the pump-side discharge passage 32, a pump-side air bubble removal passage 72, and a downstream air bubble removal passage 74 formed downstream of the pump-side air bubble removal passage 72. A pump chamber 10 is formed on one end face of the first block A. The other end face of the first block A has an intake valve side opening 23, an upstream intake passage outlet opening 25 of the upstream intake passage 24, a discharge valve side opening 33, a downstream discharge passage inlet opening 35 of the downstream discharge passage 34, an exhaust valve side opening 73, and a downstream air vent passage inlet opening 75 of the downstream air vent passage 74. Note that one end face of Block 1A and the other end face of Block 1A are opposing end faces. One side of the first block A has an upstream intake passage inlet opening 26 for the upstream intake passage 24. On the other side of the first block A, there is a downstream discharge passage outlet opening 36 of the downstream discharge passage 34 and a downstream air venting passage outlet opening 76 of the downstream air venting passage 74. Note that one side of Block 1A and the other side of Block 1A are opposing sides.

[0039] A pump-side operating chamber 41 for operating the pump-side diaphragm 40 is formed on the surface of the second block B that abuts against the first block A. Block B 2 includes a pump-side operating air passage 42 that supplies pump-side operating air to the pump-side operating chamber 41 and discharges the pump-side operating air from the pump-side operating chamber 41. The pump-side operating air passage opening 43 of the pump-side operating air passage 42 is formed on one side of the second block B. The one side of the second block B is formed in the same direction as the one side of the first block A.

[0040] The surface of the third block C that abuts against the first block A has an intake valve side operating chamber 51 for operating the intake valve side diaphragm 50, a discharge valve side operating chamber 61 for operating the discharge valve side diaphragm 60, and a bubble removal operating chamber 81 for operating the bubble removal diaphragm 80. The third block C includes an intake valve side operating air passage 52, a discharge valve side operating air passage 62, and a bubble removal operating air passage 82. The intake valve side operating air passage 52 supplies intake valve side operating air to the intake valve side operating chamber 51 and discharges intake valve side operating air from the intake valve side operating chamber 51. The discharge valve side operating air passage 62 supplies discharge valve side operating air to the discharge valve side operating chamber 61 and discharges discharge valve side operating air from the discharge valve side operating chamber 61. The bubble removal operating air passage 82 supplies bubble removal operating air to the bubble removal operating chamber 81 and discharges the bubble removal operating air from the bubble removal operating chamber 81. The discharge valve side operating air passage opening 63 of the discharge valve side operating air passage 62 and the bubble removal operating air passage opening 83 of the bubble removal operating air passage 82 are formed on one side surface of the third block C. The one side surface of the third block C is formed in the same direction as the one side surface of the first block A. The intake valve side operating air passage opening 53 of the intake valve side operating air passage 52 is formed on the other side of the third block C. The other side of the third block C is a side that is formed in the same direction as the other side of the first block A.

[0041] A pump-side diaphragm 40 is positioned between one end face of the first block A and the second block B, and an intake valve-side diaphragm 50, a discharge valve-side diaphragm 60, and a bubble-removing diaphragm 80 are positioned between the other end face of the first block A and the third block C.

[0042] In this way, by forming a pump chamber 10 and a pump-side diaphragm 40 on one end face of the first block A, forming an suction valve-side opening 23 and a discharge valve-side opening 33 and arranging an suction valve-side diaphragm 50 and a discharge valve-side diaphragm 60 on the other end face of the first block A, forming a pump-side working chamber 41 in the second block B, and forming an suction valve-side working chamber 51 and a discharge valve-side working chamber 61 in the third block C, the chemical supply pump can be miniaturized. Furthermore, by forming a pump-side operating air passage 42 in the second block B, and an intake valve-side operating air passage 52 and a discharge valve-side operating air passage 62 in the third block C, the chemical supply pump can be further miniaturized. Furthermore, by forming an upstream suction passage 24 and a downstream discharge passage 34 in the first block A, the chemical supply pump can be made even smaller.

[0043] Figure 4 is an operating air circuit diagram for the pump-side diaphragm, valve-side diaphragm, and air bubble removal diaphragm in the chemical supply pump. The pump-side operating air passage opening 43 is connected to a solenoid valve 45 via piping 44, the suction valve-side operating air passage opening 53 is connected to a solenoid valve 55 via piping 54, the discharge valve-side operating air passage opening 63 is connected to a solenoid valve 65 via piping 64, and the air bubble removal operating air passage opening 83 is connected to a solenoid valve 85 via piping 84. Solenoid valves 45, 55, 65, and 85 switch between supply source 1, which supplies working air, and vacuum pump 2, which discharges the working air. A filter 3 and a regulator 4 are provided between the supply source 1 and the solenoid valves 45, 55, 65, and 85, and a regulator 4 is provided between the vacuum pump 2 and the solenoid valves 45, 55, 65, and 85.

[0044] The operation of the solenoid valve 45 pressurizes the pump chamber 10 by supplying pump-side operating air from the supply source 1 to the pump-side operating chamber 41, and depressurizes the pump chamber 10 by discharging the pump-side operating air from the pump-side operating chamber 41 using the vacuum pump 2. The solenoid valve 55 operates by supplying suction valve side operating air from the supply source 1 to the suction valve side operating chamber 51, thereby closing the suction passage 20, and the vacuum pump 2 discharges the suction valve side operating air from the suction valve side operating chamber 51, thereby opening the suction passage 20. The suction passage 20 opens and closes when the pump-side suction passage 22 and the upstream-side suction passage 24 are connected or disconnected by the operation of the suction valve-side diaphragm 50.

[0045] The operation of the solenoid valve 65 closes the discharge passage 30 by supplying operating air from the supply source 1 to the discharge valve side operating chamber 61, and opens the discharge passage 30 by discharging the operating air from the discharge valve side operating chamber 61 using the vacuum pump 2. The discharge passage 30 opens and closes when the pump-side discharge passage 32 and the downstream-side discharge passage 34 are connected or disconnected by the operation of the discharge valve-side diaphragm 60.

[0046] The solenoid valve 85 operates by supplying de-bubbling operating air from the supply source 1 to the de-bubbling operating chamber 81, thereby closing the de-bubbling passage 70, and the vacuum pump 2 discharges the de-bubbling operating air from the de-bubbling operating chamber 81, thereby opening the de-bubbling passage 70. The air venting passage 70 opens and closes when the pump-side air venting passage 72 and the downstream-side air venting passage 74 are connected or separated by the operation of the air venting diaphragm 80.

[0047] By operating the solenoid valves 45, 55, 65, and 85 in this manner, the pump chamber 10 is depressurized, the suction passage 20 is opened, and the discharge passage 30 is closed to draw the drug solution into the pump chamber 10. The pump chamber 10 is then pressurized, the discharge passage 30 is opened, and the suction passage 20 is closed to discharge the drug solution from the pump chamber 10. As shown in Figure 4, since the suction valve side diaphragm 50 is operated by the suction valve side working chamber 51 and the discharge valve side diaphragm 60 is operated by the discharge valve side working chamber 61 without using an actuator, the chemical supply pump can be made smaller.

[0048] The diaphragm will be explained using Figures 5 to 7. Figures 5 to 7 show the state in which the vacuum pump 2 discharges the air used for de-bubbling from the de-bubbling chamber 81, and the pump-side de-bubbling passage 72 and the downstream-side de-bubbling passage 74 are in communication. In the following explanation, we will use the de-bubbling diaphragm 80 as an example, but the same applies to the pump-side diaphragm 40, the suction valve-side diaphragm 50, and the discharge valve-side diaphragm 60.

[0049] Figure 5 is a cross-sectional view of the main part showing the diaphragm welded to the first block. The bubble-removing diaphragm 80 shown in Figure 5 is welded to the first block A and sealed between it and the third block C by a ring-shaped sealing material 5. In this way, by welding and fixing the air venting diaphragm 80, the pump-side diaphragm 40, the suction valve-side diaphragm 50, and the discharge valve-side diaphragm 60 to the end face of the first block A, it is possible to prevent the chemical solution from flowing into the air venting operating chamber 81, the pump-side operating chamber 41, the suction valve-side operating chamber 51, and the discharge valve-side operating chamber 61. The pump-side diaphragm 40, the suction valve-side diaphragm 50, the discharge valve-side diaphragm 60, and the air-removing diaphragm 80 are preferably formed from a composite material of polyimide and fluororesin. The polyimide is used as the working air surface, and the fluororesin is used as the chemical solution surface. Polyimide is excellent at preventing the permeation of working air, suppressing creep in fluororesin, and because fluororesin has high chemical resistance, it is possible to prevent the inclusion of air bubbles and improve the reproducibility of quantitative dispensing. Suitable fluororesins include PTFE (polytetrafluoroethylene), cross-linked PTFE, modified PTFE, PFA (polytetrafluoroethylene-perfluoroalkoxyethylene copolymer), and ETFE (polytetrafluoroethylene-ethylene copolymer).

[0050] Figure 6 is a cross-sectional view of the main part when a diaphragm made by cutting is used. The bubble-removing diaphragm 80 shown in Figure 6 has a thickened portion M formed on its outer circumference, which is press-fitted into the ring-shaped groove of the first block A, and is sealed between it and the third block C by a ring-shaped sealing material 5. In this manner, a thickened portion M is formed on the outer circumference of the air-removing diaphragm 80, the pump-side diaphragm 40, the suction valve-side diaphragm 50, and the discharge valve-side diaphragm 60, and this thickened portion M is press-fitted into the ring-shaped groove of the first block A. When machining the air venting diaphragm 80, the pump-side diaphragm 40, the suction valve-side diaphragm 50, and the discharge valve-side diaphragm 60, it is preferable to use PTFE as the material.

[0051] Figure 7 is a cross-sectional view of the main part when multiple diaphragms are formed from a single diaphragm. Figure 7 shows a case where the air-removal diaphragm 80 and the discharge valve side diaphragm 60 are formed from a single diaphragm. However, the intake valve side diaphragm 50 and the discharge valve side diaphragm 60 may be formed from a single diaphragm, or the intake valve side diaphragm 50, the discharge valve side diaphragm 60, and the air-removal diaphragm 80 may be formed from a single diaphragm. The intake valve side diaphragm 50, the discharge valve side diaphragm 60, and the air bubble removal diaphragm 80 are sandwiched between the first block A and the third block C, and can therefore be formed from a single diaphragm.

[0052] Figure 8 is a conceptual perspective view showing another embodiment of the third block shown in Figure 2. In this embodiment, the intake valve side operating air passage 52 is formed from an intake valve side first vertical hole 52a communicating with the intake valve side operating chamber 51, an intake valve side lateral groove 52b communicating with the intake valve side first vertical hole 52a, an intake valve side second vertical hole 52c communicating with the intake valve side lateral groove 52b, and an intake valve side lateral hole 52d communicating with the intake valve side second vertical hole 52c to form the intake valve side operating air passage opening 53. Furthermore, the discharge valve side operating air passage 62 is formed from a discharge valve side first vertical hole 62a communicating with the discharge valve side operating chamber 61, a discharge valve side horizontal groove 62b communicating with the discharge valve side first vertical hole 62a, a discharge valve side second vertical hole 62c communicating with the discharge valve side horizontal groove 62b, and a discharge valve side horizontal hole 62d communicating with the discharge valve side second vertical hole 62c to form the discharge valve side operating air passage opening 63. Furthermore, the bubble-removing operating air passage 82 is formed from a first bubble-removing vertical hole 82a communicating with the bubble-removing operating chamber 81, a bubble-removing horizontal groove 82b communicating with the first bubble-removing vertical hole 82a, a second bubble-removing vertical hole 82c communicating with the bubble-removing horizontal groove 82b, and a bubble-removing horizontal hole 82d communicating with the second bubble-removing vertical hole 82c to form the bubble-removing operating air passage opening 83. Then, the end face of the third block C is closed with the fourth block D. By closing the end face of the third block C with the fourth block D, a passage is formed in which the intake valve side transverse groove 52b, the discharge valve side transverse groove 62b, and the air venting transverse groove 82b, which communicate with the intake valve side first vertical hole 52a, are closed. In this embodiment, the intake valve side operating air passage opening 53, the discharge valve side operating air passage opening 63, and the air bubble removal operating air passage opening 83 are formed on one side of the third block C.

[0053] Figure 9 is a conceptual perspective view showing yet another embodiment to which the embodiment shown in Figure 8 is applied. In this embodiment, the pump-side operating air passage opening 43 is formed on the same side surface as the suction valve-side operating air passage opening 53, the discharge valve-side operating air passage opening 63, and the air venting operating air passage opening 83, all of which are formed in the same direction. By forming the suction valve-side operating air passage opening 53, the discharge valve-side operating air passage opening 63, and the air venting operating air passage opening 83 on one side surface of the third block C in this way, the piping 84 connected to the suction valve-side operating air passage opening 53, the discharge valve-side operating air passage opening 63, and the air venting operating air passage opening 83 can be arranged on one side surface of the third block C. This reduces the amount of piping 84 that needs to be routed, and shortens the piping 84 connected to the solenoid valves 45, 55, 65, 85, etc.

[0054] Figure 10 is a conceptual perspective view showing yet another embodiment of the third block shown in Figure 2. In this embodiment, the intake valve side operating air passage 52 is formed from an intake valve side first vertical hole 52e that communicates with the intake valve side operating chamber 51, and an intake valve side horizontal hole 52d that communicates with the intake valve side first vertical hole 52e and forms the intake valve side operating air passage opening 53. Furthermore, the discharge valve side operating air passage 62 is formed from a discharge valve side first vertical hole 62e that communicates with the discharge valve side operating chamber 61, and a discharge valve side horizontal hole 62d that communicates with the discharge valve side first vertical hole 62e and forms the discharge valve side operating air passage opening 63. Furthermore, when the bubble-removing operating air passage 82 is connected to the bubble-removing operating chamber 81, it is formed from a bubble-removing horizontal hole 82d that communicates with the first bubble-removing vertical hole 82e to form the bubble-removing operating air passage opening 83. In this embodiment, the intake valve side operating air passage opening 53 is formed on the first side surface of the third block C, and the discharge valve side operating air passage opening 63 and the air venting operating air passage opening 83 are formed on the second side surface of the third block C. The first side surface and the second side surface are adjacent to each other.

[0055] Figure 11 is a conceptual perspective view showing yet another embodiment to which the embodiment shown in Figure 10 is applied. In this embodiment, the pump-side operating air passage opening 43 is formed on the third side surface of the third block C.

[0056] Figure 12 is a chemical solution supply circuit diagram showing a chemical solution supply pump device according to one embodiment of the present invention. As shown in Figure 12, the bottle 8 containing the drug solution is connected to the suction passage 20 by a pipe 6. A filter 7 is installed in the middle of the pipe 6. The filter 7 is equipped with an air bubble release valve 7a. A predetermined pressure is applied to the bottle 8 by an inert gas.

[0057] Figure 13 is a chemical solution supply circuit diagram showing a chemical solution supply pump device according to another embodiment of the present invention. The embodiment shown in Figure 13 is a chemical solution supply pump device that uses two chemical solution supply pumps according to the present invention. The first chemical supply pump F includes a first pump chamber 10A for drawing in and discharging the chemical solution, a first suction passage 20A for drawing the chemical solution into the first pump chamber 10A, a first discharge passage 30A for discharging the chemical solution from the first pump chamber 10A, a first suction valve-side diaphragm 50A for opening and closing the first suction passage 20A, a first discharge valve-side diaphragm 60A for opening and closing the first discharge passage 30A, a first bubble-removing passage 70A for discharging bubbles from the first pump chamber 10A, and a first bubble-removing diaphragm 80A for opening and closing the first bubble-removing passage 70A. Furthermore, the second chemical supply pump R includes a second pump chamber 10B for inhaling and discharging the chemical solution, a second inhalation passage 20B for drawing the chemical solution into the second pump chamber 10B, a second discharge passage 30B for discharging the chemical solution from the second pump chamber 10B, a second inhalation valve-side diaphragm 50B for opening and closing the second inhalation passage 20B, a second discharge valve-side diaphragm 60B for opening and closing the second discharge passage 30B, a second bubble removal passage 70B for discharging air bubbles from the second pump chamber 10B, and a second bubble removal diaphragm 80B for opening and closing the second bubble removal passage 70B. The first chemical solution supply pump F and the second chemical solution supply pump R have the same configuration as the chemical solution supply pumps described in Figures 1 to 11. The first chemical solution supply pump F is denoted with the letter A, and the second chemical solution supply pump R is denoted with the letter B. A bottle 8 is connected to the first inhalation passage 20A of the first drug supply pump F, and the first discharge passage 30A of the first drug supply pump F is connected to the second inhalation passage 20B of the second drug supply pump R. A filter 7 is provided between the first discharge passage 30A of the first drug supply pump F and the second inhalation passage 20B of the second drug supply pump R.

[0058] Figure 14 is an operating air circuit diagram showing a chemical solution supply pump device according to yet another embodiment of the present invention. In this embodiment, an actuator 50X is provided to operate the suction valve side diaphragm 50, an actuator 60X is provided to operate the discharge valve side diaphragm 60, and an actuator 80X is provided to operate the air bubble removal diaphragm 80. As shown in this embodiment, the intake valve side diaphragm 50 may be operated by actuator 50X, the discharge valve side diaphragm 60 may be operated by actuator 60X, and the air bubble removal diaphragm 80 may be operated by actuator 80X.

[0059] Figure 15 is a chemical solution supply circuit diagram showing a chemical solution supply pump device according to yet another embodiment of the present invention. The first chemical supply pump F includes a first pump chamber 10A for inhaling and discharging the chemical solution, a first inhalation passage 20A for drawing the chemical solution into the first pump chamber 10A, a first discharge passage 30A for discharging the chemical solution from the first pump chamber 10A, a first pump-side diaphragm 40A for pressurizing or depressurizing the first pump chamber 10A, a first inhalation valve-side diaphragm 50A for opening and closing the first inhalation passage 20A, a first discharge valve-side diaphragm 60A for opening and closing the first discharge passage 30A, a first bubble-removing passage 70A for discharging bubbles from the first pump chamber 10A, and a first bubble-removing diaphragm 80A for opening and closing the first bubble-removing passage 70A. Furthermore, similar to the configuration shown in Figures 1 to 3, the first outlet 71A of the first bubble venting passage 70A is located on the outer periphery of the first pump chamber 10A. The first pump-side air venting passage 72A, which forms the first discharge port 71A, is located within the projection plane of the first pump-side diaphragm 40A, and the first discharge valve-side opening 73A of the first pump-side air venting passage 72A is located within the range of the first air venting diaphragm 80A. It is preferable that the first pump-side air venting passage 72A is located perpendicular to the first pump-side diaphragm 40A. In this way, by positioning the first pump-side air venting passage 72A within the projection plane of the first pump-side diaphragm 40A and positioning the first discharge valve-side opening 73A within the range of the first air venting diaphragm 80A, the first pump-side air venting passage 72A can be further shortened, thereby enabling miniaturization of the chemical supply pump. The second chemical supply pump R includes a second pump chamber 10B for inhaling and discharging the chemical solution, a second inhalation passage 20B for drawing the chemical solution into the second pump chamber 10B, a second discharge passage 30B for discharging the chemical solution from the second pump chamber 10B, a second pump-side diaphragm 40B for pressurizing or depressurizing the second pump chamber 10B, a second inhalation valve-side diaphragm 50B for opening and closing the second inhalation passage 20B, a second discharge valve-side diaphragm 60B for opening and closing the second discharge passage 30B, a second bubble-removing passage 70B for discharging bubbles from the second pump chamber 10B, and a second bubble-removing diaphragm 80B for opening and closing the second bubble-removing passage 70B. Furthermore, similar to the configuration shown in Figures 1 to 3, the second outlet 71B of the second air bubble venting passage 70B is located on the outer periphery of the second pump chamber 10B. The second pump-side air venting passage 72B, which forms the second discharge port 71B, is located within the projection plane of the second pump-side diaphragm 40B, and the second discharge valve-side opening 73B of the second pump-side air venting passage 72B is located within the range of the second air venting diaphragm 80B. It is preferable that the second pump-side air venting passage 72B is located perpendicular to the second pump-side diaphragm 40B. In this way, by positioning the second pump-side air venting passage 72B within the projection plane of the second pump-side diaphragm 40B and positioning the second discharge valve-side opening 73B within the range of the second air venting diaphragm 80B, the second pump-side air venting passage 72B can be further shortened, thereby enabling miniaturization of the chemical supply pump.

[0060] In this embodiment, the first pump-side diaphragm 40A and the second pump-side diaphragm 40B are arranged parallel to each other within block X, but the other basic configurations are the same as those of the chemical supply pump described in Figures 1 to 11. Accordingly, in this embodiment as well, at least a portion of the first suction valve side diaphragm 50A and at least a portion of the first discharge valve side diaphragm 60A are arranged within the projection plane of the first pump side diaphragm 40A, and at least a portion of the second suction valve side diaphragm 50B and at least a portion of the second discharge valve side diaphragm 60B are arranged within the projection plane of the second pump side diaphragm 40B. Furthermore, at least a portion of the first air venting diaphragm 80A is positioned within the projection plane of the first pump-side diaphragm 40A, and at least a portion of the second air venting diaphragm 80B is positioned within the projection plane of the second pump-side diaphragm 40B.

[0061] In this embodiment, by arranging the first pump-side diaphragm 40A and the second pump-side diaphragm 40B in parallel within block X, the first chemical supply pump F and the second chemical supply pump R can be installed together in a single block X, thereby miniaturizing the chemical supply pump device and improving the displacement characteristics. Furthermore, according to this embodiment, the suction passage 20 and discharge passage 30 located between the pump-side diaphragm 40 and the suction valve-side diaphragm 50, respectively, can be shortened for the first chemical supply pump F and the second chemical supply pump R, thus enabling miniaturization of the chemical supply pump device. Furthermore, according to this embodiment, the air venting passage 70 located between the pump-side diaphragm 40 and the air venting diaphragm 80 of the first chemical supply pump F and the second chemical supply pump R can be shortened, thereby enabling miniaturization of the chemical supply pump device.

[0062] The first pump chamber 10A contains the first intake port 21A of the first intake passage 20A and the first discharge port 31A of the first discharge passage 30A. The first pump-side intake passage 22A, which forms the first intake port 21A, has a first intake valve-side opening 23A that is opened and closed by the first intake valve-side diaphragm 50A. The first pump-side discharge passage 32A, which forms the first discharge port 31A, has a first discharge valve-side opening 33A that is opened and closed by the first discharge valve-side diaphragm 60A. Although not shown in Figure 15, the first inlet 21A, first outlet 31A, first pump-side inlet passage 22A, and first pump-side outlet passage 32A have the same configuration as the inlet 21, outlet 31, pump-side inlet passage 22, and pump-side outlet passage 32 shown in Figure 1. The first chemical supply pump F and the second chemical supply pump R in this embodiment are formed within block X, which is composed of a first block A, a second block B, and a third block C as shown in Figure 2, or further comprises a fourth block D as shown in Figure 8. Therefore, the first pump-side suction passage 22A and the first pump-side discharge passage 32A are formed in the first block A. The first pump chamber 10A is formed on one end face of the first block A, and the first suction valve-side opening 23A and the first discharge valve-side opening 33A are formed on the other end face of the first block A.

[0063] A first pump-side diaphragm 40A is placed on one end face of the first block A, and a first suction valve-side diaphragm 50A and a first discharge valve-side diaphragm 60A are placed on the other end face of the first block A. The second block B is placed on one end face of the first block A. A first pump-side operating chamber 41A, which operates the first pump-side diaphragm 40A, is formed on the surface of the second block B that abuts against the first block A. The third block C is placed on the other end face of the first block A. On the surface of the third block C that abuts against the first block A, a first suction valve side operating chamber 51A for operating the first suction valve side diaphragm 50A and a first discharge valve side operating chamber 61A for operating the first discharge valve side diaphragm 60A are formed. Although not shown in Figure 15, the first pump-side working chamber 41A, the first suction valve-side working chamber 51A, and the first discharge valve-side working chamber 61A have the same configuration as the pump-side working chamber 41, suction valve-side working chamber 51, and discharge valve-side working chamber 61 shown in Figure 1.

[0064] The second pump chamber 10B contains the second inlet 21B of the second suction passage 20B and the second discharge port 31B of the second discharge passage 30B. The second pump-side suction passage 22B, which forms the second inlet 21B, has a second suction valve-side opening 23B that is opened and closed by the second suction valve-side diaphragm 50B. The second pump-side discharge passage 32B, which forms the second discharge port 31B, has a second discharge valve-side opening 33B that is opened and closed by the second discharge valve-side diaphragm 60B. Furthermore, the second pump-side suction passage 22B and the second pump-side discharge passage 32B are formed in the first block A. Then, the second pump chamber 10B is formed on one end face of the first block A, and the second suction valve-side opening 23B and the second discharge valve-side opening 33B are formed on the other end face of the first block A. Although not shown in Figure 15, the second inlet 21B, second outlet 31B, second pump-side inlet passage 22B, and second pump-side outlet passage 32B have the same configuration as the inlet 21, outlet 31, pump-side inlet passage 22, and pump-side outlet passage 32 shown in Figure 1.

[0065] A second pump-side diaphragm 40B is positioned on one end face of the first block A, and a second suction valve-side diaphragm 50B and a second discharge valve-side diaphragm 60B are positioned on the other end face of the first block A. The second block B is placed on one end face of the first block A. A second pump-side operating chamber 41B, which operates the second pump-side diaphragm 40B, is formed on the surface of the second block B that abuts against the first block A. The third block C is placed on the other end face of the first block A. On the surface of the third block C that abuts against the first block A, a second suction valve side operating chamber 51B for operating the second suction valve side diaphragm 50B and a second discharge valve side operating chamber 61B for operating the second discharge valve side diaphragm 60B are formed. Although not shown in Figure 15, the second pump-side working chamber 41B, the second suction valve-side working chamber 51B, and the second discharge valve-side working chamber 61B have the same configuration as the pump-side working chamber 41, suction valve-side working chamber 51, and discharge valve-side working chamber 61 shown in Figure 1.

[0066] As described above, according to this embodiment, a first pump chamber 10A and a second pump chamber 10B are formed on one end face of the first block A, and a first pump-side diaphragm 40A and a second pump-side diaphragm 40B are arranged thereon. A first suction valve-side opening 23A, a first discharge valve-side opening 33A, a second suction valve-side opening 23B, and a second discharge valve-side opening 33B are formed on the other end face of the first block A, and a first suction valve-side diaphragm 50A, a first discharge valve-side diaphragm 60A, a second suction valve-side diaphragm 50B, and a second discharge valve-side diaphragm 60B are arranged thereon. A first pump-side working chamber 41A and a second pump-side working chamber 41B are formed in the second block B, and a first suction valve-side working chamber 51A, a first discharge valve-side working chamber 61A, a second suction valve-side working chamber 51B, and a second discharge valve-side working chamber 61B are formed in the third block C, thereby enabling miniaturization of the chemical supply pump device.

[0067] The second block B is provided with a first pump-side operating air passage 42A and a second pump-side operating air passage 42B. Although not shown in Figure 15, the first pump-side operating air passage 42A and the second pump-side operating air passage 42B have the same configuration as the pump-side operating air passage 42 shown in Figure 2. The first pump-side operating air passage 42A supplies the first pump-side operating air to the first pump-side operating chamber 41A and discharges the first pump-side operating air from the first pump-side operating chamber 41A. The second pump-side operating air passage 42B supplies second pump-side operating air to the second pump-side operating chamber 41B and discharges second pump-side operating air from the second pump-side operating chamber 41B.

[0068] The third block C is formed with a first intake valve side operating air passage 52A, a first discharge valve side operating air passage 62A, a second intake valve side operating air passage 52B, and a second discharge valve side operating air passage 62B. Although not shown in Figure 15, the first intake valve side operating air passage 52A, the first discharge valve side operating air passage 62A, the second intake valve side operating air passage 52B, and the second discharge valve side operating air passage 62B have the same configuration as the intake valve side operating air passage 52 and the discharge valve side operating air passage 62 shown in Figure 2. The first intake valve side operating air passage 52A supplies the first intake valve side operating air to the first intake valve side operating chamber 51A and discharges the first intake valve side operating air from the first intake valve side operating chamber 51A. The first discharge valve side operating air passage 62A supplies the first discharge valve side operating air to the first discharge valve side operating chamber 61A and discharges the first discharge valve side operating air from the first discharge valve side operating chamber 61A. The second intake valve side operating air passage 52B supplies the second intake valve side operating air to the second intake valve side operating chamber 51B and discharges the second intake valve side operating air from the second intake valve side operating chamber 51B. The second discharge valve side operating air passage 62B supplies the second discharge valve side operating air to the second discharge valve side operating chamber 61B and discharges the second discharge valve side operating air from the second discharge valve side operating chamber 61B.

[0069] In this way, by forming the first pump-side operating air passage 42A and the second pump-side operating air passage 42B in the second block B, and the first suction valve-side operating air passage 52A, the first discharge valve-side operating air passage 62A, the second suction valve-side operating air passage 52B, and the second discharge valve-side operating air passage 62B in the third block C, the chemical supply pump device can be further miniaturized. Block X also includes a filter bubble venting passage 70C for discharging bubbles from the filter 7, and a filter bubble venting diaphragm 80C for opening and closing the filter bubble venting passage 70C. The filter discharge valve side opening 73C of the filter air bubble venting passage 70C is located within the range of the filter air bubble venting diaphragm 80C.

[0070] In this embodiment, the chemical supply pump device connects the first discharge passage 30A and the second suction passage 20B via a filter 7. Figure 16 shows the operation of the chemical solution supply pump device shown in Figure 15. First, the pressure in the first pump chamber 10A is reduced, the first suction passage 20A is opened, and the first discharge passage 30A and the first air bubble removal passage 70A are closed to draw the drug solution into the first pump chamber 10A. Then, the first pump chamber 10A is pressurized, the first suction passage 20A and the first discharge passage 30A are closed, and the first air bubble removal passage 70A is opened to discharge air bubbles from the first pump chamber 10A. Subsequently, the first pump chamber 10A is pressurized, the first suction passage 20A, the first air bubble venting passage 70A, and the second suction passage 20B are closed, and the first discharge passage 30A is opened to draw the drug solution into the filter 7. Then, the first pump chamber 10A is pressurized, the first suction passage 20A, the first air bubble venting passage 70A, and the second suction passage 20B are closed, and the first discharge passage 30A and the filter air bubble venting passage 70C are opened to discharge air bubbles from the filter 7.

[0071] Then, the first pump chamber 10A is pressurized, the first suction passage 20A, the first air bubble passage 70A, the second discharge passage 30B, the second air bubble passage 70B, and the filter air bubble passage 70C are closed, and the first discharge passage 30A and the second suction passage 20B are opened to draw the drug solution into the second pump chamber 10B. Then, the second pump chamber 10B is pressurized, the second suction passage 20B and the second discharge passage 30B are closed, and the second air bubble removal passage 70B is opened to discharge air bubbles from the second pump chamber 10B. Then, the second pump chamber 10B is pressurized, the second suction passage 20B and the second air venting passage 70B are closed, and the second discharge passage 30B is opened to discharge the drug solution from the second pump chamber 10B. According to this embodiment, it is possible to prevent air bubbles from being mixed into the chemical solution, and since the second pump chamber 10B only operates by pressurizing, creep of the second pump-side diaphragm 40B can be minimized, thereby improving the accuracy of the chemical solution discharge volume.

[0072] Figure 17 is a chemical solution supply circuit diagram showing a chemical solution supply pump device according to yet another embodiment of the present invention. In the embodiment shown in Figure 17, the first bubble-removing diaphragm 80A and the second bubble-removing diaphragm 80B are positioned at the highest position, and the first bubble-removing passage 70A and the second bubble-removing passage 70B are connected to a single downstream bubble-removing passage outlet opening 76. [Industrial applicability]

[0073] This invention is suitable for chemical supply pumps in the semiconductor manufacturing field where precise flow control and high cleanliness are required. [Explanation of symbols]

[0074] 1 Source 2. Vacuum pump 3 filters 4 Regulators 5. Ring-shaped sealing material 6 pipes 7 filters 7a Air bubble release valve 8 bottles 10 Pump Room 10A Pump Room 1 10B Pump Room 2 20 Suction passage 20A 1st suction passage 20B 2nd suction passage 21 Inlet 21A 1st intake port 21B 2nd intake port 22 Pump-side suction passage 22A First pump side suction passage 22B Second pump side suction passage 23 Intake valve side opening 23A First intake valve side opening 23B Second intake valve side opening 24 Upstream intake passage 24A 1st upstream suction passage 24B 2nd upstream suction passage 25 Upstream suction passage outlet opening 25A 1st upstream suction passage outlet opening 25B 2nd upstream suction passage outlet opening 26 Upstream intake passage inlet opening 26A 1st upstream suction passage inlet opening 26B 2nd upstream suction passage inlet opening 30 Discharge passage 30A 1st discharge passage 30B 2nd discharge passage 31 Discharge port 31A 1st discharge port 31B 2nd discharge port 32 Pump-side discharge passage 32A First pump side discharge passage 32B Second pump side discharge passage 33 Discharge valve side opening 33A First discharge valve side opening 33B Second discharge valve side opening 34 Downstream discharge passage 34A 1st downstream discharge passage 34B 2nd downstream discharge passage 35 Downstream discharge passage inlet opening 35A 1st downstream discharge passage inlet opening 35B 2nd downstream discharge passage inlet opening 36 Downstream discharge passage outlet opening 36A 1st downstream discharge passage outlet opening 36B 2nd downstream discharge passage outlet opening 40 Pump-side diaphragm 40A First pump side diaphragm 40B Second pump side diaphragm 41 Pump-side operating chamber 41A First pump side working chamber 41B Second pump side working chamber 42 Pump-side operating air passage 42A First pump side operating air passage 42B Second pump side operating air passage 43 Pump-side operating air passage opening 44 Piping 45 Solenoid valve 50 Intake valve side diaphragm 50A First intake valve side diaphragm 50B Second intake valve side diaphragm 50X Actuator 51 Intake valve side working chamber 51A First intake valve side working chamber 51B Second intake valve side working chamber 52 Intake valve side operating air passage 52A First intake valve side operating air passage 52B Second intake valve side operating air passage 52a First vertical hole on the intake valve side 52b Intake valve side lateral groove 52c Second vertical hole on the intake valve side 52d Side hole on the intake valve side 52e First vertical hole on the intake valve side 53 Intake valve side operating air passage opening 54 Piping 55 Solenoid valve 60 Discharge valve side diaphragm 60A First discharge valve side diaphragm 60B Second discharge valve side diaphragm 60X Actuator 61 Discharge valve side working chamber 61A First discharge valve side working chamber 61B Second discharge valve side working chamber 62 Discharge valve side operating air passage 62A First discharge valve side operating air passage 62B Second discharge valve side operating air passage 62a First vertical hole on the discharge valve side 62b Discharge valve side groove 62c Second vertical hole on the discharge valve side 62d Side hole on the discharge valve side 62e First vertical hole on the discharge valve side 63 Discharge valve side operating air passage opening 64 Piping 65 Solenoid valve 70 Bubble venting passage 70A First air bubble venting passage 70B Second air bubble venting passage 70C filter bubble venting passage 71 Outlet 71A 1st outlet 71B 2nd outlet 71C Filter Outlet 72 Pump-side air venting passage 72A No. 1 pump side air vent passage 72B Second pump side air vent passage 73 Exhaust valve side opening 73A First discharge valve side opening 73B Second discharge valve side opening 73C Filter discharge valve side opening 74 Downstream air venting passage 75 Downstream air venting passage inlet opening 75A First downstream side air bubble venting passage inlet opening 75B Second downstream side air bubble venting passage inlet opening 75C Filter downstream side air bubble venting passage inlet opening 76 Downstream air venting passage outlet opening 76A First downstream side air bubble venting passage outlet opening 76B Second downstream air venting passage outlet opening 76C Filter downstream side air bubble venting passage outlet opening 78 Filter air bubble venting passage inlet opening 80. Air bubble removal diaphragm 80A First bubble venting diaphragm 80B Second air bubble venting diaphragm 80C Filter De-bubble Diaphragm 80X Actuator 81 Air bubble removal operating chamber 82 Air passage for bubble removal operation 82a First vertical hole for removing air bubbles 82b Bubble-removing horizontal groove 82c Second vertical hole for removing air bubbles 82d Bubble-removing side hole 82e First vertical hole for removing air bubbles 83. Air passage opening for bubble removal operation 84 Piping 85 Solenoid valve A Block 1 B Block 2 C Block 3 D Block 4 F. Pump for supplying the first chemical solution M Thick part R Second chemical solution supply pump X Block

Claims

1. A pump chamber for inhaling and discharging a drug solution, The pump chamber includes an inhalation passage for drawing in the drug solution, A discharge passage for discharging the chemical solution from the pump chamber, A pump-side diaphragm that pressurizes or depressurizes the pump chamber, A valve-side diaphragm that opens and closes the intake passage and the discharge passage. It has, The pump chamber is depressurized, the suction passage is opened, and the discharge passage is closed to draw the liquid chemical into the pump chamber. The pump chamber is pressurized, the discharge passage is opened, and the suction passage is closed to discharge the liquid drug from the pump chamber. A pump for supplying chemical solutions, The pump-side diaphragm and the valve-side diaphragm are arranged in parallel. As the valve-side diaphragm, The intake valve side diaphragm opens and closes the intake passage, The discharge valve side diaphragm that opens and closes the aforementioned discharge passage and It has, The pump chamber is provided with the intake port of the intake passage and the discharge port of the discharge passage. The pump-side suction passage forming the suction port has a suction valve-side opening that is opened and closed by the suction valve-side diaphragm, The pump-side discharge passage forming the discharge port has a discharge valve-side opening that is opened and closed by the discharge valve-side diaphragm, The pump-side suction passage and the pump-side discharge passage are formed in the first block. The pump chamber is formed on one end face of the first block. The other end face of the first block is formed with the intake valve side opening and the discharge valve side opening. The pump-side diaphragm is placed on one end face of the first block, The intake valve side diaphragm and the discharge valve side diaphragm are arranged on the other end face of the first block. The second block is placed on one end face of the first block, A pump-side operating chamber for operating the pump-side diaphragm is formed on the surface of the second block that abuts against the first block. A third block is placed on the other end face of the first block, An intake valve side operating chamber for operating the intake valve side diaphragm and a discharge valve side operating chamber for operating the discharge valve side diaphragm are formed on the surface of the third block that abuts against the first block. A chemical solution supply pump characterized by the following features.

2. At least a portion of the valve-side diaphragm is positioned within the projection plane of the pump-side diaphragm. The chemical solution supply pump according to feature 1.

3. At least a portion of the suction valve side diaphragm and at least a portion of the discharge valve side diaphragm are arranged within the projection plane of the pump side diaphragm. The chemical solution supply pump according to feature 1.

4. On the outer periphery of the pump chamber, The intake port of the intake passage and the discharge port of the discharge passage are arranged as follows: The pump-side suction passage that forms the suction port is arranged within the projection plane of the pump-side diaphragm. The pump-side discharge passage that forms the discharge port is arranged within the projection plane of the pump-side diaphragm. The suction valve side opening of the pump-side suction passage is positioned within the range of the suction valve side diaphragm. The discharge valve side opening of the pump-side discharge passage is positioned within the range of the discharge valve side diaphragm. The chemical solution supply pump according to feature 3.

5. A bubble venting passage for discharging bubbles from the pump chamber, A bubble venting diaphragm that opens and closes the bubble venting passage and It has, At least a portion of the air-removing diaphragm is positioned within the projection plane of the pump-side diaphragm. The chemical solution supply pump according to feature 1.

6. The outlet for the air bubble venting passage is located on the outer periphery of the pump chamber. The pump-side air venting passage that forms the discharge port is positioned within the projection plane of the pump-side diaphragm. The discharge valve side opening of the pump-side air venting passage is positioned within the range of the air venting diaphragm. The chemical solution supply pump according to feature 5.

7. By supplying pump-side operating air to the pump-side operating chamber, the pump chamber is pressurized, By discharging the pump-side operating air from the pump-side operating chamber, the pump chamber is depressurized. By supplying intake valve operating air to the intake valve side operating chamber, the intake passage is closed. The intake passage is opened by discharging the intake valve operating air from the intake valve side operating chamber. By supplying the discharge valve side operating air to the discharge valve side operating chamber, the discharge passage is closed. The discharge passage is opened by discharging the operating air on the discharge valve side from the operating chamber on the discharge valve side. The chemical solution supply pump according to feature 1.

8. The second block contains, A pump-side operating air passage is formed to supply pump-side operating air to the pump-side operating chamber and to discharge the pump-side operating air from the pump-side operating chamber. The aforementioned third block contains: An intake valve side operating air passage supplies intake valve side operating air to the intake valve side operating chamber and discharges the intake valve side operating air from the intake valve side operating chamber, A discharge valve side operating air passage supplies discharge valve side operating air to the discharge valve side operating chamber and discharges the discharge valve side operating air from the discharge valve side operating chamber. formed The chemical solution supply pump according to feature 1.

9. The intake valve side diaphragm and the discharge valve side diaphragm are formed from a single diaphragm. The chemical solution supply pump according to feature 1.

10. The pump-side diaphragm is formed from a composite material of polyimide and fluororesin. The chemical solution supply pump according to feature 1.

11. The valve-side diaphragm is formed from a composite material of polyimide and fluororesin. The chemical solution supply pump according to feature 1.

12. The pump-side diaphragm is welded to the one end face of the first block. The chemical solution supply pump according to feature 1.

13. The intake valve side diaphragm and the discharge valve side diaphragm are welded to the other end face of the first block. The chemical solution supply pump according to feature 1.

14. Having a first chemical solution supply pump and a second chemical solution supply pump, The E1 chemical supply pump is, The first pump chamber is used for inhaling and discharging the drug solution, The first pump chamber includes a first inhalation passage for drawing in the drug solution, A first discharge passage for discharging the chemical solution from the first pump chamber, A first pump-side diaphragm that pressurizes or depressurizes the first pump chamber, A first intake valve side diaphragm that opens and closes the first intake passage, The first discharge valve side diaphragm that opens and closes the first discharge passage and It has, The second chemical solution supply pump is, The second pump chamber is used for inhaling and discharging the drug solution, The second pump chamber includes a second inhalation passage for drawing in the drug solution, A second discharge passage for discharging the chemical solution from the second pump chamber, A second pump-side diaphragm that pressurizes or depressurizes the second pump chamber, The second intake valve side diaphragm that opens and closes the second intake passage, The second discharge valve side diaphragm that opens and closes the second discharge passage and has A pump device for supplying chemical solutions, The first pump-side diaphragm and the second pump-side diaphragm are arranged parallel to each other within the block. The first pump chamber is provided with the first inlet of the first suction passage and the first outlet of the first discharge passage. The first pump-side suction passage forming the first suction port has a first suction valve-side opening that is opened and closed by the first suction valve-side diaphragm, The first pump-side discharge passage forming the first discharge port has a first discharge valve-side opening that is opened and closed by the first discharge valve-side diaphragm, The first pump-side suction passage and the first pump-side discharge passage are formed in the first block. The first pump chamber is formed on one end face of the first block. The other end face of the first block is formed with the first intake valve side opening and the first discharge valve side opening. The first pump-side diaphragm is placed on one end face of the first block, The first intake valve side diaphragm and the first discharge valve side diaphragm are arranged on the other end face of the first block. The second block is placed on one end face of the first block, A first pump-side operating chamber for operating the first pump-side diaphragm is formed on the surface of the second block that abuts against the first block. A third block is placed on the other end face of the first block, A first suction valve side operating chamber for operating the first suction valve side diaphragm and a first discharge valve side operating chamber for operating the first discharge valve side diaphragm are formed on the surface of the third block that abuts against the first block. The second pump chamber is provided with the second inlet of the second suction passage and the second outlet of the second discharge passage. The second pump-side suction passage forming the second suction port has a second suction valve-side opening that is opened and closed by the second suction valve-side diaphragm, The second pump-side discharge passage forming the second discharge port has a second discharge valve-side opening that is opened and closed by the second discharge valve-side diaphragm, The second pump-side suction passage and the second pump-side discharge passage are formed in the first block. The second pump chamber is formed on one end face of the first block. The other end face of the first block is formed with the second intake valve side opening and the second discharge valve side opening. The second pump-side diaphragm is placed on one end face of the first block, The second intake valve side diaphragm and the second discharge valve side diaphragm are arranged on the other end face of the first block. The second block is placed on one end face of the first block, A second pump-side operating chamber for operating the second pump-side diaphragm is formed on the surface of the second block that abuts against the first block. The third block is placed on the other end face of the first block, A second suction valve side operating chamber for operating the second suction valve side diaphragm and a second discharge valve side operating chamber for operating the second discharge valve side diaphragm are formed on the surface of the third block that abuts against the first block. A pump device for supplying chemical solutions, characterized by the following features.

15. At least a portion of the first suction valve side diaphragm and at least a portion of the first discharge valve side diaphragm are arranged within the projection plane of the first pump side diaphragm. At least a portion of the second suction valve side diaphragm and at least a portion of the second discharge valve side diaphragm are arranged within the projection plane of the second pump side diaphragm. The chemical solution supply pump device according to feature 14.

16. A first bubble venting passage for discharging bubbles from the first pump chamber, A first bubble venting diaphragm that opens and closes the first bubble venting passage and It has, At least a portion of the first air bubble removal diaphragm is positioned within the projection plane of the first pump-side diaphragm. A second bubble venting passage for discharging bubbles from the second pump chamber, A second bubble venting diaphragm that opens and closes the second bubble venting passage and It has, At least a portion of the second air bubble removal diaphragm is positioned within the projection plane of the second pump-side diaphragm. The chemical solution supply pump device according to feature 14.

17. The second block contains, A first pump-side operating air passage is formed to supply first pump-side operating air to the first pump-side operating chamber and to discharge the first pump-side operating air from the first pump-side operating chamber. A second pump-side operating air passage is formed to supply second pump-side operating air to the second pump-side operating chamber and to discharge the second pump-side operating air from the second pump-side operating chamber. The aforementioned third block contains: A first intake valve side operating air passage supplies first intake valve side operating air to the first intake valve side operating chamber and discharges the first intake valve side operating air from the first intake valve side operating chamber, A first discharge valve side operating air passage supplies first discharge valve side operating air to the first discharge valve side operating chamber and discharges the first discharge valve side operating air from the first discharge valve side operating chamber, A second intake valve side operating air passage supplies second intake valve side operating air to the second intake valve side operating chamber and discharges the second intake valve side operating air from the second intake valve side operating chamber, A second discharge valve side operating air passage is formed, which supplies second discharge valve side operating air to the second discharge valve side operating chamber and discharges the second discharge valve side operating air from the second discharge valve side operating chamber. The chemical solution supply pump device according to feature 14.

18. The first discharge passage and the second suction passage are connected via a filter. Within the aforementioned block, a filter bubble venting passage for discharging bubbles from the filter and a filter bubble venting diaphragm for opening and closing the filter bubble venting passage are arranged. The chemical solution supply pump device according to feature 14.

19. The first discharge passage and the second suction passage are connected via a filter. Within the block, a filter bubble venting passage for discharging bubbles from the filter and a filter bubble venting diaphragm for opening and closing the filter bubble venting passage are arranged. The first pump chamber is depressurized, the first suction passage is opened, the first discharge passage and the first air bubble removal passage are closed, and the chemical solution is drawn into the first pump chamber. The first pump chamber is pressurized, the first suction passage and the first discharge passage are closed, the first bubble removal passage is opened, and the bubbles are discharged from the first pump chamber. The first pump chamber is pressurized, the first suction passage, the first air bubble removal passage, and the second suction passage are closed, and the first discharge passage is opened to draw the chemical solution into the filter. The first pump chamber is pressurized, the first suction passage, the first bubble removal passage and the second suction passage are closed, and the first discharge passage and the filter bubble removal passage are opened to discharge the bubbles from the filter. The first pump chamber is pressurized, the first suction passage, the first air bubble passage, the second discharge passage, the second air bubble passage, and the filter air bubble passage are closed, the first discharge passage and the second suction passage are opened, and the liquid chemical is drawn into the second pump chamber. The second pump chamber is pressurized, the second suction passage and the second discharge passage are closed, the second air bubble removal passage is opened, and the air bubbles are discharged from the second pump chamber. The second pump chamber is pressurized, the second suction passage and the second air venting passage are closed, and the second discharge passage is opened to discharge the chemical solution from the second pump chamber. The chemical solution supply pump device according to feature 16.

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