A laser-assisted glow discharge ionization device
A glow discharge and laser-assisted technology, applied in the field of mass spectrometry analysis and detection, can solve the problems of inability to achieve consistent ionization, low detection accuracy, and low consistency, and achieve suppression of matrix effects, high lateral spatial resolution, and The effect of good analytical sensitivity
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Publication Date
- 2016-11-30
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1 Figure 2
Abstract
Description
technical field
[0001] The invention is used in the field of mass spectrometry analysis and detection, and in particular relates to a laser-assisted glow discharge ionization device. Background technique
[0002] As an important optoelectronic material, high-purity materials are widely used in aerospace, microelectronics, information, infrared, solar energy and other industrial fields. For example: high-purity copper can be directly used as an additive element in the development of superalloys in aviation and space atom industries, and in the analysis of standard samples. It is the main material for preparing high-quality audio cables, liquid crystal display sputtering targets, and ion coatings. High-purity titanium is an important material for manufacturing aircraft, rockets, spacecraft, ships, telecommunications equipment and artificial bones. 6N (99.9999%) grade silicon is the main material for manufacturing solar cells, while the purity of semiconductor-grade polysilico...
Examples
Embodiment Construction
[0021] refer to figure 1 , figure 2, the present invention provides a laser-assisted glow discharge ionization device, including a laser light source 20, a mass spectrometer 37, a closed ionization chamber 19 and an ionization body located in the ionization chamber 19, the ionization body includes hollow copper The copper column holder 2 of the column 1 and the sample holder 7 equipped with the sample 5, the hollow copper column 1 is connected to the ground potential with the ionization chamber bottom plate 24 through a wire, and the sample 5 is introduced by the glow discharge voltage on the ionization chamber 19 The interface 27 is connected to the glow discharge power supply 26, and the voltage provided by the glow discharge power supply 26 is connected to the sample 5 through the glow discharge voltage introduction interface 27, and the copper column holder 2 and the sample holder 7 are arranged facing each other. The hollow copper column 1 is provided with a laser hole ...