A spring loaded drive shaft couples to a resolver driven gear to maintain precise rotor alignment without dedicated bearings.
Segmented sense electrodes extend laterally across openings in movable structures to increase capacitive sensitivity by 18% while maintaining linearity.
Segmented wafer fabrication with optical alignment resolves MEMS chip assembly complexity.
Integrating a conductive fluid reservoir into the gate structure reduces chip surface area consumption while maintaining precise motion sensing capabilities.
Multi-frequency excitation isolates parasitic capacitance in piezoelectric accelerometers, reducing measurement errors from stray electrical characteristics.
A capacitive micromechanical sensor structure combines linear and closing gap comb fingers to enhance sensitivity.
A measuring device uses a low frequency noise estimator to subtract correlated noise from sensor signals.
Optical trapping beam confines atom cluster to detect motion through phase shift, eliminating bias uncertainty from excessive input accelerations.
Dynamic sensor sampling modes adjust activity monitoring rates to resolve the trade-off between detection reliability and battery life in wearable devices.
Three non-collinear linear accelerometers measure six degrees of freedom without gyroscopes.