Cyclic halogenated carbide-based gases dissociate in plasma to form reactive molecules that enhance etching rates for silicon oxide and poly-silicon layers.
A ring-shaped support member bonds to a substrate's outer periphery to enable simultaneous processing of both surfaces.
Ozone oxidation creates magnetically partitioned patterns that resolve the contradiction between high areal density and signal-to-noise ratio.
Laser-absorbing layer on transparent carrier allows high-temperature MEMS processing without temporary bonding limits.
Segmenting electrodes allows independent DC and AC voltage control, resolving signal distortion from switching delays while maintaining high image quality.
Masked chemical etching reduces SOI wafer thickness while avoiding mechanical stress and residue from lamination processes.