Diaphragm movement device and scanning movement method therefor, and exposure device

Abstract

A diaphragm movement device and a scanning movement method therefor, and an exposure device, which relate to the technical field of semiconductor apparatuses. The diaphragm movement device comprises a movement assembly and a mass balance assembly connected to each other. The movement assembly comprises a first guide rail (11), a first sliding block (12), a second sliding block (13), a first driving member and a second driving member, and the mass balance assembly comprises a second guide rail (21), a third sliding block (22), a fourth sliding block (23), a third driving member and a fourth driving member, wherein the first driving member and the third driving member are electrically connected to a first control circuit; the second driving member and the fourth driving member are electrically connected to a second control circuit; and the third sliding block (22) and the fourth sliding block (23) can respectively follow the movement of the first sliding block (12) and the second sliding block (13) to perform synchronous reverse movement without delay.

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