Loadport

Abstract

It allows for more accurate detection of whether the container is placed in the correct position. [Solution] A load port comprising: a port plate having an opening through which a substrate can be inserted and removed; a mounting base on which a container containing the substrate is placed; a port door capable of opening and closing the opening and holding the door portion of the container; and a drive mechanism for performing the opening and closing operation of the port door, wherein the load port comprises: a plurality of first detection means for detecting that the container has been placed on the mounting base; and a determination means for determining that the container has been placed on the mounting base in a proper state based on the detection by all of the plurality of first detection means that the container has been placed within a predetermined time.