Test circuit, integrated test circuit and test system for temperature sensors

Abstract

The application relates to a test circuit of a temperature sensor, an integrated test circuit and a test system. The test circuit comprises a power supply module connected with the temperature sensor and used for providing a first power supply voltage to the temperature sensor; and a processing module connected with the power supply module and the temperature sensor respectively, used for controlling the power supply module to provide the first power supply voltage to the temperature sensor under the action of a second power supply voltage provided by the power supply module, and collecting a working parameter of the temperature sensor in a working state under the action of the first power supply voltage, wherein the working parameter at least comprises a power supply working voltage. The test circuit can acquire the electrical parameter of the temperature sensor in the working state.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit technology, and in particular to a test circuit, integrated test circuit, and test system for a temperature sensor. Background Technology

[0002] With the rapid development of semiconductor integrated circuit technology, integrated temperature sensors have been designed to more accurately detect analog signals. An integrated temperature sensor integrates various units, including temperature-sensitive devices, signal amplification circuits, temperature compensation circuits, and reference power supply circuits, onto a semiconductor chip, making the sensor and integrated circuit a single unit. Because integrated temperature sensors are widely used in integrated circuit applications requiring high reliability, such as medical, military and aerospace, industrial, and automotive applications, higher demands are placed on the reliability of integrated digital temperature sensors. Scientific and reasonable board-level verification methods are needed to verify the stability and lifespan of integrated digital temperature sensors.

[0003] Currently, aging tests are used to test the operational stability and lifespan of monolithic integrated digital temperature sensors. The aging test involves applying a certain electrical stress to the integrated digital temperature sensor at a specific ambient temperature to induce early failure. After this initial stress, the electrical parameters of the sensor are tested to monitor its stability and lifespan. However, the aging test cannot monitor the electrical parameters of the integrated digital temperature sensor under dynamic operating conditions. Summary of the Invention

[0004] Therefore, it is necessary to provide a test circuit, integrated test circuit, and test system for a temperature sensor capable of detecting the electrical parameters of a single-chip integrated digital temperature sensor under dynamic operating conditions, in order to address the aforementioned technical problems.

[0005] In a first aspect, this application provides a test circuit for a temperature sensor. The test circuit includes:

[0006] A power module, connected to the temperature sensor, is used to provide a first power supply voltage to the temperature sensor;

[0007] The processing module is connected to the power supply module and the temperature sensor respectively. It is used to control the power supply module to provide the first power supply voltage to the temperature sensor under the action of the second power supply voltage provided by the power supply module, and to collect the operating parameters of the temperature sensor under the action of the first power supply voltage. The operating parameters include at least the power supply operating voltage.

[0008] In one embodiment, the power module includes:

[0009] A programmable power supply module is connected to the processing module and the temperature sensor respectively, and is used to generate the first power supply voltage based on the reference voltage output by the processing module, and to provide the first power supply voltage to the temperature sensor;

[0010] A power supply regulator module, connected to the processing module, is used to provide the second power supply voltage to the processing module.

[0011] In one embodiment, the programmable power supply module includes: a first operational amplifier, a second operational amplifier, and a first transistor, wherein,

[0012] The positive input terminal of the first operational amplifier is connected to the processing module;

[0013] The emitter of the first transistor is connected to the output terminal of the first operational amplifier, the collector of the first transistor is connected to the inverting input terminal of the first operational amplifier, and the base of the first transistor is connected to the output terminal and the inverting input terminal of the second operational amplifier, respectively.

[0014] The positive input terminal of the second operational amplifier is connected to the temperature sensor.

[0015] In one embodiment, the processing module includes:

[0016] The processing unit is used to obtain a preset voltage value under the action of the second power supply voltage provided by the power supply regulator module;

[0017] A digital-to-analog conversion unit is connected to the processing unit, the power supply regulator module, and the programmable power supply module, respectively. It is used to generate the reference voltage by performing digital-to-analog conversion based on the preset voltage value obtained by the processing unit under the action of the second power supply voltage provided by the power supply regulator module, and to provide the reference voltage to the programmable power supply module so as to control the programmable power supply module to provide the first power supply voltage to the temperature sensor.

[0018] The analog-to-digital conversion unit is connected to the power supply regulator module, the temperature sensor, and the processing unit, respectively. It is used to collect the operating parameters of the temperature sensor under the first power supply voltage under the second power supply voltage provided by the power supply regulator module, convert the operating parameters into digital parameters, and transmit the digital parameters to the processing unit.

[0019] In one embodiment, the second power supply voltage includes a first sub-power supply voltage and a second sub-power supply voltage;

[0020] The power supply regulator module includes:

[0021] The first voltage regulator unit is used to receive external voltage, convert the external voltage into the first sub-supply voltage, and output it to the digital-to-analog converter unit and the analog-to-digital converter unit respectively.

[0022] The second voltage regulator unit is connected to the first voltage regulator unit and the processing unit respectively, and is used to convert the first sub-supply voltage into the second sub-supply voltage and output it to the processing unit and the analog-to-digital converter respectively.

[0023] In one embodiment, the test circuit further includes:

[0024] The current sampling module is connected to the programmable power supply module and the temperature sensor, respectively.

[0025] The processing module is connected to the current sampling module and the voltage input terminal of the temperature sensor, respectively, and is used to collect the power supply operating voltage received at the voltage input terminal of the temperature sensor and to obtain the power supply operating current of the temperature sensor from the current sampling module.

[0026] In one embodiment, the test circuit further includes:

[0027] The level conversion module is connected to both the processing module and the temperature sensor, and is used to step down the power supply voltage of the temperature sensor during the voltage pull-off test.

[0028] In one embodiment, the test circuit further includes:

[0029] The interface module is connected to the power supply module and the processing module respectively, and is used to step down the output operating parameters under the action of the second power supply voltage provided by the power supply module.

[0030] Secondly, this application provides an integrated test circuit. The integrated test circuit includes a test circuit for a temperature sensor as described in any embodiment of this application, a temperature sensor, and a substrate, wherein the test circuit for the temperature sensor and the temperature sensor are disposed on the substrate.

[0031] Thirdly, this application provides a testing system. The testing system includes an integrated testing circuit and a temperature measurement module as described in the embodiments of this application, wherein...

[0032] The temperature measurement module is used to collect the ambient temperature of the integrated test circuit;

[0033] The processing module is connected to the temperature measurement module and is used to obtain the sampling accuracy value of the temperature sensor based on the ambient temperature and the temperature information collected by the temperature sensor.

[0034] The aforementioned temperature sensor test circuit, integrated test circuit, and test system provide a second power supply voltage to the processing module via the power supply module. After the processing module is powered on, it controls the power supply module to provide a first power supply voltage to the sensor, thereby enabling the temperature sensor to enter the working state and collect external temperature. The processing module then collects the operating parameters of the temperature sensor in the working state to facilitate monitoring the electrical parameters of the temperature sensor in the dynamic working state. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a block diagram of the test circuit for the temperature sensor in the first embodiment;

[0037] Figure 2 This is a block diagram of the test circuit for the temperature sensor in the second embodiment;

[0038] Figure 3 This is a circuit schematic diagram of a programmable power supply module in one embodiment;

[0039] Figure 4 This is a block diagram of the test circuit for the temperature sensor in the third embodiment;

[0040] Figure 5 This is a circuit schematic diagram of the first voltage regulator unit in one embodiment;

[0041] Figure 6 This is a circuit diagram of the second voltage regulator unit in one embodiment;

[0042] Figure 7 This is a circuit schematic of a digital-to-analog converter unit in one embodiment;

[0043] Figure 8 This is a circuit schematic of an analog-to-digital conversion unit in one embodiment;

[0044] Figure 9 This is a block diagram of the test circuit for the temperature sensor in the fourth embodiment;

[0045] Figure 10 This is a circuit schematic of a current sampling module in one embodiment;

[0046] Figure 11 This is a block diagram of the test circuit for the temperature sensor in the fifth embodiment;

[0047] Figure 12 This is a circuit schematic diagram of the interface module in one embodiment;

[0048] Figure 13 This is a schematic diagram of the integrated test circuit in one embodiment;

[0049] Figure 14 This is a block diagram of the test system in one embodiment.

[0050] Explanation of reference numerals in the attached figures:

[0051] 10. Test circuit; 11. Power supply module; 111. Programmable power supply module; 1111. First operational amplifier; 1112. Second operational amplifier; 1113. First transistor; 112. Power supply voltage regulator module; 1121. First voltage regulator unit; 1122. Second voltage regulator unit; 12. Processing module; 121. Processing unit; 122. Digital-to-analog converter unit; 123. Analog-to-digital converter unit; 13. Current sampling module; 14. Level conversion module; 15. Interface module; 20. Temperature sensor; 30. Integrated test circuit; 40. Test system; 41. Temperature measurement module. Detailed Implementation

[0052] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0053] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application.

[0054] It is understood that the terms "first," "second," etc., used herein may be used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another. For example, without departing from the scope of this application, a first resistor may be referred to as a second resistor, and similarly, a second resistor may be referred to as a first resistor. Both the first resistor and the second resistor are resistors, but they are not the same resistor.

[0055] It is understood that the term "connection" in the following embodiments should be understood as "electrical connection," "communication connection," etc., if the connected circuits, modules, units, etc., have electrical signal or data transmission with each other.

[0056] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0057] In one embodiment, such as Figure 1 As shown, a test circuit 10 for a temperature sensor 20 is provided. The test circuit 10 includes a power supply module 11 and a processing module 12. The power supply module 11 is connected to the temperature sensor 20 and is used to provide a first power supply voltage to the temperature sensor 20. The first power supply voltage is the voltage value provided by the power supply module 11 to the temperature sensor 20.

[0058] The processing module 12 is connected to the power supply module 11 and the temperature sensor 20, respectively. Under the influence of the second power supply voltage provided by the power supply module 11, it controls the power supply module 11 to provide a first power supply voltage to the temperature sensor 20, and collects the operating parameters of the temperature sensor 20 under the first power supply voltage. The operating parameters include at least the power supply voltage. The second power supply voltage is the voltage value provided by the power supply module 11 to the processing module 12. The operating parameters are parameters that characterize the working process of the temperature sensor 20 under its operating state, including the power supply current, the power supply voltage, and temperature information. The temperature information is the ambient temperature value collected by the temperature sensor 20 under its operating state.

[0059] The test circuit 10 of the temperature sensor 20 provides a second power supply voltage to the processing module 12 through the power supply module 11. After the processing module 12 is powered on, it controls the power supply module 11 to provide a first power supply voltage to the sensor, so that the temperature sensor 20 enters the working state and collects the external temperature. The processing module 12 collects the working parameters of the temperature sensor 20 in the working state, so as to monitor the electrical parameters of the temperature sensor 20 in the dynamic working state.

[0060] In one embodiment, such as Figure 2 The power supply module 11 includes a programmable power supply module 111 and a power regulator module 112. The programmable power supply module 111 is connected to the processing module 12 and the temperature sensor 20, respectively, and is used to generate a first supply voltage based on the reference voltage output by the processing module 12, and provide the first supply voltage to the temperature sensor 20. The circuit diagram of the programmable power supply module 111 is shown below. Figure 3As shown, the programmable power supply module 111 includes a first operational amplifier 1111, a second operational amplifier 1112, and a first transistor 1113. The positive input terminal of the first operational amplifier 1111 is connected to the processing module 12; the emitter of the first transistor 1113 is connected to the output terminal of the first operational amplifier 1111; the collector of the first transistor 1113 is connected to the inverting input terminal of the first operational amplifier 1111; and the base of the first transistor 1113 is connected to both the output terminal and the inverting input terminal of the second operational amplifier 1112. The positive input terminal of the second operational amplifier 1112 is connected to the temperature sensor 20. The first operational amplifier 1111 is used as a power operational amplifier, capable of outputting or absorbing a large current, and then outputting a voltage three times the programmable reference voltage. The second operational amplifier 1112 is used for process protection control of the output current; when the current exceeds the overcurrent protection value, it outputs a constant current; otherwise, it outputs a constant voltage.

[0061] The power supply regulator module 112 is connected to the processing module 12 and is used to provide a second power supply voltage to the processing module 12. The programmable power supply module 111 is a power supply whose output voltage and output current can be set by external control, and can be regulated, regulated, or regulated / regulated.

[0062] The test circuit 10 of the temperature sensor 20 is powered by the power supply module 11 to the processing module 12, so that the reference voltage output by the processing module 12 controls the programmable power supply module 111 to output a stable first power supply voltage to the temperature sensor 20. The temperature sensor 20 enters the working state according to the first power supply and starts to collect the ambient temperature value. Then, the processing module 12 collects the working parameters of the temperature sensor 20 to obtain the electrical parameters of the temperature sensor 20 under dynamic operation.

[0063] In one embodiment, such as Figure 4 The processing module 12 includes a processing unit 121, a digital-to-analog converter (DAC) unit 122, and an analog-to-digital converter (ADC) unit 123. The power supply regulator module 112 includes a first regulator unit 1121 and a second regulator unit 1122. The first regulator unit 1121 receives external voltage, converts it into a first sub-supply voltage, and outputs it to the DAC unit 122 and the ADC unit 123 respectively. The second regulator unit 1122 converts the first sub-supply voltage into a second sub-supply voltage and outputs it to the processing unit 121 and the ADC unit 123 respectively. The circuit diagram of the power supply regulator module 112 is shown below. Figure 5 and Figure 6As shown, the first voltage regulator unit 1121 includes a DC-DC module, which can be a K7805-2000L, capable of withstanding an input voltage of 7V to 36V, stabilizing a 5V voltage output, and supplying a maximum current of 2A; the second voltage regulator unit 1122 includes a voltage regulator chip, which can be an AMS1117-3.3, capable of withstanding a maximum input voltage of 18V and an output current of 800mA.

[0064] The processing unit 121 is used to acquire a preset voltage value under the action of the first sub-supply voltage provided by the power supply regulator module 112. The processing unit 121 can be a processor, connected to the temperature sensor 20 via a bus. A program is written on the lower-level computer to enable the temperature sensor 20 to be configured and dynamically operated after power-on, and to read the sampling temperature of the single-chip integrated digital temperature sensor 20. The processing unit 121 is also connected to the upper-level computer for data interaction and to acquire the preset voltage value set by the upper-level computer.

[0065] The analog-to-digital converter (ADC) 122 is connected to the processing unit 121, the power supply regulator module 112, and the programmable power supply module 111, respectively. Under the influence of the first sub-supply voltage provided by the power supply regulator module 112, it performs analog-to-digital conversion based on a preset voltage value obtained by the processing unit 121 to generate a reference voltage, and provides this reference voltage to the programmable power supply module 111 to control the programmable power supply module 111 to provide the first supply voltage to the temperature sensor 20. The ADC 122 includes an analog-to-digital converter, and its circuit diagram is shown below. Figure 7 A digital-to-analog converter (DAC) converts a preset digital signal voltage value into an analog reference voltage and outputs it. VOUTA is used as the reference voltage for programmable voltage, and VOUTB is used as the reference voltage for overcurrent protection. The DAC can be a DAC7614UB, with an input reference voltage of 2.5V, four analog output channels, and a 12-bit accuracy.

[0066] The analog-to-digital converter 123 is connected to the power supply regulator module 112, the temperature sensor 20, and the processing unit 121, respectively. Under the influence of the first and second sub-supply voltages provided by the power supply regulator module 112, it collects the operating parameters of the temperature sensor 20 under the first supply voltage, converts the operating parameters from analog to digital, and transmits the digital parameters to the processing unit 121. The circuit diagram of the analog-to-digital converter 123 is shown below. Figure 8The analog-to-digital converter (ADC) 123 includes an ADC, which can be an ADS1256IDB, that converts analog signals into 24-bit digital signals. Its maximum input analog signal voltage is 5V, and it has 8 input analog channels with a precision of up to 24 bits. A first sub-supply voltage provides power to the analog section of the ADC 123, and a second sub-supply voltage provides power to the digital section of the ADC 123.

[0067] The test circuit 10 of the temperature sensor 20 obtains the preset voltage value set by the host computer through the processing unit 121, and then converts the preset voltage value into an analog signal reference voltage through the digital-to-analog converter 122. This reference voltage is then used to control the programmable power supply module 111 to output the first power supply to the temperature sensor 20, causing the temperature sensor 20 to enter the working state. The analog-to-digital converter 123 then collects the operating parameters of the temperature sensor 20 under working conditions to obtain the electrical parameters of the temperature sensor 20 during dynamic operation.

[0068] In one embodiment, such as Figure 9 The test circuit 10 also includes a current sampling module 13. The current sampling module 13 is connected to the programmable power supply module 111 and the temperature sensor 20, respectively. The circuit diagram showing the connection between the current sampling module 13 and the programmable power supply module 111 is shown below. Figure 10 As shown, the current sampling module 13 includes a sampling resistor 2R and a sampling chip. The sampling chip can be a MAX4080TASA with an amplification factor of 20. Utilizing Ohm's law, the sampling resistor is connected in series with the power supply circuit of the temperature sensor 20 to amplify the current signal across the sampling resistor. This signal is then converted into a voltage signal by the sampling chip and transmitted to the analog-to-digital converter unit 123 for analog-to-digital conversion to obtain the operating current. The fifth port of the sampling chip is connected to the positive input of the second operational amplifier 1112 for current feedback to achieve overcurrent protection.

[0069] The processing module 12 is connected to the current sampling module 13 and the voltage input terminal of the temperature sensor 20, respectively, and is used to collect the power supply operating voltage received at the voltage input terminal of the temperature sensor 20 and to obtain the power supply operating current of the temperature sensor 20 from the current sampling module 13.

[0070] The test circuit 10 of the temperature sensor 20 is connected to the voltage input terminal of the temperature sensor 20 through the processing module 12 to obtain the power supply operating voltage of the temperature sensor 20. Then, the power supply operating current of the temperature sensor 20 is collected through the current sampling module 13, amplified and converted, and transmitted to the processing module 12. The processing module 12 then performs analog-to-digital conversion on the power supply operating voltage and power supply operating current to obtain the power supply voltage value and power supply current value of the temperature sensor 20.

[0071] In one embodiment, such as Figure 11 The test circuit 10 also includes a level conversion module 14 and an interface module 15. The level conversion module 14 is connected to the processing module 12 and the temperature sensor 20, respectively, and is used to reduce the power supply voltage of the temperature sensor 20 during the voltage pull-off test. The voltage pull-off test is used to test the changes in the performance parameters of the equipment under normal and abnormal operating conditions to detect potential defects in the equipment. During the voltage pull-off test, the voltage at the connection interface between the temperature sensor 20 and the processing module 12 is higher than the interface voltage of the processing module 12. Since both the temperature sensor 20 and the processing module 12 have internal temperature processing units 121, communication between the two processing units 121 can cause signal transmission errors if they operate under mismatched voltage levels. If the voltage difference is large, it may even damage the chip. Therefore, the level conversion module 14 is needed to ensure that the voltage levels at the connection interface between the temperature sensor 20 and the processing module 12 are equal.

[0072] Interface module 15 is connected to processing module 12 via RS232 serial port. It is used to step down the output operating parameters under the second power supply voltage provided by power module 11. Interface module 15 includes a communication control chip and a level conversion chip. The communication control chip can be an ADM3251EARWA, which integrates a DC-DC isolated power supply module 11 to electrically isolate the connection between test circuit 10 and the computer, thereby improving the stability of serial communication and preventing electrical noise interference between the computer and test circuit 10. The level conversion chip can be an ADUM1201. Since the digital level of the communication control chip is higher than the digital level of the ARM I / O port, the level conversion chip can make the levels equal for communication stability.

[0073] The test circuit 10 of the temperature sensor 20 is powered by the power module 11 to the interface module 15 with the second power supply voltage, so that the processing module 12 can achieve stable communication with the host computer through the interface module 15. The processing module 12 can then control the power module 11 to provide the first power supply voltage to the sensor according to the communication command of the host computer, so that the temperature sensor 20 enters the working state and collects the external temperature. The processing module 12 collects the working parameters of the temperature sensor 20 in the working state, so as to monitor the electrical parameters of the temperature sensor 20 in the dynamic working state.

[0074] like Figure 13 As shown, in one embodiment, an integrated test circuit 30 is provided, including a test circuit 10 for a temperature sensor 20 as described in any of the above embodiments, a temperature sensor 20, and a substrate, wherein the test circuit 10 and the temperature sensor 20 are disposed on the substrate.

[0075] The integrated test circuit 30 provides a second power supply voltage to the processing module 12 through the power supply module 11. The processing module 12 obtains instructions from the host computer through the interface module 15. According to the instructions, the processing module 12 controls the power supply module 11 to provide a first power supply voltage to the sensor, thereby enabling the temperature sensor 20 to enter the working state and collect the external temperature. Then, the current sampling module 13 collects the power supply current of the temperature sensor 20, and the processing module 12 collects the power supply voltage of the temperature sensor 20, so as to monitor the electrical parameters of the temperature sensor 20 under dynamic working state through the test circuit 10.

[0076] like Figure 14 As shown, in one embodiment, a test system 40 is provided. The test system 40 includes an integrated test circuit 30 as described in the above embodiment and a temperature measurement module 41. The temperature measurement module 41 is used to collect the ambient temperature of the integrated test circuit 30. The processing module 12 is connected to the temperature measurement module 41 and is used to obtain the sampling accuracy value of the temperature sensor 20 based on the ambient temperature and the temperature information collected by the temperature sensor 20.

[0077] Optionally, the test system 40 also includes a display module connected to the processing module 12 for displaying the operating parameters of the temperature sensor 20.

[0078] In the aforementioned test system 40, the integrated test circuit 30 is placed in a high-precision constant temperature bath for testing, providing a high-precision temperature environment for the integrated test circuit 30. The power supply module 11 then provides a second power supply voltage to the processing module 12. After the processing module 12 is powered on, it controls the power supply module 11 to provide a first power supply voltage to the sensor, thereby enabling the temperature sensor 20 to enter the working state and collect external temperature data. The processing module 12 then collects the operating current, operating voltage, and temperature information of the temperature sensor 20 during its working state. The temperature measurement module 41 collects the ambient temperature of the integrated test circuit 30. The processing module 12 then obtains the sampling accuracy value of the temperature sensor 20 based on the temperature information and ambient temperature. Finally, the display module displays the operating parameters of the temperature sensor 20 to obtain the electrical parameters of the temperature sensor 20 under dynamic operating conditions.

[0079] In the description of this specification, references to terms such as "some embodiments," "other embodiments," and "ideal embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiments or examples.

[0080] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0081] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A test circuit for a temperature sensor, characterized in that, The test circuit includes: A power module, connected to the temperature sensor, is used to provide a first power supply voltage to the temperature sensor; The processing module is connected to the power module and the temperature sensor respectively, and is used to control the power module to provide the first power supply voltage to the temperature sensor under the action of the second power supply voltage provided by the power module, and to collect the working parameters of the temperature sensor under the action of the first power supply voltage, wherein the working parameters include at least the power supply working voltage. The power supply module includes a programmable power supply module and a power supply regulator module. The programmable power supply module is connected to the processing module and the temperature sensor, respectively, and is used to generate the first power supply voltage based on the reference voltage output by the processing module, and to provide the first power supply voltage to the temperature sensor. The power supply regulator module is connected to the processing module and is used to provide the second power supply voltage to the processing module. The programmable power supply module includes a first operational amplifier, a second operational amplifier, and a first transistor. The non-inverting input of the first operational amplifier is connected to the processing module; the emitter of the first transistor is connected to the output of the first operational amplifier, the collector of the first transistor is connected to the inverting input of the first operational amplifier, and the base of the first transistor is connected to both the output and inverting input of the second operational amplifier; the non-inverting input of the second operational amplifier is connected to a temperature sensor; the first operational amplifier is used for power operation; the second operational amplifier is used for process protection control of the output current. When the current exceeds the overcurrent protection value, it outputs in constant current mode; otherwise, the output is constant voltage.

2. The test circuit for the temperature sensor according to claim 1, characterized in that, The processing module includes: The processing unit is used to obtain a preset voltage value under the action of the second power supply voltage provided by the power supply regulator module; A digital-to-analog conversion unit is connected to the processing unit, the power supply regulator module, and the programmable power supply module, respectively. It is used to generate the reference voltage by performing digital-to-analog conversion based on the preset voltage value obtained by the processing unit under the action of the second power supply voltage provided by the power supply regulator module, and to provide the reference voltage to the programmable power supply module so as to control the programmable power supply module to provide the first power supply voltage to the temperature sensor. The analog-to-digital conversion unit is connected to the power supply regulator module, the temperature sensor, and the processing unit, respectively. It is used to collect the operating parameters of the temperature sensor under the first power supply voltage under the second power supply voltage provided by the power supply regulator module, convert the operating parameters into digital parameters, and transmit the digital parameters to the processing unit.

3. The test circuit for the temperature sensor according to claim 2, characterized in that, The second power supply voltage includes a first sub-power supply voltage and a second sub-power supply voltage; The power supply regulator module includes: The first voltage regulator unit is used to receive external voltage, convert the external voltage into the first sub-supply voltage, and output it to the digital-to-analog converter unit and the analog-to-digital converter unit respectively. The second voltage regulator unit is connected to the first voltage regulator unit, the processing unit, and the analog-to-digital converter unit, respectively, and is used to convert the first sub-supply voltage into the second sub-supply voltage and output it to the processing unit and the analog-to-digital converter unit, respectively.

4. The test circuit for the temperature sensor according to claim 1, characterized in that, The test circuit also includes: The current sampling module is connected to the programmable power supply module and the temperature sensor, respectively. The processing module is connected to the current sampling module and the voltage input terminal of the temperature sensor, respectively, and is used to collect the power supply operating voltage received at the voltage input terminal of the temperature sensor and to obtain the power supply operating current of the temperature sensor according to the current sampling module.

5. The test circuit for the temperature sensor according to claim 1, characterized in that, The test circuit also includes: The level conversion module is connected to both the processing module and the temperature sensor, and is used to step down the power supply voltage of the temperature sensor during the voltage pull-off test.

6. The test circuit for the temperature sensor according to claim 1, characterized in that, The test circuit also includes: The interface module is connected to the power supply module and the processing module respectively, and is used to step down the output operating parameters under the action of the second power supply voltage provided by the power supply module.

7. An integrated test circuit, characterized in that, include: The test circuit, temperature sensor, and substrate of the temperature sensor as described in any one of claims 1-6, wherein the test circuit and the temperature sensor are disposed on the substrate.

8. A testing system, characterized in that, include: The integrated test circuit and temperature measurement module as described in claim 7, wherein, The temperature measurement module is used to collect the ambient temperature of the integrated test circuit; The processing module is connected to the temperature measurement module and is used to obtain the sampling accuracy value of the temperature sensor based on the ambient temperature and the temperature information collected by the temperature sensor.

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