A MEMS capacitive sensor uses differential and common mode detection modules to process capacitance variations from movable electrode plates.
Thick silicon-on-insulator substrates increase seismic mass in capacitive microaccelerometers.
A MEMS gyroscope structure uses inverted electrostatic actuation to modulate compensating forces orthogonal to primary oscillation.
Wireless angle computation determines motion tracker placement on body members using antenna arrays.
Edge reinforcement reduces stress concentrations on EUV pellicles while monitoring systems track electrical continuity for early failure identification.
FPGA-based sensor controllers switch between forcer and sensing modes to resolve quadrature bias compensation limits in Coriolis vibratory gyroscopes.
A piezoresistive element covered by a dielectric and conductive stack increases total capacitance between the substrate and the gauge.
A co-processor captures hardware timestamps at the sensor interrupt to associate precise timing with data before delivery.
Central accelerometer detects aircraft forces using acceleration derivatives, reducing landing gear sensor weight while improving measurement precision.
A resolver-based wheel speed sensor system uses a digital controller to calculate velocity from rotor position signals.