Acoustic particle counter for nanoparticles in liquids

WO2025015214A8 Publication Date: 2025-03-27OVIVO INC +3
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Patent Information

Application Number
PCT/US2024/037669
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-07-12
Filing Date
2024-07-11
Publication Date
2025-03-27

AI Technical Summary

Technical Problem

Existing acoustic particle counters for nanoparticles in liquids face challenges such as dependency on steady flow and pressure conditions, contamination risks from degassing accessories, and limited ability to simultaneously detect different particle sizes or samples, leading to inconsistent and impractical measurements.

Method used

The implementation of a redesigned system with replicates of transducer and measurement cells using parallel flow paths, a compact waveform generator module, and a flow control system to stabilize liquid flow and pressure, allowing for simultaneous detection of multiple particle sizes and reducing contamination risks.

Benefits of technology

This approach enables accurate, reproducible, and efficient monitoring of particle size and concentration in liquids, reducing the system footprint and eliminating contamination risks, while allowing continuous online monitoring of liquid purity.

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Abstract

In semiconductor manufacture requiring ultra high purity water, particles of specified si zes are detected using acoustic particle detection capable of detecting nanoparticles. A sensor unit receives a flow of water, with the pressure and rate of flow to the sensor controlled closely. In each sensor unit is a measurement cell to receive a continuous flow of water, with a transducer module engaged with the cell to deliver an acoustic pulse at a known level of intensity as the liquid flows through the cells, the acoustic pulse acting on the liquid at a focus zone to cause cavitation in the event a particle of si ze detectable at that intensity is present. A waveform emitter / receiver connected to the sensor unit sends high-frequency, high-voltage signal to the transducer module to cause the acoustic pulse, and it also receives a waveform echo indicating a cavitation event. The system is controlled by a microprocessor.
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