Control device, adjustment method, lithography device and method of manufacturing article

Abstract

A control device for generating a control signal for controlling a control target, comprising: a first compensator that generates a first signal based on a control deviation of the control target; a corrector that corrects the control deviation using one of a plurality of adjustment units that generate a correction signal by correcting the control deviation according to an operation formula in which coefficients can be adjusted; a second compensator that generates a second signal by a neural network based on the correction signal; and an operation unit that generates the control signal based on the first signal and the second signal.