High-voltage ignition and starting apparatus for plasma reaction chamber, and impedance matcher

Abstract

The present application belongs to the technical field of impedance matchers, and specifically relates to a high-voltage ignition and starting apparatus for a plasma reaction chamber, and an impedance matcher. The ignition and starting apparatus is applied to a plasma reaction chamber, and comprises a control module, a driving module, an ignition module and a matching module, wherein the control module is used for controlling the ignition module; when the ignition module is started, an ignition voltage is provided for the plasma reaction chamber by means of a power-frequency power source; and at the same time, the control module controls the driving module to drive the matching module to provide an impedance matching signal for the plasma reaction chamber. The ignition and starting apparatus involved in the present application can realize the rapid starting of a plasma reaction chamber, and provide an impedance matching signal after ignition and starting.

Description

A high-voltage ignition and start-up device and impedance matching device for a plasma reaction chamber Technical Field

[0001] This utility model belongs to the field of impedance matching technology, specifically relating to a high-voltage ignition and start-up device for a plasma reaction chamber and an impedance matching device. Background Technology

[0002] The ignition and initiation of a plasma reaction chamber refers to the process of starting the plasma during plasma generation using specific methods and equipment to enable subsequent applications such as plasma processing, etching, and deposition. The ignition and initiation device of the plasma reaction chamber has a certain impact on the plasma generation rate and quality performance.

[0003] In existing plasma cavities, direct input of radio frequency signals often fails to ignite the plasma cavity under high vacuum and low cavity pressure. Therefore, an additional ignition source is required to ignite the plasma cavity first, and then impedance matching is performed. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the technical problem of failure of plasma reaction chamber ignition in the prior art, thereby providing a high-voltage ignition device and impedance matching device for plasma reaction chamber.

[0005] This utility model discloses an ignition and start-up device for use in a plasma reaction chamber, including a control module, a drive module, an ignition module and a matching module;

[0006] The first control terminal of the control module is connected to the input terminal of the drive module and is used to send the control signal to the drive module.

[0007] The second control terminal of the control module is connected to the signal input terminal of the ignition module and is used to send the ignition signal to the ignition module.

[0008] The control terminal of the drive module is connected to the controlled terminal of the matching module, and is used to control the matching module according to the control signal;

[0009] The ignition module is used to provide ignition voltage to the plasma reaction chamber, and the output terminal of the ignition module is connected to the output terminal of the matching module; the power input terminal of the ignition module is connected to the power output terminal of the power frequency power supply.

[0010] The input and output terminals of the matching module are connected to the radio frequency power supply and the plasma reaction chamber, respectively, and are used to receive the power signal from the radio frequency power supply and transmit it to the plasma reaction chamber.

[0011] Furthermore, it also includes a sampling module, the detection end of which is connected to the input end of the matching module to obtain the state parameters of the input end of the matching module, and the output end of the sampling module is connected to the control module to provide the corresponding detection signal to the control module.

[0012] Furthermore, the sampling module includes an electrical quantity sensor and a sampling controller connected to each other. The input terminal of the electrical quantity sensor is connected to an RF power supply, and the detection terminal is connected to the input terminal of the matching module. The output terminal of the electrical quantity sensor is connected to the sampling controller, and the sampling controller is connected to the input terminal of the control module.

[0013] Furthermore, the matching module includes a first adjustable capacitor, a second adjustable capacitor, and a first inductor. The driving module drives the controlled terminal of the first adjustable capacitor and the controlled terminal of the second adjustable capacitor. The second terminal of the first adjustable capacitor and the first terminal of the second adjustable capacitor serve as the input terminals of the matching module. The first terminal of the first adjustable capacitor is grounded, the second terminal of the second adjustable capacitor is connected to the first terminal of the first inductor, and the second terminal of the first inductor serves as the output terminal of the matching module.

[0014] Furthermore, the ignition module includes a relay, a transformer, and a half-wave rectifier unit. The signal input terminal of the relay is connected to the second control terminal of the control module. The power input terminal and power output terminal of the relay are respectively connected to the power output terminal of the power frequency power supply and the input winding of the transformer. One end of the output winding of the transformer is connected to the input terminal of the half-wave rectifier unit, and the other end of the output winding of the transformer is grounded. The output terminal of the half-wave rectifier unit serves as the output terminal of the ignition module.

[0015] Furthermore, the ignition module also includes a low-pass filter, the input of which is connected to the output of the half-wave rectifier unit, and the output of which is connected to the RF output of the matching module.

[0016] Furthermore, the control module includes a rectifier and a control unit, with the input and output terminals of the rectifier connected to the power frequency power supply and the input terminal of the control unit, respectively.

[0017] Furthermore, the transformer is a plasma high-voltage transformer.

[0018] Furthermore, the second control terminal of the control module is connected to the controlled terminal of the relay via an RS-232 interface.

[0019] An impedance matching device, the impedance matching device including the above-described ignition and starter device.

[0020] Beneficial effects: This utility model discloses an ignition and start-up device applied to a plasma reaction chamber, including a control module, a drive module, an ignition module, and a matching module. The control module controls the ignition module. When the ignition module starts, it provides an ignition voltage to the plasma reaction chamber through a power frequency power supply. At the same time, the control module controls the drive module to drive the matching module to provide an impedance matching signal to the plasma reaction chamber. Thus, the ignition and start-up device provided by this utility model can realize the rapid ignition of the plasma reaction chamber and provide an impedance matching signal after ignition and start-up. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 is a schematic block diagram of the overall structure of this utility model;

[0023] Figure 2 is a schematic block diagram of the specific structure of this utility model.

[0024] Figure label:

[0025] 1. Control module; 2. Drive module; 3. Ignition module; 4. Matching module; 5. Sampling module; 6. Power frequency power supply; 11. Control unit; 12. Rectifier; 31. Relay; 32. Transformer; 41. First adjustable capacitor; 42. Second adjustable capacitor; 43. First inductor; 51. Sampling controller; 52. Electrical quantity sensor. Detailed Implementation

[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0027] In the description of this application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0028] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0029] Example 1:

[0030] Referring to Figures 1 and 2, this utility model discloses an ignition and start-up device, wherein the dashed arrows represent control signals and are applied to a plasma reaction chamber, including a control module 1, a drive module 2, an ignition module 3, and a matching module 4;

[0031] The first control terminal of the control module 1 is connected to the input terminal of the drive module 2 and is used to send control signals to the drive module 2.

[0032] The second control terminal of the control module 1 is connected to the signal input terminal of the ignition module 3, and is used to send the ignition signal to the ignition module 3;

[0033] The control terminal of the drive module 2 is connected to the controlled terminal of the matching module 4, and is used to control the matching module 4 according to the control signal;

[0034] Ignition module 3 is used to provide ignition voltage to the plasma reaction chamber. The output terminal of ignition module 3 is connected to the output terminal of matching module 4. The power input terminal of ignition module 3 is connected to the power output terminal of power frequency power supply 6.

[0035] The input and output terminals of the matching module 4 are connected to the radio frequency power supply and the plasma reaction chamber, respectively, and are used to receive the power signal from the radio frequency power supply and transmit it to the plasma reaction chamber.

[0036] As a further improvement to this embodiment, a sampling module 5 is also included. The detection end of the sampling module 5 is connected to the input end of the matching module 4 to acquire the state parameters of the input end of the matching module 4. The output end of the sampling module 5 is connected to the control module 1 to provide a corresponding detection signal to the control module 1. In this embodiment, the sampling module 5 includes an electrical quantity sensor 52 and a sampling controller 51 connected to each other. The input end of the electrical quantity sensor 52 is connected to the radio frequency power supply, and the detection end is connected to the input end of the matching module 4. The output end of the electrical quantity sensor 52 is connected to the sampling controller 51, and the sampling controller 51 is connected to the input end of the control module 1.

[0037] In this embodiment, the electrical quantity sensor 52 can be a current sensor, a voltage sensor, or a voltage-current sensor. Preferably, the electrical quantity sensor 52 is a voltage-current sensor, used to acquire the voltage and current parameters at the input terminal of the matching module 4. In this embodiment, the sampling controller 51 can be a CPU, MCU, microcontroller, or FPGA. Preferably, the sampling controller 51 is an FPGA, which controls the sampling operation of the voltage and current sensor, acquires the sampling parameters, and outputs them to the control module 1.

[0038] Specifically, the matching module 4 includes a first adjustable capacitor 41, a second adjustable capacitor 42, and a first inductor 43. The driving module 2 drives the controlled terminals of the first and second adjustable capacitors 41 and 42. The second terminal of the first adjustable capacitor 41 and the first terminal of the second adjustable capacitor 42 serve as the input terminals of the matching module 4. The first terminal of the first adjustable capacitor 41 is grounded (marked as GND in Figure 2). The second terminal of the second adjustable capacitor 42 is connected to the first terminal of the first inductor 43, and the second terminal of the first inductor 43 serves as the output terminal of the matching module 4. In this embodiment, the casing of the matching module 4 is grounded. In this embodiment, the driving module 2 includes a motor, which can adjust the capacitance values ​​of the first and second adjustable capacitors 41 and 42 respectively.

[0039] In this embodiment, the ignition module 3 includes a relay 31, a transformer 32, and a half-wave rectifier unit. The signal input terminal of the relay 31 is connected to the second control terminal of the control module 1. The power input terminal and power output terminal of the relay 31 are respectively connected to the power output terminal of the power frequency power supply 6 and the input winding of the transformer 32. One end of the output winding of the transformer 32 is connected to the input terminal of the half-wave rectifier unit, and the other end of the output winding of the transformer 32 is grounded. The output terminal of the half-wave rectifier unit serves as the output terminal of the ignition module 3.

[0040] As a further improvement to this embodiment, the ignition module 3 also includes a low-pass filter. The input of the low-pass filter is connected to the output of the half-wave rectifier unit, and the output is connected to the RF output of the matching module 4. Preferably, the low-pass filter is an LC filter, including a second inductor and a third capacitor, which can effectively filter out high-frequency signals that interfere with the normal operation of the plasma reaction chamber.

[0041] In this embodiment, the control module 1 includes a rectifier 12 and a control unit 11. The input and output terminals of the rectifier 12 are respectively connected to the power frequency power supply 6 and the input terminal of the control unit 11. In this embodiment, the power frequency power supply 6 is a high-voltage AC power supply, and the rectifier 12 converts the high-voltage AC power supply into a low-voltage DC power supply to provide the operating voltage for the control module 1.

[0042] Specifically, transformer 32 is a plasma high-voltage transformer 32.

[0043] In this embodiment, the second control terminal of the control module 1 is connected to the controlled terminal of the relay 31 via an RS-232 interface. The communication interface can be RS232, RS485, RS422, UART, SPI, or I2C. Preferably, the communication interface in this embodiment is an RS232 interface.

[0044] Example 2:

[0045] This embodiment provides an impedance matching device, which includes the ignition and starter device of Embodiment 1.

[0046] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0047] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An ignition and start-up device, applied to a plasma reaction chamber, characterized in that, It includes a control module, a drive module, an ignition module, and a matching module; The first control terminal of the control module is connected to the input terminal of the drive module and is used to send control signals to the drive module. The second control terminal of the control module is connected to the signal input terminal of the ignition module and is used to send the ignition signal to the ignition module. The control terminal of the drive module is connected to the controlled terminal of the matching module, and is used to control the matching module according to the control signal; The ignition module is used to provide ignition voltage to the plasma reaction chamber, and the output terminal of the ignition module is connected to the output terminal of the matching module; the power input terminal of the ignition module is connected to the power output terminal of the power frequency power supply. The input and output terminals of the matching module are connected to the radio frequency power supply and the plasma reaction chamber, respectively, and are used to receive the power signal from the radio frequency power supply and transmit it to the plasma reaction chamber.

2. The ignition and starter device according to claim 1, characterized in that, It also includes a sampling module, the detection end of which is connected to the input end of the matching module to obtain the state parameters of the input end of the matching module, and the output end of the sampling module is connected to the control module to provide the corresponding detection signal to the control module.

3. The ignition and starter device according to claim 2, characterized in that, The sampling module includes an electrical quantity sensor and a sampling controller connected to each other. The input terminal of the electrical quantity sensor is connected to an RF power supply, and the detection terminal is connected to the input terminal of the matching module. The output terminal of the electrical quantity sensor is connected to the sampling controller, and the sampling controller is connected to the input terminal of the control module.

4. The ignition and starter device according to claim 1, characterized in that, The matching module includes a first adjustable capacitor, a second adjustable capacitor, and a first inductor. The driving module drives the controlled terminals of the first and second adjustable capacitors. The second terminal of the first and second adjustable capacitors serve as the input terminals of the matching module. The first terminal of the first adjustable capacitor is grounded, and the second terminal of the second adjustable capacitor is connected to the first terminal of the first inductor. The second terminal of the first inductor serves as the output terminal of the matching module.

5. The ignition and starter device according to claim 1, characterized in that, The ignition module includes a relay, a transformer, and a half-wave rectifier unit. The signal input terminal of the relay is connected to the second control terminal of the control module. The power input terminal and power output terminal of the relay are respectively connected to the power output terminal of the power frequency power supply and the input winding of the transformer. One end of the output winding of the transformer is connected to the input terminal of the half-wave rectifier unit, and the other end of the output winding of the transformer is grounded. The output terminal of the half-wave rectifier unit serves as the output terminal of the ignition module.

6. The ignition and starter device according to claim 5, characterized in that, The ignition module also includes a low-pass filter, the input of which is connected to the output of the half-wave rectifier unit, and the output of which is connected to the RF output of the matching module.

7. The ignition and starter device according to claim 1, characterized in that, The control module includes a rectifier and a control unit. The input and output terminals of the rectifier are respectively connected to the power frequency power supply and the input terminal of the control unit.

8. The ignition and starter device according to claim 5, characterized in that, The transformer is a plasma high-voltage transformer.

9. The ignition and starter device according to claim 5, characterized in that, The second control terminal of the control module is connected to the controlled terminal of the relay via a communication interface.

10. An impedance matching device, characterized in that, The impedance matching device includes the ignition and starter device as described in any one of claims 1 to 9.

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