Functional piezo / pyro / ferroelectric film devices deposited by ad at room temperature on a rigid or flexible substrate

Abstract

The present invention relates to the manufacturing of devices that comprise films having piezoelectric, pyroelectric and / or ferroelectric properties, obtained at room temperature by aerosol deposition (AD). Advantageously, the devices according to the invention are functional without requiring subsequent heat treatment, and can be produced on various types of substrates, rigid or flexible, with varied thicknesses, whether in a thin layer (< 10 μm) or a thick layer (> 10 μm). More particularly, the invention relates to ceramic-polymer composite films having piezoelectric, pyroelectric or ferroelectric properties, obtained by AD, wherein the rate of polymer integrated into the film is controlled in order to obtain films that are functional immediately after deposition. The interconnectivity of the phases and the diameter of the ceramic grains are also controlled, ensuring that the desired functional properties are maintained. The invention further relates to an AD method for producing such devices.

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