Solder mask standoffs prevent die sinking during bonding, maintaining uniform bond line thickness and improving microphone sensitivity.
Segmenting sensing into dual elements with matched parasitic capacitances cancels noise interference while maintaining miniaturized device size.
A stacked MEMS microphone uses a circuit chip with a through hole to acoustically couple the diaphragm directly to external sound waves.
Air escape portion in vibration electrode plate facilitates thermal noise molecule escape to enhance signal-to-noise ratio.
Opposite pressure build-ups cancel receiver vibrations, improving signal-to-noise ratio without complex multi-diaphragm constructions.
Segmented vibration membrane electrodes form unit capacitors to generate directional output signals from a single microphone element.
Lateral support members constrain the proof mass within safe ranges, preventing electrode fracture during shock events.