Robot operation path generation method, robot operation path generation device, and robot operation path generation program

Abstract

This operation path generation method for a substrate transfer robot (10) causes a display unit (220) to display, in an identifiable manner, timing (221a) on an operation path (OP) at which the dimension of a gap (G) between a placement region (20) and at least one of the robot (10) and a workpiece (W) on the operation path (OP) is smaller than a prescribed distance, in integrated data (ID) in which robot CAD data (CD1), placement region CAD data (CD2), and workpiece CAD data (CD3) are integrated together; the integrated data (ID) being used for deriving the operation path (OP) of the substrate transfer robot (10) in the placement region (20); the placement region (20) being a region the substrate transfer robot (10) and the workpiece (W) are placed.

Description

Method for generating operation path of robot, apparatus for generating operation path of robot, and program for generating operation path of robot 【0001】 This disclosure relates to a method for generating an operation path of a robot, an apparatus for generating an operation path of a robot, and a program for generating an operation path of a robot. 【0002】 Conventionally, a robot trajectory generation method for deriving an operation path of a robot based on predetermined conditions is known. For example, Japanese Patent Application Laid-Open No. 2019-193975 discloses a robot trajectory generation method for deriving an operation path of a robot so that a robot arm does not interfere with other robot arms or obstacles. 【0003】 Japanese Patent Application Laid-Open No. 2019-193975 【0004】 However, in the robot trajectory generation method described in Japanese Patent Application Laid-Open No. 2019-193975, although the operation path of the robot is derived so that the robot arm does not interfere with other robot arms or obstacles, the user cannot grasp the timing in the operation path where the size of the gap between the robot and the obstacle on the derived operation path of the robot becomes relatively small. For this reason, a method for generating an operation path of a robot, an apparatus for generating an operation path of a robot, and a program for generating an operation path of a robot that enable the user to grasp the timing in the operation path where the size of the gap between at least one of the robot and the work on the operation path in the derived arrangement area of the robot and the arrangement area becomes relatively small are desired. 【0005】 This disclosure has been made to solve the above-described problems, and one object of this disclosure is to provide a method for generating an operation path of a robot, an apparatus for generating an operation path of a robot, and a program for generating an operation path of a robot that enable the user to grasp the timing in the operation path where the size of the gap between at least one of the robot and the work on the operation path in the derived arrangement area of the robot and the arrangement area becomes relatively small. 【0006】To achieve the above objective, the first aspect of this disclosure provides a method for generating a robot motion path, comprising: simulating and deriving a motion path of a robot, which includes an end effector for holding a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and displaying on a display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used in deriving the motion path. 【0007】 The robot motion path generation method according to the first aspect of this disclosure, as described above, displays on the display unit the timings in motion paths where the gap between at least one of the robot and the workpiece and the placement area is smaller than a predetermined distance, in the integrated data obtained by integrating robot CAD data, which is the computer-aided design data of the robot, placement area CAD data, which is the computer-aided design data of the placement area, and workpiece CAD data, which is the computer-aided design data of the workpiece, which is used to derive the motion path of the robot in the placement area where the robot and the workpiece are placed. As a result, the user can recognize the timings in motion paths where the gap size is relatively small by looking at the timings in motion paths where the gap size is relatively small, as displayed on the display unit. 【0008】Furthermore, in order to achieve the above objective, the robot motion path generation device according to the second aspect of this disclosure includes a display unit, a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, which simulates and derives a motion path of the robot and workpiece in a placement area based on predetermined conditions, and a control unit that displays on the display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data which is used to derive the motion path and is obtained by integrating robot CAD data which is computer-aided design data of the robot, placement area CAD data which is computer-aided design data of the placement area, and workpiece CAD data which is computer-aided design data of the workpiece. 【0009】The robot motion path generation device according to the second aspect of this disclosure includes a control unit that displays on a display unit the timings in motion paths where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in the integrated data obtained by integrating robot CAD data, which is the computer-aided design data of the robot, placement area CAD data, which is the computer-aided design data of the placement area, and workpiece CAD data, which is the computer-aided design data of the workpiece, which is used to derive the motion path of the robot in the placement area where the robot and the workpiece are placed, so as described above. As a result, similar to the robot motion path generation method according to the first aspect, the user can recognize the timings in motion paths where the size of the gap is relatively small by looking at the timings in motion paths where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, as displayed on the display unit. 【0010】Furthermore, in order to achieve the above objective, the robot motion path generation program according to the third aspect of this disclosure causes a computer to perform the following processes: a process of simulating and deriving a motion path of a robot, which includes an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and a process of displaying on a display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data which is obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used in deriving the motion path. 【0011】The robot motion path generation program according to the third aspect of this disclosure, as described above, causes a computer to execute a process to display on a display unit the timings in motion paths where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in the integrated data which is used to derive the motion path of the robot in the placement area where the robot and the workpiece are placed, and which is the computer-aided design data of the robot, the placement area CAD data which is the computer-aided design data of the placement area, and the workpiece CAD data which is the computer-aided design data of the workpiece. As a result, similar to the robot motion path generation method according to the first aspect and the robot motion path generation device according to the second aspect, the user can recognize the timings in motion paths where the size of the gap is relatively small among the motion timings by looking at the timings in motion paths where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, as displayed on the display unit. As a result, similar to the robot motion path generation method according to the first phase and the robot motion path generation device according to the second phase described above, it is possible to provide a robot motion path generation program that allows the user to grasp the timing in the motion path where the gap between at least one of the robot and the workpiece on the derived robot placement area and the placement area is relatively small. 【0012】 According to this disclosure, as described above, it is possible to provide a robot motion path generation method, a robot motion path generation device, and a robot motion path generation program that enable the user to understand a situation in which the size of the gap between at least one of the robot and the workpiece on the motion path in the derived robot placement area and the placement area becomes relatively small. 【0013】This is a plan view showing a substrate transport system according to one embodiment of the present disclosure. This is a block diagram showing the configuration of a substrate transport robot motion path generation device according to one embodiment of the present disclosure. This is a diagram showing multiple transport robot CAD data used to derive the motion path of a substrate transport robot according to one embodiment of the present disclosure. This is a diagram showing multiple substrate CAD data used to derive the motion path of a substrate transport robot according to one embodiment of the present disclosure. This is a diagram showing multiple hand CAD data used to derive the motion path of a substrate transport robot according to one embodiment of the present disclosure. This is a flow diagram for generating the motion path of a substrate transport robot according to one embodiment of the present disclosure. This is a diagram showing a virtual image displayed on the display unit according to one embodiment of the present disclosure. This is a diagram showing the size of the gap between the substrate transport robot and the placement area displayed on the display unit according to one embodiment of the present disclosure. This is a diagram for explaining the placement of virtual obstacles based on the minimum threshold of the gap between the substrate transport robot and the placement area according to one embodiment of the present disclosure. This is a diagram showing the motion record screen of the motion path displayed on the display unit of a substrate transport robot according to one embodiment of the present disclosure. 【0014】 The embodiments of this disclosure will be described below with reference to the drawings. 【0015】 [Operation Path Generation Device for Substrate Transfer Robot] An operation path generation device 200 for a substrate transfer robot 10 according to one embodiment of the present disclosure will be described with reference to Figures 1 and 2. The operation path generation device 200 for a substrate transfer robot 10 is a device that generates the operation path OP shown in Figure 8 in the substrate transfer system 100 of the substrate transfer robot 10. Note that the substrate transfer robot 10 is an example of a robot. 【0016】 (Substrate transport system) As shown in Figure 1, the substrate transport system 100 comprises a substrate transport robot 10 and a placement area 20. 【0017】The substrate transport robot 10 includes a hand 11 for holding a substrate W, a horizontal articulated robot arm 12 to which the hand 11 is attached and to which a plurality of links 12a are connected to each other, and a base 13 for supporting the robot arm 12. The hand 11 holds the substrate W when the substrate transport robot 10 transports the substrate W. The hand 11 is attached to the tip of the robot arm 12. The substrate W is, for example, a silicon wafer having a disc shape. The substrate W and the hand 11 are examples of a workpiece and an end effector, respectively. 【0018】 The placement area 20 includes a substrate transport chamber 21 and a substrate mounting section 22. 【0019】 A substrate transport robot 10 is located in the substrate transport chamber 21. The substrate transport chamber 21 is the space in which the substrate W is transported by the substrate transport robot 10. The inside of the substrate transport chamber 21 is maintained at atmospheric pressure. 【0020】 The substrate mounting section 22 is connected to the substrate transport chamber 21. A substrate W is placed on the substrate mounting section 22. The substrate mounting section 22 includes a plurality of load ports 22a, a plurality of load locks 22b, and an aligner 22c. 【0021】 Each of the multiple load ports 22a includes a FOUP (Front Opening Unify Pod), which is a container capable of housing multiple substrates W. 【0022】 Each of the multiple load locks 22b is connected to the substrate transport chamber 21 at a different location from each of the multiple load ports 22a. Each of the multiple load locks 22b is connected to the substrate transport chamber VC, which is maintained in a vacuum atmosphere. 【0023】 The substrate transport chamber VC is connected to a substrate processing chamber where resist coating, etching, and other processes are performed on the substrate W at positions different from each of the multiple load locks 22b. In other words, the substrate transport system 100 is an EFEM (Equipment Front End Module) that transports the substrate W between the FOUPs of each of the multiple load ports 22a and the substrate transport chamber VC, which is connected to the substrate processing chamber. 【0024】 The aligner 22c is a device for correcting the alignment and eccentricity of the substrate W. 【0025】 (Configuration of the operating path generation device for the substrate transport robot) As shown in Figure 2, the operating path generation device 200 for the substrate transport robot 10 comprises an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The operating path generation device 200 for the substrate transport robot 10 is, for example, a PC (personal computer) or a tablet. 【0026】 The input unit 210 receives input operations from the user. When the input unit 210 receives an input operation from the user, it outputs an input signal corresponding to the input operation to the control unit 240. For example, the input unit 210 is a keyboard or a mouse. The input unit 210 is used when setting or changing predetermined conditions when deriving the operation path OP in the placement area 20 of the substrate transport robot 10. 【0027】 The display unit 220 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, the derived operating path OP of the substrate transport robot 10 in the placement area 20, and so on. The display unit 220 is, for example, a liquid crystal display or an organic EL display. 【0028】 The storage unit 230 is a computer-readable storage medium that stores various programs and data. The storage unit 230 stores the operating path generation program MP for the substrate transport robot 10, which the control unit 240 uses to execute the operating path generation method for the substrate transport robot 10. In other words, the operating path generation program MP for the substrate transport robot 10 causes the control unit 240, acting as a computer, to execute the processing at each step of the operating path generation method for the substrate transport robot 10. The storage unit 230 is formed, for example, by a magnetic disk such as a hard disk, an optical disk such as a CD-ROM or DVD, or a semiconductor memory. 【0029】The control unit 240 simulates and derives the operation path OP of the substrate transport robot 10 in the placement area 20 based on predetermined conditions. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit) and semiconductor memory such as RAM (Random Access Memory) and ROM (Read Only Memory). 【0030】The control unit 240 reads a CAD data CD used to derive the operation path OP. The CAD data CD includes a transport robot CAD data CD1, which is the computer-aided design data for the substrate transport robot 10; a placement area CAD data CD2, which is the computer-aided design data for the placement area 20; and a substrate CAD data CD3, which is the computer-aided design data for the substrate W. The user can arbitrarily select which transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 to be read by the control unit 240. Furthermore, the control unit 240 can read multiple transport robot CAD data CD1s, multiple placement area CAD data CD2s, and multiple substrate CAD data CD3s. The user can then operate the input unit 210 to arbitrarily select the transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 to be used for deriving the operation path OP from the multiple transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 that have been loaded. For example, as shown in Figure 3, the user can operate the input unit 210 to select the transport robot CAD data CD1 to be used for deriving the operation path OP from the multiple transport robot CAD data CD1. In Figure 3, the user can select multiple substrate transport robots 10 with different numbers of corresponding FOUPs, such as a substrate transport robot 10 corresponding to two FOUPs, a substrate transport robot 10 corresponding to three FOUPs, and a substrate transport robot 10 corresponding to four FOUPs. However, it is also possible to select multiple substrate transport robots 10 with different types, such as vertical movable range, number of links, number of hands 11, etc. Furthermore, as shown in Figure 4, the user can operate the input unit 210 to select a substrate CAD data CD3 to be used for deriving the operation path OP from a plurality of substrate CAD data CD3s. The control unit 240 can also read data to replace parts of the read transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3. Figure 4 shows the selection of a substrate W as a circular object to be gripped and a substrate W as a rectangular object to be gripped, but it is also possible to select multiple substrates W of different sizes.Furthermore, in addition to the substrate W as the object to be gripped, jigs and the like corresponding to the object to be gripped may also be selectable. Also, as shown in Figure 5, the control unit 240 can read hand CAD data CD1a, which is computer-aided design data of the hand 11. The user can then operate the input unit 210 to select the hand CAD data CD1a to be used to derive the operation path OP from a plurality of hand CAD data CD1a. Figure 5 shows an example of selecting an edge grip hand and a vacuum hand, but other types of hands 11 such as a passive hand may also be selectable, and multiple hands 11 with different hand lengths, such as a hand 11 with a hand length of 350 mm and a hand with a hand length of 300 mm, may also be selectable. Note that the transport robot CAD data CD1 and the substrate CAD data CD3 are examples of robot CAD data and workpiece CAD data, respectively. 【0031】 As shown in Figure 2, the control unit 240 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on an integrated data ID which is an integrated data ID obtained by combining the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. 【0032】 [Method for generating the operating path of a substrate transport robot] A method for generating the operating path of a substrate transport robot 10 according to one embodiment of the present disclosure will be described with reference to Figures 6 to 9. 【0033】 As shown in Figure 6, in step S1, the control unit 240 reads the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, which are used to derive the operation path OP. The placement area CAD data CD2 includes the obstacles 30 shown in Figure 7, which will be obstacles when the substrate transport robot 10 operates. In Figure 7, a columnar object placed in the substrate transport chamber 21 is shown as an example of an obstacle 30. 【0034】As shown in Figure 6, in step S2, the control unit 240 performs a process to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220, based on an integrated data ID which is an integrated data ID obtained by combining the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. The control unit 240 also displays the virtual image VI on the display unit 220 in steps S3, S4, and S5, which will be described later. 【0035】 As shown in Figure 7, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. Figure 7 shows an example in which the control unit 240 displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. The control unit 240 switches between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which only the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which only the three-dimensional virtual image VIb is displayed on the display unit 220, based on the user's input operation to the input unit 210. 【0036】When one of the 2D data IDa and 3D data IDb in the integrated data ID is changed based on user operation, the control unit 240 displays at least one of the 2D virtual image VIa corresponding to the 2D data IDa and the 3D virtual image VIb corresponding to the 3D data IDb on the display unit 220, while reflecting the change in the other 2D data IDa and 3D data IDb. For example, when one of the 2D data IDa and 3D data IDb is changed based on user operation, the control unit 240 displays both the 2D virtual image VIa and the 3D virtual image VIb side by side on the display unit 220, while reflecting the change in the other 2D data IDa and 3D data IDb. In other words, when both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, and a user input operation is performed on the input unit 210 to change either the two-dimensional data IDa or the three-dimensional data IDb in step S3 described later, both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in conjunction with each other. 【0037】As shown in Figure 6, in step S3, the control unit 240 performs a process to set predetermined conditions for deriving the operation path OP in response to an input operation by the user to the input unit 210 for setting predetermined conditions for deriving the operation path OP. The predetermined conditions include the start and end points of the operation path OP, the upper limits of the speed and acceleration of the hand 11, the upper limits of the speed and acceleration of the robot arm 12, whether or not the hand 11 holds the substrate W, the minimum threshold Ga of the gap G described later, the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the posture of the substrate transport robot 10, the size of the components of the placement area 20, the position of the components of the placement area 20, etc. In other words, based on the user's operation, the control unit 240 changes at least one of the following in the integrated data ID: the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the posture of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20. Furthermore, based on user operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting changes in at least one of the following in one of the two-dimensional data IDa and three-dimensional data IDb: the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the posture of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20. Changes in the size and position of the components of the substrate transport robot 10 in the integrated data ID include changes in the length and position of at least one of the link 12a and hand 11 as components of the substrate transport robot 10 in the integrated data ID. Changes in the size and position of the components of the placement area 20 in the integrated data ID include changes in the position, addition and deletion of at least one of the substrate mounting section 22 as a component of the placement area 20, changes in at least one of the position and size of the obstacle 30 as a component of the placement area 20, etc. 【0038】As shown in Figure 6, in step S4, the control unit 240 performs a process of simulating and deriving the operation path OP of the substrate transport robot 10 in the placement area 20 based on predetermined conditions. As shown in Figure 8, the control unit 240 derives multiple operation paths OP. In Figure 8, for simplicity, only two operation paths OP are shown. Furthermore, as shown in Figure 9, the control unit 240 simulates and derives the operation path OP by shifting the contour of the placement area 20 by the minimum threshold value Ga of the gap G, which will be described later, by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220. 【0039】 As shown in Figure 6, if, after step S4, the user performs an operation to display the derived operation path OP on the display unit 220, the process proceeds to step S5. Also, if, after step S4, the user performs an operation to display on the display unit 220 the timing 221a in the operation path OP where the size of the gap G between at least one of the substrate transport robot 10 and the substrate W and the placement area 20 is smaller than a predetermined distance, the process proceeds to step S6. Note that although Figure 6 shows step S6 occurring after step S5, step S5 may also occur after step S6. 【0040】In step S5, the control unit 240 performs a process to display the derived operation path OP on the display unit 220. As shown in Figure 8, the control unit 240 displays the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20, along with the derived operation path OP, on the display unit 220. Specifically, the control unit 240 displays the size of the smallest gap G on each of the multiple operation path OPs in the integrated data ID on the display unit 220. That is, the size of the smallest gap G on each of the multiple derived operation path OPs is displayed simultaneously on the display unit 220. The control unit 240 also displays the size of the smallest gap G on each of the multiple operation path OPs in the integrated data ID on the display unit 220 in a manner corresponding to the size of the gap G. For example, the control unit 240 displays the size of the smallest gap G on each of the multiple operation path OPs on the display unit 220 in a color corresponding to the size of the gap G. 【0041】As shown in Figure 6, in step S6, the control unit 240 performs a process to display on the display unit 220 the timing 221a in the operation path OP where the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP and the placement area 20 is smaller than a predetermined distance. Specifically, as shown in Figure 10, the control unit 240 displays on the display unit 220 a rectangular diagram on the operation record screen 221, which allows confirmation of the entire operation path OP, that includes a region indicating the timing 221a where the size of the gap G is smaller than a predetermined distance, and a region indicating the timing 221b where the size of the gap G is greater than or equal to a predetermined distance, with respect to the time axis corresponding to the operation path OP. That is, in addition to the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance, the control unit 240 also displays on the display unit 220 the timing 221b in the operation path OP where the size of the gap G is greater than or equal to a predetermined distance, with respect to the time axis corresponding to the operation path OP. Furthermore, the control unit 240 displays the timings 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance in chronological order on the display unit 220. In Figure 10, the timings 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance are shown with hatching, and the timings 221b in the operation path OP where the size of the gap G is greater than or equal to a predetermined distance are shown with white fill. However, this is not limited to this, as long as it is possible to distinguish between the timings 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance and the timings 221b in the operation path OP where the size of the gap G is greater than or equal to a predetermined distance. In addition, the control unit 240 displays on the display unit 220 both the size of the gap G at the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance, and the position of the rotation axes of the multiple links 12a at the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance. The predetermined distance may be set by the user to any value, or it may be pre-stored in the storage unit 230.Furthermore, the operation record screen 221 displays a seek bar linked to the time axis corresponding to the operation path OP, allowing the user to easily check the state of any timing 221a within the operation path OP by operating the seek bar. 【0042】 If, after any of steps S4, S5, or S6, a user input operation is performed to the input unit 210 to change a predetermined condition for deriving the operation path OP, the process returns to step S3. If, after both steps S5 and S6 have been performed, no user input operation is performed to the input unit 210 to change a predetermined condition for deriving the operation path OP, the generation of the operation path for the substrate transport robot 10 is completed. 【0043】 [Effects of the Embodiment] In this embodiment, the following effects can be obtained. 【0044】(Effect of the method for generating the operation path of the substrate transfer robot) In the present embodiment, at least one of the substrate transfer robot 10 and the substrate W and the arrangement <area> between the substrate transfer robot 10 and the arrangement area 20 on the operation path OP in the integrated data ID obtained by integrating the transfer robot CAD data CD1, which is the computer-aided design data of the substrate transfer robot 10 used to derive the operation path OP in the arrangement area 20 of the substrate transfer robot 10, the arrangement area CAD data CD2, which is the computer-aided design data of the arrangement area 20 where the substrate transfer robot 10 and the substrate W are arranged, and the substrate CAD data CD3, which is the computer-aided design data of the substrate W. The size of the gap G between the substrate transfer robot 10 and the arrangement area 20 on the operation path OP is displayed on the display unit 220 so as to be distinguishable at the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance. Thereby, the user can recognize the timing 221a in the operation path OP where the size of the gap G becomes relatively small among the operation timings by looking at the timing 221a in the operation path OP where the size of the gap G between at least one of the substrate transfer robot 10 and the substrate W and the arrangement area 20 on the operation path OP displayed on the display unit 220 is smaller than a predetermined distance. As a result, the user can grasp the timing 221a where the size of the gap G between at least one of the substrate transfer robot 10 and the substrate W and the arrangement area 20 on the operation path OP in the arrangement area 20 of the derived substrate transfer robot 10 becomes relatively small. 【0045】 Further, in the present embodiment, the fact that the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance is displayed on the display unit 220 so as to be distinguishable includes displaying the timing 221b in the operation path OP where the size of the gap G is greater than or equal to the predetermined distance on the display unit 220 so as to be distinguishable in addition to the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance. Thereby, while comparing the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance with the timing 221b in the operation path OP where the size of the gap G is greater than or equal to the predetermined distance, the timing 221b in the operation path OP where the size of the gap G becomes relatively small can be easily recognized. 【0046】Furthermore, in this embodiment, displaying the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 in an identifiable manner includes displaying the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 in chronological order. This makes it easy to visually identify the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance, as displayed on the display unit 220. 【0047】 Furthermore, in this embodiment, displaying the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 includes displaying on the display unit 220 both the size of the gap G 221c at the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance, and the position 221d of the pivot axis of the multiple links 12a at the timing 221a in the operation path OP where the size of the gap G is smaller than a predetermined distance. This makes it possible to grasp in detail the situation in which the size of the gap G becomes relatively small. 【0048】In addition, in the present embodiment, the method for generating the operation path of the substrate transfer robot 10 includes displaying a virtual image VI including the substrate transfer robot 10, the placement area 20, and the substrate W on the display unit 220 based on the integrated data ID, and displaying the size of the gap G between at least one of the substrate transfer robot 10 and the substrate W on the operation path OP in the integrated data ID and the placement area 20 on the display unit 220. Thereby, the user can recognize the size of the gap G by looking at the size of the gap G between at least one of the substrate transfer robot 10 and the substrate W on the operation path OP displayed on the display unit 220 and the placement area 20. As a result, the user can consider the size of the gap G between at least one of the substrate transfer robot 10 and the substrate W on the operation path OP in the placement area 20 of the derived substrate transfer robot 10 and the placement area 20. Further, the user can easily consider the predetermined conditions when deriving the operation path OP in the placement area 20 of the substrate transfer robot 10 by looking at the virtual image VI including the substrate transfer robot 10, the placement area 20, and the substrate W displayed on the display unit 220. 【0049】 In addition, in the present embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the operation path OP in the integrated data ID on the display unit 220. Thereby, the user can effectively recognize the size of the gap G by looking at the size of the smallest gap G on the operation path OP displayed on the display unit 220. 【0050】 In addition, in the present embodiment, deriving the operation path OP based on a predetermined condition includes deriving a plurality of operation paths OP based on the predetermined condition. And displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the plurality of operation paths OP in the integrated data ID on the display unit 220. Thereby, the user can more effectively recognize the size of the gap G by looking at the size of the smallest gap G on each of the plurality of operation paths OP in the virtual image VI displayed on the display unit 220. 【0051】Furthermore, in this embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the multiple operation path OPs in the integrated data ID in a manner corresponding to the size of the gap G. This allows the user to easily compare the sizes of the smallest gaps G on each of the multiple operation path OPs by looking at the size of the smallest gap G on each of the multiple operation path OPs in the virtual image VI displayed on the display unit 220 in a manner corresponding to the size of the gap G. 【0052】 Furthermore, in this embodiment, the placement area 20 includes obstacles 30 that hinder the operation of the substrate transport robot 10. Displaying the size of the gap G on the display unit 220 includes displaying the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacles 30 as a component of the placement area 20 on the display unit 220. As a result, the user can recognize the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the multiple operation path OP in the virtual image VI displayed on the display unit 220 and the obstacles 30 as a component of the placement area 20. 【0053】 Furthermore, in this embodiment, the method for generating the operating path of the substrate transport robot 10 includes setting a minimum threshold Ga of the gap G as a predetermined condition. Then, deriving the operating path OP based on the predetermined condition includes simulating and deriving the operating path OP with the contour of the placement area 20 shifted by the set minimum threshold Ga of the gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220. This makes it easy to derive the operating path OP by simulation while taking into account the set minimum threshold Ga of the gap G. 【0054】Furthermore, in this embodiment, the method for generating the operating path of the substrate transport robot 10 includes setting whether or not the substrate W is held by the hand 11 as a predetermined condition. Then, deriving the operating path OP based on the predetermined condition includes simulating and deriving the operating path OP based on the set whether or not the substrate W is held by the hand 11. This makes it possible to derive the operating path OP by simulation while considering whether or not the substrate W is held by the hand 11. 【0055】 (Effects of the operating path generation device for the substrate transport robot) In this embodiment, the operating path generation device 200 for the substrate transport robot 10 includes a control unit 240 that displays on the display unit 220 the timing 221a in the operating path OP in an integrated data ID which is As a result, similar to the method for generating the operating path of the substrate transport robot 10 described above, the user can recognize the timing 221a in the operating path OP where the size of the gap G between at least one of the substrate transport robot 10 and the substrate W and the placement area 20 is smaller than a predetermined distance, by looking at the timing 221a in the operating path OP displayed on the display unit 220. As a result, similar to the method for generating the operating path of the substrate transport robot 10 described above, it is possible to provide an operating path generation device 200 for a substrate transport robot 10 in which the user can grasp the timing 221a in the operating path OP in the placement area 20 of the derived substrate transport robot 10 where the size of the gap G between at least one of the substrate transport robot 10 and the substrate W and the placement area 20 is relatively small. 【0056】(Effects of the operating path generation program for the substrate transport robot) In this embodiment, the operating path generation program MP for the substrate transport robot 10 causes the computer to perform a process to display on the display unit 220 the timing 221a in the operating path OP in which the size of the gap G between at least one of the substrate transport robot 10 and the substrate W and the placement area 20 is smaller than a predetermined distance, in the integrated data ID which is an integrated data ID which is an integrated data ID which is an integrated data of the transport robot CAD data CD1 which is the computer-aided design data of the substrate transport robot 10, the placement area CAD data CD2 which is the computer-aided design data of the placement area 20, and the substrate CAD data CD3 which is the computer-aided design data of the substrate W, on the operating path OP of the substrate transport robot 10 in the placement area 20 where the substrate transport robot 10 and the substrate W are placed, and the size of the gap G between at least one of the substrate transport robot 10 and the substrate W and the placement area 20 is smaller than a predetermined distance. As a result, similar to the above-described method for generating the operating path of the substrate transport robot 10 and the operating path generation device 200 for the substrate transport robot 10, the user can recognize the timing 221a in the operating path OP where the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operating path OP displayed on the display unit 220 and the placement area 20 is smaller than a predetermined distance. As a result, similar to the above-described method for generating the operating path of the substrate transport robot 10 and the operating path generation device 200 for the substrate transport robot 10, it is possible to provide an operating path generation program MP for the substrate transport robot 10 in which the user can grasp the timing 221a in the operating path OP where the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operating path OP in the placement area 20 of the substrate transport robot 10 is relatively small. 【0057】 [Variations] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of this disclosure is indicated by the claims rather than the description of the embodiments above, and further includes all modifications (variations) in the meaning and scope equivalent to the claims. 【0058】For example, in the above embodiment, displaying the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 includes displaying the timing 221b in an operation path OP where the size of the gap G is greater than or equal to a predetermined distance, in addition to the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance, on the display unit 220. However, the present disclosure is not limited thereto. In the present disclosure, displaying the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 does not necessarily include displaying the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 in addition to displaying the timing 221b in an operation path OP where the size of the gap G is greater than or equal to a predetermined distance. 【0059】 Furthermore, in the above embodiment, an example was shown in which displaying the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 in an identifiable manner includes displaying the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 in a time series, but the present disclosure is not limited thereto. In the present disclosure, displaying the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 in an identifiable manner does not have to include displaying the timing 221a in an operation path OP where the size of the gap G is smaller than a predetermined distance on the display unit 220 in a time series. 【0060】Furthermore, in the above embodiment, an example was shown in which displaying the timing 221a in which the size of the gap G is smaller than a predetermined distance on the display unit 220 includes displaying at least both the size of the gap G 221c at the timing 221a in which the size of the gap G is smaller than a predetermined distance, and the position 221d of the pivot axis of the 12 plurality of links 12a at the timing 221a in which the size of the gap G is smaller than a predetermined distance, but the present disclosure is not limited thereto. In this disclosure, displaying the timing 221a in which the size of the gap G is smaller than a predetermined distance on the display unit 220 may mean that at least one of the size of the gap G 221c at the timing 221a in which the size of the gap G is smaller than a predetermined distance, and the position 221d of the pivot axis of the 12 plurality of links 12a at the timing 221a in which the size of the gap G is smaller than a predetermined distance, is displayed on the display unit 220, or it may not include displaying the size of the gap G 221c at the timing 221a in which the size of the gap G is smaller than a predetermined distance, and the position 221d of the pivot axis of the 12 plurality of links 12a at the timing 221a in which the size of the gap G is smaller than a predetermined distance. 【0061】 Furthermore, in the above embodiment, the method for generating the operating path of the substrate transport robot 10 is shown to include displaying a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on the integrated data ID, and displaying the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operating path OP in the integrated data ID and the placement area 20 on the display unit 220, but the present disclosure is not limited thereto. In the present disclosure, the method for generating the operating path of the substrate transport robot 10 is not limited to displaying a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on the integrated data ID, and displaying the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operating path OP in the integrated data ID and the placement area 20 on the display unit 220. 【0062】Furthermore, in the above embodiment, the derivation of the operation path OP based on predetermined conditions was shown as an example in which the operation path OP is derived by simulating it based on whether or not the substrate W is held by the set hand 11, but the present disclosure is not limited thereto. In the present disclosure, the derivation of the operation path based on predetermined conditions does not have to include simulating it based on whether or not the substrate W is held by the set hand 11. 【0063】 Furthermore, in the above embodiment, deriving the operation path OP based on predetermined conditions includes simulating and deriving the operation path OP while the contour of the placement area 20 is shifted by the minimum threshold Ga of the set gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220, but the present disclosure is not limited thereto. In the present disclosure, deriving the operation path OP based on predetermined conditions does not have to include simulating and deriving the operation path OP while the contour of the placement area 20 is shifted by the minimum threshold Ga of the set gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220, 【0064】 Furthermore, in the above embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20 on the display unit 220, but the present disclosure is not limited thereto. In the present disclosure, displaying the size of the gap G on the display unit 220 does not necessarily include displaying the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20 on the display unit 220. 【0065】Furthermore, in the above embodiment, displaying the size of the gap G on the display unit 220 includes an example in which the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID is displayed on the display unit 220 in a manner corresponding to the size of the gap G, but the present disclosure is not limited thereto. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID in a manner corresponding to the size of the gap G. 【0066】 Furthermore, in the above embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID, but the present disclosure is not limited thereto. In the present disclosure, displaying the size of the gap G on the display unit 220 does not necessarily include displaying the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID. 【0067】 Furthermore, in the above embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the operation path OP in the integrated data ID on the display unit 220, but the present disclosure is not limited thereto. In the present disclosure, displaying the size of the gap G on the display unit 220 does not necessarily include displaying the size of the smallest gap G on the operation path OP in the integrated data ID on the display unit 220. 【0068】 Furthermore, in the above embodiment, the workpiece is a substrate W, the end effector is a hand 11, and the robot arm 12 is a horizontally articulated robot arm, but the present disclosure is not limited thereto. In this disclosure, the workpiece may be something other than a substrate W, the end effector may be something other than a hand 11, and the robot arm 12 may be something other than a horizontally articulated robot arm. 【0069】Furthermore, in the above embodiment, the arrangement area 20 was shown to include a substrate transport chamber 21 in which the substrate W is transported and a substrate mounting section 22 adjacent to the substrate transport chamber 21 on which the substrate W is placed, but the present disclosure is not limited thereto. The arrangement area 20 may include the substrate transport chamber 21 in which the substrate W is transported, but may not include the substrate mounting section 22 adjacent to the substrate transport chamber 21 on which the substrate W is placed. 【0070】 The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, dedicated processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the enumerated functions, or hardware programmed to perform the enumerated functions. The hardware may be hardware disclosed herein, or other known hardware that is programmed or configured to perform the enumerated functions. If the hardware is a processor, which is considered a type of circuit, then the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor. 【0071】 [Embodiments] The exemplary embodiments described above will be understood by those skilled in the art to be specific examples of the following embodiments. 【0072】(Aspect 1) A method for generating a robot motion path, comprising: simulating and deriving a motion path of a robot, which includes an end effector for holding a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and displaying on the display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used in deriving the motion path. 【0073】 (Aspect 2) The robot motion path generation method according to aspect 1, wherein displaying the timing in the motion path where the size of the gap is smaller than a predetermined distance on the display unit in an identifiable manner includes, in addition to displaying the timing in the motion path where the size of the gap is smaller than a predetermined distance, the timing in the motion path where the size of the gap is greater than or equal to a predetermined distance on the display unit in an identifiable manner. 【0074】 (Aspect 3) The robot motion path generation method according to aspect 1 or 2, wherein displaying the timing in the motion path where the size of the gap is smaller than a predetermined distance on the display unit in an identifiable manner includes displaying the timing in the motion path where the size of the gap is smaller than a predetermined distance in a time series on the display unit. 【0075】(Aspect 4) The method for generating a robotic motion path according to any one of aspects 1 to 3, wherein the timing in the motion path where the size of the gap is smaller than a predetermined distance is displayed on the display unit in an identifiable manner, and the size of the gap at the timing in the motion path where the size of the gap is smaller than a predetermined distance, and at least one of the rotation axes of the plurality of links of the robotic arm at the timing in the motion path where the size of the gap is smaller than a predetermined distance are displayed on the display unit. 【0076】 (Aspect 5) A method for generating a robot motion path according to any one of aspects 1 to 4, comprising: displaying a virtual image including the robot, the placement area and the workpiece on a display unit based on the integrated data; and displaying the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the placement area on the display unit. 【0077】 (Aspect 6) The robot motion path generation method according to aspect 5, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on the motion path in the integrated data on the display unit. 【0078】 (Aspect 7) The robot motion path generation method according to aspect 6, wherein deriving the motion path based on the predetermined conditions includes deriving a plurality of motion paths based on the predetermined conditions, and displaying the size of the gap on the display unit means displaying the smallest size of the gap on each of the plurality of motion paths in the integrated data on the display unit. 【0079】 (Aspect 8) The robot motion path generation method according to aspect 7, wherein displaying the size of the gap on the display unit includes displaying the smallest size of the gap on each of the plurality of motion paths in the integrated data on the display unit in a manner corresponding to the size of the gap. 【0080】(Aspect 9) The robot motion path generation method according to any one of aspects 5 to 8, wherein the arrangement area includes obstacles that hinder the robot's operation, and displaying the size of the gap on the display unit includes displaying on the display unit the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the obstacle as a component of the arrangement area. 【0081】 (Aspect 10) A robot motion path generation method according to any one of aspects 5 to 9, comprising setting a minimum threshold value for the gap as a predetermined condition, wherein deriving the motion path based on the predetermined condition includes simulating and deriving the motion path by shifting the contour of the placement area by the minimum threshold value of the gap set by the gap threshold setting unit by placing a virtual obstacle in the virtual image displayed on the display unit. 【0082】 (Aspect 11) A robot motion path generation method according to any one of aspects 5 to 9, comprising setting whether or not the end effector holds the workpiece as a predetermined condition, and deriving the motion path based on the predetermined condition by simulating and deriving the motion path based on whether or not the end effector holds the workpiece as set. 【0083】 (Aspect 12) A method for generating a robot motion path according to any one of aspects 1 to 11, wherein the workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot, and the arrangement area includes a substrate transport chamber where the substrate is transported and a substrate mounting section connected to the substrate transport chamber where the substrate is placed. 【0084】(Aspect 13) A robot motion path generation device comprising: a display unit; a robot including an end effector for holding a workpiece; and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other; a control unit that simulates and derives a motion path of a robot and the workpiece in a placement area where the robot and the workpiece are placed based on predetermined conditions; and a control unit that displays on the display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data which is used to derive the motion path and is obtained by integrating robot CAD data which is computer-aided design data of the robot, placement area CAD data which is computer-aided design data of the placement area, and workpiece CAD data which is computer-aided design data of the workpiece. 【0085】 (Aspect 14) A robot motion path generation program that causes a computer to perform the following steps: a process of simulating and deriving a motion path of a robot, which includes an end effector for holding a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and a process of displaying on a display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used in deriving the motion path. 【0086】10 Substrate transport robot (robot) 11 Hand (end effector) 12 Robot arm 12a Link 20 Placement area 21 Substrate transport chamber 22 Substrate mounting section (workpiece mounting section) 30 Obstacle 30a Virtual obstacle 200 Substrate transport robot motion path generation device (robot motion path generation device) 220 Display unit 221a Timing in motion paths where the gap size is smaller than a predetermined distance 221b Timing in motion paths where the gap size is greater than or equal to a predetermined distance 221c Gap size at timing in motion paths where the gap size is smaller than a predetermined distance 221d Position of the rotation axes of multiple links at timing in motion paths where the gap size is smaller than a predetermined distance 240 Control unit CD1 Transport robot CAD data (robot CAD data) CD2 Placement area CAD data CD3 Substrate CAD data (workpiece CAD data) G Gap Ga Minimum threshold (of the gap) MP Program for generating motion paths for a circuit board transport robot (Robot motion path generation program) OP: Motion path ID: Integrated data VI: Virtual image W: Circuit board (workpiece)

Claims

1. A method for generating a robot motion path, comprising:

1. Simulating and deriving a motion path of a robot, which includes an end effector for holding a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected, in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and 2. Displaying on a display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used in deriving the motion path.

2. Displaying on the display unit the timing in the operation path where the size of the gap is smaller than a predetermined distance, in order to identify the timing in the operation path where the size of the gap is smaller than a predetermined distance, in addition to displaying on the display unit the timing in the operation path where the size of the gap is greater than or equal to a predetermined distance, in order to identify the timing in the operation path where the size of the gap is greater than or equal to a predetermined distance, according to claim 1, the method for generating a robot operation path.

3. Displaying the timings in the operation path where the size of the gap is smaller than a predetermined distance on the display unit in an identifiable manner includes displaying the timings in the operation path where the size of the gap is smaller than a predetermined distance in chronological order on the display unit, as described in claim 1.

4. The robot motion path generation method according to claim 1, wherein displaying the timing in the motion path where the size of the gap is smaller than a predetermined distance on the display unit in an identifiable manner includes displaying on the display unit, in addition to the timing in the motion path where the size of the gap is smaller than a predetermined distance, the size of the gap at the timing in the motion path where the size of the gap is smaller than a predetermined distance, and at least one of the positions of the rotation axes of the plurality of links of the robot arm at the timing in the motion path where the size of the gap is smaller than a predetermined distance.

5. A method for generating a robot motion path according to claim 1, comprising: displaying a virtual image including the robot, the placement area, and the workpiece on a display unit based on the integrated data; and displaying the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the placement area on the display unit.

6. The robot motion path generation method according to claim 5, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on the motion path in the integrated data on the display unit.

7. The robot motion path generation method according to claim 6, wherein deriving the motion path based on the predetermined conditions includes deriving a plurality of motion paths based on the predetermined conditions, and displaying the size of the gap on the display unit includes displaying the smallest size of the gap on each of the plurality of motion paths in the integrated data on the display unit.

8. The robot motion path generation method according to claim 7, wherein displaying the size of the gap on the display unit includes displaying the smallest size of the gap on each of the plurality of motion paths in the integrated data on the display unit in a manner corresponding to the size of the gap.

9. The robot motion path generation method according to claim 5, wherein the arrangement area includes obstacles that hinder the robot's operation, and displaying the size of the gap on the display unit includes displaying on the display unit the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the obstacle as a component of the arrangement area.

10. A robot motion path generation method according to claim 5, comprising setting a minimum threshold value for the gap as a predetermined condition, wherein deriving the motion path based on the predetermined condition includes simulating and deriving the motion path with the contour of the placement area shifted by the minimum threshold value of the gap by placing a virtual obstacle in the virtual image displayed on the display unit.

11. The robot motion path generation method according to claim 5, further comprising setting whether or not the end effector holds the workpiece as a predetermined condition, and deriving the motion path based on the predetermined condition includes simulating and deriving the motion path based on whether or not the end effector holds the workpiece as set.

12. The method for generating a robot motion path according to claim 1, wherein the workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot, and the placement area includes a substrate transport chamber where the substrate is transported and a substrate placement section connected to the substrate transport chamber where the substrate is placed.

13. A robot motion path generation device comprising: a display unit; a robot including an end effector for holding a workpiece; and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other; a control unit that simulates and derives a motion path of a robot and the workpiece in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and a control unit that displays on the display unit, in an integrated data obtained by integrating transport robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, the timing at which the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance.

14. A robot motion path generation program that causes a computer to perform the following steps: a process of simulating and deriving a motion path of a robot, which includes an end effector for holding a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area where the robot and the workpiece are placed, based on predetermined conditions; and a process of displaying on a display unit in an identifiable manner the timing in the motion path where the size of the gap between at least one of the robot and the workpiece on the motion path and the placement area is smaller than a predetermined distance, in integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used in deriving the motion path.

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