System and method for measuring a quantity of a known gas

WO2026122372A1PCT designated stage Publication Date: 2026-06-11INFICON INC

Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
INFICON INC
Filing Date
2025-11-26
Publication Date
2026-06-11

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Abstract

A system and method for continuously monitoring and measuring a quantity of a reference gas includes providing a reference gas and measuring a thermal conductivity of the reference gas via a gas analyzer and calculating a purity threshold value based on the measured thermal conductivity of the reference gas. A mixture of gases containing the reference gas is then provided and a thermal conductivity of the mixture of gases is continuously measured via the gas analyzer. The measured thermal conductivity of the mixture of gases is compared to the purity threshold value, and a purity threshold level of the reference gas in the mixture of gases is indicated once the measured thermal conductivity of the mixture of gases reaches the purity threshold value.
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