Optical modulator

By designing a shielding structure in the optical modulator to form an electrically connected cage, the problem of electromagnetic radiation interference of the optical modulator is solved, the modulation performance is improved, and the process flow is simplified.

WO2025060548A1 Publication Date: 2025-03-27INNOLIGHT TECHNOLOGY (SUZHOU) LTD
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Patent Information

Application Number
PCT/CN2024/100814
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-09-18
Filing Date
2024-06-22
Publication Date
2025-03-27

AI Technical Summary

Technical Problem

The existing optical modulators require a large driving voltage, which leads to large electromagnetic radiation, interferes with sensitive components and affects modulation performance.

Method used

An optical modulator is designed, including a first dielectric layer, a second dielectric layer, an insulating layer, a third dielectric layer and a shielding structure. The shielding structure forms a cage through a first shielding structure and a second shielding structure electrically connected to each other, surrounding the waveguide structure, conductive layer and other components of the optical modulator to effectively shield electromagnetic radiation.

Benefits of technology

The shielding structure limits electromagnetic radiation to the cage, reduces the interference of external electromagnetic radiation on the optical modulator, improves the modulation performance of the optical modulator, and simplifies the process flow.

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Abstract

The present utility model relates to an optical modulator, comprising: a first dielectric layer; a second dielectric layer, which is located on the first dielectric layer, wherein a waveguide structure and first conductive layers are provided in the second dielectric layer, the waveguide structure is electrically connected to the first conductive layers by means of via holes, and the first conductive layers are used for adjusting light which is transmitted by means of the waveguide structure; an insulating layer, which is located on a waveguide layer; a third dielectric layer, which is located on the insulating layer, wherein second conductive layers are provided in the third dielectric layer, and the second conductive layers are electrically connected to the first conductive layers by means of via holes; and a shielding structure, which comprises a first shielding structure and a second shielding structure that are electrically connected to each other, wherein the first shielding structure is located in the second dielectric layer, the second shielding structure is located in the insulating layer and the third dielectric layer, and the first shielding structure and the second shielding structure enclose to form a cage, the waveguide structures, the first conductive layers and the second conductive layers being located in the cage. The optical modulator realizes electromagnetic shielding between a modulator and the outside, thereby improving the modulation performance.
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