Robot system

Abstract

This robot system comprises: a manipulator; a first measurement device that is attached to the manipulator as an end effector and can measure the shape of an object; a second measurement device that can measure the position of a movable portion of the manipulator; a third measurement device that is attached to the movable portion and can measure the object; and a control device. The control device controls the first measurement device on the basis of a second measurement result from the second measurement device and a third measurement result from the third measurement device.

Description

robot systems 【0001】 The present invention relates, for example, to the technical field of robotic systems equipped with manipulators such as robotic arms. 【0002】 Patent Document 1 describes a robot system capable of performing operations using an end effector attached to a manipulator. In such a robot system, properly performing operations using the end effector becomes a technical challenge. 【0003】 U.S. Patent Application Publication No. 2015 / 0134099 【0004】According to the first aspect, there is provided a robot system including a manipulator, a first measuring device attached to the manipulator as an end effector and capable of measuring the shape of an object, a second measuring device capable of measuring the position of a movable part of the manipulator, a third measuring device attached to the movable part and capable of measuring the object, and a control device. The control device controls the first measuring device based on a second measurement result obtained by the second measuring device and a third measurement result obtained by the third measuring device. According to the second aspect, there is provided a robot system including a manipulator, a first measuring device attached to a movable part of the manipulator and capable of measuring the shape of an object, a second measuring device capable of measuring the position of the movable part, and a control device. The control device performs movement control on the manipulator to move the movable part so that the first measuring device is located at a measurement position, and based on a position measurement result of the movable part obtained by the second measuring device, starts a shape measurement operation for measuring the shape of the object by the first measuring device. According to the third aspect, there is provided a robot system including a manipulator, a first measuring device attached to a movable part of the manipulator and capable of measuring the shape of an object, a second measuring device capable of measuring the position of the movable part, and a control device. The control device performs movement control on the manipulator to move the movable part so that the first measuring device is located at a measurement position, causes the first measuring device to perform a shape measurement operation for measuring the shape of the object, and processes a shape measurement result obtained by the shape measurement operation based on a position measurement result of the movable part obtained by the second measuring device. According to the fourth aspect, there is provided a robot system including a manipulator, a scanning device attached to a movable part of the manipulator and capable of measuring the shape of an object by scanning at least a part of the surface of the object with measurement light, and an imaging device attached to the movable part and capable of imaging the object. 【0005】Figure 1 is a system configuration diagram showing an example of the system configuration of the robot system in this embodiment. Figure 2 is a schematic perspective view showing an example of the arrangement of the robot system. Figure 3 is a side view showing the configuration of the robot. Figure 4 is a perspective view showing the configuration of the moving device. Figure 5 is a cross-sectional view showing the configuration of the measuring head. Figure 6 is a front view showing the external appearance of the measuring device. Figure 7 is a cross-sectional view showing the configuration of the measuring optical system provided by the measuring device. Figure 8 is a block diagram showing the configuration of the control device. Figure 9 is a cross-sectional view showing the configuration of the support device. Figure 10 is a cross-sectional view showing the configuration of the support device. Figure 11 is a flowchart showing the flow of robot operations performed by the robot system in this embodiment. Figure 12A is a cross-sectional view showing the imaging device located at the first imaging position, Figure 12B is a cross-sectional view showing the imaging device located from the first imaging position to the second imaging position, and Figure 12C is a cross-sectional view showing the imaging device located at the second imaging position. Figure 13 shows the target measurement position where the measuring head should measure the shape of the workpiece. Figure 14 is a graph showing the fluctuation (vibration) of the position of the tip arm member and the measurement results of the measuring device. Figure 15 is a graph showing the fluctuation (vibration) of the position of the tip arm member, the measurement results of the measuring device, and the time average value of the measurement results of the measuring device. Figures 16A to 16C are cross-sectional views showing examples in which step movement and scan measurement operations are repeated alternately. Figures 17A to 17C are cross-sectional views showing examples in which step movement and scan measurement operations are repeated alternately. Figure 18 is a graph showing the fluctuation (vibration) of the position of the tip arm member and the measurement results of the measuring device. Figure 19 is a perspective view showing a gantry, which is an example of a manipulator. Figure 20 is a cross-sectional view showing the configuration of the moving device. Figures 21A and 21B are cross-sectional views showing the configuration of the support device. Figures 22A and 22B are cross-sectional views showing the configuration of the support device. 【0006】 The following describes an embodiment of the robot system with reference to the drawings. In the following description, the robot system SYS will be used to explain the embodiment of the robot system. 【0007】(1) Configuration of the Robot System SYS First, the configuration of the robot system SYS in this embodiment will be described. 【0008】 (1-1) Overall Configuration of the Robot System SYS First, the overall configuration of the robot system SYS in this embodiment will be described with reference to Figures 1 and 2. Figure 1 is a system configuration diagram showing an example of the system configuration of the robot system SYS in this embodiment. Figure 2 is a schematic perspective view showing an example of the arrangement of the robot system SYS. 【0009】 As shown in Figures 1 and 2, the robot system SYS comprises a robot 1, a measuring device 2, a control device 3, and a support device 4. Note that in Figure 2, the control device 3 is omitted for the sake of clarity. This is because the control device 3 may be located in a different space from the space where the robot 1, measuring device 2, and support device 4 are located. Of course, the control device 3 may also be located in the same space as the robot 1, measuring device 2, and support device 4. The configurations and operations of the robot 1, measuring device 2, control device 3, and support device 4 will be described in detail later, so a detailed explanation is omitted here, but a brief overview is provided below. 【0010】 Robot 1 performs actions on workpiece W. Workpiece W is the object (target object) that is the target of the actions performed by robot 1. In particular, robot 1 performs actions on workpiece W using the end effector 15 (see Figure 3), which will be described later and is equipped with robot 1. In this case, robot 1 may perform actions on workpiece W according to the type of end effector 15 equipped with robot 1. In addition to performing predetermined actions on workpiece W, robot 1 may also perform actions that are determined on a case-by-case basis. 【0011】As a first example, robot 1 may use the end effector 15 to perform a machining operation on a workpiece W as an example of its operation. In this case, workpiece W may also be called the object to be machined. For example, robot 1 may use the end effector 15 to perform an additive machining operation on workpiece W to add a shape to it (additive machining operation). An example of an additive machining operation is an additive machining operation in which a shape is added to workpiece W by melting the molding material supplied to workpiece W with an energy beam. For example, robot 1 may use the end effector 15 to perform a removal machining operation on workpiece W to remove a part of it (removal machining operation). An example of a removal machining operation is a removal machining operation in which a part of workpiece W is removed by irradiating workpiece W with an energy beam (for example, light). An example of a removal machining operation is a machining operation in which workpiece W is machined using a tool (machining operation). When robot 1 performs a machining operation, the end effector 15 may include a machining head capable of machining workpiece W. In other words, a machining head capable of machining the workpiece W may be used as the end effector 15. The machining head may also be referred to as a machining device. 【0012】As a second example, robot 1 may use the end effector 15 to perform a measurement operation to measure a workpiece W as an example of its operation. In this case, workpiece W may be referred to as the object to be measured. Robot 1 may use the end effector 15 to perform a measurement operation to measure the characteristics of workpiece W. Examples of characteristics of workpiece W include at least one of the position of at least a part of workpiece W, the shape of at least a part of workpiece W, and the size of at least a part of workpiece W. The shape of at least a part of workpiece W may include at least one of the shape of at least a part of workpiece W itself and at least one of the shape of at least a part of the surface of workpiece W. If there is a defect on the surface of workpiece W, including at least one such defect such as scratches and dents, the measurement result of at least a part of the surface of workpiece W may vary depending on the defect (e.g., at least one of scratches and dents) that occurred on at least a part of the surface of workpiece W. For this reason, measuring at least a part of the surface of workpiece W may include measuring the defects that occurred on the surface of workpiece W (in other words, inspecting the appearance of workpiece W). In this case, the robot 1 may measure defects on the surface of the workpiece W by measuring the shape of at least a part of the surface of the workpiece W. When the robot 1 performs a measurement operation, the end effector 15 may include a measuring head capable of measuring the workpiece W. In other words, a measuring head capable of measuring the workpiece W may be used as the end effector 15. The measuring head may also be referred to as a measuring device or an object measuring device. Furthermore, when measuring defects in the workpiece W, the measuring head may also be referred to as an inspection device or an object inspection device. 【0013】 As a third example, the robot 1 may use the end effector 15 to perform a holding operation (for example, a picking operation) to hold a workpiece W, as an example of its operation. In this case, the workpiece W may be called the object to be held. An example of an end effector 15 capable of performing a holding operation is at least one of a hand gripper, a magnetic gripper, and a vacuum gripper. Furthermore, the robot 1 may use the end effector 15 to perform a release operation to release the held workpiece W, as an example of its operation. 【0014】 The workpiece W on which the robot 1 operates may be placed on a support surface SS such as the floor. Alternatively, the workpiece W may be placed on a mounting device, and the mounting device on which the workpiece W is placed may be placed on the support surface SS. An example of a mounting device is at least one of a container and a pallet. A mounting device placed on the support surface SS may be movable on the support surface SS. An example of a mounting device that can move on the support surface SS is at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). Alternatively, the mounting device may be fixed to the support surface SS. A mounting device fixed to the support surface SS may move the workpiece W placed on the mounting device. An example of a mounting device that can move the workpiece W placed on it is a belt conveyor. 【0015】 The measuring device 2 can measure the position of the robot 1 (specifically, the position of at least a part of the robot 1). For example, as an example of the position of the robot 1, the measuring device 2 may measure the position of the robot arm 12 (see Figure 3), which is provided on the robot 1. For example, as an example of the position of the robot 1, the measuring device 2 may measure the position of the tip arm member 123 (see Figure 3), which is the tip of the robot arm 12. For example, as an example of the position of the robot 1, the measuring device 2 may measure the position of the link 121 (see Figure 3), which is provided on the robot arm 12, Here, measuring a position may mean, for example, identifying the coordinates of the part being measured in the coordinate system of the measuring device 2. In the following explanation, the coordinate system of the measuring device 2 will be referred to as the measurement coordinate system. 【0016】Furthermore, link 121, joint 122, and end arm member 123 are each arm members of the robot arm 12 that can move in conjunction with the movement of the robot arm 12. For this reason, link 121, joint 122, and end arm member 123 may each be referred to as movable parts (movable arm members). 【0017】 The measuring device 2 can be any type of measuring device, as long as it is capable of measuring the position of the robot 1. For example, the measuring device 2 may be capable of measuring the position of the robot 1 without contacting the robot 1 (i.e., non-contact measurement). In this case, the measuring device 2 may measure the position of the robot 1 using an optical method that utilizes light. The measuring device 2 may measure the position of the robot 1 using an electromagnetic method that utilizes at least one of an electric field and a magnetic field. The measuring device 2 may measure the position of the robot 1 using an acoustic method that utilizes sound waves. The measuring device 2 may measure the position of the robot 1 by imaging the robot 1. Alternatively, for example, the measuring device 2 may be capable of measuring the position of the robot 1 by contacting the robot 1. For example, the measuring device 2 may measure the position of the robot 1 by pressing a sensor such as a probe against the robot 1. 【0018】 In this embodiment, an example is described in which the measuring device 2 optically measures the position of the robot 1 without contacting the robot 1. In this case, the measuring device 2 can irradiate the robot 1 with a measurement light ML2. The measurement light ML2 is typically laser light, but the measurement light ML2 may be light other than laser light. Furthermore, the measuring device 2 can receive the reflected light RL2 from the robot 1 irradiated with the measurement light ML2. In other words, the measuring device 2 can receive the reflected light RL2 of the measurement light ML2. The reflected light RL2 may include at least one of the following: reflected light which is the measurement light ML2 reflected by the robot 1; scattered light which is the measurement light ML2 scattered by the robot 1; diffracted light which is the measurement light ML2 diffracted by the robot 1; and transmitted light which is the measurement light ML2 that has passed through the robot 1. The result of receiving the reflected light RL2 by the measuring device 2 is output from the measuring device 2 to the control device 3 as the measurement result by the measuring device 2. 【0019】 The control device 3 is capable of controlling the robot 1. The control device 3 may also be referred to as a robot control device. For example, the control device 3 may control the robot 1 by generating a robot control signal for controlling the robot 1 and outputting the generated robot control signal to the robot 1. As an example, the control device 3 may generate a robot control signal for controlling the robot 1 to perform an action on the workpiece W. 【0020】 In this embodiment, the control device 3 may control the robot 1 based on the measurement results from the measuring device 2. That is, the control device 3 may generate a robot control signal based on the measurement results from the measuring device 2. Specifically, the measurement results from the measuring device 2 include the measurement results of the position of the robot 1. That is, the measurement results from the measuring device 2 include information about the position of the robot 1. In this case, the control device 3 may calculate the position of the robot 1 based on the measurement results from the measuring device 2. The calculated position of the robot 1 includes information about the position of the robot 1. In this case, the operation of calculating the position of the robot 1 based on the measurement results from the measuring device 2 may be considered equivalent to the operation of acquiring information about the position of the robot 1 based on the measurement results from the measuring device 2. Subsequently, the control device 3 may generate a robot control signal based on the calculated position of the robot 1 (i.e., information about the position of the robot 1). 【0021】 The support device 4 is capable of supporting the robot 1. Furthermore, the support device 4 is capable of supporting the measuring device 2 in addition to the robot 1. The support device 4 may have any configuration as long as it is capable of supporting both the robot 1 and the measuring device 2. For example, the support device 4 may include a frame capable of supporting both the robot 1 and the measuring device 2. For example, the support device 4 may include a frame capable of supporting both the robot 1 and the measuring device 2. For example, the support device 4 may include a housing capable of supporting both the robot 1 and the measuring device 2. 【0022】The support device 4 is further movable on the support surface SS. In particular, the support device 4 may be movable on the support surface SS while supporting the robot 1 and the measuring device 2. In this case, the robot 1 and the measuring device 2 each move on the support surface SS in conjunction with the movement of the support device 4. 【0023】 To move on the support surface SS, the support device 4 may be mounted on a mobile device that is movable on the support surface SS. In this case, the support device 4 may move on the support surface SS in conjunction with the movement of the mobile device on which the support device 4 is mounted. Alternatively, to move on the support surface SS, the support device 4 itself may be equipped with a mobile device that is movable on the support surface SS. In this case, the support device 4 may move in conjunction with the movement of the mobile device equipped on the support device 4. In either case, the support device 4 may be considered to function as a mobile device that moves the robot 1 and the measuring device 2, respectively, on the support surface SS. As an example of a mobile device, at least one of AGV (Automatic Guided Vehicle) and AMR (Autonomous Mobile Robot) can be mentioned. 【0024】 In the following explanation, for the sake of clarity, we will describe an example in which the support device 4 is equipped with a movable device that can move on the support surface SS. In the example shown in Figure 2, the support device 4 is equipped with a drive system 40 as a movable device, which includes wheels 401 that can contact the support surface SS and a power source 402 that generates a driving force to rotate the wheels 401. An example of the power source 402 is at least one of a motor and an engine. However, the support device 4 does not have to be equipped with a power source 402. In this case, the support device 4 is moved by the operator's manual power. Furthermore, in order to reduce the burden on the operator, the support device 4 may be equipped with an electric assist trolley or the like. Such an electric assist trolley is disclosed, for example, in U.S. Patent Application Publication No. 2023 / 0391389. 【0025】However, neither the robot 1 nor the measuring device 2 is necessarily supported by the support device 4. In this case, at least one of the robot 1 and the measuring device 2 may be placed on the support surface SS. That is, at least one of the robot 1 and the measuring device 2 may be supported by the support surface SS. Alternatively, at least one of the robot 1 and the measuring device 2 may be supported by a device or member other than the support device 4. In this case, the robot system SYS may not be equipped with the support device 4. 【0026】 (1-2) Configuration of Robot 1 Next, the configuration of Robot 1 will be explained with reference to Figure 3. Figure 3 is a side view showing the configuration of Robot 1. 【0027】 As shown in Figure 3, the robot 1 comprises a base 11, a robot arm 12, and a robot head 10. 【0028】 The base 11 is the foundational component of the robot 1. The base 11 is placed on the support device 4. In other words, the base 11 is supported by the support device 4. To put it another way, the support device 4 supports the base 11. In short, the support device 4 supports the robot 1 by supporting the base 11. 【0029】 The robot arm 12 is mounted on a base 11. The robot arm 12 is an example of a manipulator that can be driven (in other words, moved) using a desired power source. In this embodiment, an example is described in which a robot arm having a vertical articulated structure is used as the robot arm 12 (i.e., as a manipulator). In this case, the robot arm 12 may be a device in which a plurality of links 121 are connected via a joint 122. The joint 122 has an actuator built into it. The links 121 may be rotatable around an axis defined by the joint 122 by the actuator built into the joint 122. At least one link 121 may be extendable and retractable along the direction in which the link 121 extends. The device including the device in which a plurality of links 121 are connected via a joint 122 and the base 11 may be referred to as the robot arm 12. 【0030】 However, a robot arm different from a robot arm having a vertical articulated structure may be used as the robot arm 12. For example, a polar coordinate robot having a horizontal articulated structure may be used as the robot arm 12. A cylindrical coordinate robot may be used as the robot arm 12. The robot arm 12 may function as a rectangular coordinate robot. A parallel kinematic machine (PKM) type (in other words, a parallel link type) robot may be used as the robot arm 12. 【0031】 A robot head 10 is attached to the robot arm 12. Figure 3 shows an example in which the robot head 10 is attached to the tip arm member 123 at the end of the robot arm 12. In this case, the robot arm 12 may move the robot head 10 by moving the tip arm member 123 under the control of the control device 3. In other words, the robot arm 12 may move the robot head 10 together with the tip arm member 123 under the control of the control device 3. For example, the robot arm 12 may move the robot head 10 relative to the base 11 by moving the tip arm member 123 relative to the base 11 under the control of the control device 3. For example, the robot arm 12 may move the robot head 10 relative to a part of the robot arm 12 other than the tip arm member 123 by moving the tip arm member 123 relative to a part of the robot arm 12 other than the tip arm member 123 under the control of the control device 3. 【0032】The robot head 10 is a head equipped with an end effector 15. The robot head 10 equipped with the end effector 15 may also be called an end effector device. In this case, the end effector 15 provided on the robot head 10 is attached to the robot arm 12. The robot arm 12 may move the end effector 15 by moving the tip arm member 123 under the control of the control device 3. For example, in this case, the robot arm 12 may move the end effector 15 relative to the base 11 by moving the tip arm member 123 relative to the base 11 under the control of the control device 3. For example, the robot arm 12 may move the end effector 15 relative to a part of the robot arm 12 other than the tip arm member 123 by moving the tip arm member 123 relative to a part of the robot arm 12 other than the tip arm member 123 under the control of the control device 3. 【0033】 In this embodiment, the robot head 10 further includes a moving device 14, and an end effector 15 is attached to the robot arm 12 via the moving device 14. Since the moving device 14 is attached to the robot arm 12, the moving device 14 may be considered as part of the robot arm 12. Here, with reference to Figure 4 in addition to Figure 3, the end effector 15 attached to the robot arm 12 via the moving device 14 will be described together with the configuration of the moving device 14. Figure 4 is a perspective view showing the configuration of the moving device 14. Note that, in order to prioritize the readability of the drawing, Figure 4 shows the configuration of the moving device 14 with the robot arm 12 and the moving device 14 separated from each other. 【0034】As shown in Figures 3 and 4, a moving device 14 is attached to the robot arm 12. In other words, the moving device 14 can be attached to the robot arm 12. When the moving device 14 is attached to the robot arm 12, the positional relationship between the moving device 14 and the robot arm 12 is fixed. For this reason, the moving device 14 is positioned in a fixed position relative to the robot arm 12. The moving device 14 attached to the robot arm 12 may be removed from the robot arm 12. In other words, the moving device 14 attached to the robot arm 12 may be detachable from the robot arm 12. In other words, the moving device 14 may be attachable to the robot arm 12 and detachable from the robot arm 12. In other words, the moving device 14 may be detachably attached to the robot arm 12. However, the moving device 14 does not have to be detachable from the robot arm 12. In other words, the moving device 14 may be fixedly attached to the robot arm 12. 【0035】 Figures 3 and 4 show an example in which the moving device 14 is attached to the tip arm member 123 at the end of the robot arm 12. However, the moving device 14 may be attached to a part of the robot arm 12 other than the tip arm member 123. For example, the moving device 14 may be attached to any part of the robot arm 12 that moves along with the movement of the robot arm 12 (for example, the movable part (movable arm member) described above). In any case, the moving device 14 may be attached to a part of the robot arm 12 that satisfies the condition that the positional relationship between the moving device 14 and the robot arm 12 is fixed. The moving device 14 may be attached to a part of the robot arm 12 that satisfies the condition that the moving device 14 is positioned in a fixed position relative to the robot arm 12. 【0036】Figures 3 and 4 show an example in which the mobile device 14 is directly attached to the robot arm 12. However, the mobile device 14 may be attached indirectly to the robot arm 12. For example, the mobile device 14 may be attached to the robot arm 12 via a support member capable of supporting the mobile device 14. That is, a support member capable of supporting the mobile device 14 may be attached to the robot arm 12, and the mobile device 14 may be attached to the support member. In either case, the mobile device 14 may be attached directly or indirectly to the robot arm 12 in such a way that the positional relationship between the mobile device 14 and the robot arm 12 is fixed. The mobile device 14 may be attached directly or indirectly to the robot arm 12 in such a way that the mobile device 14 is positioned in a fixed position relative to the robot arm 12. 【0037】 An end effector 15 is attached to the moving device 14. For the sake of explanation, in the following description, as an example of the end effector 15, a measuring head 15M capable of measuring the workpiece W will be described. In other words, in the following description, for the sake of explanation, a measuring head 15M will be described as an example of the end effector 15 being attached to the moving device 14. To put it another way, in the following description, for the sake of explanation, a robot head 10 will be described as an example of the end effector 15 being equipped with a measuring head 15M. When the robot 1 is equipped with a measuring head 15M (i.e., the robot 1 is capable of measuring the workpiece W), the robot system SYS and the robot 1 may each be referred to as a measuring system. When the robot head 10 is equipped with a measuring head 15M, the robot head 10 may be referred to as a measuring device or an object measuring device. 【0038】 The measuring head 15M is a measuring device capable of measuring the characteristics of the workpiece W, which is the object to be measured. Examples of the characteristics of the workpiece W include, as mentioned above, at least one of the position of at least a part of the workpiece W, the shape of at least a part of the workpiece W, and the size of at least a part of the workpiece W. 【0039】The measuring head 15M can be any type of measuring device, as long as it is capable of measuring the characteristics of the workpiece W. For example, the measuring head 15M may be capable of measuring the characteristics of the workpiece W without contacting it (i.e., non-contact measurement). In this case, the measuring head 15M may measure the characteristics of the workpiece W using an optical method that utilizes light. The measuring head 15M may measure the characteristics of the workpiece W using an electromagnetic method that utilizes at least one of an electric field and a magnetic field. The measuring head 15M may measure the characteristics of the workpiece W using an acoustic method that utilizes sound waves. The measuring head 15M may measure the characteristics of the workpiece W by imaging the workpiece W. The measuring head 15M may include a proximity sensor, such as an air gauge sensor, that measures the characteristics of the workpiece W non-contact using fluid. Alternatively, for example, the measuring head 15M may be capable of measuring the characteristics of the workpiece W by contacting it. For example, the measuring head 15M may measure the characteristics of the workpiece W while pressing a sensor such as a probe against the workpiece W. 【0040】In this embodiment, for the sake of explanation, an example will be described in which the measurement head 15M optically measures the shape of the workpiece W (i.e., the shape of at least a part of the workpiece W), which is an example of the characteristics of the workpiece W, without contacting the workpiece W. An example of a measurement head 15M capable of optically measuring the shape of the workpiece W is shown in Figure 5. As shown in Figure 5, the measurement head 15M includes a light source 151M, an illumination optical system 152M, a light receiving optical system 153M, and a light receiving element 154M. The light source 151M is a light source capable of generating measurement light ML1. However, the light source 151M may be located outside the measurement head 15M. The measurement head 15M may include the light source 151M. The illumination optical system 152M is an optical system capable of irradiating the workpiece W with measurement light ML1. The illumination optical system 152M may include, for example, at least one of a lens and a mirror. The light-receiving optical system 153M is an optical system into which the reflected light RL1 from the workpiece W irradiated with the measurement light ML1 is incident. The light-receiving optical system 153M may include, for example, at least one of a lens and a mirror. The light-receiving element 154M receives the reflected light RL1 via the light-receiving optical system 153M. An example of the light-receiving element 154M is a sensor capable of detecting the reflected light RL1. An example of a sensor capable of detecting the reflected light RL1 is an image sensor. An example of an image sensor is at least one of a CCD (Charged Coupled Device) sensor and a CMOS (Complementary Metal Oxide Semiconductor) sensor. Furthermore, the return light RL1 may include at least one of the following: reflected light which is the measurement light ML1 reflected by the workpiece W; scattered light which is the measurement light ML1 scattered by the workpiece W; diffracted light which is the measurement light ML1 diffracted by the workpiece W; and transmitted light which is the measurement light ML1 transmitted through the workpiece W. The light reception result of the return light RL1 by the measurement head 15M may be output from the measurement head 15M to the control device 3 as the measurement result by the measurement head 15M. 【0041】In this embodiment, an example in which the measurement head 15M is a line scanner will be described. A line scanner is a measuring device capable of measuring the shape of an object (e.g., a workpiece W) using the light section method. In this case, the measurement head 15M may include an illumination optical system 152M that can irradiate the surface of the workpiece W with measurement light ML1 (e.g., sheet light) capable of forming a line-shaped illumination area (i.e., an area irradiated by measurement light ML1) on the surface of the workpiece W. For example, as shown in Figure 5, the illumination optical system 152M may include a galvanometer mirror 1521M that generates sheet light by deflecting the measurement light ML1. In this case, the galvanometer mirror 1521M may be considered to function as a scanning optical element that scans at least a part of the surface of the workpiece W with the measurement light ML1 (e.g., scans in a line) by deflecting the measurement light ML1. Furthermore, the measurement head 15M may include a photodetector 154M in which a plurality of image sensors are arranged in a line to receive line-shaped return light RL1 from the line-shaped illumination area. Furthermore, the irradiation optical system 152M of the measurement head 15M is not limited to an optical system that forms a single line-shaped irradiation area on the surface of the workpiece W using the measurement light ML, but may be an optical system that forms multiple line-shaped irradiation areas on the surface of the workpiece W using the measurement light ML. These multiple line-shaped irradiation areas may be parallel to each other or non-parallel to each other. 【0042】 However, the measurement head 15M is not limited to a line scanner. For example, a stereo camera may be used as the measurement head 15M. For example, a monocular camera or stereo camera combined with a structured light projection device may be used as the measurement head 15M. For example, a measurement device (localizer or laser tracker) described in U.S. Patent Nos. 8,687,173 and 7,139,446 may be used as the measurement head 15M. For example, a measurement device (localizer or laser tracker) similar to that of measurement device 2 may be used as the measurement head 15M. 【0043】Again referring to FIG. 4, the moving device 14 can move the measurement head 15M attached to the moving device 14. When the robot 1 is provided with the moving device 14 that can move the measurement head 15M in this way, each of the robot system SYS and the robot 1 may be referred to as a movement system. The moving device 14 may be referred to as a head moving device. 【0044】 The moving device 14 may be able to move the measurement head 15M with respect to the robot arm 12 to which the moving device 14 is attached. In other words, the moving device 14 may be able to move the measurement head 15M so that the positional relationship between the robot arm 12 and the measurement head 15M changes. The moving device 14 may be able to move the measurement head 15M with respect to the workpiece W on which the robot 1 operates. In other words, the moving device 14 may be able to move the measurement head 15M so that the positional relationship between the workpiece W and the measurement head 15M changes. 【0045】 The moving device 14 may move the measurement head 15M so that the line-shaped irradiation region formed by the measurement head 15M, which is a line scanner, on the surface of the workpiece W moves on the surface of the workpiece W. In particular, the moving device 14 may move the measurement head 15M so that the line-shaped irradiation region formed by the measurement head 15M, which is a line scanner, on the surface of the workpiece W moves along a direction intersecting the direction in which the line-shaped irradiation region extends on the surface of the workpiece W. As a result, the measurement head 15M, which is a line scanner, can scan at least a part of the surface of the workpiece W with the measurement light ML1 (for example, sheet light). That is, the measurement head 15M can measure the shape of the workpiece W by scanning at least a part of the surface of the workpiece W with the measurement light ML1 (for example, sheet light). A measurement head 15M that scans at least a part of the surface of such a workpiece W with the measurement light ML1 (for example, sheet light) may be referred to as a scanning device. 【0046】Furthermore, if the measuring head 15M is equipped with a galvanometer mirror 1521M as described above, the measuring head 15M may use the galvanometer mirror 1521M to deflect the measuring light ML1 such that the linear illumination area formed by the measuring head 15M on the surface of the workpiece W moves along a direction intersecting the direction in which the linear illumination area extends on the surface of the workpiece W. For example, the measuring head 15M may use the first mirror of the galvanometer mirror 1521M to deflect the measuring light ML1 in a first direction, thereby generating a measuring light ML1 (sheet light) capable of forming a linear illumination area extending in a first direction on the surface of the workpiece W, and may also use the second mirror of the galvanometer mirror 1521M to deflect the measuring light ML1 in a second direction intersecting the first direction, thereby moving the linear illumination area extending in the first direction along the second direction on the surface of the workpiece W. Furthermore, the galvanometer mirror 1521M, which serves as a scanning optical element in the measurement head 15M, may be an optical element that moves a linear illumination area in a single direction, and this direction of movement may be a direction intersecting the longitudinal direction of the linear illumination area. In these cases, even if the moving device 14 does not move the measurement head 15M, the measurement head 15M can measure the shape of the workpiece W by scanning at least a portion of the surface of the workpiece W with the measurement light ML1 (for example, with sheet light). In this case, the robot 1 does not need to be equipped with the moving device 14. 【0047】 In this embodiment, for the sake of explanation, we will describe an example in which the moving device 14 can move the measuring head 15M along a predetermined translation axis (i.e., move it linearly). However, as will be described later in the modified examples, the moving device 14 may also be able to move the measuring head 15M around a predetermined rotation axis (i.e., move it rotationally). 【0048】For example, the moving device 14 may be capable of moving the measurement head 15M along the first translation axis. For example, in addition to or instead of moving the measurement head 15M along the first translation axis, the moving device 14 may be capable of moving the measurement head 15M along a second translation axis that intersects (typically, is orthogonal to) the first translation axis and is different from the first translation axis. For example, in addition to or instead of moving the measurement head 15M along at least one of the first and second translation axes, the moving device 14 may be capable of moving the measurement head 15M along a third translation axis that intersects (typically, is orthogonal to) the first and second translation axes and is different from the first and second translation axes. Note that since the translation axis extends in a straight line direction, it may also be referred to as a straight axis. 【0049】 The translation axis may be an axis defined based on the robotic arm 12 (e.g., the tip arm member 123) to which the moving device 14 is attached. That is, the translation axis may be an axis fixed with respect to the robotic arm 12 (e.g., the tip arm member 123) to which the moving device 14 is attached. For example, the moving device 14 may be capable of moving the measurement head 15M along the first translation axis, which is the X-axis (see FIGS. 3 and 4) of the hand coordinate system, which is a three-dimensional coordinate system defined based on the robotic arm 12 (e.g., the tip arm member 123). For example, in addition to or instead of moving the measurement head 15M along the first translation axis, the moving device 14 may be capable of moving the measurement head 15M along the second translation axis, which is the Y-axis of the hand coordinate system (i.e., the Y-axis orthogonal to the X-axis in the hand coordinate system). For example, in addition to or instead of moving the measurement head 15M along at least one of the first and second translation axes, the moving device 14 may be capable of moving the measurement head 15M along the third translation axis, which is the Z-axis of the hand coordinate system (i.e., the Z-axis orthogonal to the X-axis and Y-axis in the hand coordinate system). 【0050】In the following description, the X, Y, and Z axes of the end-effector coordinate system will be referred to as X-axis(R), Y-axis(R), and Z-axis(R), respectively. As shown in Figures 3 and 4, the end-effector coordinate system may be defined such that the Z-axis(R) is an axis along the direction in which the links 121 of the robot arm 12 (in particular, the links 121 connected to or closest to the end-effector arm member 123) extend. In this case, the end-effector coordinate system may be defined such that the X-axis(R) and Y-axis(R) are axes along the direction intersecting the direction in which the links 121 of the robot arm 12 (in particular, the links 121 connected to or closest to the end-effector arm member 123) extend. 【0051】 Furthermore, instead of using a coordinate system based on the robot arm 12 itself as the reference point, a coordinate system based on the mobile device 14 attached to the robot arm 12 may be used as the end-effector coordinate system. The coordinate system based on the mobile device 14 may be defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) passing through an origin fixed to the mobile device 14. Instead of using a coordinate system based on the robot arm 12 itself as the reference point, a coordinate system based on the measuring head 15M (i.e., the end effector 15) attached to the robot arm 12 via the mobile device 14 may be used as the end-effector coordinate system. The coordinate system based on the end effector 15 may be defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) passing through an origin fixed to the end effector 15. As the end-effector coordinate system, a coordinate system based on the measuring member 16, described later and attached to the robot arm 12, may be used. The coordinate system determined with respect to the measuring member 16 may be a coordinate system defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) that pass through an origin fixed to the measuring member 16. 【0052】The end-effector coordinate system may be a coordinate system (local coordinate system) defined within a reference coordinate system (global coordinate system) used as the reference for the robot system SYS. For example, the end-effector coordinate system may be a coordinate system (local coordinate system) defined around the robot arm 12 (particularly the end-effector arm member 123) located within the reference coordinate system. For example, the end-effector coordinate system may be a coordinate system (local coordinate system) defined around at least one of the moving device 14 and the measuring head 15M located within the reference coordinate system. 【0053】 In this embodiment, an example is described in which a measurement coordinate system determined with respect to the measurement device 2 is used as the reference coordinate system. The measurement coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X axis, Y axis, and Z axis) that pass through an origin fixed with respect to the measurement device 2. 【0054】However, a coordinate system different from the measurement coordinate system may be used as the reference coordinate system. For example, a global coordinate system determined with respect to the robot system SYS may be used as the reference coordinate system. The global coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X axis, Y axis, and Z axis) passing through an origin determined with respect to the robot system SYS. A robot coordinate system determined with respect to the robot 1 (e.g., the base 11) may be used as the reference coordinate system. The robot coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X axis, Y axis, and Z axis) passing through an origin fixed to the robot 1 (e.g., the base 11). A coordinate system determined with respect to the measurement member 16, described later and measured by the measurement device 2, may be used as the reference coordinate system. A coordinate system determined with respect to a reference member different from the measurement member 16 may be used as the reference coordinate system. The reference member may be provided on at least one of the workpiece W, robot, AGV, and floor surface. In the following explanation, the X, Y, and Z axes of the reference coordinate system will be referred to as X-axis(G), Y-axis(G), and Z-axis(G), respectively. In the example shown in Figure 3, X-axis(G), Y-axis(G), and Z-axis(G) are different from X-axis(R), Y-axis(R), and Z-axis(R), respectively. However, at least one of X-axis(G), Y-axis(G), and Z-axis(G) may be the same as at least one of X-axis(R), Y-axis(R), and Z-axis(R). 【0055】In the following description, for the sake of clarity, we will describe an example in which the moving device 14 is capable of moving the measuring head 15M along the Y-axis of the end-effector coordinate system. In this case, as shown in Figure 4, the moving device 14 may be equipped with a drive system 141 capable of moving the measuring head 15M along the Y-axis (R). The drive system 141 may be equipped with a guide member 1411, a slider member 1412, and an actuator (in other words, a motor) 1413. The guide member 1411 may also be called a guide rail or a moving axis (in other words, a moving shaft). The slider member 1412 may also be called a slider. The guide member 1411 is attached to the robot arm 12. The guide member 1411 is a member that extends along the Y-axis (R). The slider member 1412 is a member that can move along the guide member 1411 using the power of the actuator 1413. The measuring head 15M is attached to the slider member 1412. In this case, when the slider member 1412 moves along the guide member 1411, the measuring head 15M attached to the slider member 1412 also moves along the guide member 1411. That is, the measuring head 15M moves along the Y-axis (R). In this case, the measuring head 15M may be considered to be attached to the guide member 1411 via the slider member 1412 so that it can move along the guide member 1411. 【0056】 The moving device 14 may further include a measuring device 142 capable of acquiring information regarding the position of the measuring head 15M moved by the moving device 14 (i.e., moved by the drive system 141). As described above, in this embodiment, the moving device 14 is capable of moving the measuring head 15M along the Y-axis (R), so the measuring device 144 may be capable of acquiring information regarding the position of the measuring head 15M along the Y-axis (R) as information regarding the position of the measuring head 15M. 【0057】The measuring device 142 may be capable of acquiring information regarding the position of the measuring head 15M, which is moved by the moving device 14, relative to the robot arm 12 (e.g., the end-effector arm member 123). For example, the measuring device 142 may be capable of acquiring information regarding the position of the measuring head 15M, which is moved by the moving device 14, relative to the robot arm 12 (e.g., the end-effector arm member 123) in the direction along the Y-axis (R). Alternatively, the measuring device 142 may be capable of acquiring information regarding the amount of movement of the measuring head 15M, which is moved by the moving device 14, as information regarding the position of the measuring head 15M. An example of such a measuring device 142 is at least one of an encoder and an interferometer. 【0058】 The measurement results from the measuring device 142 (i.e., information regarding the position of the measuring head 15M) are output from the measuring device 142 to the control device 3. The control device 3 may calculate the position of the measuring head 15M based on the measurement results from the measuring device 142. Furthermore, the control device 3 may control the robot 1 based on the calculated position of the measuring head 15M. In other words, the control device 3 may generate a robot control signal based on the calculated position of the measuring head 15M. 【0059】 In this embodiment, the robot 1 further includes at least one measuring member 16. That is, at least one measuring member 16 is arranged on the robot 1. Typically, at least one measuring member 16 is attached to the robot 1. The following description will describe an example in which the robot arm 12 includes at least one measuring member 16. That is, the following description will describe an example in which at least one measuring member 16 is arranged on the robot arm 12. Typically, the following description will describe an example in which at least one measuring member 16 is attached to the robot arm 12. 【0060】Specifically, at least one measuring member 16 may be positioned on the robot arm 12 at a location fixed to the robot arm 12. For example, at least one measuring member 16 may be attached to the link 121 of the robot arm 12. For example, at least one measuring member 16 may be attached to the joint 122 of the robot arm 12. For example, at least one measuring member 16 may be attached to the end arm member 123 of the robot arm 12. For example, at least one measuring member 16 may be attached to a desired part of the robot arm 12. In the example shown in Figures 3 and 4, at least one measuring member 16 is attached to the end arm member 123. 【0061】 The design position (in other words, the ideal position) of the measuring member 16 may be known information to the control device 3. For example, the design position (in other words, the ideal position) of the measuring member 16 relative to the robot arm 12 may be known information to the control device 3. Furthermore, the design position of the measuring member 16 may, as an example, be the design position (coordinates) of the measuring member 16 in the end-effector coordinate system when the moving device 14 is in a reference position while the end effector 15 is attached to the moving device 14. 【0062】 The measuring device 2 described above measures the position of a measuring member 16 provided on the robot 1 in order to measure the position of the robot 1. The measuring member 16 is a reflective member that reflects light incident on the measuring member 16. In particular, the measuring member 16 may be a retroreflective member that retroreflects light incident on the measuring member 16. In this case, the measuring member 16 may be called a reflector. The retroreflection may be such that the light returns along almost the same direction as the direction in which it was incident. This retroreflection may be maintained over a wide irradiation angle. The retroreflective member may include at least one of a ball reflector and a corner cube reflector. The measuring member 16 may also be a reflective member such as a tooling ball that reflects the measurement light on its surface. 【0063】If the measuring member 16 is a reflective member (retroreflective member), the measuring device 2 irradiates the measuring member 16 with measuring light ML2 in order to measure the position of the measuring member 16. The measuring member 16 reflects the measuring light ML2 incident on it. The measuring device 2 receives the reflected light RL2, which is the measuring light ML2 reflected by the measuring member 16. 【0064】 The light reception result of the reflected light RL2 by the measuring device 2 is output from the measuring device 2 to the control device 3 as a measurement result by the measuring device 2. The light reception result of the reflected light RL2 by the measuring device 2 includes the measurement result of the position of the measuring member 16 in the measurement coordinate system. In other words, the light reception result of the reflected light RL2 by the measuring device 2 includes information regarding the position of the measuring member 16 in the measurement coordinate system. Here, because the robot 1 is equipped with the measuring member 16, the measurement result of the position of the measuring member 16 substantially includes the measurement result of the position of the robot 1 equipped with the measuring member 16. For this reason, the control device 3 may calculate the position of the measuring member 16 equipped on the robot 1 based on the light reception result of the reflected light RL2 from the measuring member 16, and calculate the position of the robot 1 based on the calculation result of the position of the measuring member 16. In the examples shown in Figures 3 and 4, since the measuring member 16 is attached to the tip arm member 123, the control device 3 may calculate the position of the measuring member 16 based on the reception result of the reflected light RL2 from the measuring member 16, and then calculate the position of the tip arm member 123 based on the calculated position of the measuring member 16. 【0065】 The control device 3 may calculate the position of the measuring member 16 in the above-described reference coordinate system based on the reception result of the reflected light RL2 from the measuring member 16. Subsequently, the control device 3 may calculate the position of the robot 1 in the reference coordinate system (in this case, the position of the end arm member 123) based on the calculation result of the position of the measuring member 16 in the reference coordinate system. For the sake of explanation, the following description will describe an example in which the end arm member 123 is equipped with the measuring member 16, and the control device 3 calculates the position of the end arm member 123 as the position of the robot 1. 【0066】In this embodiment, the end arm member 123 (i.e., the robot 1) is equipped with a plurality of measuring members 16. In particular, the end arm member 123 is equipped with at least three measuring members 16. In this case, information regarding the relative positions of the plurality of measuring members 16 may be known information to the control device 3. In this case, the control device 3 may calculate the positions of at least three measuring members 16 based on the reception results of the reflected light RL2 from each of the at least three measuring members 16. Subsequently, the control device 3 may calculate the position of the end arm member 123 based on the calculated positions of the at least three measuring members 16. In particular, the control device 3 may calculate the position of the tip arm member 123 based on the calculation results of the positions of at least three measuring members 16, including the position of the tip arm member 123 in a linear direction along the X-axis (G), the position of the tip arm member 123 in a linear direction along the Y-axis (G), the position of the tip arm member 123 in a linear direction along the Z-axis (G), the position of the tip arm member 123 in a rotational direction around the X-axis (G), the position of the tip arm member 123 in a rotational direction around the Y-axis (G), and the position of the tip arm member 123 in a rotational direction around the Z-axis (G). 【0067】 However, the tip arm member 123 may be equipped with two or fewer measuring members 16. Even in this case, the control device 3 may calculate at least one of the following based on the reception results of the reflected light RL2 from each of the two or fewer measuring members 16: the position of the tip arm member 123 in a linear direction along the X-axis (G), the position of the tip arm member 123 in a linear direction along the Y-axis (G), the position of the tip arm member 123 in a linear direction along the Z-axis (G), the position of the tip arm member 123 in a rotational direction around the X-axis (G), the position of the tip arm member 123 in a rotational direction around the Y-axis (G), and the position of the tip arm member 123 in a rotational direction around the Z-axis (G). 【0068】Furthermore, the position of the tip arm member 123 in the rotational direction around the X-axis (G) may represent the orientation of the tip arm member 123 around the X-axis (G) (in other words, the amount of rotation or tilt). The position of the tip arm member 123 in the rotational direction around the Y-axis (G) may represent the orientation of the tip arm member 123 around the Y-axis (G) (in other words, the amount of rotation or tilt). The position of the tip arm member 123 in the rotational direction around the Z-axis (G) may represent the orientation of the tip arm member 123 around the Z-axis (G) (in other words, the amount of rotation or tilt). Again in Figure 3, the robot head 10 may further include an imaging device 17. However, the robot head 10 does not have to include an imaging device 17. 【0069】 The imaging device 17 may be attached to the robot arm 12 (particularly the end-effector arm member 123). The robot arm 12 may move the imaging device 17 by moving the end-effector arm member 123 under the control of the control device 3. For example, in this case, the robot arm 12 may move the imaging device 17 relative to the base 11 by moving the end-effector arm member 123 relative to the base 11 under the control of the control device 3. For example, the robot arm 12 may move the imaging device 17 relative to a part of the robot arm 12 other than the end-effector arm member 123 by moving the end-effector arm member 123 relative to a part of the robot arm 12 other than the end-effector arm member 123 under the control of the control device 3. 【0070】 The imaging device 17 may be capable of imaging the workpiece W (specifically, at least a part of the workpiece W). For example, the imaging device 17 may be equipped with a camera capable of imaging the workpiece W. As an example, the imaging device 17 may be equipped with a monocular camera. As an example, the imaging device 17 may be equipped with a stereo camera having two monocular cameras. For the sake of clarity, the following explanation will describe an example in which the imaging device 17 is equipped with a monocular camera. 【0071】The imaging device 17 may image the workpiece W in order to measure the workpiece W. In this case, the imaging device 17 may be considered to be functioning as a measuring device capable of measuring the workpiece W. The image generated by the imaging device 17 imaging the workpiece W (hereinafter referred to as the workpiece image) may be output from the imaging device 17 to the control device 3 as the measurement result of the workpiece W by the imaging device 17. The control device 3 may control the robot 1 based on the workpiece image. The uses of the workpiece image will be described in detail later, so a detailed explanation is omitted here. 【0072】 (1-3) Configuration of the measuring device 2 Next, the configuration of the measuring device 2 will be described with reference to Figure 6. Figure 6 is a front view showing the external appearance of the measuring device 2. 【0073】 As shown in Figure 6, the measuring device 2 comprises a base 21 and a housing 22. 【0074】 The base 21 is the foundational component of the measuring device 2. The base 21 is supported by the support device 4, which will be described in detail later. 【0075】 The housing 22 is placed on the base 21. For this reason, the base 21 may also be referred to as a mounting member. The housing 22 placed on the base 21 may be attached to the base 21. In this case, the housing 22 may be removable from the base 21. That is, the housing 22 may be detachably attached to the base 21. Alternatively, the housing 22 may not be removable from the base 21. For example, the housing 22 placed on the base 21 may be fixed to the base 21. 【0076】The housing 22 may be rotatable around a predetermined axis of rotation. In the example shown in Figure 6, the housing 22 is rotatable around an axis of rotation along the Y-axis (for example, an axis extending horizontally) in the measurement coordinate system determined with respect to the measuring device 2, and around an axis of rotation along the Z-axis (for example, an axis extending vertically or in the direction of gravity) in the measurement coordinate system. In other words, the housing 22 is rotatable along both the pan direction (longitude direction), which is the direction of rotation around the axis of rotation along the vertical or gravity direction, and the tilt direction (latitude direction), which is the direction of rotation around the axis of rotation along the horizontal direction. 【0077】 The housing 22 is a component that houses the measuring optical system 23. Therefore, when the housing 22 is placed on the base 21, the measuring optical system 23 housed in the housing 22 may be considered to be placed on the base 21. When the housing 22 is attached to the base 21, the measuring optical system 23 housed in the housing 22 may be considered to be attached to the base 21. When the housing 22 is detachable from the base 21, the measuring optical system 23 housed in the housing 22 may be considered to be detachable from the base 21. When the housing 22 is fixed to the base 21, the measuring optical system 23 housed in the housing 22 may be considered to be fixed to the base 21. 【0078】 The measuring optical system 23 is an optical system capable of measuring the position of the measuring member 16 (in other words, capable of measuring the position of the robot 1). As described above, in this embodiment, an example is described in which the measuring device 2 optically measures the position of the robot 1 without contacting the robot 1. In this case, the measuring optical system 23 may be considered to function as a measuring member that optically measures the position of the robot 1 without contacting the robot 1. 【0079】An example of the configuration of the measurement optical system 23 is shown in Figure 7. Note that Figure 7 is merely an example of the configuration of the measurement optical system 23, and the configuration of the measurement optical system 23 is not limited to the configuration shown in Figure 7. The measurement optical system 23 may have any configuration capable of irradiating the measurement member 16 with measurement light ML2 and receiving the return light RL2 from the measurement member 16. As shown in Figure 7, the measurement optical system 23 includes an interferometer 231, a beam steering mirror 232, a camera 233, and a half mirror 234. 【0080】 The interferometer 231 emits measurement light ML2. The measurement light ML2 emitted by the interferometer 231 passes through the half mirror 234, is reflected by the beam steering mirror 232, and is emitted outwards from the housing 22 through the opening 221 formed in the housing 22. As a result, the measurement light ML2 irradiates the measurement member 16. 【0081】 Under the control of the control device 3, the housing 22 rotates along at least one of the pan and tilt directions so that the measurement light ML2 is irradiated onto the measurement member 16. Specifically, when the housing 22 rotates along at least one of the pan and tilt directions, the direction in which the measurement light ML2 is emitted from the housing 22 is changed. Therefore, the housing 22 rotates along at least one of the pan and tilt directions so that the measurement light ML2 is emitted from the housing 22 toward the measurement member 16. 【0082】 The reflected light RL2 from the measuring member 16 enters the housing 22 through the opening 221 formed in the housing 22, is reflected by the beam steering mirror 232, passes through the half mirror 234, and enters the interferometer 231. The interferometer 231 is further entered by reference light, which is part of the measuring light ML2. As a result, the interferometer 231 receives (in other words, detects) the reflected light RL2 and the reference light using a detector (e.g., a photodetector) provided in the interferometer 231. In particular, the interferometer 231 receives (in other words, detects) the interference light generated by the interference between the reflected light RL2 and the reference light. The reception result of the reflected light RL2 (i.e., the reception result of the interference light) is output to the control device 3 as the measurement result of the measuring device 2. 【0083】 The control device 3 may calculate the position of the measuring member 16 based on the reception result of the reflected light RL2 (i.e., the reception result of the interference light). In this embodiment, the control device 3 may calculate the distance between the measuring device 2 and the measuring member 16 as an example of the position of the measuring member 16 based on the reception result of the reflected light RL2 (i.e., the reception result of the interference light). The control device 3 may also employ an existing method that uses an interferometer as a distance meter, such as the method disclosed in at least one of the following: U.S. Patent Publication No. 2024 / 0085759, European Patent Publication No. 4332667, No. 4318107, and No. 4296763, as a method for calculating the distance to the measuring member 16 based on the reception result of the interference light. The TOF method may be one that uses intensity modulation or one that uses wavelength modulation. For example, a distance meter described in at least one of U.S. Patent No. 8,687,173 and U.S. Patent No. 7,139,446 may be used. 【0084】 Furthermore, the reflected light NL of ambient light (or illumination light) from the measuring member 16 may enter the interior of the housing 22 through an opening 221 formed in the housing 22. In this case, the reflected light NL may be reflected by the beam steering mirror 232, reflected by the half mirror 234, and entered by the camera 233. The camera 233 may image the measuring member 16 by receiving the reflected light NL using an image sensor. The image of the measuring member 16 captured by the camera 233 may be output to the control device 3. The control device 3 may track the measuring member 16 based on the image of the measuring member 16. Furthermore, the control device 3 may control the rotational movement of the housing 22 based on the image of the measuring member 16 so that the measuring light ML2 is irradiated onto the measuring member 16. 【0085】Such a measuring device 2 may also be called a localizer or a laser tracker. Furthermore, the configuration of the measuring device 2 described above is merely an example, and the configuration of the measuring device 2 is not limited to the configuration shown in Figures 7 and 8. For example, the measuring device (localizer or laser tracker) described in International Patent Publication Nos. 2024 / 0393100, 2024 / 0393100, U.S. Patent Nos. 9,989,350 and 9,945,938 may be used as the measuring device 2. Alternatively, the measuring device 2 may be a measuring device that uses a so-called photogrammetry method, for example, to image the measuring member 16 and measure its position. In this case, one or more, typically multiple, measuring members 16 may be imaged by the measuring device 2, and the position of the measuring member 16 may be determined by image processing of the images obtained from the image capture. In this case, the measuring member 16 may be a marker or a self-luminous body such as an LED. Here, the measuring device 2 that images the measuring element 16 may be a monocular camera or a compound camera (typically a stereo camera). 【0086】 Furthermore, the measuring device 2 may measure at least one of the measuring member 16, end effector 15, base 13, and robot arm 12 (particularly the tip arm member 123) using an imaging method. In this case, a stereo camera or the like can be used as the measuring device 2. Here, if the measuring device 2 is an imaging measuring device, the measuring member 16 may be equipped with a marker having at least one of an identifiable pattern and an identifiable shape. 【0087】 (1-4) Configuration of the control device 3 Next, the configuration of the control device 3 will be described with reference to Figure 8. Figure 8 is a block diagram showing the configuration of the control device 3. 【0088】 As shown in Figure 8, the control device 3 comprises an arithmetic unit 31, a storage device 32, and a communication device 33. Furthermore, the control device 3 may also include an input device 34 and an output device 35. However, the control device 3 does not have to include at least one of the input device 34 and the output device 35. The arithmetic unit 31, the storage device 32, the communication device 33, the input device 34, and the output device 35 may be connected via a data bus 36. 【0089】 The arithmetic unit 31 is hardware that includes at least one circuit (for example, at least one of an electronic circuit and an electrical circuit). For this reason, the arithmetic unit 31 may be referred to as a circuit group. 【0090】 The arithmetic unit 31 includes at least one processor (i.e., one or more processors) as hardware. The processor may include, for example, a processor conforming to a von Neumann computer architecture. A processor conforming to a von Neumann computer architecture may include at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor may also include, for example, a processor conforming to a non-von Neumann computer architecture. A processor conforming to a non-von Neumann computer architecture may include at least one of an FPGA (Field Programmable Gate Array) and an ASIC (Application Specific Circuit). The processor may be implemented by a group of circuits (e.g., at least one of an electronic circuit and an electrical circuit). 【0091】The arithmetic unit 31 reads a computer program 321 which includes at least one of computer program code and computer program instructions. For example, the arithmetic unit 31 may read a computer program 321 stored in a storage device 32. For example, the arithmetic unit 31 may read a computer program 321 stored in a computer-readable and non-temporary recording medium using a recording medium reader (not shown) provided by the control device 3. The computer program 321 read from the recording medium may be stored in the storage device 32. The arithmetic unit 31 may obtain (i.e., download or read) a computer program 321 from a device (not shown) located outside the control device 3 via a communication device 33 (or other communication device). The downloaded computer program 321 may be stored in the storage device 32. 【0092】 The arithmetic unit 31 executes the loaded computer program 321. As a result, a logical functional block for executing the processing that the control device 3 should perform (for example, the processing for controlling the robot 1 described above) is realized within the arithmetic unit 31. In other words, the arithmetic unit 31, together with the storage device 32 on which the computer program 321 is recorded (in other words, together with the storage device 32 and the computer program 321 recorded in the storage device 32), can function as a controller or computer for realizing a logical functional block for executing the processing that the control device 3 should perform. That is, together with at least one processor in the arithmetic unit 31, the memory (recording medium) in the storage device 32 and the computer program 321 are configured so that the control device 3 performs the processing that the control device 3 should perform (for example, the processing for controlling the robot 1 described above). 【0093】The arithmetic unit 31 may include a single processor. In this case, the arithmetic unit 31 may use a single processor to perform the processing that the control device 3 should perform (for example, the processing for controlling the robot 1 described above). For example, if the arithmetic unit 31 performs a first operation (for example, a first process which is part of the processing for controlling the robot 1) and a second operation (for example, a second process which is another part of the processing for controlling the robot 1), the arithmetic unit 31 may use a single processor to perform both the first and second operations. Alternatively, the arithmetic unit 31 may include multiple processors. In this case, the arithmetic unit 31 may use any one of the multiple processors to perform the processing that the control device 3 should perform (for example, the processing for controlling the robot 1 described above). For example, if the arithmetic unit 31 includes a first and a second processor and performs the first and second operations, the arithmetic unit 31 may use any one of the first and second processors to perform the first and second operations, respectively. For example, the arithmetic unit 31 may perform a first operation using the first processor, or a second operation using the first processor, or a first operation using the second processor, or a second operation using the second processor. 【0094】The computing device 31 may implement a computational model that can be constructed by machine learning by executing a computer program 321. An example of a computational model that can be constructed by machine learning is a computational model that includes a neural network (so-called artificial intelligence (AI)). In this case, the learning of the computational model may include learning the parameters of the neural network (for example, at least one of the weights and biases). The computing device 31 may use the computational model to control the robot 1. That is, the operation to control the robot 1 may include the operation to control the robot 1 using the computational model. The computing device 31 may also implement a computational model that has been constructed by offline machine learning using training data. Furthermore, the computational model implemented in the computing device 31 may be updated by online machine learning on the computing device 31. Alternatively, the arithmetic unit 31 may control the robot 1 using, in addition to or instead of, the arithmetic model implemented in the arithmetic unit 31, an arithmetic model implemented in an external device (i.e., a device provided outside the control device 3). 【0095】Furthermore, as the recording medium for recording the computer program 321 executed by the arithmetic unit 31, at least one of the following may be used: optical discs such as CD-ROM, CD-R, CD-RW, flexible disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW, and Blu-ray (registered trademark); magnetic media such as magnetic tape; magneto-optical disks; semiconductor memory such as USB memory; and any other medium capable of storing a program. The recording medium may also include equipment capable of recording the computer program 321 (for example, general-purpose or dedicated equipment on which the computer program 321 is implemented in a state in which it can be executed in at least one form such as software and firmware). Furthermore, each process and function included in the computer program 321 may be realized by logical processing blocks implemented within the arithmetic unit 31 (i.e., the processor) when the arithmetic unit 31 executes the computer program 321, or by hardware such as a predetermined gate array (FPGA (Field Programmable Gate Array), ASIC (Application Specific Integrated Circuit)) provided by the arithmetic unit 31, or in a form in which logical processing blocks and partial hardware modules that realize some elements of the hardware are mixed. 【0096】The storage device 32 includes at least one memory capable of storing desired data. In other words, the storage device 32 includes at least one memory containing desired data. The memory may be implemented by a group of circuits (for example, at least one of an electronic circuit and an electrical circuit). For example, the storage device 32 may store a computer program 321 executed by the arithmetic unit 31. In this case, the storage device 32 (memory) may be used as the recording medium described above for recording the computer program 321 executed by the arithmetic unit 31. The storage device 32 may temporarily store data that the arithmetic unit 31 temporarily uses when the arithmetic unit 31 is executing the computer program 321. The storage device 32 may store data that the control device 3 stores long-term. The storage device 32 may include at least one of RAM (Random Access Memory), ROM (Read Only Memory), hard disk drive, magneto-optical disk drive, SSD (Solid State Drive), and disk array drive. In other words, the storage device 32 may include a non-temporary recording medium. 【0097】The communication device 33 can communicate with the robot 1 and the measuring device 2 via a communication network (not shown). Alternatively, the communication device 33 may communicate with other devices different from the robot 1 and the measuring device 2, in addition to or instead of at least one of the robot 1 and the measuring device 2, via a communication network (not shown). In this embodiment, the communication device 33 may receive (i.e., acquire) the measurement results of the measuring device 2 (i.e., information regarding the position of the measuring member 16 and information regarding the reception result of the return light RL2 from the measuring member 16) from the measuring device 2. Furthermore, the communication device 33 may receive (i.e., acquire) the measurement results of the measuring device 142 (i.e., information regarding the position of the measuring head 15M) from the measuring device 142 of the robot 1. Furthermore, the communication device 33 may receive (i.e., acquire) the measurement results of the measuring head 15M (i.e., measurement results of the shape of the workpiece W) from the measuring head 15M of the robot 1. Furthermore, the communication device 33 may receive (i.e., acquire) the measurement results of the imaging device 17 (i.e., the workpiece image generated by the imaging device 17) from the robot 1's imaging device 17. Furthermore, the communication device 33 may transmit (i.e., output) a robot control signal to the robot 1. 【0098】 The input device 34 is a device capable of receiving information input to the control device 3 from outside the control device 3. For example, the input device 34 may include an operating device that can be operated by the user of the control device 3 (for example, at least one of a keyboard, mouse, and touch panel). For example, the input device 34 may include a recording medium reader capable of reading information recorded as data on a recording medium that can be attached externally to the control device 3. 【0099】 Furthermore, the control device 3 can receive data from external devices via the communication device 33. In this case, the communication device 33 may function as an input device capable of receiving information input to the control device 3 from outside the control device 3. 【0100】The output device 35 is a device capable of outputting information to the outside of the control device 3. For example, the output device 35 may output information as an image. That is, the output device 35 may include a display device (so-called display) capable of displaying an image. For example, the output device 35 may output information as sound. That is, the output device 35 may include an audio device (so-called speaker) capable of outputting sound. For example, the output device 35 may output information onto paper. That is, the output device 35 may include a printing device (so-called printer) capable of printing desired information onto paper. For example, the output device 35 may output information as data to a recording medium that can be attached externally to the control device 3. 【0101】 Furthermore, the control device 3 can output information as data to an external device via the communication device 33. In this case, the communication device 33 may function as an output device capable of outputting information to an external device of the control device 3. 【0102】 (1-5) Configuration of the support device 4 Next, an example of the configuration of the support device 4 will be described with reference to Figures 9 to 10. Figures 9 to 10 are cross-sectional views showing an example of the configuration of the support device 4. Although the configuration of the support device 4 shown in Figure 9 and the configuration of the support device 4 shown in Figure 10 are the same, the state of the support device 4 shown in Figure 9 and the state of the support device 4 shown in Figure 10 are different, as will be explained in detail later. 【0103】 As shown in Figures 9 to 10, the support device 4 includes a support member 41. The support member 41 is a member capable of supporting the robot 1. That is, the support member 41 is a member capable of supporting at least one of the base 11, robot arm 12, and robot head 10 of the robot 1. The support member 41 may have any configuration as long as it is capable of supporting the robot 1. For example, the support member 41 may include a frame capable of supporting the robot 1. For example, the support member 41 may include a housing capable of supporting the robot 1. 【0104】In this embodiment, for the sake of explanation, an example will be described in which the body 411 of an AGV (Automatic Guided Vehicle) or AMR (Autonomous Mobile Robot) is used as the support member 41, as shown in Figures 9 to 10. In this case, the robot 1 may be attached to the upper surface of the support member 41 (i.e., the upper surface of the body 411). In other words, the support member 41 may support the robot 1 attached to the upper surface of the support member 41. Furthermore, wheels 401 may be attached to the lower part of the support member 41 (i.e., the lower part of the body 411), and the support member 41 may be movable on the support surface SS. 【0105】 The support member 41 may support the robot 1 such that the robot 1 supporting the support member 41 is positioned at a predetermined location relative to the support device 4 (for example, the support member 41; hereinafter the same applies in this paragraph). In other words, the support member 41 may support the robot 1 such that the positional relationship between the robot 1 supported by the support member 41 and the support device 4 is a predetermined positional relationship. To put it another way, the robot 1 may be positioned on the support device 4 such that the positional relationship between the robot 1 and the support device 4 is a predetermined positional relationship. In this case, the information regarding the predetermined positional relationship may be information already known to the control device 3. 【0106】 Furthermore, the support member 41 may support the robot 1 so that the robot 1 supported by the support member 41 assumes a predetermined posture relative to the support device 4 (for example, the support member 41; hereinafter the same applies in this paragraph). In other words, the support member 41 may support the robot 1 so that the posture relationship between the robot 1 supported by the support member 41 and the support device 4 is a predetermined posture relationship. To put it another way, the robot 1 may be positioned on the support device so that the posture relationship between the robot 1 and the support member 41 is a predetermined posture relationship. In this case, the information regarding the predetermined posture relationship may be information already known to the control device 3. 【0107】The support device 4 further includes a support member 42. The support member 42 is a member capable of supporting the measuring device 2. That is, the support member 42 is a member capable of supporting at least one of the base 21 and housing 22 of the measuring device 2. The support member 42 may have any configuration as long as the support member 42 is capable of supporting the measuring device 2. For example, the support member 42 may include a frame capable of supporting the measuring device 2. For example, the support member 42 may include a housing capable of supporting the measuring device 2. For example, the support member 42 may include a rod-shaped or arm-shaped member capable of supporting the measuring device 2. 【0108】 The support member 42 may support the measuring device 2 such that the measuring device 2 supported by the support member 42 is positioned at a predetermined location relative to the support device 4 (for example, support member 41 or 42, hereinafter the same in this paragraph). In other words, the support member 42 may support the measuring device 2 such that the positional relationship between the measuring device 2 supported by the support member 42 and the support device 4 is a predetermined positional relationship. To put it another way, the measuring device 2 may be positioned on the support device 4 such that the positional relationship between the measuring device 2 and the support device 4 is a predetermined positional relationship. In this case, the information regarding the predetermined positional relationship may be information already known to the control device 3. 【0109】 Furthermore, the support member 42 may support the measuring device 2 such that the measuring device 2 supported by the support member 42 assumes a predetermined posture relative to the support device 4 (for example, support member 41 or 42, hereinafter the same in this paragraph). In other words, the support member 42 may support the measuring device 2 such that the posture relationship between the measuring device 2 supported by the support member 42 and the support device 4 is a predetermined posture relationship. To put it another way, the measuring device 2 may be positioned on the support device 4 such that the posture relationship between the measuring device 2 and the support device 4 is a predetermined posture relationship. In this case, the information regarding the predetermined posture relationship may be information already known to the control device 3. 【0110】In this embodiment, the support member 42 is provided on the support member 41 so that the support member 42 can be connected to the measuring device 2. In other words, the support member 42 is provided on the support member 41 so that the support member 42 provided on the support member 41 can be connected to the measuring device 2. In this case, the support member 42 that can be connected to the measuring device 2 may also be capable of supporting the measuring device 2. In other words, the support member 42 may support the measuring device 2 by being connected to the measuring device 2. Furthermore, the support member 41 may support the support member 42 that supports the measuring device 2. In other words, the support member 41 may indirectly support the measuring device 2 via the support member 42 that supports the measuring device 2. In other words, the support device 4 may support the measuring device 2 by supporting the support member 42 using the support member 41 and supporting the measuring device 2 using the support member 42. 【0111】 In the example shown in Figures 9 to 10, the support member 41 (i.e., the body 411) has a through hole 412 that penetrates the support member 41 (i.e., the body 411) along the Z-axis (G) direction. The through hole 412 may form a housing space 413 for housing the measuring device 2. In this case, the support member 42 may be a member (for example, a rod-shaped member or an arm-shaped member) that extends from the inner wall portion 414 of the support member 41 facing the housing space 413 toward the measuring device 2 housed in the housing space 413. In the following description, for the sake of explanation, we will proceed using an example in which the support device 4 has the configuration shown in Figure 9. However, the configuration of the support device 4 is not limited to the configuration shown in Figures 9 to 10. 【0112】The housing space 413 may house at least a portion of the base 21 of the measuring device 2. On the other hand, the housing space 413 does not have to house the housing 22 (i.e., the measuring optical system 23) of the measuring device 2. In this case, the support member 42 may be able to support the base 21. That is, the support member 42 may support the measuring device 2 by supporting the base 21. The support member 42 may be connectable to the base 21. That is, the support member 42 may support the measuring device 2 by being connected to the base 21. In the following explanation, for the sake of clarity, we will describe an example in which the support member 42 supports the measuring device 2 by supporting the base 21. 【0113】 However, the housing space 413 may contain at least a portion of the housing 22 (i.e., the measuring optical system 23) of the measuring device 2. In this case, the support member 42 may be able to support the housing 22 (i.e., the measuring optical system 23). In other words, the support member 42 may support the measuring device 2 by supporting the housing 22 (i.e., the measuring optical system 23). The support member 42 may be connectable to the housing 22 (i.e., the measuring optical system 23). In other words, the support member 42 may support the measuring device 2 by being connected to the housing 22 (i.e., the measuring optical system 23). 【0114】 In this embodiment, the state of the support device 4 may be switched between the supported state shown in Figure 9 and the unsupported state shown in Figure 10. The state of the support device 4 may include the state of the support member 41 provided by the support device 4. The state of the support device 4 may also include the state of the support member 42 provided by the support device 4. 【0115】As a first example, as shown in Figure 9, the supported state may include a state in which the support device 4 supports the measuring device 2 using the support member 42. In other words, the supported state may include a state in which the support member 42 supports the measuring device 2. To put it another way, the supported state may include a state in which the support member 41 supports the measuring device 2 via the support member 42 (specifically, indirectly supports it). On the other hand, as shown in Figure 10, the unsupported state may include a state in which the support device 4 does not support the measuring device 2 using the support member 42. In other words, the unsupported state may include a state in which the support member 42 does not support the measuring device 2. To put it another way, the unsupported state may include a state in which the support member 41 does not support the measuring device 2 via the support member 42. 【0116】 As a second example, as shown in Figure 9, the supported state may include a state in which the support device 4 is connected to the measuring device 2 via the support member 42. In other words, the supported state may include a state in which the support member 42 is connected to the measuring device 2. To put it another way, the supported state may include a state in which the support member 41 is connected to the measuring device 2 via the support member 42 (i.e., indirectly connected). On the other hand, as shown in Figure 10, the unsupported state may include a state in which the support device 4 is not connected to the measuring device 2 via the support member 42. In other words, the unsupported state may include a state in which the support member 42 is not connected to the measuring device 2. To put it another way, the unsupported state may include a state in which the support member 41 is not connected to the measuring device 2 via the support member 42. 【0117】As a third example, as shown in Figure 9, the supported state may include a state in which the support device 4 is in physical contact with the measuring device 2 via the support member 42. In other words, the supported state may include a state in which the support member 42 is in physical contact with the measuring device 2. To put it another way, the supported state may include a state in which the support member 41 is indirectly in contact with the measuring device 2 via the support member 42. On the other hand, as shown in Figure 10, the unsupported state may include a state in which the support device 4 is not in physical contact with the measuring device 2 via the support member 42. In other words, the unsupported state may include a state in which the support member 42 is not in physical contact with the measuring device 2. To put it another way, the unsupported state may include a state in which the support member 41 is not in contact with the measuring device 2 via the support member 42. 【0118】 If the support member 42 supports the measuring device 2, is connected to the measuring device 2, and / or is in physical contact with the measuring device 2, then vibrations generated in the support device 4 may be transmitted to the measuring device 2 via the support member 42. On the other hand, if the support member 42 does not support the measuring device 2, is not connected to the measuring device 2, and / or is not in physical contact with the measuring device 2, then vibrations generated in the support device 4 are unlikely to be transmitted to the measuring device 2 via the support member 42. For this reason, as a fourth example, the supported state may include a state in which vibrations of the support device 4 are transmitted to the measuring device 2. In particular, the supported state may include a state in which vibrations of the support device 4 are transmitted to the measuring device 2 via the support member 42. On the other hand, the unsupported state may include a state in which vibrations of the support device 4 are not transmitted to the measuring device 2. In particular, the unsupported state may include a state in which vibrations of the support device 4 are not transmitted to the measuring device 2 via the support member 42. 【0119】 Furthermore, switching the state of the measuring device 2 between a supported state in which vibrations from the support device 4 are transmitted to the measuring device 2 via the support member 42, and an unsupported state in which vibrations from the support device 4 are not transmitted to the measuring device 2 via the support member 42, may be considered equivalent to changing the magnitude of the vibrations transmitted from the support device 4 to the measuring device 2. 【0120】If the support member 42 does not support the measuring device 2, the support member 42 is not connected to the measuring device 2, and / or the support member 42 is not in physical contact with the measuring device 2, the measuring device 2 may be removed from the support device 4. In this case, the unsupported state may include a state in which the measuring device 2 is removable from the support device 4. On the other hand, if the support member 42 supports the measuring device 2, the support member 42 is connected to the measuring device 2, and / or the support member 42 is in physical contact with the measuring device 2, the measuring device 2 may be considered to be attached to or fixed to the support device 4. In this case, the unsupported state may include a state in which the measuring device 2 is attached to or fixed to the support device 4. 【0121】Switching the state of the support device 4 may be considered equivalent to switching the state of the measuring device 2 that the support device 4 can support. For example, switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which the measuring device 2 is supported by the support device 4 and an unsupported state in which the measuring device 2 is not supported by the support device 4. For example, switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which the measuring device 2 is connected to the support member 42 of the support device 4 and an unsupported state in which the measuring device 2 is not connected to the support member 42 of the support device 4. For example, switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which the measuring device 2 is in physical contact with the support member 42 of the support device 4 and an unsupported state in which the measuring device 2 is not in physical contact with the support member 42 of the support device 4. For example, switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which vibrations of the support device 4 are transmitted to the measuring device 2 via the support member 42, and an unsupported state in which vibrations of the support device 4 are not transmitted to the measuring device 2 via the support member 42. For example, switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which the measuring device 2 is attached to or fixed to the support device 4, and an unsupported state in which the measuring device 2 is detachable from the support device 4. 【0122】When the support device 4 is in an unsupported state, the measuring device 2 may be supported by the support surface SS, as shown in Figure 10. The measuring device 2 may be in physical contact with the support surface SS. For example, as shown in Figure 10, the base 21 of the measuring device 2 may be supported by the support surface SS. In other words, the base 21 of the measuring device 2 may be in physical contact with the support surface SS. On the other hand, when the support device 4 is in a supported state, the measuring device 2 does not have to be supported by the support surface SS, as shown in Figure 10. The measuring device 2 does not have to be in physical contact with the support surface SS. The measuring device 2 may be away from the support surface SS. Therefore, the supported state may include a state in which the measuring device 2 is not supported by the support surface SS. The supported state may include a state in which the measuring device 2 is not in physical contact with the support surface SS. The supported state may include a state in which the measuring device 2 is away from the support surface SS. On the other hand, the unsupported state may include a state in which the measuring device 2 is supported by the support surface SS. The unsupported state may also include a state in which the measuring device 2 is in physical contact with the support surface SS. The unsupported state may also include a state in which the measuring device 2 is not separated from the support surface SS. 【0123】 In this case, switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which the measuring device 2 is not supported by the support surface SS and an unsupported state in which the measuring device 2 is supported by the support surface SS. Switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which the measuring device 2 is not physically in contact with the support surface SS and an unsupported state in which the measuring device 2 is physically in contact with the support surface SS. Switching the state of the support device 4 between a supported state and an unsupported state may be considered equivalent to switching the state of the measuring device 2 between a supported state in which the measuring device 2 is away from the support surface SS and an unsupported state in which the measuring device 2 is not away from the support surface SS. 【0124】In the examples shown in Figures 9 and 10, the support device 4 may have a support member 41 that can move up and down in order to switch the state of the support device 4 and the measuring device 2 between a supported state in which the measuring device 2 is not supported by the support surface SS and an unsupported state in which the measuring device 2 is supported by the support surface SS. For example, in the supported state shown in Figure 9, the support device 4 may move the support member 41 that indirectly supports the measuring device 2 via the support member 42 downward so that the measuring device 2, which is moving upward from the support surface SS, moves downward and comes into contact with the support surface SS. As a result, the state of the support device 4 and the measuring device 2 is switched from a supported state in which the measuring device 2 is not supported by the support surface SS (Figure 9) to an unsupported state in which the measuring device 2 is supported by the support surface SS (Figure 10). For example, in the unsupported state shown in Figure 10, the support device 4 may move upward the support member 41 that indirectly supports the measuring device 2 via the support member 42, so that the measuring device 2, which is in contact with the support surface SS, moves upward and away from the support surface SS. As a result, the states of the support device 4 and the measuring device 2 are switched from an unsupported state in which the measuring device 2 is supported by the support surface SS (Figure 10) to a supported state in which the measuring device 2 is not supported by the support surface SS (Figure 9). 【0125】 As shown in Figure 10, the measuring device 2 may be equipped with a support member 403 that can contact the support surface SS. In this case, the measuring device 2 may be supported by the support surface SS via the support member 403. That is, the support surface SS may support the measuring device 2 via the support member 403 by contacting the support member 403. For example, the support member 403 may be located on the lower surface of the base 21 of the measuring device 2. That is, the support member 403 may be located on the part of the measuring device 2 that faces the support surface SS. 【0126】The measuring device 2 may include at least three support members 403. In this case, the measuring device 2 may be supported by a support surface SS via at least three support members 403. That is, the support surface SS may support the measuring device 2 via at least three support members 403 by contacting at least three support members 403. In other words, the measuring device 2 may be supported by the support surface SS using a three-point support method. The support surface SS may support the measuring device 2 using a three-point support method. 【0127】 As shown in Figures 9 and 10, the position of the measuring device 2 when the support device 4 is in the supported state may differ from the position of the measuring device 2 when the support device 4 is in the unsupported state. In this case, the support device 4 may switch between the supported state and the unsupported state by changing the position of the measuring device 2. 【0128】 For example, as shown in Figure 9, when the support device 4 is in a supported state, the measuring device 2 may be located at the first position P1. Conversely, the supported state may include the state in which the measuring device 2 is located at the first position P1. For example, the support device 4 may support the measuring device 2 located at the first position P1, be connected to the measuring device 2 located at the first position P1, and / or be in contact with the measuring device 2 located at the first position P1. In this case, the support device 4 may support the measuring device 2 at the first position P1, be connected to the measuring device 2 at the first position P1, and / or be in contact with the measuring device 2 at the first position P1. 【0129】On the other hand, for example, as shown in Figure 10, when the support device 4 is in an unsupported state, the measuring device 2 may be located at a second position P2 different from the first position P1. Conversely, the unsupported state may include the state in which the measuring device 2 is located at the second position P2. For example, as described above, when the state of the support device 4 is switched from a supported state to an unsupported state, the state of the measuring device 2 may be switched from a state in which the measuring device 2 is away from the support surface SS to a state in which the measuring device 2 is in contact with the support surface SS. In this case, the second position P2 may be closer to the support surface SS than the first position P1. The second position P2 may be located between the first position P1 and the support surface SS. The second position P2 may be located below the first position P1. 【0130】 The support device 4 may switch its state between a supported state and an unsupported state by moving the support member 42 under the control of the control device 3. In other words, the control device 3 may switch the state of the support device 4 between a supported state and an unsupported state by controlling the support device 4 to move the support member 42. Specifically, the support device 4 may further include an actuator 43 that generates power to move the support member 42. In this case, the support device 4 may switch its state by moving the support member 42 using the power generated by the actuator 43. For example, the support device 4 in the supported state shown in Figure 9 may switch its state from a supported state to an unsupported state by using the power generated by the actuator 43 to move the support member 42 so that the support member 42 that is in contact with the measuring device 2 moves away from the measuring device 2. For example, the support device 4 shown in Figure 10, which is in an unsupported state, may be switched from an unsupported state to a supported state by using the power generated by the actuator 43 to move the support member 42 so that the support member 42, which is away from the measuring device 2, comes into contact with the measuring device 2. 【0131】The support device 4 may switch its state between a supported state and an unsupported state by moving the support member 41 under the control of the control device 3. In other words, the control device 3 may switch the state of the support device 4 between a supported state and an unsupported state by controlling the support device 4 to move the support member 41. Specifically, the support device 4 may further include an actuator 44 that generates power to move the support member 41. In this case, the support device 4 may switch its state by moving the support member 41 using the power generated by the actuator 44. For example, the support device 4 in the supported state shown in Figure 9 may switch its state from a supported state to an unsupported state by moving the support member 41 downward using the power generated by the actuator 44. For example, the support device 4 in the unsupported state shown in Figure 10 may switch its state from an unsupported state to a supported state by moving the support member 42 upward using the power generated by the actuator 44. The actuator 44 may be considered to function as a switching device for switching the state of the support device 4. 【0132】 Furthermore, the power generated by the actuator 43 described above may be used as the power to move the support member 41. In this case, the support device 4 does not need to be equipped with an actuator 44. Also, the support member 41 does not need to be moved by power such as an actuator. For example, the support member 41 may be moved by the operator's manual power. In this case, the support device 4 does not need to be equipped with an actuator 44. Also, the support member 42 does not need to be moved by power such as an actuator. For example, the support member 42 may be moved by the operator's manual power. In this case, the support device 4 does not need to be equipped with an actuator 43. 【0133】The state of the support device 4 may be switched to a supported state during at least a portion of the movement period in which the support device 4 is moving on the support surface SS. Also, the measuring device 2 may be located at the first position P1 shown in Figure 9 during at least a portion of the movement period in which the support device 4 is moving on the support surface SS. In this case, the support device 4 in the supported state may move on the support surface SS while supporting the measuring device 2. In other words, the support device 4 in the supported state may move on the support surface SS while supporting the measuring device 2 at the first position P1. For this reason, the first position P1 may be considered a position that can move along with the movement of the support device 4. On the other hand, the state of the support device 4 may be switched to an unsupported state during at least a portion of the non-moving period in which the support device 4 is not moving on the support surface SS. Also, the measuring device 2 may be located at the second position P2 shown in Figure 10 during at least a portion of the non-moving period in which the support device 4 is not moving on the support surface SS. 【0134】 The state of the support device 4 may be switched to an unsupported state for at least a portion of the measurement period during which the measuring device 2 is measuring the position of the robot 1. Alternatively, the measuring device 2 may be located at the second position P2 shown in Figure 10 for at least a portion of the measurement period during which the measuring device 2 is measuring the position of the robot 1. In this case, the measuring device 2 located at the second position P2 may measure the position of the robot 1. For this reason, the second position P2 may be considered as the position in which the measuring device 2 measures the position of the robot 1. On the other hand, the state of the support device 4 may be switched to an supported state for at least a portion of the non-measurement period during which the measuring device 2 is not measuring the position of the robot 1. Alternatively, the measuring device 2 may be located at the first position P1 shown in Figure 9 for at least a portion of the non-measurement period during which the measuring device 2 is not measuring the position of the robot 1. 【0135】The support device 4 may move on the support surface SS before the measuring device 2 begins measuring the position of the robot 1 or after the measuring device 2 has finished measuring the position of the robot 1. The measuring device 2 may measure the position of the robot 1 before the support device 4 begins moving on the support surface SS or after the support device 4 has finished moving on the support surface SS. In other words, the movement period during which the support device 4 is moving on the support surface SS and the measurement period during which the measuring device 2 is measuring the position of the robot 1 do not have to overlap. In other words, the movement period does not have to include the measurement period. The measurement period does not have to include the movement period. On the other hand, the movement period during which the support device 4 is moving on the support surface SS may include at least a portion of the non-measurement period during which the measuring device 2 is not measuring the position of the robot 1. The non-movement period during which the support device 4 is not moving on the support surface SS may include at least a portion of the measurement period during which the measuring device 2 is measuring the position of the robot 1. The measurement period during which the measuring device 2 measures the position of the robot 1 may include at least a portion of the non-movement period during which the support device 4 is not moving on the support surface SS. The non-measurement period during which the measuring device 2 does not measure the position of the robot 1 may include at least a portion of the movement period during which the support device 4 is moving on the support surface SS. 【0136】 During at least a portion of the non-moving period when the support device 4 is not moving on the support surface SS, the support device 4 may be supported by a support member 45, as shown in Figure 10. The support member 45 is a member for supporting the non-moving support device 4. In particular, the support member 45 is a member for supporting the support device 4 so that it does not move on the support surface SS. For example, the support member 45 is a member for supporting the support device 4 so that it does not move relative to the support surface SS. In this case, the support member 45 may support the support device 4 by connecting to both the support surface SS and the support device 4. Figure 10 shows an example of a support member 45, which is an outrigger extending from the support device 4 (for example, a support member 41). 【0137】On the other hand, for at least a portion of the movement period during which the support device 4 is moving on the support surface SS, the support device 4 does not need to be supported by the support member 45, as shown in Figure 9. For example, Figure 9 shows an example in which an outrigger, which is an example of a support member 45, is housed in the support device 4. As a result, the movement of the support device 4 is not hindered by the support member 45. 【0138】 (2) Robot operations performed by the SYS robot system Next, the robot operations performed by the SYS robot system in this embodiment will be described with reference to Figure 11. Figure 11 is a flowchart showing the flow of robot operations performed by the SYS robot system in this embodiment. 【0139】 (2-1) Rough measurement operation As shown in the diagram 11, the robot system SYS performs a rough measurement operation (rough measurement) (step S1). The rough measurement operation includes the operation of measuring the position of the workpiece W using the imaging device 17. 【0140】 (2-1-1) In order to perform the rough measurement operation of the support device 4, first the control device 3 moves the support device 4 on the support surface SS (step S11). Specifically, in order to move the support device 4, the control device 3 switches the state of the support device 4 to the support state described above (see Figure 9). After that, the control device 3 controls the support device 4 so that it moves to a desired target position. The desired target position may include the imaging position in which the support device 4 should be positioned when the imaging device 17 measures the position of the workpiece W. As a result, the support device 4 moves to the desired target position. As a result, the imaging device 17 moves to the imaging position in which it should be positioned to measure the position of the workpiece W. In other words, the imaging device 17 moves to the imaging position in which it should be positioned to image the workpiece W. 【0141】 However, if the imaging device 17 is already positioned at the imaging position where it should be positioned to measure the position of the workpiece W, the control device 3 does not need to move the support device 4. In other words, the control device 3 does not need to perform the operation in step S11. 【0142】(2-1-2) Imaging of workpiece W by imaging device 17 Subsequently, the imaging device 17 images the workpiece W (step S12). As a result, the imaging device 17 generates a workpiece image. The workpiece image generated by the imaging device 17 is output from the imaging device 17 to the control device 3. 【0143】In this embodiment, the imaging device 17 may image the workpiece W from each of a plurality of different imaging positions. As a result, the imaging device 17 may generate a plurality of workpiece images, each generated by imaging the workpiece W from a plurality of different imaging positions. For example, as shown in Figure 12A, a cross-sectional view showing the imaging device 17 imaging the workpiece W, the imaging device 17 may image the workpiece W from a first imaging position IP1. As a result, the imaging device 17 may generate a first workpiece image. Subsequently, as shown in Figure 12B, a cross-sectional view showing the moving imaging device 17, the control device 3 may control the robot arm 12 so that the imaging device 17 moves from the first imaging position IP1 to a second imaging position IP2 that is different from the first imaging position IP1. The second imaging position IP2 may be a position that satisfies the condition that the imaging range of the imaging device 17 located at the second imaging position IP2 at least partially overlaps with the imaging range of the imaging device 17 located at the first imaging position IP1. The second imaging position IP2 may be a position that satisfies the condition that at least a portion of the workpiece W included in the imaging range of the imaging device 17 located at the second imaging position IP2 is also included in the imaging range of the imaging device 17 located at the first imaging position IP1. Subsequently, as shown in Figure 12C, a cross-sectional view showing the imaging device 17 imaging the workpiece W, the imaging device 17 may image the workpiece W from the second imaging position IP2. As a result, the imaging device 17 may generate a second workpiece image. In this case, if the imaging range of the imaging device 17 located at the second imaging position IP2 overlaps at least partially with the imaging range of the imaging device 17 located at the first imaging position IP1, the imaging range of the first workpiece image may overlap at least partially with the imaging range of the second workpiece image. In other words, at least a portion of the workpiece W captured in the first workpiece image may also be captured in the second workpiece image. Subsequently, if necessary, the robot system SYS may alternately repeat the operation of changing the position of the imaging device 17 using the robot arm 12 and the operation of imaging the workpiece W using the imaging device 17. 【0144】In this manner, when the imaging device 17 images the workpiece W from multiple different imaging positions, the imaging device 17 can be considered to be functioning as a stereo camera. This is because the imaging device 17 can generate multiple workpiece images that capture the workpiece W from multiple viewpoints. In the following explanation, the operation in which the imaging device 17 images the workpiece W from multiple different imaging positions will be referred to as pseudo-stereo imaging operation. 【0145】 Again in Figure 11, during the imaging period in which the imaging device 17 images the workpiece W (i.e., the rough measurement period in which the imaging device 17 measures the workpiece W, the same applies hereinafter), the measuring device 2 may measure the position of the robot 1 (for example, the tip arm member 123) (step S12). The imaging period in which the imaging device 17 images the workpiece W may include at least a portion of the period between the time when the robot arm 12 has finished moving the imaging device 17 and the time when the imaging device 17 has finished imaging the workpiece W and the robot arm 12 has started moving the imaging device 17 again. 【0146】 However, the state of the support device 4 may be switched from a supported state to an unsupported state before the measuring device 2 begins measuring the position of the robot 1. For example, the state of the support device 4 may be switched from a supported state to an unsupported state after the support device 4 has finished moving in step S11. For example, the state of the support device 4 may be switched from a supported state to an unsupported state between the time the support device 4 has finished moving in step S11 and the time the measuring device 2 begins measuring the position of the robot 1 in step S12. After the state of the support device 4 has been switched from a supported state to an unsupported state, the measuring device 2 may measure the position of the robot 1. 【0147】For example, as shown in Figure 12A, during at least a portion of the imaging period in which the imaging device 17 located at the first imaging position IP1 images the workpiece W, the measuring device 2 may measure the position of the robot 1 supporting the imaging device 17 located at the first imaging position IP1. For example, as shown in Figure 12C, during at least a portion of the imaging period in which the imaging device 17 located at the second imaging position IP2 images the workpiece W, the measuring device 2 may measure the position of the robot 1 supporting the imaging device 17 located at the second imaging position IP2. 【0148】 (2-1-3) Generation of workpiece position information Again in Figure 11, the control device 3 then calculates the position of the workpiece W based on the workpiece image generated by the imaging device 17 in step S12 and the measurement results of the measuring device 2 in step S12 (step S13). In other words, the control device 3 generates workpiece position information indicating the position of the workpiece W based on the workpiece image generated by the imaging device 17 in step S12 and the measurement results of the measuring device 2 in step S12 (step S13). 【0149】 In step S13, the control device 3 may calculate the position of the workpiece W in a measurement coordinate system based on the measuring device 2. The position of the workpiece W in the measurement coordinate system may include at least one of the following: the position of the workpiece W along the X-axis of the measurement coordinate system, the position of the workpiece W along the Y-axis of the measurement coordinate system, and the position of the workpiece W along the Z-axis of the measurement coordinate system. The position of the workpiece W in the measurement coordinate system may include at least one of the following: the position of the workpiece W in the rotational direction around the X-axis of the measurement coordinate system, the position of the workpiece W in the rotational direction around the Y-axis of the measurement coordinate system, and the position of the workpiece W in the rotational direction around the Z-axis of the measurement coordinate system. The position of the workpiece W in the rotational direction around the X-axis of the measurement coordinate system, the position of the workpiece W in the rotational direction around the Y-axis of the measurement coordinate system, and the position of the workpiece W in the rotational direction around the Z-axis of the measurement coordinate system may be considered equivalent to the orientation of the workpiece W around the X-axis of the measurement coordinate system, the orientation of the workpiece W around the Y-axis of the measurement coordinate system, and the orientation of the workpiece W around the Z-axis of the measurement coordinate system, respectively. 【0150】In order to generate workpiece position information, the control device 3 may calculate the position of the tip arm member 123 in the measurement coordinate system at the time the imaging device 17 images the workpiece W, based on the measurement results of the measuring device 2 in step S12. In other words, the control device 3 may calculate the position of the tip arm member 123 in the measurement coordinate system during the imaging period in which the imaging device 17 images the workpiece W. 【0151】 Furthermore, in order to generate workpiece position information, the control device 3 may generate a measurement model, which is a three-dimensional model, based on the workpiece images (in particular, multiple workpiece images) generated by the imaging device 17 in step S12. For example, the control device 3 may calculate parallax based on multiple workpiece images and generate a measurement model, which is a three-dimensional model, using a well-known method based on the principle of triangulation using the calculated parallax. An example of a measurement model is a point cloud model. 【0152】The measurement model generated here is a three-dimensional model placed in the imaging coordinate system relating to the imaging device 17. This imaging coordinate system can be considered a coordinate system determined from at least one of the position and orientation of the imaging device 17 at each time the imaging device 17 captures multiple workpiece images. In this case, the control device 3 may convert the measurement model placed in the imaging coordinate system to a measurement model placed in the measurement coordinate system based on the calculation result of the position of the robot 1 in the measurement coordinate system at the time the imaging device 17 captured the workpiece W. Specifically, since the imaging device 17 is attached to the robot 1 (for example, the end-effector arm member 123), the positional relationship between the imaging device 17 and the robot 1 (for example, the end-effector arm member 123) is fixed. For this reason, the control device 3 may calculate the position of the imaging device 17 in the measurement coordinate system based on known information regarding the positional relationship between the imaging device 17 and the robot 1 (for example, the end-effector arm member 123) and the calculation result of the position of the robot 1 in the measurement coordinate system. Since the imaging coordinate system is a coordinate system determined with respect to the imaging device 17, once the position of the imaging device 17 in the measurement coordinate system is determined, the positional relationship (including orientation relationship) between the measurement coordinate system and the imaging coordinate system is also determined. For this reason, the control device 3 may generate a coordinate transformation matrix that converts the coordinates of either the measurement coordinate system or the imaging coordinate system to the coordinates of the other of the measurement coordinate system or the imaging coordinate system, based on the calculation result of the position of the imaging device 17 in the measurement coordinate system. Subsequently, the control device 3 may convert the measurement model placed in the imaging coordinate system to a measurement model placed in the measurement coordinate system based on the generated coordinate transformation matrix. 【0153】Subsequently, the control device 3 may extract a model portion from the measurement model that corresponds to at least a part of the workpiece W by performing a matching process using a design model (template model) that shows the three-dimensional shape of the workpiece W and the generated measurement model. Specifically, since the workpiece image used to generate the measurement model is generated when the imaging device 17 images the workpiece W, the measurement model usually includes a three-dimensional model of the workpiece W. However, if there is an object other than the workpiece W in the imaging range of the imaging device 17 that images the workpiece W, the measurement model also includes a three-dimensional model of the object other than the workpiece W. Therefore, the control device 3 extracts a model portion that corresponds to at least a part of the workpiece W from the measurement model, which includes a three-dimensional model of the workpiece W and a three-dimensional model of the object other than the workpiece W, by performing a matching process. Note that the matching process itself performed in this embodiment may be the same as existing matching processes. For this reason, a detailed explanation of the matching process itself is omitted. As a result, the control device 3 can calculate the position of the workpiece W in the coordinate system of the measurement model (in this case, the measurement coordinate system). In other words, the control device 3 can generate workpiece position information. 【0154】The method for generating workpiece position information described above is merely one example. Therefore, the control device 3 may generate workpiece position information using a method different from the one described above. For example, the control device 3 may calculate the position of workpiece W in the imaging coordinate system by performing a matching process using a template model representing the design shape of workpiece W and a workpiece image. The template model may also be called a design model. As a first example, the control device 3 may calculate the position of workpiece W in the imaging coordinate system by performing a matching process (edge ​​matching process) using a template model (edge ​​model) representing the design shape of the edges of workpiece W and the actual edges of workpiece W captured in the workpiece image. Then, using the coordinate transformation matrix described above, the control device 3 may calculate the position of workpiece W in the measurement coordinate system from the position of workpiece W in the imaging coordinate system. As a second example, the control device 3 may calculate the position of the workpiece W in the imaging coordinate system by performing a matching process (2D matching process) using a template model (2D model) that shows the two-dimensional design shape of the workpiece W and a workpiece image that is a two-dimensional image. Then, using the coordinate transformation matrix described above, the control device 3 may calculate the position of the workpiece W in the measurement coordinate system from the position of the workpiece W in the imaging coordinate system. As a third example, if the imaging device 17 generates multiple workpiece images as described above, the control device 3 may generate a three-dimensional model (measurement model) that shows the actual three-dimensional shape of the workpiece W from the multiple workpiece images. Then, it may calculate the position of the workpiece W in the imaging coordinate system by performing a matching process (3D matching process) using a template model (3D model) that shows the three-dimensional design shape of the workpiece W and the generated measurement model. Then, using the coordinate transformation matrix described above, the control device 3 may calculate the position of the workpiece W in the measurement coordinate system from the position of the workpiece W in the imaging coordinate system. 【0155】Alternatively, the control device 3 may calculate the position of the workpiece W in the measurement coordinate system using an inference model generated by machine learning. For example, the inference model may be generated by machine learning so as to output the position of the workpiece W in the measurement coordinate system as captured in the workpiece image when a workpiece image is input. In this case, the control device 3 may calculate the position of the workpiece W in the measurement coordinate system by inputting the workpiece image generated by the imaging device 17 in step S12 into the inference model. 【0156】 Furthermore, since the support device 4 supports both the robot 1 and the measuring device 2, the positional relationship between the robot 1 and the measuring device 2 is substantially fixed. Therefore, the positional relationship between the robot coordinate system, which is determined with respect to the robot 1, and the measuring coordinate system, which is determined with respect to the measuring device 2, is substantially fixed. For this reason, if the position of the workpiece W in the measuring coordinate system is determined, the position of the workpiece W in the robot coordinate system is also determined. For this reason, calculating the position of the workpiece W in the measuring coordinate system can be considered equivalent to calculating the position of the workpiece W in the robot coordinate system. 【0157】 (2-2) Fine Measurement Operation Again in Figure 11, after the rough measurement operation is performed, the robot system SYS performs a fine measurement operation (fine measurement) (step S2). The fine measurement operation includes the operation of measuring the shape of the workpiece W using the measurement head 15M. In particular, the fine measurement operation includes the operation of controlling the measurement head 15M to measure the shape of the workpiece W based on the workpiece position information which is the measurement result of the rough measurement operation. Note that since the workpiece position information is generated based on the workpiece image acquired in the rough measurement operation and the measurement result of the measurement device 2, the fine measurement operation may be considered to include the operation of controlling the measurement head 15M to measure the shape of the workpiece W based on the workpiece image acquired in the rough measurement operation and the measurement result of the measurement device 2. 【0158】The fine measurement operation may include movement control (step movement operation) that moves the tip arm member 123 using the robot arm 12 (resulting in the movement of the measurement head 15M), and operation (scan measurement operation or shape measurement operation) that measures the shape of the workpiece W using the measurement head 15M. Furthermore, the fine measurement operation may include a control information generation operation that generates movement control information for performing movement control that moves the tip arm member 123 using the robot arm 12 (resulting in the movement of the measurement head 15M). For this reason, the control information generation operation, the step movement operation, and the scan measurement operation will be described in order below. 【0159】 (2-2-1) Control Information Generation Operation First, the control device 3 generates movement control information (step S21) for performing movement control to move the tip arm member 123 by step movement operation (which in turn moves the measuring head 15M) based on the work position information generated in step S13. Note that since the work position information is generated based on the work image acquired in the rough measurement operation and the measurement results of the measuring device 2, generating movement control information based on the work position information can be considered equivalent to generating movement control information based on the work image acquired in the rough measurement operation and the measurement results of the measuring device 2. 【0160】The movement control information may include information regarding the target measurement position to which the tip arm member 123, to which the measuring head 15M is attached, should be located when the measuring head 15M measures the shape of the workpiece W. In other words, the movement control information may include information regarding the target measurement position to which the tip arm member 123 should be located during the fine measurement period in which the measuring head 15M measures the shape of the workpiece W during the fine measurement operation. In this case, the control device 3 may calculate the target measurement position based on the workpiece position information such that the part of the workpiece W whose position in the measurement coordinate system has already been calculated and to be measured by the measuring head 15M is included in the measurement range of the measuring head 15M attached to the tip arm member 123 located at the target measurement position. In particular, the control device 3 may calculate the target measurement position in the measurement coordinate system. Since the measuring head 15M is attached to the tip arm member 123, the target measurement position of the tip arm member 123 may be considered equivalent to the target measurement position of the measuring head 15M. Calculating the target measurement position of the tip arm member 123 may be considered equivalent to calculating the target measurement position of the measurement head 15M. 【0161】 If the measurement range of the measurement head 15M does not include the entire measurement target area of ​​the workpiece W, the measurement head 15M may sequentially measure multiple divided areas obtained by dividing the measurement target area of ​​the workpiece W. In this case, the movement control information may include information on multiple target measurement positions to which each of the tip arm members 123 to which the measurement head 15M is attached should be located when measuring the shapes of the multiple divided areas of the workpiece W. In this case, the control device 3 may calculate each target measurement position corresponding to each divided area based on the workpiece position information, such that each divided area of ​​the workpiece W whose position in the measurement coordinate system has already been calculated is included in the measurement range of the measurement head 15M attached to the tip arm member 123 located at each target measurement position. Note that multiple divided areas may be referred to as multiple measurement regions. Furthermore, multiple measurement regions may partially overlap each other. 【0162】The movement control information may include, in addition to or instead of, the information regarding the target measurement position described above, information regarding the movement path (target movement path) of the tip arm member 123 moving toward the target measurement position. In other words, the movement control information may include information regarding the movement path (target movement path) of the tip arm member 123 in step movement operation. To put it another way, the movement control information may include information regarding the movement path (target movement path) of the tip arm member 123 during the fine measurement period in which the measurement head 15M measures the shape of the workpiece W in fine measurement operation. For the purposes of the following explanation, the movement path (target movement path) of the tip arm member 123 will be referred to as the measurement path. For example, the control device 3 may generate a measurement path that includes the movement path from the initial position of the tip arm member 123 toward the target measurement position. If multiple target measurement positions are set, the control device 3 may generate a measurement path that includes the movement path from one target measurement position toward another target measurement position. In particular, the control device 3 may calculate the measurement path in the measurement coordinate system. Furthermore, since the measuring head 15M is attached to the tip arm member 123, the measurement path (movement path) of the tip arm member 123 may be considered equivalent to the measurement path (movement path) of the measuring head 15M. Calculating the measurement path (movement path) of the tip arm member 123 may be considered equivalent to calculating the measurement path (movement path) of the measuring head 15M. Here, when generating movement control information, the movement path (target movement path) of the tip arm member 123 may be determined so that no obstructions are interposed between the measuring member 16, which moves together with the tip arm member 123, and the measuring device 2 that measures the measuring member 16. Alternatively, the movement path (target movement path) of the tip arm member 123 may be determined so that no obstructions are interposed between the measuring device 2 and the measuring member 16 at the timing when the measuring device 2 measures the measuring member 16. 【0163】Here, with reference to Figure 13, an example of movement control information generated in step S21 will be described. Figure 13 shows an example in which a measuring head 15M attached to a tip arm member 123 located at target measurement position TMP#1 measures the shape of the workpiece W, a measuring head 15M attached to a tip arm member 123 located at target measurement position TMP#2 measures the shape of the workpiece W, and a measuring head 15M attached to a tip arm member 123 located at target measurement position TMP#3 measures the shape of the workpiece W. In this case, the control device 3 generates information regarding target measurement position TMP#1, information regarding target measurement position TMP#2, and information regarding target measurement position TMP#3 as part of the movement control information. Furthermore, the control device 3 may generate, as part of the movement control information, information regarding a measurement path PP#0 from the initial position TMP#0 of the tip arm member 123 toward the target measurement position TMP#1, information regarding a measurement path PP#1 from the target measurement position TMP#1 toward the target measurement position TMP#2, and information regarding a measurement path PP#2 from the target measurement position TMP#2 toward the target measurement position TMP#3, in addition to or instead of information regarding at least one of the target measurement positions TMP#1 to TMP#3. 【0164】 (2-2-2) Step Movement Operation Again in Figure 11, the control device 3 then performs movement control (step movement operation) to move the tip arm member 123 (and as a result move the measurement head 15M) based on the movement control information generated in step S21 (step S22). In other words, the control device 3 controls the robot arm 12 to move the tip arm member 123 (and as a result move the measurement head 15M) based on the movement control information generated in step S21 (step S22). For example, the control device 3 may control the robot arm 12 so that the tip arm member 123 moves to (i.e., is positioned at) the target measurement position indicated by the movement control information. For example, the control device 3 may control the robot arm 12 so that the tip arm member 123 moves along the measurement path indicated by the movement control information. 【0165】Subsequently, the control device 3 may determine whether predetermined measurement start conditions that must be met for the measurement head 15M to start measuring the shape of the workpiece W have been met (step S23). In other words, the control device 3 may determine whether predetermined measurement start conditions that must be met for the measurement head 15M to start a scan measurement operation to measure the shape of the workpiece W have been met (step S23). 【0166】The measurement start condition may include a first measurement start condition, which is that the vibration of the tip arm member 123 has subsided after it has finished moving. Here, with reference to Figure 14, the technical reason for using the first measurement start condition will be explained. Figure 14 is a graph showing the vibration of the tip arm member 123. As shown in Figure 14, even after the tip arm member 123, which has been moving by the step movement operation, has stopped, it is highly likely that the tip arm member 123 will continue to vibrate for a while due to the reaction of stopping. In this embodiment, the vibration of the tip arm member 123 may mean a change in the position of the tip arm member 123. In other words, in this embodiment, vibration may mean a change in position. Such vibration of the tip arm member 123 may be transmitted from the tip arm member 123 to the measurement head 15M via the moving device 14. In other words, the measurement head 15M may vibrate. As a result, the measurement accuracy of the measurement head 15M may deteriorate due to the vibration of the measurement head 15M. In other words, the measurement accuracy (or calculation accuracy) of the shape of the workpiece W may deteriorate. Therefore, if the measuring head 15M starts measuring the shape of the workpiece W after the vibration of the tip arm member 123 has finished moving has subsided, it should be possible to prevent deterioration of the measurement accuracy of the measuring head 15M due to the vibration of the tip arm member 123. Thus, in this embodiment, the measuring device 2 may measure the position of the robot 1 (for example, the tip arm member 123) after the tip arm member 123 has finished moving (i.e., after the measuring head 15M has finished moving). As already mentioned above, the state of the support device 4 may be switched from a supported state to an unsupported state before the measuring device 2 starts measuring the position of the robot 1. After that, the control device 3 may calculate the position of the tip arm member 123 in the measurement coordinate system based on the measurement results of the measuring device 2. The graph at the bottom of Figure 14 shows the calculation result of the position of the tip arm member 123. In this case, as shown in Figure 14, the calculation result of the position of the tip arm member 123 fluctuates relatively large between time t1, when the tip arm member 123 has finished moving, and time t2. Specifically, the amount of positional variation of the tip arm member 123 exceeds a predetermined first allowable amount.Therefore, in this case, the control device 3 may determine that the vibration of the tip arm member 123 has not subsided (i.e., the first measurement start condition has not been met) (Step S23: No). In this case, the control device 3 may wait until the vibration of the tip arm member 123 subsides. On the other hand, after time t2, the calculation result of the position of the tip arm member 123 does not fluctuate significantly. Specifically, the amount of fluctuation in the position of the tip arm member 123 is below a predetermined first allowable amount. Therefore, in this case, the control device 3 may determine that the vibration of the tip arm member 123 has subsided (i.e., the first measurement start condition has been met) (Step S23: Yes). In this case, as will be described later, the control device 3 may control the measurement head 15M to measure the shape of the workpiece W (Step S24). In this embodiment, the amount of fluctuation in the position of the tip arm member 123 may mean the amplitude of the vibration of the tip arm member 123. In other words, in this embodiment, the amount of fluctuation in position may mean the amplitude of the vibration. The amount of positional variation of the tip arm member 123 may represent the difference between the maximum and minimum values ​​of the tip arm member 123's position. In other words, the amount of positional variation may represent the difference between the maximum and minimum values ​​of the position. Furthermore, the first allowable amount may be set to a desired value that allows for the distinction between a state in which the vibration of the tip arm member 123 has subsided and a state in which the vibration of the tip arm member 123 has not subsided. 【0167】Furthermore, in order to determine whether the first measurement start condition is met, the control device 3 may, in addition to or instead of calculating the position of the tip arm member 123, calculate the distance from the measuring device 2 to the tip arm member 123 (i.e., the distance from the measuring device 2 to the measuring member 16) based on the measurement results of the measuring device 2. In this case, the control device 3 may determine that the first measurement start condition is met if the amount of variation in the distance calculated based on the measurement results of the measuring device 2 is below a predetermined first allowable amount. Furthermore, in this embodiment, the amount of variation in distance may mean the amplitude of vibration of the distance value or the difference between the maximum and minimum values ​​of the distance. Alternatively, in order to determine whether the first measurement start condition is met, the control device 3 may, in addition to or instead of calculating the distance from the measuring device 2 to the tip arm member 123 (i.e., the distance from the measuring device 2 to the measuring member 16), determine whether the amount of variation in the measurement result of the measuring device 2 itself (i.e., the signal output by the measuring device 2, which is the instantaneous value of the measurement result) is below a predetermined first allowable amount. In this case, the control device 3 may determine that the first measurement start condition is met when the amount of variation in the measurement result itself of the measuring device 2 is below a predetermined first allowable amount. In this embodiment, the amount of variation in the measurement result may mean the amplitude of the vibration of the value related to the measurement result or the difference between the maximum and minimum values ​​of the value related to the measurement result. 【0168】 In all examples, the control device 3 uses the measurement results of the measuring device 2 to determine whether the first measurement start condition is met. Therefore, in all examples, it may be considered that the control device 3 has determined that the first measurement start condition is met if the amount of variation in the measurement results of the measuring device 2 is below a predetermined first allowable amount. 【0169】As mentioned above, the amount of fluctuation used to determine whether the first measurement start condition is met (i.e., the position of the tip arm member 123, the distance from the measuring device 2 to the measuring member 16, and at least one amount of fluctuation in the measurement result of the measuring device 2) may represent the amplitude of the fluctuation (vibration). However, the amplitude of the fluctuation (vibration) is only one example of arbitrary information regarding the fluctuation. The control device 3 may determine whether the first measurement start condition is met (i.e., whether the vibration of the tip arm member 123 has subsided) based on the position of the tip arm member 123, the distance from the measuring device 2 to the measuring member 16, and at least one piece of arbitrary information regarding the fluctuation in the measurement result of the measuring device 2. For example, the control device 3 may determine whether the first measurement start condition is met (i.e., whether the vibration of the tip arm member 123 has subsided) based on the position of the tip arm member 123, the distance from the measuring device 2 to the measuring member 16, and the frequency of at least one fluctuation in the measurement result of the measuring device 2. For example, the control device 3 may determine that the first measurement start condition is met (i.e., the vibration of the tip arm member 123 has subsided) when the frequency of the fluctuation falls below a predetermined first allowable amount. For example, the control device 3 may determine whether the first measurement start condition is met (i.e., the vibration of the tip arm member 123 has subsided) based on the position of the tip arm member 123, the distance from the measuring device 2 to the measuring member 16, and the period of at least one fluctuation of the measurement result of the measuring device 2. For example, the control device 3 may determine that the first measurement start condition is met (i.e., the vibration of the tip arm member 123 has subsided) when the period of the fluctuation exceeds a predetermined first allowable amount. For example, the control device 3 may determine whether the first measurement start condition is met (i.e., whether the vibration of the tip arm member 123 has subsided) based on the position of the tip arm member 123, the distance from the measuring device 2 to the measuring member 16, and the degree of change in the amplitude of at least one fluctuation of the measurement result of the measuring device 2 (for example, the degree of change per unit time).For example, if the rate of change in the amplitude of the fluctuation (for example, the rate of change per unit time) falls below a predetermined first allowable amount, it may be determined that the first measurement start condition has been met (i.e., the vibration of the tip arm member 123 has subsided). 【0170】 The measurement start condition may include, in addition to or instead of, the first measurement start condition described above, a second measurement start condition in which the tip arm member 123 is located at the target measurement position indicated by the movement control information generated in step S21. In this case, after the tip arm member 123 has finished moving (i.e., after the measurement head 15M has finished moving), the measurement device 2 may measure the position of the robot 1 (for example, the tip arm member 123). Subsequently, the control device 3 may calculate the position of the tip arm member 123 in the measurement coordinate system based on the measurement results of the measurement device 2. Subsequently, the control device 3 may determine whether the positional deviation amount, which is the difference between the calculated position of the tip arm member 123 and the target measurement position indicated by the movement control information, is below a predetermined second allowable amount. 【0171】 If the amount of misalignment exceeds a predetermined second allowable amount, the control device 3 may determine that the second measurement start condition has not been met (Step S23: No). In this case, the control device 3 may continue the movement control (step movement operation) to move the tip arm member 123 (Step S22). On the other hand, if the amount of misalignment falls below the predetermined second allowable amount, the control device 3 may determine that the second measurement start condition has been met (Step S23: Yes). In this case, as will be described later, the control device 3 may control the measurement head 15M to measure the shape of the workpiece W (Step S24). The first allowable amount may be set to a desired value that can distinguish between a state in which the tip arm member 123 may be considered to be in the target measurement position and a state in which the tip arm member 123 should not be considered to be in the target measurement position. 【0172】As shown in Figure 15, which illustrates the vibration of the tip arm member 123 and the measurement results of the measuring device 2 (including calculated values ​​such as distance and position calculated from the measurement results of the measuring device 2), it is possible that the measurement results of the measuring device 2 (including calculated values ​​such as distance and position calculated from the measurement results of the measuring device 2) may fluctuate due to the vibration of the tip arm member 123, as described above. In this way, the state in which the measurement results of the measuring device 2 (including calculated values ​​such as distance and position calculated from the measurement results of the measuring device 2) are fluctuating (i.e., are greatly varied) is equivalent to a state in which the calculation accuracy of the position of the tip arm member 123 is deteriorating. For example, if the calculation result of the position of the tip arm member 123 is fluctuating greatly, even though the tip arm member 123 should be located at the target measurement position, it is possible that the positional deviation amount, which is the difference between the calculation result of the position of the tip arm member 123 and the target measurement position indicated by the movement control information, will continue to be judged to exceed a predetermined second allowable amount (as a result, it will continue to be judged that the tip arm member 123 is not located at the target measurement position). This can be said to be equivalent to a state in which the calculation accuracy of the position of the tip arm member 123 has deteriorated. 【0173】Therefore, in this embodiment, the control device 3 may calculate the position of the tip arm member 123 based on the time average value of the measurement results of the measuring device 2. An example of the time average value of the measurement results of the measuring device 2 is shown in the lower graph of Figure 15. As shown in Figure 15, the time average value of the measurement results of the measuring device 2 has less variation compared to the measurement results of the measuring device 2 themselves. For this reason, when the tip arm member 123 is vibrating, the position of the tip arm member 123 calculated by the control device 3 based on the time average value of the measurement results of the measuring device 2 is closer to the position of the tip arm member 123 assuming that the vibration has subsided, compared to the position of the tip arm member 123 calculated based on the measurement results of the measuring device 2 themselves. For this reason, when the time average value of the measurement results of the measuring device 2 is used, it is possible to prevent deterioration in the calculation accuracy of the position of the tip arm member 123 due to vibration of the tip arm member 123, compared to when the measurement results of the measuring device 2 themselves are used. When the time-averaged result of the measurement device 2 is used, the degree of deterioration in the accuracy of calculating the position of the tip arm member 123 due to vibration of the tip arm member 123 can be reduced compared to when the measurement result of the measurement device 2 itself is used. 【0174】 The period (time window) for calculating the time average of the measurement results of the measuring device 2 may be fixed. A predetermined fixed period may be used as the period (time window) for calculating the time average of the measurement results of the measuring device 2. Alternatively, the period (time window) for calculating the time average of the measurement results of the measuring device 2 may be changed. For example, the control device 3 may change (set) the period (time window) for calculating the time average of the measurement results of the measuring device 2 so that it can calculate the position of the tip arm member 123 with desired accuracy based on the time average of the measurement results of the measuring device 2. 【0175】As mentioned above, the state of the support device 4 is switched to the unsupported state (see Figure 10) during the measurement period in which the measuring device 2 measures the position of the robot 1. On the other hand, the state of the support device 4 may be switched to the supported state (see Figure 9) during the measurement period in which the measuring device 2 measures the position of the robot 1. In this case, as mentioned above, vibrations of the support device 4 may be transmitted to the measuring device 2. As a result, the measurement results of the measuring device 2 (including calculated values ​​such as distance and position calculated from the measurement results of the measuring device 2) may fluctuate due to vibrations of the measuring device 2 itself, in addition to or instead of vibrations of the tip arm member 123. Alternatively, even when the state of the support device 4 is switched to the unsupported state (see Figure 10), the measuring device 2 may vibrate for some reason. As a result, the measurement results of the measuring device 2 (including calculated values ​​such as distance and position calculated from the measurement results of the measuring device 2) may fluctuate due to vibrations of the measuring device 2 itself, in addition to or instead of vibrations of the tip arm member 123. Even in this case, if the time-averaged result of the measurement device 2 is used, the degree of deterioration in the calculation accuracy of the position of the tip arm member 123 due to vibration of the measurement device 2 can be reduced compared to the case where the measurement result of the measurement device 2 itself is used. 【0176】 Furthermore, even in the rough measurement operation described above, in step S12 of Figure 11, the measuring device 2 measures the position of the tip arm member 123. Therefore, even in the rough measurement operation, in step S13 of Figure 11, the control device 3 may calculate the position of the tip arm member 123 based on the time average value of the measurement results of the measuring device 2. As a result, the degree of deterioration in the accuracy of calculating the position of the tip arm member 123 can be reduced. As a result, the degree of deterioration in the accuracy of calculating the position of the workpiece W, which is calculated based on the calculation result of the position of the tip arm member 123, can be reduced. In other words, the control device 3 can calculate the position of the workpiece W with high accuracy. 【0177】Furthermore, the measuring device 2 may measure the position of the end-tip arm member 123 for at least a portion of the period during which the end-tip arm member 123 is moving by the step movement operation (i.e., the measuring head 15M is moving). In this case, the control device 3 may calculate the position of the end-tip arm member 123 based on the measurement results of the measuring device 2 for at least a portion of the period during which the end-tip arm member 123 is moving by the step movement operation (i.e., the measuring head 15M is moving). For example, the control device 3 may calculate the position of the end-tip arm member 123 based on the measurement results of the measuring device 2 itself, or it may calculate the position of the end-tip arm member 123 based on the time average of the measurement results of the measuring device 2. Subsequently, the control device 3 may control the robot arm 12 so that the end-tip arm member 123 moves to the target measurement position indicated by the movement control information based on the calculation result of the position of the end-tip arm member 123. The control device 3 may also control the robot arm 12 so that the end-tip arm member 123 moves along the measurement path indicated by the movement control information based on the calculation result of the position of the end-tip arm member 123. 【0178】 (2-2-3) Scan Measurement Operation (Repeat Measurement Operation) Again in Figure 11, as described above, if it is determined that the measurement start condition is met, the measurement head 15M may measure the shape of the workpiece W (step S24). In other words, the robot system SYS performs a scan measurement operation to measure the shape of the workpiece W using the measurement head 15M (step S24). 【0179】During at least a portion of the fine measurement period in which the measuring head 15M measures the shape of the workpiece W by the fine measurement operation, the control device 3 does not need to operate the robot arm 12. During at least a portion of the fine measurement period, the control device 3 does not need to control the robot arm 12 to move the tip arm member 123. During at least a portion of the fine measurement period, the control device 3 does not need to change the position of the tip arm member 123. In other words, the control device 3 may keep the tip arm member 123 stationary. During at least a portion of the fine measurement period, the control device 3 does not need to control the robot arm 12 to move the measuring head 15M attached to the tip arm member 123. During at least a portion of the fine measurement period, the control device 3 does not need to change the position of the measuring head 15M attached to the tip arm member 123. In this case, the measuring head 15M will not move due to the operation of the robot arm 12 from the time the measuring head 15M starts measuring the shape of one part of the workpiece W until the measuring head 15M finishes measuring the shape of one part of the workpiece W. In other words, the position of the measuring head 15M does not change due to the movement of the robot arm 12. As a result, the possibility of the measuring head 15M vibrating due to the movement of the tip arm member 123 is reduced for at least a portion of the fine measurement period. Therefore, deterioration of the measurement accuracy of the measuring head 15M due to vibration of the measuring head 15M can be prevented. In other words, deterioration of the calculation accuracy of the shape of the workpiece W can be prevented. 【0180】Furthermore, during the fine measurement period in which the measuring head 15M measures the shape of the workpiece W by the fine measurement operation, the measuring device 2 may measure the position of the robot 1 (for example, the tip arm member 123) (step S24). As already mentioned above, the state of the support device 4 may be switched from the supported state to the unsupported state before the measuring device 2 begins to measure the position of the robot 1. Also, the fine measurement period in which the measuring head 15M measures the shape of the workpiece W may include at least a portion of the period between the time when the robot arm 12 has finished moving the measuring head 15M and the time when the measuring head 15M has finished measuring the shape of the workpiece W and the robot arm 12 begins to move the measuring head 15M again. The fine measurement period in which the measuring head 15M measures the shape of the workpiece W may also include at least a portion of the period between the time when the step movement operation is completed and the time when the next step movement operation is started. 【0181】 Thereafter, the robot system SYS may alternately repeat step movement (step S22) and scan measurement (step S24) until the measurement head 15M has finished measuring the overall shape of the part of the workpiece to be measured (step S25). 【0182】 Here, with reference to Figures 16 to 17, we will describe an example in which step movement and scan measurement operations are repeated alternately. Specifically, as shown in Figure 13, we will describe an example in which step movement and scan measurement operations are repeated alternately, such that a measurement head 15M attached to a tip arm member 123 located at target measurement position TMP#1 measures the shape of the workpiece W, a measurement head 15M attached to a tip arm member 123 located at target measurement position TMP#2 measures the shape of the workpiece W, and a measurement head 15M attached to a tip arm member 123 located at target measurement position TMP#3 measures the shape of the workpiece W. 【0183】As shown in Figure 16A, the control device 3 controls the robot arm 12 so that the tip arm member 123, which is located at the initial position TMP#0, moves to the target measurement position TMP#1 (i.e., moves along the measurement path PP#0). Subsequently, as shown in Figure 16B, the control device 3 controls the measurement head 15M, which is attached to the tip arm member 123 located at the target measurement position TMP#1, so that it measures the shape of the workpiece W. Furthermore, as shown in Figure 16B, the control device 3 controls the measurement device 2 so that it measures the position of the tip arm member 123 located at the target measurement position TMP#1. 【0184】 Subsequently, as shown in Figure 16C, the control device 3 controls the robot arm 12 so that the tip arm member 123 located at the target measurement position TMP#1 moves to the target measurement position TMP#2 (i.e., moves along the measurement path PP#1). Then, as shown in Figure 17A, the control device 3 controls the measurement head 15M attached to the tip arm member 123 located at the target measurement position TMP#2 so that the measurement head 15M measures the shape of the workpiece W. Furthermore, as shown in Figure 17A, the control device 3 controls the measurement device 2 so that the position of the tip arm member 123 located at the target measurement position TMP#2 is measured. 【0185】 Subsequently, as shown in Figure 17B, the control device 3 controls the robot arm 12 so that the tip arm member 123 located at the target measurement position TMP#2 moves to the target measurement position TMP#3 (i.e., moves along the measurement path PP#2). Then, as shown in Figure 17C, the control device 3 controls the measurement head 15M attached to the tip arm member 123 located at the target measurement position TMP#3 so that the measurement head 15M measures the shape of the workpiece W. Furthermore, as shown in Figure 17C, the control device 3 controls the measurement device 2 so that the position of the tip arm member 123 located at the target measurement position TMP#3 is measured. 【0186】Again in Figure 11, Figure 11 shows an example in which the robot system SYS performs a fine measurement operation including a step movement operation and a scan measurement operation once, and then calculates the shape of the workpiece W, as will be described later. However, the robot system SYS may perform a rough measurement operation again after performing a fine measurement operation including a step movement operation and a scan measurement operation. In other words, the robot system SYS may alternately repeat rough measurement operations and fine measurement operations. For example, the robot system SYS may perform a rough measurement operation to measure the position of the first workpiece W, then perform a fine measurement operation to measure the shape of the first workpiece W, then perform a rough measurement operation to measure the position of a second workpiece W different from the first workpiece W, and then perform a fine measurement operation to measure the shape of the second workpiece W. For example, the robot system SYS may perform a rough measurement operation to measure a first measurement target area of ​​the workpiece W, then perform a fine measurement operation to measure the shape of the first measurement target area of ​​the workpiece W, then perform a rough measurement operation to measure the position of a second measurement target area of ​​the same workpiece W that is different from the first measurement target area, and then perform a fine measurement operation to measure the shape of the second measurement target area of ​​the workpiece W. 【0187】Furthermore, if rough measurement and fine measurement operations are performed on a first measurement target area of ​​the workpiece W, and then rough measurement and fine measurement operations are performed on a second measurement target area of ​​the same workpiece W, the control device 3 may generate workpiece shape information indicating the shape of the workpiece W including the first and second measurement target areas by merging the measurement result of the shape of the first measurement target area by the measurement head 15M with the measurement result of the shape of the second measurement target area by the measurement head 15M. For example, the measurement head 15M may measure the shape of a predetermined reference member together with the shape of the first measurement target area of ​​the workpiece W, and measure the shape of the same predetermined reference member together with the shape of the second measurement target area of ​​the workpiece W. Subsequently, the control device 3 may merge the measurement result of the shape of the first measurement target area by the measurement head 15M with the measurement result of the shape of the second measurement target area by the measurement head 15M based on the measurement result of the shape of the reference member. For example, the control device 3 may merge the measurement result of the shape of the first target part by the measurement head 15M and the measurement result of the shape of the second target part by the measurement head 15M so that the three-dimensional model of the reference member indicated by the measurement result of the shape of the first target part by the measurement head 15M and the three-dimensional model of the reference member indicated by the measurement result of the shape of the second target part by the measurement head 15M overlap at the same position and in the same orientation. 【0188】 (2-3) Generation of workpiece shape information Again in Figure 11, after the step movement operation (step S22) and the scan measurement operation (step S24) are completed (step S25: Yes), the control device 3 calculates the shape of the workpiece W (for example, the three-dimensional shape) based on the measurement result of the measurement head 15M in step S24 and the measurement result of the measurement device 2 in step S24 (step S26). In other words, the control device 3 generates workpiece shape information that shows the shape of the workpiece W (step S26). 【0189】For example, the control device 3 may calculate the shape of the workpiece W in a head coordinate system based on the measurement result of the measurement head 15M in step S24 (for example, the result of a line scan). As an example, the control device 3 may calculate a three-dimensional model (for example, a point cloud model) that shows the shape of the workpiece W in the head coordinate system as information indicating the shape of the workpiece W. 【0190】 Furthermore, the control device 3 may calculate the position of the tip arm member 123 in the measurement coordinate system at the time the measuring head 15M measures the shape of the workpiece W, based on the measurement results of the measuring device 2 in step S24. In other words, the control device 3 may calculate the position of the tip arm member 123 in the measurement coordinate system during the scan measurement period in which the measuring head 15M measures the shape of the workpiece W. 【0191】 Subsequently, the control device 3 may calculate the position of the measurement head 15M in the measurement coordinate system during the scan measurement period based on the calculation result of the position of the tip arm member 123 in the measurement coordinate system during the scan measurement period and the measurement result of the measurement device 142 provided by the moving device 14. For example, the measurement device 142 may output as a measurement result information regarding the position of the measurement head 15M relative to the tip arm member 123 to which the moving device 14 is attached. In this case, the control device 3 may calculate the position of the measurement head 15M in the measurement coordinate system during the scan measurement period by adding the position of the measurement head 15M relative to the tip arm member 123 measured by the measurement device 142 to the calculation result of the position of the tip arm member 123 in the measurement coordinate system during the scan measurement period. 【0192】Subsequently, the control device 3 may calculate the shape of the workpiece W in the measurement coordinate system based on the calculation result of the position of the measurement head 15M in the measurement coordinate system and the calculation result of the shape of the workpiece W in the head coordinate system. Specifically, since the head coordinate system is a coordinate system determined with respect to the measurement head 15M, once the position of the measurement head 15M in the measurement coordinate system is known, the positional relationship (including orientation relationship) between the measurement coordinate system and the head coordinate system is also known. For this reason, the control device 3 may generate a coordinate transformation matrix that converts the coordinates of either the measurement coordinate system or the head coordinate system to the coordinates of the other of the measurement coordinate system or the head coordinate system based on the calculation result of the position of the measurement head 15M in the measurement coordinate system. Subsequently, the control device 3 may convert the calculation result of the shape of the workpiece W in the head coordinate system to the calculation result of the shape of the workpiece W in the measurement coordinate system based on the generated coordinate transformation matrix. For example, the control device 3 may convert a three-dimensional model (e.g., a point cloud model) showing the shape of the workpiece W in the head coordinate system to a three-dimensional model (e.g., a point cloud model) showing the shape of the workpiece W in the measurement coordinate system. A three-dimensional model (e.g., a point cloud model) showing the shape of the workpiece W in the measurement coordinate system may be used as workpiece shape information indicating the shape of the workpiece W. 【0193】 Here, in the scan measurement operation, similar to the case where a step movement operation is performed, in step S26 of Figure 11, the control device 3 may calculate the position of the tip arm member 123 based on the time average value of the measurement results of the measurement device 2. As a result, the degree of deterioration in the accuracy of calculating the position of the tip arm member 123 can be reduced. As a result, the degree of deterioration in the accuracy of calculating the shape of the workpiece W, which is calculated based on the calculation result of the position of the tip arm member 123, can be reduced. In other words, the control device 3 can calculate the shape of the workpiece W with high accuracy. 【0194】In the scan measurement operation, the moving device 14 moves the measuring head 15M, which measures the shape of the workpiece W. In this case, a reaction force may be generated in the moving device 14 due to the recoil of the movement of the measuring head 15M by the moving device 14. Such a reaction force may lead to unintended vibration of the tip arm member 123 to which the moving device 14 is attached. However, if the position of the tip arm member 123 is calculated based on the time average value of the measurement results of the measuring device 2, even if the tip arm member 123 vibrates due to the reaction force of the moving device 14, the degree of deterioration in the accuracy of calculating the position of the tip arm member 123 can be reduced. 【0195】Alternatively, in addition to or instead of calculating the position of the tip arm member 123 based on the time average of the measurement results of the measuring device 2, the control device 3 may calculate the shape of the workpiece W based on the measurement results of the measuring head 15M during the period when the vibration of the tip arm member 123 has subsided. The control device 3 may use the measurement results of the measuring head 15M during the period when the vibration of the tip arm member 123 has subsided to calculate the shape of the workpiece W. The control device 3 does not have to calculate the shape of the workpiece W based on the measurement results of the measuring head 15M during the period when the vibration of the tip arm member 123 has not subsided. The control device 3 does not have to use the measurement results of the measuring head 15M during the period when the vibration of the tip arm member 123 has not subsided to calculate the shape of the workpiece W. For example, Figure 18 is a graph showing the vibration of the tip arm member 123 and the measurement results of the measuring device 2 (including calculated values ​​such as distance and position calculated from the measurement results of the measuring device 2; the same applies hereinafter in this paragraph). As shown in Figure 18, even after the tip arm member 123, which was moving by the step movement operation, has stopped, it is highly likely that the tip arm member 123 will continue to vibrate for a while due to the reaction of stopping, as described above. In this case, the control device 3 may start the scan measurement operation (step S24 in Figure 11) even if the vibration of the tip arm member 123 has not subsided. As a result, as shown in the graph at the bottom of Figure 18, the measurement results of the measuring device 2 fluctuate relatively large between time t3, when the tip arm member 123 has finished moving, and time t4. Specifically, the amount of fluctuation in the measurement results of the measuring device 2 exceeds a predetermined first allowable amount. In this case, it is highly likely that the vibration of the tip arm member 123 has not subsided between time t3 and time t4. As a result, as described above, the measurement accuracy of the measuring head 15M may have deteriorated between time t3 and time t4. Therefore, the control device 3 does not need to calculate the shape of the workpiece W based on the measurement results of the measuring head 15M between time t3 and time t4. In other words, the control device 3 does not need to use the measurement results of the measurement head 15M between time t3 and time t4 to calculate the shape of the workpiece W. On the other hand, after time t4, the measurement results of the measurement device 2 do not fluctuate significantly in relative terms.Specifically, the amount of variation in the measurement results of the measuring device 2 is below a predetermined first allowable amount. In this case, there is a high probability that the vibration of the tip arm member 123 has subsided after time t4. As a result, as described above, there is a high probability that the measurement accuracy of the measuring head 15M has not deteriorated (or the degree of deterioration in the measurement accuracy of the measuring head 15M has decreased) after time t4. Therefore, the control device 3 may calculate the shape of the workpiece W based on the measurement results of the measuring head 15M after time t4. In other words, the control device 3 may use the measurement results of the measuring head 15M after time t4 to calculate the shape of the workpiece W. As a result, even if the measurement accuracy of the measuring head 15M deteriorates due to the vibration of the tip arm member 123, it is possible to prevent deterioration in the calculation accuracy of the shape of the workpiece W calculated from the measurement results of the measuring head 15M. In other words, it is possible to prevent deterioration in the calculation accuracy of the shape of the workpiece W, similar to when the scan measurement operation is started when the first measurement start condition, which is that the vibration of the tip arm member 123 has subsided after it has finished moving, is met. 【0196】In this case, the control device 3 may process the measurement results of the measuring head 15M based on the measurement results of the measuring device 2 (particularly information regarding its fluctuations), and calculate the shape of the workpiece W based on the processed measurement results of the measuring head 15M. As a first example, the control device 3 may extract a portion of the measurement results of the measuring head 15M based on the measurement results of the measuring device 2, and calculate the shape of the workpiece W based on the extracted measurement results of the measuring head 15M. For example, the control device 3 may extract a portion of the data from the measurement data showing the measurement results of the measuring head 15M that was acquired during the period when the vibration of the tip arm member 123 had subsided, based on the measurement results of the measuring device 2, and calculate the shape of the workpiece W based on the extracted data portion. As a second example, the control device 3 may delete a portion of the measurement results of the measuring head 15M based on the measurement results of the measuring device 2, and calculate the shape of the workpiece W based on the measurement results of the measuring head 15M from which a portion has been deleted. For example, the control device 3 may, based on the measurement results of the measuring device 2, delete a portion of the measurement data showing the measurement results of the measuring head 15M that was acquired during the period when the vibration of the tip arm member 123 had not subsided, and then calculate the shape of the workpiece W based on the measurement data from which a portion of the data has been deleted. It should be noted that both the process of extracting a portion of the data from the measurement data and the process of deleting a portion of the data from the measurement data may be considered equivalent to the process of modifying the measurement data. 【0197】(2-2-5) Generation of robot control signals Subsequently, the control device 3 may generate robot control signals to control another robot 1 that performs operations on the workpiece W based on the calculation result of the shape of the workpiece W (workpiece shape information). For example, the control device 3 may generate robot control signals to control another robot 1 that performs a machining operation to machine a desired part of the workpiece W whose shape in the measurement coordinate system is known (for example, another robot 1 equipped with the machining head described above as an end effector 15) based on the calculation result of the shape of the workpiece W. For example, the control device 3 may generate robot control signals to control another robot 1 that performs a holding operation to hold a desired part of the workpiece W whose shape in the measurement coordinate system is known (for example, another robot 1 equipped with the hand gripper described above as an end effector 15) based on the calculation result of the shape of the workpiece W. 【0198】 (3) Technical effects of the robot system SYS In this embodiment, the robot system SYS can enjoy the following technical effects, which are shown as an example below. As a result, the robot system SYS can appropriately perform the desired operation using the end effector 15. 【0199】(3-1) Technical effects of the support device 4 As described above, the support device 4 supports both the robot 1 and the measuring device 2. Furthermore, the support device 4 moves on the support surface SS while supporting the robot 1 and the measuring device 2. In other words, the support device 4 moves on the support surface SS while maintaining the relative positions of the robot 1 and the measuring device 2. As a result, the measurement coordinate system, which is the coordinate system of the measuring device 2, is fixed relative to the robot 1. In particular, even when the robot 1 and the measuring device 2 move in conjunction with the movement of the support device 4, the measurement coordinate system of the measuring device 2 is fixed relative to the robot 1. As a result, once the alignment of the measurement coordinate system of the measuring device 2 and the robot coordinate system, which is the coordinate system of the robot 1, is completed by the initial setup operation, it is not necessary to realign the measurement coordinate system of the measuring device 2 and the robot coordinate system of the robot 1, even when the robot 1 and the measuring device 2 move in conjunction with the movement of the support device 4. Therefore, once a coordinate transformation matrix is ​​generated by the initial setup operation that converts the coordinates of either the measurement coordinate system or the robot coordinate system to the coordinates of the other, the control device 3 does not need to generate the coordinate transformation matrix again, even if the robot 1 and the measurement device 2 move in conjunction with the movement of the support device 4. If the support device 4 supports either the robot 1 or the measurement device 2 but not the other, the relative positions of the robot 1 and the measurement device 2 will change as the support device 4 moves. As a result, the control device 3 needs to generate a coordinate transformation matrix each time at least one of the robot 1 and the measurement device 2 moves. However, in this embodiment, the realignment of the measurement coordinate system and the robot coordinate system, including the regeneration of such a coordinate transformation matrix, is unnecessary. Therefore, after the robot operation shown in Figure 11 starts, the control device 3 does not need to realign the measurement coordinate system and the robot coordinate system. This reduces the operational load on the control device 3. Furthermore, the control device 3 will no longer need to obtain instructions from the user, which may be necessary in some cases for realigning the measurement coordinate system and the robot coordinate system.Therefore, if the user gives a single instruction to the robot system SYS to start the robot operation shown in Figure 10, the measurement of the shape of the workpiece W, including rough measurement and fine measurement (i.e., rough movement and fine measurement including scanning measurement), will be completed automatically. This makes it possible to create an all-in-one package for the robot system SYS that performs the robot operation. 【0200】 Furthermore, when the support device 4 supports both the robot 1 and the measuring device 2, the positional relationship between the robot 1's movement range and the measuring device 2's measurement range is fixed. Therefore, the control device 3 can easily identify from the measurement path at least one of the positions in which the robot 1 is positioned to perform an action and the posture the robot 1 takes within the measurement range of the measuring device 2. As a result, the control device 3 can identify at least one of the positions and postures of the robot 1 that satisfy the condition that the measuring member 16 provided on the robot 1 is included in the blind spot of the measuring device 2's measurement range. Therefore, the control device 3 can generate the above-described movement control information (e.g., measurement path) so as to satisfy the condition that the measuring member 16 provided on the robot 1 is included in the measurement range of the measuring device 2 (i.e., not included in the blind spot of the measurement range). As a result, the measuring device 2 can appropriately measure the position of the robot 1. 【0201】Furthermore, in this embodiment, the state of the support device 4 is switched to an unsupported state for at least a portion of the measurement period during which the measuring device 2 measures the position of the robot 1. Therefore, the possibility of vibrations from the support device 4 being transmitted to the measuring device 2 is reduced or eliminated for at least a portion of the measurement period. As a result, deterioration of the measurement accuracy of the measuring device 2 can be prevented. This is because if vibrations from the support device 4 are transmitted to the measuring device 2, the measuring device 2 will also vibrate, and as a result, the measurement accuracy of the measuring device 2 may deteriorate due to the vibrations of the measuring device 2. For this reason, compared to the case where the state of the support device 4 is not switched to an unsupported state for at least a portion of the measurement period (for example, it remains in the supported state), the measuring device 2 can measure the position of the robot 1 with higher accuracy. In other words, even when the support device 4 supports both the robot 1 and the measuring device 2, the measuring device 2 can measure the position of the robot 1 with high accuracy without being affected by vibrations from the support device 4. 【0202】(3-2) Technical Effects of Rough Measurement Operation and Fine Measurement Operation Furthermore, in this embodiment, the robot system SYS can measure the position of the workpiece W by rough measurement operation, and then perform a fine measurement operation to measure the shape of the workpiece W using the measurement head 15M based on the result of the rough measurement operation (i.e., the measurement result of the position of the workpiece W). In this case, the robot system SYS can generate a movement path of the tip arm member 123 (i.e., a movement path of the measurement head 15M) etc. so that the actual shape of the workpiece W can be appropriately measured using the measurement head 15M based on the actual position of the workpiece W measured by the rough measurement operation. For example, the robot system SYS can generate a movement path of the tip arm member 123 (i.e., a movement path of the measurement head 15M) etc. so that there are no measurement omissions by the measurement head 15M (i.e., missing point clouds that should be acquired). For example, the robot system SYS can generate a movement path of the tip arm member 123 (i.e., a movement path of the measurement head 15M) etc. so that the tip arm member 123 does not move unnecessarily long. For example, the robot system SYS can generate a movement path for the tip arm member 123 (i.e., the movement path for the measurement head 15M) so that the measuring member 16, which is measured by the measuring device 2 in parallel with the measurement of the shape of the workpiece W by the measuring head 15M, does not fall into the blind spot of the measurement range of the measuring device 2. 【0203】(3-3) Technical Effects of Step Movement and Scan Measurement Operation Furthermore, in this embodiment, the robot system SYS can alternately perform a step movement operation that moves the end-effector arm member 123 (and consequently moves the measurement head 15M) and a scan measurement operation that measures the shape of the workpiece W using the measurement head 15M. Therefore, the robot system SYS does not need to measure the shape of the workpiece W using the measurement head 15M in parallel with the movement of the end-effector arm member 123 during the period when the end-effector arm member 123 is being moved (and consequently the measurement head 15M is being moved). In other words, the robot system SYS can measure the shape of the workpiece W using the measurement head 15M during the period when the end-effector arm member 123 is not being moved (and consequently the measurement head 15M is not being moved). As a result, the possibility of the measurement head 15M vibrating due to the movement of the end-effector arm member 123 is reduced for at least a portion of the period during which the shape of the workpiece W is being measured using the measurement head 15M. Therefore, it is possible to prevent deterioration of the measurement accuracy of the measurement head 15M caused by vibration of the measurement head 15M (in effect, vibration of the tip arm member 123). 【0204】 Furthermore, in this embodiment, the robot system SYS can start the scan measurement operation after the first measurement start condition is met, which is that the vibration of the tip arm member 123, which has been moved by the step movement operation, has subsided. Therefore, deterioration of the measurement accuracy of the measurement head 15M due to vibration of the tip arm member 123 can be prevented. As a result, deterioration of the calculation accuracy of the shape of the workpiece W can be prevented. 【0205】 Furthermore, in this embodiment, the robot system SYS can calculate the shape of the workpiece W based on the measurement results of the measurement head 15M during the period when the vibration of the tip arm member 123, which has been moved by the step movement operation, has subsided. In this case as well, as in the case where the scan measurement operation is started after the first measurement start condition described above is met, it is possible to prevent deterioration of the accuracy of calculating the shape of the workpiece W. 【0206】Furthermore, in this embodiment, the control device 3 can calculate the position of the tip arm member 123 based on the time-averaged measurement result of the measuring device 2. As a result, as described above, compared to the case where the measurement result of the measuring device 2 itself is used, the degree of deterioration in the accuracy of calculating the position of the tip arm member 123 due to vibration of the tip arm member 123 (and, as described above, vibration of the measuring device 2 itself) can be reduced. 【0207】 (3-4) Technical Effects of Pseudo-Stereo Imaging Operation Furthermore, in this embodiment, the robot system SYS may use an imaging device 17, which is a monocular camera, to image the workpiece W from each of a plurality of different imaging positions. In other words, the robot system SYS may generate multiple workpiece images equivalent to a stereo image by performing a pseudo-stereo imaging operation. In this case, compared to the case in which multiple workpiece images equivalent to a stereo image are generated by imaging the workpiece W using a stereo camera, the robot system SYS can change at least one of the baseline length and baseline direction of a stereo camera substantially realized using a monocular camera by adjusting a plurality of different imaging positions. For example, the robot system SYS can change at least one of the baseline length and baseline direction so that it can appropriately image the workpiece W based on at least one of the position, shape, and size of the workpiece W imaged by the imaging device 17 (as a result, an appropriate stereo image is generated). Furthermore, in this embodiment, since the position and orientation of the imaging device 17 can be measured by the measuring device 2, it is possible to accurately determine at least one of the baseline length and baseline direction of a stereo camera substantially realized using a monocular camera. 【0208】 (4) Modifications Next, we will explain modifications of the robot system SYS. 【0209】(4-1) Modifications of the Robot Arm 12 In the above description, the end effector 15 is attached to the robot arm 12 via the base 13 and the mobile device 14 (or via the mobile device 14). Here, the robot arm 12 is an example of a manipulator that can be driven (in other words, moved) using a desired power, as described above. In this case, the end effector 15 may be attached to any manipulator different from the robot arm 12 via the base 13 and the mobile device 14 (or via the mobile device 14). An example of any manipulator different from the robot arm 12 is an automated guided vehicle which is at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). An example of any manipulator different from the robot arm 12 is an unmanned aerial vehicle such as a drone. An example of any manipulator different from the robot arm 12 is the gantry 19 shown in Figure 19. The robot arm 12 described above was a manipulator with a vertical multi-joint structure equipped with rotary or swivel arm joints, but the gantry 19 in Figure 19 is a Cartesian coordinate type manipulator equipped with sliding joints. As shown in Figure 19, the gantry 19 may be equipped with a pair of support frames 191. Each of the pair of support frames 191 may be a member extending along the Z axis (G). The pair of support frames 191 are positioned at separate locations on the support surface SS along at least one of the X axis (G) and Y axis (G). Furthermore, the gantry 19 may be equipped with a pair of slider members 192 and an actuator 193. The pair of slider members 192 are each attached to the pair of support frames 191 so as to be movable along the pair of support frames 191 using the power of the actuator 193. A moving device 14 is attached to the pair of slider members 192. Alternatively, the moving device 14 is attached to the pair of slider members 192 via a base 13. In this case, the moving device 14 can move along the pair of support frames 191 (i.e., along the Z-axis (G)) in accordance with the movement of the slider member 192.The end effector 15 is attached to a movable member (not shown) of the moving device 14, and the end effector 15 is movable along the translation axis of the moving device 14 (for example, along the Y axis (G)). 【0210】 In this case, the measuring member 16 may be attached to at least one of the support frame 191, the slider member 192, and the end effector 15. In this case, the measuring device 2 may measure the position of at least one of the support frame 191 and the slider member 192 as the position of the gantry 19 by measuring the measuring member 16 provided on at least one of the support frame 191 and the slider member 192. Alternatively, the measuring device 2 may measure the position of the end effector 15 by measuring the measuring member 16 provided on the end effector 15. 【0211】 (4-2) Modifications of the Moving Device 14 The above description describes an example in which the moving device 14 is capable of moving the measuring head 15M along a predetermined translation axis (i.e., moving it linearly). However, in addition to or instead of moving the measuring head 15M along a predetermined translation axis, the moving device 14 may also be capable of rotating the end effector 15 around a predetermined rotation axis (i.e., rotating it). In other words, the moving device 14 may also be capable of moving the end effector 15 along a rotational direction around a rotation axis (i.e., rotating it). For example, the moving device 14 may be capable of rotating the end effector 15 around a first rotation axis. For example, in addition to or instead of rotating the end effector 15 around a first rotation axis, the moving device 14 may also be capable of rotating the end effector 15 around a second rotation axis that intersects (typically orthogonal to) the first rotation axis and is different from the first rotation axis. For example, the moving device 14 may, in addition to or instead of rotating the end effector 15 around at least one of the first and second rotation axes, also be capable of rotating the end effector 15 around a third rotation axis that intersects (typically perpendicular to) the first and second rotation axes and is different from the first and second rotation axes. 【0212】The axis of rotation may be an axis determined with respect to the robot arm 12 (e.g., end-effector arm member 123) to which the moving device 14 is attached. In other words, the axis of rotation may be an axis fixed to the robot arm 12 (e.g., end-effector arm member 123) to which the moving device 14 is attached. For example, the moving device 14 may be capable of rotating the end effector 15 around a first axis of rotation which is the X-axis (R) of the end-effector coordinate system. For example, in addition to or instead of rotating the end effector 15 around the first axis of rotation, the moving device 14 may be capable of rotating the end effector 15 around a second axis of rotation which is the Y-axis (R) of the end-effector coordinate system. For example, in addition to or instead of rotating the end effector 15 around at least one of the first and second axes of rotation, the moving device 14 may be capable of rotating the end effector 15 around a third axis of rotation which is the Z-axis (R) of the end-effector coordinate system. 【0213】 As an example, Figure 20 shows an example in which the moving device 14 is capable of rotating the end effector 15 around a rotation axis along the Y-axis (R) of the end-effector coordinate system. In this case, as shown in Figure 20, the moving device 14 may be equipped with a drive system 143 capable of rotating the end effector 15 around a rotation axis along the Y-axis (R). The drive system 143 may include a pair of support frames 1431, a rotating shaft 1432, and an actuator (in other words, a motor) 1433. The pair of support frames 1431 support the end effector 15 from both sides along the Y-axis (R). The rotating shaft 1432 is an axis that can rotate around the Y-axis (R) relative to the pair of support frames 1431 using the power of the actuator 1433. The end effector 15 is attached to the rotating shaft 1432. As a result, when the rotating shaft 1432 rotates around the Y-axis (R), the end effector 15 attached to the rotating shaft 1432 also rotates around the Y-axis (R). Note that the robot 1 does not necessarily have a moving device 14. In this case, the end effector 15 may be attached to the tip arm member 123. 【0214】(4-3) Modified Examples of the Measuring Member 16 In the above description, the measuring member 16 is a reflective member that reflects light (measuring light ML2) incident on the measuring member 16. However, a member other than the reflective member may be used as the measuring member 16. For example, the measuring member 16 may be a signal output device capable of outputting a signal. In this case, the measuring device 2 may include a receiving device that can receive the signal output by the measuring member, which functions as a signal output device, as information regarding the position of the measuring member 16. The control device 3 may calculate the position of the measuring member 16 based on the signal reception result by the receiving device. 【0215】 (4-4) Modified Images of the Imaging Device 17 In the above description, the robot system SYS uses the imaging device 17 to measure the position of the workpiece W during rough measurement. However, the robot system SYS may use a measuring device different from the imaging device 17 to measure the position of the workpiece W during rough measurement. An example of a measuring device capable of measuring the position of the workpiece W is at least one of a TOF (Time Of Flight) sensor, a line sensor, and an interferometer. In this case, the robot 1 may be equipped with a measuring device capable of measuring the position of the workpiece W in addition to or instead of the imaging device 17. The imaging device 17 may include three or more monocular cameras, and may also be at least one of a light field camera, a plenooptic camera, a multispectral camera, a depth camera such as a TOF camera or an RGB-D camera, or a monocular or stereo camera combined with a structured light projection device. When using such an imaging device 17, it is not necessary to perform pseudo-stereo imaging during rough measurement. Furthermore, even when using a monocular camera as in the imaging device 17 of the above embodiment, it is not necessary to perform pseudo-stereo imaging during the rough measurement operation. Also, when using a line sensor as a measurement device different from the imaging device 17, a line sensor with a working distance longer than the working distance of the measurement head 15M may be used. Furthermore, the measurement head 15M may be used for the rough measurement operation. In this way, the rough measurement operation can be performed using a method different from the pseudo-stereo imaging operation. 【0216】(4-5) Modified Examples of the Support Device 4 (4-5-1) First Modified Example of the Support Device 4 First, a first modified example of the support device 4 will be described with reference to Figures 21A and 21B. Figure 21A is a cross-sectional view showing the configuration of the support device 4 (particularly the support device 4 in the supported state) in the first modified example, and Figure 21B is a cross-sectional view showing the configuration of the support device 4 (particularly the support device 4 in the unsupported state) in the first modified example. In the following description, the support device 4 in the first modified example will be referred to as the support device 4a. 【0217】 As shown in Figures 21A to 21B, the support device 4a in the first modified example may differ from the support device 4 described above in that, in addition to the support members 41 and 42, it further includes a connecting member 46a. Other features of the support device 4a may be the same as other features of the support device 4. 【0218】 The connecting member 46a is a member capable of connecting the support device 4a and the measuring device 2. In other words, in the first modified example, the support device 4a and the measuring device 2 can be connected via the connecting member 46a. In the example shown in Figures 21A to 21B, the connecting member 46a is a member capable of connecting the support member 41 of the support device 4a and the measuring device 2. In other words, in the example shown in Figures 21A to 21B, the support member 41 and the measuring device 2 can be connected via the connecting member 46a. 【0219】The connecting member 46a may be a member that supports the measuring device 2 by connecting the support device 4a and the measuring device 2. In this case, the connecting member 46a may be called a support member. In the first modified example, the support device 4 may support the measuring device 2 using the connecting member 46a in addition to being able to support the measuring device 2 using the support member 42. However, the connecting member 46a may connect the support device 4a (for example, the support member 41) and the measuring device 2 in both the state when the support device 4a is in a supported state and the state when the support device 4a is in a non-supported state. In other words, in the first modified example, the support device 4a in a supported state may support the measuring device 2 using the support member 42 and the connecting member 46a. On the other hand, the support device 4a in a non-supported state may support the measuring device 2 using the connecting member 46a without using the support member 42. For this reason, compared to the case where the measuring device 2 is not supported by the connecting member 46a, the possibility of the measuring device 2 becoming stable is higher, especially when the state of the support device 4a is switched to a non-supported state. 【0220】 Thus, in the first modified example, the supported state includes a state in which the support device 4a supports the measuring device 2 using the support member 42 and the connecting member 46a, and the unsupported state may include a state in which the support device 4a does not support the measuring device 2 using the support member 42 but supports the measuring device 2 using the connecting member 46a. The supported state includes a state in which the support member 42 and the connecting member 46a are connected to the measuring device 2, and the unsupported state may include a state in which the support member 42 is not connected to the measuring device 2 but the connecting member 46a is connected to the measuring device 2. The supported state includes a state in which the support member 42 and the connecting member 46a are in physical contact with the measuring device 2, and the unsupported state may include a state in which the support member 42 is not in physical contact with the measuring device 2 but the connecting member 46a is in physical contact with the measuring device 2. 【0221】Vibrations occurring in the support device 4a when it is in a supported state may be transmitted to the measuring device 2 via the support member 42 and the connecting member 46a. On the other hand, vibrations occurring in the support device 4a when it is not in a supported state may be transmitted to the measuring device 2 via the connecting member 46a, while vibrations occurring in the support device 4a when it is not in a supported state are not transmitted to the measuring device 2 via the support member 42. Therefore, in the first modified example, the transmission path through which vibrations from the support device 4 when it is not in a supported state are transmitted to the measuring device 2 is smaller than the transmission path through which vibrations from the support device 4 when it is in a supported state are transmitted to the measuring device 2. Therefore, the magnitude of vibrations transmitted from the support device 4 when it is not in a supported state to the measuring device 2 via the connecting member 46a is smaller than the magnitude of vibrations transmitted from the support device 4 when it is in a supported state to the measuring device 2 via the support member 42 and the connecting member 46a. Therefore, for at least a portion of the measurement period during which the measuring device 2 measures the position of the robot 1, the degree to which the deterioration of the measurement accuracy of the measuring device 2 due to vibrations of the support device 4 is reduced can be reduced. 【0222】 Thus, in the first modified example, the supported state includes a state in which vibrations of the support device 4a are transmitted to the measuring device 2 via the support member 42 and the connecting member 46a, and the unsupported state may include a state in which vibrations of the support device 4a are not transmitted to the measuring device 2 via the support member 42, but are transmitted to the measuring device 2 via the connecting member 46a. 【0223】The elastic modulus (e.g., Young's modulus) of the connecting member 46a may be smaller than that of the support member 42. In this case, the magnitude of vibration transmitted from the support device 4 to the measuring device 2 via the connecting member 46a will be smaller than the magnitude of vibration transmitted from the support device 4 to the measuring device 2 via the support member 42. This is because vibrations transmitted from the support device 4 to the connecting member 46a are relatively easily attenuated by the connecting member 46a, which has a relatively small elastic modulus, while vibrations transmitted from the support device 4 to the support member 42 are relatively less easily attenuated by the support member 42, which has a relatively large elastic modulus. Therefore, the magnitude of vibration transmitted from the unsupported support device 4 to the measuring device 2 via the connecting member 46a will be even smaller than the magnitude of vibration transmitted from the supported support device 4 to the measuring device 2 via the support member 42 and the connecting member 46a. As a result, the degree of deterioration in the measurement accuracy of the measuring device 2 due to vibrations of the support device 4 can be further reduced, at least for a portion of the measurement period during which the measuring device 2 measures the position of the robot 1. 【0224】 From the viewpoint of achieving the technical effect of reducing the degree of deterioration in the measurement accuracy of the measuring device 2 due to vibration of the support device 4 during at least a portion of the measurement period in which the measuring device 2 measures the position of the robot 1, the magnitude of vibration transmitted from the support device 4 in an unsupported state to the measuring device 2 may be set to a magnitude that enables a state in which the measurement accuracy of the measuring device 2 due to vibration of the support device 4 exceeds a predetermined allowable accuracy. For example, the magnitude of vibration transmitted from the support device 4 in an unsupported state to the measuring device 2 may be set to be below a predetermined allowable vibration amount. On the other hand, the magnitude of vibration transmitted from the support device 4 in a supported state to the measuring device 2 may be set to be above a predetermined allowable vibration amount. The predetermined allowable vibration amount may be set to a desired value that allows for distinction from the state in which the measurement accuracy of the measuring device 2 due to vibration of the support device 4 exceeds a predetermined allowable accuracy and the state in which the measurement accuracy of the measuring device 2 due to vibration of the support device 4 falls below a predetermined allowable accuracy, based on the magnitude of vibration transmitted to the measuring device 2. 【0225】If the elastic modulus of the connecting member 46a changes, the magnitude of vibration transmitted from the unsupported support device 4 to the measuring device 2 via the connecting member 46a changes. For this reason, the elastic modulus of the connecting member 46a may be set so that the magnitude of vibration transmitted from the unsupported support device 4 to the measuring device 2 is below a predetermined allowable vibration level. A connecting member 46a having a desired elastic modulus may be used so that the magnitude of vibration transmitted from the unsupported support device 4 to the measuring device 2 is below a predetermined allowable vibration level. 【0226】 The connecting member 46a may include an elastic body (elastic member). Examples of elastic bodies include at least one of rubber and a spring. Another example of an elastic body is a bellows. 【0227】 Thus, in the first modified example, the magnitude of vibration transmitted from the support device 4 in the unsupported state to the measuring device 2 via the connecting member 46a is smaller than the magnitude of vibration transmitted from the support device 4 in the supported state to the measuring device 2 via the support member 42 and the connecting member 46a. For this reason, in the first modified example, the support device 4 may be considered to change the magnitude of vibration transmitted from the support device 4 to the measuring device 2 by switching the state of the support device 4 between a supported state and an unsupported state. In this case, the supported state may include a state in which vibration of a first magnitude is transmitted from the support device 4 to the measuring device 2, and the unsupported state may include a state in which vibration of a second magnitude smaller than the first magnitude is transmitted from the support device 4 to the measuring device 2. The supported state may include a state in which the magnitude of vibration transmitted from the support device 4 to the measuring device 2 exceeds a predetermined allowable vibration amount, and the unsupported state may include a state in which the magnitude of vibration transmitted from the support device 4 to the measuring device 2 is below a predetermined allowable vibration amount. 【0228】(4-5-2) Second Modified Example of Support Device 4 Next, a second modified example of the support device 4 will be described with reference to Figures 22A to 22B. Figure 22A is a cross-sectional view showing the configuration of the support device 4 (particularly the support device 4 in the supported state) in the second modified example, and Figure 22B is a cross-sectional view showing the configuration of the support device 4 (particularly the support device 4 in the unsupported state) in the second modified example. In the following description, the support device 4 in the second modified example will be referred to as support device 4b. 【0229】 As shown in Figures 22A to 22B, the support device 4b in the second modified example may differ from at least one of the support devices 4 and 4a described above in that it may not include a support member 42. Other features of the support device 4b may be the same as other features of at least one of the support devices 4 and 4a. 【0230】In the second modification, the support device 4b may support the measuring device 2 using the support member 24 provided by the measuring device 2, instead of using the support member 42 provided by the support device 4 or 4a. For this reason, in the second modification, the measuring device 2 may further include the support member 24. For example, the measuring device 2 may switch the state of the support device 4b between the supported state shown in Figure 22A and the unsupported state shown in Figure 22B by moving the support member 24 using the power generated by the actuator 25 provided by the measuring device 2. As a first example, the measuring device 2 may switch the state of the support device 4b between a supported state in which the support device 4 supports the measuring device 2 using the support member 24 and an unsupported state in which the support device 4 does not support the measuring device 2 using the support member 24 by moving the support member 24. As a second example, the measuring device 2 may switch the state of the support device 4b between a supported state in which the support device 4 is connected to the support member 24 and an unsupported state in which the support device 4 is not connected to the support member 24 by moving the support member 24. As a third example, the measuring device 2 may switch the state of the support device 4b between a supported state in which the support device 4 is in physical contact with the support member 24 and an unsupported state in which the support device 4 is not in physical contact with the support member 24 by moving the support member 24. As a fourth example, the measuring device 2 may switch the state of the support device 4b between a supported state in which vibrations generated in the support device 4 are transmitted to the measuring device 2 via the support member 24 and an unsupported state in which vibrations generated in the support device 4 are not transmitted to the measuring device 2 via the support member 24 by moving the support member 24. In the second modified example, the measuring device 2 does not need to be equipped with an actuator 25. In this case, the support member 24 may be moved by the operator's manual power. The various effects described above can also be enjoyed in this second modified example. 【0231】(4-5-3) Other Modifications of the Support Device 4 As described above, the measuring device 2 may be positioned on the support device 4 such that the positional relationship between the measuring device 2 and the support device 4 (for example, support member 41 or 42, hereinafter the same in this paragraph) is a predetermined positional relationship. However, the positional relationship between the measuring device 2 positioned on the support device 4 (i.e., the measuring device 2 supported by the support device 4) and the support member 42 may be changeable. For example, the support device 4 may change the positional relationship between the measuring device 2 supported by the support device 4 and the support device 4 by moving at least one support member 42 that supports the measuring device 2 under the control of the control device 3. Also, if the positional relationship between the measuring device 2 supported by the support device 4 and the support device 4 is changeable, the measuring device 2 may be positioned on the support device 4 such that the positional relationship between the measuring device 2 and the support device 4 is one of a plurality of predetermined positional relationships. In this case, the information regarding one positional relationship (i.e., information regarding the actual positional relationship between the measuring device 2 and the support device 4) may be known information to the control device 3. 【0232】 As mentioned above, the measuring device 2 may be positioned on the support device 4 such that the attitude relationship between the measuring device 2 and the support device 4 (for example, a support member 41 or 42, hereinafter the same in this paragraph) is a predetermined attitude relationship. However, the attitude relationship between the measuring device 2 positioned on the support device 4 (i.e., the measuring device 2 supported by the support device 4) and the support member 42 may be changeable. For example, the support device 4 may change the attitude relationship between the measuring device 2 supported by the support device 4 and the support device 4 by moving at least one support member 42 that supports the measuring device 2 under the control of the control device 3. Also, if the attitude relationship between the measuring device 2 supported by the support device 4 and the support device 4 is changeable, the measuring device 2 may be positioned on the support device 4 such that the attitude relationship between the measuring device 2 and the support device 4 is one of a plurality of predetermined attitude relationships. In this case, the information regarding one of the attitude relationships (i.e., the information regarding the actual attitude relationship between the measuring device 2 and the support device 4) may be known information to the control device 3. 【0233】(4-6) Other Modifications In the above description, the control device 3 uses the measurement results of the measuring device 2 to determine whether the vibration of the end arm member 123 that has finished moving has subsided. For example, as shown in Figure 14 above, the control device 3 determines that the vibration of the end arm member 123 that has finished moving has subsided when the amount of variation in the measurement results of the measuring device 2 (including calculated values ​​such as distance and position calculated from the measurement results of the measuring device 2) is below a predetermined first allowable amount. However, if the robot system SYS is equipped with a vibration sensor capable of detecting vibrations of the robot arm 12 (especially the end arm member 123), the control device 3 may use the measurement results of the vibration sensor to determine whether the vibration of the end arm member 123 that has finished moving has subsided. For example, the control device 3 may determine that the vibration of the end arm member 123 that has finished moving has subsided when the vibration measured by the vibration sensor (e.g., the amount of variation in position) is below a predetermined first allowable amount. Examples of vibration sensors include at least one of a speed sensor, acceleration sensor, angular velocity sensor, angular acceleration sensor, and gyro sensor. In the above description, the control device 3 starts measuring the shape of the workpiece W with the measuring head 15M after the vibration of the end arm member 123 has subsided after it has finished moving. However, the control device 3 may start measuring the shape of the workpiece W with the measuring head 15M while the end arm member 123 is still vibrating after it has finished moving. In this case, the shape measurement result of the workpiece W with the measuring head 15M may be corrected based on the vibration measurement result of the end arm member 123. In particular, the control device 3 may perform shape measurement of the workpiece W with the measuring head 15M when the vibration of the end arm member 123 has subsided to a certain extent after it has finished moving, and correct the shape measurement result based on the vibration measurement result. Here, the state of "the vibration of the end arm member 123 has subsided to a certain extent" may mean a state in which the vibration of the end arm member 123 is below a predetermined allowable amount. This predetermined allowable amount may be determined based on the range of vibration in which the shape measurement result can be corrected by the vibration measurement result. This predetermined allowable amount may be greater than the first and second allowable amounts described above.Here, the vibration amount may include vibration amounts in at least one of the roll, pitch, and yaw directions. Each of roll, pitch, and yaw may, for example, mean rotation around the X axis, rotation around the Y axis, and rotation around the Z axis. Therefore, the vibration amount may include rotational amounts around a predetermined axis. Also, the vibration amount may, for example, mean displacement along the X axis, displacement along the Y axis, and displacement along the Z axis. Therefore, the vibration amount may include displacement amounts along a predetermined axis. When the tip arm member 123, and by extension the measuring head 15M, is vibrating, the correspondence between the head coordinate system based on the measuring head 15M and the measuring coordinate system determined based on the measuring device 2 will change. Therefore, the operation to correct the shape measurement result with the vibration measurement result may include an operation to dynamically change the correspondence between the head coordinate system and the measuring coordinate system based on the vibration measurement result, i.e., the dynamic change in the displacement amount in the direction along at least one of the X, Y, and Z axes and the rotational displacement amount around at least one of the X, Y, and Z axes. In other words, the operation of correcting the shape measurement result with the vibration measurement result may include an operation of dynamically changing the coordinate transformation matrix that converts the coordinates of either the measurement coordinate system or the head coordinate system to the coordinates of the other of the measurement coordinate system or the head coordinate system. In this way, when at least a portion of the period during which the tip arm member 123 has finished moving is vibrating and at least a portion of the period during which the shape of the workpiece W is measured by the measurement head 15M overlaps at least partially, the shape of the workpiece W can be calculated more quickly and accurately by correcting the shape measurement result with the vibration measurement result. Although the above description concerns the correction of the shape measurement result during vibration of the tip arm member 123, the same can be said for the correction of the shape measurement result during vibration of the measurement head 15M as the end effector 15 and the correction of the shape measurement result during vibration of the measurement member 16. That is, just as with the correction of the shape measurement result during vibration of the tip arm member 123, the shape measurement result may be corrected during vibration of the measurement head 15M as the end effector 15, or the shape measurement result may be corrected during vibration of the measurement member 16.Furthermore, vibrations of the tip arm member 123, the measuring head 15M, etc., may be measured using the measuring device 2 and a vibration sensor. In the above description, the operation of measuring the position of the workpiece W using the imaging device 17 is referred to as the rough measurement operation, and the operation of measuring the shape of the workpiece W using the measuring head 15M is referred to as the fine measurement operation. Here, since the rough measurement operation is an operation to measure the position of the workpiece W, the rough measurement operation may also be referred to as the position measurement operation. Since the fine measurement operation is an operation to measure the shape of the workpiece W, the fine measurement operation may also be referred to as the shape measurement operation. Also, since the rough measurement operation and the fine measurement operation are different types of measurement operations, the rough measurement operation and the fine measurement operation may be referred to as the first measurement operation and the second measurement operation, respectively. In the above description, the control device 3 generated workpiece shape information indicating the shape of the workpiece W after the measurement operation was completed. However, the control device 3 may generate workpiece shape information indicating the shape of the workpiece W during the measurement operation. Also, the control device 3 may generate robot control signals during the measurement operation. 【0234】(5) Addendums The following addendums are disclosed in relation to the embodiments described above. [Addendum 1] A robot system comprising: a manipulator; a first measuring device attached to the movable part of the manipulator and capable of measuring the shape of an object; a second measuring device capable of measuring the position of the movable part; and a control device, wherein the control device performs movement control to move the movable part so that the first measuring device is positioned at a desired position; determines whether the first measuring device is positioned at the desired position based on the time average value of the second measuring result by the second measuring device; and controls the first measuring device to measure the shape of an object when it is determined that the first measuring device is positioned at the desired position. [Addendum 2] The robot system according to Addendum 1, wherein the control device calculates the position of the movable part based on the time average value of the second measuring result; determines whether the first measuring device is positioned at the desired position based on the calculation result of the position of the movable part. [Note 3] The robot system according to Note 1 or 2, wherein the control device uses the time average value of the second measurement result as the measurement result of the position of the movable part by the second measuring device. [Note 4] The robot system according to any one of Notes 1 to 3, wherein after the control device has completed the movement control, the second measuring device measures the position of the movable part, and the control device determines whether the first measuring device is in the desired position based on the time average value of the second measurement result acquired after the control device has completed the movement control. [Note 5] The robot system according to any one of Notes 1 to 4, wherein the control device controls the first measuring device to measure the shape of the object after the amount of variation of the second measurement result falls below a predetermined allowable amount. [Note 6] The robot system according to Note 5, wherein after the control device has completed the movement control, the second measuring device measures the position of the movable part, and after the amount of variation of the second measurement result acquired after the control device has completed the movement control falls below the predetermined allowable amount, the first measuring device measures the shape of the object.[Note 7] The robot system according to any one of Notes 1 to 6, wherein the control device calculates the shape of the object based on the first measurement result obtained by the first measuring device. [Note 8] The robot system according to Note 7, wherein the control device calculates the shape of the object based on the first measurement result obtained during a period in which the amount of variation of the second measurement result is below a predetermined tolerance. [Note 9] The robot system according to Note 7 or 8, wherein after the control device has completed the movement control, the second measuring device measures the position of the movable part, and the first measuring device measures the shape of the object, and the control device calculates the shape of the object based on the first measurement result obtained during a period in which the amount of variation of the second measurement result obtained after the control device has completed the movement control is below a predetermined tolerance. [Note 10] The robot system according to any one of Notes 1 to 9, further comprising a third measuring device attached to the movable part and capable of measuring the object, wherein the control device controls the first measuring device to measure the shape of the object based on the second measurement result and the third measurement result obtained by the third measuring device. 【0235】 At least some of the constituent elements of each embodiment described above can be appropriately combined with at least some other constituent elements of each embodiment described above. Some of the constituent elements of each embodiment described above may not be used. Furthermore, to the extent permitted by law, all of the published patents and U.S. patent disclosures cited in each embodiment described above shall be incorporated into the text. 【0236】 The present invention is not limited to the embodiments described above, and can be modified as appropriate without contradicting the gist or idea of ​​the invention as can be read from the claims and specification as a whole. Robot systems with such modifications are also included in the technical scope of the present invention. 【0237】SYS Robot System 1 Robot 12 Robot Arm 123 End Arm Member 14 Moving Device 15 End Effector 15M Measurement Head 16 Measurement Member 2 Measurement Device 21 Base 22 Housing 23 Measurement Optical System 3 Control Device 31 Calculation Unit 32 Memory Device 4 Support Device 40 Drive System 401 Wheel 402 Power Source 403 Support Members 41, 42 Support Members 43, 44 Actuator 45 Support Member W Workpiece SS Support Surface ML1, ML2 Measurement Light RL1, RL2 Reflection Light

Claims

1. A robot system comprising: a manipulator; a first measuring device attached to the manipulator as an end effector and capable of measuring the shape of an object; a second measuring device capable of measuring the position of the movable part of the manipulator; a third measuring device attached to the movable part and capable of measuring the object; and a control device, wherein the control device controls the first measuring device based on the second measurement result from the second measuring device and the third measurement result from the third measuring device.

2. The robot system according to claim 1, wherein the control device controls the first measuring device to measure the shape of the object based on the second measurement result and the third measurement result.

3. The robot system according to claim 1 or 2, wherein the control device performs movement control to move the movable part of the manipulator based on the second measurement result and the third measurement result, causing the first measuring device to measure the shape of the object.

4. The robot system according to any one of claims 1 to 3, wherein the control device generates movement control information for performing movement control to move the movable part of the manipulator based on the second measurement result and the third measurement result.

5. The robot system according to claim 4, wherein the control device generates positional information of the object in the measurement coordinate system of the second measuring device based on a design model showing the three-dimensional shape of the object and a measurement model obtained from the second measurement result and the third measurement result.

6. The robot system according to claim 5, wherein the control device generates the movement control information based on the position information of the object.

7. The robot system according to any one of claims 1 to 6, wherein the second measuring device measures the position of the movable part during a first measurement period in which the third measuring device measures the object, and the control device controls the first measuring device to measure the shape of the object based on the third measurement result and the second measurement result obtained during the first measurement period.

8. The robot system according to any one of claims 1 to 7, wherein the control device generates movement control information relating to the movement path of the movable part during a second measurement period in which the first measuring device measures the object, based on the second measurement result and the third measurement result, and during the second measurement period, the control device moves the movable part along the generated movement path, and the first measuring device measures the shape of the object.

9. The robot system according to claim 8, wherein the second measuring device measures the position of the movable part during a first measurement period in which the third measuring device measures the object, and during a second measurement period in which the first measuring device measures the object; the control device calculates the position of the movable part during the first measurement period in a measurement coordinate system determined with reference to the second measuring device based on the second measurement result obtained in the first measurement period; generates movement control information relating to the movement path in the measurement coordinate system based on the calculation result of the position of the movable part during the first measurement period in the measurement coordinate system and the third measurement result; calculates the position of the movable part during the second measurement period in the measurement coordinate system based on the second measurement result obtained in the second measurement period; and moves the movable part along the generated movement path based on the calculation result of the position of the movable part during the second measurement period in the measurement coordinate system.

10. The robot system according to any one of claims 1 to 9, wherein the second measuring device measures the position of the movable part during a second measurement period in which the first measuring device measures the object, and the control device calculates the shape of the object based on the first measurement result by the first measuring device and the second measurement result obtained during the second measurement period.

11. A robot system comprising: a manipulator; a first measuring device attached to the movable part of the manipulator and capable of measuring the shape of an object; a second measuring device capable of measuring the position of the movable part; and a control device, wherein the control device performs movement control on the manipulator to move the movable part so that the first measuring device is positioned at the measurement position; and initiates a shape measurement operation to measure the shape of the object using the first measuring device based on the position measurement result of the movable part by the second measuring device.

12. The robot system according to claim 11, wherein the control device initiates the shape measurement operation by the first measuring device based on information regarding the variation in the position measurement result of the movable part by the second measuring device.

13. The robot system according to claim 11 or 12, wherein the control device uses the time average value of the position measurement result as the measurement result of the position of the movable part by the second measuring device.

14. The robot system according to any one of claims 11 to 13, wherein after the control device has completed the movement control, the second measuring device measures the position of the movable part, and the control device determines whether or not the first measuring device is located at the measurement position based on the time average value of the position measurement result obtained after the control device has completed the movement control.

15. The robot system according to any one of claims 11 to 14, wherein the control device uses the amount of variation in the position measurement result as information relating to the variation in the position measurement result, and controls the first measuring device to measure the shape of the object after the amount of variation falls below a predetermined allowable amount.

16. The robot system according to claim 15, wherein after the control device has completed the movement control, the second measuring device measures the position of the movable part, and after the amount of variation in the position measurement result obtained after the control device has completed the movement control falls below a predetermined allowable amount, the first measuring device measures the shape of the object.

17. The robot system according to any one of claims 11 to 16, wherein the control device calculates the shape of the object based on the first measurement result from the first measuring device.

18. The robot system according to claim 17, wherein the control device calculates the shape of the object based on the first measurement result obtained during a period in which the amount of variation of the position measurement result is below a predetermined allowable amount.

19. The robot system according to claim 17 or 18, wherein, after the control device has completed the movement control, the second measuring device measures the position of the movable part, and the first measuring device measures the shape of the object, and the control device calculates the shape of the object based on the first measuring result obtained during a period in which the amount of variation of the position measurement result obtained after the control device has completed the movement control is below a predetermined allowable amount.

20. The robot system according to any one of claims 11 to 19, further comprising a third measuring device attached to the movable part and capable of measuring the object, wherein the control device controls the first measuring device to measure the shape of the object based on the position measurement result and the third measurement result from the third measuring device.

21. The robot system according to any one of claims 11 to 20, wherein the control device does not operate the manipulator for at least a portion of the period during which the shape measurement operation by the first measuring device is performed.

22. A robot system comprising: a manipulator; a first measuring device attached to the movable part of the manipulator and capable of measuring the shape of an object; a second measuring device capable of measuring the position of the movable part; and a control device, wherein the control device performs movement control on the manipulator to move the movable part so that the first measuring device is positioned at the measurement position; causes the first measuring device to perform a shape measurement operation to measure the shape of the object; and processes the shape measurement result obtained by the shape measurement operation based on the position measurement result of the movable part by the second measuring device.

23. The robot system according to claim 22, wherein the control device processes the shape measurement result based on information regarding the variation in the position measurement result of the movable part by the second measuring device.

24. The robot system according to claim 22 or 23, wherein the processing of the shape measurement results is a process of extracting a part of the shape measurement results.

25. The robot system according to any one of claims 22 to 24, wherein the processing of the shape measurement result is a processing that modifies the shape measurement result.

26. The robot system according to any one of claims 1 to 10 and 20, wherein the first measuring device includes a scanning device capable of measuring the shape of an object by scanning at least a portion of the surface of the object with measuring light, and the third measuring device includes an imaging device capable of imaging the object.

27. A robot system comprising a manipulator, a scanning device attached to the movable part of the manipulator and capable of measuring the shape of an object by scanning at least a portion of the object's surface with measuring light, and an imaging device attached to the movable part and capable of imaging the object.

28. The robot system according to claim 26 or 27, wherein the imaging device is a monocular camera.

29. The robot system according to any one of claims 26 to 28, wherein the position of the imaging device is changed by the manipulator to capture multiple images of at least a part of the object, and the multiple images are captured such that the imaging ranges of two or more of the multiple images overlap each other.

30. The robot system according to claim 29, which calculates the position of an object from the multiple images.

Images