Furnace Parts Manipulation TRIZ Cases
- Modular Thermal Machine Layout for Flexible, Energy-Efficient Heating
Standardized heating modules with insulation, sensors, and fan control cut installation time while preserving flexible, energy-efficient thermal processing.
- Thermal Processing Chamber Layout for Accurate Wafer Temperature Sensing
Dielectric windows and multi-side radiative heating enable accurate backside workpiece temperature sensing while maintaining vacuum and process gas flow.