Surface height measurement method using dummy disk

The dummy disk with liquid discharge channels addresses the inaccuracies in measuring polishing table surface heights by stabilizing the dresser's posture and ensuring precise pad profile management, improving the CMP process.

US12257666B2Active Publication Date: 2025-03-25EBARA CORP
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Patent Information

Application Number
US18/466002
Authority / Receiving Office
US · United States
Patent Type
Patents(United States)
Current Assignee / Owner
Priority Date
2019-01-31
Filing Date
2023-09-13
Publication Date
2025-03-25
Estimated Expiration
2039-12-09

AI Technical Summary

Technical Problem

The existing methods for measuring the height of the polishing table surface in CMP devices are prone to inaccuracies due to manual operation and instability caused by liquids, leading to variations in measurement results and difficulties in maintaining a stable pad profile for effective polishing.

Method used

A dummy disk with liquid discharge channels is used to contact the polishing table surface, allowing for accurate measurement of table surface heights and stabilization of the dresser's posture, enabling precise measurement of table and pad profiles despite the presence of liquids.

Benefits of technology

The dummy disk ensures stable and accurate measurement of table surface heights, reducing variations and improving the precision of pad profile management, thereby enhancing the polishing process by maintaining consistent pad profiles.

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Abstract

A method is provided and includes making a polishing table and a dummy disk rotate; bringing the dummy disk into contact with a table surface of the polishing table while a liquid is supplied to the table surface; measuring heights of the table surface at a plurality of measurement points while the dummy disk is moved on the table surface; and creating a table profile showing tilt of the table surface from measurement values of the heights of the table surface.
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