Method for generating an EUV light beam, EUV driver laser for generating an EUV light beam, and use

The method of generating an EUV light beam using multiple laser beams with overlapping durations and a control unit for independent laser source management addresses downtime issues in EUV driver lasers, enhancing efficiency and robustness.

WO2026125028A1 Publication Date: 2026-06-18TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
Filing Date
2025-11-28
Publication Date
2026-06-18

AI Technical Summary

⚠Technical Problem

EUV driver lasers experience high downtime due to component damage or failure, leading to significant costs in complex systems, as they require stringent optical components to handle high power and pulse energy.

⚗Method used

Generate an EUV light beam by converting target material into a plasma state using multiple laser beams with overlapping durations, allowing the use of commercially available laser sources and lower average power, and employing a control unit to manage laser beam sources independently, utilizing waveguides for beam guidance and a collector device for focusing.

🎯Benefits of technology

Reduces downtime by enabling quick replacement of malfunctioning laser sources and reduces component requirements, resulting in a more efficient and robust EUV light beam generation process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to a method for generating an EUV light beam (12) by converting a target material (36) into a plasma state using a plurality of laser beams (30), the method having the steps of: generating the plurality of laser beams (30) by means of a plurality of laser beam sources (20); and converting the target material (36) into the plasma state by irradiating the target material (36) with the plurality of laser beams (30). While the target material (36) is being irradiated with the plurality of laser beams (30), each laser beam (30) impinges on the target material (36) for a time period (46), the time periods (46) overlapping with each other within a time interval (48).
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